CN101859025A - A reusable high-power semiconductor laser fiber output module - Google Patents

Abstract

The invention relates to the field of lasers, especially a reusable high-power semiconductor laser fiber output module. The invention includes a laser beam shaping system, a focusing system, an upper stepped base, and a lower stepped base. The upper stepped base and the lower stepped base pass through each other The upper end surfaces of the upper and lower stepped bases are buckled together, the laser beam shaping system is installed on the steps of the upper and lower stepped bases, the focusing system is located in the direction of the outgoing light outside the upper and lower stepped bases, and the steps on the said lower stepped bases are staggered. The contact surfaces of the side steps in the middle of the lower step base are V-shaped, and the entire step contact surface is V-shaped wave. The structure of the upper step base is the same as that of the lower step base. The invention can be reused, has no water cooling, has small volume, and can realize high power and high brightness output.

Description

A reusable high-power semiconductor laser fiber output module

technical field

The invention relates to the field of lasers, in particular to a reusable high-power semiconductor laser fiber output module.

Background technique

Semiconductor lasers are used in various aspects of industry and military due to their small size, light weight and high conversion efficiency. However, due to the inherent defects of semiconductor lasers, the beam quality in the slow axis direction is far worse than that in the fast axis direction, the output spot is asymmetrical, and the energy distribution is uneven, which limits its application in some occasions that require high beam quality. The light output through the optical fiber has the advantages of rounded spot and uniform energy distribution. At the same time, it can also achieve arbitrary angle and long-distance transmission. Therefore, the light output through the optical fiber can be well used in laser cutting and laser in industrial processing. punching etc. At the same time, as a pump source, the light output from the fiber can also be directly input into the fiber laser to achieve high-efficiency pumping. Therefore, research on semiconductor laser coupling fiber output technology has become an important direction of laser application research. With the development of industry, people have higher and higher requirements on the output power and efficiency of solid-state and fiber lasers, which requires higher and higher output power and beam quality of semiconductor lasers as pump sources. In short, the demand for semiconductor laser modules that output high power in a single fiber is becoming more and more urgent.

At present, the semiconductor laser module that achieves high power output with a single optical fiber mainly has the following problems: 1) The bar light spot of the semiconductor laser used as the coupling unit is asymmetrical and cannot directly enter the optical fiber. The beam conversion system is expensive and complicated to install and adjust, which undoubtedly increases the cost of the system and the difficulty of debugging; 2) The laser with a power exceeding 60W needs to be cooled by a water-cooling system, which increases the volume and weight of the entire system and is not suitable for practical applications. Convenient; 3) Although semiconductor lasers have a long life, it is inevitable that there will be poor quality lasers. It is not easy to replace the lasers in general systems. Once a low-quality laser appears in the system, this will lead to a decline in the performance of the entire system.目前，美国专利“semiconductor diode lasers with a specificgeometry，US6124973，Frannhofer，2000；Modular diode laser assembly，US0268946，nlight，2007；Diode laser arrangement with a plurality of diode laser arrays，US689822，Jenoptik Laserdiode GmbH，2005”中只有A base with only one row of lasers firing on the base with low power.

Therefore, it is imperative to develop a reusable laser module with multiple semiconductor lasers spatially coupled to a single fiber to achieve high power output without water cooling.

Contents of the invention

In view of the above situation, in order to solve the defects of the prior art, the purpose of the present invention is to propose a reusable, non-water-cooled, small-volume, multi-laser coupled into an optical fiber, which can achieve high-power and high-brightness output semiconductor lasers Modules are used in some occasions that require high light source volume, beam quality and power.

The technical solution adopted by the present invention to solve the technical problem is that the reusable high-power semiconductor laser fiber output module includes a laser beam shaping system, a focusing system, an upper stepped base, and a lower stepped base, and the upper stepped base and the lower stepped base pass through each other. The upper end faces are fastened together, the laser beam shaping system is installed on the steps of the upper and lower stepped bases, the focusing system is located in the direction of the outgoing light outside the upper and lower stepped bases, the steps on the said lower stepped bases are staggered, different sides The contact surfaces of the steps in the middle of the lower step base are V-shaped, and the entire step contact surface is V-shaped wave, and the said upper step base has the same structure as the lower step base.

