CN102200689B - Hybrid maglev gravity compensation apparatus - Google Patents
Hybrid maglev gravity compensation apparatus Download PDFInfo
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- CN102200689B CN102200689B CN 201010131076 CN201010131076A CN102200689B CN 102200689 B CN102200689 B CN 102200689B CN 201010131076 CN201010131076 CN 201010131076 CN 201010131076 A CN201010131076 A CN 201010131076A CN 102200689 B CN102200689 B CN 102200689B
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Abstract
The invention discloses a hybrid maglev gravity compensation apparatus comprising a static gravity compensation module. The static gravity compensation module comprises: an intermediate moving component, an exterior fixed component arranged around the intermediate moving component, and a bottom fixed component arranged below the intermediate moving component. The intermediate moving component is in a radially suspended state with the magnetic forces between the exterior fixed component and the intermediate moving component, such that a vertical guiding to the intermediate moving component is carried out. Static gravity compensating between the exterior fixed component and the intermediate moving component can be carried out with adjustable magnetic forces. According to the invention, non-contact displacement between relatively moving objects can be achieved with maglev forces. Meanwhile, gravity compensation, horizontal and vertical decoupling of a wafer supporting stage can be achieved.
Description
Technical field
The present invention relates to a kind of gravity-compensated device of mixed magnetic floating formula.
Background technology
Along with improving constantly of large scale integrated circuit device integrated level, the continuous enhancing of photolithography resolution, to the characteristic line breadth index request of litho machine also in continuous lifting.At present, litho machine has developed into the combination in Inner-world and the external world, wherein work stage, mask platform and three independent worlds of illuminator difference vibration damping and vibration isolation.
Take the fine motion module as example, it is most important how to make wafer-supporting platform avoid the interference of workpiece table system and basic framework vibration in exposure process, needs to adopt effective scheme carry out vibration damping and vibration isolation to wafer-supporting platform.The gravity compensator structure is exactly the new structure that grows up under this background, by the mode that active damping is combined with passive vibration isolation, finishes the leveling and focusing to wafer-supporting platform, makes the fine motion module form an independently built-in system.
Patent US6337484B1 and US6473161B2 disclose the gravity compensation apparatus of a kind of annular generator and piston push rod type.Be passed to fine motion wafer-supporting platform bottom by the constant voltage chamber pressure through piston push rod and keep its static weight, regulate in real time the vertical deviation of wafer-supporting platform by annular generator, and by flexible hinge piece, level to air supporting to the RX/RY/X/Y decoupling zero, the mover of vertical air supporting assisted gravity compensator is vertical without the friction displacement in stator.This scheme is strict to the control of constant voltage chamber air pressure, and is very high to the accuracy requirement of air pressure probe; In addition, air floating structure particularly side direction air supporting the thickness of the processing technology of part, air film is regulated and test all very complicated, the air turbulence that the pressurized air of discharging causes surrounding environment also needs to install additional in addition the air retracting device.
Traditional gravity compensator structure mainly adopts air constant voltage chamber that the static weight compensation is provided, and the voice coil motor Real Time Drive perhaps only adopts voice coil motor to finish leveling and focusing as the vertical actuator of wafer-supporting platform as the mode that dynamic gravity compensation combines.The former air floating structure has certain difficulty and may cause certain flow perturbation manufacturing and designing, and the motor feels hot certainly will affect too greatly the thermal property of wafer-supporting platform for the latter.
