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CN102101205A - Electrochemical processing device, processing method, and electrode unit thereof - Google Patents

Electrochemical processing device, processing method, and electrode unit thereof Download PDF

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CN102101205A
CN102101205A CN2009102613413A CN200910261341A CN102101205A CN 102101205 A CN102101205 A CN 102101205A CN 2009102613413 A CN2009102613413 A CN 2009102613413A CN 200910261341 A CN200910261341 A CN 200910261341A CN 102101205 A CN102101205 A CN 102101205A
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electrode
permeable layer
workpiece
electrolyte
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CN102101205B (en
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洪荣洲
许志成
林大裕
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Metal Industries Research and Development Centre
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Abstract

The invention relates to an electrochemical processing device, a processing method and an electrode unit thereof, which comprise an electrode, a magnetic conduction layer, a plurality of magnetic bodies and a magnetic control unit, wherein the magnetic control unit is used for processing at least one workpiece, the workpiece and the electrode are respectively positioned in an electrolyte, the magnetic conduction layer is formed on the surface of the external part of the electrode, the magnetic bodies are added into the electrolyte, the magnetic bodies are non-conductive, the magnetic control unit is coupled with the magnetic conduction layer and controls the magnetic conduction layer to absorb the magnetic bodies so that the magnetic bodies form an insulator to cover the magnetic conduction layer. Because the magnetic bodies are adsorbed by the control magnetic conduction layer, the thickness of the magnetic bodies adsorbed on the electrodes can be controlled, namely the thickness of the insulator is controlled, and therefore, the processing precision can be improved, and the processing cost can be saved.

Description

电化学加工装置及加工方法及其电极单元Electrochemical processing device, processing method, and electrode unit thereof

技术领域technical field

本发明是有关于一种加工装置及方法,尤其是指一种电化学加工装置及加工方法。The present invention relates to a processing device and method, in particular to an electrochemical processing device and a processing method.

背景技术Background technique

电化学(electrochemistry)是一门涉及电子与化学反应相互关系的科学,而电子的各种性质与行为,直到近百年来,才逐渐明了。使得电化学虽比其它科学古老,但发展却较为延迟。然而,在环保意识高涨的今日,电化学已成为一门「新兴」且倍受期待的科学。一般而言,电化学(electrochemistry)是指与电有关的化学现象的技术,而探讨化学反应与电荷转移间的关系,并利用电源的电位而调整电极的表面电子能量,使得电活性物种(electroactivespecies)与电极发生电子转移。Electrochemistry is a science that involves the relationship between electrons and chemical reactions, and the various properties and behaviors of electrons have not been gradually understood until the past century. Although electrochemistry is older than other sciences, its development is relatively delayed. However, in today's rising awareness of environmental protection, electrochemistry has become an "emerging" and highly anticipated science. Generally speaking, electrochemistry refers to the technology of chemical phenomena related to electricity, and explores the relationship between chemical reaction and charge transfer, and uses the potential of the power supply to adjust the surface electron energy of the electrode, so that electroactive species ) to transfer electrons to the electrode.

基于此原理,现今发展出电化学加工(electro chemicalmachining),其有别于传统加工方法,是用来加工极硬材料或者传统加工方法难以加工的材料或加工对象,电化学加工方法又称为电解加工。然而,其限制条件是加工对象必须可导电。运用电化学加工时,电极是阴极用于作为刀具,而加工对象是阳极,也就是电极与加工对象分别耦接电源的阴极与阳极。电源的高电流从加工对象经电解液至电极,如此即可对加工对象进行加工,而移除加工对象不要的部份,电化学加工在加工的过程中没有和加工对象接触,也没有电火花的产生,所以相当安全。Based on this principle, electrochemical machining (electrochemical machining) has been developed, which is different from traditional machining methods. It is used to process extremely hard materials or materials or objects that are difficult to process by traditional machining methods. Electrochemical machining is also called electrolysis. processing. However, the limitation is that the processed object must be electrically conductive. When using electrochemical machining, the electrode is the cathode used as a tool, and the processing object is the anode, that is, the electrode and the processing object are respectively coupled to the cathode and anode of the power supply. The high current of the power supply passes through the electrolyte from the processing object to the electrode, so that the processing object can be processed and the unnecessary part of the processing object is removed. Electrochemical processing does not contact the processing object during the processing, and there is no electric spark generated, so it is quite safe.