Beneficial effects of the present invention: the present invention is reusable, has no water cooling, is small in size, and can realize high-power and high-brightness output, so it can be applied to some occasions that require high light source volume, beam quality and power. Using multiple semiconductor lasers for single-tube coupling, no need for beam cutting and rearrangement, it can directly enter the optical fiber, which solves the problem of the beam conversion system well; the laser in the C-Mount package eliminates the extremely inconvenient water cooling system, and also The volume and weight of the system are reduced; the lasers of the whole system adopt non-overlapping combination, and the lasers can be replaced at will without affecting the others, which ensures the overall performance of the system; at the same time, this module can be reused to increase the service life; there are four rows The power of lasers has been increased by four times. Among the four rows of lasers, any row of lasers is staggered with its adjacent lasers and arranged symmetrically with the lasers on its diagonal. This arrangement makes the overall structure very compact and reduces the light At the same time, it also disperses the heat generated by each laser for easy heat dissipation.

Description of drawings

Fig. 1 is the overall structural diagram of the reusable high-power semiconductor laser fiber output module of the present invention.

Fig. 2 is a schematic diagram of a single semiconductor laser tube of the present invention.

Fig. 3 is a schematic diagram of placement positions of lasers on the same side of the same base of the present invention.

Fig. 4 is a schematic diagram of the optical path propagation of the deflected optical axis by a right-angle prism after the output fast and slow axes of a single laser are collimated according to the present invention.

Fig. 5 is a schematic diagram of the stepped base of the present invention.

Fig. 6 is a schematic diagram of the installation position of the laser beam shaping system of the same stepped base of the present invention.

Fig. 7 is a schematic diagram of the position of the laser on the same side after the two steps are buckled together according to the present invention.

In the figure, 1. Semiconductor laser single tube, 2. Fast axis collimating mirror, 3. Slow axis collimating mirror, 4. Right angle prism, 5. Laser light speed, 6. Fast axis focusing mirror, 7. Slow axis focusing mirror, 8. Optical fiber, 9. Lower stepped base, 10. Upper stepped base, 11. Heat sink, 12. Single laser tube, 13. Steps, 14. Slow axis light emitting edge, 15. Fast axis light emitting edge, 16, Slow axis Light incident side, 17, light incident side.

Detailed ways

The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

As shown in Figures 1-7, the present invention includes a laser beam shaping system, a focusing system, an upper stepped base 10, and a lower stepped base 9. The upper stepped base 10 and the lower stepped base 9 are fastened through each other's upper end surfaces, and the laser beam is shaped The system is installed on the steps 13 of the upper and lower stepped bases, and the focusing system is located in the direction of the outgoing light outside the upper and lower stepped bases. The contact surfaces between the bases 9 are V-shaped, and the contact surfaces of the entire steps 13 are V-shaped waves. The upper stepped base 10 has the same structure as the lower stepped base 9 .

As shown in Fig. 5, said focusing system comprises fast-axis focusing mirror 6, slow-axis focusing mirror 7 and optical fiber 8, and the back focus of fast-axis focusing mirror 6 and slow-axis focusing mirror 7 coincides with the center of the end face of optical fiber 8, fast The axial focusing mirror 6, the slow axis focusing mirror 7 and the end face of the optical fiber 8 are coaxial optical systems.

As shown in Figures 2 and 6, said laser beam shaping system includes a semiconductor laser single tube 1, a fast-axis collimator 2, a slow-axis collimator 3 and a rectangular prism 4, a fast-axis collimator 2, a slow-axis collimator The straight mirror 3 and the right-angle prism 4 are installed on the step 13 of the stepped base, the two base angles of the right-angle prism are 45°, the hypotenuse of the right-angle prism 4 is parallel to the step 13 V-shaped contact surface, and the slow axis of the slow axis collimator mirror 3 The light exit side 14 corresponds to the right angle side in the Z direction of the rectangular prism 4, the fast axis light exit side 15 of the fast axis collimator mirror 2 corresponds to the slow axis light entrance side 16 of the slow axis collimator mirror 3, and the semiconductor laser single tube 1 is installed on the The side of the stepped base 10 or the lower stepped base 9, the said single semiconductor laser tube 1 includes a single laser tube 12 and a heat sink block 11, the single laser tube 12 is installed on one side of the heat sink block 11, and the single tube 12 of the laser The light exit point corresponds to the light incident edge 17 of the fast-axis collimator mirror, the fast-axis collimator mirror 2 and the slow-axis collimator mirror 3 have a common optical axis, the light exit point of the single laser tube 12 and the midpoint of the right-angle side of the right-angle prism 4Z direction On the optical axis of the fast axis collimating mirror 2 and the slow axis collimating mirror 3.

