CN101870002A - A flatness error control method for large-scale optical components processed by single-point diamond milling - Google Patents
A flatness error control method for large-scale optical components processed by single-point diamond milling Download PDFInfo
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Abstract
一种单点金刚石铣削法加工大尺寸光学元件的平面度误差控制方法，它涉及大尺寸脆性光学元件超精密加工领域。它解决了现有的SPDT法在加工大尺寸光学元件时平面度误差大、面形精度难以保证的问题，本发明首先利用干涉仪检测机座上的大尺寸光学元件的平面度形貌及平面度误差Δ，然后根据平面度误差Δ计算飞刀盘轴线倾角，再根据检测获得的平面度形貌调整三个楔形球面支撑体，以实现飞刀盘偏转
角度，最后利用调整好的机床对光学元件进行二次超精密加工，再利用干涉仪重新检测平面度形貌及平面度误差Δ，当平面度误差Δ满足聚变系统要求时，完成单点金刚石铣削法加工大尺寸光学元件的平面度误差控制。本发明适用于大尺寸光学元件的面形加工。The invention discloses a flatness error control method for processing large-scale optical elements by a single-point diamond milling method, which relates to the field of ultra-precision machining of large-scale brittle optical elements. It solves the problem that the existing SPDT method has large flatness errors and difficult to guarantee surface shape accuracy when processing large-size optical elements. The invention firstly uses an interferometer to detect the flatness and shape of the large-size optical elements on the machine base. degree error Δ, and then calculate the inclination angle of the flying cutter head axis according to the flatness error Δ , and then adjust the three wedge-shaped spherical supports according to the flatness profile obtained by the detection, so as to realize the deflection of the flying cutter head Finally, use the adjusted machine tool to perform secondary ultra-precision machining on the optical components, and then use the interferometer to re-detect the flatness shape and flatness error Δ. When the flatness error Δ meets the requirements of the fusion system, complete single-point diamond milling Flatness error control of large-scale optical components processed by method. The invention is suitable for surface processing of large-scale optical elements.
Description
Technical field
The present invention relates to fragility optical element ultraprecise manufacture field, be specifically related to a kind of flatness error control method that utilizes single-point diamond turning (SPDT) method machining large-sized optical elements.
Background technology
Human serious dependence to fossil energy is the main cause of ecological deterioration, and it is very urgent to seek new alternative energy source.Fusion energy resource cleaning, pollution-free and almost inexhaustible, utilizing the laser controlling nuclear fusion to obtain the energy is the desirable approach that does not solve energy problem, each developed country all pays close attention to it at present.The laser that laser driver is exported requires to have good beam quality, sufficiently high laser energy and power density, need be used a large amount of electric light, nonlinear optical material element for satisfying this requirement, as KDP crystal, neodymium glass, K9 glass, quartz glass etc.Laser constraint nuclear fusion device is high accuracy face shape, super-smooth surface to the common requirement of these elements, large scale and big batch, and wherein, high surface figure accuracy is to need the special technical indicator of paying attention to.Because system light path is longer, optical surface is more, the face shape error that element forms when making with assembling can produce bigger static wavefront error in the Laser Transmission process, it not only reduces the laser damage threshold of element, more can influence the output beam quality of laser system, the big wavefront distortion that forms when serious will make the focal beam spot disperse, directly cause encircled energy reduction or more fatal target practice plug-hole phenomenon on the target surface, threaten whole system safety.And the required optical element of constructing system mostly is fragile material, and single-point diamond turning (Singlepointdiamondturning, SPDT) technology is a kind of processing method preferably of present work brittleness material, especially at the soft crisp material KDP crystal as Pockels box and non-linear frequency conversion element, the SPTD method is collapsed advantage such as limit especially and is become at present first choice of this crystal processing method with its nothing.Yet, because the SPTD milling machine adopts the gyration of larger-diameter " fly cutter " dish to remove material, when machining large-sized optical element, be difficult to guarantee that the flying disc axis of rotation is vertical all the time with the table feed rectilinear direction, thereby very easily introduce face shape error in the process, big face shape error can cause serious wavefront distortion, it may cause the whole system collapsibility to destroy, and is the foozle that must suppress.