由上述说明可知,电极是用于作为加工刀具而控制加工对象的加工位置与深度。一般而言,若电极相对于工件不需要加工的处,是会形成有一绝缘层,以避免电极对工件不需要加工之处进行加工。但是,绝缘层的厚度,是会影响电极的加工精度,所以若形成于电极的绝缘层的厚度控制不当,则会发生工件的加工尺寸不符合预期,如此则必须丢弃原有电极,而更换新电极并调整绝缘层形成于新电极的厚度,这样反复调整绝缘层的厚度即会提高加工成本,且不易控制加工精度。因此,如何提高加工精度与节省加工成本,乃为现今电化学加工的一重要课题。It can be seen from the above description that the electrode is used as a machining tool to control the machining position and depth of the machining object. Generally speaking, if the electrode does not need to be processed relative to the workpiece, an insulating layer is formed to prevent the electrode from processing the workpiece. However, the thickness of the insulating layer will affect the processing accuracy of the electrode. Therefore, if the thickness of the insulating layer formed on the electrode is not properly controlled, the processing size of the workpiece will not meet the expectations. In this case, the original electrode must be discarded and replaced with a new one. Electrode and adjust the thickness of the insulating layer formed on the new electrode, so repeated adjustment of the thickness of the insulating layer will increase the processing cost, and it is difficult to control the processing accuracy. Therefore, how to improve the machining accuracy and save the machining cost is an important issue in the current electrochemical machining.

因此,本发明即在针对上述问题而提出一种电化学加工装置及加工方法及其电极单元,不仅可改善上述现有技术缺点,又可提高加工精度与节省加工成本,以解决上述问题。Therefore, the present invention proposes an electrochemical processing device and processing method and its electrode unit to address the above problems, which can not only improve the above-mentioned shortcomings of the prior art, but also improve processing accuracy and save processing costs, so as to solve the above problems.

发明内容Contents of the invention

本发明的目的之一,在于提供一种电化学加工装置及加工方法及其电极单元,其藉由控制导磁层吸附电解液中的磁性体的磁力,即可控制磁性体吸附于电极的厚度,而控制电极的绝缘厚度,如此可提高加工精度与节省加工成本。One of the objectives of the present invention is to provide an electrochemical processing device and processing method and its electrode unit, which can control the thickness of the magnetic substance adsorbed on the electrode by controlling the magnetic force of the magnetic substance in the magnetic substance in the electrolyte. , and control the insulation thickness of the electrode, which can improve the processing accuracy and save the processing cost.

为了达到上述的目的,本发明提供一种电化学加工装置,该In order to achieve the above object, the present invention provides an electrochemical machining device, the

电化学加工装置用以加工至少一工件,该电化学加工装置包含有:An electrochemical machining device is used to process at least one workpiece, and the electrochemical machining device includes:

一槽体,具有一电解液,其中该工件位于该电解液中;A tank body has an electrolyte solution, wherein the workpiece is located in the electrolyte solution;

一电极,位于该电解液中;an electrode located in the electrolyte;

一导磁层,形成于该电极的部份表面;a magnetic conduction layer formed on a part of the surface of the electrode;

复数个磁性体,位于该电解液中,且该些磁性体不导电;a plurality of magnetic bodies located in the electrolyte, and the magnetic bodies are non-conductive;

一磁力控制单元,耦接该导磁层,并控制该导磁层吸附该些磁性体,如此以使该些磁性体形成一绝缘体,该绝缘体覆盖该导磁层;以及a magnetic force control unit, coupled to the magnetic permeable layer, and controls the magnetic permeable layer to attract the magnetic bodies, so that the magnetic bodies form an insulator, and the insulator covers the magnetic permeable layer; and

一电源单元,其两极分别耦接该工件与该电极。A power supply unit, the two poles of which are respectively coupled to the workpiece and the electrode.

本发明中,其中该导磁层覆盖于该电极的侧向表面或该电极的底部表面。In the present invention, the magnetic permeable layer covers the side surface of the electrode or the bottom surface of the electrode.

本发明中,其中该导磁层为镍材或铁材所制。In the present invention, the magnetic permeable layer is made of nickel or iron.

本发明中,其中每一该磁性体更包含:In the present invention, each of the magnetic bodies further comprises:

一金属体;以及a metal body; and

一绝缘层,覆盖于该金属体的外表面。An insulating layer covers the outer surface of the metal body.

本发明中,其中该金属体为一镍珠或一钢珠。In the present invention, the metal body is a nickel ball or a steel ball.

本发明中,其中该绝缘层为一陶瓷、一树脂或一塑料。In the present invention, the insulating layer is a ceramic, a resin or a plastic.

本发明中,其中该磁力控制单元为一磁铁或一电磁铁。In the present invention, the magnetic control unit is a magnet or an electromagnet.

本发明中,其中该导磁层包含一第一图案,该绝缘体包含一第二图案而大体上相同于该第一图案,该工件包含一第三图案对应于该第二图案。In the present invention, wherein the magnetic permeable layer includes a first pattern, the insulator includes a second pattern substantially identical to the first pattern, and the workpiece includes a third pattern corresponding to the second pattern.

