CN101829924B - Linear driving apparatus having two chambers, and guide structure thereof - Google Patents
Linear driving apparatus having two chambers, and guide structure thereof Download PDFInfo
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- CN101829924B CN101829924B CN2010101324476A CN201010132447A CN101829924B CN 101829924 B CN101829924 B CN 101829924B CN 2010101324476 A CN2010101324476 A CN 2010101324476A CN 201010132447 A CN201010132447 A CN 201010132447A CN 101829924 B CN101829924 B CN 101829924B
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Abstract
本发明涉及直线驱动装置及其引导结构。本发明的目的在于提供一种具有不受周围的磁性体的影响的保持可动部的平衡位置的机构的直线驱动装置。由具有在长度方向的两端分别具备盖的长方体的空心箱型结构的引导件、和在该空心箱型结构的内侧所搭载的辅助滑块构成直线驱动装置。将空心箱型结构内侧的面作为辅助滑块及引导件的空气轴承的轴承面。另外，在上述引导件的长度方向的两侧部形成由引导件的内表面和盖及辅助滑块围成的两个空间(腔室)。并且，在辅助滑块向这两个腔室中的一方侧移动时，空气轴承的排气向该腔室一侧流入的量增多。
The invention relates to a linear drive device and its guiding structure. An object of the present invention is to provide a linear drive device having a mechanism for maintaining an equilibrium position of a movable part without being affected by surrounding magnetic bodies. A linear drive device is constituted by a guide having a rectangular parallelepiped hollow box structure provided with covers at both ends in the longitudinal direction, and an auxiliary slider mounted inside the hollow box structure. The inner surface of the hollow box structure is used as the bearing surface of the air bearing for the auxiliary slider and guide. In addition, two spaces (chambers) surrounded by the inner surface of the guide, the cover, and the auxiliary slider are formed on both sides in the longitudinal direction of the guide. Furthermore, when the auxiliary slider moves to one side of the two chambers, the amount of exhaust gas from the air bearing flowing into the chamber side increases.
Description
Technical field
The present invention relates to linear drive apparatus, relate in particular to linear drive apparatus with two chambers.
Background technology
In employed linear drive apparatus is applied to processing many trickle grooves in lathe etc. the diffraction grating and the processing of LGP with mould etc.Generally speaking, need be in order to shorten process time with the high-speed driving instrument, but if the slide block of the instrument of having installed is moved back and forth at a high speed, then because the acceleration-deceleration of slide block makes whole lathe generation vibration force greatly.
Especially in requiring the lathe of high-precision processing, make entire machine be in float state with air damper, thereby cause machining accuracy to worsen because the entire machine that the reaction of the acceleration and deceleration of slide block causes is waved for the influence that prevents machine vibration.Therefore, under situation, also to consider to offset the structure of the counteractive low-disturbance of acceleration and deceleration with the high-speed driving slide block.
In No. 4072551 communique of japanese (patent documentation 1); The technology of the moving device of the reciprocating linear with following structure is disclosed: support the guiding piece and the slide block that can move along coaxial direction with respect to the base of fixed part with FDB, the reaction of the acceleration and deceleration through being born slide block by guiding piece and reaction is not delivered to the outside.Like the disclosed linear drive apparatus of this special permission communique; Drives the instability that becomes owing to skew takes place for the equilbrium position of movable part; Thereby, need to keep the mechanism of the equilbrium position of movable part with respect to the external interference factor from departing from of horizontal level and so on of cutting reaction force that adds man-hour and driving shaft.
In TOHKEMY 2008-086426 communique (patent documentation 2); The mechanism of the equilbrium position of following maintenance movable part is disclosed: in order to prevent to squint because of the cutting reaction force that adds man-hour makes the activation point of movable part, utilized the mechanism of the repulsion of magnet.The mechanism of the equilbrium position of the disclosed maintenance movable part of this open communique is described with reference to Figure 12 below.
Be installed in the occasion that the instrument on the slide block 2 carries out the processing of workpiece back and forth to drive the slide block 2 of linear drive apparatus at a high speed and to utilize, the processing reaction force that slide block 2 receives is delivered to auxiliary slider 3 (counterslide).Therefore, for relative, on auxiliary slider 3 and guiding piece 1, be provided with permanent magnet as the mechanism of the equilbrium position that keeps auxiliary slider 3 with the processing reaction force.The pole configuration that is arranged at permanent magnet 9a, the 9b on the auxiliary slider 3 and is arranged at permanent magnet 10a on the guiding piece 1,10b is producing on the direction of repulsion each other.In addition, the structure that can adjust activation point through the position of adjustment magnet is also disclosed in this communique.
