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CN102012227A - Inclined contact type cavity-adjusting mechanism and method of laser gyro - Google Patents

Inclined contact type cavity-adjusting mechanism and method of laser gyro Download PDF

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CN102012227A
CN102012227A CN 201010561345 CN201010561345A CN102012227A CN 102012227 A CN102012227 A CN 102012227A CN 201010561345 CN201010561345 CN 201010561345 CN 201010561345 A CN201010561345 A CN 201010561345A CN 102012227 A CN102012227 A CN 102012227A
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cavity
spherical mirror
resonant cavity
optical
laser gyro
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CN102012227B (en
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马立
何正峰
荣伟彬
欧阳航空
孙立宁
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Harbin Institute of Technology Shenzhen
University of Shanghai for Science and Technology
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Harbin Institute of Technology Shenzhen
University of Shanghai for Science and Technology
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Abstract

本发明涉及一种倾斜接触式激光陀螺调腔机构及方法。本调腔机构由三维精密工作台和夹持手爪串联而成,整个机构倾斜安装以获得倾斜接触式调腔方法所需的倾斜角度和自由度;夹持手爪采用V型结构,可实现球面镜的定位,并可在调腔结束后完成光胶。本倾斜接触式激光陀螺调腔方法利用球面镜与激光谐振腔体之间作用力实现两光胶面的可靠贴合,保证光胶面之间平行度的同时避免了传统调腔方法中出现意外光胶的情况。本发明采用倾斜接触式方法建立了一套精密调腔机构,结构简单,运动分辨率高,控制容易,可操作性好。

The invention relates to an inclined contact laser gyroscope cavity adjustment mechanism and method. The cavity adjustment mechanism is composed of a three-dimensional precision workbench and clamping claws in series. The whole mechanism is installed obliquely to obtain the tilt angle and degree of freedom required by the inclined contact cavity adjustment method; the clamping claws adopt a V-shaped structure, which can realize The positioning of the spherical mirror, and the optical glue can be completed after the cavity adjustment is completed. The tilt-contact laser gyro cavity adjustment method utilizes the force between the spherical mirror and the laser resonant cavity to achieve reliable bonding of the two optical adhesive surfaces, ensuring the parallelism between the optical adhesive surfaces and avoiding accidental light in the traditional cavity adjustment method. Glue case. The invention adopts the inclined contact method to establish a set of precise chamber adjustment mechanism, which has the advantages of simple structure, high motion resolution, easy control and good operability.

Description

倾斜接触式激光陀螺调腔机构和方法Mechanism and method for adjusting cavity of tilted contact laser gyroscope

技术领域technical field

本发明涉及一种激光陀螺调腔机构和方法。The invention relates to a cavity adjustment mechanism and method of a laser gyroscope.

技术背景technical background

激光陀螺是捷联式惯性导航系统的理想器件,尤其在军事领域,激光陀螺更占有举足轻重的地位。而调腔是激光陀螺制造过程中的一个难点。我国激光陀螺调腔装配工艺较落后,长期以来主要采用人工方式。以人工方式进行调腔,对于操作者的经验和技巧要求很高,劳动强度大,效率低下,且由于存在经验、情绪等不确定因素,调腔质量不稳定,严重制约了产品的产量提高和质量控制。腔长控制镜调腔方法只能在小范围内进行调腔,当激光束在回路中离回路中心偏置较大时,腔长控制镜的调腔作用失效,另外,这种方法使用的驱动器—压电陶瓷的灵敏度与温度有关,当环境温度变化时,其伸缩量会发生变化,使谐振光路偏离最佳点。近年出现的水平非接触式调腔方法可在大范围内进行调腔,但由于难以对调腔过程中球面镜和谐振腔体光胶面之间的平行度进行检测,故很难实现高平行度要求,使得这种方法的调腔效率和调腔质量难以达到预期的效果。Laser gyroscope is an ideal device for strapdown inertial navigation system, especially in the military field, laser gyroscope occupies a pivotal position. Cavity tuning is a difficult point in the manufacturing process of laser gyroscopes. my country's laser gyro cavity adjustment assembly technology is relatively backward, and manual methods have been mainly used for a long time. Manual tuning requires high operator experience and skills, high labor intensity, and low efficiency. Due to uncertain factors such as experience and emotions, the quality of tuning is unstable, which seriously restricts the increase in product output and QC. The cavity length control mirror cavity tuning method can only be tuned in a small range. When the laser beam in the loop deviates greatly from the loop center, the cavity tuning effect of the cavity length control mirror will fail. In addition, the driver used in this method —The sensitivity of piezoelectric ceramics is related to temperature. When the ambient temperature changes, its expansion and contraction will change, making the resonant optical path deviate from the optimal point. The horizontal non-contact cavity adjustment method that has appeared in recent years can adjust the cavity in a wide range, but because it is difficult to detect the parallelism between the spherical mirror and the optical rubber surface of the resonant cavity during the cavity adjustment process, it is difficult to achieve high parallelism requirements , so that the tuning efficiency and tuning quality of this method are difficult to achieve the desired effect.

