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CN101968461A - Room temperature hydrogen sensor based on palladium-nanometer-scale stannic oxide film type electrode - Google Patents

Room temperature hydrogen sensor based on palladium-nanometer-scale stannic oxide film type electrode Download PDF

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CN101968461A
CN101968461A CN 201010291452 CN201010291452A CN101968461A CN 101968461 A CN101968461 A CN 101968461A CN 201010291452 CN201010291452 CN 201010291452 CN 201010291452 A CN201010291452 A CN 201010291452A CN 101968461 A CN101968461 A CN 101968461A
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tin dioxide
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王敏
温旭光
蒋建中
王岑
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Zhejiang University ZJU
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Abstract

本发明涉及一种微型氢气传感器,具体涉及氢气传感器中钯-纳米二氧化锡薄膜状电极的制备与性能检测,是以氧化铝做底片,采用无电极电解的方法将钯和纳米二氧化锡沉积到底片上作为氢敏材料,本发明提供一种钯-纳米二氧化锡薄膜状电极的制备方法,作为氢敏材料,更好地提高氢气传感器的性能,纳米二氧化锡材料的研发和应用有助于提高二氧化锡氢气传感器的性能,将二氧化锡掺入钯等贵金属可以提高灵敏度、减少响应时间,还可以降低操作温度,本发明响应时间较短,稳定性和重复性都较好,特别适合于室温检测,而且传感器尺寸微小,加工成本低,便于微型化,集成化和产业化,基底载体的陶瓷片还可以回收利用。

Figure 201010291452

The invention relates to a miniature hydrogen sensor, in particular to the preparation and performance detection of a palladium-nano tin dioxide thin film electrode in a hydrogen sensor, in which aluminum oxide is used as a film, and palladium and nano tin dioxide are deposited by an electrodeless electrolysis method As the hydrogen sensitive material on the back sheet, the invention provides a method for preparing a palladium-nano tin dioxide thin film electrode, as the hydrogen sensitive material, the performance of the hydrogen sensor is better improved, and the research and development and application of the nano tin dioxide material are helpful In order to improve the performance of tin dioxide hydrogen sensor, doping tin dioxide into palladium and other precious metals can improve sensitivity, reduce response time, and can also reduce operating temperature. The present invention has shorter response time, better stability and repeatability, especially It is suitable for detection at room temperature, and the size of the sensor is small, the processing cost is low, and it is convenient for miniaturization, integration and industrialization, and the ceramic sheet of the base carrier can also be recycled.

Figure 201010291452

Description

基于钯-纳米二氧化锡薄膜状电极的室温氢气传感器Room temperature hydrogen sensor based on palladium-nano-tin dioxide film electrode

技术领域technical field

本发明涉及一种微型氢气传感器,具体涉及氢气传感器中钯-纳米二氧化锡薄膜状电极的制备与性能检测。The invention relates to a miniature hydrogen sensor, in particular to the preparation and performance detection of a palladium-nanometer tin dioxide film electrode in the hydrogen sensor.

技术背景technical background

氢气是一种理想的新型能源,受到人们青睐,广泛应用于各种工、农业场合,但氢气同时又是易燃易爆的气体,与空气混合易发生爆炸,因此对氢气传感器的研究迫在眉睫。氢气传感器主要应用于氢气浓度的检测,混合气体的分离以及气体过滤等方面的氢气检漏。Hydrogen is an ideal new energy source, which is favored by people and widely used in various industrial and agricultural occasions. However, hydrogen is also a flammable and explosive gas, and it is easy to explode when mixed with air. Therefore, the research on hydrogen sensors is imminent. The hydrogen sensor is mainly used in the detection of hydrogen concentration, the separation of mixed gas and the detection of hydrogen leaks in gas filtration.