Summary of the invention
For the above-mentioned problems in the prior art, the present invention is based on the organization plan that workpiece table system is the separate internal world, adopt the gravity compensator of static vibration isolation and dynamic position compensation combination, and it is arranged to the even distribution type structure, jointly wafer-supporting platform is carried out leveling and focusing and vibration isolation.Technical scheme of the present invention is divided into two large modules with the gravity-compensated device structure, dynamically vertical position compensating module and static weight compensating module.The present invention proposes mainly for the static weight compensating module, and has the subsidiary function of horizontal decoupling zero and vertical guiding.Particularly, the invention provides a kind of gravity-compensated device of mixed magnetic floating formula, comprise the static weight compensating module, this static weight compensating module comprises: the intermediary movements parts; Be positioned at the external fixation component around the intermediary movements parts, between external fixation component and the intermediary movements parts by magneticaction so that the intermediary movements parts are in the radial suspension state, thereby middle moving component is carried out vertical guiding; Be positioned at the bottom fixed part below the intermediary movements parts, carry out the static weight compensation by adjustable magneticaction between bottom fixed part and the intermediary movements parts.
According to a preferred implementation of the present invention, the intermediary movements parts are cylindric, it comprises the barrel of being made by non-magnet material and is assemblied in the first column permanent magnet and the second column permanent magnet in the barrel that the second column permanent magnet is positioned at the below of the first column permanent magnet; External fixation component comprises the first annular permanent magnet and the first coil that arranges around this first annular permanent magnet; The bottom fixed part comprises the 3rd column permanent magnet and the second coil that arranges around the 3rd column permanent magnet, the 3rd column permanent magnet is arranged to and the second permanent magnet produces the acting force that mutually repels, the size of regulating the acting force of mutual repulsion by the size of current of controlling in the second coil.
Wherein, the position of the first annular permanent magnet can be relative with the position of the first column permanent magnet on vertical, and the size that can regulate acting force between the first annular permanent magnet and the first column permanent magnet by the size of current of controlling in the first coil.
According to another preferred implementation of the present invention, the intermediary movements parts are cylindric, it comprises the barrel of being made by non-magnet material and is assemblied in the 4th column permanent magnet in the barrel and second, third annular permanent magnet, second, third annular permanent magnet is separately positioned on the above and below of the 4th column permanent magnet, be provided with the magnetic field shielding spare of being made by the magnetic field shielding material between second, third annular permanent magnet and the 4th column permanent magnet, in the 3rd annular permanent magnet, also be provided with the 5th column permanent magnet; External fixation component comprises first, second superconductor and Fourth Ring shape permanent magnet and centers on the tertiary coil that this Fourth Ring shape permanent magnet arranges, the position of first, second superconductor and Fourth Ring shape permanent magnet is relative with the position of second, third annular permanent magnet and the 4th column permanent magnet respectively on vertical, and the size of regulating acting force between Fourth Ring shape permanent magnet and the 4th column permanent magnet by the size of current in the control tertiary coil; The bottom fixed part comprises the 3rd superconductor, and the 3rd superconductor is arranged to produce the acting force that mutually repels with the 5th permanent magnet.
Wherein, magnetic field shielding spare has certain thickness, so that the magnetic line of force of the magnetic line of force of second, third annular permanent magnet and the 5th column permanent magnet and the 4th column permanent magnet does not interfere with each other.
In addition, can further comprise level to the decoupling zero module according to gravity-compensated device of the present invention, this level comprises to the decoupling zero module: flexibly connect piece, have two-layer groove on it, form the flexible hinge structure that cross is split; Be installed on the 6th permanent magnet of flexible block bottom; The 4th superconductor below the 6th permanent magnet, the 4th superconductor and the 6th permanent magnet produce the acting force that mutually repels, flexibly connect the top that piece is suspended in the 4th superconductor thereby make, the 4th superconductor has the vacuum pore that is positioned at the center, regulate vertical gap by the vacuum pneumatic of regulating between the 6th permanent magnet and the 4th superconductor, thereby regulate the suspension stiffness between the 6th permanent magnet and the 4th superconductor.
Alternatively, level can comprise to the decoupling zero module: flexibly connect piece, have two-layer groove on it, form the flexible hinge structure that cross is split; Be installed on the 7th permanent magnet of flexible block bottom; The 8th permanent magnet below the 7th permanent magnet and the 4th coil that arranges around the 8th permanent magnet, the 8th permanent magnet and the 7th permanent magnet produce the acting force that mutually repels, flexibly connect the top that piece is suspended in the 8th permanent magnet thereby make, regulate suspension stiffness between the 7th permanent magnet and the 8th permanent magnet by controlling electric current in the 4th coil.
