CN102110544B - Device for leading out vacuum signal of moving part position - Google Patents
Device for leading out vacuum signal of moving part position Download PDFInfo
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- CN102110544B CN102110544B CN 200910248764 CN200910248764A CN102110544B CN 102110544 B CN102110544 B CN 102110544B CN 200910248764 CN200910248764 CN 200910248764 CN 200910248764 A CN200910248764 A CN 200910248764A CN 102110544 B CN102110544 B CN 102110544B
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052802 copper Inorganic materials 0.000 claims abstract description 19
- 239000010949 copper Substances 0.000 claims abstract description 19
- 238000005096 rolling process Methods 0.000 claims abstract description 17
- 230000033001 locomotion Effects 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 230000005693 optoelectronics Effects 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000003068 static effect Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000035807 sensation Effects 0.000 description 3
- 230000011664 signaling Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The invention relates to a piece of equipment for leading a signal in the vacuum environment to the atmospheric environment, in particular to a device for leading out a vacuum signal of a moving part position. A corrugated pipe and a flange are successively sheathed on a straight rod; one end of the corrugated pipe is connected with the straight rod, and the other end of the corrugated pipe is connected with one end of the flange; the other end of the flange is connected with a vacuum chamber in a sealing mode; the part of the straight rod, which is below the flange, is inserted into the vacuum chamber; the bottom end of the straight rod is provided with a contact in rolling friction with the moving part; the position on the straight rod, which is near the top, is provided with a light passing slit; photoswitches are installed on the flange and on two sides of the straight rod, which are provided with the light passing slits; the outer part of the straight rod, which is positioned in the vacuum chamber, is sheathed with a vertical casing pipe connected with the flange; and a guiding copper sleeve used for limiting the radial translational-motion freedom degree of the straight rod is arranged between the vertical casing pipe and the straight rod. In the equipment, a mechanical contact signal is led out from the vacuum environment by rigid transfer and is output after being converted into a precise photoelectric signal, movement positioning is accurate, and signal response is timely.
Description
Technical field
The present invention relates to the signal in the vacuum environment is drawn out to the equipment of atmospheric environment, specifically the vacuum signal ejector of a kind of moving component position.
Background technology
At present, existing vacuum signal ejector can be divided into two kinds, and wherein a kind of is that devices such as contact switch and the cable of connecting wires are directly placed vacuum environment, and terminals are drawn electric wire by modes such as vacuum ceramic sealing-ins.This mode requires the shell of contact switch and movement all will use the stainless steel metal material, could satisfy indexs such as vacuum deflation rate and heat-resisting quantity; And adopt this mode in case contact switch damage in use just must system-down destruction vacuum can be taken out replacing, bring big inconvenience to operation.Another kind of vacuum signal ejector adopts the light sensation mode, its structural principle is to arrange an optical beam generating device at one end the atmospheric environment, by light transmissive material media such as glass light beam is introduced vacuum environment, the light beam straight line passes vacuum and is captured and convert to signal of telecommunication output with the glass media by the relative light sensation switch that is arranged in other end atmospheric environment.The shortcoming of this mode is the vacuum environment that can only be used for cleaning, in case because printing opacity media such as glass are blocked or pollute, or disturbed by other light source, light beam line just can not effectively pass, thereby just can not produce signal output or generation rub-out signal.
Summary of the invention
The object of the present invention is to provide the vacuum signal ejector of a kind of moving component position.This device is placed on mechanical contact in the vacuum environment, and optoelectronic switch is placed in the atmospheric environment, by rigid of transmission the position signalling of moving component is drawn from vacuum, has overcome the deficiency of above-mentioned two kinds of existing modes.
