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CN102035126A - All-solid-state laser for laser texturing of metal - Google Patents

All-solid-state laser for laser texturing of metal Download PDF

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CN102035126A
CN102035126A CN 201010540123 CN201010540123A CN102035126A CN 102035126 A CN102035126 A CN 102035126A CN 201010540123 CN201010540123 CN 201010540123 CN 201010540123 A CN201010540123 A CN 201010540123A CN 102035126 A CN102035126 A CN 102035126A
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laser
solid
state
texturing
diode
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耿爱丛
杨明江
覃志康
任志远
邵鑫
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Institute of Mechanics of CAS
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Abstract

一种激光毛化用全固态激光器,包括激光直流电源、Q开关驱动器、水冷机和全固态毛化激光装置,所述全固态毛化激光装置包括,同光轴依次串联在一起的全反射镜,激光发生装置,光电门和激光输出镜和激光功率检测装置适用于高质量金属表面的毛化处理。本发明中的激光器采用小尺寸、低掺杂浓度双棒串接和热致双折射补偿装置,结合热近非稳腔设计,巧妙化解高功率与高光束质量这对矛盾。与先前技术相比,本发明的全固态激光毛化激光器光束能量密度高、发散角小,能够提高激光毛化密度,激光模块寿命长、维护方便。

An all-solid-state laser for laser texturing, comprising a laser DC power supply, a Q-switch driver, a water cooler, and an all-solid-state texturing laser device, wherein the all-solid-state texturing laser device includes total reflection mirrors connected in series with the optical axis in sequence , Laser generating device, photoelectric gate and laser output mirror and laser power detection device are suitable for roughening of high-quality metal surfaces. The laser in the present invention adopts a small size, low doping concentration double-rod series connection and a thermally induced birefringence compensation device, combined with a thermally unstable cavity design, to skillfully resolve the contradiction between high power and high beam quality. Compared with the prior art, the all-solid-state laser texturing laser of the present invention has high beam energy density and small divergence angle, can increase the laser texturing density, has long service life of the laser module, and is convenient for maintenance.

Description

一种用于金属激光毛化的全固态激光器 An all-solid-state laser for metal laser texturing

技术领域technical field

本发明是一种二极管泵浦的全固态激光器的结构及应用,特别涉及一种适用于金属表面毛化处理的高功率、高光束质量全固态激光器的结构及应用。The invention relates to the structure and application of a diode-pumped all-solid-state laser, in particular to the structure and application of a high-power, high-beam-quality all-solid-state laser suitable for metal surface texturing.

背景技术Background technique

激光毛化是钢铁工业为了生产优质钢板而发展起来的冷轧钢辊毛化技术。中科院力学研究所自1990年起便开始研究激光毛化技术,例如:中国专利号:ZL92113223.9,名称:“高重频调制多脉冲YAG激光刻花系统及加工方法”;中国专利号:ZL94220848.X,名称:“用于轧辊表面毛化的激光加工设备”。该设备采用高能量密度、高重复频率的灯泵掺钕钇铝石榴石晶体(Nd:YAG)激光器为毛化光源进行螺旋扫描,当激光束聚焦照射至轧辊表面,形成若干一定形貌的微小熔池;光脉冲作用停止后,微坑熔融物迅速冷却,形成表面硬化的微坑和坑边凸台结构。Laser texturing is a cold-rolled steel roll texturing technology developed by the steel industry to produce high-quality steel plates. The Institute of Mechanics, Chinese Academy of Sciences has been researching laser texturing technology since 1990, for example: Chinese patent number: ZL92113223.9, title: "High repetition frequency modulation multi-pulse YAG laser engraving system and processing method"; Chinese patent number: ZL94220848 .X, name: "Laser processing equipment for surface texturing of rolls". The equipment uses a lamp-pumped neodymium-doped yttrium-aluminum garnet (Nd:YAG) laser with high energy density and high repetition rate as the texturing light source for helical scanning. When the laser beam is focused on the surface of the roll, a number of tiny Melt pool: After the light pulse stops, the melt of the micropit cools rapidly to form a surface-hardened micropit and a pit-side boss structure.

但是目前为止,激光毛化装置都是采用灯泵YAG激光器为光源,它的缺点是受氙灯寿命限制,设备在生产中的维护周期较短;另外,由于氙灯作为光源时激光晶体热效应明显,因此,不但电光效率较低,重要的是激光束光束质量受到极大限制。然而,当前随着国内汽车、家电和机械制造业等的蓬勃发展,对高质量钢板的表面粗糙度均匀性和毛化密度要求越来越高,这就要求激光器输出光束除了具有高功率外,还同时具有高的光束质量。一些新产品要求激光毛化密度要达到≥70点/mm2,这是常规灯泵YAG激光器难以实现的。But so far, laser texturing devices have used lamp-pumped YAG lasers as the light source. Its disadvantage is that the life of the xenon lamp is limited, and the maintenance period of the equipment in production is relatively short; in addition, the thermal effect of the laser crystal is obvious when the xenon lamp is used as the light source. , not only the electro-optic efficiency is low, but the important thing is that the beam quality of the laser beam is greatly limited. However, with the vigorous development of domestic automobile, home appliance and machinery manufacturing industries, the requirements for surface roughness uniformity and texture density of high-quality steel plates are getting higher and higher, which requires that the laser output beam not only have high power, but also It also has high beam quality at the same time. Some new products require the laser texture density to reach ≥70 dots/mm 2 , which is difficult to achieve with conventional lamp-pumped YAG lasers.

