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CN101985938A - Three-axis composite dry pump with screw and roots rotor - Google Patents

Three-axis composite dry pump with screw and roots rotor Download PDF

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Publication number
CN101985938A
CN101985938A CN 201010565676 CN201010565676A CN101985938A CN 101985938 A CN101985938 A CN 101985938A CN 201010565676 CN201010565676 CN 201010565676 CN 201010565676 A CN201010565676 A CN 201010565676A CN 101985938 A CN101985938 A CN 101985938A
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China
Prior art keywords
shaft
roots rotor
rotor
main shaft
roots
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刘坤
巴德纯
岳向吉
王光玉
张振厚
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Sky Technology Development Co Ltd
Northeastern University China
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Shenyang Scientific Instrument R&D Center of CAS
Northeastern University China
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Abstract

本发明涉及一种真空泵,具体涉及一种具有螺杆和罗茨转子的三轴复合干泵。包括电机、主轴和从动轴,主轴通过轴端的齿轮啮合带动从动轴,两根从动轴平行且对称的装配在主轴两侧。主轴和两侧从动轴上均装配有螺杆转子和罗茨转子,每根轴上的螺杆转子和罗茨转子通过隔板隔开。本发明能在较宽的压力范围内有较大的抽速,而且较之于两轴的复合干泵抽速提高近一倍,同时具有良好的动平衡特性,可靠性和使用寿命都得到较大的提高。

Figure 201010565676

The invention relates to a vacuum pump, in particular to a three-axis composite dry pump with screw rods and Roots rotors. It includes a motor, a main shaft and a driven shaft. The main shaft drives the driven shaft through the gear meshing at the shaft end. Two driven shafts are parallel and symmetrically assembled on both sides of the main shaft. The main shaft and the driven shafts on both sides are equipped with screw rotors and Roots rotors, and the screw rotors and Roots rotors on each shaft are separated by partitions. The invention can have a higher pumping speed in a wider pressure range, and is nearly double the pumping speed compared with the two-axis compound dry pump, and has good dynamic balance characteristics, and the reliability and service life are improved. Big improvement.

Figure 201010565676

Description

一种具有螺杆和罗茨转子的三轴复合干泵A three-shaft compound dry pump with screw and Roots rotor

技术领域technical field

本发明涉及一种真空泵,具体涉及一种具有螺杆和罗茨转子的三轴复合干泵。The invention relates to a vacuum pump, in particular to a three-axis composite dry pump with screw rods and Roots rotors.

背景技术Background technique

现有的干泵均采用两轴结构,转子轴尤其是主动轴受到不对称的周期性作用力,振动和噪音大,抽气效率低,不仅很难在较宽的压力范围内有较大的抽速,而且也增大了对能源的消耗。Existing dry pumps all adopt a two-shaft structure. The rotor shaft, especially the driving shaft, is subjected to asymmetric periodic forces, resulting in large vibration and noise, and low pumping efficiency. Pumping speed, but also increases the consumption of energy.

发明内容Contents of the invention

针对现有技术所存在的问题,本发明提供一种具有螺杆和罗茨转子的三轴复合干泵,解决了振动噪音大和抽气效率低的问题。 Aiming at the problems existing in the prior art, the present invention provides a three-axis composite dry pump with a screw and a Roots rotor, which solves the problems of high vibration noise and low pumping efficiency. the

本发明的螺杆和罗茨转子的三轴复合干泵,包括电机、主轴和从动轴,主轴上装配有主动齿轮,与主动齿轮相啮合的从动齿轮装配在从动轴上,要点在于从动轴为两根,平行且对称的装配在主轴两侧, 主轴和两侧从动轴上均装配有螺杆转子和罗茨转子,每根轴上的螺杆转子和罗茨转子通过隔板隔开。The three-axis compound dry pump of the screw and Roots rotor of the present invention includes a motor, a main shaft and a driven shaft. The main shaft is equipped with a driving gear, and the driven gear meshed with the driving gear is assembled on the driven shaft. There are two driving shafts, which are parallel and symmetrically assembled on both sides of the main shaft. The main shaft and the driven shafts on both sides are equipped with screw rotors and Roots rotors. The screw rotors and Roots rotors on each shaft are separated by a partition .