Preferably, also can further comprise according to gravity-compensated device of the present invention and the magnetic field shielding spare of the circumference outside that is positioned at gravity-compensated device or top, bottom leave certain air gap between other parts of magnetic field shielding spare and device.
According to technical scheme of the present invention, adopt magnetic suspension force, make the object of relative motion carry out non-contacting displacement, and realized the compensation of wafer-supporting platform static weight and level to, vertical decoupling zero.
Description of drawings
Fig. 1 shows the structural representation according to gravity-compensated device of the present invention;
Fig. 2 shows the synoptic diagram of vertical gravity compensation structure according to one preferred embodiment of the present invention;
Fig. 3 shows the synoptic diagram of the vertical gravity compensation structure of another preferred embodiment according to the present invention;
Fig. 4 shows according to one preferred embodiment of the present invention level to the synoptic diagram of decoupling-structure;
Fig. 5 shows the level of another preferred embodiment according to the present invention to the synoptic diagram of decoupling-structure;
The optimum position that Fig. 6 shows according to gravity-compensated device of the present invention distributes;
Fig. 7 shows to utilize and holds the chip architecture synoptic diagram according to gravity-compensated device of the present invention;
Fig. 8 a shows the magnetic shielding mode;
Fig. 8 b and Fig. 8 c are the magnetic shielding principle schematic.
Embodiment
Below, describe in detail according to a preferred embodiment of the invention by reference to the accompanying drawings.
As shown in Figure 1, link 102 is positioned over the below of fine motion wafer-supporting platform parts 101, the top component 103 common composition levels of link 102 and its below (X/Y to) decoupling zero parts; Intermediary movements parts 104 and external fixation component 105 form vertical guiding parts; Intermediary movements parts 104 and bottom fixed part 106 form static vertical gravity compensation parts.The common component movement part of decoupling zero parts and guiding parts, external fixation component 105 and bottom fixed part 106 are stationary part.When needs carry out the vertical deviation measurement to this gravity-compensated device, can adopt differential sensor---the stationary part 108 of sensor is installed on bottom fixed part 106 or the external fixation component 105, and the mover part 107 of sensor is installed on the bottom of fine motion wafer-supporting platform parts 101.
With reference to Fig. 2, it shows vertical gravity compensation structure according to one preferred embodiment of the present invention.Wall cylinder 201, the first column permanent magnet 202 and the second column permanent magnet 205 are the intermediary movements parts, and the first annular permanent magnet 203 and the first coil 204 are the outer, stationary parts, and the 3rd column permanent magnet 206 and the second coil 207 are the bottom stationary parts.Because of the magnet principle of same-sex repulsion, the second column permanent magnet 205 is subject to the repulsion Ft of the 3rd column permanent magnet 206 and produces static suspension, so can realize the static weight compensation to fine motion wafer-supporting platform parts 101.The 3rd column permanent magnet 206 placed around have the second coil 207, and when 207 energising of the second coil, the 3rd column permanent magnet 206 and the second coil 207 form electromagnet, and the large I in its magnetic field is regulated change by size of current.When the gravity of fine motion wafer-supporting platform parts 101 changes to some extent, can adopt the mode that changes size of current in the second coil 207 to carry out the static weight compensation of different loads, and not need to change this device.The first annular permanent magnet 203 and the first column permanent magnet 202 also are set to two like magnetic poles repel each other, the first column permanent magnet 202 and the second column permanent magnet 205 are installed in the barrel 201, when the second column permanent magnet 205 vertical deviation, radial suspension because the effect of repelling each other produces centripetal repulsion F1 and F2, occurs with barrel 201 in the first annular permanent magnet 203.Barrel 201 is because of the not with it contact of radial suspension effect of the first annular permanent magnet 203, thus realization nothing friction displacement, and the isolating exterior vibration.Energising can be regulated this suspension effect in the first coil 204, and barrel 201 is made by the non-magnet material that allows the magnetic line of force to penetrate.