The objective of the invention is to be achieved through the following technical solutions:
The present invention includes straight-bar, bellows, flange, optoelectronic switch and vertical annulus, wherein bellows and flange are set on the straight-bar successively, and an end of bellows links to each other with straight-bar, and the other end is connected with an end of flange, and the other end and the vacuum chamber of flange are tightly connected; Described straight-bar is positioned at the following part of flange and inserts vacuum chamber and bottom and be provided with contact with the moving component rolling friction, straight-bar is provided with logical optical slits near the position on top, and described optoelectronic switch is installed on the flange, be positioned at the both sides that straight-bar is provided with logical optical slits; The outer cover that is positioned at the internal vacuum chamber branch at straight-bar is provided with the vertical annulus that links to each other with flange, is provided with the radially guiding copper sheathing of translational degree of freedom of restriction straight-bar between this vertical annulus and the straight-bar.
Wherein: be provided with holdout device static balance and holding contact on the top of straight-bar apart from the adjusting device of moving component relative altitude position, this adjusting device comprises fixed supported slab, regulates bolt and locking nut, wherein fixed supported slab is installed in the top of straight-bar, regulate bolt thread and be connected on the fixed supported slab, locked by locking nut; Described optoelectronic switch links to each other with an end of horizontal support plate, and the other end of horizontal support plate is connected with an end of perpendicular support plate, and the other end of perpendicular support plate is installed on the flange, by the position of the adjustable lay the grain electric switch of horizontal, vertical support plate; The top of described vertical annulus links to each other with flange, is provided with the copper sheathing that leads of going up that is enclosed within on the straight-bar between vertical annulus and the flange, and the bottom of vertical annulus compresses the following guiding copper sheathing that is enclosed within on the straight-bar by circlip; The bottom of described straight-bar is hinged with rolling bearing by the elastic cylinder bearing pin, and this elastic cylinder bearing pin constitutes the contact jointly with rolling bearing and contacts with moving component; The vacuum seal of described straight-bar axial motion is the bellows movable sealing.
Advantage of the present invention and good effect are:
1. the present invention draws mechanical contact signal (being the position signalling of moving component) by rigid of transmission from vacuum environment, and be blocked or seen through by logical optical slits by the light beam that optoelectronic switch sends and convert accurate photosignal output to, motion positions is accurate, and signal response is timely.
2. the present invention has fixed on the straight-bar top of metal to be threaded and has connected the fixed supported slab of adjusting bolt, be subjected to the downward movement tendency of atmospheric pressure effect by regulating bolt obstruction straight-bar, the static balance of holdout device and holding contact are apart from the relative altitude position of moving component.
3. optoelectronic switch of the present invention is installed on the flange by horizontal, vertical support plate, by can adjust the position of optoelectronic switch to the adjusting of horizontal, vertical support plate.
4. the present invention's sheathed upper and lower guiding copper sheathing on straight-bar can limit the degree of freedom of the radially translation of straight-bar, guarantees that straight-bar can only in axial direction move.
5. the mode that the elastic cylinder bearing pin cooperates with rolling bearing is adopted in the contact of the present invention and moving component, and rolling bearing turns, and the frictional force that the contact is located remains less force of rolling friction.
6. the present invention is simple in structure, and is easy to use.
