CN101876534B - Method and system for measuring relative positions of a specular reflection surface - Google Patents
Method and system for measuring relative positions of a specular reflection surface Download PDFInfo
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- CN101876534B CN101876534B CN201010173741.1A CN201010173741A CN101876534B CN 101876534 B CN101876534 B CN 101876534B CN 201010173741 A CN201010173741 A CN 201010173741A CN 101876534 B CN101876534 B CN 101876534B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/02—Details
- G01C3/06—Use of electric means to obtain final indication
- G01C3/08—Use of electric radiation detectors
- G01C3/085—Use of electric radiation detectors with electronic parallax measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/46—Indirect determination of position data
- G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
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- Computer Networks & Wireless Communication (AREA)
- Length Measuring Devices By Optical Means (AREA)
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Abstract
A method for measuring relative positions of a specular reflective surface of an object along a measurement line is provided. The method includes converging at least one converging light beam at a nominal position on the measurement line and forming a reflected beam from the specular reflection surface. An image of the reflected beam is recorded at a detector plane. A position of the image of thereflected beam on the detector plane is determined and converted to a displacement of the specular reflection surface from the nominal position along the measurement line. A system for carrying out the method is also provided.
Description
Right of priority
The application requires the U.S. Patent application No.12/433 that is entitled as " method and system (METHOD AND SYSTEM FOR MEASURINGRELATIVE POSITIONS OF A SPECULAR REFLECTION SURFACE) of measuring the relative position of specular reflection surface " of submission on April 30th, 2009,257 right of priority.
Technical field
The application relates to the measurement of the distance on surface.Particularly, the present invention relates to measure by triangulation the method and apparatus of the distance of specular reflection surface.
Background
The triangulation meter is used for measuring the distance of subject surface, is not especially wishing to use the physical unit such as probe to contact under the situation on interested surface.Suchlike situation for example can be the glass plate that fusion forms that passes through with initial surface, and expectation in this case keeps the original quality on surface.Such glass surface is to the effect of visible light shiny.In glass is made, for example can be used to find out the glass surface position to the measurement of the distance on surface, so that the focus that a bit entering inspection or treatment facility on the glass surface.
In this disclosure, term " slotted line " refers to the straight line that is associated with displacement measuring device, and tested surface is defined as the relative position of the point that slotted line and tested surface intersect along the displacement of this straight line.Term " direction of measurement " refers to the direction of slotted line.Term " angular tolerance " though the inclination (in certain angular range) that refers to tested surface and nominal orientation how, displacement meter produces the ability of shift value along slotted line.In other words, the error of absolute method of measurement that is caused by the surface tilt in certain angular range can not surpass the measuring error to the setter regulation.Term " nominal position " and " nominal inclination " refer to preferred tested surface location and inclination respectively.Measuring method is depended in the concrete definition that nominal position and nominal are tilted, and will provide following.
Fig. 1 shows optical triangulation meter how to work (for example referring to patent disclosure No.JP2001050711 (A) (Koji, 2001)) under the situation of diffuse surface.Project 13 places, position of diffuse surface 16 by projecting lens 14 from the input light 10 of light source 12 (being generally laser diode).By the light that provides of input light 10 at hot spot 11 places on surface 16 along a plurality of direction scatterings, a part that wherein is designated the scattered light of reflection ray 18 arrives detecting devices 22 by object lens 20.Object lens 20 can be on detecting device 22 17 places, position form the image of hot spot 11.If the surface 16 of 16 ' expression position 13 ' locate.Then, the input light 10 the surface 16 ' locate to provide hot spot 11 '.The light of hot spot 11 ' locate is along a plurality of direction scatterings, wherein be designated reflection ray 18 ' the part of scattered light arrive detecting devices 22 by object lens 20.Object lens 20 can be on detecting device 22 position 17 ' locate form hot spot 11 ' image.Generally speaking, the position of image on detecting device 22 depends on that surface 16 is along the position of the direction of input light 10.If surface 16 13 moves to 13 from the position ', then the position of the respective image of hot spot on detecting device 22 will from 17 move to 17 '.Therefore, if the direction of input light 10 is selected as direction of measurement, then image is able to good definition in the position on the detecting device 22 and surface 16 along the correspondence between the position of the direction of input light 10.In the example that in Fig. 1, provides, be slotted line along the straight line of importing light 10.
Calibration procedure can be used for setting up transfer function, is used for obtaining surface 16 positional values along slotted line, and this positional value is the function of the picture position of reflection ray 18 on detecting device 22.For diffuse surface 16, if the diffusion angular width detects by object lens 20 and by detecting device 22 to the sufficient part that is enough to cremasteric reflex light, then the position of image on detecting device 22 is insensitive with respect to the inclination of incident ray 10 to surface 16.This means, input light 10 can be incident in the relative broad range angle between direction of measurement and the surface normal on the surface 16, providing the catoptrical sufficient part that received by object lens 20 forming image at detecting device 22, thereby make this device reliably for the distance that under big relatively surperficial inclination angle, measures diffuse surface.In this case, the nominal surface position may be defined as provides the position of the tested surface of most significant digit shift measurement accuracy in the scope of working position.Nominal tilts may be defined as the maximized tested surface of amount that makes the light that detecting device receives with respect to the inclination of displacement meter.
