CN101968497A - Probe positioning structure of four-probe instrument - Google Patents
Probe positioning structure of four-probe instrument Download PDFInfo
- Publication number
- CN101968497A CN101968497A CN2010102094664A CN201010209466A CN101968497A CN 101968497 A CN101968497 A CN 101968497A CN 2010102094664 A CN2010102094664 A CN 2010102094664A CN 201010209466 A CN201010209466 A CN 201010209466A CN 101968497 A CN101968497 A CN 101968497A
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- Prior art keywords
- probe
- probes
- elastic insulated
- spacer ring
- insulated spacer
- Prior art date
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- 239000000523 sample Substances 0.000 title claims abstract description 97
- 125000006850 spacer group Chemical group 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 8
- 238000009413 insulation Methods 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 4
- 230000000295 complement effect Effects 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 230000002459 sustained effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004575 stone Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
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- Measuring Leads Or Probes (AREA)
Abstract
The invention discloses a probe positioning structure of a four-probe instrument, which comprises an insulated probing head and four probes, wherein each probe is fixedly sleeved an elastic insulated spacer ring the inner diameter of which is matched with the diameter of the probe, the sum of wall thicknesses of the elastic insulated spacer rings sleeved on two adjacent probes is equal to the value obtained by subtracting the diameter of one probe from the center distance between the two adjacent probes; and four elastic insulated spacer rings are arranged at the same height on the probes, the distance from the elastic insulated spacer ring to the lower end of the metal probe accounts for 1/4 to 1/2 of the total length of the probe; simple technology, high spacer ring precision and low cost can be achieved in case that the probe spacer rings are made of tetrafluoro elastic insulated material, and each probe is sleeved with the tetrafluoro elastic insulated ring, thereby not only separating the four probes from each other quite stably and increasing the strength of the probes, but also precisely controlling the mechanical shift of the probes to further guarantee the electric insulating property between the probes as well as the constant pressure elasticity and excellent electric contact of the probes.
Description
Technical field:
The present invention relates to be used for the four point probe tester of silicon chip resistance and resistivity measurement, relate in particular to the probe test parts of four point probe tester.
Background technology:
Sun power is a kind of cleaning, pollution-free and recycled regenerative resource, and the solar cell manufacturing technology that sun power is converted to electric energy is effectively to utilize an important technology of sun power.At present, diffusion is a process procedure of making solar cell photoelectric conversion core component P-N knot, is the gordian technique that solar cell is made.And the measurement of resistance is to guarantee one of important parameter of diffusion quality, and it has reflected in the material concentration of residual impurity after the impurity compensation.During measurement, four metal probes are pressed on the silicon chip surface, impressed current flows in the semiconductor by the contact point of outer metal and semiconductor surface, by the voltage between the measurement internal probe, thereby calculates resistance and resistivity.
For accuracy and the repeatability that guarantees to measure, requiring not only will have high electrical insulating property between four probes, guarantees that insulativity is greater than 10 between probe
9Ohm, and make the machinery amount of vacillating of probe as far as possible little, probe also should have the elasticity and the good electrical contact of constant voltage.At present, people usually adopt with four probes be solidificated in the probe reinforcement fixedly way overcome, but in actual use, probe also can produce skew, and the spacing between the probe can not guarantee constant, not only insulativity is difficult to meet the demands between probe, and serviceable life is not long, can directly influence accuracy of detection again if force to use.The applicant once adopted the synthetic cut stone plate to locate and separated four probes, promptly the position according to four probes gets out four apertures on a synthetic cut stone plate, then four probes are inserted in four apertures, reach thus four probes are separated, and the skew of qualification probe, the purpose of the minimizing machinery amount of vacillating.Though this scheme is than superior before improving, but metal probe lacks constant voltage elasticity in test process, electrically contacting property also be cannot say for sure to demonstrate,prove, simultaneously, to on the synthetic cut stone sheet, get out very difficulty of four location aperture processing by pre-provisioning request, processing cost height not only, and the positional precision between four apertures also is difficult to reach requirement.
Summary of the invention:
In order to solve the problems referred to above that the four point probe tester exists, the invention provides a kind of probe location structure of four point probe tester.The machinery that adopts this location structure can accurately control probe is vacillated, and can guarantee the electrical insulating property between probe again, can also make metal probe have constant voltage elasticity and good electrical contact simultaneously.