本发明还公开了一种电化学加工方法,其包含有下列步骤:The invention also discloses an electrochemical processing method, which includes the following steps:

提供一槽体,具有一电解液;providing a cell with an electrolyte;

将至少一工件配置于该电解液中;disposing at least one workpiece in the electrolyte;

提供一电极及一导磁层,其中该导磁层形成于该电极的部份表面,该电极位于该电解液中;providing an electrode and a magnetically conductive layer, wherein the magnetically conductive layer is formed on a part of the surface of the electrode, and the electrode is located in the electrolyte;

加入复数个磁性体于该电解液中,且该些磁性体不导电;adding a plurality of magnetic bodies into the electrolyte, and the magnetic bodies are non-conductive;

控制该导磁层吸附该些磁性体,如此以使该些磁性体形成一绝缘体,该绝缘体覆盖该导磁层;以及controlling the magnetic permeable layer to attract the magnetic substances, so that the magnetic substances form an insulator, and the insulator covers the magnetic permeable layer; and

分别耦接一电源单元的两极于该工件与该电极。The two poles of a power supply unit are respectively coupled to the workpiece and the electrode.

本发明还公开了一种用于电化学加工的电极单元,其包含有:The invention also discloses an electrode unit for electrochemical machining, which includes:

一电极;an electrode;

一导磁层,形成于该电极的部份表面;a magnetic conduction layer formed on a part of the surface of the electrode;

复数个磁性体,该些磁性体不导电;以及a plurality of magnetic bodies, which are non-conductive; and

一磁力控制单元,耦接该导磁层,并控制该导磁层吸附该些磁性体,如此以使该些磁性体形成一绝缘体,该绝缘体覆盖该导磁层。A magnetic force control unit is coupled to the magnetic permeable layer and controls the magnetic permeable layer to attract the magnetic bodies, so that the magnetic bodies form an insulator, and the insulator covers the magnetic permeable layer.

本发明具有的有益效果,本发明电化学加工装置及加工方法及其电极单元,其包含一电极、一导磁层、复数磁性体与一磁力控制单元,而用以加工至少一工件,工件与电极分别位于一电解液中,导磁层形成于电极的部分表面,该些磁性体加入于电解液中,且该些磁性体为不导电材质,磁力控制单元耦接导磁层,以控制导磁层吸附该些磁性体的多寡,如此即调整电极的绝缘厚度。另外,本发明更包含一电源单元,其两极分别耦接工件与电极。由于本发明可简易控制吸附于电极的该些磁性体的多寡,而简易控制电极的绝缘厚度,如此,即可达到提高加工精度与节省加工成本的目的。The present invention has beneficial effects. The electrochemical processing device and processing method and its electrode unit of the present invention include an electrode, a magnetic conduction layer, a plurality of magnetic bodies and a magnetic force control unit, and are used to process at least one workpiece, and the workpiece and The electrodes are respectively located in an electrolyte, the magnetic conduction layer is formed on part of the surface of the electrodes, the magnetic substances are added in the electrolyte, and the magnetic substances are non-conductive materials, and the magnetic force control unit is coupled to the magnetic conduction layer to control the conduction The magnetic layer absorbs the amount of these magnetic substances, thus adjusting the insulation thickness of the electrodes. In addition, the present invention further includes a power supply unit, the two poles of which are respectively coupled to the workpiece and the electrode. Because the present invention can easily control the amount of these magnetic substances adsorbed on the electrodes, and easily control the insulation thickness of the electrodes, so that the purposes of improving processing accuracy and saving processing costs can be achieved.

附图说明Description of drawings

图1是本发明电化学加工装置的一较佳实施例的示意图;Fig. 1 is the schematic diagram of a preferred embodiment of the electrochemical processing device of the present invention;

图2是本发明电化学加工装置的磁性体的一较佳实施例的示意图;Fig. 2 is the schematic diagram of a preferred embodiment of the magnetic body of the electrochemical processing device of the present invention;

图3是本发明电化学加工方法的一较佳实施例的流程图;以及Fig. 3 is a flow chart of a preferred embodiment of the electrochemical machining method of the present invention; and

图4A至图4C是本发明电化学加工进行图案化加工的一较佳实施例的流程示意图。4A to 4C are schematic flow charts of a preferred embodiment of patterning processing by electrochemical processing according to the present invention.

【图号简单说明】[Simple description of figure numbers]

10槽体      12工件10 tank body 12 workpieces

13电解液      14电极13 Electrolyte 14 Electrode

16导磁层      17第一图案16 Magnetic layer 17 The first pattern

19第二图案    18磁性体19 second pattern 18 magnetic body

181金属体181 metal body

183绝缘层183 insulating layer

22磁力控制单元22 Magnetic control unit

24电源单元24 power supply units

具体实施方式Detailed ways

为使对本发明的结构特征及所达成的功效有更进一步的了解与认识,用以较佳的实施例及附图配合详细的说明,说明如下:In order to have a further understanding and understanding of the structural features of the present invention and the achieved effects, the preferred embodiments and accompanying drawings are used for a detailed description, as follows:

