CN101929965B - charged particle detection device and detection method - Google Patents

Abstract

A charged particle detector apparatus includes a lens having a central aperture through which an incident charged particle beam passes, formed by assembling a plurality of individual light guide modules, surrounding the detector apparatus. The component is coated or combined with a scintillating material on the surface opposite to the test piece to be used as a charged particle detection surface. Each light guide module is coupled to a photomultiplier tube so that the optical signals transmitted from each light guide module can be amplified and processed separately. The charged particle detector is made of a monolithic photoconductive material, and has a cone-shaped end surface hollowed out of one surface thereof, the cone having an opening at the end thereof for allowing the incident charged particle beam to pass therethrough, and a scintillator material coated or bonded to the opposite surface as a charged particle detection surface. The outside of the light guide block is processed into four independent light signal output channels, and each output channel is coupled with a photomultiplier tube so that the output signals of the channels can be amplified and processed respectively.

Description

Charged particle detection device and detection method

This application is hereby referenced for the disclosures of US Patent Application Nos. 11/668846 and 12/371182.

technical field

The present invention relates to a detection device (detection devices) and a detection method, in particular to a charged particle detection device (charged particles detection devices) and a detection method.

Background technique

Charged particle detection devices are an integral part of charged particle (ion and electron beam) instruments, such as scanning electron microscopes. In a scanning electron microscope (S.E.M), the electron beam is emitted from the electron source and focused into a microprobe on the surface of the test piece, and is scanned line by line through the deflection unit (in a raster fashion), while on the test piece The signal electrons released from the surface, including secondary electrons and back scattered electrons, are collected by the charged particle detection device, and their signal intensity will be converted into the corresponding electron probe position on the surface of the test piece. Grayscale image pixels. The scanning of the electronic probe will form a grayscale correspondence to generate an image of the test piece surface. Since the signal electrons are mainly secondary electrons, low-voltage scanning electron microscopes with an incident electron beam energy of less than 3keV or lower are considered to be particularly effective in evaluating the surface topography of a test piece. Secondary electrons originate from the shallow surface of the test piece, and their output rate and trajectory are affected by the surface topography, so they carry information about the surface topography.

Generally, the most commonly used detection devices in scanning electron microscopes are combined scintillator-photomultiplier tube (such as Everhart-Thornley detection device), semiconductor type (semiconductor type) and microchannel plate type (microchannel platetype, MCP) . Due to the high gain and low noise of the scintillator-photomultiplier tube detection device, it is often used in high-resolution scanning electron microscopes with low current electron beams. Also, the scintillation photomultiplier tube detection device generally includes a light guide rod previously coated with a light-generating scintillator and combined with the photomultiplier tube as a unit part. The general configuration is to place one or more of the above-mentioned unit parts under the final focusing objective lens and surround the periphery of the impact point of the incident electron beam. The secondary electrons emitted by the sheet form a lateral detection method. Fig. 1 is a schematic diagram of the basic structure of a conventional scanning electron microscope. The lateral detection device 108 is placed between the objective lens 103 and the test piece 104 . Recently, the demand for high-resolution low-voltage scanning electron microscopes has increased, and the reason why an immersion type objective lens scanning electron microscope (S.E.M. with an immersion type of objective lens) is widely used is that it has small electron-optical aberrations , and can provide finer electronic probes. In SEMs with immersion objectives, the specimen is immersed in the powerful focusing magnetic field of the objective, and an electrostatic extraction field is usually superimposed on it. Although the main function of the magnetic field is to focus the incident electron beam, it also confines the trajectory of the secondary electrons so that it is close to the central optical axis, and sends those electrons pulled from the test piece 104 by the electrostatic field into the center of the objective lens 103. hole. In this case, the side detector 108 will not receive any secondary electrons and in-lens detectors must be used. The advantage of the lateral detection device is that it can detect the three-dimensional image information of the sample, while the advantage of the in-lens detection device is its high detection efficiency. In order to detect more information on the image of the sample, the present invention proposes a multi-channel detection system in the lens, in which multiple receiving channels will be symmetrically distributed around the incident electron beam, forming an on-axis detection system (on-axis detection system).