所述的隔板上设置有三个轴孔,在左从动轴的轴孔下方开一气孔,在右从动轴的轴孔上方开一气孔,两个气孔沿轴孔所在的直线上下对称分布。The separator is provided with three shaft holes, an air hole is opened below the shaft hole of the left driven shaft, and an air hole is opened above the shaft hole of the right driven shaft, and the two air holes are symmetrically distributed up and down along the line where the shaft holes are located. .

所述的罗茨转子相互垂直的安装在主轴和从动轴上。The Roots rotors are installed vertically on the main shaft and the driven shaft.

所述的罗茨转子叶数为二叶、四叶、六叶或八叶。The number of leaves of the Roots rotor is two, four, six or eight.

所述的主轴和两根从动轴在同一横截面上的中心连线为直线或三角形。The connecting line between the centers of the main shaft and the two driven shafts on the same cross section is a straight line or a triangle.

所述的罗茨转子级数为1级~6级。The number of stages of the Roots rotor is 1-6.

所述的罗茨转子级数为2级~6级时,相邻两级之间用隔板隔开。When the number of stages of the Roots rotor is 2 to 6, the adjacent two stages are separated by partitions.

本发明与现有技术相比较显著的特点和产生的有益效果是:由于本申请技术方案中,最显著的特点是将罗茨与螺杆相复合,使螺杆与罗茨转子的三轴复合干泵能在较宽的压力范围内有较大的抽速,而且复合干泵的功率曲线随着压力的变化,仍能近似于一条水平线。该性能有效减少能量的消耗。Compared with the prior art, the remarkable features and beneficial effects of the present invention are: due to the technical scheme of the present application, the most remarkable feature is that the Roots and the screw are combined, so that the three-axis compound dry pump of the screw and the Roots rotor It can have a large pumping speed in a wide pressure range, and the power curve of the compound dry pump can still approximate a horizontal line as the pressure changes. This performance effectively reduces energy consumption.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2为罗茨部分的抽气过程示意图;Fig. 2 is the schematic diagram of the pumping process of Roots part;

图3为罗茨转子截面型线;Figure 3 is the cross-sectional profile of the Roots rotor;

图4为转子横截面中心连线呈三角形布置的结构示意图;Fig. 4 is a structural schematic diagram of a triangular arrangement of the center line of the rotor cross section;

图中:1电机、2主动齿轮、3右从动齿轮、4主轴、5主动螺杆转子、6右从动螺杆转子、7隔板、8右从动轴、9右从动罗茨转子、10进气腔、11左从动罗茨转子、12左从动轴、13主动罗茨转子、14左从动螺杆转子、15排气腔、16左从动齿轮、17进气口、18排气口、19轴承端盖、20泵体、21上轴承座、22下轴承座、23上轴承、24齿轮室、25下轴承。In the figure: 1 motor, 2 driving gear, 3 right driven gear, 4 main shaft, 5 driving screw rotor, 6 right driven screw rotor, 7 partition, 8 right driven shaft, 9 right driven Roots rotor, 10 Intake cavity, 11 Left driven Roots rotor, 12 Left driven shaft, 13 Active Roots rotor, 14 Left driven screw rotor, 15 Exhaust cavity, 16 Left driven gear, 17 Air intake, 18 Exhaust Mouth, 19 bearing end caps, 20 pump bodies, 21 upper bearing blocks, 22 lower bearing blocks, 23 upper bearings, 24 gear chambers, 25 lower bearings.

具体实施方式Detailed ways

下面结合附图对本发明做进一步说明。The present invention will be further described below in conjunction with the accompanying drawings.

