CN102168299B - Method for growing phosphorus-silicon-cadmium single crystal - Google Patents
Method for growing phosphorus-silicon-cadmium single crystal Download PDFInfo
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- OFELZVPOHUXQLC-UHFFFAOYSA-N [Cd].[Si].[P] Chemical compound [Cd].[Si].[P] OFELZVPOHUXQLC-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 29
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- 239000000463 material Substances 0.000 claims abstract description 40
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 31
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims abstract description 31
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- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 27
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
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- GQIZJSSZINQXMJ-UHFFFAOYSA-H P(=O)([O-])([O-])[O-].[Si+4].[Cd+2].P(=O)([O-])([O-])[O-] Chemical compound P(=O)([O-])([O-])[O-].[Si+4].[Cd+2].P(=O)([O-])([O-])[O-] GQIZJSSZINQXMJ-UHFFFAOYSA-H 0.000 claims description 4
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- 230000000630 rising effect Effects 0.000 claims 1
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- -1 cadmium phosphorus silicon cadmium Chemical compound 0.000 description 8
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- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 6
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- 229910052709 silver Inorganic materials 0.000 description 4
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- MOHPKPMGPNKIKH-UHFFFAOYSA-N [Zn].[Ge].[P] Chemical compound [Zn].[Ge].[P] MOHPKPMGPNKIKH-UHFFFAOYSA-N 0.000 description 2
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- ZZEMEJKDTZOXOI-UHFFFAOYSA-N digallium;selenium(2-) Chemical compound [Ga+3].[Ga+3].[Se-2].[Se-2].[Se-2] ZZEMEJKDTZOXOI-UHFFFAOYSA-N 0.000 description 1
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Abstract
本发明涉及磷硅镉的单晶生长方法。按硅∶镉∶磷=1∶1∶2~2.05配料合成磷硅镉多晶料,采用坩埚下降炉,通过自发形核生长法或定向籽晶生长法进行生长。步骤包括:将磷硅镉多晶料直接装入坩埚中,或者加入籽晶后再装入坩埚中;将坩埚置入石英管中,抽真空后封结石英管;将石英管装入坩埚下降炉中;升温、坩埚下降、最后降温。本发明方法可制备出高纯度、高质量的磷硅镉单晶。The invention relates to a single crystal growth method of phosphorus, silicon, and cadmium. Si:Cd:P = 1:1:2-2.05 is used to synthesize phosphorus, silicon, and cadmium polycrystalline materials, and the crucible descending furnace is used to grow by spontaneous nucleation growth method or directional seed crystal growth method. The steps include: directly loading the cadmium phosphorus silicon polycrystalline material into the crucible, or adding seed crystals and then loading into the crucible; placing the crucible into a quartz tube, and sealing the quartz tube after vacuuming; loading the quartz tube into the crucible to lower In the furnace; heat up, crucible down, and finally cool down. The method of the invention can prepare high-purity, high-quality phosphorus-silicon-cadmium single crystal.
Description
技术领域 technical field
本发明涉及一种红外非线性光学材料磷硅镉单晶的制备,特别涉及磷硅镉单晶的生长方法。The invention relates to the preparation of an infrared nonlinear optical material cadmium-phosphorus-silicon single crystal, in particular to a growth method for a cadmium-phosphorus-silicon single crystal.
背景技术 Background technique
中远红外激光在军事和民用领域有诸多应用。采用红外非线性光学晶体进行频率变换是产生连续可调谐的中远红外激光的有效方法之一。目前研究比较广泛的红外非线性光学晶体有磷锗锌,硫镓银,硒镓银等。磷锗锌具有优秀的非线性光学性能及热学性能,可以满足产生高功率中红外激光的要求,但是由于磷锗锌在1μm左右存在较大的缺陷吸收,故不能用更为广泛的1μm左右的基频光泵浦,泵浦源受到了严重的限制。而硫镓银和硒镓银的非线性光学系数及热导率均较低,满足不了高功率中远红外激光的输出要求。Mid-to-far infrared lasers have many applications in military and civilian fields. Using infrared nonlinear optical crystals for frequency conversion is one of the effective methods to generate continuously tunable mid- and far-infrared lasers. At present, the widely studied infrared nonlinear optical crystals include phosphorous germanium zinc, sulfur gallium silver, selenium gallium silver and so on. Phosphorus germanium zinc has excellent nonlinear optical properties and thermal properties, which can meet the requirements of generating high-power mid-infrared lasers. However, due to the large defect absorption of phosphorus germanium zinc at about 1 μm, it cannot be used in a wider range of about 1 μm. For fundamental frequency optical pumping, the pump source is severely limited. However, the nonlinear optical coefficient and thermal conductivity of silver gallium sulfide and silver gallium selenide are low, which cannot meet the output requirements of high-power mid- and far-infrared lasers.
