CN101916049B - Working table - Google Patents

Abstract

The present invention discloses a workbench, including a platform, a plurality of support members and an airflow guiding unit. The platform has a relative bearing surface and a back surface and a plurality of receiving holes extending from the bearing surface to the back surface. The support members are respectively arranged in the receiving holes, and the airflow guiding unit is connected to the receiving holes from the back of the platform. In addition, each support member includes a shell and a rolling member, wherein the shell has a receiving groove, and the rolling member is arranged in the receiving groove, and the rolling member partially protrudes out of the receiving groove. When the workbench of the present invention replaces the plate on the bearing surface, the support member can be pushed by the airflow, so that the rolling member of the support member partially protrudes out of the bearing surface to support the plate. Therefore, the friction force when pushing the plate can be effectively reduced, thereby making it easy to move or replace the plate.

Description

workbench

technical field

The present invention relates to a workbench, and more particularly to a workbench in which an airflow is used to drive a support.

Background technique

FIG. 1 is a schematic diagram of a workbench of an existing exposure device. Referring to FIG. 1 , the workbench 100 of the conventional exposure equipment includes a platform 110 and a metal cover 120 . The platform 110 has a bearing surface 112 , and the metal cover 120 is disposed on the bearing surface 112 of the platform 110 .

The above-mentioned metal cover 120 is used to carry the substrate to be exposed, and the thickness of the metal cover 120 is about several centimeters. A protective coating (not shown) is provided on the metal cover 120 to prevent the substrate from being damaged due to rubbing against the metal cover 120 . In addition, the size of the metal cover 120 is matched with the size of the substrate. In other words, when the size of the substrate is changed, the metal cover 120 also needs to be changed. In addition, when the protective coating is worn out, a new metal cover plate 120 needs to be replaced to prevent the substrate from being worn out.

When replacing the metal cover 120 , a force (such as a thrust F) needs to be applied to the metal cover 120 to push the metal cover 120 away from the bearing surface 112 of the platform 110 . However, since the entire surface of the metal cover 120 is in contact with the bearing surface 112 , the contact area between the metal cover 120 and the bearing surface 112 is relatively large, resulting in a relatively large friction force between the metal cover 120 and the bearing surface 112 . Moreover, since the thickness of the metal cover 120 is relatively thin, it is not easy to apply force. Therefore, the workbench 100 of the existing exposure equipment has the disadvantage that the metal cover plate 120 is not easy to replace. In addition, since the metal cover 120 is not easy to replace, the metal cover 120 and the platform 110 are likely to scratch each other when replacing the metal cover 120 , and the metal cover 120 is also easily deformed due to improper force.

Contents of the invention

The invention provides a workbench, so that the plates on the workbench can be moved more easily.

In order to achieve the above advantages, the present invention proposes a workbench, which includes a platform, a plurality of supports and an airflow guiding unit. The platform has a bearing surface and a back surface opposite to each other and a plurality of accommodating holes penetrating from the bearing surface to the back surface. The support pieces are respectively arranged in the accommodation holes, and the airflow guiding unit is connected to the accommodation holes from the back of the platform. In addition, each supporting member includes a housing and a rolling member, wherein the housing has a receiving groove, and the rolling member is disposed in the receiving groove, and the rolling member partially protrudes out of the receiving groove.

In an embodiment of the present invention, each of the above-mentioned support members further includes a sleeve, and the casing is disposed in the sleeve.

In one embodiment of the present invention, the bottom of the above-mentioned sleeve is provided with a flange, and each accommodating hole includes a first accommodating space and a second accommodating space connected to each other, and the first accommodating space leads to the bearing surface , and the second accommodating space is disposed between the first accommodating space and the back surface. The inner diameter of the first accommodating space is smaller than the inner diameter of the second accommodating space, and a blocking wall is provided at the junction of the first accommodating space and the second accommodating space. The retaining wall provides a limit height for the flange.

In an embodiment of the present invention, each of the above-mentioned support members further includes a sealing ring disposed around the outer side of the flange.

In an embodiment of the present invention, the above-mentioned flange is provided with an annular groove, and the sealing ring is fixed in the annular groove, and part of the sealing ring protrudes out of the annular groove.

In an embodiment of the present invention, the above-mentioned rolling elements are universal balls or rollers.

In an embodiment of the present invention, the above-mentioned workbench further includes a plurality of connection pads respectively disposed in the receiving holes and adjacent to the back surface. The airflow guiding unit includes a plurality of branch pipes respectively connected to the connection pads. Moreover, each connection pad has a connection hole.

In an embodiment of the present invention, the above-mentioned working table further includes a cover plate disposed on the carrying surface of the platform to cover the accommodating hole.

