[go: up one dir, main page]

CN101825629A - Waveguide coupling metal photonic crystal biosensor and detecting method thereof - Google Patents

Waveguide coupling metal photonic crystal biosensor and detecting method thereof Download PDF

Info

Publication number
CN101825629A
CN101825629A CN 200910079243 CN200910079243A CN101825629A CN 101825629 A CN101825629 A CN 101825629A CN 200910079243 CN200910079243 CN 200910079243 CN 200910079243 A CN200910079243 A CN 200910079243A CN 101825629 A CN101825629 A CN 101825629A
Authority
CN
China
Prior art keywords
photonic crystal
metal photonic
substrate
sample solution
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 200910079243
Other languages
Chinese (zh)
Other versions
CN101825629B (en
Inventor
张新平
刘红梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing University of Technology
Original Assignee
Beijing University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing University of Technology filed Critical Beijing University of Technology
Priority to CN200910079243.8A priority Critical patent/CN101825629B/en
Publication of CN101825629A publication Critical patent/CN101825629A/en
Application granted granted Critical
Publication of CN101825629B publication Critical patent/CN101825629B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

本发明为一种波导耦合金属光子晶体生物传感器及其检测方法,用于生物分子的浓度和生物活性分子特异反应的高灵敏度传感。本发明包括基底、波导层以及备在波导层上的金属光子晶体,检测时,光源发出的光以一定角度照射在金属光子晶体上,光检测器检测经过波导层和基底的透射光的消光光谱,或者检测通过金属光子晶体的反射光的消光光谱,然后在金属光子晶体上固定受体后再将试料溶液流经金属光子晶体的表面,此时再用检测器检测此时通过波导层和基底的透射光的消光光谱,或者检测通过金属光子晶体的反射光的消光光谱,对两次消光光谱作二次消光光谱计算,实现对配体浓度的定量检测。本发明具有灵敏度高、成本低、制备和使用方法简单等优点。

Figure 200910079243

The invention relates to a waveguide coupling metal photonic crystal biosensor and a detection method thereof, which are used for high-sensitivity sensing of the concentration of biomolecules and the specific reaction of bioactive molecules. The invention includes a substrate, a waveguide layer and a metal photonic crystal prepared on the waveguide layer. When detecting, the light emitted by the light source is irradiated on the metal photonic crystal at a certain angle, and the light detector detects the extinction spectrum of the transmitted light passing through the waveguide layer and the substrate. , or detect the extinction spectrum of the reflected light passing through the metal photonic crystal, then fix the receptor on the metal photonic crystal and then flow the sample solution through the surface of the metal photonic crystal, and then use the detector to detect the light passing through the waveguide layer and The extinction spectrum of the transmitted light of the substrate, or the extinction spectrum of the reflected light passing through the metal photonic crystal, is calculated for the second extinction spectrum to realize the quantitative detection of the ligand concentration. The invention has the advantages of high sensitivity, low cost, simple preparation and use methods and the like.

Figure 200910079243

Description

波导耦合金属光子晶体生物传感器及其检测方法 Waveguide coupled metal photonic crystal biosensor and its detection method

技术领域technical field

本发明为一种波导耦合金属光子晶体生物传感器及其检测方法,其基于的物理机理是金属光子晶体中的粒子等离子共振与波导共振模式间强烈的光谱学耦合作用,可以用于生物分子(蛋白质、糖类分子、DNA等)的浓度和生物活性分子特异反应的高灵敏度传感,属于光电子技术与生物技术的交叉领域。The invention is a waveguide-coupled metal photonic crystal biosensor and its detection method, which is based on the physical mechanism of the strong spectroscopic coupling between the particle plasmon resonance in the metal photonic crystal and the waveguide resonance mode, which can be used for biomolecules (proteins) , sugar molecules, DNA, etc.) and the high-sensitivity sensing of the specific reaction of biologically active molecules, which belong to the cross field of optoelectronic technology and biotechnology.

背景技术Background technique

高灵敏度、高分辨特性的生物分子传感器在生物学、生命科学、医学等科学研究和实际应用中起着非常重要的作用。基于光谱学响应特性的生物传感器由于其可靠物理学原理和精密的技术手段而表现出独特的优势。Biomolecular sensors with high sensitivity and high resolution characteristics play a very important role in scientific research and practical applications such as biology, life science, and medicine. Biosensors based on spectral response characteristics show unique advantages due to their reliable physical principles and sophisticated technical means.

传统的表面等离子共振(SPR)生物传感器的基本结构如图1所示。该传感器由透明基板1,蒸镀在基板1上表面的金属层2,棱镜6,光源7,光检测器8构成。SPR生物传感器用于生物特异反应传感工作原理是这样的:来自宽带光源7的光束以一定角度入射到棱镜6上,棱镜6将入射光以大角度导入透明基板,被导入的入射光在金属层2和基板1的界面发生全反射而在金属层2中激发倏逝波(Evanescent Wave)。在给定入射角情况下,倏逝波中的某一频率将与金属层2的表面等离子共振频率达到一致,使得入射光在该频率被强烈共振吸收,在其反射光谱中测得该频率处一个显著的吸收峰。这就是所谓的表面等离子共振吸收。在实际应用中,也可采用单色光源(如激光)作为入射光,通过改变入射角来实现金属层对其表面等离子共振吸收的目的。目前所采用的技术多为前者,即采用固定入射角和宽带光源的方式,可以避免角度调节导致的操作繁琐、误差大、系统不稳定等问题。The basic structure of a traditional surface plasmon resonance (SPR) biosensor is shown in Figure 1. The sensor is composed of a transparent substrate 1 , a metal layer 2 deposited on the upper surface of the substrate 1 , a prism 6 , a light source 7 and a light detector 8 . The working principle of the SPR biosensor for biospecific reaction sensing is as follows: the beam from the broadband light source 7 is incident on the prism 6 at a certain angle, and the prism 6 guides the incident light into the transparent substrate at a large angle, and the incident light that is introduced is in the metal Total reflection occurs at the interface between the layer 2 and the substrate 1 to excite an evanescent wave in the metal layer 2 . In the case of a given incident angle, a certain frequency in the evanescent wave will be consistent with the surface plasmon resonance frequency of the metal layer 2, so that the incident light is strongly resonantly absorbed at this frequency, and the frequency at this frequency is measured in its reflection spectrum a prominent absorption peak. This is the so-called surface plasmon resonance absorption. In practical applications, a monochromatic light source (such as a laser) can also be used as the incident light, and the purpose of plasmon resonance absorption of the metal layer on its surface can be realized by changing the incident angle. Most of the technologies currently used are the former, that is, using a fixed incident angle and a broadband light source, which can avoid problems such as cumbersome operation, large errors, and system instability caused by angle adjustment.