The open No.JP2001050711 (A) (Koji, 2001) of patented claim and principle described above can restrictively be applied to mirror reflection surface.With reference to Fig. 2, consider the mirror reflection surface 24 at 25 places, position.If the mirror reflection surface 24 of 24 ' expression position 25 ' locate.In addition, establish the mirror reflection surface 24 that 24 " expression positions 25 " are located.According to principle, for mirror reflection surface, light equals angle of incidence values with respect to the reflection angle value of surface normal.Utilize the mirror reflection surface 24 at 25 places, position as example, the angle β between incident light 10 and the surface normal 26
0Equal the angle β between reflected light 28 and the surface normal 26
1Mirror reflection surface 24 ' normal 26 ' the be parallel to normal 26 of mirror reflection surface 24.Therefore, incident light 10 and reflection ray 28 ' direction also with the normal 26 ' angled β of difference of mirror reflection surface 24
0And β
1For measure parallel surfaces 24,24 ' distance, these normals to a surface (for example normal 26 or 26 ') may be selected to be direction of measurement.In this case, the inclination on surface 24 is that nominal is tilted.Also suppose tested surperficial substantially flat, because reflection ray does not carry the information of the point of the minute surface that reflection takes place.In this case, surface 24,24 ' along the position of direction of measurement can by measurement point 29,29 ' the position determine, on detecting device 22 point 29,29 ' locate receive respectively from surface 24,24 ' reflection ray 28,28 '.The transfer function that position on the detecting device 22 and tested surface are associated along the position of direction of measurement should be provided, and is tested surface displacement to obtain measurement result.
Above-mentioned transfer function is based on tested normal to a surface being elected as direction of measurement 26 and being elected the orientation on surface 24 as nominal.This transfer function is for will not producing the correct distance measured value along direction of measurement 26 with the nominal uneven mirror reflection surface (such as position 25 " inclined surface of locating 24 ") that tilts.The position of the reflection ray irradiating and detecting device 22 on for the surface that tilts with respect to position 25, surface 24 for example ", for example light 28 " will depend on that surface normal is with respect to the inclination of direction of measurement and along the position of selected direction of measurement.Therefore, need come unambiguity ground to determine that the tilting mirrors reflecting surface is along the position of direction of measurement with respect to inclination and the two relevant information of the position of reflection ray on detecting device of direction of measurement with surface normal.The basic reason that makes the triangulation difficulty of mirror reflection surface is that mirror reflection surface can not directly be observed---only around the reflection of situation visible or can be detected by optical pickup apparatus.Open No.JP2001050711 (the A) (Koji of patented claim, 2001) principle of describing in will only allow to carry out measuring along the surface displacement of direction of measurement to the substantially parallel surface of nominal inclination place or with respect to the surface that the nominal inclination is only tilted in certain narrow surface tilt scope a little, and wherein direction of measurement is perpendicular to these surfaces.In other words, this method has narrow angular tolerance.
Summary of the invention
Some aspects of the present invention will disclose in this article.Be to be understood that these aspects may or may not overlap each other.Therefore, the part of an aspect may drop on the other hand the scope, and vice versa.
Various aspects illustrate by a plurality of embodiment, and these a plurality of embodiment can comprise one or more specific embodiments again.Be to be understood that these embodiment may or may not overlap each other.Therefore, the part of an embodiment or its specific embodiment may or may not drop in the scope of another embodiment or its specific embodiment, and vice versa.
The problem that solves is the distance that how measures minute surface by triangulation, obtains wide relatively surperficial tilt angle allowance scope simultaneously.
In a first aspect of the present invention, a kind of mirror reflection surface of measuring object along slotted line the method for relative position comprise: (a) the nominal position place on slotted line assembles at least one convergent beam, and forms the folded light beam from mirror reflection surface; (b) at the image of detector plane place record folded light beam; (c) determine the position of image in detector plane of folded light beam; And (d) convert the position of the image of folded light beam the displacement of mirror reflection surface along slotted line from nominal position to.
In second aspect, provide a kind of for the device of the mirror reflection surface of measuring object along the relative position of slotted line.This device comprises light source, and this light source produces at least one light beam that is focused at the nominal position place on the slotted line, and forms the folded light beam from mirror reflection surface.This device is included in the photodetector of the image of detector plane place record folded light beam.This device comprises data analyzer, this data analyzer from photodetector receiving record, processing and analyze this record with the image of determining folded light beam detector plane the position and convert this position the displacement of mirror reflection surface along slotted line from nominal position to.
The problem of measuring the displacement of mirror reflection surface along given direction of measurement from nominal position is resolved.For the inclination angle in the particular job slant range, the measurement result in specific accuracy and the inclination on tested surface are irrelevant.Such measurement allow for example to check or treatment facility can with respect to check or the desired zone on the surface of the inclined light shaft for the treatment of facility on focusing.The displacement measurement of this mirror reflection surface can be used for accurately following the tracks of this surperficial position, relates to the optimization of the multiple manufacturing process such as inspection, processing, finishing or cleaning of mirror reflection surface with for example realization.
When the direction of incident beam and the angle between the tested surface hour (for example between 10 degree are spent with 20 time), the accuracy of this method can be not impaired, so the parts of measurement mechanism do not stop the space along slotted line.Therefore, this space can be used for testing fixture or miscellaneous equipment, with manufacturing process or the processing for the goods with mirror reflection surface.
If optical displacement meter or tested object are installed on the movable platform, then continuous coverage step will allow tilt angle allowance to increase.Repeat to comprise measurement measuring process order and with tested surface be positioned to from nominal position more close to permission in the position range on tested surface, realize the maximum angle tolerance limit.