例1.本发明螺杆和罗茨转子的三轴复合干泵,其中电机1与主轴4相连接,主动齿轮2,左从动齿轮16和右从动齿轮3通过键连接分别装配在主轴4,左从动轴12和右从动轴8上,三根轴呈平行分布,在三个同步齿轮带动下,三根轴作彼此反向的旋转运动,在主轴4,左从动轴12和右从动轴8上均固定有一个螺杆转子和2级八叶的罗茨转子,螺杆转子和罗茨转子通过键连接分别固定在三根轴上,主轴4,左从动轴12和右从动轴8在两端的轴肩上均装配有轴承,上轴承23固定在上轴承座21上,上轴承座21顶部连接有一空腔齿轮室24,三根轴延伸到齿轮室24的轴肩部分装配有轴承,齿轮室24与上轴承座21通过一体铸造而成,上轴承座21内部的空腔为排气腔15,排气腔15与排气口18相通,电机1通过螺栓固定在齿轮室24上,上轴承座21通过螺栓与泵体20相连接,泵体20内部的三个四叶罗茨转子相互垂直的分别安装在主轴4,左从动轴12和右从动轴8上,罗茨转子与螺杆转子通过隔板7隔开,隔板7上设置有三个轴孔,在左从动轴12的轴孔下方开一气孔,在右从动轴8的轴孔上方开一气孔,两个气孔沿轴孔所在的直线上下对称分布。下轴承座22通过螺栓固定在泵体20上,下轴承座22内部的空腔为进气腔10,在进气腔10顶部的下轴承座22上开有进气口17,进气口17与进气管路相连接,轴承端盖19通过螺栓固定在下轴承座22上。Example 1. The three-axis composite dry pump of screw and Roots rotor of the present invention, wherein motor 1 is connected with main shaft 4, driving gear 2, left driven gear 16 and right driven gear 3 are respectively assembled on main shaft 4 through key connection, On the left driven shaft 12 and the right driven shaft 8, the three shafts are distributed in parallel. Driven by the three synchronous gears, the three shafts rotate in opposite directions to each other. On the main shaft 4, the left driven shaft 12 and the right driven shaft A screw rotor and a 2-stage eight-lobe Roots rotor are fixed on the shaft 8. The screw rotor and the Roots rotor are respectively fixed on the three shafts through key connections. The main shaft 4, the left driven shaft 12 and the right driven shaft 8 are in the The shaft shoulders at both ends are equipped with bearings, and the upper bearing 23 is fixed on the upper bearing seat 21. There is a cavity gear chamber 24 connected to the top of the upper bearing seat 21, and the shaft shoulders of the three shafts extending to the gear chamber 24 are equipped with bearings, gears, etc. The chamber 24 and the upper bearing seat 21 are integrally cast, and the cavity inside the upper bearing seat 21 is the exhaust chamber 15, which communicates with the exhaust port 18, and the motor 1 is fixed on the gear chamber 24 by bolts. The bearing housing 21 is connected with the pump body 20 through bolts, and the three four-lobe Roots rotors inside the pump body 20 are installed on the main shaft 4, the left driven shaft 12 and the right driven shaft 8 respectively perpendicular to each other. The screw rotor is separated by a partition 7, and the partition 7 is provided with three shaft holes, an air hole is opened below the shaft hole of the left driven shaft 12, an air hole is opened above the shaft hole of the right driven shaft 8, and two air holes It is symmetrically distributed up and down along the straight line where the shaft hole is located. The lower bearing seat 22 is fixed on the pump body 20 by bolts, the cavity inside the lower bearing seat 22 is the air intake chamber 10, and the lower bearing seat 22 at the top of the air intake chamber 10 has an air inlet 17, and the air inlet 17 Connected with the air intake pipeline, the bearing end cover 19 is fixed on the lower bearing seat 22 by bolts.

螺杆转子由三个齿轮同步带动啮合,齿间间隙很小,但又不接触,因而可产生较高真空,又不容易磨损。与涡旋泵、爪型泵等其它干泵相比,螺杆泵具有明显优势,既具有较高的压缩比,又相对平稳。The screw rotor is synchronously driven and meshed by three gears, the gap between the teeth is very small, but there is no contact, so it can generate a high vacuum and is not easy to wear. Compared with other dry pumps such as scroll pumps and claw pumps, the screw pump has obvious advantages, not only has a higher compression ratio, but also is relatively stable.

三根轴的布置有两种方案:一是三根轴水平布置,二是三根轴呈三角形布置。由于三根轴的设计要求三个同步齿轮啮合,为了防止两路进气以及排气的干涉,且简化结构,采用三轴水平布置为好,亦能采用三角形布置。There are two schemes for the arrangement of the three axes: one is that the three axes are arranged horizontally, and the other is that the three axes are arranged in a triangle. Since the design of the three shafts requires the meshing of three synchronous gears, in order to prevent the interference of the two air intake and exhaust, and to simplify the structure, it is better to adopt a horizontal arrangement of the three axes, and a triangular arrangement can also be used.

