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CN102061454B - Method for preparing coating on cutter - Google Patents

Method for preparing coating on cutter Download PDF

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CN102061454B
CN102061454B CN2011100241343A CN201110024134A CN102061454B CN 102061454 B CN102061454 B CN 102061454B CN 2011100241343 A CN2011100241343 A CN 2011100241343A CN 201110024134 A CN201110024134 A CN 201110024134A CN 102061454 B CN102061454 B CN 102061454B
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layer
ticl
cutter
gaseous mixture
coating
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CN102061454A (en
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刘浩
陈艺聪
卢志红
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Xiamen Tungsten Co Ltd
Xiamen Golden Egret Special Alloy Co Ltd
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Xiamen Tungsten Co Ltd
Xiamen Golden Egret Special Alloy Co Ltd
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Abstract

The invention provides a method for preparing a coating on a cutter, relating to a cutter. The method comprises the following steps of: putting a numeric control cutter blade in a reaction chamber, vacuumizing the reaction chamber, introducing a gas mixture of TiCl4, N2 and H2, and depositing a TiN layer on the surface of the cutter; introducing a gas mixture of TiCl4, N2, CH3CN and H2, and depositing an MT-TiCN layer on the surface of the TiN layer; closing a gas source, introducing a gas mixture of TiCl4, AlCl3, CO, CO2, CH4, N2 and H2, and depositing a binding-phase AlTiCNO layer; in the gas mixture of TiCl4, CO, CO2, CH4, N2 and H2, depositing a TiCO layer; in a gas mixture of CO2, AlCl3, HCl and H2, depositing an aluminum oxide nucleating layer; and introducing a gas mixture of AlCl3, CO, CO2, HCl, H2S and H2, and depositing an aluminum oxide coating. The coating has high surface finish quality and finer and uniform grains.