磷硅镉,化学式CdSiP2,热导率为13.6Wm-1K-1,比热为0.446Jg-1K-1,透光范围为530nm-10μm,带隙为2.2-2.4eV,它是现有的可用1μm左右的激光泵浦的非线性系数最大的红外材料,其d36高达84pm/V。磷硅镉单晶体可以用1064nm的激光泵浦产生6-8μm的红外激光,并且输出6μm的激光时可以实现非临界位相匹配,另外它还可以用1.5μm的激光泵浦实现3-5μm红外可调谐激光的输出。磷硅镉晶体大的非线性系数、高的热导率以及宽的带隙使其成为可用目前更为成熟的1μm左右的激光泵浦的,产生高功率中远红外激光的一种很有前途的非线性光学材料。Cadmium phosphorus silicon, chemical formula CdSiP 2 , thermal conductivity 13.6Wm -1 K -1 , specific heat 0.446Jg -1 K -1 , light transmission range 530nm-10μm, band gap 2.2-2.4eV, it is the current Some infrared materials with the largest nonlinear coefficient that can be pumped by a laser of about 1 μm have a d 36 as high as 84pm/V. CdSi single crystal can be pumped with 1064nm laser to generate 6-8μm infrared laser, and can achieve non-critical phase matching when outputting 6μm laser, and it can also use 1.5μm laser pump to realize 3-5μm infrared tunable output of the laser. The large nonlinear coefficient, high thermal conductivity and wide bandgap of cadmium phosphorus silicon crystals make them a promising method for generating high-power mid-to-far infrared lasers that can be pumped by more mature lasers of about 1 μm. Nonlinear Optical Materials.
然而,磷硅镉晶体的熔点高达1133℃,在熔点附近下,其饱和分解压高达22atm,并且高温下磷硅镉会与石英反应,很容易导致坩埚的爆炸。如此高的温度和分解压使磷硅镉的多晶合成和单晶生长非常困难。有文献报道了一种透明水平梯度冷凝炉生长磷硅镉单晶的方法,参见Kevin T.Zawilski,Peter G.Schunemann,etc.,Growth andcharacterization of large CdSiP2 single crystals,Journal of Crystal Growth,2010,312:1127-1132。但此方法对设备要求高、不易自发形核生长、维持平界面生长控制困难、熔体上方蒸气对流严重等缺点,所生长的晶体易产生孪晶和组分偏离化学计量比等晶体缺陷。However, the melting point of cadmium phosphosilicate crystal is as high as 1133°C, and its saturated decomposition pressure is as high as 22atm near the melting point, and cadmium phosphosilicate will react with quartz at high temperature, which will easily lead to the explosion of the crucible. Such a high temperature and decomposition pressure make polycrystalline synthesis and single crystal growth of cadmium phosphorus silicon very difficult. A method for growing cadmium phosphorus silicon cadmium single crystals in a transparent horizontal gradient condensation furnace has been reported in the literature, see Kevin T.Zawilski, Peter G.Schunemann, etc., Growth and characterization of large CdSiP 2 single crystals, Journal of Crystal Growth, 2010, 312:1127–1132. However, this method has disadvantages such as high requirements for equipment, difficulty in spontaneous nucleation and growth, difficulty in maintaining flat interface growth control, and serious vapor convection above the melt. The grown crystals are prone to crystal defects such as twins and component deviations from the stoichiometric ratio.
发明内容 Contents of the invention
本发明针对磷硅镉合成及生长中的难点,提供一种磷硅镉单晶的生长方法。Aiming at the difficulties in the synthesis and growth of cadmium phosphorus silicon, the invention provides a growth method of cadmium phosphorus silicon single crystal.
本发明的技术要点是采用单温区或双温区合成磷硅镉多晶料并采用坩埚下降炉进行磷硅镉单晶生长。The technical gist of the invention is to synthesize cadmium-phosphorous-silicon polycrystalline material by adopting a single temperature zone or double-temperature zones, and to grow cadmium-phosphorus-silicon single crystal by using a crucible-down furnace.