在生物传感实验中,首先将能与配体3发生特异性识别反应的受体4固定在金属层2上,由于表面等离子共振频率强烈地依赖于环境的介电常数(折射率),经受体分子固定后的金属薄膜具备了特定的SPR频率。然后将固定在金属薄膜2的受体与试料溶液5中的配体3相互作用,受体和配体发生特异性反应,金属层表面处的介电常数就发生了变化,从而导致金属层的表面等离子共振频率发生偏移。由此,可获得试料溶液中配体浓度信息。In the biosensing experiment, firstly, the receptor 4, which can specifically recognize the ligand 3, is fixed on the metal layer 2. Since the surface plasmon resonance frequency strongly depends on the dielectric constant (refractive index) of the environment, the The metal thin film with receptor molecules immobilized has a specific SPR frequency. Then the receptor fixed on the metal film 2 interacts with the ligand 3 in the sample solution 5, and the receptor and the ligand react specifically, and the dielectric constant at the surface of the metal layer changes, thereby causing the metal layer The surface plasmon resonance frequency shifted. Thus, the ligand concentration information in the sample solution can be obtained.

基于SPR技术的生物传感器仍然具有器件结构复杂、制备技术要求高、系统操作繁琐、测试周期长,从而成本高等缺点。因此,结构简单、灵敏度高、测试过程快捷、成本低的生物传感器成为生物医学等领域的迫切要求和重要研发内容。Biosensors based on SPR technology still have the disadvantages of complex device structure, high preparation technology requirements, cumbersome system operation, long test cycle, and high cost. Therefore, biosensors with simple structure, high sensitivity, fast testing process, and low cost have become an urgent requirement and important research and development content in biomedicine and other fields.

发明内容Contents of the invention

本发明的目的在于克服了现有生物传感器的上述缺陷,提出了一种波导耦合金属光子晶体生物传感器及其检测方法,该生物传感器具有灵敏度高、成本低、制备和使用方法简单等优点。The purpose of the present invention is to overcome the above-mentioned defects of existing biosensors, and propose a waveguide-coupled metal photonic crystal biosensor and its detection method. The biosensor has the advantages of high sensitivity, low cost, and simple preparation and use methods.

本发明中的生物传感器所基于的物理机理是:波导共振模式(WGM)和金属光子晶体的粒子等离子共振(PPR)模式间强烈的耦合作用,故称其为“波导耦合金属光子晶体生物传感器”。The physical mechanism based on the biosensor in the present invention is: the strong coupling between the waveguide resonance mode (WGM) and the particle plasmon resonance (PPR) mode of the metal photonic crystal, so it is called "waveguide coupling metal photonic crystal biosensor" .

本发明所采取的技术方案如下:该生物传感器从下到上依次包括基底21、覆盖在基底21上透明的波导层22、覆盖在波导层22上的金属光子晶体23。The technical scheme adopted by the present invention is as follows: the biosensor comprises a substrate 21, a transparent waveguide layer 22 covering the substrate 21, and a metal photonic crystal 23 covering the waveguide layer 22 from bottom to top.

所述的波导层21的厚度为60nm~300nm。The thickness of the waveguide layer 21 is 60nm-300nm.

所述的金属光子晶体23为一维金属光子晶体或二维金属光子晶体。The metal photonic crystal 23 is a one-dimensional metal photonic crystal or a two-dimensional metal photonic crystal.

所述的一维金属光子晶体的周期为150nm~550nm。The period of the one-dimensional metal photonic crystal is 150nm-550nm.

所述的二维金属光子晶体两个方向的周期可以相同也可以不同,取值范围均为150nm~550nm。The period of the two directions of the two-dimensional metal photonic crystal can be the same or different, and the value range is 150nm-550nm.

使用上述波导耦合金属光子晶体生物传感器进行检测,其检测方法如下:Using the above-mentioned waveguide-coupled metal photonic crystal biosensor for detection, the detection method is as follows:

1)在金属光子晶体23上固定对配体3具有特异性识别功能的受体4后将空白试料溶液与金属光子晶体23的表面接触;1) After immobilizing the receptor 4 having a specific recognition function for the ligand 3 on the metal photonic crystal 23, contact the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后以与基底21所在平面的法线成θ角(θ的范围为0~80°)照射金属光子晶体,光检测器8检测经过空白试料溶液、金属光子晶体23、波导层22和基底21的透射光的消光光谱;2) After passing through the polarization controller 31, the light emitted by the light source 7 irradiates the metal photonic crystal at an angle θ with the normal line of the plane where the substrate 21 is located (the range of θ is 0-80°), and the photodetector 8 detects the light passing through the blank sample solution , the extinction spectrum of the transmitted light of the metal photonic crystal 23, the waveguide layer 22 and the substrate 21;

3)将含有配体的试料溶液流经金属光子晶体23的表面,配体与受体发生特异性反应。利用步骤1)中的空白试料溶液清洗掉没有发生反应的配体后,再将空白试料溶液与金属光子晶体23的表面接触;3) The sample solution containing the ligand flows over the surface of the metal photonic crystal 23, and the ligand reacts specifically with the receptor. After using the blank sample solution in step 1) to wash away unreacted ligands, then contact the blank sample solution with the surface of the metal photonic crystal 23;