目前关于氢敏材料的研究有很多,如二氧化锡、金属钯等。二氧化锡是一种重要的半导体型氢敏材料,但其缺乏气体选择性且需要较高操作温度(250-600℃)以获得足够的灵敏度。金属钯因能与氢气发生可逆反应备受关注,但由于纯钯薄膜对氢气具有强烈的吸附能力,尤其当氢气浓度高时,就会失去对氢气的传感性能;而且钯膜容易发生氢脆薄膜脱落现象,所以,对氢敏材料的研究仍在继续,氢气传感器的更优性能还有待改进和挖掘。At present, there are many studies on hydrogen-sensitive materials, such as tin dioxide and metal palladium. Tin dioxide is an important semiconductor-type hydrogen-sensing material, but it lacks gas selectivity and requires high operating temperature (250-600 °C) to obtain sufficient sensitivity. Metal palladium has attracted much attention because of its reversible reaction with hydrogen. However, due to the strong adsorption capacity of pure palladium film for hydrogen, especially when the concentration of hydrogen is high, it will lose the sensing performance of hydrogen; and the palladium film is prone to hydrogen embrittlement. Therefore, the research on hydrogen sensitive materials is still going on, and the better performance of hydrogen sensors still needs to be improved and excavated.

发明内容Contents of the invention

针对现有技术在不足,本发明提供一种钯-纳米二氧化锡薄膜状电极的制备方法,作为氢敏材料,更好地提高氢气传感器的性能,纳米二氧化锡材料的研发和应用有助于提高二氧化锡氢气传感器的性能;将二氧化锡掺入钯等贵金属可以提高灵敏度、减少响应时间,还可以降低操作温度。Aiming at the deficiencies of the prior art, the present invention provides a method for preparing a palladium-nano-tin dioxide thin-film electrode, as a hydrogen-sensitive material, to better improve the performance of hydrogen sensors, and the research and development and application of nano-tin dioxide materials are helpful It is used to improve the performance of tin dioxide hydrogen sensor; doping tin dioxide with noble metals such as palladium can improve sensitivity, reduce response time, and can also reduce operating temperature.

本发明是一种氢气传感器中的钯-纳米二氧化锡薄膜状电极制备方法,是以氧化铝做底片,采用无电极电解的方法将钯和纳米二氧化锡沉积到底片上作为氢敏材料,步骤如下:The invention relates to a method for preparing a palladium-nanometer tin dioxide thin-film electrode in a hydrogen sensor. Alumina is used as a negative film, and palladium and nano-tin dioxide are deposited on the negative film by an electrodeless electrolysis method as a hydrogen sensitive material. as follows:

1)纳米二氧化锡的制备:使用水热法合成纳米二氧化锡,将二水合氯化亚锡加入到乙醇溶液中,调节pH到11,将得到的悬浊液搅拌1小时后,在120℃下加热6小时,离心并在50℃干燥过夜后得到淡黄色二氧化锡;1) Preparation of nano-tin dioxide: use the hydrothermal method to synthesize nano-tin dioxide, add stannous chloride dihydrate to the ethanol solution, adjust the pH to 11, stir the obtained suspension for 1 hour, After heating at ℃ for 6 hours, centrifuging and drying at 50℃ overnight, light yellow tin dioxide was obtained;

2)氧化铝陶瓷片的预处理:用王水浸泡清洗后,再用去离子水超声波振荡清洗1分钟,最后在高温炉中500-600℃灼烧2小时左右,将洁净的陶瓷片分别浸泡在新鲜配制的氯化亚锡溶液(30 g/L)和银氨溶液(10 g/L)中各10分钟,活化其表面;2) Pretreatment of alumina ceramic sheets: After soaking and cleaning with aqua regia, then ultrasonic cleaning with deionized water for 1 minute, and finally burning in a high-temperature furnace at 500-600°C for about 2 hours, soaking the clean ceramic sheets separately Activate the surface in freshly prepared stannous chloride solution (30 g/L) and silver ammonia solution (10 g/L) for 10 minutes each;