发明内容Contents of the invention

本发明为了解决上述在先技术中的困难,设计了一种全固态激光毛化激光器。一种激光毛化用全固态激光器,包括激光直流电源、Q开关驱动器、水冷机;还包括全固态毛化激光装置,所述全固态毛化激光装置包括,同光轴依次串联在一起的全反射镜,激光发生装置,光电门和激光输出镜和激光功率检测装置。In order to solve the above-mentioned difficulties in the prior art, the present invention designs an all-solid-state laser texturing laser. An all-solid-state laser for laser texturing, including a laser DC power supply, a Q switch driver, and a water cooler; it also includes an all-solid-state texturing laser device, and the all-solid-state texturing laser device includes all Reflector, laser generating device, photoelectric gate and laser output mirror and laser power detection device.

进一步,所述激光发生装置包括,同光轴依次串联的45°旋光器,声光Q开关,二极管激光侧面泵浦激光模块。Further, the laser generating device includes a 45° optical rotator connected in series with the optical axis, an acousto-optic Q switch, and a diode laser side-pumped laser module.

进一步,所述激光发生装置包括,同光轴依次串联的声光Q开关,两个二极管激光侧面泵浦激光模块,在所述两个二极管激光侧面泵浦激光模块之间还同光轴串联有90°旋光器。Further, the laser generating device includes an acousto-optic Q switch connected in series with the optical axis, two diode laser side-pumped laser modules, and an optical axis connected in series between the two diode laser side-pumped laser modules. 90° optical rotator.

进一步,所述二极管激光侧面泵浦激光模块为全固态,采用离子掺杂浓度≤0.7%和直径≤5mm的激光晶体,采用激光二极管三维或五维的对称侧面泵浦结构。Further, the diode laser side-pumped laser module is all solid-state, adopts a laser crystal with an ion doping concentration ≤ 0.7% and a diameter ≤ 5mm, and adopts a three-dimensional or five-dimensional symmetrical side-pumped structure of a laser diode.

进一步,所述二极管激光侧面泵浦激光模块中激光晶体的主平面到谐振腔镜的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距。Further, the distance from the main plane of the laser crystal in the diode laser side-pumped laser module to the cavity mirror is equal to the focal length of the thermal lens generated by the laser crystal when the power of the laser diode is increased to the highest.

进一步,所述光电门可随时开启或关断激光器的运转;扩束镜和激光功率监测装置依据毛化设备具体需要设计。Further, the photoelectric gate can turn on or off the operation of the laser at any time; the beam expander and the laser power monitoring device are designed according to the specific needs of the texturing equipment.

进一步,所述声光Q开关对激光束进行波形调制,通过控制波形形貌达到控制毛化点形貌的目的。Further, the acousto-optic Q switch performs waveform modulation on the laser beam, and controls the morphology of the textured point by controlling the waveform morphology.

进一步,所述两个激光模块完全相同,两激光晶体的主平面间的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距的二倍。Further, the two laser modules are identical, and the distance between the main planes of the two laser crystals is equal to twice the focal length of the thermal lens generated by the laser crystals when the power of the laser diode is increased to the highest.

进一步,所述二极管激光侧面泵浦激光模块采用激光二极管侧面泵浦固体激光介质,激光介质可以是Nd:YAG晶体、Nd:GGG晶体、Nd:GdVO4晶体或Yb:YAG晶体。Further, the diode laser side-pumped laser module uses a laser diode to side-pump a solid laser medium, and the laser medium can be Nd:YAG crystal, Nd:GGG crystal, Nd:GdVO4 crystal or Yb:YAG crystal.

本发明采用激光二极管(LD)为泵浦源的激光模块串接结构,采用小尺寸、低掺杂浓度的激光晶体,结合热致双折射补偿和热近非稳腔技术,使得输出光束同时获得高功率与高光束质量。采用该激光器作为毛化设备的光源,实现对毛化轧辊精密度的提高,有利于低粗糙度、高密度、高均匀度优质汽车、家电板的国产化。The invention adopts the laser diode (LD) as the laser module series structure of the pump source, adopts the laser crystal with small size and low doping concentration, and combines thermally induced birefringence compensation and thermal near-unstable cavity technology, so that the output beam can be obtained at the same time High power and high beam quality. The laser is used as the light source of the texturing equipment to realize the improvement of the precision of the texturing roll, which is conducive to the localization of low roughness, high density, and high uniformity high-quality automobiles and home appliance panels.