首先,请参阅图1,是本发明电化学加工装置的一较佳实施例的示意图。如图所示,本发明电化学加工装置包含一槽体10、一电解液13、一电极14、一导磁层16、复数磁性体18、一磁力控制单元22与一电源单元24。其中,电极14、导磁层16、该些磁性体18与磁力控制单元22用于作为电化学加工的一电极单元。电解液13容置于槽体10,且槽体10内更放置有欲进行加工的工件12,电极14与工件12皆浸于电解液13中。导磁层16形成于电极14的部份表面,例如外侧表面。磁性体18为不导电且位于电解液13中,以供电极14的表面的导磁层16吸附,如此以使该些磁性体18形成一绝缘体,而覆盖导磁层16,以作为电极14的绝缘体。本发明的磁性体18的一较佳实施例为微粒状体。上述的导磁层16并未覆盖电极14的所有表面,即电极14的部分表面外露接触于电解液13。导磁层16可覆盖于电极14的侧向表面或底部表面。First, please refer to FIG. 1 , which is a schematic diagram of a preferred embodiment of the electrochemical processing device of the present invention. As shown in the figure, the electrochemical processing device of the present invention includes a tank body 10 , an electrolyte solution 13 , an electrode 14 , a magnetic permeable layer 16 , a plurality of magnetic bodies 18 , a magnetic force control unit 22 and a power supply unit 24 . Wherein, the electrode 14 , the magnetic permeable layer 16 , the magnetic bodies 18 and the magnetic force control unit 22 are used as an electrode unit for electrochemical processing. The electrolyte solution 13 is accommodated in the tank body 10 , and the workpiece 12 to be processed is placed in the tank body 10 , and the electrodes 14 and the workpiece 12 are both immersed in the electrolyte solution 13 . The magnetic permeable layer 16 is formed on a part of the surface of the electrode 14 , such as the outer surface. The magnetic body 18 is non-conductive and located in the electrolytic solution 13, for the adsorption of the magnetic layer 16 on the surface of the electrode 14, so that these magnetic bodies 18 form an insulator, and cover the magnetic layer 16, as the electrode 14 insulator. A preferred embodiment of the magnetic body 18 of the present invention is a particulate body. The aforementioned magnetically permeable layer 16 does not cover all surfaces of the electrodes 14 , that is, part of the surfaces of the electrodes 14 are exposed to the electrolyte 13 . The magnetic permeable layer 16 can cover the side surface or the bottom surface of the electrode 14 .

于此实施例中,导磁层16覆盖于电极14的侧向表面,而电极14的底部表面则外露接触于电解液13,以对工件12进行纵向加工。磁力控制单元22可为一磁铁或可为一电磁铁,以耦接于导磁层16,其用于控制导磁层16吸附电解液13中的磁性体18,而吸附于电极14作为绝缘体,或者释放磁性体18,以进行操作选择性的电化学加工。此外,磁力控制单元22更可控制导磁层16的磁性大小,进而控制电解液13中的磁性体18吸附于导磁层16的数量多寡,以控制电极14的绝缘厚度。In this embodiment, the magnetic permeable layer 16 covers the lateral surface of the electrode 14 , and the bottom surface of the electrode 14 is exposed to the electrolyte 13 for longitudinal processing of the workpiece 12 . The magnetic force control unit 22 can be a magnet or an electromagnet, so as to be coupled to the magnetically permeable layer 16, and it is used to control the magnetically permeable layer 16 to absorb the magnetic substance 18 in the electrolyte 13, and to be adsorbed on the electrode 14 as an insulator, Alternatively, the magnet 18 is released for operationally selective electrochemical processing. In addition, the magnetic force control unit 22 can further control the magnetic strength of the magnetic permeable layer 16 , and then control the amount of the magnetic substance 18 in the electrolyte 13 adsorbed on the magnetic permeable layer 16 , so as to control the insulation thickness of the electrode 14 .

承接上述,电源单元24的两极分别耦接于工件12与电极14。如图所示,电源单元24的正极耦接工件12,而负极耦接电极14。如此,电极14配合电解液13即可对工件12进行加工,而移除工件12不要的部份。由于,本发明的电极14的导磁层16会吸附电解液13中的磁性体18,而吸附于电极14的表面,以作为电极14的绝缘体,如此即可避免电极14对工件12不需要加工之处进行加工。于此实施例中,是并未对工件12进行侧向加工,所以导磁层16是覆盖于电极14的侧向表面,以避免电极14对工件12进行侧向加工。此外,本发明的电极14本身具有导电性且为低导磁,例如铜材,而无法吸附磁性体18;而导磁层16可为导电,例如导磁层16可为镍材或者铁材所制,并藉由电镀制程而形成于电极14外表面,以形成导磁层16。Following the above, the two poles of the power unit 24 are respectively coupled to the workpiece 12 and the electrode 14 . As shown, the positive terminal of the power supply unit 24 is coupled to the workpiece 12 and the negative terminal is coupled to the electrode 14 . In this way, the electrode 14 cooperates with the electrolyte 13 to process the workpiece 12 and remove unnecessary parts of the workpiece 12 . Because, the magnetic conduction layer 16 of the electrode 14 of the present invention can absorb the magnetic body 18 in the electrolytic solution 13, and is adsorbed on the surface of the electrode 14, as the insulator of the electrode 14, so can avoid that the electrode 14 does not need processing to the workpiece 12 place for processing. In this embodiment, the workpiece 12 is not processed laterally, so the magnetic permeable layer 16 covers the lateral surface of the electrode 14 to prevent the electrode 14 from laterally processing the workpiece 12 . In addition, the electrode 14 itself of the present invention has electrical conductivity and low magnetic permeability, such as copper, but cannot absorb the magnetic body 18; and the magnetic permeable layer 16 can be conductive, such as the magnetic permeable layer 16 can be made of nickel or iron. and formed on the outer surface of the electrode 14 by an electroplating process to form the magnetic permeable layer 16 .

