CN101916022B - Flexible display panel and manufacturing method thereof - Google Patents
Flexible display panel and manufacturing method thereof Download PDFInfo
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- CN101916022B CN101916022B CN201010230897A CN201010230897A CN101916022B CN 101916022 B CN101916022 B CN 101916022B CN 201010230897 A CN201010230897 A CN 201010230897A CN 201010230897 A CN201010230897 A CN 201010230897A CN 101916022 B CN101916022 B CN 101916022B
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- 238000000059 patterning Methods 0.000 claims abstract description 8
- 238000013459 approach Methods 0.000 claims description 25
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- 238000004381 surface treatment Methods 0.000 claims description 3
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- 229910044991 metal oxide Inorganic materials 0.000 description 4
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Abstract
A method for manufacturing a flexible display panel comprises the following steps: providing a hard substrate; providing a flexible substrate, wherein the flexible substrate is provided with a first surface and a second surface; forming a plurality of deforming areas on the first surface, wherein the bonding strength of the areas outside the deforming areas is greater than that of the deforming areas; forming an adhesive layer between the first surfaces of the hard substrate and the flexible substrate; forming a plurality of display units on the second surface, wherein each display unit is positioned above one of the release areas; patterning the flexible substrate to obtain a plurality of flexible carrier plates respectively carrying the display units; and separating the flexible carrier from the adhesive layer.
Description
[technical field]
The invention relates to a kind of display panel and manufacturing approach thereof, and particularly relevant for a kind of flexible display panel and manufacturing approach thereof.
[background technology]
In the development of display; Along with the progress of photoelectric technology and semiconductor fabrication, have that high image quality, space utilization efficient are good, the flat-panel screens (flatdisplay panels) of low consumpting power, advantageous characteristic such as radiationless becomes the main flow in market gradually.
In the middle of display technique now,, become a new generation's display technique of looking forward to the prospect at present because flexible display panel has lightness, resistance to impact, flexibility, wearable property and advantage such as easy to carry.Yet in present flexible display panel processing procedure, the major technique bottleneck is how thin film transistor (TFT) array (Thin-Film-Transistor Array, TFT Array) is made on the flexible base plate.
Figure 1A to Fig. 1 E is the process flow diagram of the manufacturing approach of existing flexible display panel.Please with reference to Figure 1A, Figure 1B and Fig. 1 C; One hard substrate 100 at first is provided; And on this hard substrate 100, form an organic adhesion material 110; Afterwards a flexible base plate 120 is placed on organic adhesion material 110, and organic adhesion material 110 is solidified, and then flexible base plate 120 is attached on the hard substrate 100 through organic adhesion material 110 through the mode of irradiate light (like UV-irradiation).
Then, after the attaching action of accomplishing flexible substrate 120, then on flexible base plate 120, carry out the making of thin film transistor (TFT) array 130 please with reference to Fig. 1 D and Fig. 1 E.After the making of accomplishing thin film transistor (TFT) array 130, then flexible base plate 120 is taken off from hard substrate 100.
In the prior art; Use organic adhesion material 110 still to have following several still need overcome at the bottleneck that is met with on the processing procedure: the first, general thin film transistor (TFT) array (like amorphous silicon film transistor) is when making; Its highest process temperatures is up to about 370 ℃; And the upper limit temperature of heat tolerance of existing organic adhesion material 110 is about 200 ℃～250 ℃ at present; Therefore organic adhesion material 110 can't bear the phenomenon that is easy to generate cracking and aerogenesis (Out-gassing) in the manufacture process that has the thin film transistor (TFT) array now, causes flexible base plate 120 that warpages (warping) take place; The second, the anti-chemical solvent aggressivity of organic adhesion material 110 is not good, can't bear the chemical solvent that is used in the manufacture process of existing thin film transistor (TFT) array, causes flexible base plate 120 that warpages take place.
For thermotolerance and the not good problem of endurance of improving organic adhesion material 110; Prior art can be mixed an amount of inorganic powder usually in organic adhesion material 110; To promote its thermotolerance and endurance; Though the doping of inorganic powder can make the adhesion of organic adhesion material 110 promote; But can cause flexible base plate 120 to be difficult for taking off from hard substrate 100, make flexible base plate 120 from the process that hard substrate 100 takes off, the thin film transistor (TFT) array 130 on the flexible base plate 120 (shown in Fig. 1 E) is destroyed.