In the mechanism of the equilbrium position of the maintenance movable part of above explanation, are occasions of the magnetic of iron etc. at workpiece and anchor clamps, these magnet can be attracted by workpiece and anchor clamps, and the activation point of movable part might depart from.Therefore, workpiece and anchor clamps must all be nonmagnetic material.
In the maintaining body of the movable part that has used the repulsion that produces by magnet, square being inversely proportional to of repulsion that is acted on and the distance between the magnet.Thereby the power of maintenance movable part has very big variation with the position of auxiliary slider.In addition; Though more than the characteristic of the linear drive apparatus of explanation is to drive with low-disturbance; But be arranged at distance between the magnet on auxiliary slider and the guiding piece if nearer and produce very big repulsion, then occur big reaction force sometimes and be delivered to guiding piece and become the situation that is not low-disturbance.
Have, the workpiece of not only being processed is magnetics with the employed anchor clamps of processing, and the formation parts of lathe are made up of the magnetic of iron etc. mostly again.Therefore, carry under situation about using on the lathe, along with squinting in the equilbrium position of the movable part of the mobile linear drive apparatus of the axle of lathe at existing linear drive apparatus with above explanation.
In addition, shown in figure 12, though through the pole configuration of magnet is become towards with axial vertical direction that slide block moves on and can relax the variation that changes the repulsion that causes because of the distance between magnet, it is difficult relaxing fully.If with the pole configuration of magnet with axially vertical direction on, then since magneticaction in the outside of linear drive apparatus thereby receive the influence of the magnetic around above-mentioned easily.
Summary of the invention
So, the object of the present invention is to provide a kind of structure of equilbrium position of maintenance movable part of influence of the magnetic around not receiving.In addition, the object of the present invention is to provide a kind of linear drive apparatus of mechanism of equilbrium position of maintenance movable part of the influence with the magnetic around not receiving.
In order to achieve the above object, linear drive apparatus of the present invention possesses guiding piece and auxiliary slider.Above-mentioned guiding piece has the hollow box-shaped structure that possesses the cuboid of lid at the two ends of length direction respectively; Be equipped with above-mentioned auxiliary slider in the inboard of this hollow box-shaped structure; The face that above-mentioned hollow box-shaped structure is inboard is as the bearing surface of the air bearing of above-mentioned auxiliary slider and above-mentioned guiding piece; The space that is surrounded by the inner surface of above-mentioned guiding piece and above-mentioned lid and above-mentioned auxiliary slider forms first chamber and second chamber in the both sides of the length direction of above-mentioned guiding piece; And have following structure: during to above-mentioned first chamber, one side shifting, the exhaust of above-mentioned air bearing increases to the amount of above-mentioned first chamber, one side inflow at above-mentioned auxiliary slider; During to above-mentioned second chamber, one side shifting, the exhaust of above-mentioned air bearing increases to the amount of above-mentioned second chamber, one side inflow at above-mentioned auxiliary slider.
Above-mentioned auxiliary slider has interconnective two bearing portions, and slide block is driven with the stroke between above-mentioned two bearing portions, and above-mentioned linear drive apparatus can also have the mechanism that between above-mentioned auxiliary slider and above-mentioned slide block, produces driving force.
Can above-mentioned first chamber and above-mentioned second chamber be connected with the first fluid container and second fluid container respectively.
Can the pressure adjustmenting mechanism or the fluid flow regulation mechanism that be used for adjusting respectively the pressure in above-mentioned first chamber and second chamber be connected with above-mentioned first fluid container and above-mentioned second fluid container respectively.
Can on above-mentioned first fluid container, be provided with the first segment discharge orifice, on above-mentioned second fluid container, be provided with second throttle orifice, the fluid in above-mentioned first chamber and second chamber is discharged outside through throttle orifice separately.
Above-mentioned guiding piece can be made more near the position of its end face and the wide more structure in bearing clearance of above-mentioned auxiliary slider.
