CN102110787B - Contraposition method for OLED (organic light emitting diode) mask plate - Google Patents
Contraposition method for OLED (organic light emitting diode) mask plate Download PDFInfo
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- CN102110787B CN102110787B CN2010105332842A CN201010533284A CN102110787B CN 102110787 B CN102110787 B CN 102110787B CN 2010105332842 A CN2010105332842 A CN 2010105332842A CN 201010533284 A CN201010533284 A CN 201010533284A CN 102110787 B CN102110787 B CN 102110787B
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- subframe
- main frame
- daughter board
- mask plate
- glass substrate
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- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 239000011521 glass Substances 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 2
- 239000002184 metal Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention discloses a contraposition method for an OLED (organic light emitting diode) mask board, facilitating the contraposition between unit devices on the mask board and pixel units on a glass substrate. The method comprises the following steps: A: dividing the whole mask board to a group of daughter boards; B: fixing the daughter boards on subframes; C: distributing the daughter boards in parallel on a main frame, and arranging a motion mechanism between every subframe and the main frame; and D: arranging the glass substrate below the main frame, utilizing the motion mechanisms to drive the subframes to move the daughter boards, and enabling the positions of unit devices on the auxiliary plates to correspond to those of the pixel units on the glass substrate. By using the method, the corresponding daughter boards are replaced instead of the whole mask board when the position of a unit device can not correspond to the pixel unit, so that the material economization is facilitated and the production cost is reduced.
Description
Technical field
The present invention relates to a kind of OLED mask plate to method for position.
Background technology
OLED, promptly Organic Light Emitting Diode in the OLED device fabrication processes, needs to use metal mask plate to reach the purpose to light emitting pixel subregion vapor deposition organic material on the glass substrate.Development along with the OLED technology; OLED product size and glass substrate size are all in continuous increase; This just requires the size of evaporation metal mask plate constantly to increase; But because metal mask plate generally all very thin (generally being no more than 50 μ m), and between OLED evaporation process requirement metal mask plate and the glass substrate very high aligning accuracy (bit errors is at-3 μ m～+ 3 μ m between the pixel cell of metal mask plate unit component and glass substrate) to be arranged, therefore in the OLED production process; Tend to produce owing to contraposition between metal mask plate and the glass substrate is forbidden to cause product bad, greatly influence production efficiency and production cost.Simultaneously, in existing technology, be that mask plate is welded direct on the main frame, so the position between mask plate and the main frame can't be adjusted; And because the volume of mask plate, main frame and glass substrate is bigger and heavier, be not easy to move, therefore difficult adjustment mask plate is with respect to the relative position between the glass substrate; In addition; Even adjust to the right place basically in whole mask plate position, still possibly have the individual elements device can't be accurate with the pixel cell contraposition on the glass substrate, and change whole mask plate with regard to needs this moment; And the price of metal mask plate is generally relatively more expensive, causes production cost higher and cause very big waste like this.
Chinese patent 200580008820.4 discloses a kind of through the planar motor objective table device of X-Y direction and direction of rotation high accuracy action relatively in addition; This device is provided with the scale assembly on pedestal; Bottom surface sections in driving objective table portion is provided with 32 dimension angular transducers; Constitute surface encoder by scale assembly and 2 dimension angular transducers, and carry out the position finding of driving objective table through surface encoder.Can carry out the position finding of the relative pedestal of objective table accurately through this device, get final product accurate moving stage, this objective table device promptly can be used as one 2 dimension travel mechanism.
Chinese patent 200410031334.1 discloses a kind of objective table device, and this device slides along X-direction, Y direction on the process stone platform of Surface Machining through the mobile physical efficiency that the hydrostatic bearing liner supports.This device also can be used as one 2 dimension travel mechanism.
Summary of the invention
The technical problem that the present invention solves provides a kind of OLED mask plate that can be conveniently the unit component on the mask plate and the pixel cell on the glass substrate be carried out contraposition to method for position.
The technical solution adopted for the present invention to solve the technical problems is: the OLED mask plate may further comprise the steps method for position:
A, whole mask plate is divided into one group of daughter board;
B, daughter board is fixed on the subframe;
C, subframe is arranged on the main frame side by side, and is provided with travel mechanism between subframe and the main frame;
D, glass substrate is placed main frame below, move, make the pixel cell contraposition on the glass substrate below unit component and the daughter board on the daughter board through travel mechanism's driven element frame strip mover plate.
Further be: said travel mechanism is 2 dimension travel mechanisms.
Further be: said daughter board quantity is 2～20.
Further be: said subframe is a rectangle, and the unit component on the said daughter board is positioned at the rectangle frame of subframe.
Further be: said main frame is a rectangle, and the rectangle frame of said subframe is positioned at the rectangle frame of main frame.
The invention has the beneficial effects as follows:
1, can be through travel mechanism conveniently with unit component on the daughter board and the rubber and plastic unit contraposition on the glass substrate;
2, after the unit component on a certain daughter board moves through travel mechanism; Certain unit component and the pixel cell contraposition on the glass substrate on the daughter board are not accurate enough, can not conform to quality requirements then replaceable this daughter board; Promptly make a daughtercard board again and replace this daughter board according to bit errors; Because other daughter board need not to change, but therefore economical with materials reduces production costs.