As shown in FIG. 3 , the semiconductor laser single tubes 1 do not overlap and are placed at intervals.

As shown in Figure 6, the height of said step 13 is consistent with the full width of the slow axis collimating mirror 3 output beam in the Y direction, and the width of the step 13 is consistent with the distance between the single semiconductor laser tubes 1 on the same side of the same stepped base; The total length of the interlocking adjacent steps 13 on different sides is the sum of the midpoint distances from the single semiconductor laser tube 1 on both sides to the hypotenuse of the rectangular prism 4 in the middle.

The optical refraction surfaces of the fast-axis focusing mirror 6, the slow-axis focusing mirror 7, the end face of the optical fiber 8, the fast-axis collimating mirror 2, the slow-axis collimating mirror 3 and the rectangular prism 4 are all coated with an anti-reflection film.

The said stepped base is made of high thermal conductivity material.

The invention relates to a module that is coupled by a plurality of semiconductor laser tubes and output through an optical fiber. The module includes n C-Mount packaged semiconductor laser tubes, a fast-axis collimator, a slow-axis collimator, and a right-angle prism. Fast-axis focusing mirror, slow-axis focusing mirror, optical fiber, lower stepped base and upper stepped base. The light output by each semiconductor laser tube placed on the stepped base is first collimated by the fast-axis collimator mirror and the slow-axis collimator mirror, and then reflected by the corresponding right-angle prism to deflect the optical axis of each beam by 90° °, then all the light is superimposed on Y to form a beam, and then the light spot is focused to the same point with the fast axis focusing mirror and the slow axis focusing mirror respectively, and one end face of the fiber is placed on the common focus of the two focusing mirrors, and finally the light from the fiber output on the other end.

The lasers are placed on the side end surface of the base, and the lasers are not superimposed on each other. The combination of the laser and the base is combined in a non-damaging and detachable way, and unsuitable lasers can be replaced without affecting each other. Improve system performance.

The step height and step width of the stepped base are respectively determined by the beam width in the direction of the fast axis after the laser is collimated and the position of the laser. In order to obtain a high optical power density, the light beams should be superimposed without intervals in the direction of the fast axis, and the height of each step is consistent with the width in the direction of the fast axis after collimation. In this way, the two beams of adjacent steps are equivalent to The axis directions are superimposed exactly without spacing. Since the laser module needs to couple lasers without overlapping, the width of the step is exactly the distance between adjacent lasers on the same side of the same base. In order to facilitate heat dissipation, the entire stepped base is made of materials with high thermal conductivity.

The rectangular prism is placed in the middle of the step base, and the reflective hypotenuse can be coated with a high-reflectivity film or not coated with a high-reflectivity film, and the optical path can be directly changed through the internal reflection of the rectangular prism. After the light emitted by each laser is collimated by the fast and slow axes, the optical axis is deflected by 90° by the right-angle prism in the middle, so that each laser and the collimation element do not coincide with the optical axis of the coupled light, so that each laser and collimation The physical characteristics (size and position) of the components reduce the requirements, as long as the optical path conditions are met, the installation and debugging requirements of the system are reduced. In some special cases, such as when each optical path needs to have equal optical paths, the deflected optical path can move the laser and collimation elements in the X direction, which can well meet the requirements of equal optical paths. On the contrary, if the non-deflecting optical axis system is used, the laser and the collimation element are coaxial with the coupled beam. In order to prevent the mutual influence between each optical path, the position of each laser must be very accurately positioned. The size of each collimation element There are also strict requirements that cannot affect the light output by other lasers, such as blocking or deflecting light, which increases the difficulty of the system.