The multi-channel detection system can enhance the characteristics of the surface pattern of the test piece without tilting the test piece. The detection device in this detection system is divided into two equal parts or four equal parts, and the output signal of each part corresponds to processing and displaying separately. This concept is often applied to off-lens detection systems. As shown in FIG. 1 , a segmented Robinson detector 120 in front of the lens is placed on the bottom surface of the objective lens 103 and faces the test piece 104 to receive signals mainly of backscattered electrons. Each block of the detection device 120 has an independent receiving channel to generate images. Signals from each channel of the detection device 120 will be processed including addition, multiplication or subtraction to provide a large amount of information on the test strip 104 including image and material information.

On-axis in-lens detectors facilitate system resolution relative to off-axis detectors. The detection device in the off-axis lens requires a Wien filter (Wien filter electromagnetic field deflector) to bend the secondary electrons off the axis and guide them to the detection device. Bending the secondary electrons off-axis induces secondary aberrations in the incident electron beam and reduces the resolution of the system.

The ring-shaped and symmetrical arrangement of multiple receiving channels can describe the three-dimensional image of the sample surface. As shown in Figure 2, under the influence of the magnetic field focusing from the objective lens 203, the secondary electrons 205B are emitted from the side surface 204L of the surface topography 208, pass through the optical axis and hit the half part 206B of the detection device, while another secondary electron 205A is emitted from the side surface 204R, passes through the optical axis and hits the other half of the detection device 206A. When the two signals generated from the two halves are added and processed, as in the detection device without blocks, both edges of the surface topography 208 appear as bright spots in the image (as shown in the line diagram 2A), although there are More secondary electrons 205A or 205B are emitted along the sidewall area, but it is still difficult to distinguish whether the surface topography 208 is a convex portion or a concave portion. However, if the signals from each half are displayed separately, the shadow effect (shadow effect) will cause one side of the surface topography 208 to be brighter and the other side to be darker, as shown in the line diagram 2B from the half of the detection device 206A, while line graph 2C shows the signal from the other half of the detection device 206B. A three-dimensional effect is then created and makes the surface topography 208 a protrusion. For the dual-channel detection device 109 surrounded by both sides of the incident electron beam as shown in FIG. Meaningful three-dimensional images.

A detection device that has never been manufactured or reported to overcome this problem is configured using a multi-receiving channel detection system annular in-lens on-axissymmetrically distributed, such as the lens intrinsic axis Scintillation photomultiplier tube, semiconductor, or micro-plate type detection devices for multi-block receiving channels.

At present, regardless of the on-axis single detection device or the multiple detection device arranged around the central optical axis, it is often connected with the reflector 107. When the reflector 107 is hit by the secondary electrons and backscattered electrons from the test piece, it will also generate The self secondary electrons are collected by the detection device. These structural configurations are shown in FIG. 1. Through the cooperation of the multi-lens internal detection devices 106A and 106B arranged in an off-axis manner with the reflector 107, the two-piece detection device 109 encloses both sides of the optical axis, and the single scintillation photomultiplier tube detection device placed on the optical axis. For the configuration of multiple detection devices, this configuration is more complicated, and due to the relationship between the space intervals between each detection device, the signal collection efficiency is only general; Due to the rotationally symmetric nature, it is difficult to collect a uniform signal.

Therefore, there is a need for innovative design of charged particle detection devices, so that the high-efficiency and space-saving block type multi-receiving channel lens inner axis surround detection configuration or its equivalent device can cooperate with scintillation photomultiplier tubes, semiconductors or micron plates, etc. The detection device of the form is realized.

Contents of the invention

The present invention aims to provide a design of a multi-receiving channel detection system in which the inner axis of the lens is symmetrically distributed around. The detection device can be a scintillation photomultiplier tube, a semiconductor type or a micron plate type, and includes one or more light guide modules configured in a rotationally symmetrical configuration to represent multiple receivers distributed symmetrically around the inner axis of the lens of the on-axis detector using blocks. Channel detection system.