附图说明Description of drawings

图1为本发明激光器构成方框图;Fig. 1 is a block diagram of laser of the present invention;

图2为本发明激光器的一种结构光路示意图;Fig. 2 is a kind of structural light path schematic diagram of laser device of the present invention;

图3为本发明激光器的另一种结构光路示意图;Fig. 3 is another kind of structured optical path schematic diagram of the laser of the present invention;

图4为激光晶体处光斑半径随热透镜变化曲线;Figure 4 is the curve of the spot radius at the laser crystal with the thermal lens;

图5为本发明激光器示例获得的激光输出功率曲线。Fig. 5 is a laser output power curve obtained by an example of the laser of the present invention.

具体实施方式Detailed ways

实施例1:Example 1:

图1为本发明所公开的一种用于金属激光毛化用全固态激光器的结构方框图,该激光器包括激光直流电源A、Q开关驱动器B、全固态毛化激光装置C和水冷机D。其中全固态毛化激光装置C的具体结构如图2所示,包括:全反射镜1,激光输出镜2,90°旋光器8,声光Q开关4,两个二极管激光侧面泵浦激光模块5、9,光电门6,扩束镜和激光功率监测装置7,其中全反射镜1、激光输出镜2构成谐振腔;90°旋光器8,声光Q开关4,两个二极管激光侧面泵浦激光模块5、9构成激光发生装置。声光Q开关4、二极管激光侧面泵浦激光模块5、90°旋光器8、二极管激光侧面泵浦激光模块9、光电门6以同光轴、串联的方式依次设置在谐振腔内,扩束镜和激光功率监测装置7设置在谐振腔输出段外侧。二极管激光侧面泵浦激光模块5、9,为两个相同的二极管激光侧面泵浦激光模块;其功率为300W;采用LD五维对称、侧面泵浦Nd:YAG晶体,每个二极管激光侧面泵浦激光模块采用30个激光二极管列阵,每个二极管列阵最大输出功率为40W;Nd:YAG晶体长140mm,直径为5mm,掺杂浓度为0.6%。两个二极管激光侧面泵浦激光模块中的串接的两个Nd:YAG棒为姊妹棒,中间放置90°石英晶体旋光片,从而实现了激光器有效的双折射补偿,使得径向和切向偏振分量具有相同的位相迟滞。全反射镜采用平平镜,部分输出耦合镜,即图中的激光输出镜2也为平平镜,对1064nm激光透过率为40%,激光器采用对称平平腔结构。采用非稳腔法精确分别测得每一个激光棒,即两个Nd:YAG棒为姊妹棒,产生的热焦距之后,根据激光稳定性条件,设计谐振腔长,使两个端镜全反射镜1和扩束镜、分别到最近的两个二极管激光侧面泵浦激光模块5、9端面的距离相等,均等于将激光二极管激励电流加至最高32A时,激光晶体产生的热透镜焦距175mm,两激光晶体的主平面间的距离等于350mm,也就是说,等于将二极管激光侧面泵浦激光模块中的激光二极管功率加至最高时激光晶体产生的热透镜焦距的二倍,两个为姊妹棒的激光晶体主平面互相成像于对方的主平面上,使得径向和切向偏振分量具有相同的位相迟滞,从而实现了激光器有效的双折射补偿。此时,激光腔以“热近非稳腔”模式运行,在这种运转模式下,Nd:YAG棒的自限模作用大大提高了激光光束质量。图5显示了该激光器在实验室获得的连续功率输出曲线。在最高输出功率623W时,激光光束质量因子M2<10。Fig. 1 is a structural block diagram of an all-solid-state laser for metal laser texturing disclosed by the present invention, which includes a laser DC power supply A, a Q switch driver B, an all-solid-state texturing laser device C and a water cooler D. The specific structure of the all-solid-state textured laser device C is shown in Figure 2, including: a total reflection mirror 1, a laser output mirror 2, a 90° optical rotator 8, an acousto-optic Q switch 4, and two diode laser side-pumped laser modules 5, 9, photoelectric gate 6, beam expander and laser power monitoring device 7, wherein total reflection mirror 1 and laser output mirror 2 form a resonant cavity; 90° optical rotator 8, acousto-optic Q switch 4, two diode laser side pumps The Pu laser modules 5 and 9 constitute a laser generating device. Acousto-optic Q switch 4, diode laser side-pumped laser module 5, 90° optical rotator 8, diode laser side-pumped laser module 9, and photogate 6 are sequentially arranged in the resonant cavity in the same optical axis and in series to expand the beam The mirror and laser power monitoring device 7 are arranged outside the output section of the resonant cavity. Diode laser side-pumped laser modules 5 and 9 are two identical diode laser side-pumped laser modules; their power is 300W; LD five-dimensional symmetry and side-pumped Nd:YAG crystals are used, and each diode laser is side-pumped The laser module adopts 30 laser diode arrays, and the maximum output power of each diode array is 40W; the Nd:YAG crystal is 140mm long, 5mm in diameter, and the doping concentration is 0.6%. The two Nd:YAG rods connected in series in the two diode laser side-pumped laser modules are sister rods, and a 90° quartz crystal optical rotation plate is placed in the middle, thereby realizing effective birefringence compensation of the laser, making radial and tangential polarization components have the same phase lag. The total reflection mirror adopts a flat mirror, and part of the output coupling mirror, that is, the laser output mirror 2 in the figure is also a flat mirror, and the transmittance to 1064nm laser is 40%. The laser adopts a symmetrical flat cavity structure. The unstable cavity method is used to accurately measure each laser rod separately, that is, the two Nd:YAG rods are sister rods. After the thermal focal length is generated, the length of the resonant cavity is designed according to the laser stability conditions so that the two end mirrors are total reflection mirrors. 1 and the beam expander are equal to the distances from the end faces of the two nearest diode laser side-pumped laser modules 5 and 9, which are equal to the focal length of the thermal lens generated by the laser crystal when the excitation current of the laser diode is increased to a maximum of 32A. The distance between the main planes of the laser crystal is equal to 350mm, that is to say, it is equal to twice the focal length of the thermal lens generated by the laser crystal when the power of the laser diode in the side-pumped laser module of the diode laser is added to the highest, and the two are sister rods The main planes of the laser crystal are imaged on the main plane of each other, so that the radial and tangential polarization components have the same phase retardation, thereby realizing the effective birefringence compensation of the laser. At this time, the laser cavity operates in the "thermally unstable cavity" mode. In this operating mode, the self-limiting mode effect of the Nd:YAG rod greatly improves the quality of the laser beam. Figure 5 shows the continuous power output curve of the laser obtained in the laboratory. When the highest output power is 623W, the laser beam quality factor M2<10.