Fig. 3 shows the vertical gravity compensation structure of another preferred embodiment according to the present invention.Wherein, the second annular permanent magnet 302a, the 3rd annular permanent magnet 302b, magnetic field shielding spare 304a and 304b, the 4th column permanent magnet 307a and the 5th column permanent magnet 307b are installed on and form the intermediary movements parts in the barrel 301.The first superconductor 303a, the second superconductor 303b, Fourth Ring shape permanent magnet 306 and tertiary coil 305 are the outer, stationary parts.The 3rd superconductor 308 is the bottom stationary parts.When the 3rd superconductor 308 was in superconducting state, the 5th column permanent magnet 307b produced and suspends (Meissner effect), can be used as the static weight compensation to fine motion wafer-supporting platform parts.Simultaneously, because of the two like magnetic poles repel each other between the 4th column permanent magnet 307a and the Fourth Ring shape permanent magnet 306 (N-N produces F1a and F1b) with there is a natural attraction between the sexes (S-N generation F2a and F2b), make the intermediary movements parts have trend to top offset, thereby strengthened the effect of above-mentioned static weight compensation.The radial suspension structural symmetry that the radial suspension structure that the first superconductor 303a and the second annular permanent magnet 302a form and the second superconductor 303b and the 3rd annular permanent magnet 302b form is distributed in Fourth Ring shape permanent magnet 306 and the 4th column permanent magnet 307a both sides, has formed the nothing friction guide effect of external fixation component to middle moving component.When passing into the electric current of variation in to tertiary coil 305, can produce different repulsion between Fourth Ring shape permanent magnet 306 and the 4th column permanent magnet 307a.Like this, the adjustable static compensation of the common composition of the 5th column permanent magnet 307b and the 3rd superconductor 308 and tertiary coil 305, Fourth Ring shape permanent magnet 306 and the 4th column permanent magnet 307a can satisfy different load requirements.Magnetic shield 304a and 304b are certain thickness permeability magnetic material, in the assurance between lower magnet the magnetic line of force do not interfere with each other.Barrel 301 is made by the non-magnet material that allows the magnetic line of force to penetrate, and external fixation component and intermediary movements parts just can produce acting force like this.The first superconductor 303a, the second superconductor 303b and the 3rd superconductor 308 can be by cooled with liquid nitrogen.
Fig. 4 shows according to one preferred embodiment of the present invention level to the synoptic diagram of decoupling-structure.With reference to Fig. 4, be installed on the 6th permanent magnet 402 that flexibly connects piece 401 belows and produce magnetic field, when the 4th superconductor 403 is in superconducting state, by Meissner effect as can be known, produce mutual expelling force Ft between the 6th permanent magnet 402 and the 4th superconductor 403, thereby can make to flexibly connect piece 401 and be suspended in the 4th superconductor 403 surfaces, have X/Y to degree of freedom so flexibly connect piece 401.The 4th superconductor 403 has vacuum pore 404, when the airport 404 of taking seriously connects vacuum pump, vacuum pneumatic between the 6th permanent magnet 402 and the 4th superconductor 403 can be regulated vertical gap, thereby regulates the suspension stiffness between the 6th permanent magnet 402 and the 4th superconductor 403.Flexibly connect on the right cylinder of piece 401 tops and have two-layer groove, form the flexible hinge structure that cross is split, make to flexibly connect piece 401 and have the RX/RY degree of freedom.The 4th superconductor 403 can be by cooled with liquid nitrogen.
Fig. 5 shows the level of another preferred embodiment according to the present invention to decoupling-structure.As shown in Figure 5, be installed on the 7th permanent magnet 502 and the 8th permanent magnet 503 two like magnetic poles repel each others that flexibly connect piece 501 belows, the 7th permanent magnet 502 is subject to upwards repulsion Ft so relative the 8th permanent magnet 503 suspends, and changes electric current in the 4th coil 504 and can regulate suspension stiffness between the 7th permanent magnet 502 and the 8th permanent magnet 503.Flexibly connect on the right cylinder of piece 501 tops and have two-layer groove, form the flexible hinge structure that cross is split, make to flexibly connect piece 501 and have the RX/RY degree of freedom.