In an exemplary embodiment of the charged particle detection device according to the present invention, four light guide modules form a single component in a rotationally symmetrical configuration, forming a square opening at the central optical axis for the incident charged particle beam to pass through. This component faces the plane of the test piece to coat or couple the scintillator material. Except that the coupling surface with the photomultiplier tube module is not coated with aluminum, each light guide module is coated with aluminum to facilitate internal light reflection and isolate the light of two adjacent light guide modules, so that the signal received from each prism can be transmitted separately , enlargement and processing.

Another embodiment of a charged particle detection device according to the present invention is a processed single light guide material. A conical shape is machined from one side and ends at the other side, with an opening at the tip for the incident charged particle beam to pass through. The side where the cone tip is located is coated or coupled with scintillation material. The outer area of the light guide block is machined into four light guide channels, which are coupled with photomultiplier tube modules. Except for the light entrance and light exit surfaces, all light guide parts are coated with aluminum to facilitate internal light reflection.

Accordingly, the present invention provides a charged particle detection device for detecting secondary electrons, backscattered electrons or ions. In the charged particle detection device, the charged particle detection component includes a plurality of detection blocks, and each detection block is coupled with a preamplifier to amplify the output signal of the detection block. In addition, each detection block contains a charged particle detection module with a charged particle receiving part and a detection signal generating part. When the charged particle receiving part is bombarded by a charged particle beam, the detection signal generating part will generate an output signal;

And the plurality of charged particle detection modules are coupled into a surrounding symmetrical configuration, and there is an opening on the central axis of symmetry, the detection surfaces of each of the charged particle detection modules are coplanarly arranged and aligned to form a charged particle receiving plane, and each A surface of the charged particle detection module opposite to the charged particle receiving plane is a slope or a curved surface with a single slope or different slopes, wherein the central axis of symmetry is the incident light axis.

The present invention also provides a detection method for charged particles, comprising:

providing an incident electron beam;

focusing the incident electron beam;

focusing the concentrated electron beam into an electron beam probe using a probe forming objective;

providing a deflecting electron beam unit;

Provide a test piece;

The deflecting electron beam unit causes the formed electron beam probe to scan the surface of the test piece in a progressive scanning manner;

A charged particle detection device is provided, wherein the charged particle detection device includes a charged particle detection component, the charged particle detection component includes a plurality of detection blocks, and each of the detection blocks is coupled with a preamplifier to amplify The output signal of the detection block, wherein each of the detection blocks includes a charged particle detection module, which has a mutually coupled charged particle receiving place and a detection signal generating place, and is detected at the charged particle receiving place When the charged particle beam is bombarded, the detection signal generator generates the output signal, wherein the plurality of charged particle detection modules are coupled into a symmetrical configuration around the optical axis, with an opening on the central axis of symmetry, and each of the charged particle detection modules is The particle detection modules are coplanarly arranged and aligned to form an equivalent plane, and a surface opposite to the equivalent plane in each of the charged particle detection modules is a slope or a curved surface with a single slope or different slopes, and the equivalent plane is the charged particle receiving plane of the charged particle detection device; and

The charged particle detection device causes surface electrons released by bombardment of the test piece by the electron beam probe to be received at the charged particle receiving site.

The details of one or more embodiments of the present invention are set forth in the following discussion and accompanying drawings, and other features, objects, and techniques of the present invention can be obtained from each embodiment in conjunction with the claims.

Description of drawings

FIG. 1 is a schematic diagram of the prior art structure of an electron detection system of a scanning electron microscope.

Fig. 2 is a schematic structural diagram of a conventional scanning electron microscope with a magnetic field immersion objective lens and an on-axis detection device, and illustrates the benefits of using the block-type lens inner axis around the detection device to improve surface features.

3A to 3J are schematic diagrams of components of a detection device according to an embodiment of the present invention.

4A to 4J are schematic diagrams of components of a detection device according to an embodiment of the present invention.