实施例2:Example 2:

如图2中所示,实施例2的激光器包括:全反射镜1、激光输出镜2、45°旋光器3,声光Q开关4,二极管激光侧面泵浦激光模块5,光电门6;扩束镜和激光功率监测装置7。其中全反射镜1、激光输出镜2构成谐振腔,45°旋光器3,声光Q开关4,二极管激光侧面泵浦激光模块5构成激光发生装置。并且45°旋光器3,声光Q开关4,二极管激光侧面泵浦激光模块5,光电门6;以同光轴,串联的方式依次设置在谐振腔内,扩束镜和激光功率监测装置7设置在谐振腔输出段外侧。二极管激光侧面泵浦激光模块5为全固态,采用低掺杂浓度:离子掺杂浓度≤0.7%和小孔径尺寸:直径≤5mm的激光晶体,采用激光二极管三维或五维的对称侧面泵浦结构。45°旋光器3,为45°法拉第旋光器;用来激光晶体的补偿热致双折射效应:在激光模块5和全反射镜1中间放置45°旋光器3,并且激光模块5中激光晶体的主平面到谐振腔镜的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距。则激光晶体主平面全反镜成像于自身,当激光往返通过45°旋光器3后,径向和切向偏振光有相同的相位延迟,从而补偿热致双折射效应。光电门6可随时开启或关断激光器的运转;扩束镜和激光功率监测装置7依据毛化设备具体需要设计。声光Q开关4对激光束进行波形调制,通过控制波形形貌达到控制毛化点形貌的目的。As shown in Fig. 2, the laser device of embodiment 2 comprises: total reflection mirror 1, laser output mirror 2, 45 ° optical rotator 3, acousto-optic Q switch 4, diode laser side-pumped laser module 5, photoelectric gate 6; Beam mirror and laser power monitoring device7. The total reflection mirror 1 and the laser output mirror 2 form a resonant cavity, the 45° optical rotator 3, the acousto-optic Q switch 4, and the diode laser side-pumped laser module 5 form a laser generating device. And 45° optical rotator 3, acousto-optic Q switch 4, diode laser side-pumped laser module 5, and photoelectric gate 6; they are arranged in the resonant cavity in series with the same optical axis, beam expander and laser power monitoring device 7 Set outside the output section of the resonant cavity. Diode laser side-pumped laser module 5 is all solid-state, adopts low doping concentration: ion doping concentration ≤ 0.7% and small aperture size: laser crystal with diameter ≤ 5mm, adopts a three-dimensional or five-dimensional symmetrical side pumping structure of a laser diode . The 45° optical rotator 3 is a 45° Faraday optical rotator; it is used to compensate the thermal birefringence effect of the laser crystal: the 45° optical rotator 3 is placed in the middle of the laser module 5 and the total reflection mirror 1, and the laser crystal in the laser module 5 The distance from the principal plane to the resonator mirror is equal to the focal length of the thermal lens produced by the laser crystal when the power of the laser diode is added to the highest value. Then the main plane of the laser crystal is fully mirrored on itself, and when the laser beam passes through the 45° optical rotator 3 back and forth, the radial and tangentially polarized light have the same phase delay, thereby compensating for the thermally induced birefringence effect. The photoelectric gate 6 can turn on or off the operation of the laser at any time; the beam expander and the laser power monitoring device 7 are designed according to the specific needs of the texturing equipment. The acousto-optic Q switch 4 performs waveform modulation on the laser beam, and achieves the purpose of controlling the textured point morphology by controlling the waveform morphology.