The optimum position that Fig. 6 shows according to gravity-compensated device of the present invention distributes, and its working position under fine motion wafer-supporting platform parts 101 can singlely be arranged, three equilateral (or isosceles) arrange that four uniform.A plurality of when uniform, its geometric center must drop on the centroid position of fine motion wafer-supporting platform parts 101, and adopts differential mode to finish fine motion wafer-supporting platform RX/RY is regulated, and its barycenter is driven.But the flexible hinge structure of every group of gravity compensator top link is in a plurality of vertical self-adaptation adjustment when differential.
Fig. 7 shows to utilize and holds chip architecture synoptic diagram, three gravity-compensated devices with equilateral layout according to gravity-compensated device of the present invention.Wafer-supporting platform parts 101 are carrying silicon chip 701, and gravity-compensated device 601 body of work part is connected with wafer-supporting platform parts 101, and its bottom fixed part is connected with coarse motion parts 702.
Simultaneously, produce the normal operation of motor around the influence of magnetic field or sensor in order to prevent parts such as permanent magnet, electromagnet in the gravity-compensated device, can carry out magnetic field shielding to this device.Can be at circumference outside or top, bottom layout magnetic permeability about 4000～50000 or higher high permeability material such as the ferromagnetic material of magnetic buoyant weight force compensating device.Leave certain air gap between NULL and the gravity-compensated device parts, the preferred 5～10mm in gap; Also can adopt the multilayer high-permeability material, the interlayer of multilayer permeability magnetic material must have certain air gap, preferred 5～10mm, and the number of plies is more, and is better every the magnetic effect, the accumulative total relative permeability preferred 50000～200000 of multilayer NULL.Fig. 8 a show tubbiness every magnetosphere 802 and cover-plate type every the distributing position of magnetosphere 803 with respect to magnetic buoyant weight force compensating device 601.Among Fig. 8 b, the 8c magnetic buoyant weight force compensating device 601 is simplified to the magnet model, shows the trend that installs the magnetic line of force behind magnetosphere additional, explained every magnetic principle.
The mode that the present invention has introduced mixed magnetic floating solves horizontal decoupling zero and vertical guiding and position compensation, and gravity-compensated device according to the present invention has five degree of freedom, and relative motion is without friction.Adopt the floating replacement of magnetic air supporting, can avoid the high pressure air supporting part of the technical scheme among US6337484B1 and the US6473161B2 in the difficult problem of processing, control and context of detection.In addition, in horizontal decoupling zero module, introduce the array mode of superconductor-vacuum and permanent magnet-electromagnet, so that the floating gap of magnetic rigidity is adjustable.
Described in this instructions is preferred specific embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art all should be within the scope of the present invention that defines such as claim under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (10)
1. the gravity-compensated device of a mixed magnetic floating formula comprises the static weight compensating module, it is characterized in that, described static weight compensating module comprises:
The intermediary movements parts;
Be positioned at described intermediary movements parts external fixation component on every side, between described external fixation component and the described intermediary movements parts by magneticaction so that described intermediary movements parts are in the radial suspension state, thereby described intermediary movements parts are carried out vertical guiding;
Be positioned at the bottom fixed part below the described intermediary movements parts, carry out the static weight compensation by adjustable magneticaction between described bottom fixed part and the described intermediary movements parts.
2. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 1 is characterized in that,
Described intermediary movements parts are cylindric, and it comprises the barrel of being made by non-magnet material and be assemblied in the first column permanent magnet and the second column permanent magnet in the barrel that described the second column permanent magnet is positioned at the below of described the first column permanent magnet;
Described external fixation component comprises the first annular permanent magnet and the first coil that arranges around this first annular permanent magnet;
Described bottom fixed part comprises the 3rd column permanent magnet and the second coil that arranges around the 3rd column permanent magnet, described the 3rd column permanent magnet is arranged to and described the second column permanent magnet produces the acting force that mutually repels, the size of regulating the acting force of mutual repulsion by the size of current of controlling in described the second coil.
3. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 2, it is characterized in that, position at vertical the above the first annular permanent magnet is relative with the position of described the first column permanent magnet, and the size of regulating acting force between described the first annular permanent magnet and described the first column permanent magnet by the size of current of controlling in described the first coil.
4. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 1 is characterized in that,
Described intermediary movements parts are cylindric, it comprises the barrel of being made by non-magnet material and is assemblied in the 4th column permanent magnet in the barrel and second, third annular permanent magnet, described second, third annular permanent magnet is separately positioned on the above and below of described the 4th column permanent magnet, be provided with the magnetic field shielding spare of being made by the magnetic field shielding material between described second, third annular permanent magnet and described the 4th column permanent magnet, in described the 3rd annular permanent magnet, also be provided with the 5th column permanent magnet;
Described external fixation component comprises first, second superconductor and Fourth Ring shape permanent magnet and centers on the tertiary coil that this Fourth Ring shape permanent magnet arranges, position at vertical the above first, second superconductor and Fourth Ring shape permanent magnet is relative with the position of described second, third annular permanent magnet and described the 4th column permanent magnet respectively, and the size of regulating acting force between described Fourth Ring shape permanent magnet and described the 4th column permanent magnet by the size of current of controlling in the described tertiary coil;
Described bottom fixed part comprises the 3rd superconductor, and described the 3rd superconductor is arranged to produce the acting force that mutually repels with described the 5th column permanent magnet.
5. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 4, it is characterized in that, described magnetic field shielding spare has certain thickness, so that the magnetic line of force of the magnetic line of force of described second, third annular permanent magnet and described the 5th column permanent magnet and described the 4th column permanent magnet does not interfere with each other.
6. such as the gravity-compensated device of each described mixed magnetic floating formula among the claim 1-5, it is characterized in that further comprise level to the decoupling zero module, this level comprises to the decoupling zero module:
Flexibly connect piece, have two-layer groove on it, form the flexible hinge structure that cross is split;
Be installed on the 6th permanent magnet of described flexible block bottom;
The 4th superconductor below described the 6th permanent magnet, described the 4th superconductor and described the 6th permanent magnet produce the acting force that mutually repels, thereby make the described top that piece is suspended in described the 4th superconductor that flexibly connects, described the 4th superconductor has the vacuum pore that is positioned at the center, regulate vertical gap by the vacuum pneumatic of regulating between described the 6th permanent magnet and described the 4th superconductor, thereby regulate the suspension stiffness between described the 6th permanent magnet and described the 4th superconductor.
7. such as the gravity-compensated device of each described mixed magnetic floating formula among the claim 1-5, it is characterized in that further comprise level to the decoupling zero module, this level comprises to the decoupling zero module:
Flexibly connect piece, have two-layer groove on it, form the flexible hinge structure that cross is split;
Be installed on the 7th permanent magnet of described flexible block bottom;
The 8th permanent magnet below described the 7th permanent magnet and the 4th coil that arranges around described the 8th permanent magnet, described the 8th permanent magnet and described the 7th permanent magnet produce the acting force that mutually repels, thereby make the described top that piece is suspended in described the 8th permanent magnet that flexibly connects, regulate suspension stiffness between described the 7th permanent magnet and described the 8th permanent magnet by controlling electric current in described the 4th coil.
8. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 6, it is characterized in that, further comprise the magnetic field shielding spare of the circumference outside that is positioned at described gravity-compensated device or top, bottom, leave certain air gap between other parts of described magnetic field shielding spare and device.
9. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 7, it is characterized in that, further comprise the magnetic field shielding spare of the circumference outside that is positioned at described gravity-compensated device or top, bottom, leave certain air gap between other parts of described magnetic field shielding spare and device.