3)复合镀膜:在处理好的陶瓷基片上,采用无电极复合镀膜的方法,将纳米二氧化锡、钯和金沉积在陶瓷基片上构成镀膜层,将经过预处理的陶瓷片转移到盛有亚硫酸钠、氯化钯、纳米二氧化锡的水溶液中,加入适量亚硫酸金钠和甲醛,20分钟后陶瓷片表面上生成一层灰色均匀薄膜;3) Composite coating: On the treated ceramic substrate, the method of electrodeless composite coating is used to deposit nano-tin dioxide, palladium and gold on the ceramic substrate to form a coating layer, and the pretreated ceramic sheet is transferred to a container. Add appropriate amount of sodium gold sulfite and formaldehyde to the aqueous solution of sodium sulfite, palladium chloride, and nano-tin dioxide, and after 20 minutes, a layer of gray uniform film is formed on the surface of the ceramic sheet;

4)在不同温度下将薄膜干燥后,用鳄鱼夹与导线连接,成为氢气传感器中的钯-纳米二氧化锡膜状电极。4) After drying the film at different temperatures, connect it to a wire with an alligator clip to become a palladium-nano-tin dioxide film electrode in a hydrogen sensor.

本发明所述的氧化铝陶瓷片尺寸为15mm*15mm*2mm。The size of the alumina ceramic sheet of the present invention is 15mm*15mm*2mm.

本发明所述的镀膜层中的钯-锡配比控制在1∶1。The ratio of palladium-tin in the coating layer of the present invention is controlled at 1:1.

氢气传感器主要对其在常温下的传感性能进行测试,Agilent 34901A数据采集器的导线可使用鳄鱼夹与传感器相连,传感器置于可使气体流过的石英管中央。采用本发明钯-纳米二氧化锡膜状电极的氢气传感器的性能检测步骤如下:The hydrogen sensor is mainly tested for its sensing performance at room temperature. The wires of the Agilent 34901A data collector can be connected to the sensor using alligator clips. The sensor is placed in the center of the quartz tube that allows the gas to flow through. The performance detection steps of the hydrogen sensor adopting the palladium-nano tin dioxide film electrode of the present invention are as follows:

● 在性能检测前,通入高纯氮气,直到该氢气传感器出现稳定电阻信号响应;● Before performance testing, feed high-purity nitrogen until the hydrogen sensor responds with a stable resistance signal;

● 持续通入合成空气,待信号稳定,得到稳定的基线电阻信号记为R0● Continuously inject synthetic air until the signal is stable, and obtain a stable baseline resistance signal, which is recorded as R 0 ;

● 通入用氮气稀释的氢气,氢气浓度为2%,持续通入氢气直到信号曲线不再下降而趋于平稳,然后,持续通入合成空气直到信号曲线不再上升而趋于稳定,反复操作多次;● Feed hydrogen diluted with nitrogen, the hydrogen concentration is 2%, continue to feed hydrogen until the signal curve does not fall and become stable, then continue to feed synthetic air until the signal curve does not rise and become stable, repeat the operation repeatedly;

● 使用合成空气进一步稀释氢气,得到1%、0.5%等一系列不同浓度氢气供检测;● Use synthetic air to further dilute hydrogen to obtain a series of hydrogen with different concentrations such as 1% and 0.5% for detection;

● 考察镀层薄膜干燥温度分别为室温、100℃、200℃对传感器性能的影响;● Investigate the effects of the drying temperature of the coating film on the performance of the sensor at room temperature, 100°C, and 200°C;

● 数据处理,将传感器电极通过导线与数据采集器相连,通过计算机程序控制进行数据扫描,采集,将不同测试条件下的传感器响应曲线进行对比分析。● Data processing, connect the sensor electrodes to the data collector through wires, scan and collect data through computer program control, and compare and analyze the sensor response curves under different test conditions.