The technical solution adopted in the present invention is:
The probe location structure of described four point probe tester, comprise insulation detecting head and four probes, the upper end of four probes is solidificated on the insulation detecting head, it is characterized in that: all fixed cover is equipped with elastic insulated spacer ring on each root probe, the internal diameter of elastic insulated spacer ring and the diameter of probe are complementary, and the wall thickness sum of the elastic insulated spacer ring of institute's suit equals the diameter that centre distance between two adjacent probe deducts a probe on adjacent two probes; And four elastic insulated spacer rings are on the sustained height position of probe.
Further, elastic insulated spacer ring is 1/4～1/2 of a probe total length apart from the distance of metal probe lower end.
Further, described elastic insulated spacer ring is formed by the mold pressing of tetrafluoro elastic insulating material, and its inner core is provided with and relaxes the chamber.
Not only technology is simple to adopt the tetrafluoro elastic insulating material to make the probe spacer ring, and spacer ring precision height, with low cost, elastic insulated circle of suit tetrafluoro all on every probe, four probes very stably can be separated, increase the intensity of probe, can accurately control the machinery of probe again and vacillate, guarantee the electrical insulating property between probe, can also guarantee that probe has constant voltage elasticity and good electrical contact.
Description of drawings:
Fig. 1 is a structural representation of the present invention.
Fig. 2 is that elastic insulated spacer ring is sleeved on the structural representation on the probe;
Among the figure: the 1-detecting head that insulate; The 2-probe; The elastic insulated spacer ring of 3-; 4-relaxes the chamber.
Embodiment:
Below in conjunction with the description of drawings embodiments of the present invention:
The probe location structure of described four point probe tester, as shown in Figure 1 and Figure 2, it comprises insulation detecting head 1 and four probes 2, the upper end of four probes 2 is solidificated on the insulation detecting head 1, fixing elastic insulated spacer ring 3 that forms by the mold pressing of tetrafluoro elastic insulating material of suit all on each root probe 2, the diameter of the internal diameter of elastic insulated spacer ring 3 and probe 2 is complementary, and the wall thickness sum of the elastic insulated spacer ring 3 of institute's suit equals the diameter that centre distance between two adjacent probe 2 deducts a probe 2 on adjacent two probes 2; And four elastic insulated spacer rings 3 are in the sustained height position on probe 2, specific requirement is elastic insulated spacer ring 3 apart from the distance of metal probe 2 lower ends is 1/4～1/2 of probe 2 total lengths, be 1/3 in this example, be provided with at the inner core of elastic insulated spacer ring 3 and relax chamber 4.
Claims (3)
1. the probe location structure of a four point probe tester, comprise insulation detecting head (1) and four probes (2), the upper end of four probes (2) is solidificated on the insulation detecting head (1), it is characterized in that: shooting property of fixed cover insulated spacing collar (3) all on each root probe (2), the diameter of the internal diameter of elastic insulated spacer ring (3) and probe (2) is complementary, and the wall thickness sum of the elastic insulated spacer ring (3) of institute's suit equals the diameter that centre distance between two adjacent probe (2) deducts a probe (2) on adjacent two probes (2); And four elastic insulated spacer rings (3) are on the sustained height position of probe.
2. according to the probe location structure of the described four point probe tester of claim 1, it is characterized in that: described elastic insulated spacer ring (3) is 1/4～1/2 of probe (a 2) total length apart from the distance of metal probe (2) lower end.