Description

A kind of on cutter the preparation method of applying coating
Technical field
The present invention relates to a kind of cutter, especially relate to a kind of on cutter the preparation method of applying coating.
Background technology
It in cutting tool surface-coated coating one of important channel of improving the cutting tool performance; Coated cutting tool has that surface hardness height, wear resistance are good, stable chemical performance, heat-resistant oxidized, characteristics such as frictional coefficient is little and thermal conductivity is low, and comparable not coated cutting tool improves the life-span more than 5~10 times during cutting.The high-quality process for modifying surface that the top coat technology of cutting tool grows up as the market requirement; Because this technology can make cutting tool obtain good comprehensive mechanical performance; Not only can improve cutting tool work-ing life effectively; And can also improve mechanical workout efficient significantly, so this technology becomes one of gordian technique of cutting tool manufacturing.
Al 2O 3Coating has very high chemicalstability and good thermal barrier characteristics, is high speed cutting tool ideal coated material.In addition, it is emphasized that CVD remains can the high-quality Al of economic production at present 2O 3The unique technical means of coating.Can pass through CVD process deposits Al 2O 3Coating can obtain three kinds of different phases, is respectively α-Al 2O 3, k-Al 2O 3And γ-Al 2O 3, α-Al wherein 2O 3Be unique stable Al 2O 3Phase.Metastable κ mutually mutually will be through being converted into stable α phase like the heat that produces in thermal treatment, post-depositional thermal treatment and the cut in the deposition with γ.The volumetric shrinkage that when phase transformation, takes place will reduce and final failure κ-Al 2O 3The adhesivity of coating is like U.S. Pat 5700569.Therefore, consider the deposition effect and the abrasion resistance properties (especially when high speed cutting) of coating, α-Al 2O 3Should be best and safest selection mutually, like U.S. Pat 5137774.But, α-Al 2O 3Have the advantages that crystal grain is prone to grow up, this is very unfavorable for cutting, causes tipping easily, reduces cutter life.When adopting conventional coatings technology, as α-Al 2O 3When coat-thickness was 7 μ m, crystal grain was very thick, and mean grain size reaches more than the 4 μ m, was difficult to obtain to stablize the α-Al of difficult drop-off 2O 3Thick film coating, and thick aluminum oxide often contains hole and lattice defect.In order to obtain high quality, fine grain α-Al 2O 3Coating adopts the sedimentary method of multilayer substep usually.Adopt the repeatedly sedimentary method of layering like U.S. Pat 6713172 disclosed aluminum oxide, through the next interval of titanium oxide as thin as a wafer, can obtain α-Al of the about 0.5 μ m of surperficial average grain between layer and the layer 2O 3Coating.U.S. Pat 6673393 adopts similar method, obtains the k-Al less than 0.5 μ m 2O 3Coating.U.S. Pat 5071696 is through control nucleation condition and utilize κ-Al 2O 3The meta inversion of phases is α-Al 2O 3Phase obtains fine grain aluminum oxide coating layer, and particle size is between 0.5~2 μ m.
Summary of the invention
The objective of the invention is to overcome technical deficiencies such as alumina grain is thick in the prior art, crystal grain is inhomogeneous; A kind of cutting tool that is applicable to is provided, and formed coating has the preparation method of applying coating on cutter of characteristics such as surface smoothness is higher, uniform crystal particles is finer and closely woven.
The present invention includes following steps:
1) the numerical control blade is put into reaction chamber;
2) with the reaction chamber state that is evacuated;
In step 2) in, the said vacuum tightness that vacuumizes can be below the 10mbar.
3) through heating mantles reaction chamber is heated, adds and depress, feed TiCl 4, N 2And H 2Gaseous mixture, depositing TiN layer on tool surface;