3, adopt 2 dimension travel mechanisms that subframe is moved along both direction, can further facilitate, help the quick contraposition of the pixel cell on unit component on the daughter board and the glass substrate to the moving of subframe.
Description of drawings
Fig. 1 is daughter board and subframe sketch map;
Fig. 2 is for to be arranged on the sketch map on the main frame with subframe;
Fig. 3 is that the position of daughter board, subframe, travel mechanism, mainboard and glass substrate concerns sketch map;
Fig. 4 is the sketch map of 2 dimension travel mechanisms of screw mechanism formation.
Be labeled as among the figure: 1-main frame, 2, the 4-rectangle frame, 3-subframe, 5-unit component, 6-daughter board, 7-travel mechanism, 8-glass substrate, 9-chute, 10, the 11-screw mechanism, 12-slide block.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
To shown in Figure 3, OLED mask plate of the present invention may further comprise the steps method for position like Fig. 1:
A, whole mask plate is divided into one group of daughter board 6;
B, daughter board 6 is fixed on the subframe 3;
C, subframe 3 is arranged on the main frame 1 side by side, and is provided with travel mechanism 7 between subframe 3 and the main frame 1;
D, glass substrate 8 is placed main frame 1 below, drive daughter boards 6 through travel mechanism's 7 driven element frameworks 3 and move, make the pixel cell contraposition on the glass substrate 8 of unit component 5 and daughter board 6 belows on the daughter board 6.
The quantity of above-mentioned daughter board 6 can be set according to actual needs, when cutting apart whole mask plate, can cut apart successively along the orientation of the unit component on the mask plate; Form one group of rectangle daughter board, because each daughter board need be equipped with a sub-framework, daughter board quantity is many more; The subframe that needs is many more, needs the travel mechanism of setting also many more, and installation and control are loaded down with trivial details more; Therefore daughter board quantity should control in the reasonable scope, and in the method for the present invention, the preferred amount of daughter board is 2～20; For example can be 2,10,19 etc.Above-mentioned travel mechanism can be unidirectional travel mechanism, like screw mechanism, and slideway mechanism, cotter mechanism etc.When being provided with, can the screw rod of screw mechanism be arranged on the main frame, will be arranged on the subframe, can drive travel mechanism through rotary screw and move with the screw rod nut engaged; Also can slideway be set on main frame, pulley is set on subframe, also can realize moving of subframe through slideway and pulley.
Though above-mentioned single-phase travel mechanism can be conveniently to daughter board adjustment position, because the antithetical phrase Board position is adjusted in one direction, adjustment capability is limited.In order to further facilitate moving to subframe; And then the adjustment capability of increase antithetical phrase Board position; Said travel mechanism 7 is 2 dimension travel mechanisms; Be that subframe can move on X axle and Y axle both direction with respect to main frame, can the length direction of main frame be defined as the X axle, the Width of main frame is defined as the Y axle; Then 2 dimension travel mechanisms can drive subframe along moving on the length direction of main frame and the Width, and then can make things convenient for unit component and the pixel cell contraposition on the glass substrate on the daughter board.Above-mentioned 2 dimension travel mechanisms are prior art, disclosed device in the Chinese patent 200580008820.4 for example, and perhaps Chinese patent 200410031334.1 disclosed devices also can be the objective table travel mechanism that uses on the conventional microscope.When being provided with; Can 22 dimension travel mechanisms be separately positioned on the left and right side frame below of subframe; The frame structure that is used to support 2 dimension travel mechanisms accordingly is set on the main frame, but moves, and then reach the purpose of adjustment daughter board position through 2 dimension travel mechanism driven element frameworks; Certainly also can 42 dimension travel mechanisms be separately positioned on 4 frame belows all around of subframe, on the main frame also relative set be useful on the frame structure that supports 2 dimension travel mechanisms.In addition; Also can realize the adjustment to 2 dimension directions of subframe with structures such as screw mechanism or meticulous screws, as shown in Figure 4, main frame 1 comprises chute 9 and the slide block 12 that can move along chute 9; Slide block 12 moves along chute 9 by being arranged on slide block 12 inner screw mechanism 11 controls; Also be provided with the screw mechanism vertical 10 on the slide block 12, be connected with subframe 3 on the screw mechanism 10, move through screw mechanism 10 may command subframes 3 with the chute bearing of trend; And the moving direction of subframe 3 is vertical with the moving direction of slide block 12, so just can realize that 2 dimensions of daughter board 6 move.
In addition, the shape of said frame can be for multiple, and preferred implementation is: said subframe 3 is rectangle, and the unit component 5 on the said daughter board 6 is positioned at the rectangle frame 4 of subframe 3.Adopt said mechanism, be convenient to subframe is arranged on the main frame, also be convenient to each subframe is adjusted.Certainly, subframe also can be shapes such as pentagon.