5A to 5H are schematic diagrams of components of a detection device according to an embodiment of the present invention.

FIG. 6 is a schematic diagram of components of a detection device according to an embodiment of the present invention.

FIG. 7 is a schematic diagram of the structure of a scintillation detection device assembly installed in a scanning electron microscope as a detection device around the inner axis of a block lens according to the present invention.

Fig. 8 is a structural schematic diagram of a multi-receiving channel detection system installed symmetrically around the inner axis of a block lens in a scanning electron microscope according to the present invention.

Figure 9 shows a six receive channel system. Intrinsic Axis Surrounding Detection System for Block Lens can have two or more receiving channels.

Figure 10 is a schematic diagram of the semiconductor formula.

Fig. 11 is a schematic structural diagram of a micro/multi-channel plate detection device.

Detailed ways

The detection device and more specifically the charged particle detection device are explained here. The described embodiments are only to illustrate the technical ideas and characteristics of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. When the present invention cannot be limited by this, that is, all Equivalent changes or modifications made within the spirit of the present invention shall still be covered by the claims of the present invention.

The charged particle detection assembly according to the first embodiment of the present invention will be described in detail with reference to FIGS. 3A to 3J . 3A to 3C are respectively an oblique top view, an oblique bottom view and a top view of the light guide detection assembly 300 . As shown in FIGS. 3A and 3D , four individual triangular prisms 301 are configured in an off-center configuration to form a light guide assembly 300 with a square opening 303 in the center, as shown in FIG. 3C . Before assembly, one side 304 of the triangular prism 301 is coated with a scintillation material (eg phosphorescent material P47) to form a detection surface. Next, all sides of the triangular prism 301 except one side 304 are coated with aluminum or other reflective materials to facilitate internal reflection and isolate light between adjacent modules. Next, the four prisms 301 are arranged such that the four sides 304 are coplanar to form a flat detection surface 305 , as shown in FIG. 3B . The co-plane 305 is the signal receiving part of the detection component, and the area where the scintillation material is coated is the signal generation part of the detection component. As shown in FIG. 3C , the prism 301 is slightly offset laterally relative to the central opening 303 . Viewed from the top, the light guide assembly 300 is 90-degree rotationally symmetric, but not mirror-symmetrical to the central axis of the central opening 303 . Such a simple configuration can be constructed without any modification using commercially available prisms. For example, a general rectangular prism can be used. When installed in a charged particle instrument, opening 303 will be aligned with the central optical axis of the instrument to allow passage of the incident charged particle beam. In an embodiment of the present invention, the angle θ between the side 304 and the side 306 of the prism 301 may be between 0 and 90 degrees, as shown in FIG. 3D . It should be noted here that the embodiment uses the triangular prism 301 as the light guide, but it is not limited to use the triangular prism as the light guide. When considering the light collection efficiency, different shapes and curves of the sides 306 can be applied. For example, side 306 may be divided into several planar sections of different slopes. FIG. 3E is an oblique top view of an embodiment showing a light guide assembly with two planar segments 307 and 308 with different slopes. The side surface 306 can be in the following curved shape, such as circular, parabolic, spherical or other curved or flat surfaces. FIG. 3G is an oblique top view of the embodiment, and the side 306 is a circular curved surface. (Its side view is shown in Figure 3H). As shown in FIG. 3I, the side 302 of the light guide section (prism 301) is coupled to a photomultiplier tube module 309, so that the section light signals transmitted through the light guide can be individually converted, amplified and processed. The photomultiplier tube is It is a pre-amplification module for signals. It is easy to understand the configuration of the on-axis detection device with four identical and independent blocks, because in this embodiment, the photomultiplier tube module 309 is in direct contact with one side of the light guide block, which can make the overall structure and The loss of light intensity is minimized. However, within the scope of the present invention, the photomultiplier tube 309 and the side surface 302 of the light guide block can also be combined with a section of solid or hollow light guide extension tube or fiber optic light guide section. In the embodiment shown in FIG. 3J , the adjacent surfaces 310 and inclined surfaces 311 form a prism light guiding block. In addition, all sides of the light guide block will be coated with aluminum or other reflective material to facilitate internal light reflection, except for the face 312 where the add-on module is connected.