发明内容Contents of the invention

本发明的目的在于针对已有技术存在的缺陷,提供一种倾斜接触式激光陀螺调腔机构和方法,简单方便,操作性好。The purpose of the present invention is to provide a tilting contact laser gyroscope cavity adjustment mechanism and method, which is simple, convenient and has good operability.

为达到上述目的,本发明的构思是:To achieve the above object, design of the present invention is:

现有的水平非接触式调腔方法平行度难以达到要求,并且结构复杂,不易控制。本发明采用倾斜接触式调腔方法,依靠球面镜自身重力解决调腔高平行度要求,减少了水平非接触式调腔方法中用于平行度调整的二维旋转机构,只需三维平移机构即可满足调腔需要,结构简单,易于控制。The existing horizontal non-contact tuning method is difficult to meet the requirements of parallelism, and the structure is complex and difficult to control. The invention adopts the inclined contact cavity adjustment method, relies on the gravity of the spherical mirror to solve the high parallelism requirement of the cavity adjustment, reduces the two-dimensional rotation mechanism used for parallelism adjustment in the horizontal non-contact cavity adjustment method, and only needs a three-dimensional translation mechanism. It meets the needs of tuning, and has a simple structure and is easy to control.

根据上述发明构思,本发明采用下述技术方案:According to above-mentioned inventive concept, the present invention adopts following technical scheme:

一种倾斜接触式激光陀螺调腔机构,包括一种倾斜接触式激光陀螺调腔机构,包括一个光学平台、一个腔体支座以及待调腔的谐振腔体和球面镜,其特征在于:An inclined contact laser gyro cavity adjustment mechanism includes an inclined contact laser gyro cavity adjustment mechanism, including an optical platform, a cavity support, and a resonant cavity and a spherical mirror to be adjusted, characterized in that:

1)所述腔体支座固定在所述光学平台上,该腔体支座的上表面与水平面夹角为α,8.5 o≤α≤90 o;腔体支座上表面上安置待调腔的谐振腔体;1) The cavity support is fixed on the optical platform, and the angle between the upper surface of the cavity support and the horizontal plane is α , 8.5 o ≤ α ≤ 90 o; the cavity to be adjusted is placed on the upper surface of the cavity support the resonant cavity;

2)在所述光学平台上,通过一个连接板安装两套带有夹持手爪的三维精密工作台,分别用于完成两个工位所述球面镜的调整。2) On the optical platform, two sets of three-dimensional precision worktables with clamping claws are installed through a connecting plate, which are respectively used to complete the adjustment of the spherical mirror at the two stations.

所述两套三维精密工作台,两套三维精密工作台中每套工作台是由一个竖直工作台、一个水平工作台和一个法向工作台按正交方式串联固定在一个倾斜基座上,该倾斜基座通过所述连接板固定在所述光学平台上。The two sets of three-dimensional precision workbenches, each set of workbenches in the two sets of three-dimensional precision workbenches are fixed in series on an inclined base by a vertical workbench, a horizontal workbench and a normal workbench in an orthogonal manner, The inclined base is fixed on the optical table through the connecting plate.

