CN101870452B - Preparation method of MEMS wire biological microelectrode - Google Patents

Abstract

The invention relates to an MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode and a preparation method thereof in the technical field of medical apparatuses and instruments. The method comprises the following steps of: (1) cleaning a platinum wire; (2) heating one or more areas on the platinum wire to 150-500 DEG C by utilizing heating equipment; and (3) depositing a layer of polymers on the heated platinum wire as an insulating layer of the metal wire electrode; and cooling to obtain a metal wire biological microelectrode with one or more electrode points.

Description

Preparation method of MEMS wire biological microelectrode

technical field

The invention relates to a preparation method in the technical field of medical devices, in particular to a preparation method of a MEMS wire biological microelectrode.

Background technique

Functional neuromuscular electrical stimulation plays an important role in the treatment of neurological dysfunction and rehabilitation of nerve injury. With the development of microelectronics technology, micro-nano technology and biotechnology, nerve electrical stimulation has gradually developed from traditional transcutaneous electrical stimulation to implantable electrical stimulation. At present, implantable nerve electrical stimulation has made great progress in the treatment and control of neurological diseases, such as Parkinson's syndrome, retinal nerve disorders, auditory nerve disorders, paralysis, urinary incontinence and epilepsy. Electrical stimulation, as well as the treatment of Alzheimer's disease, pain relief and drug detoxification through electrical stimulation, also have attractive prospects.

In various implantable electrical stimulation systems, the microelectrode used to stimulate functional neuromuscular is a very important part, it plays the role of recording electrical signals from motor fibers and using electrical signals to stimulate or inhibit neural activity In order to realize the important role of functional electrical stimulation, the performance of electrodes is directly related to the stimulating effect of electrical pulses on nerve cells. With the development of MEMS technology, it is possible to manufacture microelectrodes with micromachining technology. Many scholars at home and abroad have proposed different microelectrode structures and manufacturing methods. At present, the metal electrodes used for neuromuscular stimulation mainly use a polymer insulation layer coated on the metal wire, so that a small part of the wire end is exposed as an electrode point.

After searching the prior art literature, it was found that Liming Li, PengJia Cao, Mingjie Sun et al wrote an article in "GRAEFE'SARCHIVE FOR CLINICAL AND EXPERIMENT OPHTHALMOLOGY" 247(2009) p349-361 ("Using penetrating electrodes to stimulate the optic nerve in the orbit "). The manufacturing method of the microelectrode for intraorbital muscle stimulation mentioned in this article is to cover the polymer on the wire, and expose a small part of metal at one end of the wire as an electrode point. The electrode prepared by this method has a low degree of integration of electrode points, and multiple electrode wires need to be implanted during multi-point stimulation. The implantation operation is cumbersome and the implantation result is unreliable. Its coating does not bond well to the wire, and its edge shape is too sharp. It is not conducive to long-term implantation in the body and deep tissue of the human body.

Contents of the invention

The object of the present invention is to provide a method for preparing a MEMS metal wire biological microelectrode aiming at the deficiencies and defects of the prior art. This kind of electrode can integrate multiple electrode points on a metal wire, and can perform parallel multi-point stimulation of functional neuromuscular, and the insulating layer on the electrode has a good bonding force with the metal wire and is not easy to fall off.

The present invention is achieved through the following technical solutions,

The present invention comprises the following steps:

The first step is to clean the platinum wire;

In the second step, heating one or more regions on the platinum wire to 150°C to 500°C by heating equipment;

In the third step, a layer of polymer is deposited on the heated platinum wire as an insulating layer for the wire electrode. After cooling, a wire biological microelectrode with one or more electrode points is obtained.

The present invention first cleans the metal wire, and secondly heats the area on the wire that needs to be used as an electrode point to 150°C to 500°C; thirdly, deposits a layer of parylene polymer film on the heated wire, according to the parylene Unique properties, the temperature in the region of 150 ℃ to 500 ℃ will not deposit parylene polymer, but in other places where the temperature is low, a layer of parylene polymer film insulation layer can be covered; after the deposition of the film is completed, the After cooling, the MEMS wire biological microelectrode with electrode points exposed is obtained.