Except doping inorganic powder in organic adhesion material 110; What also have that prior art selects the photaesthesia type for use sticks together the glue material; After the thin film transistor (TFT) array completed, the mode through irradiation makes sticked together sclerosis of glue material and forfeiture tackness, and flexible base plate 120 can be removed easily; But the shortcoming of this technology is few for the material selectivity that the photaesthesia type sticks together the glue material, can not select the glue material arbitrarily.
[summary of the invention]
The present invention provides a kind of flexible display panel and manufacturing approach thereof.
The present invention provides a kind of manufacturing approach of flexible display panel, comprising: a hard substrate is provided; One flexible base plate is provided, and flexible base plate has a first surface and a second surface; On first surface, form a plurality of bonding shape areas, wherein the then intensity in the zone outside the bonding shape area is greater than the then intensity of bonding shape area; Form an adhesion layer between the first surface of hard substrate and flexible base plate; On second surface, form a plurality of display units, and each display unit lays respectively at one of them top, bonding shape area; The patterning flexible base plate is to obtain a plurality of pliability support plates that carry display unit respectively; And make the pliability support plate separate with adhesion layer.
In one embodiment of this invention, aforesaid bonding shape area is separated from one another.
In one embodiment of this invention, the then intensity between zone outside the aforesaid bonding shape area and the adhesion layer is greater than the then intensity between bonding shape area and the adhesion layer.
In one embodiment of this invention, the step of aforesaid formation adhesion layer between hard substrate and flexible base plate comprises: on hard substrate, form adhesion layer, and the first surface of flexible base plate is affixed on the adhesion layer.
In one embodiment of this invention, aforesaid each pliability support plate only engages with adhesion layer through single bonding shape area.
In one embodiment of this invention, aforesaid hard substrate comprises a glass substrate.
In one embodiment of this invention, aforesaid adhesion layer comprises an organic adhesion layer.
In one embodiment of this invention, aforesaid flexible base plate comprises a plastic base.
In one embodiment of this invention, aforesaid flexible base plate comprises the choke pliability support plate that blocks water, the gas barrier layer that blocks water that the pliability support plate comprises that a flexible substrate and engages with flexible substrate and choke blocks water.
In one embodiment of this invention, aforesaid flexible base plate comprises the choke of a plurality of storehouses each other pliability support plate that blocks water, the gas barrier layer that blocks water that the pliability support plate comprises that a flexible substrate and engages with flexible substrate and each choke blocks water.
In one embodiment of this invention, the method that forms the bonding shape area comprises utilizes plasma or corona that a plurality of regional areas of first surface are carried out surface treatment, to change the surface energy of regional area.
In one embodiment of this invention, aforesaid bonding shape area is a water repellent region.
In one embodiment of this invention, the method that forms the bonding shape area is included on a plurality of regional areas of first surface and forms a plurality of hydrophobicity plated films.
In one embodiment of this invention, the method that forms the bonding shape area is included on a plurality of regional areas of first surface and forms a plurality of nano-coatings.
In one embodiment of this invention, the method that forms display unit afterwards, forms a display dielectric layer prior to forming a driving component array layer on the second surface on driving component array layer.
In one embodiment of this invention, aforesaid display dielectric layer comprises an electrophoretic display thin film or an electric moistening demonstration film.
In one embodiment of this invention, the method for patterning flexible base plate comprises laser cutting or machine cuts.
The present invention provides a kind of flexible display panel in addition; It comprises a pliability support plate and a display unit; Wherein the pliability support plate has two surfaces, and display unit is disposed on the wherein surface of pliability support plate, and another surface of pliability support plate is a hydrophobic surface.
The present invention provides a kind of flexible display panel again; It comprises a pliability support plate, a display unit and a plated film; Wherein the pliability support plate has two surfaces; Display unit is disposed on the wherein surface of pliability support plate, another surface engagement of plated film and pliability support plate, and plated film comprises a hydrophobicity plated film or a nano-coating.
In one embodiment of this invention, aforesaid display unit comprises that a driving component array layer and is positioned at the display dielectric layer on the driving component array layer.
In one embodiment of this invention, aforesaid pliability support plate comprises one or more choke pliability support plate that blocks water, the gas barrier layer that blocks water that the pliability support plate comprises that a flexible substrate and engages with flexible substrate and choke blocks water.