本发明的技术方案如下:Technical scheme of the present invention is as follows:
一种磷硅镉单晶的生长方法,以单质原料硅∶镉∶磷按1∶1∶2~2.05摩尔比合成磷硅镉多晶料,采用坩埚下降炉,通过自发形核生长法或籽晶生长法制得磷硅镉单晶;A method for growing phosphorus-silicon-cadmium single crystals, using simple raw material silicon:cadmium:phosphorus to synthesize phosphorus-silicon-cadmium polycrystalline material in a molar ratio of 1:1:2-2.05, using a crucible drop furnace, through spontaneous nucleation growth method or seed Phosphorous silicon cadmium single crystal was prepared by crystal growth method;
所述自发形核生长法是:将磷硅镉多晶料装入生长坩埚中,将生长坩埚装入石英管中,抽真空至2×10-4Pa以下后封结石英管;将装有磷硅镉多晶料的石英管装入坩埚下降炉中,使坩埚位于高温区位置;使坩埚下降炉升温,高温区的温度保持在高于1140℃,梯度区的温度梯度在3~20℃/cm,低温区的温度保持在1050-1100℃;在高温区保温10~20h后开始使坩埚下降,下降速率为0.1~4mm/h;将坩埚下降至低温区以后停止下降;使坩埚降温,以1~10℃/h降至950-1030℃,然后以10~20℃/h降至25~35℃。The spontaneous nucleation and growth method is as follows: the phosphorus, silicon and cadmium polycrystalline material is loaded into a growth crucible, the growth crucible is loaded into a quartz tube, and the quartz tube is sealed after vacuuming to below 2×10 -4 Pa; Put the quartz tube of phosphorus, silicon and cadmium polycrystalline material into the crucible descending furnace, so that the crucible is located in the high temperature zone; make the crucible descend the furnace to heat up, and the temperature in the high temperature zone is kept higher than 1140°C, and the temperature gradient in the gradient zone is between 3 and 20°C /cm, the temperature in the low-temperature zone is kept at 1050-1100°C; after 10-20 hours of heat preservation in the high-temperature zone, the crucible is lowered at a rate of 0.1-4mm/h; after the crucible is lowered to the low-temperature zone, it stops falling; the crucible is cooled, Decrease to 950-1030°C at 1-10°C/h, then drop to 25-35°C at 10-20°C/h.
所述籽晶生长法是:将磷硅镉籽晶装入生长坩埚的籽晶袋中,将磷硅镉多晶料装入生长坩埚中,将生长坩埚装入石英管中,抽真空至2×10-4Pa后封结石英管;将装有籽晶和磷硅镉多晶料的石英管装入坩埚下降炉中,使坩埚位于低温区;使坩埚下降炉升温,控制坩埚下降炉的温度,高温区的温度高于1140℃,梯度区的温度梯度在3~20℃/cm,低温区的温度保持在1050-1100℃,缓慢上升坩埚,至使籽晶和多晶接触处的温度不低于磷硅镉的熔点1130℃、籽晶底端的温度不高于1130℃,使坩埚在此位置保温10~20h后开始下降,下降速率为0.1~4mm/h;将坩埚下降至低温区后停止下降;使坩埚降温,以1~10℃/h降至950-1030℃,然后以10~20℃/h降至25~35℃。The seed crystal growth method is: put the cadmium phosphorus silicon seed crystal into the seed crystal bag of the growth crucible, put the cadmium phosphorus silicon polycrystalline material into the growth crucible, put the growth crucible into the quartz tube, and evacuate to 2 Seal the quartz tube after ×10 -4 Pa; put the quartz tube with the seed crystal and phosphorus, silicon and cadmium polycrystalline material into the crucible lowering furnace, so that the crucible is located in the low temperature zone; raise the temperature of the crucible lowering furnace, and control the temperature of the crucible lowering furnace Temperature, the temperature in the high temperature zone is higher than 1140°C, the temperature gradient in the gradient zone is 3-20°C/cm, the temperature in the low temperature zone is kept at 1050-1100°C, and the crucible is slowly raised to the temperature where the seed crystal and the polycrystal are in contact Not lower than the melting point of cadmium phosphorus silicon cadmium 1130 ℃, the temperature of the bottom of the seed crystal is not higher than 1130 ℃, keep the crucible at this position for 10 ~ 20h and then start to drop, the rate of drop is 0.1 ~ 4mm/h; drop the crucible to the low temperature zone Then stop the drop; cool the crucible to 950-1030°C at 1-10°C/h, and then drop to 25-35°C at 10-20°C/h.
根据本发明,坩埚在下降的同时可以绕其轴心旋转,旋转方式采用本领域人员公知的梯形波、三角形波或矩形波等。According to the present invention, the crucible can rotate around its axis while descending, and the rotation mode adopts trapezoidal wave, triangular wave or rectangular wave, etc. known to those skilled in the art.
本发明优选的,坩埚下降的同时坩埚以梯形波方式进行旋转,在一个旋转周期内,加速时间为30s,恒速时间为30s,最高恒定转速为30rad/min,减速时间为30s,减至0rad/min后进行相同的反向加速、恒速和减速,然后进入下一个旋转周期。Preferably in the present invention, while the crucible is descending, the crucible rotates in a trapezoidal wave mode. In one rotation cycle, the acceleration time is 30s, the constant speed time is 30s, the maximum constant speed is 30rad/min, the deceleration time is 30s, and is reduced to 0rad After /min, perform the same reverse acceleration, constant speed and deceleration, and then enter the next rotation cycle.