In step 3), the temperature of said heating can be 900~950 ℃, and the pressure of said pressurization can be 50~500mbar; Said TiCl 4, N 2And H 2Gaseous mixture in TiCl by mass percentage 4Be 0.2%~10%, N 2Be 2%~50%, surplus is H 2The thickness of said TiN layer can be 0.5 μ m~1 μ m, and depositing time can be 0.5~1h.
4) deposited the TiN layer after, reaction chamber temperature is stabilized in 850~950 ℃, and under the pressure of 50~500mbar, feed TiCl 4, N 2, CH 3CN and H 2Gaseous mixture, deposition MT-TiCN layer on the TiN laminar surface;
In step 4), said TiCl 4, N2, CH 3CN and H 2Gaseous mixture in TiCl by mass percentage 4Be 0.2%~10%, N 2Be 2%~50%, CH 3CN is 0.2%~10%, and surplus is H 2The thickness of said MT-TiCN layer can be 2~14 μ m, and the sedimentary time can be 1.5~7h.
5) close source of the gas, feed TiCl then 4, AlCl 3, CO, CO 2, CH 4, N 2And H 2Gaseous mixture, be 900~1020 ℃ and be under 50~200mbar in temperature, deposition bonding phase AlTiCNO layer at pressure;
In step 5), said TiCl 4, AlCl 3, CO, CO 2, CH 4, N 2And H 2Gaseous mixture in TiCl by mass percentage 4Be 0.2%~10%, AlCl 3Be 0.2%~8%, CO is 0.3%~9%, CO 2Be 0.1%~5%, CH 4Be 0.2%~7%, N 2Be 0~15%, surplus is H 2The thickness of said bonding phase AlTiCNO layer can be 0.1~1.5 μ m, and the sedimentary time can be 0.2~1h.
6) at TiCl 4, CO, CO 2, CH 4, N 2And H 2Gaseous mixture in, temperature be 900~1020 ℃ with pressure be under 50~200mbar, depositing Ti CO layer;
In step 6), said TiCl 4, CO, CO 2, CH 4, N 2And H 2Gaseous mixture in TiCl by mass percentage 4Be 2%~6%, CO is 3%~9%, CO 2Be 1.5%~10%, CH 4Be 0.2%~7%, N 2Be 0~15%, surplus is H 2The thickness of said TiCO layer can be 0.1~0.3 μ m, and the sedimentary time can be 1~30min.
7) at CO 2, AlCl 3, HCl and H 2Gaseous mixture in, temperature be 900~1020 ℃ with pressure be under 50~200mbar, the deposition of aluminium oxide nucleating layer;
In step 7), said CO 2, AlCl 3, HCl and H 2Gaseous mixture in CO by mass percentage 2Be 1%~5%, AlCl 3Be 2%~10%, HCl is 1%~15%, and surplus is H 2The thickness of said aluminum oxide nucleating layer can be 0.1~0.8 μ m, and the sedimentary time can be 0.2~1h.
8) feed AlCl 3, CO, CO 2, HCl, H 2S and H 2Gaseous mixture in, temperature be 900~1020 ℃ with pressure be under 50~200mbar, deposition of aluminium oxide coatings must apply cated cutter at tool surface.
In step 8), said AlCl 3, CO, CO 2, HCl, H 2S and H 2Gaseous mixture in AlCl by mass percentage 3Be 0.1%~10%, CO is 0~10%, CO 2Be 0~5%, HCl is 0~15%, H 2S is 0.01%~1%, and surplus is H 2The thickness of said aluminum oxide coating layer can be 3~10 μ m, and the sedimentary time can be 4~15h.
Coatings prepared of the present invention comprises one deck α-Al at least 2O 3Layer, α-Al 2O 3Layer is made up of the columnar grain with even fine particle (average grain is less than 1 μ m), and the long-width ratio of columnar grain is 3~13, and is preferred 4~10, and the best is 6~8, and aluminum oxide coating layer thickness is 1~10 μ m, preferred 4~9 μ m.Through the scanning electron microscopic observation analysis, particle size is very even, and size distribution is very narrow, and 90% particle size is between 0.75-1.25 μ m.
(Ti, Al) on the CNO, the TiCNO layer of growth-dominated oxygen level on this layer is through regulating Optimization Layer CO at key coat for aluminum oxide coating layer 2And the ratio between the CO is come controlled oxidation atmosphere, makes α-Al 2O 3When forming core, produce a large amount of thin nuclear, thus the crystal grain of refinement aluminum oxide, and in the aluminum oxide developmental process, adopt HCl the effective inhibited oxidation al particulate of gas thick, aluminum oxide is grown up uniformly.
One of key that obtains even fine grain aluminum oxide coating layer is control CO and CO in nucleation process 2Ratio, come controlled oxidation atmosphere, this ratio should be 0.1~10, preferably 1~5.Another key is in the aluminum oxide developmental process, adopt HCl the effective inhibited oxidation al particulate of gas, this ratio should be 0~15, is preferably 3~6.
