CN102205940A - Bicrystal electrothermal actuator for MEMS (Micro-electromechanical System) - Google Patents
Bicrystal electrothermal actuator for MEMS (Micro-electromechanical System) Download PDFInfo
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- CN102205940A CN102205940A CN2011101032862A CN201110103286A CN102205940A CN 102205940 A CN102205940 A CN 102205940A CN 2011101032862 A CN2011101032862 A CN 2011101032862A CN 201110103286 A CN201110103286 A CN 201110103286A CN 102205940 A CN102205940 A CN 102205940A
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- 238000005485 electric heating Methods 0.000 claims abstract description 54
- 239000000463 material Substances 0.000 claims abstract description 25
- 238000005516 engineering process Methods 0.000 claims abstract description 15
- 238000001704 evaporation Methods 0.000 claims abstract description 9
- 230000008020 evaporation Effects 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims abstract description 7
- 230000008569 process Effects 0.000 claims abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 18
- 229920005591 polysilicon Polymers 0.000 claims description 18
- 239000004411 aluminium Substances 0.000 claims description 17
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 238000003475 lamination Methods 0.000 claims description 11
- 238000002161 passivation Methods 0.000 claims description 11
- 238000001259 photo etching Methods 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 230000004888 barrier function Effects 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000001459 lithography Methods 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 238000010301 surface-oxidation reaction Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000003672 processing method Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract description 2
- 238000000206 photolithography Methods 0.000 abstract description 2
- 230000004044 response Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 241000446313 Lamella Species 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
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- 238000005265 energy consumption Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
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Abstract
本发明涉及的是一种在通电状态下工作的双金属电热致动器，具体的说是电热致动器由主体三层材料构成，上下两层热膨胀系数差异较大的材料和一种夹在热膨胀系数较大材料中间的电加热层材料，为了配合MEMS加工工艺，并且提高结构效率，本发明最终由八层材料构成，所用到的加工工艺包括淀积、光刻、蒸镀/溅射、掺杂、切割。本发明工作过程是通电使电加热层产生焦耳热使双金属电热致动器在上下两层材料的热膨胀系数之差的作用下产生片外的翘曲变形，以此达到致动目的。本发明是一种在恶劣环境下可反复利用的、低功耗的、快速响应的，变形较大的电热致动器。
The present invention relates to a bimetallic electrothermal actuator that works in the energized state. Specifically, the electrothermal actuator is composed of three layers of materials in the main body, two layers of materials with large differences in thermal expansion coefficient and a sandwiched The electric heating layer material in the middle of the material with a large thermal expansion coefficient, in order to cooperate with the MEMS processing technology and improve the structural efficiency, the present invention is finally composed of eight layers of materials, and the processing technology used includes deposition, photolithography, evaporation/sputtering, Doping, cutting. The working process of the present invention is to energize the electric heating layer to generate Joule heat so that the bimetallic electrothermal actuator produces warping deformation outside the sheet under the action of the difference between the thermal expansion coefficients of the upper and lower layers of materials, so as to achieve the purpose of actuation. The invention is a reusable electrothermal actuator with low power consumption, fast response and large deformation under harsh environment.
Description
Technical field:
What the present invention relates to is a kind of bimetallic electric heating actuator of working under "on" position, the processing of a kind of specifically employing MEMS (MEMS) processing technology, the beam type structure of forming by the different material of the two-layer coefficient of expansion, when energising, electric heating layer produces Joule heat, thereby making bimetallic actuator produce the outer buckling deformation of sheet, is a kind of actuator that recycle, low-power consumption, that respond fast.
Background technology:
Along with the continuous development of society and and the continual renovation of technology, people improve constantly for the requirement of product, this makes that reducing its cost when product function is preeminent becomes the conflicting requirement that people must face.One of method that solves this difficult problem is exactly to adopt MEMS (MEMS, Micro Electromechanical System).It makes system and product develop towards miniaturization, intellectuality and integrated direction, can predict: MEMS can bring another time technological revolution to human society, it will exert far reaching influence to science and technology, the mode of production and the human being's production quality of 21 century, is to be related to national science and technology development, national defense safety and a key technology of prosperous economy.
Micro-actuator had obtained paying attention to widely and constantly development as an important branch of MEMS device in recent years.The micro element of various different active principle emerges in an endless stream, and in numerous active principle, electromagnetism and piezoelectric element have high energy density and be suitable for high frequency, stepping control, but control system is big than complexity and energy consumption, and manufacturing cost is big, and element stability is poor; Static drives simple the actuating apart from being restricted; The destruction that the problem that supersonic speed activates is then mainly brought in mesomerism; Because component size dwindles, dimensional effect make mechanical strain that thermal expansion caused become very considerable and active force big; Developed a kind of electric heating actuator that utilizes Joule heat to produce buckling deformation thus, characteristics such as it has, and distortion is big, low-power consumption, reaction are fast.
Summary of the invention:
The purpose of this invention is to provide a kind of based on MEMS (MEMS) body processing and surface processing technique, the distortion of working under "on" position is big, power consumption is little, swift bimetallic electric heating actuator.
