CN102092044B - Substrate processing system and mechanical arm device thereof - Google Patents
Substrate processing system and mechanical arm device thereof Download PDFInfo
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- CN102092044B CN102092044B CN 200910241497 CN200910241497A CN102092044B CN 102092044 B CN102092044 B CN 102092044B CN 200910241497 CN200910241497 CN 200910241497 CN 200910241497 A CN200910241497 A CN 200910241497A CN 102092044 B CN102092044 B CN 102092044B
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- 239000000758 substrate Substances 0.000 title claims abstract description 36
- 238000012545 processing Methods 0.000 title abstract description 8
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- 230000008859 change Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 24
- 230000033001 locomotion Effects 0.000 description 23
- 230000007246 mechanism Effects 0.000 description 23
- 230000005540 biological transmission Effects 0.000 description 22
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- 238000010586 diagram Methods 0.000 description 8
- 230000006872 improvement Effects 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
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- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 238000004804 winding Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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Abstract
The invention discloses a mechanical arm device which comprises a first rocking rod (21) and a second rocking rod (22), wherein when the first rocking rod (21) rotates around the first end, the second rocking rod (22) drives an arm body (5) connected with the second rocking rod to slide along a sliding rail (7); and the mechanical arm device also comprises an assisting part, and the assisting part selectively drives the arm body (5) to slide forwards or backwards along the sliding rail (7). Therefore, when the mechanical arm device is positioned at a dead point, the assisting part drives the arm body (5) to move forwards or backwards along the sliding rail (7) so as to change the included angle between the first rocking rod (21) and the second rocking rod (22), thus the mechanical arm device passes through the dead point smoothly, and the driving reliability of the mechanical arm device is improved. The invention also discloses a substrate processing system comprising the mechanical arm device.
Description
Technical field
The present invention relates to automation transmission equipment field, particularly a kind of mechanical arm device for substrate handling system.The invention still further relates to a kind of substrate handling system that comprises above-mentioned mechanical arm device.
Background technology
Along with the fast development of China's economic construction, market increases day by day for the demand of substrate, has just driven thus the fast development of substrate processing industry.
At present, the inside that is used for the process cavity of process substrates generally has electrostatic chuck, and this electrostatic chuck is used for supporting processed substrate, and its underpart is provided with lowering or hoisting gear, is inserted with the thimble for supporting substrate on this lowering or hoisting gear.During process substrates, generally by the mechanical arm of special use substrate is sent in the process cavity, and made substrate be higher than the upper surface certain distance of electrostatic chuck; At this moment, be positioned at upper lowering or hoisting gear and by thimble the substrate on the manipulator held up, mechanical arm is with the backed off after random process cavity, and then, lowering or hoisting gear moves down, and begins processing after substrate is put into the electrostatic chuck upper surface reposefully; After machining, lowering or hoisting gear moves up, and substrate is held up certain altitude, and mechanical arm again stretches in the process cavity substrate is taken away.
By the process of above-mentioned substrate as can be known, before the processing of substrate begins, need to substrate be sent into reaction chamber by mechanical arm, and after machining, need to substrate be taken out reaction chamber by utilizing mechanical arm equally.Therefore, mechanical arm is requisite equipment in the substrate process, and the height of its work quality and job stability directly affects the quality of whole substrate system of processing crudy.
The mechanical arm that uses in the substrate processing is generally the horizontal handling machinery arm, and by above-mentioned use procedure as can be known, the functions such as that this mechanical arm need to have is flexible, rotation, lifting.
Please refer to Fig. 1, Fig. 1 is a kind of schematic diagram of typical mechanical arm.
The typical mechanical arm of this kind comprises the first rocking bar 11 and the second rocking bar 12, the first end of the first rocking bar 11 is connected with the motor (not shown), its second end is hinged by the first end of the first jointed shaft and the second rocking bar 12, the second end of the second rocking bar 12 is connected with slide block 15 by jointed shaft, arm 13 is slidably mounted on the slide rail 14 by slide block 15, and can slide at the bearing of trend of slide rail 14; Above-mentioned the first rocking bar 11 is under the driving of motor, swing take the tie point of first end and motor as pivot, and drive the second rocking bar 12 take the first jointed shaft as shaft swing, thereby band movable slider 15 and then drive arm 13 slide at slide rail 14, above-mentioned the first rocking bar 11 and the second rocking bar 12 existing connection functions, the effect that has again transferring power.