根据本发明,优选的,所述的生长坩埚为石墨舟、氮化硼舟、镀碳膜的石英舟、镀热解氮化硼涂层的石英舟、镀热解氮化硼涂层的石墨舟。According to the present invention, preferably, the growth crucible is graphite boat, boron nitride boat, quartz boat coated with carbon film, quartz boat coated with pyrolytic boron nitride coating, graphite coated with pyrolytic boron nitride coating Boat.
根据本发明,优选的,坩埚下降炉升温时,高温区的温度保持在1145~1165℃,更优选高温区温度保持在1150~1160℃。According to the present invention, preferably, when the temperature of the crucible lowering furnace is raised, the temperature in the high temperature zone is kept at 1145-1165°C, more preferably the temperature in the high-temperature zone is kept at 1150-1160°C.
根据本发明,优选的,所述的坩埚下降炉的升温速度控制在50~100℃/h,包括自发形核生长法和籽晶生长法,都需要同样地控制坩埚下降炉的升温速度,目的在于防止升温速度过快导致坩埚内压力骤增从而炸裂石英管。According to the present invention, preferably, the temperature rise rate of the crucible descending furnace is controlled at 50-100°C/h, including the spontaneous nucleation growth method and the seed crystal growth method, all need to control the temperature rise rate of the crucible descending furnace in the same way, the purpose It is to prevent the rapid increase in temperature from causing the pressure in the crucible to burst and burst the quartz tube.
根据本发明,优选的,磷硅镉单晶生长过程中,温度梯度区的温度梯度控制在5~15℃/cm,坩埚的下降速度控制在0.5~3mm/h。目的在于既能形成单晶生长和避免位错、孪晶等晶体缺陷的产生,又能保证一定的单晶生长效率。According to the present invention, preferably, during the growth process of cadmium phosphorus silicon single crystal, the temperature gradient in the temperature gradient zone is controlled at 5-15° C./cm, and the descending speed of the crucible is controlled at 0.5-3 mm/h. The purpose is to not only form single crystal growth and avoid the generation of crystal defects such as dislocations and twins, but also ensure a certain single crystal growth efficiency.
根据本发明,坩埚降温速度的控制为从生长温度以小于等于10℃/h降至1000℃,然后以小于等于20℃/h的速度降至室温,目的在于既防止单晶在降温过程中由于热应力过大导致晶体产生裂纹或完全开裂,又保证缩短生长周期,提高生长效率。优选的,所述的使坩埚降温是,先以6-10℃/h降温到1000-1030℃,再以5℃/h降温到950℃,再以20℃/h降温到650-800℃,然后以10℃/h降温到30℃。According to the present invention, the cooling rate of the crucible is controlled from the growth temperature to 1000 °C at a rate of 10 °C/h or less, and then to room temperature at a rate of 20 °C/h or less, in order to prevent the single crystal from being damaged during the cooling process. Excessive thermal stress leads to cracks or complete cracks in the crystal, which also ensures that the growth cycle is shortened and the growth efficiency is improved. Preferably, the cooling of the crucible is to first cool down to 1000-1030°C at 6-10°C/h, then cool down to 950°C at 5°C/h, and then cool down to 650-800°C at 20°C/h, Then cool down to 30°C at 10°C/h.
本发明磷硅镉单晶生长所用的磷硅镉多晶料的合成可采用本领域的现有技术。本发明提供以下磷硅镉多晶料的合成的优选方案:The synthesis of the cadmium phosphosilicate polycrystalline material used for the growth of cadmium silicon phosphate single crystal in the present invention can adopt the existing technology in this field. The present invention provides the preferred scheme for the synthesis of the following cadmium phosphorus, silicon, and cadmium polycrystalline materials:
磷硅镉多晶料的单温区合成方法,步骤如下:(1)将纯度为99.999%的磷、硅、镉三种单质原料按硅∶镉∶磷=1∶1∶2~2.05的摩尔比装入合成坩埚中;(2)将合成坩埚装入石英管中,抽真空至2×10-4Pa以下后封结石英管;(3)将石英管装入单温区合成炉中,将单温区合成炉从室温以小于50℃/h的升温速率升温至350-750℃,然后在此温度保温20~25h,再以小于20℃/h的升温速率升温至1140~1160℃,保温20~35h,降至室温,打开合成坩埚即得磷硅镉多晶料。The single-temperature-zone synthetic method of phosphorus-silicon-cadmium polycrystalline material, step is as follows: (1) three kinds of elemental raw materials of phosphorus, silicon, cadmium that purity is 99.999% press silicon: cadmium: the mole of phosphorus=1:1:2~2.05 (2) Put the synthetic crucible into the quartz tube, vacuumize to below 2× 10-4 Pa, and then seal the quartz tube; (3) Put the quartz tube into the single-temperature zone synthetic furnace, Raise the temperature of the single temperature zone synthesis furnace from room temperature to 350-750°C at a heating rate of less than 50°C/h, then keep at this temperature for 20-25 hours, and then raise the temperature to 1140-1160°C at a heating rate of less than 20°C/h, Keep it warm for 20-35 hours, cool down to room temperature, and open the synthesis crucible to obtain polycrystalline material of phosphorus, silicon and cadmium.