The object of the present invention is achieved like this: the electric heating actuator is made of the main body trilaminate material, the material that two-layer up and down thermal expansion coefficient difference is bigger and a kind of middle electric heating layer material of the big material of thermal coefficient of expansion that is clipped in.In conjunction with MEMS technology, and further raise the efficiency, so the less bigger metal aluminium lamination-silicon nitride dielectric layer-doping of undoped polysilicon-thermal coefficient of expansion of passivation layer-thermal coefficient of expansion of actuator deposit-deposit successively-evaporation/sputter-deposit-deposit from bottom to top and doping-deposit-evaporation/sputter makes the bigger metal aluminium lamination of polysilicon layer-silicon nitride dielectric layer-thermal coefficient of expansion of its resistance decreasing.It is characterized in that: a kind of under the energising situation electric heating layer produce Joule heat, the overall structure that Joule heat is formed up and down two-layer materials having different thermal expansion coefficient produces the electric heating actuator of buckling deformation.At silicon chip upper surface oxidation passivation layer, deposit polysilicon on passivation layer then, evaporation/splash-proofing sputtering metal aluminium, the deposit silicon nitride insulating barrier, the deposit polysilicon layer also mixes, and the polysilicon chip after mixing is carried out photoetching form required form, deposition insulating layer silicon nitride on this layer polysilicon layer again, cut into required figure together with substrate with above six layers, again second half metal aluminium lamination of evaporation/sputter and make the shape of this layer by lithography.Finish above institute and the bottom substrate silicon layer bear the photoresist photoetching after in steps, remove the silica-based lamella of part actuator bottom, the formation required form.The present invention can also comprise some architectural features like this:
1, the base material of described electric heating actuator is silicon-based semiconductor material＜100〉or silicon-based semiconductor material＜110;
2, the bigger material of thermal coefficient of expansion can be that aluminium also can be MEMS common metal materials such as copper or gold in the described electric heating actuator;
3, the thermal coefficient of expansion materials with smaller can be that polysilicon also can be silicon or silica in the described electric heating actuator;
MEMS (MEMS) processing technology uses technology such as photoetching, etching and chemical vapour deposition (CVD) to have a clear superiority on the micro-structural of making micro-system in batches.The present invention passes through the electric heating actuator material is selected, and the design of structure manufacturing process can make the electric heating actuator respond the certain buckling deformation of generation fast by applying external voltage, reaches the actuating purpose.This structural entity thickness less than the 200um surface size less than 1 * 1mm
2The electric heating actuator of making by the MEMS processes can be integrated on same silicon base simultaneously, to reach the purpose of the system integration.The major advantage of this kind actuator can be summed up as:
1. electric heating actuator power consumption is very little
2. the electric heating actuator response is fast
3. realize the sheet outer displacement
4. distortion is bigger, and actuation force is bigger
5. simple in structure, can be repeatedly used
6. can be used for the optical path signal blocking and wait other occasions
7. avoid signal voltage to disturb
8. can under the very low state of ambient temperature, work
The difference that the output displacement of electric heating actuator can be selected with material, the variation of overall dimensions and changing is so can adjust flexibly at needs when the MEMS entire system is established.
Description of drawings:
Fig. 1, bimetallic electric heating actuator structure graphics;
Fig. 2, electric heating layer structure three-dimensional figure;
Specific embodiments:
For example the present invention is done more detailed description below in conjunction with accompanying drawing: in conjunction with Fig. 1,2, the composition of the electric heating actuator embodiment among the present invention comprises polysilicon (6), the insulating passivation layer silicon nitride (7) of electric heating layer upper surface, the metallic aluminium (8) after insulating passivation layer silicon nitride (5), the electric heating layer of the lower surface of silicon base (1), silicon dioxide passivation layer (2), non-impurity-doped polysilicon (3), metallic aluminium (4), electric heating layer promptly mix.At first in silicon chip＜100 of twin polishing〉go up growth silicon dioxide passivation layer (2), purpose is the corrosion that stops in the subsequent step, wherein the oxidation furnace temperature is 1150 ℃, 95～97 ℃ of bath temperatures, oxygen flow 1L/min; Next step is deposit one deck polysilicon on passivation layer, as that less one deck of thermal coefficient of expansion; The processing of the big one deck of the thermal coefficient of expansion that is about to begin then, also useful therebetween insulating barrier parcel electric heating layer.Evaporation on polysilicon/splash-proofing sputtering metal aluminium lamination; The silicon nitride dielectric layer of deposit electric heating layer lower surface on the metal aluminium lamination then; Deposit polysilicon once more afterwards, and, make it reach required resistance value to its doping, and utilize method to form the electric heating layer shape to polysilicon electric heating layer gluing, photoetching, reaction ion deep etching.Photolithography process: gluing〉preceding baking〉exposure〉develop post bake corrosion remove photoresist, so because mask and the photoetching of the consistent selection of the figure of formation positive photoetching rubber.Under the protection of undeveloped photoresist, utilize the mode of reaction ion deep etching to form required electric heating layer shape; The last silicon nitride dielectric layer of deposit electric heating layer upper surface once more; Above (1) (2) (3) (4) (5) (6) (7) layer is cut, and purpose is the rectangular strip that forms as shown in the figure; Last evaporation/sputter is half metal aluminium lamination in addition, and the means by photoetching, gluing, reaction ion deep etching are with the shape of its formation as figure again.Reserve a position and carry out the hole opening technology of standard, purpose is to apply voltage.At last bottom substrate silicon layer (1) is born the photoresist photoetching, remove the silica-based lamella of part actuator bottom.So just form final bimetallic electric heating actuator.