本发明的工作过程是:由电机1提供动力源。电机1直接与主轴4连接,从而带动主轴4旋转。主轴4通过键连接主动齿轮2,带动左从动齿轮16和右从动齿轮3旋转。左从动齿轮16和右从动齿轮3分别与左从动轴12和右从动轴8相连接,带动两从动轴旋转。如此便实现了主动螺杆转子5、左从动螺杆转子14、右从动螺杆转子6、主动罗茨转子13、左从动罗茨转子11和右从动罗茨转子9的同步旋转。转子间无接触啮合,连同泵体内壁形成封闭的空间,从而实现周期性的吸气和排气。The working process of the present invention is: the power source is provided by the motor 1 . The motor 1 is directly connected to the main shaft 4 to drive the main shaft 4 to rotate. The main shaft 4 is connected with the driving gear 2 through a key, and drives the left driven gear 16 and the right driven gear 3 to rotate. Left driven gear 16 and right driven gear 3 are connected with left driven shaft 12 and right driven shaft 8 respectively, drive two driven shafts to rotate. In this way, the synchronous rotation of the driving screw rotor 5 , the left driven screw rotor 14 , the right driven screw rotor 6 , the driving Roots rotor 13 , the left driven Roots rotor 11 and the right driven Roots rotor 9 is realized. The non-contact engagement between the rotors forms a closed space together with the inner wall of the pump, so as to realize periodic suction and exhaust.

泵内转子之间用隔板7隔开。转子与转子、转子与泵体内壁之间相互作用排出的气体通过隔板7、进气腔10和排气腔15中的气孔最终由排气口18排出。在各级转子转动作用下,实现气体的输运过程。螺杆与罗茨转子的三轴复合干泵在保留了罗茨泵和螺杆泵的部分优势的基础上,有其三轴布置和螺杆与罗茨复合的更多优势:动平衡性能良好,运转平稳,有效地减振和降噪;结构紧凑,相同抽速下体积较小,有效地降低了成本,故障率降低,减少了维护成本。The inner rotors of the pump are separated by a partition 7. The gas discharged from the interaction between the rotor and the rotor, and between the rotor and the inner wall of the pump passes through the air holes in the partition plate 7 , the air intake chamber 10 and the exhaust chamber 15 and is finally discharged through the exhaust port 18 . Under the rotation of the rotors at all levels, the gas transportation process is realized. On the basis of retaining some advantages of Roots pump and screw pump, the three-axis compound dry pump of screw and Roots rotor has more advantages of its three-axis arrangement and the combination of screw and Roots: good dynamic balance performance and stable operation , effective vibration and noise reduction; compact structure, smaller volume at the same pumping speed, effectively reducing costs, lower failure rates, and reduced maintenance costs.

例2.其结构,连接和工作过程与实施例1相同,不同点在于主轴和两侧从动轴上均装配有2级八叶的罗茨转子。Example 2. Its structure, connection and working process are the same as those in Example 1, except that the main shaft and the driven shafts on both sides are equipped with two-stage eight-lobe Roots rotors.

例3.其工作过程与实施例1相同,不同点在于主轴4,左从动轴12和右从动轴8呈三角形布置。Example 3. Its working process is the same as that of Embodiment 1, except that the main shaft 4, the left driven shaft 12 and the right driven shaft 8 are arranged in a triangle.

Claims (7)

1. three compound dried pumps with screw rod and roots rotor, comprise motor, main shaft and driven shaft, be equipped with driving gear on the main shaft, the driven gear that is meshed with driving gear is assemblied on the driven shaft, it is characterized in that driven shaft is two, parallel and the symmetrical main shaft both sides that are assemblied in all are equipped with screw rotor and roots rotor on main shaft and the both sides driven shaft, and screw rotor and roots rotor on every axle separate by dividing plate.
2. a kind of three compound dried pumps as claimed in claim 1 with screw rod and roots rotor, it is characterized in that described dividing plate is provided with three axis holes, below the axis hole of left driven shaft, open a pore, open a pore above the axis hole of right driven shaft, two pores are symmetrically distributed up and down along the straight line at axis hole place.
3. a kind of three compound dried pumps with screw rod and roots rotor as claimed in claim 1 is characterized in that described roots rotor is orthogonal to be installed on main shaft and the driven shaft.
4. a kind of three compound dried pumps with screw rod and roots rotor as claimed in claim 1 is characterized in that the described roots rotor number of sheets is two leaves, four leaves, six leaves or eight leaves.
5. a kind of three compound dried pumps with screw rod and roots rotor as claimed in claim 1 is characterized in that the described main shaft and the line of centres of two driven shafts on same cross section are straight line or triangle.
6. a kind of three compound dried pumps with screw rod and roots rotor as claimed in claim 1 is characterized in that described roots rotor progression is 1 grade~6 grades.
7. a kind of three compound dried pumps with screw rod and roots rotor as claimed in claim 6 when it is characterized in that described roots rotor progression is 2 grades~6 grades, separate with dividing plate between the adjacent two-stage.
CN 201010565676 2010-11-30 2010-11-30 Three-axis composite dry pump with screw and roots rotor Pending CN101985938A (en)