On above-mentioned guiding piece, can be provided with the slotted hole that penetrates into the guiding piece outer surface with driving direction abreast from the guiding piece inner surface, this slotted hole extends to above-mentioned two positions that bearing portion is corresponding with above-mentioned auxiliary slider.
The guide formation of linear drive apparatus of the present invention; Possess by having the guiding piece that the hollow box-shaped structure that possesses the cuboid of lid at the two ends of length direction respectively constitutes; Inboard in this hollow box-shaped structure is equipped with auxiliary slider; The face that above-mentioned hollow box-shaped structure is inboard is as the bearing surface of the air bearing of above-mentioned auxiliary slider and above-mentioned guiding piece; The space that is surrounded by the inner surface of above-mentioned guiding piece and above-mentioned lid and above-mentioned auxiliary slider forms first chamber and second chamber in the both sides of the length direction of above-mentioned guiding piece; And have following structure: during to above-mentioned first chamber, one side shifting, the exhaust of above-mentioned air bearing increases to the amount of above-mentioned first chamber, one side inflow at above-mentioned auxiliary slider; During to above-mentioned second chamber, one side shifting, the exhaust of above-mentioned air bearing increases to the amount of above-mentioned second chamber, one side inflow at above-mentioned auxiliary slider.
The present invention is through having above structure; The structure of equilbrium position of maintenance movable part of the influence of the magnetic around not receiving can be provided; And, the linear drive apparatus of mechanism of equilbrium position of the maintenance movable part of the influence with the magnetic around not receiving can be provided.
Description of drawings
Fig. 1 is the guiding piece stereo appearance figure partly with linear drive apparatus of embodiment of the present invention.
Fig. 2 is the cutaway view that dissects linear drive apparatus guiding piece part shown in Figure 1 with cutting line.
Fig. 3 is the figure that the mode of the driving direction counter-rotating that in an embodiment of linear drive apparatus of the present invention, utilizes magnet to make slide block is described.
Fig. 4 is the figure that an embodiment of the linear drive apparatus of the present invention that possesses first chamber and second chamber is described.
Fig. 5 is the figure of an embodiment of explanation linear drive apparatus of the present invention that watertight aircase has been installed in each of first chamber and second chamber.
Fig. 6 is the figure of an embodiment of gap adjustment shaft that explanation possesses more the wide more structure in the gap of the end face air bearing of the leaning on guiding piece linear drive apparatus of the present invention that holds portion.
Fig. 7 is that explanation possesses the slotted hole end of the guiding piece figure against an embodiment of the linear drive apparatus of the present invention of the structure of the bearing surface of auxiliary slider.
Fig. 8 is the figure of an embodiment of the linear drive apparatus of the present invention of the explanation recess that is provided with guiding piece.
Fig. 9 A and Fig. 9 B are the figure that explanation is installed in the instrument on the slide block.
Figure 10 is that explanation is installed in the stereoscopic figure on the linear drive apparatus with instrument.
Figure 11 is that explanation is installed in the cutaway view on the linear drive apparatus with instrument.
Figure 12 is explanation figure with the structure of the position of the repulsion of magnet maintenance auxiliary slider in existing linear drive apparatus.
The specific embodiment
Fig. 1 is the stereo appearance figure as the guiding piece part of the embodiment of linear drive apparatus of the present invention.The parts that omitted among the guiding piece 1 utilization figure are fixedly mounted on the parts at the regulation position of the outer surface of guiding piece 1 on the axle of regulation of lathe (not shown).
Fig. 2 is guiding piece 1 is dissectd in expression with a cutting line shown in Figure 1 cutaway view.The inboard face of guiding piece 1 is as bearing surface, as along the coaxial direction bearing (FDB) of support slipper 2 and auxiliary slider 3 movably.As stated, FDB (air bearing) is the rigidity part lower than other structure division, can regard as and the elastomeric spring of the conduct of the proportional displacement of applied force.Slide block 2 and auxiliary slider 3 are through making simple hollow box-structure with same of guiding piece 1 with guiding piece 1 as bearing surface.
The driving that on connecting portion 3c, is equipped with the formation linear motor is with permanent magnet 6a, 6b and 6c unshakable in one's determination.Thereby the linear motor that constitutes like this produces thrust driving sliding block 2 in the magnetic force and the lift-launch that drive with permanent magnet 6a, 6b between the coil on the slide block 25.