The focusing method adopts the method of separately focusing the fast and slow axes into the optical fiber. The coupled light enters the optical fiber through a simple method of focusing the fast and slow axes separately, which can reduce the light loss of the system and simplify the structure. Due to the small divergence angle of the coupled beam and the large spot size, it is not suitable for direct entry into the optical fiber, and a focusing lens is needed to balance the beam divergence angle and spot size. There are generally two focusing methods: one is to expand or compress the beam first, so that the divergence angles of the beam in the direction of the fast and slow axes are equal, and then use a focusing lens to focus; the other is to use two focusing lenses to focus on the directions of the fast and slow axes respectively. Its principle is such as fast and slow axis collimation. The former uses many lenses, which will cause a large loss of light. At the same time, considering the simplicity of the system, the method of focusing separately is selected. In order to make the focal positions of the beams of each aperture consistent after focusing, the focusing mirror uses a lens type with small spherical aberration.

To evaluate the parameters of the output beam quality of semiconductor lasers, the optical parameter product (BPP) is generally used:

BPP = w ₀ ·θ, where w ₀ is the radius of the beam waist and θ is the half angle of the far-field divergence angle.

Then the optical parameter product of the optical fiber BPP _fiber =d ₀ /2·NA, where d ₀ is the diameter of the core diameter of the optical fiber, and NA is the numerical aperture.

For a beam of light to completely enter the fiber, three conditions must be met: the cross-sectional radius of the beam is smaller than the radius of the fiber core; the half angle of the divergence angle of the beam is smaller than the numerical aperture of the fiber; the optical parameter product BPP _total of the superimposed beam is smaller than that of the fiber The optical parameter product BPP _fiber .

Since the spot of the semiconductor laser is rectangular, it must meet the requirements to enter the optical fiber.

${\mathrm{<span\; class="notranslate">\; BPP</span>}}_{\mathrm{<span\; class="notranslate">\; total</span>}}<span\; class="notranslate">\; =</span>\sqrt{{{\mathrm{<span\; class="notranslate">\; BPP</span>}}_{\mathrm{<span\; class="notranslate">\; slow</span>}}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; +</span>{{\mathrm{<span\; class="notranslate">\; BPP</span>}}_{\mathrm{<span\; class="notranslate">\; fast</span>}}}^{\mathrm{<span\; class="notranslate">\; 2</span>}}}<span\; class="notranslate">\; \&le;</span>{\mathrm{<span\; class="notranslate">\; BPP</span>}}_{\mathrm{<span\; class="notranslate">\; fiber</span>}}$

而单个激光器快轴方向的BPP很小，一般通过多个激光器的光在快轴方向上叠加而成的，为了使快慢轴方向的光斑均衡，快轴叠加后两者的BPP应尽量相等，于是N＝BPP_slow/BPP_fast，快轴方向可叠加的激光器数为小于N的整数。实际运用时，由于在耦合过程中各个透镜存在像差，快慢轴的光参数积会变大，因此在初值选择时，快慢轴均取稍小于上述值。In order to make the maximum proportion of the incident light occupy the fiber core, it should be satisfied as far as possible When an optical fiber is determined, the optical parameter product of its slow axis direction and fast axis direction is roughly determined. The optical parameter product BPP _slow of the slow axis is much larger than the optical parameter product BPP _fast of the fast axis.

However, the BPP of a single laser in the direction of the fast axis is very small, and is generally formed by superimposing the light of multiple lasers in the direction of the fast axis. In order to balance the light spots in the direction of the fast and slow axes, the BPP of the two should be as equal as possible after the superposition of the fast axis. N=BPP _slow /BPP _fast , the number of lasers that can be superimposed in the fast axis direction is an integer less than N. In actual application, due to the aberration of each lens in the coupling process, the optical parameter product of the fast and slow axes will become larger, so when selecting the initial value, the fast and slow axes are taken to be slightly smaller than the above values.

From the above, it can be known that the coupling of beams is essentially the superposition of beams in the direction of the fast axis and coincidence in the direction of the slow axis. In order to realize the superposition of light beams in the direction of the fast axis, there should be a height difference between the light-emitting points of adjacent lasers in the direction of the fast axis without changing the optical path in the direction of the fast axis. In order to make the optical power density larger, this height difference should be equal to the full width in the direction of the fast axis after collimation. From the perspective of reducing energy loss, it is necessary to use as few optical components as possible to change the light path, so there is such a height difference in its physical position. Considering all aspects, it is a better choice to place the laser on a stepped base.