Can use a plurality of convergent beams.Additional information from a plurality of light beams is processed as in the first aspect, and can be used in the following purpose one or more: strengthen reliability, strengthen accuracy, obtain the information about surface tilt.For example, under the situation of two light beams, can find the solution the simultaneous equations (apparatus of two equations) of two equations to obtain the inclination (p) with respect to axle in the plane on tested surface of displacement (h) and tested surface.
To set forth supplementary features of the present invention and advantage in the following detailed description, these feature and advantage will be apparent according to this description to a certain extent for a person skilled in the art, perhaps can recognize by description and claims and the described the present invention of accompanying drawing who implements herein.
Should be understood that above general description and following detailed description only are examples of the present invention, and they aim to provide general survey or framework be used to the essence of understanding the present invention for required protection and characteristic.
Included accompanying drawing is used for providing further understanding of the present invention, and is incorporated in this instructions and constitutes its part.
Description of drawings
Fig. 1 illustrates the measurement to the distance of diffuse surface that utilizes that conventional triangulation meter carries out.
Fig. 2 illustrates the measurement to the distance of mirror reflection surface that utilizes that conventional triangulation meter carries out.
Fig. 3 is the synoptic diagram of optical displacement meter.
Fig. 4 is the synoptic diagram of the convergent beams light source that uses of the meter with Fig. 3.
Fig. 5 is the example that the surface location that utilizes the optical displacement meter of Fig. 3 to carry out is measured.
Fig. 6 is illustrated in the example of the image that forms on the detecting device of optical displacement sensor of Fig. 3.
Fig. 7 is another example that the surface location that utilizes the optical displacement meter of Fig. 3 to carry out is measured.
Fig. 8 A is the curve map for the typical transfer function of as described in Figure 1 diffusion triangulation meter.
Fig. 8 B is the curve map for the typical transfer function of as described in Figure 3 optical displacement meter.
Embodiment describes
Unless otherwise indicated, otherwise in instructions and claims employed percentage by weight such as those expression components, molar percentage, size, and the value of some physical property should be understood to be in all situations and all modify with term " about ".It should also be understood that employed accurate numerical value constitutes the other embodiment of the present invention in instructions and claims.Guaranteed the accuracy of disclosed numerical value in an embodiment as possible.Yet because the standard deviation that exists in measuring technique separately, measured any number all comprises certain error inherently.
As used herein, describing and claimed when of the present invention, the expression " at least one " of use indefinite article " (a) " or " (an) ", and should be not limited to " only one ", unless otherwise mentioned.Therefore, for example, quoting of " lens " comprised the embodiment that uses two or more these type of lens, unless context otherwise provides clearly.
As used herein, " percentage by weight (wt%) " of parts or material or " percentage by weight " and " molar percentage (mol%) " or " molar percentage " or " molar percentage " are based on general assembly (TW) or the molal quantity of the composition that comprises these parts or goods, unless otherwise mentioned.
Fig. 3 is for measuring edge and the synoptic diagram of surperficial 32 slotted lines that intersect 35 to the optical displacement meter 30 of the distance on the surface 32 of object 34. Goods 36,46,42,52,54 among Fig. 3,55 and 53 belong to displacement meter 30.Goods 31 can be microscope or miscellaneous equipment, and tested surperficial 32 are arranged to these goods 31 certain displacement is arranged.Optical displacement meter 30 is measured between surface 32 and the nominal position 40 distance along slotted line 35.The output of optical displacement meter 30 can be used according at least two kinds of different modes.
In first example, this output can be used for the 32 desired locations places that place along direction of measurement 35, surface.For example, if nominal position 40 is selected as the desired locations on surface 32, then optical displacement meter 30 can be used for finding out how far surface 32 has from desired locations, and the output of optical displacement meter 30 can be used for control surface 32 is moved how far so that surface 32 is positioned this desired locations.Generally speaking, can select as desired locations along any known location of direction of measurement, as long as the distance between known location and the nominal position 40 is known.
In second example, the output of optical displacement meter 30 can be used for measuring surface 32 from for example distance of the observation station of observation station 31 and so on.As mentioned above, the distance between optical displacement meter 30 measurement surfaces 32 and the nominal position 40.Therefore, if the distance between observation station 31 and the nominal position 40 is known, then the distance between surface 32 and the observation station 31 can utilize known distance between observation station 31 and the nominal position 40 and the output of optical displacement meter 30 easily to calculate.
In the modification of first example, optical displacement meter 30 can be used for the movement of tracked surface 32, and the displacement meter parts of displacement meter 30 and other mechanical attachment are kept and specified distance from surface 32.In this case, be used as the feedback signal of the analog or digitalization of input motion controller (not shown) from the output of displacement meter 30.The definition of this motion controller speed, acceleration and other kinematic parameter, and order is sent to the telecontrol equipment (not shown) with correction position when needed.
The point 40 that bundle 38 is assembled is nominal position in this case.This nominal position is preferably selected in the working range of optical displacement meter 30.Term " working range " refers to the location interval on the tested surface of the position measurement that wherein can carry out surface 32.In certain embodiments, nominal position 40 is positioned at the middle part of the working range on the direction of measurement 35.Slotted line 35 is and bundle 38 and 44 chief ray 38 ' and 44 ' respectively straight lines that are in the same plane; 38 ' with 35 between angle and 44 ' equate with angle between 35.Nominal tilts to be defined as the orientation perpendicular to the tested surface of slotted line 35.Fig. 3 is illustrated in nominal position 40 places along tested surperficial 32 of nominal orientation.The position of the optical axis of object lens 46 and position and detector plane 50 is arranged to make object lens 46 that slotted line 35 is focused on the detector plane 50.As shown in Figure 5, because this setting, even tested surperficial 32 tilt with respect to nominal orientation, light displacement meter 30 is also available, so direction of measurement 35 is not orthogonal to tested surperficial 32.Generally speaking, the error in the measurement is with relevant with respect to the degree of tilt of nominal orientation with tested surperficial 32.Generally speaking, when tested surface during near nominal position, measuring error reduces.