Then, the reciprocating motion to slide block 2 describes.Let electric current flow through to carry the coil 5 on slide block 2 and drive linear motor, slide block 2 is moved to a direction.If slide block 2 reaches the sense of current that reciprocating stroke end then changes flowing through coil 5, make the moving direction counter-rotating of slide block 2.If slide block 2 moves to the sense of current that another stroke end then changes flowing through coil 5 once more, then make the moving direction counter-rotating of slide block 2.So, slide block 2 just moves back and forth with permanent magnet 6a with between driving with permanent magnet 6b in driving.Because driving force occurs between slide block 2 and the auxiliary slider 3, thereby slide block 2 moves owing to the relation of active force and reaction force with auxiliary slider 3 round about.This driving force can not be delivered to guiding piece 1, and the reaction force that is produced by the acceleration and deceleration of slide block 2 can not be delivered to outside (for example, lathe) yet.
In addition, make whole linear drive apparatus miniaturization for the shift motion that shortens auxiliary slider 3, in order to absorb the momentum that produces by reaction force from slide block, need make auxiliary slider 3 than slide block 2 tuples doubly to tens of times.If reduce the weight of slide block 2 self, then can reduce the weight of auxiliary slider 3, also can reduce the weight of whole linear drive apparatus.If this viewpoint is set up, preferably with the hollow parts of guiding piece 1, make triangle with slide block 2 reciprocating axial vertical section configurations.And, can realize the lightweight of slide block 2 through slide block 2 is also made triangle.In addition, though this section configuration can be selected different shapes such as circle or polygon, from the viewpoint of the easy property made, the preferably linear drive apparatus of triangle or quadrangle section.
Fig. 3 is in linear drive apparatus shown in Figure 2, has added the conduct that is used to increase the power that makes slide block 2 counter-rotatings and has reversed with the permanent magnet 8 of magnet.Dispose respectively as the permanent magnet 8 of counter-rotating in slide block 2 sides and auxiliary slider 3 sides with magnet.The pole configuration of each permanent magnet 8 when each other near the time produce on the direction of repulsion.Permanent magnet 8 is to make slide block 2 produce the magnet of the reaction force of counter-rotating; The permanent magnet 8 that is disposed on the slide block 2 (3a of bearing portion, 3b) then produces repulsion with the distance that is disposed at the permanent magnet 8 on the auxiliary slider 3 if shorten; Slide block 2 slows down sharp, and slide block 2 quickens to reverse directions because of receiving to the power of reverse directions.Arrow shown in Figure 3 is represented the direction of the magnetic pole of permanent magnet 8.
Fig. 4 is the figure that an embodiment of the linear drive apparatus of the present invention that possesses first chamber and second chamber is described.Fig. 4 representes be with first lid 11 and second cover 12 be installed in the guiding piece 1 of Fig. 1～shown in Figure 3 the two ends of length direction, form the figure of first chamber 13 and second chamber 14.First chamber 13 is by forming as the 3b of bearing portion of the auxiliary slider 3 of movable part and the medial surface and first lid 11 of guiding piece 1.Second chamber 14 is by forming as the 3a of bearing portion of the auxiliary slider 3 of movable part and the medial surface and second lid 12 of guiding piece 1.In addition, though the conduct counter-rotating that will be used to increase the power that makes slide block 2 counter-rotating is attached to the 3a of bearing portion, 3b with the permanent magnet 8 of magnet, can not use as the permanent magnet 8 that reverses with magnet if need not increase the power of counter-rotating yet.
Fig. 5 is the figure of an embodiment of explanation linear drive apparatus of the present invention that watertight aircase has been installed in each of first chamber and second chamber.First watertight aircase 15 is through being communicated with first chamber 13 and first communicating pipe 17, and second watertight aircase 16 is through being communicated with second chamber 14 and second communicating pipe 18.First watertight aircase 15 and second watertight aircase 16 are respectively watertight aircases independently.On first watertight aircase 15, be connected with first pressure regulation device 19, on second watertight aircase 16, be connected with second pressure regulation device 20, thereby can adjust the pressure in the watertight aircase.Because first watertight aircase 15 and first chamber 13 were communicated with through first communicating pipe 17; And second watertight aircase 16 and second chamber 14 were communicated with through second communicating pipe 18; Therefore, can be respectively through pressure in pressure regulation device 19,20 adjustment first chamber 13 and the pressure in second chamber 14.As first and second pressure regulation devices 19,20, can use for example pressure-reducing valve, speed regulator etc.In addition, also can replace pressure regulation device 19,20 by the use traffic adjusting device.