本发明的电化学加工装置在对工件12进行加工时,可随时依据工件12的加工状态,即随时观测工件12的加工尺寸是否符合预计,而藉由磁力控制单元22控制导磁层16的磁性大小,进而控制导磁层16吸附电解液13中的磁性体18的数量多寡,而调整电极14的绝缘厚度与电阻大小,以精确控制加工精度;或者,磁力控制单元22可控制磁性体18无吸附于导磁层16,以便于进行此电极状态的电化学加工。磁力控制单元22的设定值可依加工需求而事先设定一数值,而且在加工过程中亦可随时做更动,以精确控制加工精度。由上述可知,本发明可随时在线调整电极14的绝缘厚度,而不需因绝缘厚度的调整而需重新制作不同厚度绝缘体的电极,因此可大幅降低电极的制作成本,如此即可达到节省加工成本的目的。When the electrochemical machining device of the present invention is processing the workpiece 12, it can control the magnetic properties of the magnetically permeable layer 16 by the magnetic force control unit 22 according to the processing state of the workpiece 12 at any time, that is, to observe whether the processing size of the workpiece 12 meets expectations at any time. size, and then control the amount of the magnetic material 18 in the magnetic conductive layer 16 adsorbed in the electrolyte 13, and adjust the insulation thickness and resistance of the electrode 14 to accurately control the processing accuracy; or, the magnetic force control unit 22 can control the magnetic material 18 without It is adsorbed on the magnetic conductive layer 16 to facilitate the electrochemical processing of this electrode state. The setting value of the magnetic force control unit 22 can be set in advance according to the processing requirement, and can be changed at any time during the processing to precisely control the processing accuracy. From the above, it can be known that the present invention can adjust the insulation thickness of the electrode 14 online at any time, without re-making electrodes with different thicknesses of insulators due to the adjustment of the insulation thickness, so that the production cost of the electrode can be greatly reduced, and the processing cost can be saved in this way. the goal of.

此外,本发明的导磁层16更可具有导电性,而本发明可控制导磁层16不吸附磁性体18于电极14的表面,如此即能利用电极14表面的导磁层16对工件12进行加工。于此实施例来说,起初电极14进行加工时,由于电极14的侧向表面的导磁层16会吸附磁性体18,所以即会于电极14的侧向表面形成绝缘体,而仅具有底部表面加工能力,而不具侧向加工能力。然而,若欲对工件12进行侧向加工时,即可控制导磁层16释放所吸附的磁性体18,如此电极14即能拥有不同之侧向与底部表面加工能力,因而可以提升电极14的加工能力与其应用的范围。另外,上述实施方式仅为本发明的一较佳实施例,并不局限本发明的实施例仅为上述方式。例如,本发明亦可在槽体10内设置复数个工件12与电极14,以对该些工件12进行加工。In addition, the magnetically permeable layer 16 of the present invention can be more conductive, and the present invention can control the magnetically permeable layer 16 not to attract the magnetic substance 18 on the surface of the electrode 14, so that the magnetically permeable layer 16 on the surface of the electrode 14 can be used to control the workpiece 12 for processing. In this embodiment, when the electrode 14 is initially processed, since the magnetic layer 16 on the side surface of the electrode 14 will absorb the magnetic substance 18, an insulator will be formed on the side surface of the electrode 14, and only the bottom surface will be formed. Processing capability, but not lateral processing capability. However, if it is desired to process the workpiece 12 laterally, the magnetically permeable layer 16 can be controlled to release the adsorbed magnetic substance 18, so that the electrode 14 can have different processing capabilities on the lateral and bottom surfaces, thereby improving the performance of the electrode 14. Processing capability and range of application. In addition, the above-mentioned implementation is only a preferred embodiment of the present invention, and the embodiment of the present invention is not limited to the above-mentioned manner. For example, in the present invention, a plurality of workpieces 12 and electrodes 14 can also be arranged in the tank body 10 to process these workpieces 12 .

