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CN101969057B - Circuit substrate - Google Patents

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CN101969057B
CN101969057B CN 200910161682 CN200910161682A CN101969057B CN 101969057 B CN101969057 B CN 101969057B CN 200910161682 CN200910161682 CN 200910161682 CN 200910161682 A CN200910161682 A CN 200910161682A CN 101969057 B CN101969057 B CN 101969057B
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circuit
test
line
layer
conductive hole
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CN101969057A (en
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洪坤廷
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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Abstract

The invention relates to a circuit substrate, which comprises an outer circuit layer, an inner circuit layer, a dielectric layer, a first conductive hole and a second conductive hole. The outer circuit layer comprises a first signal circuit, a first test circuit and a test contact communicated with the first test circuit. The inner circuit layer comprises a second signal circuit, a second test circuit and a first connecting circuit connected between the second signal circuit and the second test circuit. The dielectric layer is configured between the outer circuit layer and the inner circuit layer. The first conductive hole is located in the dielectric layer, wherein the first conductive hole is used for conducting the first test circuit and the second test circuit. The second conductive hole is located in the dielectric layer, wherein the second conductive hole is used for conducting the first signal line and the second signal line. The circuit substrate provided by the invention can be used for carrying out open circuit/short circuit tests. In addition, the routing pad of the first signal circuit can be conducted with the testing contact point positioned on the outer circuit layer, so that the welding non-stick test can be carried out.

Description

线路基板Circuit board

技术领域 technical field

本发明涉及一种线路基板,尤其涉及一种用以进行开路/短路测试(open/short test)及焊不粘测试(non-stick test)的线路基板。The invention relates to a circuit substrate, in particular to a circuit substrate for performing an open/short test and a non-stick test.

背景技术 Background technique

目前在半导体封装技术中,线路基板(circuit substrate)是经常使用的组装元件之一。线路基板主要由多层图案化线路层(patterned conductivelayer)及多层介电层(dielectric layer)交替迭合而成,而两线路层之间可通过导电孔(conductive via)进行电性连接。At present, in semiconductor packaging technology, circuit substrate is one of the frequently used assembly components. The circuit substrate is mainly composed of multiple patterned conductive layers and multiple dielectric layers alternately stacked, and the two circuit layers can be electrically connected through conductive vias.

当线路基板应用于芯片封装的打线制程时,为了提升线路基板的打线制程的良率,必须对线路基板进行焊不粘测试(non-stick test),并根据打线与接垫的导通情况来调整制程参数。此外,随着线路基板线路密度的不断地提高,以影像观察的方式来对线路基板上线路图案的检验变得非常困难。因此,在高密度线路基板的制程中,需要以电性的方式来对线路基板作开路/短路测试,以确保良率。When the circuit board is used in the wire bonding process of chip packaging, in order to improve the yield rate of the wire bonding process of the circuit board, it is necessary to conduct a non-stick test on the circuit board According to the situation to adjust the process parameters. In addition, as the circuit density of the circuit substrate increases continuously, it becomes very difficult to inspect the circuit pattern on the circuit substrate by means of image observation. Therefore, in the process of manufacturing high-density circuit substrates, it is necessary to conduct an open circuit/short circuit test on the circuit substrates in an electrical manner to ensure the yield.

为了对线路基板进行开路/短路测试,必须移除线路基板的外线路层用于连接焊垫与测试线路的电镀线,其中,电镀线的用途在于在外线路层的接垫上以电镀方式来形成抗氧化层。然而,焊不粘测试却会因为这些电镀线的移除而无法进行。In order to perform an open circuit/short circuit test on the circuit substrate, the outer circuit layer of the circuit substrate must be removed to connect the plating line to the pad and the test circuit, wherein the purpose of the electroplating line is to form an anti- oxide layer. However, solder nonstick testing is not possible due to the removal of these plating lines.

发明内容 Contents of the invention

本发明的目的是提供一种线路基板,可进行开路/短路测试及焊不粘测试。The purpose of the present invention is to provide a circuit substrate, which can perform open circuit/short circuit test and solder non-stick test.

