CN102195439B - Multi-stator multi-rotor array linear motor driving device - Google Patents
Multi-stator multi-rotor array linear motor driving device Download PDFInfo
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Abstract
本发明提出一种多定子多动子阵列式直线电机驱动装置,包括多个直线驱动模块和连接部件,多个直线驱动模块安装于连接部件上,每个直线驱动模块包括:直线电机定子;上端面单直线导轨副;下端面单直线导轨副;多个直线电机动子,包括多个上直线电机动子和多个下直线电机动子,上直线电机动子在直线电机定子提供的磁场的作用下,带动上滑座沿上直线导轨的轴向进行往复直线运动,下直线电机动子在直线电机定子提供的磁场的作用下,带动下滑座沿下直线导轨的轴向进行往复直线运动。本发明可以直接驱动给你工作平台,没有反向工作死区,并且多个直线驱动模块以及多个直线电机动子之间的往复直线运动互不干涉。
The present invention proposes a multi-stator multi-mover array type linear motor driving device, which includes a plurality of linear drive modules and connecting parts, and a plurality of linear driving modules are installed on the connecting parts, and each linear driving module includes: a linear motor stator; Single linear guide rail pair on the end face; single linear guide rail pair on the lower end face; multiple linear motor movers, including multiple upper linear motor movers and multiple lower linear motor movers, the upper linear motor movers are controlled by the magnetic field provided by the linear motor stator Under the action, the upper sliding seat is driven to perform reciprocating linear motion along the axial direction of the upper linear guide rail, and the lower linear motor mover drives the lower sliding seat to perform reciprocating linear motion along the axial direction of the lower linear guide rail under the action of the magnetic field provided by the linear motor stator. The present invention can directly drive your working platform without reverse working dead zone, and the reciprocating linear motions between multiple linear drive modules and multiple linear motor movers do not interfere with each other.
Description
技术领域 technical field
本发明涉及机械制造领域,特别涉及一种多定子多动子阵列式直线电机驱动装置。The invention relates to the field of mechanical manufacturing, in particular to a multi-stator and multi-mover array type linear motor driving device.
背景技术 Background technique
直线电机是一种将电能直接转换成直线运动机械能,而不需要任何中间转换机构的传动装置。由定子演变而来的一侧称为初级,由转子演变而来的一侧称为次级。在实际应用时,将初级和次级制造成不同的长度,以保证在所需行程范围内初级与次级之间的耦合保持不变。直线电机可以是短初级长次级,也可以是长初级短次级。考虑到制造成本、运行费用,目前一般均采用短初级长次级。Linear motor is a transmission device that directly converts electrical energy into linear motion mechanical energy without any intermediate conversion mechanism. The side evolved from the stator is called the primary, and the side evolved from the rotor is called the secondary. In practice, the primary and secondary are manufactured to different lengths to ensure that the coupling between the primary and secondary remains constant over the required travel range. Linear motors can be short primary and long secondary, or long primary and short secondary. Considering the manufacturing cost and operating cost, short primary and long secondary are generally used at present.
直线感应电动机的工作原理如下所述:当初级绕组通入交流电源时,便在气隙中产生行波磁场,次级在行波磁场切割下,将感应出电动势并产生电流,该电流与气隙中的磁场相作用就产生电磁推力。如果初级固定,则次级在推力作用下做直线运动;反之,则初级做直线运动。The working principle of the linear induction motor is as follows: when the primary winding is connected to the AC power supply, a traveling wave magnetic field will be generated in the air gap, and the secondary will induce an electromotive force and generate a current under the cutting of the traveling wave magnetic field. The interaction of the magnetic fields in the gap produces electromagnetic thrust. If the primary is fixed, the secondary will move in a straight line under the action of thrust; otherwise, the primary will move in a straight line.
在冲床、晶圆制造中有很多需要直线运动的场合。为了提高生产效率,对直线运动的速度和加速度都有很高的要求。传统的“旋转电机+滚珠丝杠”的中间传动环节使刚度降低,弹性变形使系统的阶次变高,从而系统的鲁棒性降低。There are many occasions that require linear motion in punch presses and wafer manufacturing. In order to improve production efficiency, there are high requirements on the speed and acceleration of linear motion. The intermediate transmission link of the traditional "rotary motor + ball screw" reduces the stiffness, and the elastic deformation makes the order of the system higher, thereby reducing the robustness of the system.
