CN101840880A - Substrate clamping device - Google Patents
Substrate clamping device Download PDFInfo
- Publication number
- CN101840880A CN101840880A CN 201010157871 CN201010157871A CN101840880A CN 101840880 A CN101840880 A CN 101840880A CN 201010157871 CN201010157871 CN 201010157871 CN 201010157871 A CN201010157871 A CN 201010157871A CN 101840880 A CN101840880 A CN 101840880A
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- China
- Prior art keywords
- substrate
- clamping device
- air
- positioning structure
- clamping
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Abstract
本发明揭露一种基板夹取装置，该基板夹取装置包括夹持单元、基板定位结构以及气浮单元。夹持单元用以夹取基板；该基板放置于该基板定位结构上；该气浮单元设置于该基板定位结构远离该基板的第一侧，该气浮单元朝该基板定位结构喷出空气而使该基板定位结构浮起。本发明的基板夹取装置利用气浮单元使在夹取基板时基板定位结构能在一定范围内自由浮动，减少由于基板位置发生偏移而导致夹取单元或基板损坏的情况。
The invention discloses a substrate clamping device, which includes a clamping unit, a substrate positioning structure and an air floating unit. The clamping unit is used to clamp the substrate; the substrate is placed on the substrate positioning structure; the air flotation unit is arranged on the first side of the substrate positioning structure away from the substrate, and the air flotation unit ejects air toward the substrate positioning structure Levitating the substrate positioning structure. The substrate clamping device of the present invention utilizes the air floating unit to enable the substrate positioning structure to float freely within a certain range when clamping the substrate, thereby reducing damage to the clamping unit or the substrate due to position deviation of the substrate.
Description
Technical field
The present invention relates in particular to a kind of substrate clamping device with floating unit about a kind of substrate clamping device.
Background technology
See also Figure 1A and Figure 1B, the vertical view when Figure 1A is depicted as substrate clamping device gripping substrate of the prior art; Front view when Figure 1B is depicted as substrate clamping device gripping substrate of the prior art.In the prior art, substrate clamping device 1 comprises grip unit 2 and substrate positioning structure 3, and wherein substrate 4 is a display floater.Grip unit 2 is positioned over display floater 4 on the substrate positioning structure 3 in order to gripping, and the substrate positioning structure 3 among Figure 1A has plummer 5.Grip unit 2 comprises first jig arm 6 and second jig arm 7 parallel and that be oppositely arranged, but first jig arm 6 and second jig arm 7 relative motion on slide rail 8, and respectively in order to be held on the relative two sides of display floater 4.But as shown in Figure 1A and Figure 1B, the display floater 4 that uses generally can be located earlier before gripping at present, if the positions of display floater 4 itself are offset, gripping display floater 4 can cause in the gripping unit 2 one-sided jig arm as the 6 stressed damages of first jig arm behind the location so; Perhaps, cause display floater 4 to damage because display floater 4 location causes the display floater 4 one-sided stress that are subjected to gripping unit 2 when bad.
Summary of the invention
Therefore, one of purpose of the present invention is to provide a kind of substrate clamping device, utilize air flotation cell to make when the gripping substrate substrate positioning structure free floating within the specific limits, reduce because the situation that causes gripping unit or substrate damage takes place to be offset substrate position.
For reaching above-mentioned purpose, the invention provides a kind of substrate clamping device, this substrate clamping device comprises grip unit, substrate positioning structure and air flotation cell.Grip unit is in order to the gripping substrate; This substrate is positioned on this substrate positioning structure; This air flotation cell is arranged at first side of this substrate positioning structure away from this substrate, and this air flotation cell floats this substrate positioning structure towards this substrate positioning structure ejection air.
Further, this grip unit comprises first jig arm and second jig arm parallel and that be oppositely arranged, and this first jig arm and this second jig arm are done relative motion, and respectively in order to the relative two sides of this substrate of clamping.
Further, this grip unit also comprises controlling organization, in order to control moving of this first jig arm and this second jig arm.
Further, this air flotation cell comprises source of the gas structure and a plurality of pore, and those pores are connected in this source of the gas structure.
Further, this air flotation cell also comprises through hole, and this through hole is communicated with those pores and this source of the gas structure.
Further, this air flotation cell also comprises platform, and this substrate positioning structure is arranged at this first side relatively, and those pores are arranged on this platform.
Further, air flotation cell also comprises the pneumatics choke valve, controls the flow size of those pores.
Further, this substrate is a display panels.
Compared with prior art, substrate clamping device of the present invention has air flotation cell, utilize substrate clamping device to carry out substrate clamping when moving, air flotation cell can make substrate positioning structure float within the specific limits, effectively avoids owing to the situation that skew causes gripping unit or substrate damage takes place substrate position.
Can be about the advantages and spirit of the present invention by following detailed Description Of The Invention and appended graphic being further understood.
Description of drawings
Vertical view when Figure 1A is depicted as substrate clamping device gripping substrate of the prior art;
Front view when Figure 1B is depicted as substrate clamping device gripping substrate of the prior art;
Figure 2 shows that schematic diagram according to substrate clamping device of the present invention;
Figure 3 shows that schematic perspective view according to substrate clamping device of the present invention;
Fig. 4 A is depicted as along the cutaway view of the AA ' line among Fig. 3;
Fig. 4 B is depicted as the schematic diagram of the air flotation cell when work substrate clamping device among Fig. 3.