The present invention is through regulating Optimization Layer CO 2And the ratio between the CO comes controlled oxidation atmosphere to make α-Al 2O 3Form a large amount of thin nuclear, thus the crystal grain of refinement aluminum oxide, and in the aluminum oxide developmental process, adopt the thick of HCl and the effective inhibited oxidation al particulate of CO gas, aluminum oxide is grown up uniformly.
Description of drawings
Fig. 1 is the section electromicroscopic photograph of coating a aluminum oxide coating layer of the present invention.Aluminum oxide coating layer thickness is about 7 μ m, adopts the way that suppresses to make αYang Hualv form columnar crystal structure.
Fig. 2 is coating a aluminum oxide coating layer of the present invention surface 1k electromicroscopic photograph doubly.As can beappreciated from fig. 2, the aluminum oxide coating layer surface particles is evenly distributed, and particle is thinner.
Fig. 3 is coating a aluminum oxide coating layer of the present invention surface 5k electromicroscopic photograph doubly.As can beappreciated from fig. 3, the aluminum oxide size is very even, and it is very concentrated to distribute, and particle size is between 0.75~1.25 μ m.
Fig. 4 is a prior art coating b aluminum oxide coating layer surface 1k electromicroscopic photograph doubly
Fig. 5 is a prior art coating b aluminum oxide coating layer surface 5k electromicroscopic photograph doubly
Embodiment
Following examples will combine accompanying drawing that the present invention is further described.
Embodiment 1
Component is 6%Co, and surplus is the carbide cutting blade of WC, and its surfaces coated is covered with TiN layer, MT-TiCN layer, and thickness is respectively 0.5~1 μ m, 7 μ m.Also be coated with α-Al that a thickness is about 8 μ m above this layer 2O 3Layer, detailed processing parameter is as shown in table 1.
Table 1
Step 1 2 3 4 5 6
TiN TiCN AlTiCNO TiNCO Al 2O 3Nucleation Al 2O 3
TiCl 4(%) 1.7 1.6 4.0 2.1
N 2(%) 38 35 4.0 6.0
CO 2(%) 1.8 3.0 2 3
CO(%) 4.0 6.0 6.0
CH 4(%) 1.0 1.0
AlCl 3(%) 3.0 2.8 3.2
H 2S(%) 0.3
HCl(%) 2 2
H 2(%) Surplus Surplus Surplus Surplus Surplus Surplus
CH 3CN(%) 0.9
Pressure (mbar) 100 70 150 150 100 70
Temperature (℃) 930 885 1000 1000 1000 1000
Time (min) 60 320 20 20 30 500
Embodiment 2
As a reference, according to the coarse grained aluminium oxide structure of prior art, deposited coatings b, and employing and the same blade base of coating a, same coat-thickness and same blade model.Utilize scanning electron microscope that the aluminum oxide coating layer surface is analyzed.Confirm the alumina particle size of coating a and b, as shown in table 2.
Table 2
Figure BDA0000044652800000051
Embodiment 3
Coating a and coating b are carried out the shock resistance experiment relatively, referring to table 3.
Workpiece: with the cylindrical rod of 4 fault troughs;
Material: 45# steel;
Blade model: WNMG080412;
Cutting parameter: V=200r/min, ap=2mm, F=0.20mm/r.
Table 3
Sequence number The trade mark Time (min) Impact number of times (inferior) Remarks
1 Coating a (the present invention) 5 4000 Point of a knife is intact
2 Coating a (the present invention) 5 4000 Point of a knife is intact
3 Coating a (the present invention) 5 4000 Point of a knife is intact
4 Coating b prior art 0.2 160 Collapse
5 Coating b prior art 1 800 Collapse
6 Coating b prior art 1.5 1200 Collapse
Can find out that from table 3 toughness of coating a of the present invention is better than prior art coating b.
Embodiment 4
Coating a and coating b are carried out wear-resisting experiment.
Workpiece: cylindrical rod
Material: HT250 cast iron
Blade model: WNMG080412
Cutting parameter: V=250m/min, ap=1mm, F=0.20mm/r
After adopting cutting 8min, measure the abrasion loss of point of a knife, record numerical value; And then cutting 3min, measure the abrasion loss of point of a knife, and write down the numerical value of corner wear, as shown in table 4.
Table 4
Figure BDA0000044652800000061
Can find out that from table 4 wear resisting property of coating a of the present invention is must prior art coating b good.

Claims (8)

1. the preparation method of an applying coating on cutter is characterized in that may further comprise the steps:
1) the numerical control blade is put into reaction chamber;
2) with the reaction chamber state that is evacuated;
3) through heating mantles reaction chamber is heated, adds and depress, feed TiCl 4, N 2And H 2Gaseous mixture, depositing TiN layer on tool surface;
4) deposited the TiN layer after, reaction chamber temperature is stabilized in 850~950 ℃, and under the pressure of 50~500mbar, feed TiCl 4, N 2, CH 3CN and H 2Gaseous mixture, deposition MT-TiCN layer on the TiN laminar surface;
5) close source of the gas, feed TiCl then 4, AlCl 3, CO, CO 2, CH 4, N 2And H 2Gaseous mixture, be 900~1020 ℃ and be under 50~200mbar in temperature, deposition bonding phase AlTiCNO layer at pressure; Said TiCl 4, AlCl 3, CO, CO 2, CH 4, N 2And H 2Gaseous mixture in TiCl by mass percentage 4Be 0.2%~10%, AlCl 3Be 0.2%~8%, CO is 0.3%~9%, CO 2Be 0.1%~5%, CH 4Be 0.2%~7%, N 2Be 0~15%, N 2Be not 0, surplus is H 2The thickness of said bonding phase AlTiCNO layer is 0.1~1.5 μ m, and the sedimentary time is 0.2~1h;
6) at TiCl 4, CO, CO 2, CH 4, N 2And H 2Gaseous mixture in, temperature be 900~1020 ℃ with pressure be under 50~200mbar, depositing Ti CO layer; Said TiCl 4, CO, CO 2, CH 4, N 2And H 2Gaseous mixture in TiCl by mass percentage 4Be 2%~6%, CO is 3%~9%, CO 2Be 1.5%~10%, CH 4Be 0.2%~7%, N 2Be 0~15%, surplus is H 2The thickness of said TiCO layer is 0.1~0.3 μ m, and the sedimentary time is 1~30min;
7) at CO 2, AlCl 3, HCl and H 2Gaseous mixture in, temperature be 900~1020 ℃ with pressure be under 50~200mbar, the deposition of aluminium oxide nucleating layer;
8) at AlCl 3, CO, CO 2, HCl, H 2S and H 2Gaseous mixture in, temperature be 900~1020 ℃ with pressure be under 50~200mbar, deposition of aluminium oxide coatings must apply cated cutter at tool surface; Said AlCl 3, CO, CO 2, HCl, H 2S and H 2Gaseous mixture in AlCl by mass percentage 3Be 0.1%~10%, CO is 0~10%, and CO is not 0, CO 2Be 0~5%, CO 2Be not 0, HCl is 0~15%, and HCl is not 0, H 2S is 0.01%~1%, and surplus is H 2The thickness of said aluminum oxide coating layer is 3~10 μ m, and the sedimentary time is 4~15h.
2. as claimed in claim 1 a kind of on cutter the preparation method of applying coating, it is characterized in that in step 2) in, the said vacuum tightness that vacuumizes is below the 10mbar.
3. as claimed in claim 1 a kind of on cutter the preparation method of applying coating, it is characterized in that in step 3) the temperature of said heating is 900~950 ℃, the pressure of said pressurization is 50~500mbar; Said TiCl 4, N 2And H 2Gaseous mixture in TiCl by mass percentage 4Be 0.2%~10%, N 2Be 2%~50%, surplus is H 2The thickness of said TiN layer is 0.5 μ m~1 μ m, and depositing time is 0.5~1h.
4. as claimed in claim 1 a kind of on cutter the preparation method of applying coating, it is characterized in that in step 4) said TiCl 4, N 2, CH 3CN and H 2Gaseous mixture in TiCl by mass percentage 4Be 0.2%~10%, N 2Be 2%~50%, CH 3CN is 0.2%~10%, and surplus is H 2The thickness of said MT-TiCN layer is 2~14 μ m, and the sedimentary time is 1.5~7h.
5. as claimed in claim 1 a kind of on cutter the preparation method of applying coating, it is characterized in that in step 7) said CO 2, AlCl 3, HCl and H 2Gaseous mixture in CO by mass percentage 2Be 1%~5%, AlCl 3Be 2%~10%, HCl is 1%~15%, and surplus is H 2The thickness of said aluminum oxide nucleating layer is 0.1~0.8 μ m, and the sedimentary time is 0.2~1h.
6. as claimed in claim 1 a kind of on cutter the preparation method of applying coating, it is characterized in that said coating comprises one deck α-Al at least 2O 3Layer, α-Al 2O 3Layer is formed less than the columnar grain of 1 μ m by having average grain, and the long-width ratio of columnar grain is 3~13, and aluminum oxide coating layer thickness is 1~10 μ m.
7. as claimed in claim 6 a kind of on cutter the preparation method of applying coating, the long-width ratio that it is characterized in that said columnar grain is 4~10, aluminum oxide coating layer thickness is 4~9 μ m.
8. as claimed in claim 7 a kind of on cutter the preparation method of applying coating, the long-width ratio that it is characterized in that said columnar grain is 6~8.
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EP2604720A1 (en) * 2011-12-14 2013-06-19 Sandvik Intellectual Property Ab Coated cutting tool and method of manufacturing the same
CN103173761B (en) * 2011-12-23 2015-08-19 株洲钻石切削刀具股份有限公司 Cutting tool improving coating structure and preparation method thereof
EP3099835A1 (en) * 2014-01-30 2016-12-07 Sandvik Intellectual Property AB Alumina coated cutting tool
CN104085142B (en) * 2014-05-28 2016-11-23 厦门金鹭特种合金有限公司 A kind of applying coating on blade base
EP3034652A1 (en) * 2014-12-19 2016-06-22 Sandvik Intellectual Property AB CVD coated cutting tool
CN105506622A (en) * 2015-12-13 2016-04-20 河南广度超硬材料有限公司 Composite coating knife and manufacturing method thereof
US10865476B2 (en) * 2017-03-23 2020-12-15 Kennametal Inc. Control and characterization of texture in CVD α-Al2O3 coatings
CN107937882B (en) * 2017-11-29 2020-06-02 无锡透平叶片有限公司 Method for chemical vapor deposition of Al-Si of turbine blade
CN108411279B (en) * 2018-03-30 2019-07-09 华中科技大学 A kind of preparation method of high-speed steel tool protective coating
CN110331380B (en) * 2019-08-06 2020-05-15 株洲华锐精密工具股份有限公司 Coating on blade substrate and preparation method thereof
CN113512716A (en) * 2021-03-26 2021-10-19 四川大学 A kind of preparation method of titanium carbonitride/alumina composite coating for repairing matrix

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SE528012C2 (en) * 2004-07-05 2006-08-08 Sandvik Intellectual Property Coated cemented carbide inserts with sharp cutting edges intended for metalworking and methods for making them
DE102007030734A1 (en) * 2007-07-02 2009-01-08 Walter Ag Coated tool
CN100575544C (en) * 2007-07-19 2009-12-30 厦门金鹭特种合金有限公司 A kind of preparation method who is applicable to the ultra-fine diamond coating of cutting tool
CN101591780A (en) * 2008-05-29 2009-12-02 浙江一胜特工模具股份有限公司 A kind of preparation method of abrasion resistant coating layer of cutter

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