本发明提供一种线路基板,包括一外线路层、一内线路层、一介电层、一第一导电孔及一第二导电孔。外线路层包括一第一信号线路、一第一测试线路及与第一测试线路导通的一测试接点。第一信号线路包括被第一测试线路所围绕的一打线接垫。内线路层包括一第二信号线路、一第二测试线路及连接于第二信号线路及第二测试线路之间的一第一连接线路。介电层配置于外线路层及内线路层之间。第一导电孔位于介电层内,其中第一导电孔用以导通第一测试线路及第二测试线路。第二导电孔位于介电层内,其中第二导电孔用于导通第一信号线路及第二信号线路。The invention provides a circuit substrate, which includes an outer circuit layer, an inner circuit layer, a dielectric layer, a first conductive hole and a second conductive hole. The outer circuit layer includes a first signal circuit, a first test circuit and a test contact connected to the first test circuit. The first signal line includes a bonding pad surrounded by the first test line. The inner circuit layer includes a second signal circuit, a second test circuit and a first connection circuit connected between the second signal circuit and the second test circuit. The dielectric layer is disposed between the outer circuit layer and the inner circuit layer. The first conductive hole is located in the dielectric layer, wherein the first conductive hole is used for conducting the first test circuit and the second test circuit. The second conductive hole is located in the dielectric layer, wherein the second conductive hole is used for connecting the first signal line and the second signal line.

在本发明的一实施例中,上述测试接点依序经过第一测试线路、第一导电孔、第二测试线路、第一连接线路、第二信号线路及第二导电孔,而导通至第一信号线路。In an embodiment of the present invention, the above-mentioned test contacts pass through the first test line, the first conductive hole, the second test line, the first connection line, the second signal line and the second conductive hole in sequence, and conduct to the first test line. a signal line.

在本发明的一实施例中,上述第一信号线路还包括一第一接垫及一连接线路。第一接垫连接于第二导电孔。连接线路连接于打线接垫及第一接垫之间。In an embodiment of the present invention, the first signal line further includes a first pad and a connection line. The first pad is connected to the second conductive hole. The connection line is connected between the bonding pad and the first pad.

在本发明的一实施例中,上述第二信号线路包括一第二接垫,被第二测试线路所围绕,其中第一连接线路连接于第二接垫及第二测试线路之间。In an embodiment of the present invention, the above-mentioned second signal line includes a second pad surrounded by the second test line, wherein the first connection line is connected between the second pad and the second test line.

在本发明的一实施例中,上述线路基板还包括一焊罩层,配置于外线路层且暴露出部分外线路层。In an embodiment of the present invention, the circuit substrate further includes a solder mask layer disposed on the outer circuit layer and exposing part of the outer circuit layer.

在本发明的一实施例中,上述外线路层还包括一第三接垫,连接于第一导电孔及第一测试线路。In an embodiment of the present invention, the outer circuit layer further includes a third pad connected to the first conductive hole and the first test circuit.

在本发明的一实施例中,上述内线路层还包括一第四接垫,连接于第一导电孔及第二测试线路。In an embodiment of the present invention, the inner circuit layer further includes a fourth pad connected to the first conductive hole and the second test circuit.

在本发明的线路基板中,外线路层的第一信号线路均不与其第一测试线路导通,即无传统的电镀线的设置,因而可进行开路/短路测试。此外,第一信号线路的打线接垫可通过内线路层的测试线路与位于外线路层的测试接点导通,因而可进行焊不粘测试。In the circuit substrate of the present invention, none of the first signal lines on the outer circuit layer is connected to the first test line, that is, there is no traditional plating line, so the open circuit/short circuit test can be performed. In addition, the bonding pads of the first signal circuit can be conducted with the test contacts on the outer circuit layer through the test circuit on the inner circuit layer, so that the solder non-stick test can be performed.

为让本发明的上述特征和优点能更明显易懂,下文特举一实施例,并结合附图,作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, an embodiment is exemplified below and described in detail in conjunction with the accompanying drawings.