In certain embodiments, surface 32 is mirror reflection surface.Herein, term " mirror reflection surface " represents that this surface is smooth relatively, the surface that is similar to catoptron that single incident ray is reflexed to narrow outbound course scope.In certain embodiments, destination object 34 can be plate of material.In one example, destination object 34 can be the light transmissive material plate, for example by the plate of making based on the material of glass.This glass plate can be the glass plate that has uniform thickness and make by smelting process, such as for example U.S. Patent No. 3,682,609 (Dockerty, 1972) and No.3, described in 338,696 (Dockerty, 1964) like that.Edge with the object 34 on surface 32 can be by support 27 supportings, and this support 27 can utilize any suitable translation mechanism 23 movable with respect to nominal position 40.
" preferred optical arrangement " is defined as the position of imaging len 46 and detecting device 42 and the configuration of orientation in this article, so that the image of the slotted line 35 that lens 46 form is in the detector plane 50.In other words, for preferred optical arrangement is provided, imaging len 46 should focus on slotted line 35 on the detector plane 50.
In an example as the part situation of the preferred optical arrangement of above definition, it is vertical substantially with direction of measurement 35 that the position of object lens 46 and detecting device 42 and orientation are selected to the optical axis that makes object lens 46, and detector plane 50 is substantially parallel with direction of measurement 35.In another example, the position of object lens 46 and detecting device 42 and orientation are selected to and make detector plane 50 with respect to the inclined light shaft of object lens 46, and the image of the direction of measurement 35 of lens 46 formation is in the detector plane 50.In example shown in Fig. 3, the axle of object lens 46 and detector plane 50 tilts with respect to direction of measurement 35.
The configuration of light source 36, detecting device 42 and imaging len 46 can make these parts mobile together as the unit.This can be for example realizes by imaging len 46 mechanical couplings are installed on suitable common platform or the stationary installation (not shown) to detecting device 42 and with detecting device 42 and light source 36.Other configurations also are possible.For example, as shown in Figure 3, light source 36 can be installed on the platform 41, and detecting device 42 and imaging len 46 can be installed on the platform 43. Platform 41 and 43 can utilize any suitable translation mechanism 23 removable with respect to surface 32.
Fig. 4 illustrates the example of the convergent beams light source of the light source 36 that can be used as among Fig. 3.As shown in the figure, convergent beams light source 36 comprises light source 60 (can be LED in this example).LED 60 can be placed on the heating radiator 62.Convergent beams light source 36 also comprises the coupled lens 64 that couples light to three (in this specific example) optical fiber 66 from LED 60.Generally speaking, light can be coupled to one or more optical fiber 66 from light source 60.Optical fiber 66 can be by such as having for suitable fibre-optical fixator 68 supportings the stationary installation in the hole of receiving optical fiber 66.Can use any suitable configurations of the endpiece 69 of optical fiber 66.For example, endpiece 69 can form line or triangle.The endpiece 69 of optical fiber 66 is as little optical transmitting set.One or more convergent lenses 70 are used at the real image that produces the end 69 of optical fiber 66 from endpiece 71 1 distances of condenser 70.The diameter of the hot spot that condenser 70 produces from each root optical fiber 66 can be less than the diameter of the fibre core of optical fiber 66.In non-limiting example, condenser 70 can comprise divergent lens 72 and convergent lens 74,76.
Fig. 5 is the diagram of principle of work of the optical displacement meter 30 of Fig. 3.For ease of calculating, coordinate system (coordinate apparatus) is selected to slotted line 35 is overlapped with the Z axle, and the tested surface nominal orientation is parallel with X-axis.40 places produce the real image of light source 60 to condenser 70 in the position, this position 40 in Fig. 5 (x, z) coordinate is (0,0).In this case, position 40 is nominal position of triangulation meter.This real image of light source 60 is represented the virtual light source 78 at 40 places, position.To be measured surperficial 32 at certain the unknown position place along the Z axle.Surface 32 can be along direction of measurement 35 (Z axle) from nominal position 40 displacements, and with respect to nominal orientation angle of inclination A.80 places that are reflected in of the virtual light source 78 that surface 32 produces illustrate.This reflection 80 utilizes { L, z by object lens 46
pThe subpoint located is imaged onto near the detector plane 50 or on the some C wherein.Angle α
t Expression detector plane 50 is with respect to the inclination angle of direction of measurement 35.X=x
sα is worked as in the detector plane 50 ' expression at place
t=0 o'clock detector plane 50.The position of object lens 46 and detecting device 42 focuses on the detector plane 50 image of line 35, namely according to above-mentioned preferred optical arrangement.Under the situation of the requirement of satisfying preferred optics allocation position, the optical axis of object lens 46 can or can not overlap with direction of observation 47.In certain embodiments, the inclination alpha of detector plane 50
tBe not equal to zero, and the inclination angle of the optical axis of object lens 46 is selected to line 35 is focused on the angle detection plane 50.In other embodiment of the condition that also satisfies preferred optical arrangement, the inclination alpha of detector plane 50 '
tBe shown zero as 50 ' place, and the optical axis of object lens 46 be selected to make reflected image 80 focus on detector plane 50 ' on.If move a mirror as imaging len 46, the optical axis that then moves a mirror can be selected to vertical with direction of measurement 35, simultaneously detector plane 50 ' can be parallel with direction of measurement 35.