本发明的优点:本发明钯-纳米二氧化锡薄膜状电极的氢气传感器,由于采用纳米二氧化锡材料,比表面大大增加有利于表面电子转移,增强了检测信号的绝对强度,而钯材料的掺入可提高检测灵敏度,降低检测温度。该传感器灵敏度较高,信号强度达到90%需时少于1分钟,完成脱附大约1~2分钟,重现性和稳定性也较好,随着氢气浓度的增大,响应信号相对强度逐渐增强,信号响应时间随着氢气浓度的增大而略微减少,克服了纯钯薄膜当氢气浓度高时会失去对氢气的传感性能的缺点,也避免了钯膜容易发生氢脆薄膜脱落现象,同时将操作温度降至室温,极大地提高了安全性。本发明钯-纳米二氧化锡薄膜状电极的氢气传感器在放置的一个月中多次测量性能良好,响应时间较短,稳定性和重复性都较好,特别适合于室温检测,而且传感器尺寸微小,加工成本低,便于微型化,集成化和产业化,基底载体的陶瓷片可以回收利用。Advantage of the present invention: the hydrogen sensor of palladium-nanometer tin dioxide thin-film electrode of the present invention, owing to adopt nano-tin dioxide material, specific surface increases greatly and is conducive to surface electron transfer, has strengthened the absolute intensity of detection signal, and the palladium material Incorporation can improve detection sensitivity and reduce detection temperature. The sensor has high sensitivity, it takes less than 1 minute for the signal strength to reach 90%, and it takes about 1 to 2 minutes to complete the desorption. The reproducibility and stability are also good. With the increase of hydrogen concentration, the relative strength of the response signal gradually increases. Enhanced, the signal response time decreases slightly with the increase of the hydrogen concentration, which overcomes the disadvantage that the pure palladium film will lose its sensing performance for hydrogen when the hydrogen concentration is high, and also avoids the phenomenon that the palladium film is prone to hydrogen embrittlement and film shedding. At the same time, the operating temperature is lowered to room temperature, which greatly improves safety. The hydrogen sensor of the palladium-nanometer tin dioxide thin film electrode of the present invention has good measurement performance for many times in one month, the response time is short, the stability and repeatability are good, it is especially suitable for room temperature detection, and the sensor size is small , low processing cost, convenient for miniaturization, integration and industrialization, and the ceramic sheet of the base carrier can be recycled.

附图说明Description of drawings

图1是SnO2-Pd氢气传感器对1%浓度氢气的响应曲线。Figure 1 is the response curve of the SnO 2 -Pd hydrogen sensor to 1% hydrogen concentration.

图2是SnO2-Pd氢气传感器对不同浓度氢气的响应曲线。Fig. 2 is the response curve of the SnO 2 -Pd hydrogen sensor to different concentrations of hydrogen.

图3是不同氢气浓度下,SnO2-Pd薄膜干燥温度对氢气响应的影响。Figure 3 shows the effect of the drying temperature of the SnO 2 -Pd film on the hydrogen response under different hydrogen concentrations.

具体实施方式Detailed ways

  氢气传感器中的钯-纳米二氧化锡薄膜状电极制备方法,是以氧化铝做底片,采用无电极电解的方法将钯和纳米二氧化锡沉积到底片上作为氢敏材料,氢气传感器中的钯-纳米二氧化锡膜状电极制备的工艺步骤包括:纳米二氧化锡的制备、氧化铝陶瓷片的预处理、复合镀膜、后处理等步骤,具体工艺过程如下:   The preparation method of the palladium-nano tin dioxide thin film electrode in the hydrogen sensor is to use aluminum oxide as the negative film, and adopt the method of electroless electrolysis to deposit palladium and nano tin dioxide on the negative film as the hydrogen sensitive material. The palladium in the hydrogen sensor- The process steps of nano-tin dioxide film electrode preparation include: preparation of nano-tin dioxide, pretreatment of alumina ceramic sheet, composite coating, post-treatment and other steps. The specific process is as follows:

●   纳米二氧化锡的制备:将二水合氯化亚锡加入到乙醇溶液中,调节pH到11,并使Sn (二价)浓度达到15.8 mM。将得到的白色悬浊液磁力搅拌1小时后,转移至有Telflon涂层不锈钢锅中在马弗炉120℃下加热6小时,离心并在50℃干燥过夜后得到淡黄色二氧化锡;● Preparation of nano-tin dioxide: Add stannous chloride dihydrate to ethanol solution, adjust the pH to 11, and make the Sn (divalent) concentration reach 15.8 mM. After the obtained white suspension was magnetically stirred for 1 hour, it was transferred to a stainless steel pot with Telflon coating, heated in a muffle furnace at 120°C for 6 hours, centrifuged and dried overnight at 50°C to obtain light yellow tin dioxide;