Summary of the invention
In order to solve the existing SPDT method problem that flatness error is big when the machining large-sized optical elements, surface figure accuracy is difficult to guarantee, the invention provides a kind of flatness error control method of single-point diamond turning method machining large-sized optical elements.
The flatness error control method of a kind of single-point diamond turning method machining large-sized optical elements of the present invention, it is based on the machining tool realization, described machining tool comprises support, the flying disc support, two digital gradienter and flying disc, described flying disc is fixed on the center of flying disc support, described two digital gradienter are positioned at the flying disc rack upper surface, described two digital gradienter are used to demarcate the horizontal level of flying disc, also be used to measure the deflection angle of described flying disc, be fixed with the first wedge shape spherical support body between described flying disc frame bottom and the support, the second wedge shape spherical support body and the 3rd wedge shape spherical support body, the described first wedge shape spherical support body, the second wedge shape spherical support body and the 3rd wedge shape spherical support body are used to support the flying disc support, also be used to finely tune the angle of inclination of described flying disc support, the center of the described first wedge shape spherical support body, the line of centres of the center of the second wedge shape spherical support body and the 3rd wedge shape spherical support body is formed isosceles triangle, wherein the center of the 3rd wedge shape spherical support body is the summit of this isoceles triangle shape, the central point of this isoceles triangle shape is positioned on the rotation of flying disc, the structure of described three wedge shape spherical support bodies is identical, described each wedge shape spherical support body comprises L shaped gripper shoe, movable plate, spherical gripper shoe, wedge, adjust bolt and adjust nut, spherical gripper shoe is positioned on the movable plate, and sphere that should the sphere gripper shoe embeds in the movable plate, described movable plate is positioned on the L shaped gripper shoe, and an end of described movable plate is adjacent with the riser of L shaped gripper shoe, form wedge shape space between the bottom surface of described movable plate and the transverse slat of L shaped gripper shoe, wedge is embedded in this wedge shape space, described adjustment bolt is threaded with the small end of wedge after passing the riser of L shaped gripper shoe, be positioned at the outer adjustment nut of L shaped gripper shoe and be connected with the adjustment bolt thread, the detailed process of described control method is:
Step 1: utilize interferometer to detect the flatness pattern and the flatness error Δ of the large-sized optical elements on the support, described flatness pattern is concave surface or convex surface;
Step 2: calculate flying disc axis inclination angle according to the flatness error Δ
, wherein, R is the radius of flying disc, B is the length of side on a limit of large-sized optical elements, and this length of side is vertical with the support direction of feed;
Step 3: detect whether the flatness pattern that obtains is concave surface in the determining step one, if then execution in step four, otherwise execution in step five;
Step 4: the adjustment bolt by the precession second wedge shape spherical support body increases the embedded quantity of wedge of this supporter or the embedded quantity that the adjustment bolt that screws out the first wedge shape spherical support body reduces the wedge of this supporter, to realize flying disc deflection
Angle, the adjustment bolt by adjusting the 3rd wedge shape spherical support body is to eliminate or to reduce flying disc along the tilt quantity on the vertical support direction of feed simultaneously, and execution in step six then;
Step 5: the adjustment bolt by the precession first wedge shape spherical support body increases the embedded quantity of the wedge of this supporter, or the adjustment bolt that screws out the second wedge shape spherical support body reduces the embedded quantity of wedge of this supporter to realize flying disc deflection
Angle, the adjustment bolt by adjusting the 3rd wedge shape spherical support body is to eliminate or to reduce flying disc along the tilt quantity on the vertical support direction of feed simultaneously, and execution in step six then;
Step 6: utilize the lathe that obtains after step 4 or the step 5 adjustment that large-sized optical elements is carried out the processing of secondary ultraprecise, utilize interferometer to detect the flatness pattern and the flatness error Δ of described large-sized optical elements again again, and judge whether detect the flatness error Δ that obtains satisfies the fusion system requirements, if, then execution in step seven, otherwise return step 2, adjust processing once more;
Step 7: finish the flatness error control of single-point diamond turning method machining large-sized optical elements.