From the perspective of the coupling effect, when the optical path of each optical path is small and the optical path between the optical paths is equal, the beam divergence is small, the energy distribution of the coupling spot is uniform, and the coupling quality is good. Therefore, when coupling the same number of lasers, arranging the positions of the lasers reasonably can improve the coupling effect.

Due to the large divergence angle of the output light of the semiconductor laser, it cannot be transmitted directly. The divergence angle of the beam must be reduced by using a fast-slow axis collimator first. At the same time, the spot line width becomes larger. And because the BPP in the direction of the fast and slow axis is very different, one collimator cannot be used to collimate the two directions at the same time, so two cylindrical lenses whose generatrices are perpendicular to each other are used to collimate the fast and slow axes of the beam respectively.

In order to make the system easy to install and debug, a right-angle prism is used to deflect the light path by 90°. After deflecting the optical axis, the requirements for the physical characteristics (position and size) of the laser and the fast and slow axis collimator mirrors are reduced, which is convenient for device screening and system debugging. It only needs to consider whether the device is suitable for this optical path, without worrying about the impact on other optical paths, such as If the size of the device is too large, it will block light and deflect other optical paths. The choice of rectangular prism size is based on two principles: as small as possible in the direction of the fast axis, and appropriately large in the direction of the slow axis. The thickness of the reflector is exactly equal to the full width of the collimated beam in the fast axis direction, and the distance between adjacent reflectors is the thickness of the reflector, that is, the interval is zero, which can not only ensure that the reflector does not block light, but also make the fast Concentration of energy in the axial direction, the right-angled side of the right-angle prism is approximately larger than the full width of the beam in the slow-axis direction after collimation, which can reduce the energy loss in the slow-axis direction and obtain high efficiency. The selection of the position of the rectangular prism is based on the principle that the optical paths of the opposite lasers on both sides of the same substrate are equal, so it is located in the middle of the two opposite lasers. After the light beams are reflected by the middle rectangular prism, they can be effectively superimposed in the direction of the fast axis.

The divergence angles of the fast and slow axes of the superimposed light spots are generally different, and the light spots are distributed in a rectangular shape. Compared with the spot matched with the fiber, the divergence angle of the fast and slow axis of the spot is too small at this time, and the spot is too large to directly enter the fiber, so a focusing lens is needed to balance the divergence angle and the size of the spot, which follows the BPP invariant principle . According to the NA and core radius of the fiber to be entered and the divergence angle and size of the current spot, the focusing lens is selected. The size and divergence angle of the focused spot are smaller than the corresponding parameters of the fiber. There are generally two ways to enter the optical fiber: one is to use the telescope system to expand the beam, and then use a focusing mirror to focus; the other is to directly use two focusing mirrors to focus on the fast and slow axes respectively. Considering the compactness of this structure, the fast and slow axes are used to focus separately.

In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific examples described here are only used to explain the present invention and are not intended to limit the present invention. .

The embodiment is that 16 semiconductor single-tube lasers are coupled into an optical fiber with a core radius of 100um and an NA of 0.22.

The size of the heat sink block (11) of the semiconductor laser single tube installed in the C-mount package is 7mm×7mm×2mm, and the welding position of the laser single tube (12) is shown in FIG. 2 . In order to facilitate replacement, the lasers on the same side of the same base cannot overlap, so the interval between adjacent lasers in the Z direction is 8mm, and the installation position is shown in Figure 3. The semiconductor laser single tube can be disassembled and placed on both sides of the base of the upper and lower steps without damage.

The initial value of the single laser tube is set: the single tube output power is set to 5W; the wavelength is 808nm; the line width (half width) in the fast axis direction is 0.5um, and the divergence angle (half angle) is 30°; the line width in the slow axis direction is 0.1 mm, the divergence angle is 4.5°. Determine the slow axis direction of the single-tube laser BPP _slow = 7.875mm.mrad, and the fast axis direction BPP _fast = 0.2625mm.mrad. In theory, 30 single tubes can be superimposed in the fast axis direction and enter the optical fiber with BPP _fiber = 11.137mm.mrad , that is, an optical fiber with a core radius of 51um and an NA of 0.22.