A charged particle detection device according to another embodiment of the present invention will be described in detail with reference to FIGS. 4A to 4J . 4A to 4C are oblique, top and side views of the triangular prism light guide block 401, respectively. There are two symmetrical 45-degree chamfered surfaces 402 at the junction of the side surface 403 and the side surface 404 , and the two chamfered surfaces form a 90-degree angle β at the front plane 405 . Face 404 is pre-coated with a scintillation material (eg, phosphor scintillation material P47) to form the detection face. Next, all sides of the light guide block 401, except face 406, are coated with aluminum or other reflective material to facilitate internal light reflection and isolate light between adjacent modules. A plurality of light guide blocks 401 are combined by chamfered surfaces 402 to form a single detection device light guide assembly 400 , and its oblique top view, oblique bottom view and top view are respectively shown in FIGS. 4D to 4F . The surfaces 404 of these blocks are coplanarly aligned to form a flat detection surface 407. The coplanar surface 407 is the signal receiving part of the detection component, and the area where the scintillation material is coated is the signal generation part of the detection component. As shown in Figure 4E. The front plane 405 of each block forms a square central hole 408, as shown in top view 4F. Viewed from above the entire assembly, the assembly is not only 90-degree rotationally symmetrical, but also mirror-symmetrical to two orthogonal axes 410 , 411 passing through the center of the opening 408 . This configuration describes a completely symmetrical signal collection. When installed in a charged particle instrument, the opening 408 will be aligned with the central optical axis of the instrument for the passage of the incident charged particle beam. According to the present invention, the angle α between the side 403 and the surface 404 of any light guiding block can be 0 to 90 degrees, as shown in FIG. 4C . The surface 406 of each light guide block is coupled with the photomultiplier tube module 420, so that the optical signals from each light guide block can be converted, amplified and processed respectively. The photomultiplier tube is the signal pre-amplification module, as shown in Figure 4G shown. Because the sides are coated with light reflective material before adjacent prism light guide blocks 401 are assembled together, the light passing through individual blocks will not cross over to other blocks. Such configuration of four identical and independent detection blocks constitutes an on-axis surround detection device. In this embodiment, the function of the straight light guide section 409 is to reduce the volume and reduce the loss of light intensity. However, according to actual needs, solid or hollow light guides or fiber optic light guides of different lengths and shapes can be combined before the photomultiplier tube 420 . In the case of the above-mentioned embodiment, the use of the front slope of the triangular prism to make the prism light guide block 401 is only one embodiment, and is not limited thereto. Considering the light collection efficiency, the surface 403 can have different shapes and curves. For example, it may be a section composed of a plurality of straight surfaces with different slopes or a combination of the following curves, such as circular, parabolic, spherical or any curved surface or surface. FIG. 4J shows one embodiment thereof. The surface 403 of the light guiding block 401 of this embodiment is a circular curved surface. Its oblique view is shown in FIG. 4H , and its side view is shown in FIG. 4I .