In the substrate process, need manipulator to have enough transport distances, therefore, above-mentioned the first rocking bar 11 and the second rocking bar 12 all need to have enough length; Simultaneously, because the restriction of substrate processing environment, the space that manipulator can take is less, and then two rocking bars need to have less radius of turn.In order to satisfy above-mentioned requirements, the length of above-mentioned the first rocking bar 11 and the second rocking bar 12 should equate, and the first end of the first rocking bar 11 should be positioned at the centre position of slide rail 14 bearing of trends.
And in the telescopic process of mechanical arm, flexible during to the overlapping position of the first rocking bar 11 and the second rocking bar 12, the null situation of drive line angle can appear, this position is the dead-centre position of mechanism, at this moment, the effective driving force square of mechanical arm is zero, and mechanism is in not power transmission position, and is unfavorable for that the serialization of mechanical arm transmits operation.
In above-mentioned typical mechanical arm, usually utilize the inertia driving mechanical arm of slide block 15 by the dead-centre position of mechanism, in order to make mechanical arm smoothly by the dead-centre position, usually adopt at present the mode that increases slide block 15 inertia.And in the course of work of reality, may be because a variety of causes and so that slide block 15 has lost by dead point and prerequisite inertia, at this moment, mechanical arm mechanism can't pass through the dead point; In addition, in the process of mechanism's debugging, because the test speed of slide block 15 is slower, it energy shortage that possesses passes through the dead-centre position with lead agency; Therefore, under many circumstances, mechanical arm mechanism possibly can't pass through the dead-centre position smoothly, and the reliable transmission of mechanism is lower.
In sum, how to guarantee making mechanical arm can pass through smoothly the dead-centre position in the comparatively simple situation of structure, thus the reliable transmission of raising mechanical arm, the problem that need solve with regard to becoming those skilled in the art.
Summary of the invention
The purpose of this invention is to provide a kind of mechanical arm device for substrate handling system, its structure is comparatively simple, and can smoothly by the dead-centre position of mechanism, have higher functional reliability.Another object of the present invention provides a kind of substrate handling system that comprises above-mentioned mechanical arm device.
For solving the problems of the technologies described above, the invention provides a kind of mechanical arm device, comprise the first rocking bar and the second rocking bar; Described the first rocking bar is hinged by the foundation of its first end and this mechanical arm device, and the first end of described the second rocking bar is hinged by the second end of the first rotating shaft and described the first rocking bar; Described the first rocking bar is when its first end rotation, and described the second rocking bar drives connected arm body and slides along slide rail; Also comprise booster parts, described booster parts drives described arm body along described slide rail forward or slide backward when endplay device is in the dead-centre position, to adjust the angle between described the first rocking bar and described the second rocking bar.
Preferably, described the first rotating shaft is fixedly connected with the first end of described the second rocking bar; Described booster parts comprises the second runner that is fixedly connected with described the first rotating shaft, and drives described the second runner with respect to the power part of the second end rotation of described the first rocking bar.
Preferably, described power part comprises the first runner of the first end that is articulated in described the first rocking bar, and the driving-belt that connects described the first runner and described the second runner; Described the first runner is selectively rotation under the effect of external force.
Preferably, described driving-belt comprises the first driving-belt arranged in a crossed manner and the second driving-belt.
Preferably, the diameter of described the first runner is the twice of described the second runner diameter.
Preferably, described driving-belt comprises the first driving-belt and the second driving-belt; The two ends of described the first driving-belt are installed on respectively the homonymy of described the first runner and described the second runner, and the two ends of described the second driving-belt are installed on respectively the opposite side of described the first runner and described the second runner.
Preferably, the diameter of described the first runner is identical with the diameter of described the second runner.
Preferably, the second end of described the second rocking bar is hinged with slide block, and the second end of described the second rocking bar is installed described arm body by slide block.
Preferably, described power part comprises the first runner of the first end that is articulated in described the first rocking bar; Described the first runner and the gear of described the second runner for being meshed in the outer ring, and the selectively rotation under the effect of external force of described the first runner.
Preferably, the reference diameter of described the first runner is the twice of described the second runner reference diameter.