First, a fast-axis collimator (2) and a slow-axis collimator (3) with appropriate focal lengths are selected to collimate the light beam. In this example, an aspheric cylindrical lens with a focal length of 0.9 mm is selected to collimate the fast axis direction. The half width after collimation is about 0.2 mm, and the half angle of divergence is 0.2°. The focal length of the collimator in the direction of the slow axis is 12 mm, the half width after collimation is about 1 mm, and the half angle of divergence is 0.55°. Due to the influence of aberrations, the optical parameter products of the fast and slow axes increase after collimation.

In order not to affect the shortest distance of the collimation effect of the fast and slow axes, the distance from the laser to the rectangular prism is selected as 15mm. The size of the rectangular prism is determined by the collimated light beam, so its thickness is selected as 0.4mm, and its right-angled side is selected as 4mm. The schematic diagram of the light emitted by the single tube after being collimated by the fast and slow axes and deflected by the mirror is shown in Figure 5. In order to make the light superimposed more densely in the direction of the fast axis, ignoring the influence of the divergence angle in the direction of the fast axis, in the direction of the Y axis, the interval between each adjacent right-angle mirror is zero, and the distance between the center positions is 0.4mm, that is, theoretically The light realizes seamless superposition in the Y-axis direction (fast-axis direction).

In order to obtain a more compact structure and a more reasonable optical path when the same number of lasers are coupled, semiconductor lasers are placed on both sides of a stepped base. The shape of the stepped base is shown in Figure 5. Determine the size of the step base: the height of the step is the full width in the direction of the fast axis after collimation, so it is taken as 0.4mm; the width of the step is the distance between adjacent lasers on the same base on the same side, here it is taken as 8mm; the height of the step base in the X direction The length should be the sum of the distances from the lasers on both sides to the center of the reflective surface of the mirror, which is 34mm; the length of the step base in the Y direction and Z direction depends on the actual situation.

A schematic diagram of placing a semiconductor laser, a fast-slow axis collimator, and a right-angle prism on a stepped base is shown in Figure 6. The hypotenuse of the right-angle prism is separated from the step contact surface by a certain distance, and the optical path of the internal reflection deflection is adopted, and the fast axis is collimated. The mirror can be directly glued to the laser tube, which makes the installation and adjustment easy. Considering that when two identical stepped bases are fastened, the adjacent and nearest optical paths on the two bases are superimposed without intervals in the direction of the fast axis. In order to make the optical paths symmetrical, a right-angled side of the right-angled prism in the middle of the two optical paths coincident, and the hypotenuse is vertical. Corresponding to the optical path surface on each base, a part of the side without the optical path is etched away so as to accommodate the corresponding collimating mirror of the other base. Figure 7 shows the arrangement of the lasers when two steps are used for fastening.

After the light of each laser is reflected by the intermediate mirror, it is superimposed in the direction of the fast axis. Due to the influence of lens aberrations, when 16 lasers are coupled in a single tube, the line width in the fast axis direction is about 3.5mm, the half angle of divergence angle is 0.22°, the line width in the slow axis direction is about 1.2mm, and the half angle of divergence angle is 0.55°. Corresponding optical parameter products: BPP1 in the fast axis direction = 13.2825mm.mrad, and BPP2 in the slow axis direction = 11.55mm.mrad. It can be seen that the two are basically equal.

In order to enter an optical fiber with an NA of 0.22, after focusing on the fast and slow axes, the half-angles of the divergence angles in both directions are less than or equal to arcsin(0.22)=12.7°. Thus, the focal lengths of the fast-axis focusing mirror and the slow-axis focusing mirror are respectively calculated as follows: fast-axis direction f1=3.45/tan (12.7°)=15.31mm, and its theoretical focus spot radius is 0.05344mm; slow-axis direction f2= 1.45/tan (12.7°) = 6.434mm, the theoretical focus spot radius is 0.05615mm. Due to the influence of aberrations, the parameters of the spot after focusing are: the line width in the fast axis direction is 0.08mm, and the half angle of divergence angle is 12.45°; the line width in the slow axis direction is 0.06mm, and the divergence angle is 12.6°. BPP _fast in the fast axis direction = 17.43mm.mrad, BPP _slow in the slow axis direction = 13.23mm.mrad, then BPP _total = 21.88mm.mrad. However, BPP _fiber =22mm.mrad of an optical fiber with a radius of 100um and an NA of 0.22. It can be seen that BPP _total < BPP _fiber meets the three conditions for entering the fiber. The 16 single-tube coupling beams can just enter the 200um fiber, and the output power is 79.724W. Simulated by Zemax, the conversion efficiency is over 99%.