所述夹持手爪的结构是:一根爪杆的下端连接头上有两个螺孔,通过螺钉与所述竖直工作台固定连接,而爪杆的上端呈V型结构,能对球面镜叉持,实现球面镜在谐振腔体光胶面上沿横向和纵向定位,但在光胶面法线方向无定位作用。The structure of the clamping claw is: there are two screw holes on the lower end connector of a claw rod, which is fixedly connected with the vertical workbench through screws, and the upper end of the claw rod has a V-shaped structure, which can hold the spherical mirror Fork holding realizes the horizontal and vertical positioning of the spherical mirror on the optical plastic surface of the resonant cavity, but has no positioning function in the normal direction of the optical plastic surface.

一种倾斜接触式激光陀螺调腔方法,采用上述机构进行调腔,其特征在于操作步骤如下:a)三维工作台复位;b)在夹持手爪上安放球面镜,使球面镜在重力作用下紧密贴合在谐振腔体的光胶面上;c)控制竖直工作台和水平工作台带动夹持手爪沿着谐振腔体光胶面的横向和纵向微运动,直至寻找到球面镜位置的最佳点;d)法向工作台带动夹持手爪向靠近谐振腔体方向微运动,实现球面镜与谐振腔体的光胶;e)三维工作台返回到末端位置,完成一个工位球面镜的装配。另一工位球面镜的装配步骤同上列步骤a)至步骤e)。A cavity adjustment method for an inclined contact laser gyro, which uses the above-mentioned mechanism to adjust the cavity, and is characterized in that the operation steps are as follows: a) reset the three-dimensional workbench; b) place a spherical mirror on the clamping claw, so that the spherical mirror is tightly closed under the action of gravity Fit on the optical plastic surface of the resonant cavity; c) Control the vertical worktable and horizontal worktable to drive the clamping claws to move laterally and vertically along the optical plastic surface of the resonant cavity until the best position of the spherical mirror is found. Good points; d) The normal worktable drives the clamping claws to move slightly towards the direction close to the resonant cavity to realize the optical glue between the spherical mirror and the resonant cavity; e) The three-dimensional worktable returns to the end position to complete the assembly of a spherical mirror in one station . The assembly steps of the spherical mirror at another station are the same as the steps a) to e) listed above.

本发明与现有技术相比较,具有如下显而易见的实质性特点和优点:本发明采用倾斜接触式调腔机构和方法,结构简单,运动分辨率高,控制容易,可操作性好。Compared with the prior art, the present invention has the following obvious substantive features and advantages: the present invention adopts an inclined contact cavity adjustment mechanism and method, has simple structure, high motion resolution, easy control and good operability.

附图说明Description of drawings

图1是本发明待装配的光学器件示意图;Fig. 1 is the optical device schematic diagram to be assembled of the present invention;

图2是采用本发明方法调腔时球面镜与谐振腔体接触效果示意图;Fig. 2 is a schematic diagram of the contact effect between the spherical mirror and the resonant cavity when the cavity is adjusted by the method of the present invention;

图3是本发明一个实例的整体结构示意图;Fig. 3 is the overall structural representation of an example of the present invention;

图4是图3的左视图;Fig. 4 is the left view of Fig. 3;

图5是本发明夹持手爪结构示意图。Fig. 5 is a schematic diagram of the structure of the clamping claw of the present invention.

具体实施方式Detailed ways

本发明的优选实施例结合附图说明如下;Preferred embodiments of the present invention are described as follows in conjunction with the accompanying drawings;

实施例一:参见图1、图2和图3,本倾斜接触式激光陀螺调腔机构,包括一个光学平台10、一个腔体支座4以及待调腔的谐振腔体1和球面镜2,其特征在于:Embodiment 1: Referring to Fig. 1, Fig. 2 and Fig. 3, the tilting contact laser gyro cavity adjustment mechanism includes an optical platform 10, a cavity support 4, and a resonant cavity body 1 and a spherical mirror 2 to be tuned. Features:

1)所述腔体支座4固定在所述光学平台10上,该腔体支座4的上表面与水平面夹角为α,8.5 o≤α≤90 o;腔体支座4上表面上安置待调腔的谐振腔体1;1) The cavity support 4 is fixed on the optical table 10, and the angle between the upper surface of the cavity support 4 and the horizontal plane is α , 8.5o≤α≤90o ; the upper surface of the cavity support 4 Place the resonant cavity 1 to be tuned;

2)在所述光学平台10上,通过一个连接板9安装两套带有夹持手爪3的三维精密工作台,分别用于完成两个工位所述球面镜2的调整。2) On the optical table 10, two sets of three-dimensional precision workbenches with clamping claws 3 are installed through a connecting plate 9, which are respectively used to complete the adjustment of the spherical mirror 2 at the two stations.