Preferably, the reference diameter of described the first runner equates with the reference diameter of described the second runner.
The present invention also provides a kind of substrate handling system, comprises above-mentioned each described mechanical arm device.
Mechanical arm device provided by the present invention comprises the first rocking bar and the second rocking bar; The first rocking bar is hinged by the foundation of its first end and this mechanical arm device, and the first end of the second rocking bar is hinged by the second end of the first rotating shaft and the first rocking bar; The first rocking bar is when its first end rotation, and the second rocking bar drives connected arm body and slides along slide rail; This mechanical arm device also comprises booster parts, and this booster parts selectively drives the arm body along slide rail forward or slide backward.Like this, in the process of transmission, when the mechanism that the first rocking bar and the second rocking bar form is in the dead-centre position, above-mentioned booster parts provides power for device, and drive the arm body along slide rail forward or slide backward, in the process that the arm body slides, the angle between the first rocking bar and the second rocking bar changes, thereby make mechanical arm device smoothly by the dead-centre position, improved the reliable transmission of device.
A kind of preferred embodiment in, above-mentioned booster parts can comprise the first runner, the second runner and be installed on described the first runner and described the second runner between driving-belt; Described the first runner is articulated in the first end of described the first rocking bar, and rotates under the driving of power part; The second runner is fixedly installed in the first end of the second rocking bar, and rotates with the first runner under the drive of driving-belt.
When rotating under the driving of the first runner in external force, the rotation of the first runner drives the motion of driving-belt, thereby driving the second runner rotates with the first runner, because the second runner is fixedly connected with the second end of the second rocking bar, therefore, the second runner can drive the second rocking bar and swing centered by its first end in the process of rotating with the first runner, and then drive arm body moves forward or backward on slide rail; Drive simultaneously the first rotating shaft and swing around the first end of the first rocking bar, thereby drive the first rocking bar around its first end rotation.Like this, the power of mechanical arm mechanism is by the driving-belt transmission between the first runner, the second runner and two runners, even if the first rocking bar and the second rocking bar the dead-centre position occurred in the mechanism kinematic process, can the motion of mechanism not impacted yet, thereby so that mechanism can waltz through the dead-centre position, improved the functional reliability of mechanical arm.
In another preferred embodiment, above-mentioned driving-belt comprises the first driving-belt and the second driving-belt, and above-mentioned the first runner is identical with the diameter of the second runner, and the first driving-belt and the second driving-belt are installed between two runners substantially abreast.Like this, the first driving-belt and the second driving-belt in the course of the work, the formed angle of axis direction of its force direction and the first rocking bar is roughly zero, then the component perpendicular to the axis direction of the first rocking bar is roughly zero, thereby reduced the loss of driving force, further improved the transmission effect.
Description of drawings
Fig. 1 is a kind of schematic diagram of typical mechanical arm device;
Fig. 2 is the schematic diagram of mechanical arm device the first specific embodiment provided by the present invention;
Fig. 3 is the stereogram of mechanical arm device the first specific embodiment provided by the present invention;
Fig. 4 is the structural representation that mechanical arm device shown in Figure 3 is looked up direction;
Fig. 5 is the schematic diagram of mechanical arm device the second specific embodiment provided by the present invention;
Fig. 6 is the stereogram of mechanical arm device the second specific embodiment provided by the present invention;
Fig. 7 is the structural representation of overlooking direction of mechanical arm device shown in Figure 6;
Fig. 8 is the stereogram under the two rocking bar overlap conditions of mechanical arm device shown in Figure 6;
Fig. 9 is the structural representation of overlooking direction of mechanical arm device provided by the present invention under Fig. 8 state;
Figure 10 is the schematic diagram of A-A direction among Fig. 9.
The specific embodiment
Core of the present invention provides a kind of mechanical arm device for substrate handling system, and its structure is comparatively simple, and can smoothly by the dead-centre position of mechanism, have higher functional reliability.Another core of the present invention provides a kind of substrate handling system that comprises above-mentioned mechanical arm device.