Beneficial effect of the present invention is: the present invention can realize the accurate Detection ﹠ Controling of single-point diamond turning optical component surface shape; Of the present invention by adjusting the position of each wedge shape spherical support body, guaranteed that the flying disc axis of rotation is vertical all the time with the table feed rectilinear direction, can realize μ m rank even higher degree of regulation, itself and digital gradienter are used the flatness error that has realized processed large-sized optical elements and are controlled in the scope of fusion system requirements; Method of the present invention has realized the control of flatness error, and this control principle is simple, handling safety, and reliable results, and because of avoiding to the processing repeatedly of large-sized optical elements U working (machining) efficiency being improved, significant to the ICF engineering.
Description of drawings
Fig. 1 is the flow chart of the flatness error control method of a kind of single-point diamond turning method machining large-sized optical elements of the present invention, Fig. 2 is the structural representation of existing machining tool, Fig. 3 is the structural representation of each the wedge shape spherical support body in the existing machining tool, and Fig. 4 is the front view of Fig. 3; Fig. 5 is that the flatness pattern of detected large-sized optical elements U among the present invention is the schematic diagram of concave surface, and Fig. 6 is that the flatness pattern of detected large-sized optical elements U among the present invention is the schematic diagram of convex surface; Fig. 7 is the structural representation of flying disc 4 among the present invention; Fig. 8 is the position view of support 1 and large-sized optical elements U among the present invention.
The specific embodiment
The specific embodiment one: according to Figure of description 1,2,3,4,5,6,7 and 8 specify present embodiment, the flatness error control method of the described a kind of single-point diamond turning method machining large-sized optical elements of present embodiment, it is based on the machining tool realization, described machining tool comprises support 1, flying disc support 2, two digital gradienter 3 and flying disc 4, described flying disc 4 is fixed on the center of flying disc support 2, described two digital gradienter 3 are positioned at flying disc support 2 upper surfaces, described two digital gradienter 3 are used to demarcate the horizontal level of flying disc 4, also be used to measure the deflection angle of described flying disc 4, be fixed with the first wedge shape spherical support body 2-1 between described flying disc support 2 bottoms and the support 1, the second wedge shape spherical support body 2-2 and the 3rd wedge shape spherical support body 2-3, the described first wedge shape spherical support body 2-1, the second wedge shape spherical support body 2-2 and the 3rd wedge shape spherical support body 2-3 are used to support flying disc support 2, also be used to finely tune the angle of inclination of described flying disc support 2, the center of the described first wedge shape spherical support body 2-1, the line of centres of the center of the second wedge shape spherical support body 2-2 and the 3rd wedge shape spherical support body 2-3 is formed isosceles triangle, wherein the center of the 3rd wedge shape spherical support body 2-3 is the summit of this isoceles triangle shape, the central point of this isoceles triangle shape is positioned on the rotation of flying disc 4, the structure of described three wedge shape spherical support bodies is identical, described each wedge shape spherical support body comprises L shaped gripper shoe 2-11, movable plate 2-12, spherical gripper shoe 2-13, wedge 2-14, adjust bolt 2-15 and adjust nut 2-16, spherical gripper shoe 2-13 is positioned on the movable plate 2-12, and sphere that should sphere gripper shoe 2-13 embeds in the movable plate 2-12, described movable plate 2-12 is positioned on the L shaped gripper shoe 2-11, and the end of described movable plate 2-12 is adjacent with the riser of L shaped gripper shoe 2-11, form wedge shape space between the bottom surface of described movable plate 2-12 and the transverse slat of L shaped gripper shoe 2-11, wedge 2-14 is embedded in this wedge shape space, described adjustment bolt 2-15 is threaded with the small end of wedge 2-14 after passing the riser of L shaped gripper shoe 2-11, be positioned at the outer adjustment nut 2-16 of L shaped gripper shoe 2-11 and be threaded with adjusting bolt 2-15, the detailed process of described control method is:
Step 1: utilize interferometer to detect flatness pattern and the flatness error Δ of the large-sized optical elements U on the support 1, described flatness pattern is concave surface or convex surface;
Step 2: calculate flying disc axis inclination angle according to the flatness error Δ
, wherein, R is the radius of flying disc 4, B is the length of side on the limit of large-sized optical elements U, and this length of side is vertical with support 1 direction of feed;
Step 3: detect whether the flatness pattern that obtains is concave surface in the determining step one, if then execution in step four, otherwise execution in step five;
Step 4: the adjustment bolt by the precession second wedge shape spherical support body 2-2 increases the embedded quantity of wedge of this supporter or the embedded quantity that the adjustment bolt that screws out the first wedge shape spherical support body 2-1 reduces the wedge of this supporter, to realize flying disc 4 deflections
Angle, the adjustment bolt by adjusting the 3rd wedge shape spherical support body 2-3 is to eliminate or to reduce flying disc 4 along the tilt quantity on vertical support 1 direction of feed simultaneously, and execution in step six then;
Step 5: the adjustment bolt by the precession first wedge shape spherical support body 2-1 increases the embedded quantity of the wedge of this supporter, or the adjustment bolt that screws out the second wedge shape spherical support body 2-2 reduces the embedded quantity of wedge of this supporter to realize flying disc 4 deflections
Angle, the adjustment bolt by adjusting the 3rd wedge shape spherical support body 2-3 is to eliminate or to reduce flying disc 4 along the tilt quantity on vertical support 1 direction of feed simultaneously, and execution in step six then;
Step 6: utilize the lathe that obtains after step 4 or the step 5 adjustment that large-sized optical elements U is carried out the processing of secondary ultraprecise, utilize interferometer to detect flatness pattern and the flatness error Δ of described large-sized optical elements U again again, and judge whether detect the flatness error Δ that obtains satisfies the fusion system requirements, if, then execution in step seven, otherwise return step 2, adjust processing once more;
Step 7: finish the flatness error control of single-point diamond turning method machining large-sized optical elements U.
In the present embodiment, described fusion system requirements is the preceding error＜λ of the maximum ejected wave of large-sized optical elements U/6, and wherein, λ represents laser wavelength of incidence.
In the present embodiment, being used for the interferometer of measuring element surface figure accuracy is the laser digital interferometer that U.S. ZYGO company produces, it utilizes interference technique detection plane, sphere face shape real-time, opticator adopts the Feisuo principle of interference, digital processing partly adopts a phase method and two kinds of methods of the Schlieren method to carry out the interference pattern interpretation, and repeatable accuracy can reach 1/100 wavelength peak-to-valley value.The camera lens of ZYGO interferometer is selected for use can reference
, wherein, D be the camera lens effective diameter (4 ~ 100mm),
Be focal length (focallength) that R is a curvature of face radius to be measured, d is the test specification diameter, F=
/ D is a lens parameters, and the F value can select 0.75,1.5,3.3 or 7.2.
In the present embodiment, the plane of being detected (actual is concave surface or convex surface) radius of curvature is very big, is far longer than the tested surface size possibly, so should select the camera lens of big F value for use.In addition, the ZYGO interferometer is very responsive to vibrations, need take relevant isolation measure during actual measurement.
In the present embodiment, utilize the microcomputer interface of digital gradienter, can be well understood to the vertical condition of such of the axis and support 1 horizontal table of flying disc 4, and can second class precision adjust the deflection angle of flying disc 4 by monitoring software.
The model of mutual vertically arranged two the digital digital gradienter 3 in the present embodiment is DL11, this type figure level meter highest measurement precision is 0.001mm/m, its result can also angle (second) be unit output, and outfit standard RS232 interface, can be connected monitoring flying disc support 2 levels in real time with computer, promptly obtain the level of flying disc 4.