The course of work of electric heating actuator is as follows: under peacetime state; under the state that does not promptly power on; the electric heating actuator does not produce distortion; even interfering signal voltage is arranged, and also avoided voltage directly to be loaded into producing big calorimetric on the bigger metal level of thermal coefficient of expansion making its fusing also because there is the protection of insulating barrier silicon nitride to make it avoid producing abnormal working position.In the time of in working order, it is applied voltage, the electric heating layer polysilicon is in "on" position, produces Joule heat, because the official post total of the thermal coefficient of expansion of two layers of material is finished actuating because Joule heat responds the generation buckling deformation rapidly up and down.
Claims (9)
1. bimetallic electric heating actuator of under "on" position, working, comprise the trilaminate material that plays a major role, the metal aluminium lamination that thermal coefficient of expansion is bigger, the non-impurity-doped polysilicon layer that thermal coefficient of expansion is less, the polysilicon electric heating layer of the doping that resistance is less in order to raise the efficiency, cooperates the MEMS processing technology, have more the silicon nitride dielectric layer of silicon dioxide passivation layer and two-layer parcel electric heating layer again.Its assembly features is: at silicon chip upper surface oxidation passivation layer; Polysilicon electric heating layer (and making respective shapes by lithography), the deposit silicon nitride insulating barrier (electric heating layer is formed parcel) that half metal aluminium lamination, deposit silicon nitride insulating barrier, the deposit of deposit non-impurity-doped polysilicon layer, evaporation/sputter mixed on passivation layer then; To above which floor comprise silicon chip cutting, form required form; And then second half metal aluminium lamination of evaporation/sputter, make respective shapes by lithography; At the enterprising column criterion hole opening technology in the silicon nitride layer room of reserving; At last silicon chip is etched respective shapes.
2. bimetallic electric heating actuator according to claim 1 is characterized in that: used baseplate material is silicon-based semiconductor material＜100〉or silicon-based semiconductor material＜110.
3. bimetallic electric heating actuator according to claim 1 is characterized in that: electric heating layer forms specific U type by photoetching, improves the efficiency of heating surface, and electric heating layer is wrapped up by two-layer silicon nitride dielectric layer, with the insulation of metal aluminium lamination, and directly processes in the middle of aluminium lamination.
4. bimetallic electric heating actuator according to claim 1 is characterized in that: utilize the processing method of reaction ion deep etching, etch respective shapes from silica-based lower surface, be used for guaranteeing that bimetallic electric heating actuator has enough displacement spaces.
5. bimetallic electric heating actuator according to claim 1 is characterized in that: behind the last one deck metallic aluminium of photoetching layer, leave the room on the insulating barrier silicon nitride layer, will carry out the standard hole opening technology, as power input.
6. bimetallic electric heating actuator according to claim 1 is characterized in that: serving as the bigger metal aluminium lamination of thermal coefficient of expansion can also be replaced by current main-stream MEMS metal materials such as copper, gold.
7. bimetallic electric heating actuator according to claim 1 is characterized in that: serving as the less non-impurity-doped polysilicon layer of thermal coefficient of expansion can be by silicon, and current main-stream MEMS materials such as silica replace.
8. bimetallic electric heating actuator according to claim 1 is characterized in that: this bimetallic electric heating actuator sizes can be adjusted at needs when the MEMS overall system design flexibly.
9. bimetallic electric heating actuator according to claim 1 is characterized in that: this bimetallic electric heating actuator sizes can be adjusted at needs when the MEMS entire system is established flexibly.
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| CN105271099A (en) * | 2015-09-18 | 2016-01-27 | 北京理工大学 | MEMS (Micro Electro Mechanical Systems) electro-thermal actuator and manufacturing process thereof |
| CN105823370A (en) * | 2016-04-02 | 2016-08-03 | 浙江大学 | Thermally-driven MEMS passive vibration strengthened heat transfer device and heat transfer method |
| CN107940396A (en) * | 2017-11-29 | 2018-04-20 | 上海小糸车灯有限公司 | Light structures and automobile lamp for car light |
| CN113120847A (en) * | 2019-12-31 | 2021-07-16 | 无锡微奥科技有限公司 | Method for manufacturing MEMS driving arm by using SOI wafer |
| CN113120848A (en) * | 2019-12-31 | 2021-07-16 | 无锡微奥科技有限公司 | Method for manufacturing electrothermal MEMS driving arm and electrothermal MEMS driving arm |
| CN114699045A (en) * | 2022-03-24 | 2022-07-05 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
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Application publication date: 20111005 |