4)光源7发出的光经过偏振控制器31后以与基底21所在平面的法线成与步骤2)相同的θ角度照射金属光子晶体,光检测器8检测经过空白试料溶液、金属光子晶体、波导层22和基底21的透射光的消光光谱;4) After passing through the polarization controller 31, the light emitted by the light source 7 irradiates the metal photonic crystal with the normal line of the plane where the substrate 21 is located at the same θ angle as step 2), and the photodetector 8 detects the metal photonic crystal through the blank sample solution and the metal photonic crystal. , the extinction spectrum of the transmitted light of the waveguide layer 22 and the substrate 21;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征不同配体浓度的光谱学变化规律,实现对配体浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the ligand concentration is realized by characterizing the spectroscopic variation law of different ligand concentrations.

使用上述波导耦合金属光子晶体生物传感器进行检测,也可以按下述方法进行检测:Using the above-mentioned waveguide-coupled metal photonic crystal biosensor for detection can also be carried out as follows:

1)在金属光子晶体23上固定对配体3具有特异性识别功能的受体4后将空白试料溶液与金属光子晶体23的表面接触;1) After immobilizing the receptor 4 having a specific recognition function for the ligand 3 on the metal photonic crystal 23, contact the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射基底,光检测器8检测经过基底21、波导层22、金属光子晶体23和空白试料溶液的透射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the substrate at an angle θ with the normal of the plane where the substrate 21 is located (the range of θ is 0° to 80°). The extinction spectrum of the transmitted light of metal photonic crystal 23 and blank sample solution;

3)将含有配体的试料溶液流经金属光子晶体23的表面,配体与受体发生特异性反应。利用步骤1)的空白试料溶液清洗掉没有发生反应的配体,最后将空白试料溶液再与金属光子晶体23的表面接触;3) The sample solution containing the ligand flows over the surface of the metal photonic crystal 23, and the ligand reacts specifically with the receptor. Use the blank sample solution in step 1) to wash away unreacted ligands, and finally contact the blank sample solution with the surface of the metal photonic crystal 23;

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射基底,光检测器8检测经过基底21、波导层22、金属光子晶体23和空白试料溶液的反应后的透射光的消光光谱;4) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the substrate at the same angle θ as the normal line of the plane where the substrate 21 is located, and the photodetector 8 detects the substrate 21, the waveguide layer 22, and the metal photonic crystal The extinction spectrum of the transmitted light after the reaction with the blank sample solution;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征不同配体浓度的光谱学变化规律,实现对配体浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the ligand concentration is realized by characterizing the spectroscopic variation law of different ligand concentrations.

使用上述波导耦合金属光子晶体生物传感器进行检测,也可以按下述方法进行检测:Using the above-mentioned waveguide-coupled metal photonic crystal biosensor for detection can also be carried out as follows:

1)在金属光子晶体23上固定对配体3具有特异性识别功能的受体4后将空白试料溶液与金属光子晶体23的表面接触;1) After immobilizing the receptor 4 having a specific recognition function for the ligand 3 on the metal photonic crystal 23, contact the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射金属光子晶体,光检测器8检测依次经过空白试料溶液、金属光子晶体和波导层22后被基底21发射回来的反射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and forms an angle θ with the normal line of the plane where the substrate 21 is located (the range of θ is 0-80°) to irradiate the metal photonic crystal, and the photodetector 8 detects and passes through the blank sample solution in sequence , the extinction spectrum of the reflected light emitted back by the substrate 21 after the metal photonic crystal and the waveguide layer 22;

3)将含有配体的试料溶液流经金属光子晶体23的表面,配体与受体发生特异性反应。利用步骤1)的空白试料溶液清洗掉没有发生反应的配体,最后将空白试料溶液再与金属光子晶体23的表面接触。3) The sample solution containing the ligand flows over the surface of the metal photonic crystal 23, and the ligand reacts specifically with the receptor. Use the blank sample solution in step 1) to wash away unreacted ligands, and finally bring the blank sample solution into contact with the surface of the metal photonic crystal 23 again.

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射金属光子晶体,光检测器8检测反应后依次经过空白试料溶液、金属光子晶体23和波导层22后被基底21反射回来的反射光的消光光谱;4) After passing through the polarization controller 31, the light emitted by the light source 7 irradiates the metal photonic crystal at the same θ angle as that of step 2) with the normal line of the plane where the substrate 21 is located. After the photodetector 8 detects the reaction, it passes through the blank sample solution, metal The extinction spectrum of the reflected light reflected by the substrate 21 after the photonic crystal 23 and the waveguide layer 22;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征不同配体浓度的光谱学变化规律,实现对配体浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the ligand concentration is realized by characterizing the spectroscopic variation law of different ligand concentrations.

使用上述波导耦合金属光子晶体生物传感器进行检测,也可以按下述方法进行检测:Using the above-mentioned waveguide-coupled metal photonic crystal biosensor for detection can also be carried out as follows:

1)在金属光子晶体23上固定对配体3具有特异性识别功能的受体4后将空白试料溶液与金属光子晶体23的表面接触;1) After immobilizing the receptor 4 having a specific recognition function for the ligand 3 on the metal photonic crystal 23, contact the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射基底21,光检测器8检测依次经过基底21和波导层22后被金属光子晶体反射回来的反射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the substrate 21 at an angle θ with the normal of the plane where the substrate 21 is located (the range of θ is 0° to 80°), and the photodetector 8 detects the light passing through the substrate 21 and the waveguide layer in turn. The extinction spectrum of the reflected light reflected by the metal photonic crystal after 22;

3)将含有配体的试料溶液流经金属光子晶体23的表面,配体与受体发生特异性反应。利用步骤1)的空白试料溶液清洗掉没有发生反应的配体,最后将空白试料溶液与金属光子晶体23的表面接触。3) The sample solution containing the ligand flows over the surface of the metal photonic crystal 23, and the ligand reacts specifically with the receptor. Use the blank sample solution in step 1) to wash away unreacted ligands, and finally contact the blank sample solution with the surface of the metal photonic crystal 23 .