实施例二:本实施例与实施例一基本相同,特别之处是:所述两套三维精密工作台中每套工作台是由一个竖直工作台5、一个水平工作台6和一个法向工作台7按正交方式串联固定在一个倾斜基座8上,该倾斜基座8通过所述连接板9固定在所述光学平台10上。所述夹持手爪3的结构是:一根爪杆的下端连接头上有两个螺孔,通过螺钉与所述竖直工作台5固定连接,而爪杆的上端呈V型结构,能对球面镜2叉持,实现球面镜2在谐振腔体1光胶面上沿横向和纵向定位,但在光胶面法线方向无定位作用。Embodiment 2: This embodiment is basically the same as Embodiment 1. The special feature is that each set of workbenches in the two sets of three-dimensional precision workbenches is composed of a vertical workbench 5, a horizontal workbench 6 and a normal workbench. The stage 7 is fixed in series on an inclined base 8 in an orthogonal manner, and the inclined base 8 is fixed on the optical platform 10 through the connecting plate 9 . The structure of the clamping claw 3 is: there are two screw holes on the lower end connector of a claw rod, which are fixedly connected with the vertical workbench 5 by screws, and the upper end of the claw rod is a V-shaped structure, which can The spherical mirror 2 is held fork to realize the horizontal and vertical positioning of the spherical mirror 2 on the optical rubber surface of the resonant cavity 1, but has no positioning function in the normal direction of the optical rubber surface.

实施例三:本倾斜接触式激光陀螺调腔方法,采用上述调腔机构进行调腔,操作步骤为:一个工位球面镜2的装配步骤为:a)三维工作台5,6,7复位;b)在夹持手爪3上安放球面镜2,使球面镜2在重力作用下紧密贴合在谐振腔体1的光胶面上;c)控制工作台5,6带动夹持手爪3沿着谐振腔体1光胶面的横向和纵向微运动,直至寻找到球面镜2位置的最佳点;d)法向工作台7带动夹持手爪3向靠近谐振腔体1方向微运动,实现球面镜2与谐振腔体1的光胶;e)三维工作台5,6,7返回到末端位置,完成一个工位球面镜2的装配。另一工位球面镜2的装配步骤同上列步骤a)至步骤e)。Embodiment 3: In this tilted contact laser gyroscope cavity adjustment method, the above cavity adjustment mechanism is used to adjust the cavity, and the operation steps are as follows: the assembly steps of a station spherical mirror 2 are: a) the three-dimensional workbench 5, 6, 7 is reset; b ) Place the spherical mirror 2 on the clamping claw 3, so that the spherical mirror 2 is closely attached to the optical rubber surface of the resonant cavity 1 under the action of gravity; c) Control the workbench 5, 6 to drive the clamping claw 3 along the resonant The lateral and vertical micro-movement of the optical plastic surface of the cavity 1 until the best point of the position of the spherical mirror 2 is found; d) The normal worktable 7 drives the clamping claw 3 to move slightly in the direction close to the resonant cavity 1 to realize the spherical mirror 2 The optical glue with the resonant cavity 1; e) The three-dimensional workbench 5, 6, 7 returns to the end position, and the assembly of the spherical mirror 2 at one station is completed. The assembly steps of the other station spherical mirror 2 are the same as the steps a) to e) listed above.