请参阅图2,是本发明的磁性体18的示意图。如图所示,本发明的每一磁性体18更包含一金属体181与一绝缘层183,绝缘层183覆盖金属体181的外表面,使得磁性体18具有导磁而不导电的特性。本发明的磁性体18的金属体181的一较佳实施例为一镍珠或一钢珠,而绝缘层183的一较佳实施例为一陶瓷、一树脂或一塑料,其中树脂可为一环氧树脂。上述的金属体181与绝缘层183的材质仅为本发明的一实施例,而并非限制其种类仅可于此。Please refer to FIG. 2 , which is a schematic diagram of the magnetic body 18 of the present invention. As shown in the figure, each magnetic body 18 of the present invention further includes a metal body 181 and an insulating layer 183 , and the insulating layer 183 covers the outer surface of the metal body 181 , so that the magnetic body 18 has the characteristics of magnetic conduction and non-conduction. A preferred embodiment of the metal body 181 of the magnetic body 18 of the present invention is a nickel ball or a steel ball, and a preferred embodiment of the insulating layer 183 is a pottery, a resin or a plastic, wherein the resin can be a ring oxygen resin. The above-mentioned materials of the metal body 181 and the insulating layer 183 are only one embodiment of the present invention, and the types thereof are not limited thereto.

请参阅图3,是本发明电化学加工的另一较佳实施例的流程图,本发明可应用于对工件12进行图案化加工,例如欲于工件12的表面形成一图案。首先,请参阅图4A,提供一电极14及一导磁层16,导磁层16形成于电极14的外侧表面上。接着,请参阅图4B,将导磁层16图案化,例如利用机械力加工或雷射加工以移除部份导磁层16,而裸露电极14的表面,以于导磁层16形成一第一图案17,亦即完成图案化导磁层16。Please refer to FIG. 3 , which is a flow chart of another preferred embodiment of the electrochemical machining of the present invention. The present invention can be applied to patterning the workpiece 12 , for example, to form a pattern on the surface of the workpiece 12 . First, please refer to FIG. 4A , an electrode 14 and a magnetic permeable layer 16 are provided, and the magnetic permeable layer 16 is formed on the outer surface of the electrode 14 . Next, referring to FIG. 4B , the magnetically permeable layer 16 is patterned, for example, using mechanical processing or laser processing to remove part of the magnetically permeable layer 16, and expose the surface of the electrode 14 to form a first magnetically permeable layer 16. A pattern 17 , that is, to complete the patterned magnetic permeable layer 16 .

如图3的步骤S1所示,本发明是提供电极14及图案化导磁层16。在本实施例中,上述图案化导磁层16是指依据第一图案17而形成图案化导磁层16于电极14的表面,也就是电极14相对于第一图案17的表面不覆盖有导磁层16,而电极14相对于第一图案17的其余表面则全部覆盖有导磁层16。也就是说,电极14相对于第一图案17之外的表面全部覆盖有导磁层16,仅有相对于第一图案17的电极14表面并未覆盖有导磁层16而外露。在另一实施例中,上述图案化导磁层16亦可依据第一图案17而形成图案化导磁层16于电极14的表面,但是电极14相对于第一图案17的表面覆盖有导磁层16,而电极14相对于第一图案17的其余表面则全部不覆盖有导磁层16。也就是说,电极14相对于第一图案17之外的表面全部不覆盖有导磁层16而外露,仅有相对于第一图案17的电极14表面覆盖有导磁层16。As shown in step S1 of FIG. 3 , the present invention provides the electrodes 14 and the patterned magnetic permeable layer 16 . In this embodiment, the above-mentioned patterned magnetic permeable layer 16 means that the patterned magnetic permeable layer 16 is formed on the surface of the electrode 14 according to the first pattern 17, that is, the surface of the electrode 14 relative to the first pattern 17 is not covered with conductive material. The magnetic layer 16 , while the rest of the surface of the electrode 14 relative to the first pattern 17 is completely covered with the magnetic permeable layer 16 . That is to say, the surface of the electrode 14 other than the first pattern 17 is covered with the magnetic permeable layer 16 , and only the surface of the electrode 14 relative to the first pattern 17 is not covered with the magnetic permeable layer 16 and is exposed. In another embodiment, the patterned magnetic permeable layer 16 can also be formed on the surface of the electrode 14 according to the first pattern 17, but the surface of the electrode 14 relative to the first pattern 17 is covered with a magnetic permeable layer. layer 16 , while the rest of the surface of the electrode 14 relative to the first pattern 17 is not covered with the magnetically permeable layer 16 . That is to say, the surface of the electrode 14 relative to the first pattern 17 is not covered with the magnetic permeable layer 16 and exposed, and only the surface of the electrode 14 relative to the first pattern 17 is covered with the magnetic permeable layer 16 .