●   氧化铝陶瓷片(15mm*15mm*2mm)的预处理:用王水浸泡清洗后,再用去离子水超声波振荡清洗1分钟,最后在高温炉中500-600℃灼烧2小时左右,将洁净的陶瓷片分别浸泡在新鲜配制的氯化亚锡溶液(30 g/L)和银氨溶液(10 g/L)中各10分钟,活化其表面;● Pretreatment of alumina ceramic sheets (15mm*15mm*2mm): After soaking and cleaning with aqua regia, ultrasonic vibration cleaning with deionized water for 1 minute, and finally burning in a high-temperature furnace at 500-600°C for about 2 hours, the Soak the clean ceramic sheet in freshly prepared stannous chloride solution (30 g/L) and silver ammonia solution (10 g/L) for 10 minutes each to activate its surface;

●   复合镀膜:将预处理后的陶瓷片转移至盛有0.0143 g Na2SO3、少量PdCl2、与PdCl2约同样量的SnO2粉末、1ml去离子水的小烧杯中,超声振荡10分钟后,将小烧杯移至冰水混合物中,并向小烧杯中加入50 μL Na3Au (SO3)2以及50 μL 甲醛,迅速振荡混匀,静置20分钟后陶瓷片表面上生成一层灰色均匀薄膜;● Composite coating: Transfer the pretreated ceramic sheet to a small beaker filled with 0.0143 g Na 2 SO 3 , a small amount of PdCl 2 , about the same amount of SnO 2 powder as PdCl 2 , and 1ml deionized water, and ultrasonically vibrate for 10 minutes Finally, move the small beaker to the ice-water mixture, and add 50 μL Na 3 Au (SO 3 ) 2 and 50 μL formaldehyde to the small beaker, shake and mix quickly, and after standing for 20 minutes, a layer of gray uniform film;

●   后处理:在不同温度下将薄膜干燥后,用鳄鱼夹与导线连接,成为氢气传感器中的钯-纳米二氧化锡薄膜状电极。● Post-processing: After drying the film at different temperatures, connect it to a wire with an alligator clip to become a palladium-nano tin dioxide film electrode in a hydrogen sensor.

性能检测步骤:Performance testing steps:

●   在性能检测前,通入高纯氮气,室温下直到该氢气传感器出现稳定信号响应;● Before the performance test, inject high-purity nitrogen gas, and wait until the hydrogen sensor shows a stable signal response at room temperature;

●   持续通入合成空气,待信号稳定,通入浓度为1%的氢气体样品检测,传感器在室温对1%浓度氢气的检测曲线见附图1。由曲线图可以看出该氢气传感器具有较高的灵敏度;传感器的响应非常迅速和稳定,信号强度从基线达到90%需时少于1分钟,响应信号值趋于稳定,当氢气浓度不变时信号保持稳定,表现为一个较为稳定的平台;当气流从1%氢气切换到合成空气后,氢气脱附过程所需要的时间大约1~2分钟,该氢气传感器信号值再次出现稳定平台,信号值回归到初始大小,完成了一个检测循环;● Continuously inject synthetic air, wait for the signal to be stable, and then inject a hydrogen gas sample with a concentration of 1% for detection. The detection curve of the sensor for 1% hydrogen gas at room temperature is shown in Figure 1. It can be seen from the graph that the hydrogen sensor has high sensitivity; the response of the sensor is very fast and stable, and it takes less than 1 minute for the signal strength to reach 90% from the baseline, and the response signal value tends to be stable. The signal remains stable, showing a relatively stable platform; when the gas flow is switched from 1% hydrogen to synthetic air, the time required for the hydrogen desorption process is about 1 to 2 minutes, and the signal value of the hydrogen sensor appears a stable platform again, and the signal value Return to the initial size and complete a detection cycle;