以上单温区合成炉优选垂直管式电阻炉。The above single temperature zone synthesis furnace is preferably a vertical tubular resistance furnace.
磷硅镉多晶料的双温区合成方法,步骤如下:1)将纯度为99.999%的磷、硅、镉三种单质原料按硅∶镉∶磷=1∶1∶2~2.05的摩尔比配料,将磷装入石英管的一端,将硅和镉放入合成舟中装入石英管的另一端,将石英管抽真空至2×10-4Pa以下后封结;2)将石英管的装有磷的一端置于双温区合成炉的低温区,装有硅和镉的合成舟的一端置于双温区合成炉的高温区;3)将双温区炉的低温区从室温以小于50℃/h的升温速率升温至450-750℃,保温10~15h,然后以小于20℃/h的升温速率升温至1160℃,在1160℃保温10~15h;与此同时,将双温区合成炉的高温区从室温以小于50℃/h的升温速率升温至600~1000℃,保温10~15h,然后以小于200℃/h的升温速率升温至1150℃,保温10~15h;3)同时将双温区炉的两个温区降至室温,打开石英管即得到磷硅镉多晶料。The double-temperature zone synthetic method of phosphorus-silicon-cadmium polycrystalline material, step is as follows: 1) three kinds of elemental raw materials of phosphorus, silicon, cadmium that purity is 99.999% press silicon: cadmium: the mol ratio of phosphorus=1:1:2~2.05 For ingredients, put phosphorus into one end of the quartz tube, put silicon and cadmium into the synthesis boat and load the other end of the quartz tube, vacuumize the quartz tube to below 2×10 -4 Pa and seal it; 2) put the quartz tube One end that phosphorus is housed is placed in the low-temperature zone of double-temperature zone synthesis furnace, and one end that the synthetic boat of silicon and cadmium is housed is placed in the high-temperature zone of double-temperature zone synthesis furnace; 3) the low-temperature zone of double-temperature zone furnace is changed from room temperature Raise the temperature to 450-750°C with a heating rate of less than 50°C/h, keep it for 10-15 hours, then raise the temperature to 1160°C with a heating rate of less than 20°C/h, and keep it at 1160°C for 10-15 hours; at the same time, put the double The high temperature zone of the temperature zone synthesis furnace is raised from room temperature to 600-1000°C at a heating rate of less than 50°C/h, kept for 10-15 hours, and then raised to 1150°C at a heating rate of less than 200°C/h, kept for 10-15 hours; 3) At the same time, the two temperature zones of the dual-temperature zone furnace are lowered to room temperature, and the quartz tube is opened to obtain the phosphorus-silicon-cadmium polycrystalline material.
本发明磷硅镉单晶生长使用的坩埚下降炉,也称垂直布里奇曼炉。可以采用现有技术,例如CN201224776Y(CN200820025995.7)提供的多元化合物红外晶体生长装置。The falling crucible furnace used for the growth of cadmium phosphorus silicon cadmium single crystal in the present invention is also called vertical Bridgman furnace. The prior art can be used, for example, the multi-component infrared crystal growth device provided by CN201224776Y (CN200820025995.7).
与现有技术相比,本发明的优良效果如下:Compared with prior art, the excellent effect of the present invention is as follows:
1、本发明方法采用垂直炉体进行晶体生长,可以方便地进行加速坩埚旋转控制,具有易控制熔体对流,抑制熔体上方蒸气对流的优点,可以在较大的温度梯度下制备出更符合化学计量比的磷硅镉单晶。1. The method of the present invention adopts a vertical furnace body for crystal growth, which can conveniently carry out accelerated crucible rotation control, has the advantages of easy control of melt convection and suppression of steam convection above the melt, and can be prepared under a larger temperature gradient. Stoichiometric cadmium phosphorus silicon single crystal.
2、采用自发形核技术进行磷硅镉单晶生长时,具有在生长初始时易形成单一晶核,在生长过程中易维持平界面生长的特点,可以保证高的单晶产率。2. When the spontaneous nucleation technology is used for cadmium phosphorus silicon single crystal growth, it is easy to form a single crystal nucleus at the beginning of growth, and it is easy to maintain flat interface growth during the growth process, which can ensure high single crystal yield.