It is guiding mechanism in 201010195838.2 the Chinese patent that each wedge shape spherical support body in the present embodiment also can adopt application number.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102172990A (en) * | 2011-01-11 | 2011-09-07 | 哈尔滨工业大学 | Method for predicting surface roughness in single-point diamond turning |
| CN102818635A (en) * | 2012-08-25 | 2012-12-12 | 河南省高远公路养护技术有限公司 | Method for improving calibration precision of infrared sensor |
| CN102837367A (en) * | 2012-09-25 | 2012-12-26 | 哈尔滨工业大学 | Control method of surface waviness of large-size optical element processed through single point diamond milling method |
| CN103264182A (en) * | 2013-05-02 | 2013-08-28 | 中国葛洲坝集团股份有限公司 | Processing method for special-shaped curved-surface steel plate washers during on-site assembling and shrink fitting of high-rating generator rotor |
| CN103713102A (en) * | 2013-12-30 | 2014-04-09 | 哈尔滨工业大学 | Two-dimensional large-stroke linkage device for repairing surface micro defects of large-caliber optical element |
| CN109916338A (en) * | 2019-02-28 | 2019-06-21 | 同济大学 | Precision Measuring System for Wafer Surface Inclination Variation |
| CN110814432A (en) * | 2019-11-13 | 2020-02-21 | 中国工程物理研究院机械制造工艺研究所 | Ultra-precise fly-cutting machining method for micron-scale steps |
| CN111545909A (en) * | 2020-05-18 | 2020-08-18 | 安徽华东光电技术研究所有限公司 | Non-interception grid-control electron gun grid aligning tool |
| CN111823418A (en) * | 2020-06-29 | 2020-10-27 | 中国工程物理研究院机械制造工艺研究所 | Ultra-precise fly-cutting machining tool surface shape error compensation and control method |
| CN113997202A (en) * | 2021-11-12 | 2022-02-01 | 西安应用光学研究所 | High-efficiency trimming method for accurately quantifying high flatness of large-size grinding disc |
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| CN102172990A (en) * | 2011-01-11 | 2011-09-07 | 哈尔滨工业大学 | Method for predicting surface roughness in single-point diamond turning |
| CN102172990B (en) * | 2011-01-11 | 2013-10-30 | 哈尔滨工业大学 | Method for predicting surface roughness in single-point diamond turning |
| CN102818635A (en) * | 2012-08-25 | 2012-12-12 | 河南省高远公路养护技术有限公司 | Method for improving calibration precision of infrared sensor |
| CN102818635B (en) * | 2012-08-25 | 2015-06-10 | 河南省高远公路养护技术有限公司 | Method for improving calibration precision of infrared sensor |
| CN102837367A (en) * | 2012-09-25 | 2012-12-26 | 哈尔滨工业大学 | Control method of surface waviness of large-size optical element processed through single point diamond milling method |
| CN102837367B (en) * | 2012-09-25 | 2014-10-29 | 哈尔滨工业大学 | Control method of surface waviness of large-size optical element processed through single point diamond milling method |
| CN103264182A (en) * | 2013-05-02 | 2013-08-28 | 中国葛洲坝集团股份有限公司 | Processing method for special-shaped curved-surface steel plate washers during on-site assembling and shrink fitting of high-rating generator rotor |
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| CN103713102A (en) * | 2013-12-30 | 2014-04-09 | 哈尔滨工业大学 | Two-dimensional large-stroke linkage device for repairing surface micro defects of large-caliber optical element |
| CN103713102B (en) * | 2013-12-30 | 2015-04-29 | 哈尔滨工业大学 | Two-dimensional large-stroke linkage device for repairing surface micro defects of large-caliber optical element |
| CN109916338A (en) * | 2019-02-28 | 2019-06-21 | 同济大学 | Precision Measuring System for Wafer Surface Inclination Variation |
| CN109916338B (en) * | 2019-02-28 | 2020-06-23 | 同济大学 | Precision measurement system for variation of inclination angle of wafer surface |
| CN110814432A (en) * | 2019-11-13 | 2020-02-21 | 中国工程物理研究院机械制造工艺研究所 | Ultra-precise fly-cutting machining method for micron-scale steps |
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| CN111545909A (en) * | 2020-05-18 | 2020-08-18 | 安徽华东光电技术研究所有限公司 | Non-interception grid-control electron gun grid aligning tool |
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| CN111823418A (en) * | 2020-06-29 | 2020-10-27 | 中国工程物理研究院机械制造工艺研究所 | Ultra-precise fly-cutting machining tool surface shape error compensation and control method |
| CN113997202A (en) * | 2021-11-12 | 2022-02-01 | 西安应用光学研究所 | High-efficiency trimming method for accurately quantifying high flatness of large-size grinding disc |
| CN115014257A (en) * | 2022-06-30 | 2022-09-06 | 南京航空航天大学 | Two-dimensional line laser sensor calibration device and method |
| CN115014257B (en) * | 2022-06-30 | 2023-03-14 | 南京航空航天大学 | Calibration method of two-dimensional line laser sensor |
| CN117124483A (en) * | 2023-07-13 | 2023-11-28 | 同济大学 | Free-form surface prism high-precision compensation processing method based on online and offline detection |
| CN117124483B (en) * | 2023-07-13 | 2024-03-08 | 同济大学 | High-precision compensation processing method for free-form prisms based on online and offline detection |
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