On the basis of the above, as shown in Figure 2, in order further to be convenient to subframe to be adjusted, said main frame 1 is a rectangle, the rectangle frame 4 of said subframe 3 is positioned at the rectangle frame 2 of main frame 1.Adopt said structure also to be convenient to through daughter board to the pixel cell vapor deposition luminous organic material on the glass substrate of daughter board below.
Claims (4)
1.OLED mask plate to method for position, may further comprise the steps:
A, whole mask plate is divided into one group of daughter board (6);
B, daughter board (6) is fixed on the subframe (3);
C, subframe (3) is arranged on the main frame (1) side by side, and is provided with travel mechanism (7) between subframe (3) and the main frame (1);
D, glass substrate (8) is placed main frame (1) below, drive daughter board (6) through travel mechanism (7) driven element framework (3) and move, make the pixel cell contraposition on the glass substrate (8) of unit component (5) and daughter board (6) below on the daughter board (6);
Said travel mechanism (7) is 2 dimension travel mechanisms, is specially, and said main frame (1) comprises chute (9) and the slide block (12) that can move along chute (9), and slide block (12) is mobile along chute (9) by being arranged on inner first screw mechanism (11) control of slide block (12); Also be provided with second screw mechanism (10) vertical on the slide block (12), be connected with subframe (3) on second screw mechanism (10), move through second screw mechanism (10) control subframe (3) with the chute bearing of trend.
2. OLED mask plate as claimed in claim 1 is characterized in that method for position: said daughter board (6) quantity is 2～20.
3. OLED mask plate as claimed in claim 1 is characterized in that method for position: said subframe (3) is a rectangle, and the unit component (5) on the said daughter board (6) is positioned at the rectangle frame (4) of subframe (3).
4. OLED mask plate as claimed in claim 3 is characterized in that method for position: said main frame (1) is a rectangle, and the rectangle frame (4) of said subframe (3) is positioned at the rectangle frame (2) of main frame (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105332842A CN102110787B (en) | 2010-11-05 | 2010-11-05 | Contraposition method for OLED (organic light emitting diode) mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105332842A CN102110787B (en) | 2010-11-05 | 2010-11-05 | Contraposition method for OLED (organic light emitting diode) mask plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102110787A CN102110787A (en) | 2011-06-29 |
| CN102110787B true CN102110787B (en) | 2012-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105332842A Expired - Fee Related CN102110787B (en) | 2010-11-05 | 2010-11-05 | Contraposition method for OLED (organic light emitting diode) mask plate |
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| Country | Link |
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| CN (1) | CN102110787B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205703B (en) * | 2012-01-16 | 2016-04-27 | 昆山允升吉光电科技有限公司 | Improve method and the device thereof of mask plate aperture position precision |
| CN102776473B (en) * | 2012-08-10 | 2014-10-29 | 深圳市华星光电技术有限公司 | Mask device for evaporating organic materials of organic light-emitting diodes |
| CN107354425B (en) * | 2017-06-15 | 2019-09-10 | 武汉华星光电半导体显示技术有限公司 | Spliced fine metal mask plate and preparation method thereof |
| CN107326325B (en) * | 2017-06-30 | 2019-07-23 | 武汉华星光电半导体显示技术有限公司 | mask |
| CN109722624B (en) * | 2017-10-31 | 2021-03-02 | 昆山国显光电有限公司 | Mask assembly |
| CN109750256B (en) * | 2019-03-25 | 2020-12-18 | 京东方科技集团股份有限公司 | Preparation method of mask assembly and mask assembly |
| CN109750257B (en) * | 2019-03-26 | 2021-03-26 | 京东方科技集团股份有限公司 | Mask plate and manufacturing method thereof |
| CN115418605B (en) * | 2022-09-26 | 2024-04-16 | 云谷（固安）科技有限公司 | Mask plate frame and mask plate assembly |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1362642A (en) * | 2000-11-28 | 2002-08-07 | Lg电子株式会社 | Mask for making display board |
| CN1854909A (en) * | 2005-04-20 | 2006-11-01 | 应用菲林股份有限两合公司 | Method and apparatus for positioning a mask |
| JP2009301789A (en) * | 2008-06-11 | 2009-12-24 | Hitachi Displays Ltd | Method of manufacturing organic electroluminescent display device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5081516B2 (en) * | 2007-07-12 | 2012-11-28 | 株式会社ジャパンディスプレイイースト | Vapor deposition method and vapor deposition apparatus |
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2010
- 2010-11-05 CN CN2010105332842A patent/CN102110787B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1362642A (en) * | 2000-11-28 | 2002-08-07 | Lg电子株式会社 | Mask for making display board |
| CN1854909A (en) * | 2005-04-20 | 2006-11-01 | 应用菲林股份有限两合公司 | Method and apparatus for positioning a mask |
| JP2009301789A (en) * | 2008-06-11 | 2009-12-24 | Hitachi Displays Ltd | Method of manufacturing organic electroluminescent display device |
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| Publication number | Publication date |
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| CN102110787A (en) | 2011-06-29 |
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Granted publication date: 20120725 Termination date: 20201105 |
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