本发明对导磁层16进行图案化的一实施方式如图4B所示,是在电极14的外侧表面形成导磁层16,而覆盖电极14的外侧表面。接着,移除部份导磁层16而形成第一图案17,如此即形成图案化的导磁层16于电极14上,而提供具有图案化导磁层16的电极14。之后,如图3的步骤S3与S4所示,加入磁性体18于电解液13,且电极14放置于电解液13,并控制导磁层16的磁力大小,进而控制导磁层16吸附磁性体18的多寡,而吸附磁性体18为绝缘体。如此在本实施例中,即会如图4C所示,电极14的外侧表面未吸附有磁性体18的部分,即形成一第二图案19,因此即完成图案化的绝缘体,即该些磁性体18所形成的绝缘体具有第二图案19,且第二图案19大体上相同于第一图案17,而如图3的步骤S5所示,可利用具有图案化的绝缘体(磁性体18)的电极14对工件12进行图案化加工,如此在工件12上即形成对应第二图案19的一第三图案。One embodiment of patterning the magnetic conduction layer 16 in the present invention is as shown in FIG. 4B , in which the magnetic conduction layer 16 is formed on the outer surface of the electrode 14 to cover the outer surface of the electrode 14 . Then, a part of the magnetic permeable layer 16 is removed to form the first pattern 17 , so that the patterned magnetic permeable layer 16 is formed on the electrode 14 , and the electrode 14 with the patterned magnetic permeable layer 16 is provided. Afterwards, as shown in steps S3 and S4 of FIG. 3 , a magnetic substance 18 is added to the electrolyte solution 13, and the electrode 14 is placed in the electrolyte solution 13, and the magnetic force of the magnetic permeable layer 16 is controlled, and then the magnetic permeable layer 16 is controlled to absorb the magnetic substance. The amount of 18, and the adsorption magnetic body 18 is an insulator. In this way, in this embodiment, as shown in FIG. 4C , the portion of the outer surface of the electrode 14 that is not adsorbed with the magnetic body 18 forms a second pattern 19, so the patterned insulator, that is, the magnetic bodies The insulator formed by 18 has a second pattern 19, and the second pattern 19 is substantially the same as the first pattern 17, and as shown in step S5 of FIG. The workpiece 12 is patterned so that a third pattern corresponding to the second pattern 19 is formed on the workpiece 12 .

由上述可知,本发明可依欲形成于工件12的不同图案,而形成不同图案的导磁层16于电极14上,以藉由不同图案的导磁层16而吸附磁性体18,以成为图案化的绝缘体于电极14的外侧表面,如此即形成具有图案化的绝缘体(磁性体18)的电极14,而对工件12进行图案化加工。As can be seen from the above, the present invention can form different patterns of magnetic permeable layers 16 on the electrodes 14 according to different patterns to be formed on the workpiece 12, so that the magnetic material 18 can be adsorbed by the magnetic permeable layers 16 of different patterns to form a pattern. The patterned insulator is formed on the outer surface of the electrode 14, thus forming the electrode 14 with a patterned insulator (magnetic body 18), and the workpiece 12 is patterned.

综上所述,本发明为一种电化学加工装置及加工方法及其电极单元,其包含电极、导磁层、复数磁性体与磁力控制单元,工件与电极浸于电解液中,电极用于对工件进行加工,导磁层形成于电极的部分表面,磁性体加入于电解液中且不导电,磁力控制单元用于控制导磁层吸附磁性体,进而控制电极的绝缘厚度。因为本发明可控制导磁层吸附磁性体,所以可轻易调整电极的绝缘厚度,而不需更换电极而调整绝缘厚度,如此,本发明可节省电化学加工的加工成本,且提高其加工精度。In summary, the present invention is an electrochemical processing device and processing method and its electrode unit, which includes an electrode, a magnetic conductive layer, a plurality of magnetic bodies and a magnetic force control unit, the workpiece and the electrode are immersed in the electrolyte, and the electrode is used for The workpiece is processed, the magnetic layer is formed on part of the surface of the electrode, and the magnetic substance is added to the electrolyte and is non-conductive. The magnetic force control unit is used to control the magnetic layer to absorb the magnetic substance, and then control the insulation thickness of the electrode. Because the present invention can control the magnetic layer to absorb the magnetic substance, the insulation thickness of the electrode can be easily adjusted without changing the electrode to adjust the insulation thickness. In this way, the present invention can save the processing cost of electrochemical processing and improve its processing accuracy.

综上所述,仅为本发明的一较佳实施例而已,并非用来限定本发明实施的范围,凡依本发明权利要求范围所述的形状、构造、特征及精神所为的均等变化与修饰,均应包括于本发明的权利要求范围内。In summary, it is only a preferred embodiment of the present invention, and is not intended to limit the implementation scope of the present invention. All equivalent changes and Modifications should be included within the scope of the claims of the present invention.