According to the above disclosure, four independent light guide blocks can be assembled together to form a configuration around the axis block. This configuration makes the signal distribution symmetrical across two orthogonal axes (the X and Y axes of the image). However, to simplify the process, a light guide assembly similar to this configuration around the shaft block can also be fabricated using a single piece of material. This type of charged particle detection device according to an embodiment of the present invention will be described in detail with reference to FIGS. 5A to 5H . As shown in FIG. 5A , a rectangular block-shaped light guide material 501 is prepared first, and then a central hole 503 is made in the center of the light guide material 501 . As shown in FIG. 5B , the cone shape 502 is dug from one side of the central hole 503 to the opposite side. Unnecessary part of the material on the rectangular block is removed to form four extended light guiding paths each having a face 505, as shown in FIG. 5D. 5C to 5E are respectively a top view, an oblique top view, and an oblique bottom view of the finally formed light guide module 500 . The bottom surface 504 including the central hole 503 is coated with scintillation material as the detection surface of charged particles, the bottom surface 504 is the signal receiving part of the detection component, and the area coated with scintillation material is the signal generation part of the detection component. All sides except face 505 are coated with aluminum or other reflective material to facilitate internal light reflection. When installed in a charged particle instrument, the central aperture 503 is aligned with the central optical axis of the instrument to pass the incident charged particle beam. Each side 505 is combined with a photomultiplier tube module 507, so that the optical signals output from the corresponding side 505 can be converted, amplified and processed respectively. The photomultiplier tube is the signal pre-amplification module, as shown in Figure 5F . Since this embodiment only contains a single material, light may be output from the detection surface 504 to either side 505 . However, by choosing an appropriate shape of the light reflecting surface 506 , most of the light output from each side 505 can come from the detection quadrant directly in front of the side 505 . According to the present invention, the reflective surface 506 can be a different curved surface. For example, the reflective surface can be composed of a plurality of straight line segments with different slopes, or have a curved appearance, such as a circle, a parabola or other shapes. FIG. 5G is an embodiment, and FIG. 5H is a schematic cross-sectional view when the reflective surface 506 is a circular curve. also. Although the embodiment of the present invention uses four separate light guide output paths, in some applications, the number of output paths of the light guide may be other than four when four output paths are not available in the axis block surround configuration.

The bottom of the photoconductive block in all the above-mentioned embodiments is coated with a scintillation material as a charged particle detection surface, so as to achieve the best light conversion efficiency. However, some scintillation materials are difficult to coat directly on the surface of light-guiding materials, and can only be realized on pre-coated materials such as single crystals. Therefore, an alternative approach is to use a single piece of scintillation material (such as a single chip of yttrium orthoaluminate (YAP) or yttrium aluminum garnet (YAG) material, or coated in one piece (such as glass coated with phosphorous scintillation material). or quartz sheet), and then attach it to the bottom of the light guide assembly using epoxy resin or mechanical tools. In this embodiment, the part of the bottom surface of the light guide block that is bonded to the scintillation material will not be coated with aluminum or other optical Reflective material, in order to be beneficial to light transmission.Fig. 6 is the schematic diagram of this embodiment, and the light guide detection assembly that scintillation disc 600 and prism light guide assembly 400 (as shown in Figure 4E) as previously described is formed is example.Connect with coplanar 407 The scintillation disc 600 can be a single crystal of scintillation material or a light guide coated with scintillation material on the surface 601. The common plane 407 is the signal receiving part of the detection component, and the scintillation disc 600 is the signal generation part of the detection component. When installed in a charged particle instrument, the central opening 602 of the scintillation disc 600 needs to be aligned with the central opening 408 of the component 400 to facilitate the passage of the incident charged particle beam.

The embodiment of the above-mentioned charged particle detection device disclosed in the present invention is combined into a structure of a charged particle beam instrument, as shown in FIG. 7 . According to the present invention, the scanning electron microscope 700 of the figure includes an electron source 701, a focusing lens 702, a magnetic field objective lens 705, a deflection unit 706, a test piece 707 and a detection device 703 surrounding the axis block, and a central hole 704 of the detection device 703 Aligned with the optical axis 711 of the scanning electron microscope 700 . In this embodiment, the detection device is only illustrated by the detection device shown in FIG. 4G , and for clarity, only two detection quadrants are shown, such as 703A and 703B in the drawing. Other embodiments are all described in this manner. The incident electron beam 710 is emitted from the electron source, passes through the central hole 704 of the detection device 703, hits the surface of the test piece and generates secondary electrons and backscattered electrons. The trajectories of the two secondary electrons are shown as 709A and 709B in the diagram. The two secondary electrons are emitted from both sides of the surface topography 708 in different directions, 709A to the left and 709B to the right. Before the secondary electrons reach the corresponding quadrant on the detection device, they are combined by the wetting magnetic field and the decelerating electric field. Electrons are drawn into the central hole of magnetic field objective 705 and interleaved at central optical axis 711 such that electrons from 709A arrive at 703B and electrons from 709B arrive at 703A. The signals collected from the opposite quadrants on the detection device are independently output, rendering an image of the surface topography 708 by the edge shading effect of the opposite quadrants. The specific diagram of the scanning electron microscope in Fig. 7 by no means means that the present invention is limited to the above-mentioned configuration in the application of SEM. Embodiments of the present invention can be applied in a similar manner to charged particle instruments of various configurations.