Part from the exhaust of the bearing surface 7 of the 3a of bearing portion of auxiliary slider 3,3b flow in first chamber 13 and second chamber 14.The exhaust that flow in first chamber 13 gets into first watertight aircase 15 through first communicating pipe 17, and discharges from first segment discharge orifice 21.The exhaust that flow in second chamber 14 gets into second watertight aircase 16 through second communicating pipe 18, and discharges from second throttle orifice 22.
In Fig. 5; Though expression is to flow out fluids such as air from first and second watertight aircases 15,16 through first and second pressure regulation devices 19,20, also can flows into watertight aircases 15,16 through pressure regulation device 19,20 and adjust the pressure in the watertight aircase 15,16 through the pressure source (not shown) that makes fluid from outside such as air.
For example, be mounted to the occasion of inclining in the bottom right at this linear drive apparatus with respect to level, the equilbrium position of auxiliary slider 3 reaches balance because of the influence of weight than the original position side that takes over.This occasion for example in order to make the increased pressure in pressure ratio second chamber 14 in first chamber 13, can be come auxiliary slider 3 is applied power left, thereby adjust to the equilbrium position of level through adjustment pressure regulation device 19,20.
Have again; For example below first chamber 13 is configured in; Second chamber 14 is configured in the top (promptly; The driving shaft of linear drive apparatus that makes Fig. 5 is towards vertical direction) occasion, as long as the pressure in first chamber 13 are risen so that support the weight of auxiliary slider 3, just can be with vertical this linear drive apparatus of state-driven.
Under first and second watertight aircases 15,16 and state that first and second chambers 13,14 are not connected, if auxiliary slider 3 moves very fast to the right and make the volume of first chamber 13 reach half the, the increased pressure in first chamber 13 then.This pressure oscillation as will form first chamber 13 first the lid 11 in Fig. 5 right-hand pushing power and work.Simultaneously, because the volume of second chamber 14 reaches 1.5 times and pressure descends, thereby first cover 12 and work to the power of right-hand tractive as what will form second chamber 14.Therefore, because the driving force of auxiliary slider 3 is delivered to guiding piece, thereby the character of the low-disturbance of linear drive apparatus suffers damage.
If the volume-variation of first and second chambers 13,14 that move that is accompanied by auxiliary slider 3 is identical, and then the volume of first and second chambers 13,14 is bigger and can reduce pressure oscillation.But, for the volume that strengthens first and second chambers 13,14 first and second chambers 13,14 are prolonged to driving direction, its result, the total length of linear drive apparatus will extend.Therefore, as shown in Figure 5, first and second watertight aircases 15,16 are connected with first and second chambers 13,14 the linear drive apparatus miniaturization can be make.And; The volume of first and second watertight aircases 15,16 that are connected with first and second chambers 13,14 is bigger and can reduce pressure oscillation; Thereby; Through the volume that makes first and second watertight aircases 15,16 is the several times～hundreds of times of the volume of first and second chambers 13,14, can above-mentioned pressure oscillation be reduced to part～hundreds of/one, can ignore this pressure oscillation.In addition, be communicated with first communicating pipe 17 of first chamber 13 and first watertight aircase 15 and be communicated with second chamber 14 and second communicating pipe 18 of second watertight aircase 16 is preferably used the enough big pipe of internal diameter do not form resistance respectively.
First and second throttle orifices 21,22 that are arranged on first and second watertight aircases 15,16 work as exhaust resistance.The useless exhaust of FDB does not flow in first and second chambers 13,14, and first and second chambers 13,14 and first and second watertight aircases 15,16 are assumed to except that first and second throttle orifices 21,22 and are sealed.
If auxiliary slider 3 is made its right-hand moving to Fig. 5 from outside reinforcing, then the increased pressure in first chamber 13 produces the power that auxiliary slider 3 is pushed back left.Though auxiliary slider 3 turns back to original position when stopping from outside reinforcing; But because from first segment discharge orifice 21 effusion air; Because the amount of original fluid in first chamber 13 has correspondingly reduced the amount of the fluid of overflowing, thereby does not turn back to original position.Simultaneously, also cause the reverse phenomenon of this phenomenon at second chamber 14.This part of not restoring is as the resistance (decay) that drives and acting key element.