实施例四:参照图1和图3,本实施例要在光学谐振腔体1的两个光胶面上先后装配球面镜2,两个光胶面处分别定义为工位1和工位2。其调腔方法和机构综合叙述如下:Embodiment 4: Referring to FIG. 1 and FIG. 3 , in this embodiment, spherical mirrors 2 are successively assembled on the two optical plastic surfaces of the optical resonant cavity 1 , and the two optical plastic surfaces are respectively defined as station 1 and station 2. The tuning method and mechanism are comprehensively described as follows:

参照图2和图3,上述倾斜接触式调腔方法是让待装配谐振腔体1的光胶面与重力方向保持一倾斜角度β,即谐振腔体1与水平面成α角度放置。这一倾斜角度β应保证球面镜2在三个自由度方向平动过程中始终与腔体1紧贴而不发生侧翻,此角度范围为6 o≤β≤45 o,对应的α角度范围是8.5 o≤α≤90 o。Referring to Fig. 2 and Fig. 3, the above-mentioned oblique contact cavity adjustment method is to keep the optical glue surface of the resonant cavity 1 to be assembled and the direction of gravity at an inclined angle β , that is, the resonant cavity 1 is placed at an angle α to the horizontal plane. This inclination angle β should ensure that the spherical mirror 2 is always in close contact with the cavity 1 during the translation process of the three degrees of freedom without rollover. This angle range is 6 o ≤ β ≤ 45 o, and the corresponding α angle range is 8.5 o ≤ α ≤ 90 o.

参照图3和图4,上述调腔机构由两套带有夹持手爪的三维精密工作台组成,分别用于完成两个工位球面镜2的调整。调腔机构包括两个夹持手爪3,一个腔体支座4,两个竖直工作台5,两个水平工作台6,两个法向工作台7,两个倾斜基座8,一个连接板9及一个光学平台10。所述夹持手爪3与竖直工作台5末端连接;所述腔体支座4固定在光学平台10上,上表面与水平面夹角为α(8.5 o≤α≤90 o),其上安装谐振腔体1;所述工作台5,6,7按正交方式串联固定在倾斜基座8上;所述倾斜基座8通过连接板9固定在光学平台10上,并且,为保证夹持手爪3的末端与谐振腔体光胶面平行,倾斜基座8的安装面需与水平面有一倾角θ,其角度范围8.5 o≤θ≤45 o。所述三维精密工作台由三个功能相似的一维平移工作台串联组成,采用预压式精密滚珠丝杠传动,利用精密交叉滚针导轨导向,采用步进电机驱动,通过控制步进电机驱动器的细分数,工作台即可以10mm/s的速度实现大范围快速运动,又可以实现小范围内的精密调整,其运动分辨率可达1μm。Referring to Fig. 3 and Fig. 4, the chamber adjustment mechanism is composed of two sets of three-dimensional precision worktables with clamping claws, which are respectively used to complete the adjustment of the spherical mirror 2 at the two stations. The cavity adjustment mechanism includes two clamping claws 3, a cavity support 4, two vertical workbenches 5, two horizontal workbenches 6, two normal workbenches 7, two inclined bases 8, a Connecting plate 9 and an optical platform 10 . The clamping claw 3 is connected to the end of the vertical workbench 5; the cavity support 4 is fixed on the optical platform 10, and the angle between the upper surface and the horizontal plane is α (8.5 o ≤ α ≤ 90 o), on which The resonant cavity 1 is installed; the workbenches 5, 6, and 7 are fixed in series on the inclined base 8 in an orthogonal manner; the inclined base 8 is fixed on the optical platform 10 through the connecting plate 9, and, to ensure that the clip The end of the holding claw 3 is parallel to the optical plastic surface of the resonant cavity, and the installation surface of the inclined base 8 needs to have an inclination angle θ with the horizontal plane, and the angle range is 8.5 o ≤ θ ≤ 45 o. The three-dimensional precision workbench is composed of three one-dimensional translation workbenches with similar functions in series. It is driven by a pre-loaded precision ball screw, guided by a precision cross needle guide rail, driven by a stepper motor, and controlled by the stepper motor driver. The number of subdivisions, the workbench can realize rapid movement in a large range at a speed of 10mm/s, and can also realize precise adjustment in a small range, and its motion resolution can reach 1μm.