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射基底21,光检测器8检测反应后依次经过基底21和波导层22后,被金属光子晶体反射回来的反射光的消光光谱;4) After passing through the polarization controller 31, the light emitted by the light source 7 irradiates the substrate 21 at the same angle θ with the normal of the plane where the substrate 21 is located as in step 2), and the photodetector 8 detects the reaction and passes through the substrate 21 and the waveguide layer 22 in sequence , the extinction spectrum of the reflected light reflected by the metal photonic crystal;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征不同配体浓度的光谱学变化规律,实现对配体浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the ligand concentration is realized by characterizing the spectroscopic variation law of different ligand concentrations.

本发明中的装置还可以用来定量检测物质浓度的变化,具体有以下几种检测方法:The device in the present invention can also be used to quantitatively detect changes in the concentration of substances, specifically the following detection methods:

一、使用本发明中的波导耦合金属光子晶体生物传感器进行物质浓度的检测,可按下述方法进行:One, use the waveguide coupling metal photonic crystal biosensor among the present invention to carry out the detection of substance concentration, can carry out according to the following method:

1)将空白试料溶液与金属光子晶体23的表面接触;1) contacting the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射金属光子晶体,光检测器8检测经过空白试料溶液、金属光子晶体23、波导层22和基底21的透射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the metal photonic crystal at an angle θ with the normal line of the plane where the substrate 21 is located (the range of θ is 0 to 80°). The extinction spectrum of the transmitted light of the metal photonic crystal 23, the waveguide layer 22 and the substrate 21;

3)将含有某种物质的试料溶液流经金属光子晶体23的表面,并与金属光子晶体23的表面接触。3) Flow a sample solution containing a certain substance over the surface of the metal photonic crystal 23 and make contact with the surface of the metal photonic crystal 23 .

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射金属光子晶体,光检测器8检测经过试料溶液、金属光子晶体23、波导层22和基底21的透射光的消光光谱;4) After passing through the polarization controller 31, the light emitted by the light source 7 irradiates the metal photonic crystal at the same θ angle as that of step 2) with the normal line of the plane where the substrate 21 is located, and the photodetector 8 detects the metal photonic crystal through the sample solution, the metal photonic crystal 23, The extinction spectrum of the transmitted light of the waveguide layer 22 and the substrate 21;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征该物质不同浓度的光谱学变化规律,实现对该物质浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the concentration of the substance is realized by characterizing the spectroscopic variation law of different concentrations of the substance.

二、本方法与方法一的不同之处在于检测光从基底入射,具体步骤如下:2. The difference between this method and method 1 is that the detection light is incident from the substrate, and the specific steps are as follows:

1)将空白试料溶液与金属光子晶体23的表面接触;1) contacting the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射基底21,光检测器8检测经过基底21、波导层22、金属光子晶体23和空白试料溶液的透射光的消光光谱;2) After passing through the polarization controller 31 , the light emitted by the light source 7 irradiates the substrate 21 at an angle θ with the normal to the plane where the substrate 21 is located (the range of θ is 0° to 80°), and the photodetector 8 detects the light passing through the substrate 21 and the waveguide layer 22 , the extinction spectrum of the transmitted light of metal photonic crystal 23 and blank sample solution;

3)将含有某种物质的试料溶液流经金属光子晶体23的表面,并与金属光子晶体23的表面接触。3) Flow a sample solution containing a certain substance over the surface of the metal photonic crystal 23 and make contact with the surface of the metal photonic crystal 23 .

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射基底21,光检测器8检测经过基底21、波导层22、金属光子晶体23和试料溶液的透射光的消光光谱;4) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the substrate 21 at the same angle θ with the normal line of the plane where the substrate 21 is located as in step 2). 23 and the extinction spectrum of the transmitted light of the sample solution;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征该物质不同浓度的光谱学变化规律,实现对该物质浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the concentration of the substance is realized by characterizing the spectroscopic variation law of different concentrations of the substance.

三、本方法采用的检测反射光的方法来确定物质浓度的变化,其具体步骤如下:Three, the method for detecting reflected light that this method adopts determines the change of substance concentration, and its specific steps are as follows:

1)将空白试料溶液与金属光子晶体23的表面接触;1) contacting the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射金属光子晶体,光检测器8检测依次经过空白试料溶液、金属光子晶体23和波导层22后,被基底21反射的反射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and forms an angle θ with the normal line of the plane where the substrate 21 is located (the range of θ is 0-80°) to irradiate the metal photonic crystal, and the photodetector 8 detects and passes through the blank sample solution in sequence , behind the metal photonic crystal 23 and the waveguide layer 22, the extinction spectrum of the reflected light reflected by the substrate 21;

3)将含有某种物质的试料溶液流经金属光子晶体23的表面,并与金属光子晶体23的表面接触。3) Flow a sample solution containing a certain substance over the surface of the metal photonic crystal 23 and make contact with the surface of the metal photonic crystal 23 .

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射金属光子晶体,光检测器8检测依次经过试料溶液、金属光子晶体和波导层22后,被基底21反射的反射光的消光光谱;4) After passing through the polarization controller 31, the light emitted by the light source 7 irradiates the metal photonic crystal at the same θ angle as that of step 2) with the normal line of the plane where the substrate 21 is located, and the photodetector 8 detects and passes through the sample solution, the metal photonic crystal and the metal photonic crystal successively. After the waveguide layer 22, the extinction spectrum of the reflected light reflected by the substrate 21;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征该物质不同浓度的光谱学变化规律,实现对该物质浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the concentration of the substance is realized by characterizing the spectroscopic variation law of different concentrations of the substance.