Claims (6)

1. A reusable high-power semiconductor laser fiber output module is characterized in that it comprises a laser beam shaping system, a focusing system, an upper stepped base (10), a lower stepped base (9), an upper stepped base (10) and The lower stepped bases (9) are fastened through the upper end surfaces of each other, the laser beam shaping system is installed on the steps (13) of the upper and lower stepped bases, and the focusing system is located in the direction of the outgoing light outside the upper and lower stepped bases, said The steps (13) on the lower step base (9) are staggeredly distributed, the contact surfaces of the steps (13) on different sides in the middle of the lower step base (9) are V-shaped, and the contact surfaces of the entire steps (13) are V-shaped waves, Said upper step base (10) is identical in structure with the lower step base (9). 2. The reusable high-power semiconductor laser fiber output module according to claim 1, characterized in that said focusing system comprises a fast-axis focusing mirror (6), a slow-axis focusing mirror (7) and an optical fiber (8 ), the back focus of the fast-axis focusing mirror (6) and the slow-axis focusing mirror (7) coincides with the center of the end face of the optical fiber (8), the fast-axis focusing mirror (6), the slow-axis focusing mirror (7) and the optical fiber (8) The end face is a coaxial optical system. 3. The reusable high-power semiconductor laser fiber output module according to claim 1 or 2, wherein said laser beam shaping system comprises a semiconductor laser single tube (1), a fast axis collimating mirror (2 ), the slow-axis collimator (3) and the right-angle prism (4), the fast-axis collimator (2), the slow-axis collimator (3), and the right-angle prism (4) are installed on the step (13) of the ladder base , the two base angles of the rectangular prism are 45 °, the hypotenuse of the rectangular prism (4) is parallel to the V-shaped contact surface of the step (13), and the slow-axis light-emitting edge (14) of the slow-axis collimator (3) is in contact with the rectangular prism (4) The right-angled side on the Z direction corresponds, and the fast-axis light-emitting side (15) of the fast-axis collimator mirror (2) corresponds to the slow-axis light-incoming side (16) of the slow-axis collimator mirror (3), and the semiconductor laser unit The tube (1) is installed on the side of the upper stepped base (10) or the lower stepped base (9), and the said semiconductor laser single tube (1) includes a laser single tube (12) and a heat sink block (11), and the laser single tube (12) Installed on one side of the heat sink block (11), the light exit point of the laser single tube (12) corresponds to the light incident edge (17) of the fast axis collimator mirror, the laser single tube (12), the fast axis collimator The mirror (2), the slow-axis collimating mirror (3) and the right-angle side in the Z direction of the right-angle prism (4) are coaxial optical systems. 4. The reusable high-power semiconductor laser fiber output module according to claim 3, characterized in that, said semiconductor laser single tubes (1) do not overlap and are placed at intervals. 5. the reusable high-power semiconductor laser fiber output module according to claim 3, is characterized in that, said step (13) height and the full width on the slow axis collimating mirror (3) output light beam Y direction Consistent, the width of the step (13) is consistent with the distance between the adjacent semiconductor laser tubes (1) on the same side of the same stepped base; The sum of the midpoint distances to the hypotenuses of the middle rectangular prism (4). 6. The reusable high-power semiconductor laser fiber output module according to claim 1, characterized in that, said fast-axis focusing mirror (6), slow-axis focusing mirror (7), optical fiber (8) end faces, The optical refraction surfaces of the fast-axis collimating mirror (2), the slow-axis collimating mirror (3) and the rectangular prism (4) are all coated with an anti-reflection film.

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