10. the gravity-compensated device of mixed magnetic floating formula as claimed in claim 8 is characterized in that, the magnetic permeability of described magnetic field shielding spare is 4000～50000.
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| CN 201010131076 CN102200689B (en) | 2010-03-23 | 2010-03-23 | Hybrid maglev gravity compensation apparatus |
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| CN 201010131076 CN102200689B (en) | 2010-03-23 | 2010-03-23 | Hybrid maglev gravity compensation apparatus |
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| CN104471485B (en) * | 2012-07-18 | 2016-11-02 | Asml荷兰有限公司 | Magnetic devices and lithographic equipment |
| CN103973168A (en) * | 2013-06-07 | 2014-08-06 | 徐慧文 | Electromagnetic propulsion promoter and gravitational counterforce |
| CN104847825B (en) * | 2014-02-14 | 2018-03-13 | 上海微电子装备（集团）股份有限公司 | Array magnetic suspension gravity compensator |
| CN103775550B (en) | 2014-02-14 | 2015-09-23 | 华中科技大学 | Single-degree-of-freedom magnetic force isolation mounting |
| CN104483068B (en) * | 2014-12-30 | 2017-01-11 | 北方民族大学 | Electromagnetic gravity balance device |
| DE102015201096A1 (en) * | 2015-01-22 | 2016-07-28 | Carl Zeiss Smt Gmbh | Arrangement for mounting a component in a lithography system and lithography system |
| CN105988304B (en) | 2015-02-28 | 2018-10-16 | 上海微电子装备（集团）股份有限公司 | A kind of adjustable magnetic buoyancy gravity compensator |
| CN107885039B (en) * | 2016-09-30 | 2019-07-23 | 上海微电子装备（集团）股份有限公司 | Variable magnetic buoyancy, gravity compensator |
| CN106953551B (en) * | 2017-05-05 | 2018-12-11 | 哈尔滨工业大学 | Magnetcisuspension suspension gravity compensator |
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| CN107477088B (en) * | 2017-07-04 | 2019-01-22 | 华中科技大学 | Gap compensation mechanism, closed air-floating guide and positioning platform |
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| CN111381450B (en) * | 2018-12-29 | 2025-06-17 | 上海微电子装备（集团）股份有限公司 | Photolithography machine frame and photolithography machine |
| CN112445075B (en) * | 2019-08-30 | 2023-12-29 | 上海微电子装备（集团）股份有限公司 | Flat reed, micro-motion device and photoetching machine |
| CN111381067A (en) * | 2020-03-23 | 2020-07-07 | 山东宜维检测有限公司 | Contactless magnetic sample introduction device |
| CN112165276B (en) * | 2020-09-23 | 2021-11-12 | 中国工程物理研究院激光聚变研究中心 | Magnetic suspension supporting and positioning device for superconducting small balls |
| CN112271053A (en) * | 2020-10-22 | 2021-01-26 | 北京华卓精科科技股份有限公司 | Gravity compensation device |
| CN114660899B (en) * | 2020-12-22 | 2024-11-15 | 上海微电子装备（集团）股份有限公司 | A flexible support platform system |
| CN113002809A (en) * | 2021-03-16 | 2021-06-22 | 上海卫星工程研究所 | Solar wing suspension type air floatation unfolding motion device based on active/passive magnetic pre-tightening |
| CN115841936B (en) * | 2023-02-16 | 2023-04-25 | 上海隐冠半导体技术有限公司 | Limiting device for moving platform, moving platform and electron beam detection device |
| CN116026508B (en) * | 2023-03-29 | 2023-08-15 | 中国人民解放军火箭军工程大学 | Vibration isolation structure of micro-thrust measuring system |
| CN119995301B (en) * | 2025-04-17 | 2025-06-27 | 上海隐冠半导体技术有限公司 | Vacuum magnetic levitation voice coil motor and magnetic levitation force compensation method |
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