Embodiment
See also Fig. 2, Figure 2 shows that schematic diagram according to substrate clamping device of the present invention.The invention provides a kind of substrate clamping device 10, substrate clamping device 10 comprises grip unit 11, substrate positioning structure 12 and air flotation cell.Grip unit 11 is in order to gripping substrate 14, and wherein substrate 14 for example is a display panels, certainly also not as limit, also can be glass substrate etc.Substrate 14 is positioned on the substrate positioning structure 12, and in the present embodiment, substrate positioning structure 12 is only represented with plummer, but in fact the structure of substrate positioning structure 12 does not limit.Air flotation cell is arranged at first side 15 of substrate positioning structure 12 away from substrate 14, and air flotation cell floats substrate positioning structure 12 towards substrate positioning structure 12 ejection air R.
See also Fig. 3 and Fig. 4 A, Figure 3 shows that the schematic perspective view according to substrate clamping device of the present invention, Fig. 4 A is depicted as along the cutaway view of the AA ' line among Fig. 3.In the present embodiment, grip unit 11 comprises first jig arm 16 and second jig arm 17 parallel and that be oppositely arranged, first jig arm 16 and second jig arm 17 can be done relative motion, and respectively in order to the relative two sides of clamping substrate 14, and then substrate 14 is carried out the gripping action.Be that first jig arm 16 and second jig arm 17 are set up on the slide rail 20 in the present embodiment, win jig arm 16 and second jig arm 17 can be free to slide on slide rail 20.Wherein moving of first jig arm 16 and second jig arm 17 can be by manual operations, preferably, grip unit 11 also comprises the controlling organization (not shown) but in actual use,, in order to control moving of first jig arm 16 and second jig arm 17, to realize automation mechanized operation.
In the present embodiment, the structure example of air flotation cell 13 be as adopting the structure among Fig. 3, certainly also and than as limit.Air flotation cell 13 comprises source of the gas structure 18 and a plurality of pore 19, and these pores 19 are connected in source of the gas structure 18.In the present embodiment, air flotation cell 13 also comprises through hole 21, and through hole 21 is communicated with these pores 19 and source of the gas structure 18.
And in the present embodiment, air flotation cell 13 also comprises platform 22, substrate positioning structure 12 is arranged at first side 15 relatively, these pores 19 are arranged on the platform 22, and through hole 21 also is arranged in the platform 22, thereby these pores 19 and source of the gas structure 18 are communicated with.Further, air flotation cell 13 for example also can comprise pneumatics choke valve (not shown), controls the flow size of these pores 19.The pressure-air R that source of the gas structure 18 produces flows out via through hole 21 and pore 19, and can be according to various actual conditions, as the size of substrate 14 or weight etc., is adjusted the throughput size of pore 19 by the pneumatics choke valve.Shown in Fig. 4 B, Fig. 4 B is depicted as the schematic diagram of the air flotation cell when work substrate clamping device among Fig. 3.When gripping unit 11 gripping substrates 14, the design of above-mentioned air flotation cell 13 can produce air flotation effect, makes substrate positioning structure 12 to float from platform 22 surfaces, and can float within the specific limits, prevents that so the jig arm of substrate 14 or gripping unit 11 from damaging.
In sum, substrate clamping device of the present invention has air flotation cell, utilize substrate clamping device to carry out substrate clamping when moving, substrate positioning structure can be floated within the specific limits, effectively avoid owing to the situation that skew causes gripping unit or substrate damage takes place substrate position.
By the above detailed description of preferred embodiments, be to wish to know more to describe feature of the present invention and spirit, and be not to come protection scope of the present invention is limited with above-mentioned disclosed preferred embodiment.On the contrary, its objective is that hope can contain in the protection range of claim of being arranged in of various changes and tool equality institute of the present invention desire application.Therefore, the protection range of the claim that the present invention applied for should be done the broadest explanation according to above-mentioned explanation, contains the arrangement of all possible change and tool equality to cause it.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010157871 CN101840880A (en) | 2010-03-24 | 2010-03-24 | Substrate clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010157871 CN101840880A (en) | 2010-03-24 | 2010-03-24 | Substrate clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101840880A true CN101840880A (en) | 2010-09-22 |
Family
ID=42744173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010157871 Pending CN101840880A (en) | 2010-03-24 | 2010-03-24 | Substrate clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101840880A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108160861A (en) * | 2017-12-20 | 2018-06-15 | 成都新诚华创电子有限公司 | For the needle-threading machine of preset potentiometer substrate |
| JP2018536986A (en) * | 2015-10-15 | 2018-12-13 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Substrate carrier system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101101454A (en) * | 2007-07-19 | 2008-01-09 | 清华大学 | A dual-stage exchange system for silicon wafer stages of a lithography machine |
| CN101407284A (en) * | 2002-04-18 | 2009-04-15 | 奥林巴斯株式会社 | Substrate conveying device |
-
2010
- 2010-03-24 CN CN 201010157871 patent/CN101840880A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101407284A (en) * | 2002-04-18 | 2009-04-15 | 奥林巴斯株式会社 | Substrate conveying device |
| CN101101454A (en) * | 2007-07-19 | 2008-01-09 | 清华大学 | A dual-stage exchange system for silicon wafer stages of a lithography machine |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018536986A (en) * | 2015-10-15 | 2018-12-13 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Substrate carrier system |
| CN108160861A (en) * | 2017-12-20 | 2018-06-15 | 成都新诚华创电子有限公司 | For the needle-threading machine of preset potentiometer substrate |
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| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20100922 |