附图说明 Description of drawings

图1为本发明一实施例的线路基板的外线路层的俯视示意图;1 is a schematic top view of an outer circuit layer of a circuit substrate according to an embodiment of the present invention;

图2为本发明实施例的线路基板的内线路层的俯视示意图;2 is a schematic top view of an inner circuit layer of a circuit substrate according to an embodiment of the present invention;

图3为本发明实施例的线路基板沿图1的AA’线的部分结构剖视图;Fig. 3 is a partial structural cross-sectional view of the circuit substrate along the line AA' of Fig. 1 according to the embodiment of the present invention;

图4为本发明实施例的线路基板沿图2的BB’线的部分结构剖视图;Fig. 4 is a partial structural cross-sectional view of the circuit substrate of the embodiment of the present invention along the BB' line of Fig. 2;

图5为本发明实施例的线路基板沿图1的CC’线的部分结构剖视图。Fig. 5 is a cross-sectional view of a part of the structure of the circuit substrate along line CC' in Fig. 1 according to the embodiment of the present invention.

主要元件符号说明:Description of main component symbols:

110:外线路层;       112:第一信号线路;110: outer line layer; 112: first signal line;

112a:打线接垫;      112b:第一接垫;112a: wire bonding pad; 112b: first pad;

112c:第二连接线路;  114:第一测试线路;112c: the second connection line; 114: the first test line;

116:测试接点;       118:第三接垫;116: test contact; 118: third pad;

120:内线路层;       122:第二信号线路;120: inner line layer; 122: second signal line;

122a:第二接垫;      124:第二测试线路;122a: the second pad; 124: the second test line;

126:第一连接线路;   128:第四接垫;126: the first connection line; 128: the fourth pad;

130:介电层;         140:第一导电孔;130: dielectric layer; 140: first conductive hole;

150:第二导电孔;     160:焊罩层。150: second conductive hole; 160: solder mask layer.

具体实施方式 Detailed ways

图1为本发明一实施例的线路基板的外线路层的俯视示意图,图2为本发明实施例的线路基板的内线路层的俯视示意图,图3为本发明实施例的线路基板沿图1的AA’线的部分结构剖视图,图4为本发明实施例的线路基板沿图2的BB’线的部分结构剖视图,图5为本发明实施例的线路基板沿图1的CC’线的部分结构剖视图。结合图1、图2、图3、图4及图5,本实施例的线路基板包括一外线路层110、一内线路层120、一介电层130、一第一导电孔140及一第二导电孔150。Fig. 1 is a schematic top view of the outer circuit layer of the circuit substrate according to an embodiment of the present invention, Fig. 2 is a schematic top view of the inner circuit layer of the circuit substrate according to the embodiment of the present invention, and Fig. 3 is a schematic top view of the circuit substrate according to the embodiment of the present invention along Fig. 1 4 is a partial structural sectional view of the circuit substrate of the embodiment of the present invention along the BB' line of FIG. 2 , and FIG. 5 is a part of the circuit substrate of the embodiment of the present invention along the CC' line of FIG. 1 Sectional view of the structure. 1, FIG. 2, FIG. 3, FIG. 4 and FIG. 5, the circuit substrate of this embodiment includes an outer circuit layer 110, an inner circuit layer 120, a dielectric layer 130, a first conductive hole 140 and a first Two conductive holes 150 .

外线路层110包括一第一信号线路112、一第一测试线路114及与第一测试线路114导通的一测试接点116。内线路层120包括一第二信号线路122、一第二测试线路124及连接于第二信号线路122及第二测试线路124之间的一第一连接线路126。The outer circuit layer 110 includes a first signal circuit 112 , a first test circuit 114 and a test contact 116 connected to the first test circuit 114 . The inner circuit layer 120 includes a second signal circuit 122 , a second test circuit 124 and a first connection circuit 126 connected between the second signal circuit 122 and the second test circuit 124 .

介电层130(示于图3)配置于外线路层110及内线路层120之间。第一导电孔140位于介电层130内,用以导通第一测试线路114及第二测试线路124。第二导电孔150位于介电层130内,用以导通第一信号线路112及第二信号线路122。The dielectric layer 130 (shown in FIG. 3 ) is disposed between the outer circuit layer 110 and the inner circuit layer 120 . The first conductive hole 140 is located in the dielectric layer 130 for conducting the first test line 114 and the second test line 124 . The second conductive hole 150 is located in the dielectric layer 130 for conducting the first signal line 112 and the second signal line 122 .