Mechanical arm device provided by the present invention comprises the first rocking bar 21 and the second rocking bar 22; Described the first rocking bar 21 is hinged by the foundation of its first end and this mechanical arm device, and the first end of described the second rocking bar 22 is hinged by the second end of the first rotating shaft and described the first rocking bar 21; Described the first rocking bar 21 is when its first end rotation, and described the second rocking bar 22 drives connected arm body 5 and slides along slide rail 7; This mechanical arm device also comprises booster parts, and this booster parts selectively drives arm body 5 along slide rail 7 forward or slide backward.
Like this, in the process of transmission, when the mechanism that the first rocking bar 21 and the second rocking bar 22 form is in the dead-centre position, above-mentioned booster parts provides power for device, and drive arm body 5 along slide rail 7 forward or slide backward, in the process that arm body 5 slides, the angle between the first rocking bar 21 and the second rocking bar 22 changes, thereby make mechanical arm device smoothly by the dead-centre position, improved the reliable transmission of device.
Please refer to Fig. 2 to Fig. 4, Fig. 2 is the schematic diagram of mechanical arm device the first specific embodiment provided by the present invention; Fig. 3 is the stereogram of mechanical arm device the first specific embodiment provided by the present invention; Fig. 4 is the structural representation that mechanical arm device shown in Figure 3 is looked up direction.
In the first specific embodiment, in the mechanical arm device provided by the present invention, described the first rotating shaft is fixedly connected with the first end of described the second rocking bar 22, above-mentioned booster parts comprises the second runner 32 that is fixedly connected with the first rotating shaft, and drives described the second runner 32 with respect to the power part of the second end rotation of described the first rocking bar 21.When mechanical arm device is in the dead-centre position of not power transmission, the second runner 32 second end with respect to the first rocking bar 21 under the driving of power part rotates, because the first rotating shaft is fixedly connected with the first end of the second rocking bar 22, then above-mentioned motion the second end of driving the second rocking bar 22 on the slide rail 7 forward or slide backward (also namely the arm body 5 that connects of the second end of the second rocking bar 22 on slide rail 7 forward or slide backward), thereby change the angle between the first rocking bar 21 and the second rocking bar 22, and then the promotion robot arm assembly overcomes its dead-centre position, improved the transmission reliability of device.
Above-mentioned power part can also comprise the first runner 31 of the first end that is articulated in described the first rocking bar 21, and the driving-belt 4 that connects described the first runner 31 and described the second runner 32; Described the first runner 31 is selectively rotation under the effect of external force.
When mechanical arm device is in the dead-centre position of not power transmission, the first runner 31 rotates under the driving of external force, and the rotation of the first runner 31 drives the motion of driving-belt 4, thereby driving the second runner 32 rotates with the first runner 31, because the second runner 32 is fixedly connected with the first end of the second rocking bar 22, therefore, the second runner 32 is in the process of rotating with the first runner 31, can drive the second rocking bar 22 and centered by its first end, swing, and then drive arm body 5 moves forward or backward on slide rail 7; Simultaneously, drive the first rotating shaft and swing around the first end of the first rocking bar, thereby drive the first rocking bar around its first end rotation.Like this, the power of mechanical arm device transmits by the driving-belt 4 between the first runner 31, the second runner 32 and two runners, even if the first rocking bar 21 and the second rocking bar 22 dead-centre position occurred in the mechanism kinematic process, can the motion of mechanism not impacted yet, thereby so that device can waltz through the dead-centre position, improved the functional reliability of mechanical arm device.
The first end of above-mentioned the first runner 31, the first rocking bar 21 can all be installed on the center of slide rail 7 by the first jointed shaft.And the installation site of above-mentioned each parts also is not limited to the center of slide rail 7, satisfying under the prerequisite of instructions for use, also can be installed on other positions.
The second end of above-mentioned the second rocking bar 22 can also be hinged with the second end of slide block 6, the second rocking bars 22 and by slide block 6 above-mentioned arm body 5 is installed.Like this, first arm body 5 is installed on the slide block 6, again that the second end of slide block 6 and the second rocking bar 22 is hinged, it is comparatively convenient to install; Simultaneously, by the motion of slide block 6 on slide rail 7, thereby realize that arm body 5 with predetermined orbital motion, has improved the motion credibility of arm body 5, and the friction of having avoided arm body 5 directly to contact with slide rail 7 and having produced destroys the service life of having improved arm body 5.