四、本方法与方法三的区别在于检测光从基底入射,具体步骤如下:4. The difference between this method and method 3 is that the detection light is incident from the substrate, and the specific steps are as follows:

1)将空白试料溶液与金属光子晶体23的表面接触;1) contacting the blank sample solution with the surface of the metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成θ角度(θ的范围为0~80°)照射基底21,光检测器8检测经过基底21和波导层22后被金属光子晶体反射的反射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the substrate 21 at an angle θ with the normal line of the plane where the substrate 21 is located (the range of θ is 0° to 80°), and the light detector 8 detects the light passing through the substrate 21 and the waveguide layer 22 The extinction spectrum of the reflected light reflected by the metal photonic crystal;

3)将含有某种物质的试料溶液流经金属光子晶体23的表面,并与金属光子晶体23的表面接触;3) Flow the sample solution containing a certain substance through the surface of the metal photonic crystal 23, and contact with the surface of the metal photonic crystal 23;

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成与步骤2)相同的θ角度照射基底21,光检测器8检测依次经过基底21和波导层22后被金属光子晶体反射的反射光的消光光谱;4) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the substrate 21 at the same angle θ with the normal of the plane where the substrate 21 is located as in step 2). The extinction spectrum of the reflected light reflected by the photonic crystal;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,通过表征该物质不同浓度的光谱学变化规律,实现对该物质浓度的定量检测。5) The extinction spectrum in step 2) and step 4) is used as the secondary extinction spectrum calculation, and the quantitative detection of the concentration of the substance is realized by characterizing the spectroscopic variation law of different concentrations of the substance.

该生物传感器的工作原理如图5所示:入射光24在金属光子晶体23中激发粒子等离子共振激元而在特征光谱区被强烈吸收的同时,被金属光子晶体衍射并在波导层22中激发波导传播模式27。波导模式传播过程中被上表面的金属光子晶体衍射而产生多束平行于透射光26的衍射光28,衍射光28进一步与透射光26发生干涉。这样,在测得的透射光的宽带等离共振吸收光谱中可以观察到一个窄带的透射增强信号,这是波导模式与等离子共振模式耦合作用的结果。金属光子晶体的粒子等离子共振吸收和波导共振模式的光谱学响应特征均随金属光子晶体上表面环境折射率的变化而发生偏移,其偏移量直接对应于环境折射率的变化量。因此,通过测量粒子等离子共振吸收和波导共振模式的耦合光谱的变化即可定量表征环境折射率的变化量。这就是本发明中生物传感器的工作原理。其中窄带波导共振模式的引入大大提高了传感器响应的灵敏度。The working principle of the biosensor is shown in Figure 5: the incident light 24 excites the particle plasmon resonance in the metal photonic crystal 23 and is strongly absorbed in the characteristic spectral region, and is diffracted by the metal photonic crystal and excited in the waveguide layer 22 Waveguide Propagation Mode 27. The waveguide mode is diffracted by the metal photonic crystal on the upper surface during propagation to generate multiple beams of diffracted light 28 parallel to the transmitted light 26 , and the diffracted light 28 further interferes with the transmitted light 26 . In this way, a narrow-band transmission-enhanced signal can be observed in the measured broadband plasmon resonance absorption spectrum of the transmitted light, which is the result of the coupling between the waveguide mode and the plasmon resonance mode. Both the particle plasmon resonance absorption and the spectral response characteristics of the waveguide resonance mode of the metal photonic crystal shift with the change of the environmental refractive index on the upper surface of the metal photonic crystal, and the shift amount directly corresponds to the change of the environmental refractive index. Therefore, the variation of the ambient refractive index can be quantitatively characterized by measuring the variation of the particle plasmon resonance absorption and the coupling spectrum of the waveguide resonance mode. This is the working principle of the biosensor in the present invention. The introduction of the narrowband waveguide resonance mode greatly improves the sensitivity of the sensor response.

本发明的波导耦合金属光子晶体生物传感器的检测原理如下:在生物特异反应传感实验中,首先将对配体(抗原)3具有特异性识别功能的受体(抗体)4固定在金属光子晶体23的表面,构成传感器的初始膜片;将试料溶液5流经金属光子晶体23的表面,若试料中存在配体(抗原)3,受体(抗体)4与配体(抗原)3便会发生特异性反应,根据反应前后消光光谱的变化,定量给出波导模式与粒子等离子共振模式间耦合作用的微小变化,通过对光谱变化规律的定量表征,实现对试料溶液5中配体(抗原)3的浓度的检测。在物质浓度检测实验中,试料溶液5流经金属光子晶体23的表面,若试料中待测物质的浓度发生变化,根据浓度变化前后消光光谱的变化,定量给出波导模式与粒子等离子共振模式间耦合作用的微小变化,通过对光谱变化规律的定量表征,实现对待测物质浓度的检测。The detection principle of the waveguide-coupled metal photonic crystal biosensor of the present invention is as follows: in the biospecific reaction sensing experiment, at first the receptor (antibody) 4 with specific recognition function to the ligand (antigen) 3 is fixed on the metal photonic crystal The surface of 23 constitutes the initial diaphragm of the sensor; the sample solution 5 flows through the surface of the metal photonic crystal 23, if there is a ligand (antigen) 3 in the sample, the receptor (antibody) 4 and the ligand (antigen) 3 A specific reaction will occur. According to the change of the extinction spectrum before and after the reaction, the small change in the coupling effect between the waveguide mode and the particle plasmon resonance mode is quantitatively given. Through the quantitative characterization of the change law of the spectrum, the ligand in the sample solution 5 Detection of the concentration of (antigen) 3. In the substance concentration detection experiment, the sample solution 5 flows through the surface of the metal photonic crystal 23. If the concentration of the substance to be tested in the sample changes, according to the change of the extinction spectrum before and after the concentration change, the waveguide mode and particle plasmon resonance can be quantitatively given. The small change in the coupling effect between the modes realizes the detection of the concentration of the substance to be measured through the quantitative characterization of the change law of the spectrum.