If surface 32 is positioned at nominal position 40 places, then virtual light source 78 is positioned on the surface 32.No matter whether surface 32 tilts, virtual light source 78 all can overlap with virtual light source 78 from the reflection 80 on surface 32.In this case, for all inclination angle A on surface 32, the image of virtual point light source 78 will focus on a little 79 (wherein the optical axis 47 of object lens 46 intersects with detector plane 50).Therefore, when tested surface is in nominal position, the inclination angle on surface 32 will not depended in the position 79 of the image that receives and record at detector plane 50 places.The tilt quantity scope that allows is determined by the angular aperture θ of the convergent beams shown in Fig. 5.The requirement of the acceptable value at inclination angle is that object lens 46 reflected light collected and that detecting device 42 receives will be suitable for forming image for reliable graphical analysis.The operating distance that increases light source 60 keeps the identical meeting with the aperture of condenser 70 of image-forming objective lens 46 to reduce the tilt tolerance scope simultaneously.For keeping the tilt tolerance scope constant, the aperture of light source 60 and object lens 46 should correspondingly increase with operating distance, to keep same angular aperture.
If surface 32 is positioned nominal orientation, namely be parallel to X-axis, but from nominal position 40 displacements, then for all surface position, the reflection 80 of virtual light source 78 will be positioned on the direction of measurement 35.(this in the Fig. 7 that simplifies respectively by from surface 32,32 ' position 37,37 ' reflection 80,80 ' illustrate.) therefore, if detector plane 50 and object lens 46 arrange according to above-mentioned preferred optical arrangement, then reflect 80 (being positioned on the direction of measurement 35) and will be imaged onto on the detector plane 50.Under the situation of the nominal orientation on tested surface, the position of the reflected image 80 at detector plane 50 places that detecting device 46 records will be that surface 32 is from the function of the displacement of nominal position 40.Below will illustrate, the error that is caused by the surface tilt with respect to nominal orientation is in nominal position place minimum, and is also little near the position range nominal position.
The analysis of the image that detecting device is gathered draws the position (or a plurality of positions under the situation of a plurality of light beams or a plurality of reflectings surface) of reflected image 80 in detector plane.For obtaining measurement result, this position need be associated with the displacement of tested surface with respect to nominal position.Term " transfer function " is defined as the relation between position and the tested surface real surface displacement along slotted line 35 from nominal position in the detector plane 50 in this article.Generally speaking, transfer function is non-linear, because the magnification in the detector plane 50 is because the angle α between the optical axis and tested surperficial 52 of object lens 46
tChange with optical distortion possible in the imaging device.
Calibration process can be used for by being associated to set up transfer function with corresponding a plurality of positions in the image that detecting device 42 senses along a plurality of known surface position of direction of measurement.Calibration function on the nominal orientation can obtain by setting the surface in nominal orientation.Then should the surface along perpendicular to this surperficial direction of measurement translation, simultaneously this surface is remained in nominal orientation, with obtain at detecting device with along the corresponding picture group image position of the surface location of direction of measurement.For example the suitable interpolating function of polynomial interpolation and so on can be used for representing this transfer function.
Perhaps, as the displacement h on the surface 32 of the function of the position of reflected image 80 in detector plane S and surface 32 slope p=Tan (A) (S, following theoretical expression p) can be used as transfer function:
Wherein L is the x position of object lens 46, and α is the angle between surface 32 and the optical axis of object lens 46, and α
tIt is the angle between detector plane 50 and the direction of measurement 35.Here { x
s, L Tan α } and be the position of S axle initial point in the X-Z coordinate system.For little slope value p＜＜1, suppose the surface 32 near nominal position 40, determine between surface 32 that the inclination by surface 32 and nominal orientation causes and the nominal position 40 apart from the time error can be estimated as
Can draw according to equation (2), when the angle α between the optical axis of surface 32 and object lens 46 reduced, error reduced.Can also draw according to equation (2), this error and this surface are proportional from the displacement of nominal position.
Data analyzer (53 among Fig. 3) receives data from detecting device 42, and these data are the form of image under the situation of area detector, or are the form of waveform under the situation of linear array.These data processed electronic circuit (52 among Fig. 3) before being received by data analyzer is handled.For the purpose of illustration, the image that can be received by data analyzer describe shown in Figure 6.Tested to liking the glass plate of 0.7mm thickness.Two groups of spots 90,92 have appearred in this image.Spot group 90 is corresponding to the reflection from the preceding minute surface (32 among Fig. 5) of destination object, and spot group 92 is corresponding to the reflection (if this destination object is transparent) from the back minute surface (33 among Fig. 5) of destination object.Each spot group 90,92 has three spots, corresponding to three bundles that formed by three optical fiber (66 among Fig. 4).(should be noted that Fig. 5 only illustrates from the light of front surface 32 reflections.33 reflection is not shown in Figure 5 from the rear surface.) be selected for to calculate corresponding to the spot group 90 of front surface and record distance.The pixel coordinate of transfer function from image be used for calculating to the polynomial interpolation of distance value record distance.As mentioned above, this interpolation utilizes calibration data to set up, and this calibration data is a series of images of gathering along the some place of the known location of direction of measurement.If the inclination angle of destination object is known, then spot group 92 can be used for determining the thickness of destination object, if or the thickness of destination object known, then spot group 92 can be used for determining the inclination angle.In this example, a plurality of light beams can be used for improving accuracy and the reliability of displacement meter.