As this structure, even flow in first and second chambers 13,14, under the state of always fluid being emitted to the outside from first and second throttle orifices 21,22, as long as auxiliary slider 3 moves and just acted on same resistance in the exhaust of FDB.Driving resistance is being important factor aspect the stabilisation that realizes driving.For example under the state that does not have enough driving resistances if to slide block 2 applied thrusts, particularly,, then can make slide block 2 high-speed driving (reciprocating motion) with very little thrust for driving the very little FDB of resistance.In this case, because the speed of external force (resistance) slide block 2 of cutting resistance etc. significantly reduces, the altering a great deal of actuating speed.On the contrary, if enough driving resistances are arranged, though need correspondingly to strengthen the thrust that is applied, the velocity variations in the time of can reducing to apply external force helps realizing the stable of actuating speed.
In general,, be converted into heat, cause the temperature of device to rise as the energy that resistance consumed if resistance factor is arranged.For example in the existing linear drive apparatus of Figure 12; Guiding piece 1 and auxiliary slider 3 are occasions of good conductor, through when driving, changing the relative position of guiding piece 1 and auxiliary slider 3, thereby produce eddy current in counter-rotating near with magnet; Its result, eddy current loss just becomes the driving resistance.Because eddy current loss converts heat into, thereby the temperature of device is risen.The temperature that constitutes the component parts of linear drive apparatus rises and for example makes that the linearity of guiding piece 1 worsens, owing to instrument is being installed in the change in location that occasion on the slide block 2 makes instrument, thereby the temperature of claimed apparatus rises minimum.
On the other hand, in an embodiment of linear drive apparatus of the present invention, fluid is the resistance key element, because fluid always flows out, has played the effect of the temperature rising that can reduce device.
In addition, in an embodiment of linear drive apparatus of the present invention, because the pressure of first and second chambers 13,14 pressurizes to the end face of auxiliary slider 3 equably, thereby so long as auxiliary slider 3 be an axial symmetry, inevitable reinforcing on center of gravity.Therefore, can not apply unwanted moment to auxiliary slider 3.
Fig. 6 is the figure of an embodiment of gap adjustment shaft that explanation has more a wide more structure in the gap of the end face air bearing of the leaning on guiding piece linear drive apparatus of the present invention that holds portion.Guiding piece 1 inboard bearing surface 7 is made more to the wide more structure of the end face of guiding piece 1 (gap adjustment shaft with reference to being represented by dotted lines holds portion 100).If auxiliary slider 3 is not applied external force, then auxiliary slider 3 is in static in the equal equilbrium position of the pressure of first chamber 13 and second chamber 14.From the capacity of FDB can be regarded as simple and the bearing clearance proportional.Among Fig. 6, the occasion that moves right at auxiliary slider 3 enlarges near the bearing clearance of the FDB of the auxiliary slider 3 (3b of bearing portion) of first chamber, 13 1 sides.Therefore, flow into the capacity increase of first chamber 13 from the bearing surface 7 of FDB.On the other hand, in second chamber, 14 1 sides, make the capacity minimizing that flow into second chamber 14 from the bearing surface 7 of FDB owing to the bearing clearance is narrow.Its result, the increased pressure of pressure ratio second chamber 14 in first chamber 13 has acted on the power that the left of auxiliary slider 3 in Fig. 6 pushed back.Thus, if squint because of external force etc. in the equilbrium position of auxiliary slider 3, the power that then will turn back to original equilbrium position automatically just acts on auxiliary slider 3.If the variation of bearing clearance is linear, then because this power also is variation linearly, thereby can produce the power that will turn back to the equilbrium position pro rata with the side-play amount of auxiliary slider 3 skew from the equilbrium position, this is near desirable structure.
Fig. 7 is the figure of an embodiment of linear drive apparatus of the present invention of the structure of end 102 that explanation has a slotted hole 4 (with reference to Fig. 1) that makes guiding piece 1 bearing surface 7 that is positioned at auxiliary slider 3.The axial both ends of the surface that are arranged at the linear drive apparatus of the slotted hole 4 on the guiding piece 1 are the structures that hang on the bearing surface 7 of auxiliary slider 3.The capacity of the FDB that flows out from slotted hole 4 since along with the position of auxiliary slider 3 difference, thereby flow into first and second chambers, 13,14 interior capacities and also change along with the position of auxiliary slider 3.In other words, same with the situation that capacity shown in Figure 6 changes, have the effect that makes auxiliary slider 3 return the equilbrium position.