Description of drawings
Fig. 1 is front view of the present invention;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the A-A cutaway view of Fig. 1;
Fig. 4 is mechanics principle figure of the present invention;
Wherein: 1 is fixed supported slab, and 2 is straight-bar, and 3 is bellows, 4 is flange, and 5 is optoelectronic switch, and 6 is horizontal support plate, 7 is first hold-down screw, and 8 is second hold-down screw, and 9 is hold-down nut, 10 are perpendicular support plate, 11 is set bolt, and 12 is locking nut, and 13 for regulating bolt, 14 is last guiding copper sheathing, 15 is the 3rd hold-down screw, and 16 is vertical annulus, and 17 are the copper sheathing that leads down, 18 is circlip, 19 is the elastic cylinder bearing pin, and 20 is rolling bearing, and 21 is moving component, 22 are logical optical slits, and 23 is sunk screw.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, the present invention includes fixed supported slab 1, straight-bar 2, bellows 3, flange 4, optoelectronic switch 5, horizontal support plate 6, perpendicular support plate 10, regulate bolt 13, vertical annulus 16 and rolling bearing 20, straight-bar 2 tops one side is provided with concave station, and fixed supported slab 1 usefulness sunk screw 23 is fixedly mounted on the concave station of straight-bar 2, connects as one with straight-bar 2; The axial cross section of straight-bar 2 is "T"-shaped, bellows 3 is set on the straight-bar 2, one end of bellows 3 adopts plasma arc welding (PAW) to be welded on the reducing place of straight-bar 2, and the other end welds the other end of flange 4 and vacuum chamber static seal with an end that is set in the flange 4 on the straight-bar 2; The vacuum seal of straight-bar 2 axial motions is the bellows movable sealing.Straight-bar 2 is positioned at the part of flange below 4 and inserts vacuum chamber and be hinged with rolling bearing 20 in the bottom by elastic cylinder bearing pin 19, this elastic cylinder bearing pin 19 contacts with moving component with rolling bearing 20 common formation contacts, rolling bearing 20 is rotatable, makes the frictional force at place, contact remain less force of rolling friction.Straight-bar 2 is provided with logical optical slits 22 near the position on tops, and in order to the beam channel as light signal, optoelectronic switch 5 is installed on the flange 4, be positioned at the both sides that straight-bar 2 is provided with logical optical slits 22; Optoelectronic switch 5 links to each other by first hold-down screw 7 with an end of horizontal support plate 6, the other end of horizontal support plate 6 is connected by second hold-down screw 8 with an end of perpendicular support plate 10, the other end of perpendicular support plate 10 is installed on the flange 4 by hold-down nut 9 and set bolt 11, horizontal, vertical support plate 6,10 relative position can be regulated by first hold-down screw 7, second hold-down screw 8, hold-down nut 9, and then the position of optoelectronic switch 5 can be adjusted.The outer cover that is positioned at the internal vacuum chamber branch at straight-bar 2 is provided with the vertical annulus 16 that links to each other with flange 4, and the top of vertical annulus 16 is affixed with flange 4 by the 3rd hold-down screw 15, and the other end is free end; Flange 4 is edge of a knife flange, its bottom surface central authorities have step trough, and the top of vertical annulus 16 is provided with seam, are provided with the copper sheathing 14 that leads of going up that is enclosed within on the straight-bar 2 between vertical annulus 16 and the flange 4, should go up guiding copper sheathing 14 and be compressed by vertical annulus 16, and by step trough and seam location; The bottom of vertical annulus 16 has groove, is equipped with the following guiding copper sheathing 17 that is enclosed within on the straight-bar 2 in the groove and is pressed in the vertical annulus 16 by circlip 18; Upper and lower guiding copper sheathing 14,17 guarantees that in order to limit the radially degree of freedom of translation of straight-bar 2 straight-bar 2 can only move vertically.Fixed supported slab 1 extends radially outward, be threaded at extension and regulated bolt 13, the bottom of this adjusting bolt 13 is connected on the flange 4, when atmospheric pressure acts on the straight-bar 2, straight-bar 2 will move downward, and bellows 3 is also with compressed, the effect of regulating bolt 13 is exactly to regulate bolt 13 by rotation, utilize 4 pairs of reaction forces of regulating bolt of flange, hinder the movement tendency of straight-bar 2, the static balance of holdout device and holding contact are apart from the relative altitude position of moving component; After 13 adjustings of adjusting bolt put in place, locked with locking nut 12.