本发明的激光器结构是在由全反镜1和输出镜2构成的激光谐振腔中,同光轴的置有光电门3,一个或两个二极管激光侧面泵浦激光模块5(以及9),声光Q开关4,旋光器3(或8);输出谐振腔镜外置有扩束镜和激光功率监测装置7。其中激光模块5和9均为全固态,且性能完全相同,其中利用激光二极管为泵浦光源,采用三维或五维结构从侧面对称泵浦激光晶体,The laser structure of the present invention is that in the laser resonator formed by the total mirror 1 and the output mirror 2, a photogate 3 is placed on the same optical axis, and one or two diode laser side-pumped laser modules 5 (and 9), An acousto-optic Q switch 4, an optical rotator 3 (or 8); a beam expander and a laser power monitoring device 7 are installed outside the output resonator mirror. Among them, the laser modules 5 and 9 are all solid-state, and the performance is exactly the same. The laser diode is used as the pumping light source, and the laser crystal is pumped symmetrically from the side by using a three-dimensional or five-dimensional structure.

通过合理设计激光二极管距离激光晶体的间距,提高二极管的泵浦效率以及激光晶体内增益的均匀性。而且所使用的激光晶体几何形状、外形尺寸、掺杂浓度、光学等级完全相同。由于采用较低掺杂浓度的激光晶体可以获得更均匀的泵浦增益分布,从而减小了激光晶体的热效应,包括热透镜效应、热致双折射效应与热退偏效应。因此,本发明使用掺杂浓度较低例如:离子掺杂浓度≤0.7%,的激光晶体,可以在保持输出功率基本不变的基础上获得更高的光束质量。同时,本发明采用的激光晶体孔径尺寸小,例如:棒状晶体通常直径≤5mm,在设计激光腔结构时,要求当激光器工作时,激光介质上的基模体积尽可能的大,则此时激光晶体相当于一个自选模器件,这样一方面增大了有效模体积,另一方面可利用激光介质本身的横向尺寸起到限模光阑的作用,从而抑制了高阶模式,获得低阶模输出,进一步提高振荡激光的光束质量。By rationally designing the distance between the laser diode and the laser crystal, the pumping efficiency of the diode and the uniformity of the gain in the laser crystal are improved. Moreover, the laser crystal geometry, dimensions, doping concentration, and optical grade used are exactly the same. Since a laser crystal with a lower doping concentration can obtain a more uniform pump gain distribution, the thermal effect of the laser crystal, including thermal lens effect, thermally induced birefringence effect and thermal depolarization effect, can be reduced. Therefore, the present invention uses laser crystals with lower doping concentration, for example, ion doping concentration ≤ 0.7%, to obtain higher beam quality while keeping the output power basically unchanged. Simultaneously, the aperture size of the laser crystal adopted in the present invention is small, for example: the diameter of the rod-shaped crystal is usually ≤5mm. When designing the laser cavity structure, it is required that the fundamental mode volume on the laser medium should be as large as possible when the laser is working. At this time, the laser The crystal is equivalent to a self-selecting mode device, so that on the one hand, the effective mode volume is increased, and on the other hand, the lateral size of the laser medium itself can be used to act as a mode-limiting diaphragm, thereby suppressing high-order modes and obtaining low-order mode output , to further improve the beam quality of the oscillating laser.