结合图1及图3,在本实施例中,第一信号线路112包括一打线接垫112a、一连接于第二导电孔150的第一接垫112b及一连接于打线接垫112a与第一接垫112b之间的第二连接线路112c,其中第一测试线路114围绕打线接垫112a、第一接垫112b及第二连接线路112c。值得注意的是,打线接垫112a在外线路层110不与第一测试线路114连接,即无传统电镀线的设置,而能够对打线接垫112a进行开路/短路测试。1 and 3, in this embodiment, the first signal line 112 includes a wire bonding pad 112a, a first pad 112b connected to the second conductive hole 150, and a wire bonding pad 112a connected to The second connection line 112c between the first pads 112b, wherein the first test line 114 surrounds the bonding pad 112a, the first pad 112b and the second connection line 112c. It is worth noting that the wire bonding pad 112a is not connected to the first test circuit 114 on the outer circuit layer 110 , that is, there is no conventional plating wire, and the open/short circuit test can be performed on the wire bonding pad 112a.

结合图2及图4,第二信号线路122包括一第二接垫122a,其中第二测试线路124围绕第二接垫122a,且第一连接线路126连接于第二接垫122a及第二测试线路124之间。2 and 4, the second signal line 122 includes a second pad 122a, wherein the second test line 124 surrounds the second pad 122a, and the first connection line 126 is connected to the second pad 122a and the second test pad 122a. between line 124.

结合图1、图2及图5,外线路层110还包括一第三接垫118,连接于第一导电孔140及第一测试线路114。内线路层120还包括一第四接垫128,连接于第一导电孔140及第二测试线路124。Referring to FIG. 1 , FIG. 2 and FIG. 5 , the outer circuit layer 110 further includes a third pad 118 connected to the first conductive hole 140 and the first test circuit 114 . The inner circuit layer 120 further includes a fourth pad 128 connected to the first conductive hole 140 and the second test circuit 124 .

在本实施例中,打线接垫112a能够依序通过第二连接线路112c、第一接垫112b、第二导电孔150、第二接垫122a、第一连接线路126、第二测试线路124、第四接垫128、第一导电孔140、第三接垫118及第一测试线路114而与测试接点116导通,能够进行焊不粘测试。In this embodiment, the bonding pad 112a can sequentially pass through the second connection line 112c, the first pad 112b, the second conductive hole 150, the second pad 122a, the first connection line 126, and the second test line 124. , the fourth pad 128 , the first conductive hole 140 , the third pad 118 , and the first test line 114 are connected to the test contact 116 , so that the solder non-stick test can be performed.

如图3所示,本实施例的线路基板还包括一焊罩层160,配置于外线路层110且暴露出部分外线路层110。As shown in FIG. 3 , the circuit substrate of this embodiment further includes a solder mask layer 160 disposed on the outer circuit layer 110 and exposing part of the outer circuit layer 110 .

综上所述,在本发明的线路基板中,外线路层的第一信号线路均不与其第一测试线路导通,即无传统电镀线的设置,因而能够进行开路/短路测试。此外,第一信号线路的打线接垫可通过内线路层的测试线路与位于外线路层的测试接点导通,因而能够进行焊不粘测试。即,本发明的线路基板在其线路制作完成并进行开路/短路测试之后,可在后续制程中直接进行焊不粘测试,以提高制程效率及产能。To sum up, in the circuit substrate of the present invention, none of the first signal lines on the outer circuit layer is connected to the first test line, that is, there is no traditional plating line, so open circuit/short circuit testing can be performed. In addition, the bonding pad of the first signal circuit can be conducted with the test contact on the outer circuit layer through the test circuit of the inner circuit layer, so that the solder non-stick test can be performed. That is, after the circuit substrate of the present invention is fabricated and subjected to an open circuit/short circuit test, a solder non-stick test can be directly performed in a subsequent process to improve process efficiency and productivity.