In one embodiment of this invention, the material of aforesaid hydrophobicity plated film comprises and gathers fluorine organic, Si oxide, silicon nitride, metal oxide, metal nitride.
In one embodiment of this invention, the material of aforesaid nano-coating comprises Si oxide, silicon nitride, metal oxide, metal nitride.
In one embodiment of this invention, the contact angle of aforesaid plated film is 30 to 150 degree.
Because the present invention is before adhesion layer and flexible base plate are followed, prior to forming the bonding shape area on the flexible base plate, so flexible display panel is difficult for the problem that has qualification rate to be difficult to promote when separating (de-bonding) with hard substrate.
For letting the above-mentioned feature and advantage of the present invention can be more obviously understandable, hereinafter is special lifts embodiment, and cooperates appended graphic elaborating as follows.
[description of drawings]
Figure 1A to Fig. 1 E is the process flow diagram of the manufacturing approach of convention flexible display panel.
Fig. 2 is the process flow diagram of manufacturing approach of the flexible display panel of first embodiment of the invention.
Fig. 3 A to Fig. 3 F is the diagrammatic cross-section of manufacturing approach of the flexible display panel of first embodiment of the invention.
Fig. 4 be have the bonding shape area flexible base plate on look synoptic diagram.
Fig. 5 A to Fig. 5 C is the diagrammatic cross-section of the flexible base plate of different kenels.
Fig. 6 A to Fig. 6 E is the diagrammatic cross-section of manufacturing approach of the flexible display panel of second embodiment of the invention.
[primary clustering symbol description]
100: hard substrate
110: organic adhesion material
120: flexible substrate
130: the thin film transistor (TFT) array
200: hard substrate
210: adhesion layer
220: flexible base plate
220 ': the pliability support plate
220a: first surface
220b: second surface
230: display unit
230a: driving component array layer
230b: display dielectric layer
240: hydrophobicity plated film or nano-coating
300,300 ': flexible display panel
P: plasma or corona
R: bonding shape area
R ': the zone outside the bonding shape area
S200～S260: step
[embodiment]
[first embodiment]
Fig. 2 is the process flow diagram of manufacturing approach of the flexible display panel of first embodiment of the invention.Please with reference to Fig. 2, the manufacturing approach of the flexible display panel of present embodiment comprises: a hard substrate (step S200) is provided; One flexible base plate is provided, and flexible base plate has a first surface and a second surface (step S210); On first surface, form a plurality of bonding shape areas, wherein the then intensity in the zone outside the bonding shape area is greater than the then intensity (step S220) of bonding shape area; Form an adhesion layer (step S230) between the first surface of hard substrate and flexible base plate; On second surface, form a plurality of display units, and each display unit lays respectively at one of them top, bonding shape area (step S240); The patterning flexible base plate is to obtain a plurality of pliability support plates (step S250) that carry display unit respectively; And make the pliability support plate separate (step S260) with adhesion layer.Order that it should be noted that aforesaid step S200, S210, S220 can be done change arbitrarily.For example, can carry out step S200 earlier, carry out step S210 and step S220 again, certainly, also can carry out step S210 and step S220 by advanced row, carry out step S200 again.
Below will arrange in pairs or groups Fig. 3 A to Fig. 3 F, Fig. 4 and Fig. 5 A to Fig. 5 C carry out detailed description to the manufacturing approach of flexible display panel.
Fig. 3 A to Fig. 3 F is the diagrammatic cross-section of manufacturing approach of the flexible display panel of first embodiment of the invention, and Fig. 4 be have the bonding shape area flexible base plate on look synoptic diagram.Please, a hard substrate 200 (step S200) is provided at first, then on hard substrate 200, forms an adhesion layer 210 with reference to Fig. 2 and Fig. 3 A.In the present embodiment, the material of hard substrate 200 for example is the substrate of glass substrate or other suitable material, and adhesion layer 210 for example is an organic adhesion layer, and this organic adhesion layer can be heat curing adhesion material or photocuring adhesion material.For example, adhesion layer 210 for example is that ultraviolet light polymerization adhesion material, infrared light solidify adhesion material etc.
Please with reference to Fig. 2, Fig. 3 B and Fig. 4, a flexible base plate 220 is provided, this flexible base plate 220 has a first surface 220a and a second surface 220b (step S210).