本发明为了提高激光输出功率,采用了热致双折射补偿措施。补偿热致双折射效应的基本思想是:通过某种方式使得通过两个相同的或者是同一个激光晶体截面上每一点的径向和切向偏振辐射都获得相等的位相迟滞,就可以达到减小退偏损耗的目的;同时使得两个偏振光的稳定区相互重合,以达到提高泵浦功率最终提高输出功率的目的。如附图2所示,当两个性能完全相同的激光模块5和9串接时,在中间放置90°旋光片8,并且两激光晶体的主平面间的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距的二倍,两个互为姊妹棒的激光晶体主平面互相成像于对方的主平面,使得径向和切向偏振分量具有相同的位相迟滞,从而实现了激光器有效的双折射补偿。又如附图3所示,在激光模块5和全反射镜1中间放置45°旋光器3,并且激光模块5中激光晶体的主平面到谐振腔镜的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距。则激光晶体主平面全反镜成像于自身,当激光往返通过45°法拉第旋光器3后,径向和切向偏振光有相同的相位延迟,从而补偿热致双折射效应。In order to increase the output power of the laser, the present invention adopts thermally induced birefringence compensation measures. The basic idea of compensating the thermally induced birefringence effect is: in some way, the radially and tangentially polarized radiation passing through each point on the same or the same laser crystal section can obtain equal phase retardation, so that the reduction can be achieved. The purpose of small depolarization loss; at the same time, the stable regions of the two polarized lights overlap each other, so as to achieve the purpose of increasing the pump power and finally increasing the output power. As shown in Figure 2, when two laser modules 5 and 9 with identical performance are connected in series, a 90° optical rotation plate 8 is placed in the middle, and the distance between the main planes of the two laser crystals is equal to adding the laser diode power to At the highest point, the focal length of the thermal lens produced by the laser crystal is twice the focal length, and the main planes of the two sister rods of the laser crystal are imaged on the main plane of each other, so that the radial and tangential polarization components have the same phase lag, thus realizing the laser Effective birefringence compensation. As shown in accompanying drawing 3 again, place 45 ° optical rotator 3 in the middle of laser module 5 and total reflection mirror 1, and the distance from the main plane of laser crystal in laser module 5 to resonant cavity mirror is equal to adding the laser diode power to the highest The focal length of the thermal lens produced by the laser crystal. Then the main plane of the laser crystal is imaged by the total reflection mirror on itself. When the laser light passes through the 45° Faraday rotator 3 back and forth, the radial and tangentially polarized light have the same phase delay, thereby compensating for the thermally induced birefringence effect.

本发明激光腔采用“热近非稳腔结构”,能够缓解高功率与高光束质量这对矛盾。利用ABCD传播矩阵,对激光晶体处光斑半径随热透镜变化的关系进行了数值模拟,得到了如图4中所示开口向上的U型曲线,并由图4中分析可知,当激光器运行于稳定性曲线边缘时,基模体积增大,可以期望得到较好的光束质量,同时运转于此处,激光晶体热透镜很短,表明激光二极管泵浦功率可以加至最大。可见热近非稳腔结构可以充分利用激光介质的自限模作用,同时又可以使得激光二极管泵浦功率加到最大,因而在保证输出激光功率的前提下,充分利用了热透镜效应,保证了激光光束质量,具有其独特的优点。The laser cavity of the present invention adopts a "thermal near-unstable cavity structure", which can alleviate the contradiction between high power and high beam quality. Using the ABCD propagation matrix, the relationship between the laser spot radius at the laser crystal and the thermal lens is numerically simulated, and a U-shaped curve with an upward opening is obtained as shown in Figure 4, and it can be seen from the analysis in Figure 4 that when the laser operates in a stable At the edge of the characteristic curve, the volume of the fundamental mode increases, and better beam quality can be expected. At the same time, the thermal lens of the laser crystal is very short when operating here, indicating that the pumping power of the laser diode can be maximized. It can be seen that the thermal near-unstable cavity structure can make full use of the self-limiting mode effect of the laser medium, and at the same time can maximize the pumping power of the laser diode. Therefore, under the premise of ensuring the output laser power, the thermal lens effect is fully utilized to ensure Laser beam quality has its unique advantages.

本发明的全固态激光器可用于对金属表面进行激光毛化生产,主要应用于毛化装备进行轧辊激光毛化生产。该激光器性能稳定,易于维护。首先激光模块为真正模块化结构,当使用寿命已至,直接更换新的模块即可,中间无任何维护工作。通过声光Q开关在对激光束进行波形调制的同时,控制波形形貌,达到控制毛化点形貌的目的。在毛化生产中,光电门可随时控制激光器的运行。依据具体毛化设备,定制专门的扩束装置,以便于毛化设备中激光束的传输。同时,为了监测激光器的稳定性,激光器同时配备激光功率监测装置。另外,本发明激光器采取了相应保护措施保证实现实用化:选用具有高损伤阈值的光学元件,全腔光学元件均采用水冷,依靠机械设计保证激光器及其光路系统工作环境稳定、清洁、干燥,增加冷却水水压过低保护和突发事件急停装置。The all-solid-state laser of the invention can be used for laser texturing production of metal surfaces, and is mainly used in texturing equipment for laser texturing production of rolls. The laser has stable performance and is easy to maintain. First of all, the laser module is a real modular structure. When the service life is over, it can be directly replaced with a new module without any maintenance work in the middle. Through the acousto-optic Q switch, the waveform of the laser beam is modulated, and the waveform shape is controlled to achieve the purpose of controlling the shape of the textured point. In texturing production, the photoelectric gate can control the operation of the laser at any time. According to the specific texturing equipment, a special beam expander is customized to facilitate the transmission of the laser beam in the texturing equipment. At the same time, in order to monitor the stability of the laser, the laser is also equipped with a laser power monitoring device. In addition, the laser of the present invention adopts corresponding protective measures to ensure its practical application: optical elements with high damage threshold are selected, all cavity optical elements are water-cooled, and the working environment of the laser and its optical path system is guaranteed to be stable, clean, and dry by relying on mechanical design, increasing Low cooling water pressure protection and emergency stop device for emergencies.