3.采用定向籽晶法进行磷硅镉单晶生长时,可以制备出无裂纹、无孪晶等晶体缺陷的优质磷硅镉单晶。3. When the directional seed crystal method is used for cadmium phosphorus silicon single crystal growth, high-quality cadmium phosphorus silicon cadmium single crystal without crystal defects such as cracks and twins can be prepared.
附图说明 Description of drawings
图1实施例1制备的磷硅镉多晶粉末的XRD(上)与磷硅镉标准衍射谱(下)的对照。Figure 1 Comparison of the XRD (upper) and the standard diffraction spectrum (lower) of the cadmium phosphorus silicon polycrystalline powder prepared in Example 1.
图2坩埚下降炉轴向温场曲线。横坐标是温度,纵坐标是距坩埚下降炉顶端的距离。Fig. 2 Axial temperature field curve of crucible descending furnace. The abscissa is the temperature, and the ordinate is the distance from the crucible to the top of the furnace.
图3实施例1生长的磷硅镉单晶照片。Photo of cadmium phosphorus silicon cadmium single crystal grown in embodiment 1 of Fig. 3 .
图4实施例1生长的磷硅镉单晶体(112)面的单晶摇摆曲线。The single crystal rocking curve of the (112) plane of the phosphorous silicon cadmium single crystal grown in Fig. 4 Example 1.
具体实施方式 Detailed ways
下面结合实施例及附图对本发明做进一步说明,但不限与此。实施例中磷硅镉单晶生长使用的坩埚下降炉,采用现有技术CN201224776Y,其轴向温场曲线如图2所示。The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but not limited thereto. The falling crucible furnace used for the growth of cadmium phosphorus silicon cadmium single crystal in the embodiment adopts the prior art CN201224776Y, and its axial temperature field curve is shown in FIG. 2 .
实施例中磷硅镉多晶料合成所用垂直管式电阻炉、双温区合成炉均为晶体生长领域现有技术。The vertical tubular resistance furnace and dual-temperature zone synthesis furnace used in the synthesis of phosphorus, silicon and cadmium polycrystalline materials in the examples are all prior art in the field of crystal growth.
实施例1、磷硅镉多晶料的单温区合成和磷硅镉单晶生长,步骤如下:Embodiment 1, single temperature zone synthesis of cadmium phosphorus silicon polycrystalline material and single crystal growth of cadmium phosphorus silicon cadmium, the steps are as follows:
1、磷硅镉多晶料的制备1. Preparation of cadmium phosphorus silicon polycrystalline material
将纯度为99.999%的三种单质元素按硅∶镉∶磷=1∶1∶2的比例装入石墨坩埚中,将石墨坩埚装入石英管中,抽真空至2×10-4Pa后封结石英管。将石英管装入垂直管式电阻炉内,将电阻炉从室温以30℃/h的升温速率升温至350℃,在350℃保温10-30h。然后从350℃以10℃/h的升温速率升温至1150℃,在1150℃保温20h,降至室温。打开石英管,石墨坩埚内得到的即为磷硅镉多晶料。所得磷硅镉多晶料的XRD谱图如图1所示,图中各峰与磷硅镉标准衍射图谱(PDF65-2725)的各峰值对应得非常好,表明所合成的是高纯的磷硅镉多晶料。Put three elemental elements with a purity of 99.999% into a graphite crucible at a ratio of silicon: cadmium: phosphorus = 1:1:2, put the graphite crucible into a quartz tube, vacuumize to 2×10 -4 Pa, and seal Quartz tube. Put the quartz tube into a vertical tubular resistance furnace, raise the temperature of the resistance furnace from room temperature to 350°C at a rate of 30°C/h, and keep it at 350°C for 10-30h. Then the temperature was raised from 350°C to 1150°C at a heating rate of 10°C/h, kept at 1150°C for 20 hours, and then lowered to room temperature. Open the quartz tube, and what is obtained in the graphite crucible is the polycrystalline material of phosphorus, silicon and cadmium. The XRD spectrogram of the obtained cadmium phosphorus silicon polycrystalline material is as shown in Figure 1, and each peak in the figure corresponds to each peak of the standard diffraction pattern of cadmium phosphorus silicon (PDF65-2725), indicating that what is synthesized is highly pure phosphorus Silicon cadmium polycrystalline material.