In an embodiment of the present invention, the above-mentioned workbench further includes a base for supporting the platform.

In an embodiment of the present invention, the above workbench further includes a heat conduction plate disposed between the base and the platform, wherein a liquid channel unit is disposed in the heat conduction plate.

In an embodiment of the present invention, a plurality of support pins are further provided in the above-mentioned platform, and the support pins are adapted to extend out of the bearing surface of the platform.

In an embodiment of the present invention, each of the above-mentioned accommodating holes is provided with a limiting portion to provide a corresponding height of the housing.

When the workbench of the present invention replaces the plate on the bearing surface, because the support can be pushed by the airflow, the rolling parts of the support partially protrude from the bearing surface to support the plate, so the friction force when pushing the plate can be effectively reduced. This in turn makes the panels easy to move or replace.

The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

Description of drawings

Fig. 1 is the schematic diagram of the workbench of a kind of existing exposure equipment;

Fig. 2 is a schematic diagram of a workbench according to an embodiment of the present invention;

Fig. 3 is a three-dimensional exploded view of the support member and the connection pad in Fig. 2;

Fig. 4A is a schematic diagram of the workbench in Fig. 2 when it is used to carry a plate;

Fig. 4B is a schematic diagram of applying force to push the plate on the workbench of Fig. 2;

Fig. 5 is a schematic diagram of a rolling element of another embodiment of the present invention;

Fig. 6 is the schematic diagram of the workbench of another embodiment of the present invention;

Fig. 7 is the schematic diagram of the workbench of another embodiment of the present invention;

Fig. 8 is an exploded perspective view of the support in Fig. 7;

Fig. 9 is a schematic diagram of a workbench according to another embodiment of the present invention;

Fig. 10 is a schematic diagram of a workbench according to another embodiment of the present invention.

Among them, reference signs:

100: Workbench

110: Platform

112: bearing surface

120: metal cover

200, 200a, 200b, 200c: workbench

210, 210b, 210c: platform

211: support pin

212: bearing surface

213, 216, 216c: accommodation holes

214: back

217: First Storage Space

218: Second storage space

219: Barrier

220, 220’, 220”, 220c: supports

221: Annular groove

222: shell

223: storage tank

224, 224': rolling parts

225: top surface

226: Sleeve

227, 227": Flange

228: sealing ring

230: Airflow guidance unit

232: branch pipe

240: connection pad

242: connection hole

250: Cover

260: Base

270: heat conduction plate

300: plate

A: Airflow

D1, D2: inner diameter

F: Thrust

P: limit position

Detailed ways

FIG. 2 is a schematic diagram of a workbench according to an embodiment of the present invention, and FIG. 3 is an exploded perspective view of the supporting member and the connection pad in FIG. 2 . Referring to FIG. 2 and FIG. 3 , the workbench 200 of this embodiment includes a platform 210 , a plurality of support members 220 and an airflow guiding unit 230 . The platform 210 has a supporting surface 212 and a back surface 214 opposite to each other, and a plurality of accommodating holes 216 penetrating from the carrying surface 212 to the back surface 214 . The support members 220 are respectively disposed in the receiving holes 216 , and the airflow guiding unit 230 is connected to the receiving holes 216 from the back surface 214 of the platform 210 . The airflow guiding unit 230 can be connected to a gas supply device (not shown). In addition, each supporting member 220 includes a housing 222 and a rolling member 224, wherein the housing 222 has a receiving groove 223, and the rolling member 224 is disposed in the receiving groove 223, and the rolling member 224 partially protrudes to the receiving groove 223 outside.

Each of the aforementioned support members 220 further includes, for example, a sleeve 226 , and the housing 223 is disposed in the sleeve 226 , and the bottom of the sleeve 226 is provided with a flange 227 , for example. The rolling element 224 of each supporting element 220 is, for example, a universal ball. In addition, each accommodating hole 216 includes, for example, a first accommodating space 217 and a second accommodating space 218 in communication. The first accommodating space 217 is connected to the carrying surface 212 , and the second accommodating space 218 is disposed between the first accommodating space 217 and the back surface 214 . The inner diameter D1 of the first accommodating space 217 is, for example, smaller than the inner diameter D2 of the second accommodating space 218 , and the connection between the first accommodating space 217 and the second accommodating space 218 is provided with a blocking wall 219 . The blocking wall 219 provides a limit height for the flange 227 . In addition, the workbench 200 of this embodiment may further include a plurality of connection pads 240 respectively disposed in the receiving holes 216 and adjacent to the back surface 214 of the platform 210 . The airflow guiding unit 230 includes a plurality of branch pipes 232 , and the branch pipes 232 are respectively connected to the connection pads 240 . Specifically, each connection pad 240 has a connection hole 242 , and the branch pipes 232 are respectively connected to these connection holes 242 . In addition to connecting the branch pipe 232 , the connection pad 240 can also seal the bottom of the second accommodating space 218 of the accommodating hole 216 .