Operation principle of the present invention is:
The top end of the straight-bar 2 of metal is in atmospheric environment, the bottom is in the vacuum environment, when straight-bar 2 is static, the light beam that the emission part of optoelectronic switch 5 one ends sends just can be by near the logical optical slits 22 straight-bar 2 tops, received by the light sensation portion of optoelectronic switch 5 other ends, be output as " opening " signal this moment.As shown in Figure 3, when moving component 21 in vacuum chamber with speed V1 horizontal movement collision during as the rolling bearing 20 of contact, the horizontal component Fx of contact force F is offset by upper and lower guiding copper sheathing 14,17 radial load N; The axial thrust load Fy of contact force F overcomes vacuum outside atmospheric pressure P, device gravity and upper and lower guiding copper sheathing 14,17 and the frictional force f of straight-bar 2, and straight-bar 2 is moved upward vertically with speed V2.Because can assert, the straight-bar of metal is approximately rigid body, according to each particle velocity, the equal principle of displacement on the rigid body in the plane and straight line motion, logical optical slits 22 on the straight-bar 2 is also along with straight-bar in axial direction moves, at this moment, because logical optical slits 22 positions change, the light beam that the emission part of optoelectronic switch 5 one ends sends is blocked, and this moment, optoelectronic switch was output as " pass " signal, thereby realizes the position signalling of moving component is drawn from vacuum environment.
Optoelectronic switch of the present invention is commercial product, purchases in the HPV-S12 grooved optoelectronic switch of the military company in Japanese mountain.
Claims (6)
1. the vacuum signal ejector of a moving component position, it is characterized in that: comprise straight-bar (2), bellows (3), flange (4), optoelectronic switch (5) and vertical annulus (16), wherein bellows (3) and flange (4) are set on the straight-bar (2) successively, one end of bellows (3) links to each other with straight-bar (2), the other end is connected with an end of flange (4), and the other end and the vacuum chamber of flange (4) are tightly connected; Described straight-bar (2) is positioned at the following part of flange (4) and inserts vacuum chamber and bottom and be provided with contact with the moving component rolling friction, straight-bar (2) is provided with logical optical slits (22) near the position on top, and described optoelectronic switch (5) is installed in flange (4) and goes up, is positioned at the both sides that straight-bar (2) is provided with logical optical slits (22); The outer cover that is positioned at the internal vacuum chamber branch at straight-bar (2) is provided with the vertical annulus (16) that links to each other with flange (4), is provided with the radially guiding copper sheathing of translational degree of freedom of restriction straight-bar between this vertical annulus (16) and the straight-bar (2).
2. press the vacuum signal ejector of the described moving component of claim 1 position, it is characterized in that: be provided with holdout device static balance and holding contact on the top of straight-bar (2) apart from the adjusting device of moving component relative altitude position, this adjusting device comprises fixed supported slab (1), regulates bolt (13) and locking nut (12), wherein fixed supported slab (1) is installed in the top of straight-bar (2), regulate bolt (13) and be threaded on the fixed supported slab (1), locked by locking nut (12).
3. press the vacuum signal ejector of the described moving component of claim 1 position, it is characterized in that: described optoelectronic switch (5) links to each other with an end of horizontal support plate (6), the other end of horizontal support plate (6) is connected with an end of perpendicular support plate (10), the other end of perpendicular support plate (10) is installed on the flange (4), by the position of horizontal, vertical support plate (6,10) adjustable lay the grain electric switches (5).
4. press the vacuum signal ejector of the described moving component of claim 1 position, it is characterized in that: described guiding copper sheathing comprises guiding copper sheathing (14) and the copper sheathing (17) that leads down, the top of described vertical annulus (16) links to each other with flange (4), be provided with the copper sheathing (14) that leads of going up that is enclosed within on the straight-bar (2) between vertical annulus (16) and the flange (4), the bottom of vertical annulus (16) compresses the following guiding copper sheathing (17) that is enclosed within on the straight-bar (2) by circlip (18).