参照图5,上述夹持手爪3与连接杆做成一体,固定在竖直工作台5上,与球面镜2为线接触,为保证轻质和较高硬度采用硬铝材料。夹持手爪3带动球面镜2实现三个方向的平动,手爪头部由V型和圆弧型两部分组成,V型角度为60 o,在移动过程中,球面镜2始终吸附在谐振腔体1的光胶面上,手爪3的运动不会改变球面镜2与谐振腔体1的贴合状态。手爪3的圆弧部分高度超出球面镜2中心,在调腔完成后,手爪3在工作台7的带动下向谐振腔体1运动,利用球面镜2与谐振腔体1之间的压力实现光胶。Referring to Fig. 5, the above-mentioned clamping claw 3 is integrated with the connecting rod, fixed on the vertical workbench 5, and is in line contact with the spherical mirror 2, and adopts duralumin material to ensure light weight and high hardness. The clamping claw 3 drives the spherical mirror 2 to achieve translation in three directions. The head of the claw is composed of V-shaped and arc-shaped two parts. The V-shaped angle is 60°. During the movement, the spherical mirror 2 is always adsorbed on the resonant cavity On the optical glue surface of the body 1, the movement of the claw 3 will not change the bonding state of the spherical mirror 2 and the resonant cavity 1 . The height of the arc portion of the gripper 3 exceeds the center of the spherical mirror 2. After the cavity adjustment is completed, the gripper 3 moves toward the resonant cavity 1 under the drive of the worktable 7, and the light is realized by using the pressure between the spherical mirror 2 and the resonant cavity 1. glue.

Claims (4)

1. an inclination contact laser gyro is transferred chamber mechanism, and the resonant cavity (1) and the spherical mirror (2) that comprise an optical table (10), a cavity bearing (4) and wait to transfer the chamber is characterized in that:
A. described cavity bearing (4) is fixed on the described optical table (10), and the upper surface and the horizontal plane angle of this cavity bearing (4) are α, 8.5 o≤ α≤ 90 o; Settle on cavity bearing (4) upper surface and wait to transfer the resonant cavity (1) in chamber;
B. on described optical table (10), the three-dimensional precision stage that two covers have retaining paw (3) is installed, is respectively applied for the adjustment of finishing two described spherical mirrors of station (2) by a web joint (9).
2. inclination contact laser gyro according to claim 1 is transferred chamber mechanism, it is characterized in that every cover worktable is to be fixed on the inclined base (8) by the orthogonal manner series connection by a vertical worktable (5), a horizontal table (6) and a normal direction worktable (7) in the three-dimensional precision stage of described two covers, this inclined base (8) is fixed on the described optical table (10) by described web joint (9).
3. inclination contact laser gyro according to claim 1 is transferred chamber mechanism, the structure that it is characterized in that described retaining paw (3) is: two screws are arranged on the lower end connector of a claw bar, fixedly connected with described vertical worktable (5) by screw, and the V-shaped structure in the upper end of claw bar, can hold spherical mirror (2) fork, realize spherical mirror (2) in horizontal and vertical location, resonant cavity (1) optical cement face upper edge, but do not have positioning action in optical cement face normal direction.
4. an inclination contact laser gyro cavity adjustment method adopts inclination contact laser gyro according to claim 1 to transfer chamber mechanism to transfer the chamber, it is characterized in that operation steps is as follows:
A. the installation step of a station spherical mirror (2) is:
A. three-dimensional working platform (5,6,7) resets;
B. on retaining paw (3), lay spherical mirror (2), spherical mirror (2) is fitted tightly under action of gravity on the optical cement face of resonant cavity (1);
C. Control work platform (5,6) drives the horizontal and vertical micromotion of retaining paw (3) along resonant cavity (1) optical cement face, until the optimum that searches out spherical mirror (2) position;
D. normal direction worktable (7) drives retaining paw (3) near resonant cavity (1) direction micromotion, realizes the optical cement of spherical mirror (2) and resonant cavity (1);
E. three-dimensional working platform (5,6,7) turns back to terminal position, finishes the assembling of a station spherical mirror (2);
B. the installation step of another station spherical mirror (2) with the step a among the step A to step e.
CN2010105613456A 2010-11-27 2010-11-27 Mechanism and method for adjusting cavity of tilted contact laser gyroscope Expired - Fee Related CN102012227B (en)

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