2、磷硅镉单晶生长2. Phosphorous silicon cadmium single crystal growth
将上述合成的磷硅镉多晶料装入氮化硼坩埚中,将氮化硼坩埚装入石英管内,抽真空至2×10-4Pa后用氢氧焰封结石英管。将装有磷硅镉多晶料的石英管装入坩埚下降炉中,使坩埚位于高温区位置,使坩埚下降炉升温,高温区的温度保持在1150℃,梯度区的温度梯度在5℃/cm,低温区的温度保持在1100℃;在高温区保温19h后开始使坩埚下降,下降速率为1~3mm/h;下降的同时坩埚以梯形波方式进行旋转,在一个旋转周期内,加速时间为30s,恒速时间为30s,最高恒定转速为30rad/min,减速时间为30s,减至0rad/min后进行相同的反向加速,恒速和减速,然后进入下一个旋转周期;将坩埚下降至低温区以后停止下降和旋转,然后以4℃/h降至1000℃,然后以20℃/h降至室温。Put the phospho-silicon-cadmium polycrystalline material synthesized above into a boron nitride crucible, put the boron nitride crucible into a quartz tube, vacuumize to 2×10 -4 Pa, and seal the quartz tube with a hydrogen-oxygen flame. Put the quartz tube containing phosphorus, silicon and cadmium polycrystalline material into the crucible descending furnace, place the crucible in the high temperature zone, raise the temperature of the crucible descending furnace, keep the temperature in the high temperature zone at 1150 ° C, and the temperature gradient in the gradient zone at 5 ° C / cm, the temperature in the low-temperature zone is kept at 1100°C; after 19 hours of heat preservation in the high-temperature zone, the crucible starts to descend at a rate of 1-3mm/h; while descending, the crucible rotates in a trapezoidal wave manner, and within one rotation cycle, the acceleration time The constant speed is 30s, the constant speed time is 30s, the maximum constant speed is 30rad/min, the deceleration time is 30s, after reducing to 0rad/min, the same reverse acceleration, constant speed and deceleration are performed, and then enter the next rotation cycle; the crucible is lowered After reaching the low temperature zone, stop the descent and rotation, then drop to 1000°C at 4°C/h, and then drop to room temperature at 20°C/h.
所得磷硅镉单晶体的照片如图3所示,对其定向切割后(112)面的单晶摇摆曲线如图4所示,峰形尖锐、无劈裂,表明所生长的晶体单晶性很好。The photo of the obtained phosphorous silicon cadmium single crystal is shown in Figure 3, and the single crystal rocking curve of the (112) plane after directional cutting to it is shown in Figure 4. good.
实施例2、磷硅镉多晶料的单温区合成和磷硅镉单晶生长,步骤如下:
1、磷硅镉多晶料的合成,如实施例1步骤1所述,所不同的是:磷硅镉多晶料的合成中,三种单质元素按硅∶镉∶磷=1∶1∶2.02的比例装入石墨坩埚中,其它步骤及参数与实施例1均相同。1, the synthesis of phosphorus-silicon-cadmium polycrystalline material, as described in embodiment 1 step 1, the difference is: in the synthesis of phosphorus-silicon-cadmium polycrystalline material, three kinds of elemental elements are by silicon: cadmium: phosphorus=1: 1: The ratio of 2.02 is packed in the graphite crucible, and other steps and parameters are all the same as in Example 1.
2、磷硅镉单晶生长2. Phosphorous silicon cadmium single crystal growth
将磷硅镉籽晶装入氮化硼生长坩埚的籽晶袋中,然后将步骤1中所合成的磷硅镉多晶料装入氮化硼生长坩埚中,将氮化硼生长坩埚装入石英管中,抽真空至2×10-4Pa后用氢氧焰封结石英管;将装有籽晶和磷硅镉多晶料的石英管装入坩埚下降炉中;升温坩埚下降炉,控制坩埚下降炉的温度的高温区的温度为1150℃,梯度区的温度梯度在5℃/cm,低温区的温度保持在1100℃;缓慢上升坩埚,使籽晶和多晶接触处的温度不低于磷硅镉的熔点1130℃,使籽晶底端的温度不高于1130℃,保温18h后开始使坩埚下降,下降速率为1~3mm/h;下降的同时坩埚以梯形波方式进行旋转,在一个旋转周期内,加速时间为30s,恒速时间为30s,最高恒定转速为30rad/min,减速时间为30s,减至0rad/min后反向加速,恒速和减速,然后进入下一个周期;将坩埚下降至低温区以后停止下降,然后以5℃/h降至1000℃,然后以20℃/h降温到700℃,以10℃/h降温到30℃。Put the cadmium phosphorus silicon seed crystal into the seed bag of the boron nitride growth crucible, then put the cadmium phosphorus silicon polycrystalline material synthesized in step 1 into the boron nitride growth crucible, and put the boron nitride growth crucible into In the quartz tube, after vacuuming to 2×10 -4 Pa, seal the quartz tube with an oxyhydrogen flame; put the quartz tube with the seed crystal and phosphorus, silicon, cadmium polycrystalline material into the crucible descending furnace; heat up the crucible and descend the furnace, Control the temperature of the crucible to lower the temperature of the high-temperature zone of the furnace to 1150°C, the temperature gradient in the gradient zone to be 5°C/cm, and the temperature in the low-temperature zone to remain at 1100°C; slowly raise the crucible so that the temperature at the contact point between the seed crystal and the polycrystal is not high. It is lower than the melting point of cadmium phosphorus silicon 1130℃, so that the temperature at the bottom of the seed crystal is not higher than 1130℃. After 18 hours of heat preservation, the crucible is lowered at a rate of 1 to 3mm/h; while falling, the crucible rotates in a trapezoidal wave. In one rotation cycle, the acceleration time is 30s, the constant speed time is 30s, the maximum constant speed is 30rad/min, the deceleration time is 30s, after reducing to 0rad/min, reverse acceleration, constant speed and deceleration, and then enter the next cycle ; Lower the crucible to the low temperature zone and then stop falling, then drop to 1000°C at 5°C/h, then drop to 700°C at 20°C/h, and drop to 30°C at 10°C/h.