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CN103486034A (en) * 2013-10-17 2014-01-01 山东伯仲真空设备股份有限公司 Multi-level Roots pump
CN103732923A (en) * 2011-08-17 2014-04-16 厄利孔莱博尔德真空技术有限责任公司 Roots pump
CN103994070A (en) * 2014-05-22 2014-08-20 威海智德真空科技有限公司 Screw vacuum pump and rotor planetary layout structure of compressor
CN112780563A (en) * 2019-11-07 2021-05-11 中国石油化工股份有限公司 Two-stage dry vacuum pump
CN113137369A (en) * 2021-05-27 2021-07-20 威鹏晟(山东)真空技术有限公司 Roots screw composite vacuum pump
CN114412788A (en) * 2022-03-02 2022-04-29 南通诺博特机器人制造有限公司 Energy-saving Roots-screw integrated oil-free vacuum pump
CN114526233A (en) * 2022-03-02 2022-05-24 安徽理工大学 Composite dry vacuum pump with roots rotor and screw rotor connected in series and use method
CN114607600A (en) * 2020-12-09 2022-06-10 东北大学 Novel multistage roots vacuum pump

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US20030035731A1 (en) * 2001-08-14 2003-02-20 Deok-Kyeom Kim Dry vacuum pump
US20060083651A1 (en) * 2004-10-01 2006-04-20 Lim Moon G Composite dry vacuum pump having roots rotor and screw rotor

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GB504385A (en) * 1937-09-29 1939-04-25 Fletcher & Winterbottom Ltd Improvements in or relating to rotary blowers or compressors
EP0953771A1 (en) * 1998-04-27 1999-11-03 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Single-stage and multi-stage roots pump
JP2000161269A (en) * 1998-11-27 2000-06-13 Toyota Autom Loom Works Ltd Roots pump and pump device
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103732923A (en) * 2011-08-17 2014-04-16 厄利孔莱博尔德真空技术有限责任公司 Roots pump
CN103732923B (en) * 2011-08-17 2016-09-21 厄利孔莱博尔德真空技术有限责任公司 Rocker-type piston pump
US9476423B2 (en) 2011-08-17 2016-10-25 Oerlikon Leybold Vaccum Gmbh Roots pump connection channels separating adjacent pump stages
CN103486034A (en) * 2013-10-17 2014-01-01 山东伯仲真空设备股份有限公司 Multi-level Roots pump
CN103486034B (en) * 2013-10-17 2016-04-06 山东伯仲真空设备股份有限公司 Multi-stage roots pump
CN103994070A (en) * 2014-05-22 2014-08-20 威海智德真空科技有限公司 Screw vacuum pump and rotor planetary layout structure of compressor
CN112780563A (en) * 2019-11-07 2021-05-11 中国石油化工股份有限公司 Two-stage dry vacuum pump
CN114607600A (en) * 2020-12-09 2022-06-10 东北大学 Novel multistage roots vacuum pump
CN114607600B (en) * 2020-12-09 2023-03-21 东北大学 A New Type of Multistage Roots Vacuum Pump
CN113137369A (en) * 2021-05-27 2021-07-20 威鹏晟(山东)真空技术有限公司 Roots screw composite vacuum pump
CN113137369B (en) * 2021-05-27 2024-05-31 威鹏晟(山东)真空技术有限公司 Roots screw composite vacuum pump
CN114412788A (en) * 2022-03-02 2022-04-29 南通诺博特机器人制造有限公司 Energy-saving Roots-screw integrated oil-free vacuum pump
CN114526233A (en) * 2022-03-02 2022-05-24 安徽理工大学 Composite dry vacuum pump with roots rotor and screw rotor connected in series and use method
CN114412788B (en) * 2022-03-02 2024-03-22 南通诺博特机器人制造有限公司 An energy-saving roots-screw integrated oil-free vacuum pump
CN114526233B (en) * 2022-03-02 2024-05-10 安徽理工大学 Composite dry vacuum pump with Roots rotor and screw rotor connected in series and use method

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Application publication date: 20110316