发明内容 Contents of the invention
本发明的目的旨在至少解决上述技术缺陷之一,特别提出一种多动子之间的往复直线运动互不干涉的多定子多动子阵列式直线电机驱动装置The purpose of the present invention is to at least solve one of the above-mentioned technical defects, and in particular propose a multi-stator multi-mover array linear motor drive device in which the reciprocating linear motions between the multi-movers do not interfere with each other
为达到上述目的,本发明的实施例提出一种多定子多动子阵列式直线电机驱动装置,包括多个直线驱动模块和连接部件,所述多个直线驱动模块安装于所述连接部件上,其中每个直线驱动模块包括:一个直线电机定子;上端面单直线导轨副,所述上端面单直线导轨副位于所述直线电机定子的上端面,包括固定于所述直线电机定子的上端面的上直线导轨、多个上滑座和多个上滑块,其中,所述多个上滑座和多个上滑块可滑动地安装在所述上直线导轨上且每个所述上滑座的两端分别连接有一个上滑块;下端面单直线导轨副,所述下端面单直线导轨副位于所述直线电机定子的下端面,包括固定于所述直线电机定子的下端面的下直线导轨、多个下滑座和多个下滑块,其中,所述多个下滑座和多个下滑块可滑动地安装在所述下直线导轨上且每个所述下滑座的两端分别连接有一个下滑块;多个直线电机动子,所述多个直线电机动子包括多个上直线电机动子和多个下直线电机动子,其中每个所述上直线电机动子与所述每个上滑座固定连接,所述上直线电机动子在所述直线电机定子提供的磁场的作用下,带动与所述上直线电机动子相连的所述上滑座沿所述上直线导轨的轴向进行往复直线运动,所述每个所述下直线电机动子与所述每个下滑座固定连接,所述下直线电机动子在所述直线电机定子提供的磁场的作用下,带动与所述下直线电机动子相连的所述下滑座沿所述下直线导轨的轴向进行往复直线运动。In order to achieve the above purpose, an embodiment of the present invention proposes a multi-stator multi-moving sub-array type linear motor driving device, which includes a plurality of linear drive modules and connecting parts, and the plurality of linear driving modules are installed on the connecting parts. Wherein each linear drive module includes: a linear motor stator; a single linear guide rail pair on the upper end surface, the single linear guide rail pair on the upper end surface is located on the upper end surface of the linear motor stator, and includes an upper end surface fixed on the linear motor stator an upper linear guide rail, a plurality of upper slides and a plurality of upper slides, wherein the plurality of upper slides and a plurality of upper slides are slidably mounted on the upper linear guide and each of the upper slides The two ends of each are respectively connected with an upper slider; the lower end surface single linear guide rail pair, the lower end surface single linear guide rail pair is located on the lower end surface of the linear motor stator, including the lower linear guide rail fixed on the lower end surface of the linear motor stator a guide rail, a plurality of lower seats and a plurality of lower sliders, wherein the plurality of lower seats and the plurality of lower sliders are slidably mounted on the lower linear guide rail and the two ends of each of the lower seats are respectively connected There is a lower slider; a plurality of linear motor movers, the plurality of linear motor movers include a plurality of upper linear motor movers and a plurality of lower linear motor movers, wherein each of the upper linear motor movers is connected to the linear motor movers Each upper sliding seat is fixedly connected, and the upper linear motor mover drives the upper sliding seat connected with the upper linear motor mover along the upper straight line under the action of the magnetic field provided by the linear motor stator. The axial direction of the guide rail performs reciprocating linear motion, each of the lower linear motor movers is fixedly connected with each of the lower seats, and the lower linear motor movers are under the action of the magnetic field provided by the linear motor stator, Drive the sliding seat connected with the lower linear motor mover to perform reciprocating linear motion along the axial direction of the lower linear guide rail.
根据本发明实施例的多定子多动子阵列式直线电机驱动装置,可以直接驱动给你工作平台,没有反向工作死区,并且多个直线驱动模块以及多个直线电机动子之间的往复直线运动互不干涉。According to the embodiment of the present invention, the multi-stator and multi-mover array linear motor drive device can directly drive your working platform without reverse working dead zone, and the reciprocating motion between multiple linear drive modules and multiple linear motor movers Linear motion does not interfere with each other.