综上所述,本发明激光器采用多种措施保证输出光束同时获得高功率与高光束质量。首先本发明采用的激光模块具有独特优点,用激光二极管代替氙灯作为泵浦光源,大大提高光源利用效率,从而减少激光晶体热效应,大大提高了泵浦功率最终提高输出功率,同时降低废热损耗,提高电能利用效率,减少损耗;本发明采用激光晶体为低掺杂浓度,可以获得均匀的增益分布,从而在保持输出功率基本不变的基础上获得更高的光束质量;本发明采用的激光晶体孔径尺寸小,则激光晶体本身相当于一个自选模器件,从而抑制了高阶模式,提高振荡激光的光束质量。另外,本发明利用热致双折射补偿措施,使得同一个激光晶体截面上每一点的径向和切向偏振辐射都获得相等的位相迟滞,以达到减小退偏损耗的目的;同时使得两个偏振光的稳定区相互重合,最终达到提高泵浦功率最终提高输出功率的目的。最后,本发明激光腔采用“热近非稳腔结构”,能够缓解高功率与高光束质量这对矛盾,充分利用激光介质的自限模作用的同时,又使得激光二极管泵浦功率加到最大,因而在保证输出激光功率的前提下,充分利用了热透镜效应,保证了激光光束质量,具有其独特的优点。所以,采用本发明激光器作为毛化设备的光源,可以实现对毛化轧辊精密度的提高,可应用于低粗糙度、高密度、高均匀度优质汽车、家电板的毛化。To sum up, the laser of the present invention adopts various measures to ensure that the output beam obtains high power and high beam quality at the same time. First of all, the laser module adopted in the present invention has unique advantages. The laser diode is used instead of the xenon lamp as the pumping light source, which greatly improves the utilization efficiency of the light source, thereby reducing the thermal effect of the laser crystal, greatly increasing the pumping power and finally increasing the output power, while reducing waste heat loss and improving Electric energy utilization efficiency reduces loss; the present invention adopts laser crystal with low doping concentration, which can obtain uniform gain distribution, thereby obtaining higher beam quality on the basis of keeping the output power basically unchanged; the laser crystal aperture adopted by the present invention If the size is small, the laser crystal itself is equivalent to a self-selecting mode device, thereby suppressing the high-order mode and improving the beam quality of the oscillating laser. In addition, the present invention utilizes thermally induced birefringence compensation measures, so that the radial and tangentially polarized radiation at each point on the same laser crystal section can obtain equal phase delays, so as to achieve the purpose of reducing depolarization loss; at the same time, the two The stable regions of the polarized light overlap each other, and finally achieve the purpose of increasing the pump power and finally increasing the output power. Finally, the laser cavity of the present invention adopts a "thermally unstable cavity structure", which can alleviate the contradiction between high power and high beam quality, and make full use of the self-limiting mode effect of the laser medium while maximizing the pumping power of the laser diode. , so under the premise of ensuring the output laser power, the thermal lens effect is fully utilized to ensure the quality of the laser beam, which has its unique advantages. Therefore, using the laser of the present invention as the light source of the texturing equipment can improve the precision of the texturing roll, and can be applied to the texturing of high-quality automobiles and home appliance panels with low roughness, high density, and high uniformity.

Claims (9)