Fig. 8 A is the curve map that is used for the typical transfer function of diffusion triangulation meter during for the displacement of measuring mirror reflection surface.Fig. 8 B is for the curve map of the typical transfer function of optical displacement meter as described in the present invention.In Fig. 8 A and 8B, when tested surface is nominal steepness (for example p=0 in the equation (1)), line P
0It is transfer function.Curve P
1And P
2Show for the h (distance between tested surface and the nominal position) on the surface that tilts with slope p=p1 and p=p2 respectively and the canonical correlation of S (position of image on detector plane).For the purpose of illustration, curve P
1And P
2Between difference be exaggerated.For aforesaid optical displacement meter, P
1And P
2Curve is at nominal position S=S
0, the h=0 place assembles, shown in Fig. 8 B.Notice that this type of convergence can not occur, shown in Fig. 8 A in the typical transfer function of diffusion triangular measuring transducer.The convergence at nominal position place has brought by duplicate measurements and according to measurement result and has reduced the chance that distance between surface and the nominal position realizes the minimum measuring error at any surface tilt place in the working range.If surface slope equals p2, and the real surface position equals h
1The position of image on detector plane will be S
1 *To S
1 *Use after the transfer function, this surface that the optical displacement meter is reported from nominal position to record distance will be h
1 *Thereby the absolute value of measuring error is | h
1-h
1 *|.If the optical displacement meter or should the surface movement from the distance h that records of nominal
1 *With near nominal position, then the real surface position with respect to nominal position will be h
2, and this displacement meter surface of reporting from nominal to record distance will be h
2 *Thereby the Error Absolute Value of finishing after measuring for the second time will be | h2-h2
*|, this is less than in measuring for the first time | h
1-h
1 *|.By with optical displacement meter or surface to nominal position displacement h again
2 *, then remeasure this surperficial position, the absolute value of measuring error further can be reduced.Required multiplicity depends on concrete device configuration in the absolute value scope that measuring error is in can accept measuring error, and for example can determine by the successive value that relatively records displacement.
As mentioned above, optical displacement meter 30 is measured between surfaces and the nominal position distance along slotted line.Range observation can be single step process or multistep repetitive process.In single step process, as mentioned above, the distance that optical displacement meter 30 is measured between this surface and the nominal position, and export this result.This result can store for optical displacement meter 30 or another equipment and use after a while.This result can be used for the position of finding out that simply this is surperficial, maybe this surface is moved to desired locations, as mentioned above.This multistep process relates to a series of single step process that insert by the translation on nominal position or surface.Mobile device should carry out this translation of distance to a declared goal.This surface can change by translation optical displacement meter or the parts of being responsible for the optical displacement meter of luminous and light reflex imaging with respect to the position of nominal position.In two step processes, for example, the optical displacement meter is used for measuring the distance between this surface and the nominal position.Then, this surface or nominal position move the amount that equates with the output of optical displacement meter.This can place the nominal position place with this surface, or than initial position more near nominal position.Then, optical displacement is used for repeating previous step.The advantage of this duplicate measurements process is, measurement result is along with the surface is moved nearer and improved to nominal position.If the duplicate measurements process is used for locating surface, then when nominal position moved to this surface, this surface can be fixed.If multistep process is used for this surface is positioned desired locations, then displacement meter should arrange and be fixing so that its nominal position approaches the expectation surface location.This surface should be moved to nominal position according to the measurement result that obtains in the previous step.Under any situation, position coder, stepper motor or other suitable device can be used for following the tracks of the translation of nominal position, and the output of position coder can be used for regulating the net result of this process.In this way, glass plate inspection or treatment facility can be positioned in pre-determined accuracy exactly from glass surface optimal working distance (or glass can be located with respect to equipment).
The configuration of above-mentioned optical displacement meter can be used it with other equipment such as microscope, with on the locating surface a bit.In actual applications, microscope can be along the direction of measurement setting, and the optical displacement meter carries out range observation to the surface of watching by microscope along direction of measurement.The distance that the optical displacement instrumentation gets can be used by microscope or other similar equipment, for example is used for checking purpose so that tested lip-deep ad-hoc location enters focus, maybe this surface is placed ad-hoc location, or the surface is remained in specific range.The optical displacement meter can be used for the contactless inspection of the minute surface such as the surface of the glass plate that forms by smelting process.
Reference numeral in the accompanying drawing has following implication:
10: input light; 12: light source; 13: the position; 13 ': the position; 14: projecting lens; 16: diffuse surface; 18: reflection ray; 18 ': reflection ray; 20: object lens; 23: translation mechanism; 22: detecting device; 24: mirror reflection surface; 25: the position; 25 ': the position; 25 ": the position; 27: fixator; 30: the optical displacement meter; 31: observation station; 32: the surface; 32 ': the surface; 33: the back side; 34: destination object; 35: direction of measurement; 36: light source; 37: the position; 37 ': the position; 38: light beam; 40: nominal position; 41: platform; 42: photodetector; 43: platform; 44: reflection; 46: imaging len; 50: detector plane; 52: handle electronic circuit; 53: data analyzer; 54: display device; 55:CPU; 57: memory device; 59: motion controller; 60: light source; 62: heating radiator; 64: coupled lens; 66: optical fiber; 68: fibre-optical fixator; 69: optical fiber connector; 70: condenser; 72: divergent lens; 74,76: convergent lens; 79: focus; 80: reflection; 80 ': reflection; 90,92: dot set.