FIG. 4A is a schematic view of the workbench in FIG. 2 when it is used to carry plates, and FIG. 4B is a schematic view of pushing the plates on the workbench in FIG. 2 . Please refer to FIG. 4A first. When the airflow is not introduced into the airflow guiding unit 230, the support member 220 is at the bottom of the accommodating hole 216 due to gravity, and the rolling member 224 does not protrude from the bearing surface 212 of the platform 210. . At this time, the plate 300 can be placed on the carrying surface 212 of the platform 210 for operation.

Referring to FIG. 4B , when the plate 300 is to be moved or the plate 300 is removed from the platform 210 , the airflow A can be provided to the airflow guiding unit 230 through the air supply device. The airflow A can pass into the accommodating hole 216 through the branch pipe 232 of the airflow guiding unit 230 to push the support member 220 so that the rolling member 224 partially protrudes from the bearing surface 212 of the platform 210 . In this way, the plate 300 can be supported by the support member 220 so that the plate 300 is separated from the bearing surface 212 of the platform 210 . In addition, since the junction of the first accommodating space 217 and the second accommodating space 218 is provided with a blocking wall 219, when the flange 227 of the sleeve 226 is pushed to the blocking wall 219 by the airflow A, the blocking wall 219 will resist Flange 227. Therefore, the blocking wall 219 can provide a limiting height for the flange 227 to prevent the supporting member 220 from being pushed out of the receiving groove 216 by the airflow A. As shown in FIG.

Based on the above, different from the surface contact method in the prior art, the present embodiment supports the plate 300 through the rolling element 224 of the support member 220 when moving the plate 300, so the contact area between the plate 300 and the workbench 200 can be greatly reduced , to reduce the frictional force when moving the plate 300. Moreover, when the board 300 is moved, since the rolling member 224 can roll, the friction between the board 300 and the rolling member 224 can be greatly reduced, making the board 300 easier to move. Therefore, the workbench 200 of this embodiment has the advantage of being easy to move and replace the plate 300 .

In addition, since the rolling element 224 in this embodiment is a universal ball, it can push the plate 300 from different directions. In another embodiment shown in FIG. 5, the rolling element 224' of the supporting element 220' can also be a roller. Rollers also have the advantage of allowing the sheet to be pushed easily, but since the rolling direction of the rollers is fixed, they can be used to limit the direction of movement of the sheet. The rolling elements of the present invention may be rollers or universal balls according to requirements, but the rolling elements of the present invention are not limited to these two.

In addition, as shown in FIG. 6 and FIG. 7, in order to prevent air leakage, each support member 220" may further include a sealing ring 228, which is arranged around the outside of the flange 227" of the sleeve 226". In more detail, The flange 227 ″ defines an annular groove 221 , and the sealing ring 228 is fixed in the annular groove 221 , and part of the sealing ring 228 protrudes from the annular groove 221 and abuts against the sidewall of the second accommodating space 218 . In this way, a sealing effect can be provided to further prevent air leakage.

Fig. 8 is a schematic diagram of a workbench according to another embodiment of the present invention. Referring to FIG. 8 , the workbench 200a of this embodiment is similar to the above-mentioned workbench 200 , the difference is that the workbench 200a further includes a cover plate 250 disposed on the bearing surface 212 of the platform 210 to cover the accommodating hole 216 . When the workbench 200 a is used in an exposure device, the substrate to be exposed is disposed on the cover plate 250 . In this embodiment, since the accommodating hole 216 is covered by the cover plate 250 , it is possible to prevent the exposure process from being affected by the accommodating hole 216 and causing defects.

The above-mentioned cover plate 250 is, for example, a metal plate, but not limited thereto. The size of the cover plate 250 matches, for example, the size of the substrate to be exposed. When it is necessary to replace the cover plate 250 with a different size, the airflow guiding unit 230 can guide the airflow to push the support member 220 to support the cover plate 250 through the support member 220 , so that the cover plate 250 can be easily replaced. In this way, the cover plate 250 and the platform 210 can be prevented from scratching each other, and deformation of the cover plate 250 due to improper force application can be prevented.

The workbench 200 a of the present embodiment, for example, further includes a base 260 for supporting the platform 210 . In addition, the workbench 200a may further include a heat conduction plate 270 disposed between the base 260 and the platform 210 . When the workbench 200a is used for the exposure process, the heat conducting plate 270 can exchange heat with the cover plate 250 to avoid overheating of the cover plate 250 and the substrate disposed on the cover plate 250 . In addition, a liquid channel unit (not shown) may be provided in the heat conduction plate 270 for passing in cooling liquid, thereby improving the heat dissipation efficiency of the heat conduction plate 270 .