Fig. 8 is the figure of an embodiment of the linear drive apparatus of the present invention of the explanation recess that is provided with guide surface.In the embodiment of Fig. 7, the variation that on principle, flow into the capacity in first and second chambers 13,14 is very little.Therefore in this embodiment, the medial surface of guiding piece 1 be provided be arranged at guiding piece 1 on the width of slotted hole 4 identical, and towards the recess 104 of the guide surface of the end face of this guiding piece 1.
Flow in first and second chambers 13,14 from the part of the exhaust of the bearing surface 7 of auxiliary slider 3 recess 104 through guide surface.Through on guiding piece 1, forming the recess 104 of guide surface; Thereby be divided into exhaust of discharging from slotted hole 4 and the exhaust that flow into the recess 104 of guide surface clearly, the variation of the capacity that is caused by the position of auxiliary slider 3 and embodiment shown in Figure 7 relatively increase.Therefore, the recess 104 of guide surface plays the bigger effect of power that makes auxiliary slider 3 return the equilbrium position.
Fig. 9 A and Fig. 9 B are the figure that explanation is installed in the instrument on the slide block 2.Leaf spring 30 and piezoelectric element 34 are installed on slide block 2, on this leaf spring 30, instrument 32 are installed.If piezoelectric element 34 is applied voltage, then piezoelectric element 34 makes instrument 32 be shifted to the penetration of a cutting tool direction in elongation.Instrument 32 incision workpiece (not shown) stop piezoelectric element 34 is applied voltage in backstroke in the forward stroke of slide block 2, and then instrument 32 withdraws from from workpiece.Carry out cut with instrument 32 like this.
Figure 10 be Fig. 9 A and Fig. 9 B explanation installation the stereoscopic figure of an embodiment of linear drive apparatus of the present invention of instrument.In addition, only represent lid 11,12 among the figure, and omitted the expression of the structure of watertight aircase 15,16 etc.Instrument 32 breakthrough forms are formed in the slotted hole 4 at least one side of guiding piece 1 and protrude in the outside of guiding piece 1.Instrument 32 moves back and forth in arrow 36 directions, in forward stroke, as shown in Figure 9, thereby through piezoelectric element 34 being applied voltage piezoelectric element 34 is shifted to the penetration of a cutting tool direction to arrow 38 directions elongation instrument 32, carries out the cut of workpiece.In backstroke, stop piezoelectric element 34 is applied voltage and piezoelectric element 34 is shunk, instrument 32 is withdrawed from from workpiece.
As stated; Through the flow through sense of current that is arranged at the coil 5 on the slide block 2 of change slide block 2 is moved back and forth; And; When slide block 2 moves back and forth; The control device that utilizes drive controlling piezoelectric element 34 applies the voltage of regulation to piezoelectric element 34 and makes its elongation in the forward stroke of for example slide block 2, give the bite with ormal weight to workpiece, and work piece is carried out draw cut (drawing I
り) cut.Piezoelectric element 34 is shunk, instrument 32 is returned to the hands-off position of work piece reset.Then, the device that has omitted among the utilization figure makes work piece relatively move to the direction with the vibration-direction quadrature of slide block 2, carries out aforesaid draw cut cut.In addition, the bite of instrument 32 can be controlled through the size of voltage that piezoelectric element 34 is applied.
Figure 11 is the cutaway view of embodiment that the linear drive apparatus of the present invention of the illustrated instrument of Fig. 9 has been installed.The incoming end (not shown) of the supply lines of the action that makes instrument 32 carry out penetration of a cutting tool to piezoelectric element 34 power supply and withdraw from is arranged on the suitable position of slide block 2 of the processing action of the instrument of not hindering 32.This incoming end is preferably in the face of being arranged on the position of the slotted hole 4 on the guiding piece 1.Perhaps, different with the slotted hole 4 that instrument 32 connects, also can make slotted hole 23 is arranged on the side relative with guiding piece 1, and supply lines is connected with the incoming end of supply lines on being arranged on slide block 2 through this slotted hole 23.In addition, the power line of coil 5 also can likewise constitute with the power supply to instrument 32.Have again,, the pipe arrangement of air supply (air, nitrogen and so on) likewise is connected with slide block 2 through slotted hole 4 with supply lines in occasion as FDB (air bearing).