Above-mentioned slide rail 7 can be the linear guide rail, also can be other forms of guide rail, and the concrete form of slide rail 7 and length should determine that its concrete shape and length should not be subject to the restriction of this specification according to needed transfer path in the use procedure; It is pointed out that the slide rail in the mechanical arm device of generally using is generally the horizontal linear guide rail in substrate handling system.
The first end of above-mentioned the second rocking bar 22 can be fixedly connected with the second runner 32 by screw, also can realize by other conventional connected modes both reliable connections, to guarantee being synchronized with the movement of the second runner 32 and the second rocking bar 22.
It is to be noted, because the restriction that mechanical arm device environment for use and self structure require, above-mentioned the first rocking bar 21 and the second rocking bar 22 have equal length usually, therefore, the structure that is made of the first rocking bar 21 and the second rocking bar 22 still can have the position of not power transmission of mechanism, also be the dead-centre position, at this moment, the transmission mechanism that consists of by the first runner 31, the second runner 32 and driving-belt 4 can make device smoothly by above-mentioned dead-centre position.
On the basis of said structure, please refer to Fig. 3 and Fig. 4; Driving-belt 4 provided by the present invention can be for having the compliant member of suitable tightening force.When rotating under the first driving of runner 31 at power part, driving-belt 4 is applied the effect of pulling force, driving-belt 4 is this pull transfer to the second runner 32, and drives the second runner 32 and rotate, thereby realizes the motion of mechanical arm device.
Above-mentioned driving-belt 4 can be specially steel band, can certainly can realize using for other material of function, and the parameters such as the length of driving-belt 4 and thickness should be determined according to the execution conditions in using, not limit at this.
Above-mentioned driving-belt 4 also is not limited to above-mentioned steel band, also can be the parts such as belt or toothed Timing Belt, and the application of belt or toothed Timing Belt is comparatively extensive, and cost is lower, can reduce the maintenance cost of driving-belt 4.
Above-mentioned driver part can be servomotor, can certainly can realize using for other drive unit of function.
As shown in Figure 4, above-mentioned driving-belt 4 can comprise the first driving-belt 41 and the second driving-belt 42, and the first driving-belt 41 and the second driving-belt 42 are arranged in a crossed manner.At this moment, when the first runner 31 clockwise rotates, 41 tensionings of the first driving-belt also drive the second runner 32 and rotate counterclockwise, when the first runner 31 rotates counterclockwise, 42 tensionings of the second driving-belt also drive the second runner 32 and clockwise rotate, also the i.e. direction of rotation of the first runner 31 and the second runner 32; Simultaneously, arm body 5 (is divided into the left and right sides take above-mentioned the first jointed shaft as benchmark with guide rail 7 in guide rail 7 left sides, and refer to the left and right directions among Fig. 4 about this) motion process in, when the first rocking bar 21 when its first end clockwise rotates, angle between the first rocking bar 21 and the second rocking bar 22 diminishes, arm body 5 is to the direction motion near above-mentioned the first jointed shaft, otherwise, when the first rocking bar 21 when its first end rotates counterclockwise, it is large that angle between the first rocking bar 21 and the second rocking bar 22 becomes, and arm body 5 is to the direction motion away from the first jointed shaft; Be arranged in the motion process on guide rail 7 right sides at arm body 5, the direction of motion of arm body 5 is with above-mentioned opposite.The direction of motion that more than realizes is identical with the direction of motion of the typical mechanical arm device that uses at present, therefore, when increasing to booster parts in original equipment, need not to change original direction control strategy, thereby reduced the improvement difficulty of mechanical arm device, and significantly reduced the improvement cost.
When above-mentioned the first driving-belt 41 and the second driving-belt 42 are arranged in a crossed manner, although can improve the versatility of device, but, because the angle between the first driving-belt 41 and the second driving-belt 42 and the first rocking bar 21 axis is larger, driving force may be unfavorable under certain conditions that larger perpendicular to the component on the first rocking bar 21 axis directions the second rocking bar 22 in the mechanism passes through the dead-centre position smoothly.Therefore, in order to improve the reliable transmission of this version, make the first end of the first rocking bar 21 can be driven by different drive units respectively with the first runner 31, to improve the reliability of transmission.