Fig. 8 is an embodiment of the present invention: a schematic structural diagram of a lens intrinsic axis detection system. The illustrated scanning electron microscope 800 includes an electron emission source 801 to generate an incident electron beam 811; a focusing lens module 802 to gather the incident electron beam 811; a deflecting electron beam module (not shown) to allow the electron beam probe to scan The surface of the test piece 817 and the charged particle detection device 808 . The illustrated charged particle detection device 808 is further illustrated in FIG. 9 . As shown in FIGS. 8 and 9 , the exemplary charged particle detection device 808 includes a central hole 904 aligned with the optical axis (referred to as 811 ) of the scanning electron microscope 800 . The illustrated charged particle detection device 808 is used to receive electrons released from the test piece 817 after being bombarded by the electron beam. The central aperture 904 is configured to align with the central optical axis 811 of the scanning electron microscope 800 in order to pass the incident electron beam 811 .

As shown in FIG. 9 , the charged particle detection device 808 includes a charged particle detection assembly including a plurality of detection sections 903A. Each detection section 903A is coupled to an independent preamplifier 901, and the independent preamplifier 901 is used to amplify the output signal from the corresponding detection section 903A. FIG. 10 is a schematic cross-sectional structure diagram of a semiconductor detection device implemented by the detection module 900 according to the method of the present invention. As shown in the figure, the semiconductor detection device includes a first conductive layer 911 , a P-type semiconductor layer 912 , an intrinsic semiconductor layer 913 , an N-type semiconductor layer 914 and a second conductive layer 915 . In an embodiment, the first conductive layer 911 is made of aluminum. The p-type semiconductor layer 912 is a p-type heavily doped silicon layer. The intrinsic semiconductor layer 913 is made of silicon. The n-type semiconductor layer 914 is an n-type lightly doped silicon layer. The second conductive layer 915 is made of gold. Therefore, the semiconductor structure can be used as a semiconductor diode detection device with a p-i-n junction. The first conductive layer 911 and the second conductive layer 915 serve as electrodes. In this embodiment, the first conductive layer 911 is coupled with an external conductive component 916 to output a detection signal. The second conductive layer 915 is grounded. Electron beams are incident on the first conductive layer 911 . The operating principle of the semiconductor detection module 900 is that when electrons with energy collide with the semiconductor, they will tend to consume their energy by generating electron-hole pairs. The number of electron-hole pairs will depend on the initial electron energy, so electrons with higher energy will tend to generate more detection signals. The holes will tend to migrate to the electrodes of the detection module 900 , and the electrons will migrate to another electrode, thus forming a current whose magnitude depends on the electric flux and the energy of the electrons.

FIG. 11 is a schematic cross-sectional structural view of a detection module 900 implemented in a multi-channel plate-type detection device according to an embodiment of the present invention. As shown, the illustrated multi-channel plate assay device includes a plate 921 containing a number of tubes 922 extending from one end to the other. The panel has an "electron in" side 9211 and an "electron out" side 9212. In addition, there are electrodes on each side of the plate that are respectively coupled to the input end of the multi-channel plate detection device and the output end of the multi-channel plate detection device, wherein the electrodes on the "electron entry" surface 9211 are grounded or have a slightly negative potential, while the electrodes on the "electron entry" The "output" face 9212 is substantially positive. The tube 922 is coated with a material having a high yield of secondary electrons, such as those that release secondary electrons when bombarded by energetic particles. In practice, secondary/backscattered electrons from the SEM coupon strike the interior of the tube 922 (or the front side electrode, which also generates secondary electrons), releasing multiple electrons from the coating material . These generated electrons will be accelerated along the inside of the tube 922 due to the potential difference between the electrodes on both sides, and more electrons will be generated by hitting the tube wall somewhere, and this process is repeated continuously. This avalanche phenomenon causes each initial signal electron to generate a measurable current, which can be regarded as a signal. Therefore, such a multi-channel plate detection device is suitable for use in the detection device of the present invention.