本发明附加的方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
附图说明 Description of drawings
本发明上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present invention will become apparent and easy to understand from the following description of the embodiments in conjunction with the accompanying drawings, wherein:
图1为根据本发明的一个实施例的多定子多动子阵列式直线电机驱动装置的立体结构示意图;Fig. 1 is a three-dimensional structural schematic diagram of a multi-stator multi-mover sub-array linear motor drive device according to an embodiment of the present invention;
图2为根据本发明的另一个实施例的多定子多动子阵列式直线驱动装置的立体结构示意图;Fig. 2 is a three-dimensional structural schematic diagram of a multi-stator multi-mover sub-array linear drive device according to another embodiment of the present invention;
图3为根据本发明实施例的直线驱动模块的上端面示意图;和FIG. 3 is a schematic diagram of the upper end surface of a linear drive module according to an embodiment of the present invention; and
图4为根据本发明实施例的直线驱动模块的下端面示意图。Fig. 4 is a schematic diagram of the lower end surface of the linear drive module according to the embodiment of the present invention.
具体实施方式 Detailed ways
下面详细描述本发明的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能解释为对本发明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
在本发明的描述中,需要理解的是,术语“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In describing the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or element must have a particular orientation, be constructed, and operate in a particular orientation should therefore not be construed as limiting the invention.
在本发明的描述中,需要说明的是,除非另有规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是机械连接或电连接,也可以是两个元件内部的连通,可以是直接相连,也可以通过中间媒介间接相连,对于本领域的普通技术人员而言,可以根据具体情况理解上述术语的具体含义。In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, or it can be two The internal communication of each element may be directly connected or indirectly connected through an intermediary. Those skilled in the art can understand the specific meanings of the above terms according to specific situations.
下面参考图1至图4描述根据本发明实施例的多定子多动子阵列式直线电机驱动装置1000。The following describes a multi-stator multi-mover sub-array linear motor drive device 1000 according to an embodiment of the present invention with reference to FIGS. 1 to 4 .
如图1和图2所示,根据本发明实施例的多定子多动子阵列式直线电机驱动装置1000包括多个直线驱动模块100以及连接部件200。其中,多个直线驱动模块100安装在连接部件200。具体而言,每个直线驱动模块100通过螺栓固定在连接部件200上。在本发明的一个实施例中,每个直线驱动模块100的左端和右端通过螺栓分别固定在连接部件200的凹槽内。As shown in FIG. 1 and FIG. 2 , a multi-stator multi-moving sub-array linear motor drive device 1000 according to an embodiment of the present invention includes a plurality of
如图3和图4所示,每个直线驱动模块100包括一个直线电机定子110、上端面单直线导轨副、下端面单直线导轨副和多个直线电机动子。直线电机定子110和直线电机动子通过上端面单直线导轨副、下端面单直线导轨副连接组成“n”字形结构。As shown in FIG. 3 and FIG. 4 , each
在直线电机定子110的内部嵌有磁钢111。在本发明的一个示例中,在直线电机定子110的内部嵌有一排磁钢111,且磁钢111的端面为蜂窝状的六边形。A
在本发明的一个实施例中,直线电机定子110可以为奥氏体不锈钢板。In one embodiment of the present invention, the
如图3所示,上端面单直线导轨副位于直线电机定子110的上端面(图3中的向上),包括固定于直线电机定子110的上端面的上直线导轨121、多个上滑座131和多个上滑块。多个上滑座131和多个上滑块可滑动地安装在上直线导轨121上。每个上滑座131的两端分别连接有一个上滑块。在上滑座131的两端分别连接有第一上滑块141a和第二上滑块141b。在本发明的一个实施例中,每个上直线导轨131的两端通过螺栓分别与第一上滑块141a和第二上滑块141b连接。As shown in Figure 3, the upper end surface single linear guide rail pair is located on the upper end surface (upward in Figure 3) of the