Above-mentioned the first driving-belt 41 and the second driving-belt 42 is arranged in a crossed manner refers to that specifically two driving-belts substantially are the figure of eight and are wound between the first runner 31 and the second runner 32; It is pointed out that therefore, the winding position of two driving-belts on runner should have certain difference in height in order to prevent that the first driving-belt 41 and the second driving-belt 42 come in contact in transmission process.
The diameter of above-mentioned the first runner 31 can be the twice of the second runner 32 diameters, like this, mechanical arm device provided by the present invention is identical with the transfer rate of mechanical arm device of the prior art when working, therefore, only the driving-belt 4 of need between the increase of the basis of existing machinery arm apparatus the first runner 31, the second runner 32 and two runners namely can be realized the set function of mechanical arm device, and need not to change original strategy of speed control, thereby reduced the improvement difficulty of mechanical arm device, reduced the improvement cost.
Can also be further improved mechanical arm device provided by the present invention.
Please refer to Fig. 5 to Figure 10; Fig. 5 is the schematic diagram of mechanical arm device the second specific embodiment provided by the present invention; Fig. 6 is the stereogram of mechanical arm device the second specific embodiment provided by the present invention; Fig. 7 is the structural representation of overlooking direction of mechanical arm device shown in Figure 6; Fig. 8 is the stereogram under the two rocking bar overlap conditions of mechanical arm device shown in Figure 6; Fig. 9 is the structural representation of overlooking direction of mechanical arm device provided by the present invention under Fig. 8 state; Figure 10 is the schematic diagram of A-A direction among Fig. 9.
In the second specific embodiment, driving-belt 4 comprises the first driving-belt 41 and the second driving-belt 42; The two ends of the first driving-belt 41 are installed on respectively the homonymy of the first runner 31 and the second runner 32, and the two ends of the second driving-belt 42 are installed on respectively the opposite side of the first runner 31 and the second runner 32.
It is pointed out that therefore, the winding position of two driving-belts on runner should have certain difference in height in order to prevent that the first driving-belt 41 and the second driving-belt 42 come in contact in transmission process.
Like this, as shown in Figure 9, when the first runner 31 rotates counterclockwise, 41 tensionings of the first driving-belt also drive the second runner 32 and rotate counterclockwise equally, when the first runner 31 clockwise rotates, 42 tensionings of the second driving-belt also drive the second runner 32 and clockwise rotate, and also namely the first runner 31 is identical with the rotation direction of the second runner 32; Simultaneously, arm body 5 (is divided into the left and right sides take above-mentioned the first jointed shaft as benchmark with guide rail 7 on the right side of slide rail 7, and refer to the left and right directions among Fig. 9 about this) when moving, when the first rocking bar 21 when its first end rotates counterclockwise, angle between the first rocking bar 21 and the second rocking bar 22 diminishes, arm body 5 is to the direction motion near above-mentioned the first jointed shaft, otherwise, when the first rocking bar 21 when its first end clockwise rotates, it is large that angle between the first rocking bar 21 and the second rocking bar 22 becomes, and arm body 5 is to the direction motion away from the first jointed shaft; And arm body 5 is when the motion of the left side of slide rail 7, and above-mentioned motion conditions is opposite.When above-mentioned course of action can be in the dead-centre position in mechanism equally, mechanism is applied enough active forces, make mechanism pass through smoothly the dead point; It is to be noted, the first driving-belt 41 that arranges in the above described manner and the second driving-belt 42 are in the course of the work, the formed angle of the axis of the force direction of driving-belt 4 and the first rocking bar 21 is less, reduced the component perpendicular to the axis direction of the first rocking bar 21, thereby reduced the loss of driving force, further improved the transmission effect.
Apparently, above-mentioned driving-belt also is not limited to above-mentioned steel band, can also be the parts such as belt or toothed Timing Belt, and the application of belt or toothed Timing Belt is comparatively extensive, and cost is lower, can reduce the maintenance cost of driving-belt 4.
The diameter of the diameter of above-mentioned the first runner 31 and the second runner 32 can be identical, at this moment, above-mentioned the first driving-belt 41 and the second driving-belt 42 arrange substantially abreast, at this moment, the angle of driving-belt 4 and the first rocking bar 21 axis is roughly zero, then driving force is being roughly zero perpendicular to the component on the first rocking bar 21 axis directions, thereby has further reduced the loss of effective driving force, has improved the transmission effect.