The above-described embodiments are only to illustrate the technical ideas and characteristics of the present invention, and its purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and can not limit the present invention with this, that is, everything according to the present invention Equivalent changes or modifications made in the spirit of the disclosure shall still be covered by the claims of the present invention.

Claims (7)

1. a detection of charged particles device is used for detecting secondary electron, backscattering electronics or ion, and said detection of charged particles device comprises:

One detection of charged particles assembly: comprise a plurality of detection blocks, the coupling of each said detection block and a prime amplifier, amplifying the output signal of said detection block,

Wherein, Each said detection block comprises a detection of charged particles module; It has charged particle reception place and detection signal generation place that mutually combines, and when reception place of said charged particle was bombarded by charged particle beam, generation place of said detection signal produced said output signal; And said a plurality of detection of charged particles module is coupled into one around balanced configuration; One opening is arranged on central axis of symmetry, and the detection faces of each said detection of charged particles module, co-planar arrangement are aimed at and are formed charged particle reception plane; And receiving a relative surface, plane with said charged particle in each said detection of charged particles module is the inclined-plane or the curved surface of single slope or Different Slope, and wherein central axis of symmetry is an incident light axis.

2. detection of charged particles device as claimed in claim 1, the detection of charged particles assembly processes a plurality of detection faces of detecting block and photoconductive channel by single light-guide material and processes.

3. detection of charged particles device as claimed in claim 1, wherein charged particle reception place of detection of charged particles assembly and detection signal generation place are combined into one of following:

Semiconductor-type detection of charged particles device;

The board-like pick-up unit of hyperchannel.

4. the detection method of a charged particle comprises:

One incident beam is provided;

Assemble said incident beam;

Utilize the said gathering electron beam of a probe shaping object lens focusing to become an electron beam probe;

One deviation electron-beam cell is provided;

One test piece is provided;

Said deviation electron-beam cell causes the electron beam probe of said formation to scan the surface of said test piece with progressive scan mode;

One detection of charged particles device is provided; Wherein said detection of charged particles device comprises a detection of charged particles assembly; Said detection of charged particles assembly comprises a plurality of detection blocks, and each said detection block and prime amplifier coupling are to amplify the output signal of said detection block; Wherein, Each said detection block comprises a detection of charged particles module, and it has charged particle reception place and detection signal generation place that intercouples, when reception place of said charged particle is bombarded by a charged particle beam; Generation place of said detection signal produces said output signal; Wherein said a plurality of detection of charged particles module is coupled into one around the symmetrical configuration, and an opening is arranged on central axis of symmetry, and each said detection of charged particles module co-planar arrangement is aimed at formation one equivalent plane; And a surface relative with said equivalent plane in each said detection of charged particles module is the inclined-plane or the curved surface of single slope or Different Slope, and said equivalent plane is that a charged particle of said detection of charged particles device receives the plane; And

Said detection of charged particles device causes in charged particle reception place and receives by the said electron beam probe bombardment surface electronic that test piece discharged.

5. the detection method of charged particle as claimed in claim 4, wherein said detection of charged particles device places said probe shaping objective lens module.

6. the detection method of charged particle as claimed in claim 4, the detection of charged particles assembly of wherein said detection of charged particles device be by single light-guide material, processes a plurality of detection faces that detect block and photoconductive channel and process.

7. the detection method of charged particle as claimed in claim 4, wherein charged particle reception place in the detection of charged particles assembly of said detection of charged particles device and detection signal generation place are combined into one of following:

Semiconductor-type detection of charged particles device;

The board-like pick-up unit of hyperchannel.

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