最后应说明的是:以上实施例仅用以说明本发明的技术方案而非对其进行限制,尽管参照较佳实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对本发明的技术方案进行修改或者等同替换,而这些修改或者等同替换亦不能使修改后的技术方案脱离本发明技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that: it still Modifications or equivalent replacements can be made to the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims (7)

1.一种线路基板,其特征在于,包括:1. A circuit substrate, characterized in that, comprising: 一外线路层,包括:An outer line layer, including: 一第一测试线路;a first test circuit; 一第一信号线路,包括:A first signal line, comprising: 一打线接垫,被所述第一测试线路所围绕;a bonding pad surrounded by the first test line; 一测试接点,与所述第一测试线路导通;a test contact, conducting with the first test line; 一内线路层,包括:An inner line layer, including: 一第二信号线路;a second signal line; 一第二测试线路;a second test line; 一第一连接线路,连接于所述第二信号线路及所述第二测试线路之间;a first connection line connected between the second signal line and the second test line; 一介电层,配置于所述外线路层及所述内线路层之间;a dielectric layer disposed between the outer circuit layer and the inner circuit layer; 一第一导电孔,位于所述介电层内,用以导通所述第一测试线路及所述第二测试线路;以及a first conductive hole, located in the dielectric layer, for conducting the first test line and the second test line; and 一第二导电孔,位于所述介电层内,用以导通所述第一信号线路及所述第二信号线路,a second conductive hole, located in the dielectric layer, for conducting the first signal line and the second signal line, 其中所述第一信号线路在所述外线路层上不与所述第一测试线路导通。Wherein the first signal line is not connected to the first test line on the outer line layer. 2.根据权利要求1所述的线路基板,其特征在于,其中所述测试接点依序经过所述第一测试线路、所述第一导电孔、所述第二测试线路、所述第一连接线路、所述第二信号线路及所述第二导电孔,而导通至所述第一信号线路。2. The circuit substrate according to claim 1, wherein the test contact sequentially passes through the first test line, the first conductive hole, the second test line, and the first connection circuit, the second signal circuit and the second conductive hole, and conduct to the first signal circuit. 3.根据权利要求1所述的线路基板,其特征在于,其中所述第一信号线路还包括:3. The circuit substrate according to claim 1, wherein the first signal line further comprises: 一第一接垫,连接于所述第二导电孔;以及a first pad connected to the second conductive hole; and 一连接线路,连接于所述打线接垫和所述第一接垫之间。A connection line connected between the bonding pad and the first pad. 4.根据权利要求1所述的线路基板,其特征在于,其中所述第二信号线路包括:4. The circuit substrate according to claim 1, wherein the second signal circuit comprises: 一第二接垫,被所述第二测试线路所围绕,其中所述第一连接线路连接于所述第二接垫和所述第二测试线路之间。A second pad is surrounded by the second test line, wherein the first connection line is connected between the second pad and the second test line. 5.根据权利要求1所述的线路基板,其特征在于,其中所述外线路层还包括:5. The circuit substrate according to claim 1, wherein the outer circuit layer further comprises: 一第三接垫,连接所述第一导电孔和所述第一测试线路。A third pad, connected to the first conductive hole and the first test line. 6.根据权利要求1所述的线路基板,其特征在于,其中所述内线路层还包括:6. The circuit substrate according to claim 1, wherein the inner circuit layer further comprises: 一第四接垫,连接所述第一导电孔和所述第二测试线路。A fourth pad, connected to the first conductive hole and the second test line. 7.根据权利要求1所述的线路基板,其特征在于,还包括:7. The circuit substrate according to claim 1, further comprising: 一焊罩层,配置于所述外线路层且暴露出部分所述外线路层。A solder mask layer is configured on the outer circuit layer and exposes part of the outer circuit layer.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1905150A (en) * 2005-07-25 2007-01-31 台湾积体电路制造股份有限公司 Detection method of wiring defect of integrated circuit and structure of process monitoring circuit
CN101320725A (en) * 2007-06-08 2008-12-10 台湾积体电路制造股份有限公司 Parametric testline with increased test pattern areas
TW200913092A (en) * 2007-09-12 2009-03-16 Powertech Technology Inc Semiconductor packaging process enabling completely performing non-stick test of wire-bonding on a substrate strip

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1905150A (en) * 2005-07-25 2007-01-31 台湾积体电路制造股份有限公司 Detection method of wiring defect of integrated circuit and structure of process monitoring circuit
CN101320725A (en) * 2007-06-08 2008-12-10 台湾积体电路制造股份有限公司 Parametric testline with increased test pattern areas
TW200913092A (en) * 2007-09-12 2009-03-16 Powertech Technology Inc Semiconductor packaging process enabling completely performing non-stick test of wire-bonding on a substrate strip

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