Compared with the prior art, the preparation process of the present invention is simple, easy to operate, and economical. The prepared MEMS metal wire biological microelectrode has a high degree of integration of electrode points, and multiple electrode points can be prepared on one wire at the same time to provide multi-point stimulation functions. The implantation process is simple. Secondly, the insulating layer of this MEMS metal wire biological microelectrode uses a polymer deposition method, which has a good bonding force with the metal wire and is not easy to fall off. Thirdly, this kind of MEMS metal wire biological microelectrode has high flexibility, little trauma to biological tissue, and is suitable for long-term implantation in living body.

Description of drawings

Fig. 1 is embodiment 1 schematic diagram;

Fig. 2 is embodiment 2 schematic diagram;

Fig. 3 is the schematic diagram of embodiment 3.

Detailed ways

The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

Example 1

As shown in Figure 1, the present embodiment is prepared through the following steps

The first step is to clean the platinum wire;

The cleaning refers to cleaning with ultrasonic vibration.

In the second step, an induction heating device is used to heat an area on the platinum wire to 150°C.

The area width on the wire is 100 μm.

The third step is to deposit a polymer with a thickness of 4-5 μm on the platinum wire as an insulating layer of the platinum wire electrode. An electrode spot with a width of 100 μm is exposed. After cooling, a wire biological microelectrode with one electrode point is obtained.

The number of electrode points obtained in this embodiment is 1, and the width of the electrode points is 100 μm.

The diameter of the metal wire in this embodiment is 100 μm, and the metal is platinum; the polymer insulating layer is parylene.

Example 2

As shown in Figure 2, the present embodiment is prepared through the following steps

The first step is to clean the platinum wire;

The cleaning refers to cleaning with ultrasonic vibration.

In the second step, the two regions on the platinum wire are heated to 250° C. by means of a micro-resistance wire heating device. Both regions on the wire have a width of 100 μm.

The third step is to deposit a polymer with a thickness of 4-5 μm on the platinum wire as an insulating layer of the platinum wire electrode. Two electrode spots with a width of 100 μm are exposed. After cooling, a metal wire biological microelectrode with two electrode points is obtained.

The number of electrode points obtained in this embodiment is 2, and the width of the electrode points is 100 μm.

The diameter of the metal wire in this embodiment is 100 μm, and the metal is platinum; the polymer insulating layer is parylene.

Example 3

As shown in Figure 3, the present embodiment is prepared through the following steps

The first step is to clean the platinum wire;

The cleaning refers to cleaning with ultrasonic vibration.

In the second step, the three regions on the platinum wire are heated to 500° C. by means of a micro-resistance wire heating device. The three regions on the wire are all 100 μm wide.

The third step is to deposit 8-9 μm polymer on the platinum wire as the insulating layer of the platinum wire electrode. Three electrode spots with a width of 100 μm are exposed. After cooling, a wire biological microelectrode with three electrode points is obtained.

The number of electrode points obtained in this embodiment is 3, and the width of the electrode points is 100 μm.

The diameter of the metal wire in this embodiment is 100 μm, and the metal is platinum; the polymer insulating layer is parylene.

The process of the above embodiment is simple and easy to operate, economical and economical. The prepared MEMS metal wire biological microelectrode has a high degree of integration of electrode points, and multiple electrode points can be prepared on one wire at the same time to provide multi-point stimulation functions. The implantation process is simple. Secondly, the insulating layer of this MEMS metal wire biological microelectrode uses a polymer deposition method, which has a good bonding force with the metal wire and is not easy to fall off. Thirdly, this kind of MEMS metal wire biological microelectrode has high flexibility, little trauma to biological tissue, and is suitable for long-term implantation in living body.

Claims (3)

1. the preparation method of a MEMS wire biological microelectrode is characterized in that, may further comprise the steps:

The first step, cleaning platinum silk;

Second step, utilize one or more zones to 150 as electrode points on the firing equipment heating platinum silk ℃ to 500 ℃;

The 3rd the step, on heated platinum silk, deposit one layer of polymeric, as the insulating barrier of wire electrode, through the cooling, the wire biological microelectrode that obtains having one or more electrode points; Described deposited polymer is the Parylene of vapour deposition.

2. the preparation method of MEMS wire biological microelectrode according to claim 1 is characterized in that described thickness of insulating layer is 4-5 μ m or 8-9 μ m.

3. the preparation method of MEMS wire biological microelectrode according to claim 1 is characterized in that, described cleaning is meant uses ultrasonic oscillation to clean.

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