For example, bonding shape area R is for example separated from one another.When employed adhesion layer 210 is organic adhesion layer, because adhesion layer 210 is generally the water wettability material, in successive process, can separate with adhesion layer 210 easily for making bonding shape area R, can bonding shape area R be treated to water repellent region usually.Present embodiment plasma capable of using or corona P carry out surface treatment to a plurality of regional areas of first surface 220a, to change the surface energy of these regional areas, make these regional areas become hydrophobic bonding shape area R.
Please with reference to Fig. 2 and Fig. 3 C, with the first surface 220a of flexible base plate 220 towards hard substrate 200, so that adhesion layer 210 is between the first surface 220a of hard substrate 200 and flexible base plate 220 (step S230).Then, through after the suitable contraposition, make flexible base plate 220 contact, so that flexible base plate 220 is attached on the hard substrate 200 through adhesion layer 210 with adhesion layer 210.In the present embodiment, the region R outside the R of bonding shape area ' and adhesion layer 210 between then intensity greater than the intensity of following between bonding shape area R and the adhesion layer 210.
Please, go up a plurality of display units 230 of formation, and each display unit lays respectively at one of them top, bonding shape area (step S240) in the second surface 220b of flexible base plate 220 with reference to Fig. 2 and Fig. 3 D.In the present embodiment, the method for formation display unit 230 goes up formation one driving component array layer 230a prior to the second surface 220b of flexible base plate 220, afterwards, goes up in driving component array layer 230a and forms a display dielectric layer 230b.For example, the display dielectric layer 230a of present embodiment is the display medium of an electrophoretic display thin film, an electric moistening demonstration film or other kenel.
Please, after having made display unit 230, follow patterning flexible base plate 220 (being illustrated among Fig. 3 D), to obtain a plurality of pliability support plates 220 ' (step S250) that carry display unit respectively with reference to Fig. 2 and Fig. 3 E.In the present embodiment, the method for patterning flexible base plate 220 comprises laser cutting or machine cuts.Can know from Fig. 3 E and to learn having single bonding shape area R on the wherein surface (basal surface) of pliability support plate 220 ', then be formed with a display unit 230 on another surface (top surface) of pliability support plate 220 '.At this moment, pliability support plate 220 ' only contacts with adhesion layer 210 through single bonding shape area R.
Please, make pliability support plate 220 ' separate (step S260), with the making of preliminary completion flexible display panel 300 with adhesion layer 210 with reference to Fig. 2 and Fig. 3 F.Because pliability support plate 220 ' only contacts with adhesion layer 210 through single bonding shape area R; And adhesion layer 210 and bonding shape area R then intensity is lower; Therefore pliability support plate 220 ' with can separate with adhesion layer 210 easily, and be difficult for having display module 230 ruined phenomenons.
Please with reference to Fig. 3 F; The flexible display panel 30 of present embodiment comprises a pliability support plate 220 ' and a display unit 230; Wherein the pliability support plate has two surfaces; Display unit 230 is disposed on the wherein surface of pliability support plate 220 ', and another surface of pliability support plate 220 ' is a hydrophobic surface (being hydrophobic bonding shape area R).
Fig. 5 A to Fig. 5 C is the diagrammatic cross-section of the flexible base plate of different kenels.Please with reference to Fig. 5 A to Fig. 5 C, use to Different products, present embodiment can adopt the flexible base plate 220 of multiple different kenels.For example; Flexible base plate 220 comprises choke pliability support plate C (shown in Fig. 5 A) or a plurality of choke pliability support plate C (shown in Fig. 5 B and Fig. 5 C) that blocks water that blocks water, the gas barrier layer C2 that blocks water that pliability support plate C comprises that a flexible substrate C1 and engages with flexible substrate C1 and each choke blocks water.When flexible base plate 220 is to block water pliability support plate C when constituting by a plurality of chokes, choke blocks water and for example sticks together each other through glue material G between the pliability support plate C.
[second embodiment]
Fig. 6 A to Fig. 6 E is the diagrammatic cross-section of manufacturing approach of the flexible display panel of second embodiment of the invention.Please with reference to Fig. 6 A and Fig. 6 E, the manufacturing approach of the present embodiment and first embodiment is similar, but being in the method for making of: the bonding shape area R of present embodiment of the two main difference is different.In detail, the present embodiment method that forms bonding shape area R is included on a plurality of regional areas of first surface 220a and forms a plurality of hydrophobicity plated films or nano-coating 240.