Therefore, present disclosure comprises one or more among following non-limiting aspect/embodiment:
C1. one kind is used for the mirror reflection surface of measuring object along the method for the relative position of slotted line, comprising:
(a) at least one convergent beam is converged at nominal position place on the slotted line, and form the reflecting bundle from this mirror reflection surface;
(b) record the image of this reflecting bundle at the detector plane place;
(c) determine the position of image in detector plane of reflecting bundle; And
(d) position with the image of reflecting bundle converts the displacement of mirror reflection surface along slotted line from nominal position to.
C2. as the described method of C1, wherein a plurality of convergent beams are assembled at the nominal position place in step (a).
C3. as C1 or the described method of C2, wherein also comprise:
(e) move mirror reflection surface or nominal position a certain amount of based on the displacement that obtains in the step (d); And
(f) repeating step (a)-(d).
C4. as C1 or the described method of C2, wherein also comprise:
(e) move mirror reflection surface or nominal position a certain amount of based on the displacement that obtains in the step (d);
(f) determine absolute error in the displacement measurement; And
(g) repeating step (a)-(f) is in or less than predetermined value up to this absolute error.
C5. as C1 or the described method of C2, wherein also comprise:
(e) store or export this displacement as the result of this method.
C6. as C1 each described method in the C3, wherein this object has a plurality of mirror reflection surface, and reflecting bundle each from a plurality of mirror reflection surface in step (a) forms, and the image of reflecting bundle is recorded at the detector plane place in step (b).
C7. as C1 each described method in the C6, wherein also be included in step (b) before or simultaneously slotted line focused on the detector plane with step (b).
C8. as C1 each described method in the C7, wherein step (d) comprises that utilization calibrates mirror reflection surface along the displacement of slotted line and the transfer function between the position of reflecting bundle image in detector plane along corresponding a plurality of picture positions on a plurality of known surface position of slotted line and the detector plane.
C9. one kind is used for the mirror reflection surface of measuring object along the device of the relative position of slotted line, comprising:
Light source, this light source produces at least one light beam that converges at the nominal position place on the slotted line, and forms the folded light beam from mirror reflection surface;
Photodetector, this photodetector is at the image of detector plane place record folded light beam; And
Data analyzer, this data analyzer from photodetector receiving record, processing and analyze this record with the image of determining folded light beam detector plane the position and convert this position the displacement of mirror reflection surface along slotted line from nominal position to.
C10. as the described device of C9, wherein also comprise imaging len, wherein imaging len and detector plane are located and are orientated to imaging len is focused on slotted line on the detector plane.
C11. as the described device of C10, wherein imaging len is object lens or moves a mirror.
C12. as C9 each described device in the C11, wherein the data analyzer utilization is calibrated mirror reflection surface along the displacement of slotted line and the transfer function between the position of reflecting bundle image in detector plane, to convert this position to displacement along corresponding a plurality of picture positions on a plurality of known surface position of slotted line and the detector plane.
It should be apparent to those skilled in the art that and under the situation that does not deviate from the spirit and scope of the present invention, to make various modifications and variations to the present invention.Thereby the present invention is intended to contain all such modifications of the present invention and modification, as long as they drop in the scope of appended claims and equivalent technique scheme thereof.
Claims (10)
1. one kind is used for the mirror reflection surface of measuring object along the method for the relative position of slotted line, wherein said mirror reflection surface is smooth relatively, the surface that is similar to catoptron that single incident ray is reflexed to narrow outbound course scope, and described slotted line refers to the straight line that is associated with displacement measuring device, and described method comprises:
(a) at least one convergent beam is converged at nominal position place on the described slotted line, and form the reflecting bundle from described mirror reflection surface, wherein said nominal position refers to preferred tested surface location;
(b) record described reflecting bundle image at the detector plane place by detecting device;
(c) determine the position of described image in described detector plane of described reflecting bundle;
(d) position with the described image of described reflecting bundle converts the displacement of described mirror reflection surface along described slotted line from described nominal position to;
(e) move described mirror reflection surface or described nominal position a certain amount of based on the described displacement that obtains in the step (d);
(f) determine absolute error in the described displacement measurement; And
(g) repeating step (a)-(f) is in or less than predetermined value up to described absolute error.
2. the method for claim 1 is characterized in that, a plurality of convergent beams are assembled at described nominal position place in step (a).
3. method as claimed in claim 1 or 2, it is characterized in that, described object has a plurality of mirror reflection surface, and reflecting bundle each from described a plurality of mirror reflection surface in step (a) forms, and the image of described reflecting bundle is recorded at described detector plane place in step (b).
4. the method for claim 1, it is characterized in that, described object has a plurality of mirror reflection surface, and reflecting bundle each from described a plurality of mirror reflection surface in step (a) forms, and the image of described reflecting bundle is recorded at described detector plane place in step (b).
5. method as claimed in claim 1 or 2, it is characterized in that step (d) comprises that utilization calibrates described mirror reflection surface along the transfer function between the position of image in described detector plane of the displacement of described slotted line and described reflecting bundle along corresponding a plurality of picture positions on a plurality of known surface position of described slotted line and the described detector plane.
6. the method for claim 1, it is characterized in that step (d) comprises that utilization calibrates described mirror reflection surface along the transfer function between the position of image in described detector plane of the displacement of described slotted line and described reflecting bundle along corresponding a plurality of picture positions on a plurality of known surface position of described slotted line and the described detector plane.