●   通入浓度为0.5%、1%、2%等不连续浓度的氢气,持续通入混合气体直到信号曲线不再改变而趋于平稳,然后,持续通入合成空气到信号曲线不再变化而趋于稳定,反复操作多次,重复性检测结果见附图2,由图2曲线图可以看出,该氢气传感器具有较好的重复性,由同一浓度氢气造成的阻值下降幅度基本相同,氢气浓度越高阻值变化幅度越大;● Introduce hydrogen gas with discontinuous concentrations of 0.5%, 1%, 2%, etc., and continue to infuse the mixed gas until the signal curve does not change and becomes stable. Then, continue to infuse synthetic air until the signal curve does not change and becomes stable. It tends to be stable, repeated operations many times, and the repeatability test results are shown in Figure 2. It can be seen from the graph in Figure 2 that the hydrogen sensor has good repeatability, and the resistance value drop caused by the same concentration of hydrogen is basically the same. The higher the hydrogen concentration, the greater the resistance value change;

●   将同一片薄膜电极分别在室温、100℃、200℃干燥,检测对不同浓度氢气的响应,结果见附图3。由图3可以看出,在100 ℃干燥后比在室温干燥的薄膜电极对氢气信号响应略有上升;在200 ℃干燥后对氢气信号响应大幅削弱,原因很可能是纳米二氧化锡受热形态发生改变,在室温干燥的薄膜电极已经表现出足够的灵敏度,所以一般不再进行额外加热处理,工艺更简洁。● Dry the same thin-film electrode at room temperature, 100°C, and 200°C, and test the response to different concentrations of hydrogen. The results are shown in Figure 3. It can be seen from Figure 3 that after drying at 100 ℃, the response to hydrogen signal is slightly higher than that of the thin film electrode dried at room temperature; after drying at 200 ℃, the response to hydrogen signal is greatly weakened, which is probably due to the thermal morphology of nano-tin dioxide. Change, the film electrode dried at room temperature has already shown sufficient sensitivity, so generally no additional heating treatment is required, and the process is simpler.

Claims (4)