本发明区别于传统的SPR传感器的优势特点体现在以下方面:The advantages and characteristics of the present invention which are different from traditional SPR sensors are reflected in the following aspects:

1)成本低:不管是波导耦合金属光子晶体传感器件还是光谱学测试系统的成本均远低于SPR传感器系统。整个传感器系统成本只有目前市场上已有的SPR生物传感器价格的10%以下。其核心的波导耦合金属光子晶体传感器可以重复使用,提高了实际应用的灵活性。1) Low cost: The cost of both the waveguide-coupled metal photonic crystal sensor device and the spectroscopy test system is much lower than that of the SPR sensor system. The cost of the whole sensor system is only less than 10% of the price of the existing SPR biosensors on the market. Its core waveguide-coupled metal photonic crystal sensor can be reused, which improves the flexibility of practical applications.

2)灵敏度高:波导共振模式的引入实现了对粒子等离子共振模式的窄带调制,大大提高了器件对环境折射率变化响应的灵敏度。2) High sensitivity: the introduction of the waveguide resonance mode realizes the narrow-band modulation of the particle plasmon resonance mode, which greatly improves the sensitivity of the device to the change of the refractive index of the environment.

3)测试手段灵活、简便:根据不同需求,多种测试方法可供选择;测试过程中,只需采用常规的光学和光谱学测试手段,获得透射或反射光谱或透射或反射的消光光谱。3) The test method is flexible and simple: according to different needs, a variety of test methods are available; during the test process, only conventional optical and spectroscopic test methods are used to obtain the transmission or reflection spectrum or the transmission or reflection extinction spectrum.

4)便于集成:波导耦合金属光子晶体体积小,形状规则,易于嵌入系统,构成生物芯片结构。4) Ease of integration: waveguide-coupled metal photonic crystals are small in size and regular in shape, making them easy to embed into a system to form a biochip structure.

附图说明Description of drawings

图1传统的表面等离子共振生物传感器结构示意图Figure 1 Schematic diagram of the traditional surface plasmon resonance biosensor structure

图2本发明的波导耦合金属光子晶体生物传感器的剖面图Fig. 2 is a cross-sectional view of the waveguide coupling metal photonic crystal biosensor of the present invention

图3本发明的波导耦合一维金属光子晶体生物传感器的正视图Figure 3 is the front view of the waveguide coupling one-dimensional metal photonic crystal biosensor of the present invention

图4本发明的波导耦合二维金属光子晶体生物传感器的正视图Figure 4 is the front view of the waveguide coupling two-dimensional metal photonic crystal biosensor of the present invention

图5本发明的波导耦合金属光子晶体生物传感器的光学原理图Fig. 5 is the optical principle diagram of the waveguide coupling metal photonic crystal biosensor of the present invention

图6本发明的波导耦合金属光子晶体生物传感器的结构图Fig. 6 is a structural diagram of the waveguide coupling metal photonic crystal biosensor of the present invention

图7本发明的生物传感器的正面透射式检测示意图Fig. 7 is a schematic diagram of the front transmissive detection of the biosensor of the present invention

图8本发明的生物传感器的背面透射式检测示意图Figure 8 is a schematic diagram of the backside transmission detection of the biosensor of the present invention

图9本发明的生物传感器的正面反射式检测示意图Figure 9 is a schematic diagram of the front reflective detection of the biosensor of the present invention

图10本发明的生物传感器的背面反射式检测示意图Figure 10 is a schematic diagram of the back reflective detection of the biosensor of the present invention

图11本发明中的透射式波导耦合金光子晶体生物传感器的消光光谱Fig. 11 The extinction spectrum of the transmissive waveguide coupling gold photonic crystal biosensor in the present invention

图12本发明中的透射式波导耦合金光子晶体生物传感器的检测信号Fig. 12 The detection signal of the transmissive waveguide coupling gold photonic crystal biosensor in the present invention

图13本发明中的反射式波导耦合金光子晶体生物传感器的反射光的消光光谱Figure 13 The extinction spectrum of the reflected light of the reflective waveguide coupling gold photonic crystal biosensor in the present invention

图14本发明中的反射式波导耦合金光子晶体生物传感器的检测信号Figure 14 The detection signal of the reflective waveguide coupling gold photonic crystal biosensor in the present invention

图中:1.透明基板,2.金属层,3.配体(抗原),4.受体(抗体),5.试料溶液,6.棱镜,7.光源,8.光检测器,21.基底,22.波导层,23.金属光子晶体,31.偏振控制器。In the figure: 1. Transparent substrate, 2. Metal layer, 3. Ligand (antigen), 4. Receptor (antibody), 5. Sample solution, 6. Prism, 7. Light source, 8. Photodetector, 21 . Substrate, 22. Waveguide layer, 23. Metal photonic crystal, 31. Polarization controller.

具体实施方式Detailed ways

下面参照附图对本发明作进一步说明:The present invention will be further described below with reference to accompanying drawing:

本发明中的生物传感器包括基底21(厚度为D)、覆盖在基底21上的透明的波导层22(厚度d)以及覆盖在波导层22上的金属光子晶体23(周期为Λ),该生物传感器的剖面图如图2所示。其中:波导层22的厚度d的取值范围为60~300nm,金属光子晶体23可采用一维(图3)或二维结构(图4),称为一维或二维金属光子晶体。一维金属光子晶体的周期为150~550nm,二维光子晶体两个方向的周期均可取为150~550nm。The biosensor in the present invention comprises a substrate 21 (thickness is D), a transparent waveguide layer 22 (thickness d) covered on the substrate 21 and a metal photonic crystal 23 (period is Λ) covered on the waveguide layer 22, the biological The cross-sectional view of the sensor is shown in Figure 2. Wherein: the thickness d of the waveguide layer 22 ranges from 60 to 300 nm, and the metal photonic crystal 23 can adopt a one-dimensional ( FIG. 3 ) or two-dimensional structure ( FIG. 4 ), which is called a one-dimensional or two-dimensional metal photonic crystal. The period of the one-dimensional metal photonic crystal is 150-550 nm, and the period of the two-dimensional photonic crystal in both directions can be 150-550 nm.

本发明中的生物传感器在基底21的透明波导层22上制备金属(优选金、银或者铂)一维或二维光子晶体,获得如图2~图4所示的波导耦合金属光子晶体生物传感器;In the biosensor of the present invention, a metal (preferably gold, silver or platinum) one-dimensional or two-dimensional photonic crystal is prepared on the transparent waveguide layer 22 of the substrate 21, and a waveguide-coupled metal photonic crystal biosensor as shown in FIGS. 2 to 4 is obtained. ;

本发明中的波导耦合金属光子晶体生物传感器的检测方法如下:The detection method of the waveguide coupling metal photonic crystal biosensor in the present invention is as follows:

1)在生物特异性识别检测中,首先将对配体(抗原)3具有特异性识别功能的受体(抗体)4固定在步骤1)中制备的波导耦合金属光子晶体生物传感器中金属光子晶体23的表面,构成传感器的初始膜片;1) In the biospecific recognition detection, first, the receptor (antibody) 4 that has a specific recognition function for the ligand (antigen) 3 is immobilized on the metal photonic crystal in the waveguide-coupled metal photonic crystal biosensor prepared in step 1) The surface of 23 constitutes the initial diaphragm of the sensor;

2)光谱测试方法可采用如图7~图10所示的方式:2) Spectral testing methods can be used as shown in Figure 7 to Figure 10:

3)将试料溶液5流经步骤3)获得的生物传感器的表面,若试料中存在配体(抗原)3,受体(抗体)4便与其发生特异性反应,根据反应前后消光光谱的变化,定量给出波导模式与粒子等离子共振模式间耦合作用的微小变化(如图11或者图13所示),通过表征不同浓度抗原的光谱学变化规律,实现对试料溶液5中配体(抗原)3浓度的定量检测。3) Flow the sample solution 5 over the surface of the biosensor obtained in step 3), if there is a ligand (antigen) 3 in the sample, the receptor (antibody) 4 will specifically react with it, according to the extinction spectrum before and after the reaction Changes, quantitatively give the small changes in the coupling between the waveguide mode and the particle plasmon resonance mode (as shown in Figure 11 or Figure 13), and by characterizing the changes in spectroscopy of different concentrations of antigens, the ligands in the sample solution 5 ( Quantitative detection of antigen)3 concentration.

本发明中的波导耦合金属光子晶体生物传感器的检测也可采用如下方法:The detection of the waveguide coupling metal photonic crystal biosensor in the present invention can also adopt the following method:

1)将空白的试料溶液(溶剂)与金属光子晶体23的表面接触;1) contacting a blank sample solution (solvent) with the surface of the metal photonic crystal 23;

2)光谱测试方法可采用如图7~图10所示的方式;2) Spectral testing methods can be used as shown in Figure 7 to Figure 10;

3)将含有某种物质的试料溶液(待测物质的溶液)与金属光子晶体23的表面接触,根据试料溶液浓度的变化,定量给出波导模式与粒子等离子共振模式间耦合作用的微小变化(如图11或者图13所示),通过表征该物质不同浓度的光谱学变化规律,实现对该物质浓度的定量检测;3) Contact the sample solution containing a certain substance (the solution of the substance to be measured) with the surface of the metal photonic crystal 23, and quantitatively give the tiny coupling effect between the waveguide mode and the particle plasmon resonance mode according to the change of the concentration of the sample solution. Change (as shown in Figure 11 or Figure 13), by characterizing the spectroscopic variation law of different concentrations of the substance, the quantitative detection of the concentration of the substance is realized;

下面为本发明中的装置及其检测方法的实例:Below is the example of device among the present invention and detection method thereof:

实施例1:Example 1:

本实施例为正面透射式波导耦合一维金属光子晶体生物传感器及其检测方法:This embodiment is a front transmissive waveguide coupling one-dimensional metal photonic crystal biosensor and its detection method:

本实施例中所使用的基底21采用厚度D=1mm的玻璃,波导层22采用氧化铟锡(ITO)薄膜,厚度为d=200nm的玻璃片。The substrate 21 used in this embodiment is made of glass with thickness D=1mm, and the waveguide layer 22 is made of indium tin oxide (ITO) thin film glass sheet with thickness d=200nm.

本实施例采用干涉光刻结合溶液法的制备方法在玻璃基底的ITO波导层上制备周期为Λ=330nm一维金光子晶体,获得波导耦合一维金光子晶体生物传感器。利用该传感器进行检测时,其检测方法如下:In this embodiment, a one-dimensional gold photonic crystal with a period of Λ=330nm is prepared on the ITO waveguide layer of a glass substrate by a preparation method of interference lithography combined with a solution method, and a waveguide-coupled one-dimensional gold photonic crystal biosensor is obtained. When using this sensor for detection, the detection method is as follows:

1)将对配体(抗原)3具有特异性识别功能的受体(抗体)4固定在波导耦合一维金属光子晶体生物传感器中的金属光子晶体23的表面,构成传感器的初始膜片,将空白试料溶液(不含待测物质的缓冲溶液或溶剂)与金属光子晶体23的表面接触;1) A receptor (antibody) 4 with a specific recognition function for the ligand (antigen) 3 is immobilized on the surface of the metal photonic crystal 23 in the waveguide-coupled one-dimensional metal photonic crystal biosensor to form the initial diaphragm of the sensor, and the The blank sample solution (buffer solution or solvent not containing the substance to be tested) is in contact with the surface of the metal photonic crystal 23;