When the first driving-belt 41 and the second driving-belt 42 substantially during parallel the setting, because the angle of two driving-belts and the first rocking bar 21 axis all is roughly zero, therefore, the moment of losing in the transmission process is almost nil, at this moment, the first runner 31 is rotated under the driving of driver part, and first rocking bar 21 passive movement under the drive of above-mentioned the first rotating shaft.
In the third specific embodiment, described power part can also comprise the first runner 31 of the first end that is articulated in described the first rocking bar 21; Described the first runner 31 and the gear of described the second runner 31 for being meshed in the outer ring, and the selectively rotation under the effect of external force of described the first runner 31.
The reference diameter of above-mentioned the first runner 31 can be the twice of the second runner 32 reference diameters.Like this, in the course of the work, the speed of arm body 5 motions is identical with the predetermined speed of existing equipment, thereby has improved the applicability of device.
Except the above specific embodiment, booster parts provided by the present invention can also be miscellaneous part or device, it act as, by changing the angular relationship between the first rocking bar 21 and the second rocking bar 22, device is overcome and smoothly by the dead-centre position, thereby drive arm body 5 along slide rail 7 forward or slide backward, therefore, can realize the parts of above-mentioned use function or the specific embodiment that device all can be used as above-mentioned booster parts, its concrete structure is not subjected to the restriction of this specification.
Except above-mentioned mechanical arm device, the present invention also provides a kind of substrate handling system that comprises above-mentioned mechanical arm device, and other each several part structures of this substrate handling system please refer to prior art, do not repeat them here.
More than a kind of substrate handling system provided by the present invention and mechanical arm device are described in detail.Used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof.Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of claim of the present invention.
Claims (12)
1. a mechanical arm device comprises the first rocking bar (21) and the second rocking bar (22); Described the first rocking bar (21) is hinged by the foundation of its first end and this mechanical arm device, and the first end of described the second rocking bar (22) is hinged by the second end of the first rotating shaft and described the first rocking bar (21); Described the first rocking bar (21) is when its first end rotation, and described the second rocking bar (22) drives connected arm body (5) and slides along slide rail (7); It is characterized in that, also comprise booster parts, described booster parts drives described arm body (5) along described slide rail (7) forward or slide backward when endplay device is in the dead-centre position, to adjust the angle between described the first rocking bar (21) and described the second rocking bar (22).
2. mechanical arm device according to claim 1 is characterized in that, described the first rotating shaft is fixedly connected with the first end of described the second rocking bar (22); Described booster parts comprises the second runner (32) that is fixedly connected with described the first rotating shaft, and drives described the second runner (32) with respect to the power part of the second end rotation of described the first rocking bar (21).
3. mechanical arm device according to claim 2, it is characterized in that, described power part comprises first runner (31) of the first end that is articulated in described the first rocking bar (21), and the driving-belt (4) that connects described the first runner (31) and described the second runner (32); Described the first runner (31) is selectively rotation under the effect of external force.
4. mechanical arm device according to claim 3 is characterized in that, described driving-belt (4) comprises the first driving-belt (41) arranged in a crossed manner and the second driving-belt (42).
5. mechanical arm device according to claim 4 is characterized in that, the diameter of described the first runner (31) is the twice of described the second runner (32) diameter.
6. mechanical arm device according to claim 3 is characterized in that, described driving-belt (4) comprises the first driving-belt (41) and the second driving-belt (42); The two ends of described the first driving-belt (41) are installed on respectively the homonymy of described the first runner (31) and described the second runner (32), and the two ends of described the second driving-belt (42) are installed on respectively the opposite side of described the first runner (31) and described the second runner (32).
7. mechanical arm device according to claim 6 is characterized in that, the diameter of described the first runner (31) is identical with the diameter of described the second runner (32).
8. according to claim 1 to 7 each described mechanical arm devices, it is characterized in that the second end of described the second rocking bar (22) is hinged with slide block (6), the second end of described the second rocking bar (22) is installed described arm body (5) by slide block (6).
9. mechanical arm device according to claim 2 is characterized in that, described power part comprises first runner (31) of the first end that is articulated in described the first rocking bar (21); Described the first runner (31) and the gear of described the second runner (32) for being meshed in the outer ring, and described the first runner (31) selectively rotation under the effect of external force.