Please with reference to Fig. 6 E; The flexible display panel 300 ' of present embodiment comprises a pliability support plate 220 ', a display unit 230 and a plated film 240; Wherein pliability support plate 220 ' has two surfaces; Display unit 230 is disposed on the wherein surface of pliability support plate 220 ', another surface engagement of plated film 240 and pliability support plate 220 ', and plated film 240 comprises a hydrophobicity plated film or a nano-coating.In the present embodiment, the contact angle of plated film 240 for example is 30 to 150 degree.
For example, when plated film 240 for the hydrophobicity plated film is, its material comprises gathers fluorine organic, Si oxide, silicon nitride, metal oxide, metal nitride; When plated film 240 was nano-coating, its material comprised Si oxide, silicon nitride, metal oxide, metal nitride.
Because the present invention is before adhesion layer and flexible base plate are followed, prior to forming bonding shape area (surfaction kenel or plated film kenel) on the flexible base plate, so flexible display panel is difficult for the problem that has qualification rate to be difficult to promote when separating with hard substrate.
Though the present invention discloses as above with embodiment; Right its is not in order to limit the present invention; Has common knowledge the knowledgeable in the technical field under any; Do not breaking away from the spirit and scope of the present invention, when doing a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (9)
1. the manufacturing approach of a flexible display panel comprises:
One hard substrate is provided;
One flexible base plate is provided, and this flexible base plate has a first surface and a second surface;
On this first surface, form a plurality of bonding shape areas, the then intensity in the zone outside the wherein said bonding shape area is greater than the then intensity of said bonding shape area;
Form an adhesion layer between this first surface of this hard substrate and this flexible base plate;
On this second surface, form a plurality of display units, and respectively this display unit lays respectively at wherein top, a bonding shape area;
This flexible base plate of patterning is to obtain a plurality of pliability support plates that carry display unit respectively; And
Make said pliability support plate separate with this adhesion layer.
2. the manufacturing approach of flexible display panel according to claim 1; It is characterized in that; Said bonding shape area is separated from one another, and the then intensity between the zone outside the wherein said bonding shape area and this adhesion layer is greater than the then intensity between said bonding shape area and this adhesion layer.
3. the manufacturing approach of flexible display panel according to claim 1 is characterized in that, forms the step of this adhesion layer between this hard substrate and this flexible base plate and comprises:
On this hard substrate, form this adhesion layer; And
This first surface of this flexible base plate is affixed on this adhesion layer.
4. the manufacturing approach of flexible display panel according to claim 1 is characterized in that, respectively this pliability support plate only engages with this adhesion layer through single bonding shape area.
5. the manufacturing approach of flexible display panel according to claim 1 is characterized in that, this hard substrate comprises a glass substrate, and wherein this adhesion layer comprises an organic adhesion layer, and wherein this flexible base plate comprises a plastic base.
6. the manufacturing approach of flexible display panel according to claim 1 is characterized in that, this flexible base plate comprises at least one choke pliability support plate that blocks water, and the pliability support plate comprises and this choke blocks water:
One flexible substrate; And
One gas barrier layer that blocks water engages with this flexible substrate.
7. the manufacturing approach of flexible display panel according to claim 1; It is characterized in that; The method that forms said bonding shape area comprises utilizes plasma or corona that a plurality of regional areas of this first surface are carried out surface treatment, to change the surface energy of said regional area.
8. the manufacturing approach of flexible display panel according to claim 1; It is characterized in that the method that forms said bonding shape area is included in to form on a plurality of regional areas of this first surface on a plurality of regional areas that method that a plurality of hydrophobicity plated films wherein form said bonding shape area is included in this first surface and forms a plurality of nano-coatings.
9. the manufacturing approach of flexible display panel according to claim 1 is characterized in that, the method that forms said display unit comprises:
On this second surface, form a driving component array layer; And
On this driving component array layer, form a display dielectric layer, wherein this display dielectric layer comprises an electrophoretic display thin film or an electric moistening demonstration film, and wherein the method for this flexible base plate of patterning comprises laser cutting or machine cuts.
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| CN201010230897A CN101916022B (en) | 2010-07-06 | 2010-07-06 | Flexible display panel and manufacturing method thereof |
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| CN201010230897A CN101916022B (en) | 2010-07-06 | 2010-07-06 | Flexible display panel and manufacturing method thereof |
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| CN101916022A (en) | 2010-12-15 |
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