Fig. 9 is a schematic diagram of a workbench according to another embodiment of the present invention. Referring to FIG. 9 , the workbench 200b of this embodiment is similar to the above-mentioned workbench 200 , the difference lies in that a plurality of support pins 211 are further provided in the platform 210b of the workbench 200b. The support pins 211 are adapted to extend out of the bearing surface 212 of the platform 210b. More specifically, when the board is to be placed on the bearing surface 212 of the platform 210b, the supporting pin 211 accommodated in the accommodating hole 213 can be extended out of the bearing surface 212 of the platform 210b to receive the board. Next, retract the support pin 211 into the receiving hole 213 of the platform 210b, so that the plate is placed on the bearing surface 212 of the platform 210b.

Fig. 10 is a schematic diagram of a workbench according to another embodiment of the present invention. Please refer to FIG. 10 , the structure and advantages of the workbench 200c of this embodiment are similar to the above-mentioned workbench 200 , and only the main differences in the structure will be described below. Each accommodating hole 216c of the platform 210c of the workbench 200c in this embodiment is provided with a limiting portion 215 , and the supporting member 220c includes, for example, a housing 222 and a rolling member 224 . The limiting portion 215 is, for example, a pin body extending inward from the wall of the accommodating hole 216c to provide a limiting height of the housing 222 of the supporting member 220c. That is, when the airflow A is passed into the airflow guiding unit 230 to push the support 220c, the top surface 225 of the housing 222 of the support 220c will be resisted by the stopper 215, so as to prevent the support 220c from being pushed out of the storage. outside the hole 216c.

To sum up, in the workbench of the present invention, since the airflow guiding unit is connected to the accommodating hole from the back of the platform, when the plate on the carrying surface is to be moved, the airflow can pass through the airflow guiding unit into the accommodating hole Inside, to push the supporting member, so that the rolling member partially protrudes from the bearing surface, and then supports the plate. In this way, when moving the board, since the frictional force between the board and the rolling elements is small, it is easier to move or replace the board.

Certainly, the present invention also can have other various embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding changes All changes and modifications should belong to the protection scope of the claims of the present invention.

Claims (12)

1. a worktable is characterized in that, comprising:

One platform, a plurality of containing holes that have a relative loading end and a back side and be through to this back side from this loading end;

A plurality of support members are arranged at respectively in those containing holes, and each support member comprises:

One housing has a storage tank;

One rolling member is arranged in this storage tank, and this rolling member part is protruding to outside this storage tank; And

One air-flow guide unit is connected to those containing holes from this back side of this platform.

2. worktable according to claim 1 is characterized in that each support member also comprises a sleeve, and this housing is arranged in this sleeve.

3. worktable according to claim 2; It is characterized in that; One bottom of this sleeve is provided with a flange, and each containing hole comprises one first accommodation space and one second accommodation space that is connected, and this first accommodation space passes to this loading end; This second accommodation space is arranged between this first accommodation space and this back side; The internal diameter of this first accommodation space is less than the internal diameter of this second accommodation space, and the junction of this first accommodation space and this second accommodation space is provided with a retaining wall, for this flange one spacing height is provided.

4. worktable according to claim 3 is characterized in that each support member also comprises a sealing ring, around the outside that is arranged at this flange.

5. worktable according to claim 4 is characterized in that this flange is provided with a ring groove, and the sealing ring is fixed in this ring groove, and part sealing ring protrudes from outside this ring groove.

6. worktable according to claim 1 is characterized in that, those rolling members are universal ball or roller.

7. worktable according to claim 1 is characterized in that, also comprises a plurality of connection gaskets; Be arranged at respectively in those containing holes, and in abutting connection with this back side, this air-flow guide unit comprises a plurality of arms; Be connected to those connection gaskets respectively, each connection gasket has a connecting hole.

8. worktable according to claim 1 is characterized in that, also comprises a cover plate, is disposed at this loading end of this platform, to hide those containing holes.

9. worktable according to claim 1 is characterized in that, also comprises a pedestal, to carry this platform.

10. worktable according to claim 9 is characterized in that, also comprises a heat-conducting plate, is disposed between this pedestal and this platform, wherein is provided with a flow channel for liquids unit in this heat-conducting plate.

11. worktable according to claim 1 is characterized in that, more is provided with a plurality of supporting pins in this platform, and those supporting pins are suitable for stretching out outside this loading end of this platform.

12. worktable according to claim 1 is characterized in that, is provided with a limiting section in each containing hole, for this corresponding housing one spacing height is provided.

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