3. according to the probe location structure of the described four point probe tester of claim 1, it is characterized in that: described elastic insulated spacer ring (3) is formed by the mold pressing of tetrafluoro elastic insulating material, and its inner core is provided with and relaxes chamber (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010209466.4A CN101968497B (en) | 2010-06-18 | 2010-06-18 | Probe positioning structure of four-probe instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010209466.4A CN101968497B (en) | 2010-06-18 | 2010-06-18 | Probe positioning structure of four-probe instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101968497A true CN101968497A (en) | 2011-02-09 |
| CN101968497B CN101968497B (en) | 2014-07-23 |
Family
ID=43547681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010209466.4A Active CN101968497B (en) | 2010-06-18 | 2010-06-18 | Probe positioning structure of four-probe instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101968497B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103513107A (en) * | 2012-08-31 | 2014-01-15 | 惠州Tcl金能电池有限公司 | Battery pole piece and detecting method thereof |
| CN106443188A (en) * | 2016-11-09 | 2017-02-22 | 武汉新芯集成电路制造有限公司 | Resistance measuring probe |
| CN110031605A (en) * | 2019-03-18 | 2019-07-19 | 中山大学 | Multiprobe formula material soil body spatial distribution survey meter |
Citations (11)
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|---|---|---|---|---|
| FR2465231A1 (en) * | 1979-09-06 | 1981-03-20 | Thomson Csf | Microcircuit test probe head - comprises needle probes held in position by flexible membrane attached to insulating base by bellows |
| CN85201272U (en) * | 1985-04-22 | 1986-02-19 | 广州半导体材料研究所 | Four probing pin probe |
| JPH07311240A (en) * | 1994-05-19 | 1995-11-28 | Sony Corp | Apparatus for measuring electric characteristic of electronic part |
| CN2497287Y (en) * | 2001-09-21 | 2002-06-26 | 天津宝成集团有限公司 | Ajustable high-pressure generator liquid-level electrode assembly |
| JP2005114393A (en) * | 2003-10-03 | 2005-04-28 | Totoku Electric Co Ltd | Contact probe with lead wire and manufacturing method thereof |
| JP2005136058A (en) * | 2003-10-29 | 2005-05-26 | Yokogawa Electric Corp | Connection structure of printed circuit board |
| CN101329366A (en) * | 2007-06-22 | 2008-12-24 | 旺矽科技股份有限公司 | A Probe Short Circuit Prevention Structure |
| US20090211808A1 (en) * | 2008-02-20 | 2009-08-27 | Johannes Falk | Conductor leadthrough, housing device, field apparatus and method for producing a conductor leadthrough |
| CN201311990Y (en) * | 2008-10-01 | 2009-09-16 | 番禺得意精密电子工业有限公司 | Electric connector |
| CN201438599U (en) * | 2009-06-05 | 2010-04-14 | 富港电子（东莞）有限公司 | Probe Connector Fixture |
| CN201724962U (en) * | 2010-06-18 | 2011-01-26 | 常州亿晶光电科技有限公司 | Probe positioning structure of four-point probe test instrument |
-
2010
- 2010-06-18 CN CN201010209466.4A patent/CN101968497B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2465231A1 (en) * | 1979-09-06 | 1981-03-20 | Thomson Csf | Microcircuit test probe head - comprises needle probes held in position by flexible membrane attached to insulating base by bellows |
| CN85201272U (en) * | 1985-04-22 | 1986-02-19 | 广州半导体材料研究所 | Four probing pin probe |
| JPH07311240A (en) * | 1994-05-19 | 1995-11-28 | Sony Corp | Apparatus for measuring electric characteristic of electronic part |
| CN2497287Y (en) * | 2001-09-21 | 2002-06-26 | 天津宝成集团有限公司 | Ajustable high-pressure generator liquid-level electrode assembly |
| JP2005114393A (en) * | 2003-10-03 | 2005-04-28 | Totoku Electric Co Ltd | Contact probe with lead wire and manufacturing method thereof |
| JP2005136058A (en) * | 2003-10-29 | 2005-05-26 | Yokogawa Electric Corp | Connection structure of printed circuit board |
| CN101329366A (en) * | 2007-06-22 | 2008-12-24 | 旺矽科技股份有限公司 | A Probe Short Circuit Prevention Structure |
| US20090211808A1 (en) * | 2008-02-20 | 2009-08-27 | Johannes Falk | Conductor leadthrough, housing device, field apparatus and method for producing a conductor leadthrough |
| CN201311990Y (en) * | 2008-10-01 | 2009-09-16 | 番禺得意精密电子工业有限公司 | Electric connector |
| CN201438599U (en) * | 2009-06-05 | 2010-04-14 | 富港电子（东莞）有限公司 | Probe Connector Fixture |
| CN201724962U (en) * | 2010-06-18 | 2011-01-26 | 常州亿晶光电科技有限公司 | Probe positioning structure of four-point probe test instrument |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103513107A (en) * | 2012-08-31 | 2014-01-15 | 惠州Tcl金能电池有限公司 | Battery pole piece and detecting method thereof |
| CN106443188A (en) * | 2016-11-09 | 2017-02-22 | 武汉新芯集成电路制造有限公司 | Resistance measuring probe |
| CN110031605A (en) * | 2019-03-18 | 2019-07-19 | 中山大学 | Multiprobe formula material soil body spatial distribution survey meter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101968497B (en) | 2014-07-23 |
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