Claims (8)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-058121 | 2009-03-11 | ||
| JP2009058121A JP4612096B2 (en) | 2009-03-11 | 2009-03-11 | Linear drive device with two chambers and its guide structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101829924A CN101829924A (en) | 2010-09-15 |
| CN101829924B true CN101829924B (en) | 2012-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101324476A Expired - Fee Related CN101829924B (en) | 2009-03-11 | 2010-03-10 | Linear driving apparatus having two chambers, and guide structure thereof |
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| Country | Link |
|---|---|
| JP (1) | JP4612096B2 (en) |
| KR (1) | KR101017549B1 (en) |
| CN (1) | CN101829924B (en) |
| TW (1) | TWI433747B (en) |
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| CN105711089B (en) | 2014-12-04 | 2018-10-02 | 三纬国际立体列印科技股份有限公司 | Guide rod assembly and three-dimensional printing device |
| JP6246411B1 (en) * | 2017-07-21 | 2017-12-13 | Dmg森精機株式会社 | Coolant supply device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5998889A (en) * | 1996-12-10 | 1999-12-07 | Nikon Corporation | Electro-magnetic motor cooling system |
| US6744155B1 (en) * | 1998-03-13 | 2004-06-01 | Siemens Aktiengesellschaft | Momentum-decoupled direct drive |
| CN1719702A (en) * | 2004-07-06 | 2006-01-11 | 发那科株式会社 | Linear driving device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4517482Y1 (en) * | 1969-01-09 | 1970-07-17 | ||
| SE443605B (en) * | 1981-05-14 | 1986-03-03 | Craelius Ab | DEVICE FOR FEEDING OF A MOUNTAIN DRILLING MACHINE |
| JPS63253856A (en) * | 1987-04-07 | 1988-10-20 | Mitsuba Electric Mfg Co Ltd | Magnetic coupling structure |
| JPH06254715A (en) * | 1993-03-04 | 1994-09-13 | Ryobi Ltd | Vibration reducing device for reciprocating tool |
| JPH10252801A (en) * | 1997-01-07 | 1998-09-22 | Showa:Kk | gas spring |
| KR100554687B1 (en) | 2003-07-15 | 2006-02-24 | 사단법인 엔.씨 공작기계 연구조합 | 2-axis control method for precision feed |
| JP4072551B2 (en) * | 2005-11-09 | 2008-04-09 | ファナック株式会社 | Processing equipment |
| JP4899763B2 (en) * | 2006-09-29 | 2012-03-21 | 富士電機リテイルシステムズ株式会社 | Terminal management apparatus, program, and communication method |
| JP4347396B2 (en) * | 2008-03-28 | 2009-10-21 | ファナック株式会社 | Processing device having a mechanism for holding the position of the shuttle guide |
-
2009
- 2009-03-11 JP JP2009058121A patent/JP4612096B2/en not_active Expired - Fee Related
-
2010
- 2010-03-09 TW TW99106743A patent/TWI433747B/en not_active IP Right Cessation
- 2010-03-10 KR KR1020100021334A patent/KR101017549B1/en not_active Expired - Fee Related
- 2010-03-10 CN CN2010101324476A patent/CN101829924B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5998889A (en) * | 1996-12-10 | 1999-12-07 | Nikon Corporation | Electro-magnetic motor cooling system |
| US6744155B1 (en) * | 1998-03-13 | 2004-06-01 | Siemens Aktiengesellschaft | Momentum-decoupled direct drive |
| CN1719702A (en) * | 2004-07-06 | 2006-01-11 | 发那科株式会社 | Linear driving device |
Non-Patent Citations (1)
| Title |
|---|
| JP昭63-253856A 1998.10.20 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201039972A (en) | 2010-11-16 |
| KR101017549B1 (en) | 2011-02-28 |
| TWI433747B (en) | 2014-04-11 |
| KR20100102558A (en) | 2010-09-24 |
| CN101829924A (en) | 2010-09-15 |
| JP4612096B2 (en) | 2011-01-12 |
| JP2010207983A (en) | 2010-09-24 |
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