如图4所示,下端面单直线导轨副位于直线电机定子110的下端面(图4中向下),包括固定于直线电机定子110的上端面的下直线导轨122、多个下滑座132和多个下滑块。多个下滑座132和多个下滑块可滑动地安装在下直线导轨122上。每个下滑座132的两端分别连接有一个下滑块。在下滑座132的两端分别连接有第一下滑块142a和第二下滑块142b。在本发明的一个实施例中,每个下直线导轨132的两端通过螺栓分别与第一下滑块142a和第二下滑块142b连接。As shown in Figure 4, the lower end surface single linear guide rail pair is located at the lower end surface of the linear motor stator 110 (downward in Figure 4), including the lower
多个直线电机动子包括多个上直线电机动子151和多个下直线电机动子152。如图3所示,每个上直线电机动子151与每个上滑座131一一对应地固定连接。如图4所示,每个下直线电机动子152与每个下滑座132一一对应地固定连接。The plurality of linear motor movers includes a plurality of upper
在本发明的一个实施例中,每个上直线电机动子151通过螺栓与每个上滑座131一一对应地固定连接。每个下直线电机动子152通过螺栓与每个下滑座132一一对应地固定连接。In one embodiment of the present invention, each upper
每个直线电机动子为由印刷电路板型线圈组成的钢块,即每个上直线电机动子151和每个下直线电机动子152均为由印刷电路板型线圈组成的钢块。在本发明的一个示例中,上直线电机动子151和下直线电机动子152可以为长方形。Each linear motor mover is a steel block composed of printed circuit board coils, that is, each upper
在本发明的一个实施例中,上直线电机动子151和下直线电机动子152可以沿直线电机动子110的轴向彼此间隔开地沿上下方向(图3和图4中的上下方向)交错排列。In one embodiment of the present invention, the upper
当然本领域技术人员可以理解的是,直线电机动子的安装方式不限于此。多个上直线电机动子151组成的上直线电机动子组可以沿直线电机动子110的轴向连续排列,多个下直线电机动子152组成的下直线电机动子组可以沿直线电机动子110的轴向连续排列,上直线电机动子组和下直线电机动子组彼此间隔开地沿上下方向交错排列。并且不同的上直线电机动子组中的上直线电机动子151的数量可以不同,不同的下直线电机动子组中的下直线电机动子152的数量可以不同。Of course, those skilled in the art can understand that the installation method of the linear motor mover is not limited thereto. The upper linear motor mover group composed of a plurality of upper
本发明实施例提供的直线电机驱动装置工作时,直线电机定子110与上直线电机动子151和下直线电机动子相互作用。上直线电机动子151在直线电机定子110提供的磁场的作用下,受到与上直线导轨121轴向平行的推力。上直线电机动子151带动上滑座131沿着上直线导轨121的轴向进行往复直线运动。下直线电机动子152在直线电机定子110提供的磁场的作用下,受到与下直线导轨122轴向平行的推力。下直线电机动子152带动下滑座132沿着下直线导轨122的轴向进行往复直线运动。When the linear motor driving device provided by the embodiment of the present invention works, the
在本发明的一个实施例中,各个直线电机动子的往复直线运动彼此独立。具体而言,上直线电机动子151和下直线电机动子152的往复直线运动彼此独立,互不干涉。多个上直线电机动子151之间的往复直线运动彼此独立,互不干涉。多个下直线电机动子153之间的往复直线运动彼此也独立,互不干涉。In one embodiment of the present invention, the reciprocating linear motions of the respective linear motor movers are independent of each other. Specifically, the reciprocating linear motions of the upper
在本发明的一个实施例中,各个直线驱动模块100的往复直线运动彼此独立。In one embodiment of the present invention, the reciprocating linear motions of the
根据本发明实施例的多定子多动子阵列式直线电机驱动装置,可以直接驱动给你工作平台,没有反向工作死区,并且多个直线驱动模块以及多个直线电机动子之间的往复直线运动互不干涉。According to the embodiment of the present invention, the multi-stator and multi-mover array linear motor drive device can directly drive your working platform without reverse working dead zone, and the reciprocating motion between multiple linear drive modules and multiple linear motor movers Linear motion does not interfere with each other.
在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications and substitutions can be made to these embodiments without departing from the principle and spirit of the present invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.
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CN103560643B (en) * | 2013-10-24 | 2016-01-13 | 清华大学 | A kind of printed circuit board (PCB) winding linear motor |
CN104440344B (en) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor |
CN104440343B (en) * | 2014-11-26 | 2017-05-10 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
CN105922756A (en) * | 2016-06-16 | 2016-09-07 | 深圳市全印图文技术有限公司 | Printing machine capable of combined jet printing |
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