7. one kind is used for the mirror reflection surface of measuring object along the device of the relative position of slotted line, wherein said mirror reflection surface is smooth relatively, the surface that is similar to catoptron that single incident ray is reflexed to narrow outbound course scope, and described slotted line refers to the straight line that is associated with displacement measuring device, and described device comprises:
Light source, described light source produces at least one light beam that converges at the nominal position place on the described slotted line, and forms the folded light beam from described mirror reflection surface, and wherein said nominal position refers to preferred tested surface location;
Photodetector, described photodetector record the image of described folded light beam at the detector plane place; And
Data analyzer, described data analyzer from described photodetector receiving record, processing and analyze described record with the image of determining described folded light beam described detector plane the position and convert described position the displacement of described mirror reflection surface along described slotted line from described nominal position to
Telecontrol equipment moves described mirror reflection surface or described nominal position a certain amount of based on the displacement that is obtained by data analyzer;
Wherein said data analyzer is determined the absolute error in the described displacement measurement, and the image of described photodetector record folded light beam, described data analyzer obtain displacement and determine absolute error and described telecontrol equipment with mirror reflection surface or nominal position move a certain amount of be repeated to carry out up to described absolute error be in or less than predetermined value.
8. device as claimed in claim 7 is characterized in that, also comprises imaging len, and wherein said imaging len and described detector plane are located and are orientated to described imaging len is focused on described slotted line on the described detector plane.
9. device as claimed in claim 8 is characterized in that, described imaging len is object lens or moves a mirror.
10. as each the described device in the claim 7 to 9, it is characterized in that, described data analyzer utilization is calibrated described mirror reflection surface along the transfer function between the described position of image in described detector plane of the described displacement of described slotted line and described reflecting bundle, to convert described position to described displacement along corresponding a plurality of picture positions on a plurality of known surface position of described slotted line and the described detector plane.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/433,257 | 2009-04-30 | ||
| US12/433,257 US20100277748A1 (en) | 2009-04-30 | 2009-04-30 | Method and System for Measuring Relative Positions Of A Specular Reflection Surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101876534A CN101876534A (en) | 2010-11-03 |
| CN101876534B true CN101876534B (en) | 2013-09-18 |
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ID=43019150
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| CN201010173741.1A Expired - Fee Related CN101876534B (en) | 2009-04-30 | 2010-04-30 | Method and system for measuring relative positions of a specular reflection surface |
| CN2010201893491U Expired - Fee Related CN201803699U (en) | 2009-04-30 | 2010-04-30 | Device for measuring relative position of specular reflection surface |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201893491U Expired - Fee Related CN201803699U (en) | 2009-04-30 | 2010-04-30 | Device for measuring relative position of specular reflection surface |
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| US (1) | US20100277748A1 (en) |
| JP (1) | JP5829381B2 (en) |
| KR (1) | KR101751877B1 (en) |
| CN (2) | CN101876534B (en) |
| TW (1) | TWI472710B (en) |
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| US20100277748A1 (en) * | 2009-04-30 | 2010-11-04 | Sergey Potapenko | Method and System for Measuring Relative Positions Of A Specular Reflection Surface |
| US8582123B2 (en) * | 2010-09-03 | 2013-11-12 | Accolade Electronics Company Limited | Apparatus for determining thickness of a banknote |
| DE102012103428A1 (en) * | 2012-04-19 | 2013-10-24 | Hseb Dresden Gmbh | inspection arrangement |
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| JP6239881B2 (en) * | 2013-07-10 | 2017-11-29 | 浜松ホトニクス株式会社 | Image acquisition apparatus and image acquisition method |
| CA2933249C (en) * | 2013-12-09 | 2020-11-10 | Hatch Pty Ltd | Measuring apparatus and method for same |
| US11340352B2 (en) | 2014-12-29 | 2022-05-24 | Pixart Imaging Inc. | Image noise compensating system, and auto clean machine |
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| CN106033631A (en) * | 2015-03-11 | 2016-10-19 | 山东新北洋信息技术股份有限公司 | Image sensor and paper money processing device |
| JP6505506B2 (en) * | 2015-05-29 | 2019-04-24 | シャープ株式会社 | Optical sensor and electronic device |
| JP6623624B2 (en) * | 2015-09-01 | 2019-12-25 | セイコーエプソン株式会社 | Media texture detection device |
| JP6597150B2 (en) * | 2015-10-09 | 2019-10-30 | 富士通株式会社 | Distance measuring device, distance measuring method, distance measuring program, and table creation method |
| JP2017122673A (en) | 2016-01-08 | 2017-07-13 | 富士通株式会社 | Laser distance measuring apparatus, measuring method and measuring program |
| EP3258243B1 (en) * | 2016-06-13 | 2019-05-08 | WEISS UMWELTTECHNIK GmbH | Sensor assembly and method for detecting dew formation |
| CN106767675B (en) * | 2017-02-06 | 2019-04-02 | 重庆理工大学 | The optimization method of f-theta measuring system based on light pencil |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2010261949A (en) | 2010-11-18 |
| TW201107706A (en) | 2011-03-01 |
| KR20100119526A (en) | 2010-11-09 |
| CN101876534A (en) | 2010-11-03 |
| TWI472710B (en) | 2015-02-11 |
| US20100277748A1 (en) | 2010-11-04 |
| CN201803699U (en) | 2011-04-20 |
| KR101751877B1 (en) | 2017-06-28 |
| JP5829381B2 (en) | 2015-12-09 |
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