实施例3、如实施例1所述,所不同的是:步骤2中,高温区的温度保持在1160℃,梯度区的温度梯度在8℃/cm,低温区的温度保持在1090℃;在高温区保温30h后开始使坩埚下降。Embodiment 3, as described in Example 1, the difference is: in
实施例4、如实施例1所述,所不同的是:步骤2中,高温区的温度保持在1160℃,梯度区的温度梯度在12℃/cm,低温区的温度保持在1070℃;在高温区保温30h后开始使坩埚下降。Embodiment 4, as described in Example 1, the difference is: in
实施例5、如实施例1所述,所不同的是:步骤2中,高温区的温度保持在1160℃,梯度区的温度梯度在15℃/cm,低温区的温度保持在1060℃;在高温区保温25h后开始使坩埚下降。Example 5, as described in Example 1, the difference is: in
实施例6、如实施例1所述,所不同的是:步骤2中,所使用的生长坩埚为石墨坩埚。Embodiment 6. As described in Embodiment 1, the difference is that in
实施例7、如实施例1所述,所不同的是:步骤2中,所使用的生长坩埚为镀碳的石英坩埚。Embodiment 7. As described in Embodiment 1, the difference is that in
实施例8、如实施例1所述,所不同的是:步骤2中,坩埚下降至低温区以后停止下降,然后以3℃/h降至1000℃,然后以15℃/h降至室温。Example 8, as described in Example 1, the difference is: in
实施例9、如实施例2所述,所不同的是:步骤2中,高温区的温度保持在1160℃,梯度区的温度梯度在8℃/cm,低温区的温度保持在1080℃;在高温区保温24h后开始使坩埚下降。Example 9, as described in Example 2, the difference is: in
实施例10、如实施例2所述,所不同的是:步骤2中,高温区的温度保持在1160℃,梯度区的温度梯度在12℃/cm,低温区的温度保持在1060℃;在高温区保温20h后开始使坩埚下降。Example 10, as described in Example 2, the difference is: in
实施例11、如实施例1所述,所不同的是:步骤2中,所使用的生长坩埚为石墨坩埚。Embodiment 11. As described in Embodiment 1, the difference is that in
实施例13、如实施例1所述,所不同的是:步骤2中,坩埚下降至低温区以后停止下降,然后以2℃/h降至1000℃,然后以15℃/h降至室温。Example 13, as described in Example 1, the difference is: in
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CN107268070A (en) * | 2017-06-10 | 2017-10-20 | 中国科学院合肥物质科学研究院 | A kind of method of low absorption phosphorus germanium zinc crystal growth |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101050546A (en) * | 2007-05-09 | 2007-10-10 | 四川大学 | Method and equipment for synthesizing polycrystal of phosphor, germanium and zinc |
CN101235542A (en) * | 2007-11-14 | 2008-08-06 | 哈尔滨工业大学 | Polycrystalline synthesis and single crystal growth method of germanium zinc phosphide |
CN101476154A (en) * | 2008-01-03 | 2009-07-08 | 中国科学院福建物质结构研究所 | Rapid coning method for heavy caliber potassium dihydrogen phosphate single crystal |
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---|---|---|---|---|
CN101050546A (en) * | 2007-05-09 | 2007-10-10 | 四川大学 | Method and equipment for synthesizing polycrystal of phosphor, germanium and zinc |
CN101235542A (en) * | 2007-11-14 | 2008-08-06 | 哈尔滨工业大学 | Polycrystalline synthesis and single crystal growth method of germanium zinc phosphide |
CN101476154A (en) * | 2008-01-03 | 2009-07-08 | 中国科学院福建物质结构研究所 | Rapid coning method for heavy caliber potassium dihydrogen phosphate single crystal |
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CN109750348A (en) * | 2018-11-22 | 2019-05-14 | 北京滨松光子技术股份有限公司 | A kind of growing method and equipment of radiation detection thallium bromide room temperature semiconductor monocrystalline |
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