10. mechanical arm device according to claim 9 is characterized in that, the reference diameter of described the first runner (31) is the twice of described the second runner (32) reference diameter.
11. mechanical arm device according to claim 9 is characterized in that, the reference diameter of described the first runner (31) equates with the reference diameter of described the second runner (32).
12. a substrate handling system is characterized in that, comprises each described mechanical arm device of claim 1 to 11.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910241497 CN102092044B (en) | 2009-12-10 | 2009-12-10 | Substrate processing system and mechanical arm device thereof |
| PCT/CN2010/079068 WO2011069409A1 (en) | 2009-12-10 | 2010-11-24 | Robot arm device and substrate processing system comprising the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910241497 CN102092044B (en) | 2009-12-10 | 2009-12-10 | Substrate processing system and mechanical arm device thereof |
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| Publication Number | Publication Date |
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| CN102092044A CN102092044A (en) | 2011-06-15 |
| CN102092044B true CN102092044B (en) | 2013-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200910241497 Active CN102092044B (en) | 2009-12-10 | 2009-12-10 | Substrate processing system and mechanical arm device thereof |
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| CN (1) | CN102092044B (en) |
| WO (1) | WO2011069409A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103287847B (en) * | 2012-02-27 | 2016-08-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Substrate transmission mechanism and the substrate transport system with it |
| CN104748676A (en) * | 2013-12-31 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Position detection device and transmission system |
| CN106926246B (en) * | 2015-12-31 | 2019-05-28 | 中微半导体设备(上海)股份有限公司 | Mechanical arm used in a kind of vacuum environment |
| CN106735052A (en) * | 2016-12-13 | 2017-05-31 | 苏州超群智能科技有限公司 | Die casting withdrawing device |
| CN107445092B (en) * | 2017-08-24 | 2023-02-28 | 西南交通大学 | Carrying trolley and carrying trolley with linear and X-shaped arrangement being mutually changed |
| CN107826746B (en) * | 2017-12-07 | 2024-09-24 | 惠州市成泰自动化科技有限公司 | Copper needle grabbing and transporting mechanism of copper needle punching machine |
| CN109027158B (en) * | 2018-10-26 | 2023-06-20 | 海鹰企业集团有限责任公司 | Flat pushing rotary mechanism |
| CN114148728A (en) * | 2020-09-08 | 2022-03-08 | 深圳莱宝高科技股份有限公司 | Carrying device |
| CN115274515A (en) * | 2021-04-30 | 2022-11-01 | 中微半导体设备(上海)股份有限公司 | Substrate processing system and working method thereof |
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| US6601468B2 (en) * | 2000-10-24 | 2003-08-05 | Innovative Robotic Solutions | Drive system for multiple axis robot arm |
| CN1623743A (en) * | 2003-12-02 | 2005-06-08 | 株式会社三协精机制作所 | Drive connection mechanism and vacuum manipulator with the drive connection mechanism |
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| EP1135795B1 (en) * | 1998-12-02 | 2008-03-12 | Newport Corporation | Specimen holding robotic arm end effector |
| JP2003170384A (en) * | 2001-12-04 | 2003-06-17 | Rorze Corp | SCARA robot for transporting flat objects and processing system for flat objects |
| WO2008111410A1 (en) * | 2007-03-14 | 2008-09-18 | Kabushiki Kaisha Yaskawa Denki | Substrate conveying robot |
| CN101537612B (en) * | 2009-04-27 | 2010-12-29 | 辽宁聚智科技发展有限公司 | Crank block type mechanism arm |
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| US6601468B2 (en) * | 2000-10-24 | 2003-08-05 | Innovative Robotic Solutions | Drive system for multiple axis robot arm |
| CN1623743A (en) * | 2003-12-02 | 2005-06-08 | 株式会社三协精机制作所 | Drive connection mechanism and vacuum manipulator with the drive connection mechanism |
| CN1779936A (en) * | 2005-10-19 | 2006-05-31 | 哈尔滨工业大学 | Two-dimensional Parallel Driven Silicon Wafer Handling Robot |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011069409A1 (en) | 2011-06-16 |
| CN102092044A (en) | 2011-06-15 |
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Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |