CN102042798A - Preparation method of spreading resistance test sample and sample grinding and fixing device - Google Patents
Preparation method of spreading resistance test sample and sample grinding and fixing device Download PDFInfo
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- CN102042798A CN102042798A CN2009101973731A CN200910197373A CN102042798A CN 102042798 A CN102042798 A CN 102042798A CN 2009101973731 A CN2009101973731 A CN 2009101973731A CN 200910197373 A CN200910197373 A CN 200910197373A CN 102042798 A CN102042798 A CN 102042798A
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- 230000007480 spreading Effects 0.000 title claims abstract description 39
- 238000012360 testing method Methods 0.000 title claims abstract description 32
- 238000002360 preparation method Methods 0.000 title abstract description 14
- 238000009434 installation Methods 0.000 claims description 58
- 238000005464 sample preparation method Methods 0.000 claims description 24
- 244000137852 Petrea volubilis Species 0.000 claims description 23
- 239000005338 frosted glass Substances 0.000 claims description 22
- 239000003082 abrasive agent Substances 0.000 claims description 8
- 239000006061 abrasive grain Substances 0.000 claims description 6
- 239000006071 cream Substances 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 163
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000000407 epitaxy Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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Abstract
The invention provides a preparation method of a spreading resistance test sample. The preparation method comprises the following steps: fixing a sample on a bevel of a sample table forming a fixed angle with the horizontal plane, and fixing the sample table on a sample grinding and fixing device; placing the sample grinding and fixing device on a coarse grinding tool so that the sample can be in contact with the coarse grinding tool at a specific angle to be coarsely ground; and placing the sample grinding and fixing device on a fine grinding tool so that the sample can be in contact with the fine grinding tool at a specific angle to be finely ground and polished. The preparation method of the spreading resistance test sample provided by the invention can be used for preparing a spreading resistance test sample with a target depth (epitaxial layer depth) of 10-600 mum; and compared with the preparation method of the prior art, by adopting the preparation method of the spreading resistance test sample provided by the invention, the preparation efficiency of the sample is obviously improved, and the cost is lower.
Description
Technical field
The present invention relates to the integrated circuit testing field, particularly a kind of spreading resistance test sample preparation method and sample grind stationary installation.
Background technology
Spreading resistance technology (spreading resistance profile, SRP) owing to its superior spatial resolution is applied in epitaxial wafer and the test of IC pattern piece more and more widely, the SRP technology both can have been measured the epitaxial wafer longitudinal electrical resistance and change, and also can measure epitaxy layer thickness, zone of transition and interlayer width etc.The measuring principle of SRP technology as shown in Figure 1, sample 1 is sticked on the sample stage 2 with fixed angle, grind out an inclined-plane 3, these inclined-plane 3 horizontal positioned, the angle at itself and epitaxial loayer 6 interfaces is α (α is similarly the fixed angle of sample stage 2), a pair of probe 4 is measured its spreading resistance value according to certain step pitch on sample inclined-plane 3, when probe 4 runs on substrate 5 interfaces of epitaxial loayer 6 and high-dopant concentration, the spreading resistance value reduces rapidly, and spreading resistance value numerical value change is no longer obvious when reaching substrate 5, so the sample degree of depth of spreading resistance value constant interval correspondence is its epitaxy layer thickness.The level run distance is nl when supposing that probe test arrives substrate on inclined-plane 3, n be probe to measure dot number, then this moment corresponding epitaxial thickness H=nlsin α=nh, h=1sin α is called as the depth resolution of spreading resistance probe in the formula.The singularity of sample stage 2 is that its α value has fixing several angles, and the epitaxy layer thickness of the big more institute of angle energy measurement is dark more, therefore needs to select according to different epitaxial thicknesses the sample stage of different angles.But the maximum angle of the sample stage of fixed angle has only 11.53 to spend at present, this means assumes samples target depth (the epitaxial loayer degree of depth) when being 100um, needs the sample inclined-plane of preparation length greater than 500um before sample being carried out the spreading resistance test.
Please referring to Fig. 2, Fig. 2 is the spreading resistance test sample preparation method synoptic diagram that prior art adopted.As shown in Figure 2, sample 1 is secured on the inclined-plane of sample stage 2, sample stage 2 is fixed on the weight 8 by bolt 7, weight 8 is fixed in the set collar 10 on the arm 9, bolt 7, weight 8, arm 9 and set collar 10 are formed sample and are ground stationary installation, and the below on sample stage 2 inclined-planes is a frosted glass rotating disk 11, under the pressure of weight 8, sample 1 on the sample stage 2 begins sample 1 is ground when 11 rotations of frosted glass rotating disk with fixed angle contact frosted glass rotating disk 11.During grinding, it is motionless that sample grinds stationary installation, plays the fixation to sample 1.Usually also the diamond cream of 0.1um diameter and oil are mixed and made into the surface that abrasive material evenly is applied in frosted glass rotating disk 11 during grinding and grind, this method can make the sample inclined-plane that grinds out very level and smooth, but expends time in.Generally, preparation sample bevel angle is 11.5 degree, and the sample inclined-plane of length 500um need grind 10-15 minute.And the big more speed that grinds of angle is also just slow more.Diamond cream can mix a large amount of sample chips after using a period of time, and after the oil volatilization abrasive material is become dry, thereby sample is caused damage, so just must change abrasive material after a period of time and proceed to grind again.So during with the sample inclined-plane of existing method preparation such as above-mentioned length, duration and cost height disappear.Simultaneously, above-mentioned sample grinds stationary installation and generally is fixed on the frosted glass rotating disk 11, sample can't be ground stationary installation integral body and separate with frosted glass rotating disk 11 with sample 1, and this sample grinds the angle of 11 of height that stationary installation can't accurately adjust sample and sample and frosted glass rotating disks together with sample stage 2.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of sample and grinds stationary installation and a kind of spreading resistance test sample preparation method, to solve existing spreading resistance test sample preparation method inefficiency and the high problem of cost when preparing the sample inclined-plane of the big inclined-plane of degree of depth length.
For solving the problems of the technologies described above, the invention provides a kind of spreading resistance test sample preparation method, may further comprise the steps:
Sample is fixed in to have on the inclined-plane of sample stage of fixed angle and described sample stage is fixed in sample with surface level grinds on the stationary installation;
Described sample is ground stationary installation be positioned on the corase grind grinding tool, make described sample to contact with described corase grind grinding tool, described sample is roughly ground with special angle;
Described sample is ground stationary installation be positioned on the fine grinding grinding tool, make described sample to contact with described fine grinding grinding tool, described sample is carried out the fine grinding polishing with special angle.
Optionally, described the step that described sample is roughly ground is comprised: use mill described sample to be ground as described corase grind grinding tool.
Optionally, described the step that described sample is roughly ground is also comprised: use described mill also to use fine lapping sand paper described sample to be ground after sample is ground as described corase grind grinding tool.
Optionally, described use mill comprises the step that described sample grinds: described sample is ground stationary installation be fixed on the described mill, adjust height and level that described sample grinds stationary installation, described sample is contacted with described mill with special angle, drive described mill then described sample is ground.
Optionally, described use fine lapping sand paper comprises the step that described sample grinds: described fine lapping sand paper is fixed on the rotating disk, described sample is ground stationary installation to be fixed on the described fine lapping sand paper, adjust height and level that described sample grinds stationary installation, described sample is contacted with described fine lapping sand paper with special angle, drive described rotating disk then described sample is ground.
Optionally, at first use the bigger fine lapping sand paper of abrasive grains diameter to grind, then use the less fine lapping sand paper of abrasive grains diameter instead and grind.
Optionally, the described step that described sample is carried out fine grinding polishing comprises: use the frosted glass rotating disk as described fine grinding grinding tool, described sample is ground stationary installation to be fixed on the described frosted glass rotating disk, adjust height and level that described sample grinds stationary installation, described sample is contacted with described frosted glass rotating disk with special angle, drive described frosted glass rotating disk then described sample is ground.
Optionally, the surface of described frosted glass rotating disk is coated with the abrasive material that diamond cream and oil are mixed and made into during grinding.
The invention provides and also a kind ofly grind stationary installation, comprise sample holder, the milscale knob is installed, on the end face of described sample holder in order to the height and the level of regulating described sample holder for implementing the sample that above-mentioned spreading resistance test sample preparation method designs; The bottom of described sample holder has wear-resisting leg; The center of described sample holder is provided with the bolt through hole, described bolt through hole internal fixation has bolt, the top of described bolt is fixed on the end face of described sample holder, the bottom of described bolt protrudes in the bottom surface of described sample holder, the bottom of described bolt has screw thread, is used for fixing sample.
Optionally, also be provided with pad on the bolt hole of described sample holder end face.
Optionally, described milscale knob is one or more.
Sample provided by the invention grinds the stationary installation height of also high-precision adjusting sample and the angle between sample and grinding tool flexibly, this sample grinds stationary installation can be separated with grinding tool, can be used in different grinding tools and carry out sample and grind, and take and lay very convenient.Spreading resistance test sample preparation method provided by the invention can prepare target depth (the epitaxial loayer degree of depth) and be the spreading resistance specimen of 10um to 600um, and preparation method than prior art, the specimen required time that adopts spreading resistance test sample preparation method of the present invention to prepare the same target degree of depth obviously reduces, thereby significantly improved the preparation efficiency of sample, adopt spreading resistance test sample preparation method of the present invention only need smear a diamond cream simultaneously as abrasive material, do not need more to renew abrasive material, thereby adopt spreading resistance test sample preparation method cost of the present invention cheaper yet.
Description of drawings
Fig. 1 is a spreading resistance commercial measurement principle schematic;
Fig. 2 is the spreading resistance test sample preparation method synoptic diagram that prior art adopted;
Fig. 3 is that the employed sample of the inventive method grinds stationary installation top surface structure synoptic diagram;
Fig. 4 looks up structural representation for the bottom surface that the employed sample of the inventive method grinds stationary installation;
Fig. 5 is the cross-sectional view that the employed sample of the inventive method grinds stationary installation.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
A kind of sample of the present invention grinds stationary installation and spreading resistance test sample preparation method can utilize multiple substitute mode to realize; be to be illustrated below by preferred embodiment; certainly the present invention is not limited to this specific embodiment, and the known general replacement of one of ordinary skilled in the art is encompassed in protection scope of the present invention undoubtedly.
Secondly, the present invention utilizes synoptic diagram to describe in detail, and when the embodiment of the invention was described in detail in detail, for convenience of explanation, synoptic diagram was disobeyed the local amplification of general ratio, should be with this as limitation of the invention.
When preparation spreading resistance specimen, at first need sample is fixed on the inclined-plane of the sample stage with fixed angle inclined-plane and described sample stage is fixed in sample to grind on the stationary installation and can grind to sample.See also Fig. 3, Fig. 4 and Fig. 5, Fig. 3 is that the employed sample of the inventive method grinds stationary installation top surface structure synoptic diagram; Fig. 4 looks up structural representation for the bottom surface that the employed sample of the inventive method grinds stationary installation; Fig. 5 is the cross-sectional view that the employed sample of the inventive method grinds stationary installation.As Fig. 3, Fig. 4 and shown in Figure 5, this sample grinds stationary installation and comprises sample holder 12, and milscale knob 13 is installed on the end face of described sample holder 12, and in order to regulate the height and the level of sample holder 12, described milscale knob is one or more; The center of described sample holder 12 is provided with the bolt through hole, bolt 14 is fixed in the bolt through hole, the top of described bolt 14 is fixed on the end face of described sample holder, the bottom of described bolt 14 protrudes in the bottom surface of described sample holder, the bottom of described bolt 14 has screw thread, and sample stage 2 is fixed on the described bolt 14 by described screw thread; The bottom of described sample holder 12 has wear-resisting leg 15, and when sample was ground, sample ground stationary installation and is positioned on the grinding tools 16 such as mill or sand paper, and described wear-resisting leg 15 supports sample grinding stationary installation and directly contacts with described grinding tool 16; The inclined-plane of described sample stage 2 is towards described grinding tool 16, and sample 1 is fixed on the inclined-plane of described sample platform 2.With described bolt 14 fixing with described bolt hole in the time, also can on the bolt hole of described sample holder 12 end faces, increase pad 17 to regulate the height of described sample stage 2.
Sample of the present invention grinds the stationary installation height of also high-precision adjusting sample and the angle between sample and grinding tool flexibly, this sample grinds stationary installation can be separated with grinding tool, can be used in different grinding tools and carry out the sample grinding, and take and lay very conveniently, being applicable in the specimen preparation process needs to change the sample preparation methods that different grinding tools grinds sample.
Spreading resistance test sample preparation method of the present invention may further comprise the steps:
At first, sample is fixed on the inclined-plane of sample stage and described sample stage is fixed in sample and grind on the stationary installation with fixed angle.When being fixed in the sample stage inclined-plane, can use by described sample wax that sample is sticked on the sample stage inclined-plane.
Secondly, described sample is ground stationary installation be positioned on the corase grind grinding tool, make described sample to contact with described corase grind grinding tool, described sample is roughly ground with special angle.Preferably, at first use mill described sample to be ground as the corase grind grinding tool, described sample is ground stationary installation to be fixed on the mill, adjust height and the level that described sample grinds stationary installation before grinding, described sample is contacted with described mill with special angle, drive described mill then described sample is ground.During grinding, select the rotating speed of described mill and grind revolution, adopt jogging speed (10 rev/mins) to roughly grind 4 to 5 usually and change and get final product according to the bevel depth that described sample needs grind; Then use fine lapping sand paper sample to be ground as the corase grind grinding tool, described fine lapping sand paper is fixed on the rotating disk, described sample is ground stationary installation to be fixed on the described fine lapping sand paper, same height and the level of adjusting described sample grinding stationary installation before grinding, described sample is contacted with described fine lapping sand paper with special angle, drive described rotating disk then described sample is ground.Preferably, at first use the fine lapping sand paper of big (as 30um) of abrasive grains diameter, rotating speed grinds for 50 rev/mins, then use the fine lapping sand paper of abrasive grains diameter less (as 15um and 6um) instead, rotating speed grinds for 30 rev/mins, level and smooth substantially up to the sample inclined-plane, have till the tangible reflected light.If the sample bevel depth that need grind hour also can not adopt mill to grind earlier and directly use fine lapping sand paper that sample is ground, in using mill and process that fine lapping sand paper grinds, also can regulate constantly to keep sample to contact with fixed angle with level the height that sample grinds stationary installation with grinding tool.
At last, described sample is ground stationary installation be positioned on the fine grinding grinding tool, make described sample to contact with described fine grinding grinding tool, described sample is carried out the fine grinding polishing with special angle.Use the frosted glass rotating disk as described fine grinding grinding tool, described sample is ground stationary installation to be fixed on the frosted glass rotating disk, adjust height and the level that described sample grinds stationary installation before grinding, described sample is contacted with the frosted glass rotating disk with special angle, drive described frosted glass rotating disk then described sample is ground.Described frosted glass disc surfaces is coated with the diamond cream and the oily abrasive material that is mixed and made into by the 0.1um diameter during grinding.
When sample is roughly ground, preferably use as Fig. 3 sample extremely shown in Figure 5 and grind stationary installation, when sample is carried out the fine grinding polishing, both can adopt as Fig. 3 sample extremely shown in Figure 5 and grind stationary installation, also can use sample grinding stationary installation as shown in Figure 2.
If then can repeat above-mentioned steps to the grinding of sample is not in place.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (11)
1. spreading resistance test sample preparation method may further comprise the steps:
Sample is fixed in to have on the inclined-plane of sample stage of fixed angle and described sample stage is fixed in sample with surface level grinds on the stationary installation;
Described sample is ground stationary installation be positioned on the corase grind grinding tool, make described sample to contact with described corase grind grinding tool, described sample is roughly ground with special angle;
Described sample is ground stationary installation be positioned on the fine grinding grinding tool, make described sample to contact with described fine grinding grinding tool, described sample is carried out the fine grinding polishing with special angle.
2. spreading resistance test sample preparation method as claimed in claim 1 is characterized in that, described the step that described sample is roughly ground is comprised: use mill as described corase grind grinding tool described sample to be ground.
3. spreading resistance test sample preparation method as claimed in claim 2, it is characterized in that, described the step that described sample is roughly ground is also comprised: use described mill also to use fine lapping sand paper described sample to be ground after sample is ground as described corase grind grinding tool.
4. spreading resistance test sample preparation method as claimed in claim 2, it is characterized in that, described use mill comprises the step that described sample grinds: described sample is ground stationary installation be fixed on the described mill, adjust height and level that described sample grinds stationary installation, described sample is contacted with described mill with special angle, drive described mill then described sample is ground.
5. spreading resistance test sample preparation method as claimed in claim 3, it is characterized in that, described use fine lapping sand paper comprises the step that described sample grinds: described fine lapping sand paper is fixed on the rotating disk, described sample is ground stationary installation to be fixed on the described fine lapping sand paper, adjust height and level that described sample grinds stationary installation, described sample is contacted with described fine lapping sand paper with special angle, drive described rotating disk then described sample is ground.
6. spreading resistance test sample preparation method as claimed in claim 5 is characterized in that, at first uses the bigger fine lapping sand paper of abrasive grains diameter to grind, and then uses the less fine lapping sand paper of abrasive grains diameter instead and grinds.
7. spreading resistance test sample preparation method as claimed in claim 1, it is characterized in that, the described step that described sample is carried out fine grinding polishing comprises: use the frosted glass rotating disk as described fine grinding grinding tool, described sample is ground stationary installation to be fixed on the described frosted glass rotating disk, adjust height and level that described sample grinds stationary installation, described sample is contacted with described frosted glass rotating disk with special angle, drive described frosted glass rotating disk then described sample is ground.
8. spreading resistance test sample preparation method as claimed in claim 7 is characterized in that, the surface of described frosted glass rotating disk is coated with diamond cream and the oily abrasive material that is mixed and made into during grinding.
9. one kind is ground stationary installation for implementing the sample that spreading resistance test sample preparation method as claimed in claim 1 designs, comprise sample holder, the milscale knob is installed, in order to the height and the level of regulating described sample holder on the end face of described sample holder; The bottom of described sample holder has wear-resisting leg; The center of described sample holder is provided with the bolt through hole, described bolt through hole internal fixation has bolt, the top of described bolt is fixed on the end face of described sample holder, the bottom of described bolt protrudes in the bottom surface of described sample holder, the bottom of described bolt has screw thread, is used for fixing sample.
10. sample as claimed in claim 9 grinds stationary installation, it is characterized in that, also is provided with pad on the bolt hole of described sample holder end face.
11. sample as claimed in claim 9 grinds stationary installation, it is characterized in that described milscale knob is one or more.
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| CN2009101973731A CN102042798B (en) | 2009-10-19 | 2009-10-19 | Preparation method of extended resistance test sample and sample grinding and fixing device |
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| CN2009101973731A CN102042798B (en) | 2009-10-19 | 2009-10-19 | Preparation method of extended resistance test sample and sample grinding and fixing device |
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Cited By (9)
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| CN102513923A (en) * | 2011-12-28 | 2012-06-27 | 彩虹集团公司 | Sample tray for precision grinding and polishing machine |
| CN102853789A (en) * | 2011-06-28 | 2013-01-02 | 上海华碧检测技术有限公司 | Calibration method of epitaxial layer junction depth dyeing |
| CN103084967A (en) * | 2013-01-16 | 2013-05-08 | 大连理工大学 | Grinding and buffing device for transmission electron microscope film sample |
| CN104810239A (en) * | 2014-01-23 | 2015-07-29 | 中芯国际集成电路制造(上海)有限公司 | Preparation method of spreading resistance test sample |
| CN108267348A (en) * | 2017-12-29 | 2018-07-10 | 北京智芯微电子科技有限公司 | The nano high-precision preparation method of IC product cross sections |
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| CN112025469A (en) * | 2020-09-10 | 2020-12-04 | 西安奕斯伟硅片技术有限公司 | Device, equipment and method for angle polishing of silicon wafer sample |
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| CN102853789A (en) * | 2011-06-28 | 2013-01-02 | 上海华碧检测技术有限公司 | Calibration method of epitaxial layer junction depth dyeing |
| CN102513923A (en) * | 2011-12-28 | 2012-06-27 | 彩虹集团公司 | Sample tray for precision grinding and polishing machine |
| CN103084967A (en) * | 2013-01-16 | 2013-05-08 | 大连理工大学 | Grinding and buffing device for transmission electron microscope film sample |
| CN103084967B (en) * | 2013-01-16 | 2015-04-08 | 大连理工大学 | Grinding and buffing device for transmission electron microscope film sample |
| CN104810239A (en) * | 2014-01-23 | 2015-07-29 | 中芯国际集成电路制造(上海)有限公司 | Preparation method of spreading resistance test sample |
| CN104810239B (en) * | 2014-01-23 | 2017-08-29 | 中芯国际集成电路制造(上海)有限公司 | A kind of preparation method of Spreading resistance sample |
| CN108267348A (en) * | 2017-12-29 | 2018-07-10 | 北京智芯微电子科技有限公司 | The nano high-precision preparation method of IC product cross sections |
| CN110634776A (en) * | 2019-09-18 | 2019-12-31 | 西安奕斯伟硅片技术有限公司 | Preparation device and preparation method of silicon wafer sample |
| CN110634776B (en) * | 2019-09-18 | 2022-03-01 | 西安奕斯伟材料科技有限公司 | Preparation device and preparation method of silicon wafer sample |
| CN112025469A (en) * | 2020-09-10 | 2020-12-04 | 西安奕斯伟硅片技术有限公司 | Device, equipment and method for angle polishing of silicon wafer sample |
| CN113049881A (en) * | 2021-04-09 | 2021-06-29 | 中国电子技术标准化研究院 | Extension resistance tester for epitaxial layer of integrated circuit |
| US11841296B2 (en) | 2021-12-02 | 2023-12-12 | Globalfoundries U.S. Inc. | Semiconductor substrates for electrical resistivity measurements |
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