5. press the vacuum signal ejector of the described moving component of claim 1 position, it is characterized in that: the bottom of described straight-bar (2) is hinged with rolling bearing (20) by elastic cylinder bearing pin (19), and this elastic cylinder bearing pin (19) constitutes the contact jointly with rolling bearing (20) and contacts with moving component.
6. by the vacuum signal ejector of the described moving component of claim 1 position, it is characterized in that: the vacuum seal of described straight-bar (2) axial motion is the bellows movable sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910248764 CN102110544B (en) | 2009-12-25 | 2009-12-25 | Device for leading out vacuum signal of moving part position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910248764 CN102110544B (en) | 2009-12-25 | 2009-12-25 | Device for leading out vacuum signal of moving part position |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102110544A CN102110544A (en) | 2011-06-29 |
| CN102110544B true CN102110544B (en) | 2013-09-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910248764 Active CN102110544B (en) | 2009-12-25 | 2009-12-25 | Device for leading out vacuum signal of moving part position |
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| Country | Link |
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| CN (1) | CN102110544B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109166762A (en) * | 2018-09-19 | 2019-01-08 | 中山瑞科新能源有限公司 | A kind of contact switch for vacuum equipment |
| CN109114222A (en) * | 2018-10-10 | 2019-01-01 | 桂林实创真空数控设备有限公司 | A kind of flexible sealing conducting wire rigid-connecting device eliminating vacuum chamber deformation and influencing |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0543732A1 (en) * | 1991-11-22 | 1993-05-26 | Gec Alsthom Sa | Vacuum switch fitted with self-diagnosis means |
| CN201130015Y (en) * | 2007-12-26 | 2008-10-08 | 上海西屋开关有限公司 | Vacuum circuit breaker contact wearing capacity detecting device |
| CN101331573A (en) * | 2005-12-16 | 2008-12-24 | 托马斯及贝茨国际股份有限公司 | Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device |
| CN101477915A (en) * | 2009-01-17 | 2009-07-08 | 大连理工大学 | Light controlled vacuum switch module |
| CN201569447U (en) * | 2009-12-25 | 2010-09-01 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum signal leading-out device of motion part position |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59206733A (en) * | 1983-04-22 | 1984-11-22 | Toshiba Corp | Monitoring device of vacuum in vacuum apparatus used in connection to high potential |
-
2009
- 2009-12-25 CN CN 200910248764 patent/CN102110544B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0543732A1 (en) * | 1991-11-22 | 1993-05-26 | Gec Alsthom Sa | Vacuum switch fitted with self-diagnosis means |
| CN101331573A (en) * | 2005-12-16 | 2008-12-24 | 托马斯及贝茨国际股份有限公司 | Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device |
| CN201130015Y (en) * | 2007-12-26 | 2008-10-08 | 上海西屋开关有限公司 | Vacuum circuit breaker contact wearing capacity detecting device |
| CN101477915A (en) * | 2009-01-17 | 2009-07-08 | 大连理工大学 | Light controlled vacuum switch module |
| CN201569447U (en) * | 2009-12-25 | 2010-09-01 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum signal leading-out device of motion part position |
Non-Patent Citations (1)
| Title |
|---|
| JP昭59-206733A 1984.11.22 |
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| CN102110544A (en) | 2011-06-29 |
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| C53 | Correction of patent for invention or patent application | ||
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Address after: Xinyuan street Shenyang Hunnan New District of 110197 cities in Liaoning province. Applicant after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Applicant before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
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Free format text: CORRECT: APPLICANT; FROM: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S TO: CAS SHENYANG SCIENTIFIC INSTRUMENT CO., LTD. |
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Inventor after: Lei Zhenlin Inventor after: Tong Lei Inventor after: Wang Liang Inventor after: Sun Ying Inventor after: Lin Xiuqing Inventor after: Tong Hui Inventor before: Tong Lei Inventor before: Wang Liang Inventor before: Sun Ying Inventor before: Lin Xiuqing Inventor before: Tong Hui |
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