Claims (10)

1.一种电化学加工装置,该电化学加工装置用以加工至少一工件,该电化学加工装置包含有:1. An electrochemical machining device for processing at least one workpiece, the electrochemical machining device comprising: 一槽体,具有一电解液,其中该工件位于该电解液中;A tank body has an electrolyte solution, wherein the workpiece is located in the electrolyte solution; 一电极,位于该电解液中;an electrode located in the electrolyte; 一导磁层,形成于该电极的部份表面;a magnetic conduction layer formed on a part of the surface of the electrode; 复数个磁性体,位于该电解液中,且该些磁性体不导电;a plurality of magnetic bodies located in the electrolyte, and the magnetic bodies are non-conductive; 一磁力控制单元,耦接该导磁层,并控制该导磁层吸附该些磁性体,如此以使该些磁性体形成一绝缘体,该绝缘体覆盖该a magnetic force control unit, coupled to the magnetic permeable layer, and controls the magnetic permeable layer to attract the magnetic bodies, so that the magnetic bodies form an insulator, and the insulator covers the 导磁层;以及a magnetically permeable layer; and 一电源单元,其两极分别耦接该工件与该电极。A power supply unit, the two poles of which are respectively coupled to the workpiece and the electrode. 2.根据权利要求1所述的电化学加工装置,其特征在于,其中该导磁层覆盖于该电极的侧向表面或该电极的底部表面。2 . The electrochemical processing device according to claim 1 , wherein the magnetic permeable layer covers the side surface of the electrode or the bottom surface of the electrode. 3 . 3.根据权利要求1所述的电化学加工装置,其特征在于,其中该导磁层为镍材或铁材所制。3. The electrochemical processing device according to claim 1, wherein the magnetic permeable layer is made of nickel or iron. 4.根据权利要求1所述的电化学加工装置,其特征在于,其中每一该磁性体更包含:4. The electrochemical processing device according to claim 1, wherein each of the magnetic bodies further comprises: 一金属体;以及a metal body; and 一绝缘层,覆盖于该金属体的外表面。An insulating layer covers the outer surface of the metal body. 5.根据权利要求4所述的电化学加工装置,其特征在于,其中该金属体为一镍珠或一钢珠。5. The electrochemical machining device according to claim 4, wherein the metal body is a nickel ball or a steel ball. 6.根据权利要求4所述的电化学加工装置,其特征在于,其中该绝缘层为一陶瓷、一树脂或一塑料。6. The electrochemical processing device according to claim 4, wherein the insulating layer is a ceramic, a resin or a plastic. 7.根据权利要求1所述的电化学加工装置,其特征在于,其特征在于,其中该磁力控制单元为一磁铁或一电磁铁。7. The electrochemical processing device according to claim 1, wherein the magnetic force control unit is a magnet or an electromagnet. 8.根据权利要求1所述的电化学加工装置,其特征在于,其中该导磁层包含一第一图案,该绝缘体包含一第二图案而大体上相同于该第一图案,该工件包含一第三图案对应于该第二图案。8. The electrochemical machining device according to claim 1, wherein the magnetically permeable layer comprises a first pattern, the insulator comprises a second pattern substantially identical to the first pattern, and the workpiece comprises a The third pattern corresponds to the second pattern. 9.一种电化学加工方法,其特征在于,其包含有下列步骤:9. An electrochemical machining method, characterized in that it comprises the following steps: 提供一槽体,具有一电解液;providing a cell body with an electrolyte; 将至少一工件配置于该电解液中;disposing at least one workpiece in the electrolyte; 提供一电极及一导磁层,其中该导磁层形成于该电极的部份表面,该电极位于该电解液中;providing an electrode and a magnetically conductive layer, wherein the magnetically conductive layer is formed on a part of the surface of the electrode, and the electrode is located in the electrolyte; 加入复数个磁性体于该电解液中,且该些磁性体不导电;adding a plurality of magnetic bodies into the electrolyte, and the magnetic bodies are non-conductive; 控制该导磁层吸附该些磁性体,如此以使该些磁性体形成一绝缘体,该绝缘体覆盖该导磁层;以及controlling the magnetic permeable layer to attract the magnetic substances, so that the magnetic substances form an insulator, and the insulator covers the magnetic permeable layer; and 分别耦接一电源单元的两极于该工件与该电极。The two poles of a power supply unit are respectively coupled to the workpiece and the electrode. 10.一种用于电化学加工的电极单元,其特征在于,其包含有:10. An electrode unit for electrochemical machining, characterized in that it comprises: 一电极;an electrode; 一导磁层,形成于该电极的部份表面;a magnetic conduction layer formed on a part of the surface of the electrode; 复数个磁性体,该些磁性体不导电;以及a plurality of magnetic bodies, which are non-conductive; and 一磁力控制单元,耦接该导磁层,并控制该导磁层吸附该些磁性体,如此以使该些磁性体形成一绝缘体,该绝缘体覆盖该导磁层。A magnetic force control unit is coupled to the magnetic permeable layer and controls the magnetic permeable layer to attract the magnetic bodies, so that the magnetic bodies form an insulator, and the insulator covers the magnetic permeable layer.
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CN104690382A (en) * 2013-12-10 2015-06-10 财团法人金属工业研究发展中心 Electrode structure
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