1.一种氢气传感器中的钯-纳米二氧化锡薄膜状电极制备方法,其特征是以氧化铝做底片,采用无电极电解的方法将钯和纳米二氧化锡沉积到底片上作为氢敏材料,步骤如下:1. a palladium-nanometer tin dioxide thin-film electrode preparation method in a hydrogen sensor, is characterized in that aluminum oxide is used as a negative film, and palladium and nano tin dioxide are deposited on the negative film as a hydrogen sensitive material by means of electroless electrolysis, Proceed as follows: 1)纳米二氧化锡的制备:使用水热法合成纳米二氧化锡,将二水合氯化亚锡加入到乙醇溶液中,调节pH到11,将得到的悬浊液搅拌1小时后,在120℃下加热6小时,离心并在50℃干燥过夜后得到淡黄色二氧化锡;1) Preparation of nano-tin dioxide: use the hydrothermal method to synthesize nano-tin dioxide, add stannous chloride dihydrate to the ethanol solution, adjust the pH to 11, stir the obtained suspension for 1 hour, After heating at ℃ for 6 hours, centrifuging and drying at 50℃ overnight, light yellow tin dioxide was obtained; 2)氧化铝陶瓷片的预处理:用王水浸泡清洗后,再用去离子水超声波振荡清洗1分钟,最后在高温炉中500-600℃灼烧2小时左右,将洁净的陶瓷片分别浸泡在新鲜配制的氯化亚锡溶液(30 g/L)和银氨溶液(10 g/L)中各10分钟,活化其表面;2) Pretreatment of alumina ceramic sheets: After soaking and cleaning with aqua regia, then ultrasonic cleaning with deionized water for 1 minute, and finally burning in a high-temperature furnace at 500-600°C for about 2 hours, soaking the clean ceramic sheets separately Activate the surface in freshly prepared stannous chloride solution (30 g/L) and silver ammonia solution (10 g/L) for 10 minutes each; 3)复合镀膜:在处理好的陶瓷基片上,采用无电极复合镀膜的方法,将纳米二氧化锡、钯和金沉积在陶瓷基片上构成镀膜层,将经过预处理的陶瓷片转移到盛有亚硫酸钠、氯化钯、纳米二氧化锡的水溶液中,加入适量亚硫酸金钠和甲醛,20分钟后陶瓷片表面上生成一层灰色均匀薄膜;3) Composite coating: On the treated ceramic substrate, the method of electrodeless composite coating is used to deposit nano-tin dioxide, palladium and gold on the ceramic substrate to form a coating layer, and the pretreated ceramic sheet is transferred to a container. Add appropriate amount of sodium gold sulfite and formaldehyde to the aqueous solution of sodium sulfite, palladium chloride, and nano-tin dioxide, and after 20 minutes, a layer of gray uniform film is formed on the surface of the ceramic sheet; 4)在不同温度下将薄膜干燥后,用鳄鱼夹与导线连接,成为氢气传感器中的钯-纳米二氧化锡膜状电极。4) After drying the film at different temperatures, connect it to a wire with an alligator clip to become a palladium-nano-tin dioxide film electrode in a hydrogen sensor. 2.根据权利要求1所述的氢气传感器中的钯-纳米二氧化锡膜状电极制备方法,其特征是所述的氧化铝陶瓷片尺寸为15mm*15mm*2mm。2. The method for preparing the palladium-nanometer tin dioxide film electrode in the hydrogen sensor according to claim 1, characterized in that the size of the alumina ceramic sheet is 15mm*15mm*2mm. 3.根据权利要求1所述的氢气传感器中的钯-纳米二氧化锡膜状电极制备方法,其特征是所述的镀膜层中的钯-锡配比控制在1∶1。3. The method for preparing the palladium-nano-tin dioxide film electrode in the hydrogen sensor according to claim 1, characterized in that the palladium-tin ratio in the coating layer is controlled at 1:1. 4.根据权利要求1所述的制备方法获得的钯-纳米二氧化锡膜状电极的氢气传感器的性能检测方法,其步骤是:4. the performance detection method of the hydrogen sensor of the palladium-nanometer tin dioxide film electrode that preparation method obtains according to claim 1, its steps are: a、数据采集器的导线可使用鳄鱼夹与传感器相连,传感器置于可使气体流过的石英管中央;a. The wires of the data collector can be connected to the sensor using alligator clips, and the sensor is placed in the center of the quartz tube that allows the gas to flow through; b、在性能检测前,通入高纯氮气,直到该氢气传感器出现稳定电阻信号响应;b. Before the performance test, feed high-purity nitrogen until the hydrogen sensor responds with a stable resistance signal; c、持续通入合成空气,待信号稳定,得到稳定的电阻信号记为R0; c. Continuously feed synthetic air until the signal is stable, and obtain a stable resistance signal, which is recorded as R 0 ; d、通入用氮气稀释的氢气,氢气浓度为2%,持续通入氢气直到信号曲线不再下降而趋于平稳,然后,持续通入合成空气直到信号曲线不再上升而趋于稳定,反复操作多次;d. Pass in hydrogen diluted with nitrogen, the hydrogen concentration is 2%, continue to pass in hydrogen until the signal curve no longer drops and becomes stable, and then continue to pass in synthetic air until the signal curve does not rise and becomes stable, repeat operate multiple times; e、使用合成空气进一步稀释氢气,得到1%、0.5%等一系列不同浓度氢气供检测;e. Use synthetic air to further dilute hydrogen to obtain a series of hydrogen with different concentrations such as 1% and 0.5% for detection; f、考察镀层薄膜干燥温度分别为室温、100℃、200℃对传感器性能的影响;f. Investigate the effects of the drying temperature of the coating film on the performance of the sensor at room temperature, 100°C, and 200°C; g、数据处理,将传感器电极通过导线与数据采集器相连,通过计算机程序控制进行数据扫描,采集,将不同测试条件下的传感器响应曲线进行对比分析。g. Data processing: connect the sensor electrodes to the data collector through wires, scan and collect data through computer program control, and compare and analyze the sensor response curves under different test conditions.
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