1.一种激光毛化用全固态激光器,包括激光直流电源、Q开关驱动器、水冷机;其特征为,还包括全固态毛化激光装置,所述全固态毛化激光装置包括,同光轴依次串联在一起的全反射镜,激光发生装置,光电门和激光输出镜和激光功率检测装置。1. An all-solid-state laser for laser texturing, comprising a laser DC power supply, a Q switch driver, and a water cooler; it is characterized in that it also includes an all-solid-state texturing laser device, and said all-solid-state texturing laser device includes, coaxial A total reflection mirror, a laser generating device, a photogate, a laser output mirror and a laser power detecting device are connected in series in sequence. 2.根据权利要求1所述的全固态激光器,其特征为,所述激光发生装置包括,同光轴依次串联的45°旋光器,声光Q开关,二极管激光侧面泵浦激光模块。2. The all-solid-state laser according to claim 1, wherein the laser generating device comprises a 45° optical rotator connected in series with the optical axis, an acousto-optic Q switch, and a diode laser side-pumped laser module. 3.根据权利要求1所述的全固态激光器,其特征为,所述激光发生装置包括,同光轴依次串联的声光Q开关,两个二极管激光侧面泵浦激光模块,在所述两个二极管激光侧面泵浦激光模块之间还同光轴串联有90°旋光器。3. The all-solid-state laser according to claim 1, characterized in that, the laser generating device comprises, an acousto-optic Q switch connected in series with the optical axis, two diode laser side-pumped laser modules, in the two There is also a 90° optical rotator connected in series with the optical axis between the diode laser side-pumped laser modules. 4.根据权利要求2和3所述的全固态激光器,其特征为,所述二极管激光侧面泵浦激光模块为全固态,采用离子掺杂浓度≤0.7%和直径≤5mm的激光晶体,采用激光二极管三维或五维的对称侧面泵浦结构。4. The all-solid-state laser according to claims 2 and 3, characterized in that the diode laser side-pumped laser module is all-solid-state, adopts laser crystals with ion doping concentration≤0.7% and diameter≤5mm, adopts laser Three-dimensional or five-dimensional symmetrical side-pumped structures of diodes. 5.根据权利要求2所述的全固态激光器,其特征为,所述二极管激光侧面泵浦激光模块中激光晶体的主平面到谐振腔镜的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距。5. The all-solid-state laser according to claim 2, characterized in that the distance from the main plane of the laser crystal in the diode laser side-pumped laser module to the resonator mirror is equal to the laser crystal when the power of the laser diode is added to the highest The resulting thermal lens focal length. 6.根据权利要求2和3所述的全固态激光器,其特征为,所述光电门可随时开启或关断激光器的运转;扩束镜和激光功率监测装置依据毛化设备具体需要设计。6. The all-solid-state laser according to claims 2 and 3, characterized in that the photoelectric gate can turn on or off the operation of the laser at any time; the beam expander and the laser power monitoring device are designed according to the specific needs of the texturing equipment. 7.根据权利要求1所述的全固态激光器,其特征为,所述声光Q开关对激光束进行波形调制,通过控制波形形貌达到控制毛化点形貌的目的。7. The all-solid-state laser according to claim 1, characterized in that the acousto-optic Q switch performs waveform modulation on the laser beam, and the purpose of controlling the morphology of the textured point is achieved by controlling the waveform morphology. 8.根据权利要求3所述的全固态激光器,其特征为,所述两个激光模块完全相同,两激光晶体的主平面间的距离,等于将激光二极管功率加至最高时激光晶体产生的热透镜焦距的二倍。8. The all-solid-state laser according to claim 3, characterized in that, the two laser modules are identical, and the distance between the main planes of the two laser crystals is equal to the heat generated by the laser crystal when the power of the laser diode is added to the highest. Twice the focal length of the lens. 9.根据权利要求2和3所述的全固态激光器,其特征为,所述二极管激光侧面泵浦激光模块采用激光二极管侧面泵浦固体激光介质,激光介质可以是Nd:YAG晶体、Nd:GGG晶体、Nd:GdVO4晶体或Yb:YAG晶体。9. according to the described all-solid-state laser of claim 2 and 3, it is characterized in that, described diode laser side-pumped laser module adopts laser diode side-pumped solid-state laser medium, and laser medium can be Nd:YAG crystal, Nd:GGG crystal, Nd:GdVO4 crystal or Yb:YAG crystal.
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CN105965156A (en) * 2016-06-27 2016-09-28 江苏大金激光科技有限公司 Light path system of laser cutting machine
CN107132673A (en) * 2017-07-19 2017-09-05 中国工程物理研究院激光聚变研究中心 A kind of device for eliminating electro-optic crystal depolarization
CN107132673B (en) * 2017-07-19 2023-09-26 中国工程物理研究院激光聚变研究中心 Device for eliminating depolarization of electro-optic crystal
CN111224311A (en) * 2019-11-21 2020-06-02 中国航空制造技术研究院 Hundred-nanosecond-level fast-switching dual-wavelength Raman laser
CN113948949A (en) * 2021-11-04 2022-01-18 广东粤港澳大湾区硬科技创新研究院 A picosecond laser transmitter
CN114498255A (en) * 2022-02-16 2022-05-13 中国人民解放军国防科技大学 Unstable cavity laser with adjustable thermal stable region and method thereof
CN116929724A (en) * 2023-09-13 2023-10-24 武汉鑫岳光电科技有限公司 Device and method for measuring thermal focal length of laser medium
CN116929724B (en) * 2023-09-13 2023-12-08 武汉鑫岳光电科技有限公司 Device and method for measuring thermal focal length of laser medium

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