2)光谱测试方式采用如图7所示的正面透射式,光源选用溴钨灯,入射光经过偏振控制器31以与基底21所在平面的法线成θ=32°角向本实施例中的波导耦合一维金属光子晶体照射光,光检测器8检测经过空白试料溶液、一维金属光子晶体、波导层和基底的透射光的消光光谱;2) The spectrum test method adopts the front transmission type as shown in Figure 7, the light source is selected from a bromine tungsten lamp, and the incident light passes through the polarization controller 31 to form an angle of θ=32° with the normal of the plane where the substrate 21 is located. The waveguide is coupled with the one-dimensional metal photonic crystal to irradiate light, and the photodetector 8 detects the extinction spectrum of the transmitted light passing through the blank sample solution, the one-dimensional metal photonic crystal, the waveguide layer and the substrate;

3)将含有配体(抗原)3的试料溶液(含有待测物质的缓冲溶液或溶剂)流经步骤2)获得的生物传感器的表面,配体(抗原)3与受体(抗体)4发生特异性识别反应,利用步骤2)的空白试料溶液清洗掉没有发生反应的抗原,最后将空白试料溶液与金属光子晶体23的表面接触;3) Flow the sample solution containing the ligand (antigen) 3 (buffer solution or solvent containing the substance to be tested) through the surface of the biosensor obtained in step 2), the ligand (antigen) 3 and the receptor (antibody) 4 When a specific recognition reaction occurs, use the blank sample solution in step 2) to wash away the unreacted antigens, and finally contact the blank sample solution with the surface of the metal photonic crystal 23;

4)溴钨灯光源发出的光经过偏振控制器31后,以与基底21所在平面的法线成θ=32°角度照射一维金属光子晶体,光检测器检测经过空白试料溶液、一维金属光子晶体、波导层和基底的反应后透射光的消光光谱;4) After the light emitted by the bromine tungsten lamp light source passes through the polarization controller 31, it irradiates the one-dimensional metal photonic crystal at an angle of θ=32° with the normal of the plane where the substrate 21 is located, and the photodetector detects the one-dimensional metal photonic crystal through the blank sample solution, one-dimensional Extinction spectrum of transmitted light after reaction of metal photonic crystal, waveguide layer and substrate;

5)步骤2)与步骤4)中消光光谱比较,获得如图11所示的反应前后波导模式与粒子等离子共振模式间耦合作用的微小变化,对消光光谱作二次消光光谱处理,获得如图12所示的信号,通过表征不同抗原浓度的光谱学变化规律,实现对抗原浓度的定量检测。5) Step 2) is compared with the extinction spectrum in step 4), and the slight change in the coupling effect between the waveguide mode and the particle plasmon resonance mode before and after the reaction is obtained as shown in Figure 11, and the extinction spectrum is processed twice to obtain the extinction spectrum as shown in Figure 11. The signal shown in 12 realizes the quantitative detection of the antigen concentration by characterizing the spectroscopic change rule of different antigen concentrations.

实施例2:Example 2:

本实施例为背面透射式二维波导耦合金属光子晶体生物传感器及器检测方法:This embodiment is a back transmission type two-dimensional waveguide coupling metal photonic crystal biosensor and its detection method:

本实施例中所使用的基底采用厚度D=1mm的玻璃,波导层采用ITO,厚度为d=200nm的玻璃片。The substrate used in this embodiment is glass with a thickness of D=1mm, and the waveguide layer is made of ITO glass sheet with a thickness of d=200nm.

本实施例采用干涉光刻结合溶液法的制备方法在玻璃基底的ITO波导层上制备两个方向周期均为Λ=350nm二维金光子晶体,获得波导耦合二维金光子晶体生物传感器。利用该传感器进行检测时,其检测方法如下:In this example, two-dimensional gold photonic crystals with Λ=350nm period in both directions were prepared on the ITO waveguide layer of the glass substrate by the preparation method of interference lithography combined with the solution method, and a waveguide-coupled two-dimensional gold photonic crystal biosensor was obtained. When using this sensor for detection, the detection method is as follows:

1)将对配体(抗原)3具有特异性识别功能的受体(抗体)4固定在二维波导耦合金属光子晶体生物传感器中金属光子晶体的表面,构成传感器的初始膜片,将空白试料溶液与金属光子晶体的表面接触;1) Immobilize the receptor (antibody) 4 that has a specific recognition function for the ligand (antigen) 3 on the surface of the metal photonic crystal in the two-dimensional waveguide-coupled metal photonic crystal biosensor to form the initial diaphragm of the sensor. The material solution is in contact with the surface of the metal photonic crystal;

2)光谱测试方式采用如图8所示的背面(基底面)透射式,光源选用溴钨灯,入射光经过偏振控制器后以与基底21所在平面的法线成θ=48°角向本实施例中的波导耦合二维金属光子晶体生物传感器的基底照射,光检测器检测经过基底、波导层、二维金属光子晶体和空白试料溶液的透射光的消光光谱;2) The spectrum test method adopts the back (substrate surface) transmission type as shown in Figure 8, the light source is a bromine tungsten lamp, and the incident light passes through the polarization controller at an angle of θ=48° to the normal of the plane where the substrate 21 is located. In the embodiment, the substrate of the waveguide-coupled two-dimensional metal photonic crystal biosensor is illuminated, and the photodetector detects the extinction spectrum of the transmitted light passing through the substrate, the waveguide layer, the two-dimensional metal photonic crystal and the blank sample solution;

3)将含有抗原的试料溶液流经步骤2)获得的生物传感器的表面,抗原与抗体发生特异性识别反应,利用步骤2)的空白试料溶液清洗掉没有发生反应的抗原,最后将空白试料溶液与金属光子晶体23的表面接触。3) Flow the antigen-containing sample solution over the surface of the biosensor obtained in step 2), and the antigen and the antibody have a specific recognition reaction, use the blank sample solution in step 2) to wash away the unreacted antigen, and finally the blank The sample solution is in contact with the surface of the metal photonic crystal 23 .

4)溴钨灯光源发出的光经过偏振控制器后,以与基底21所在平面的法线成θ=48°角度照射基底,光检测器检测入射光经过基底、波导层、二维金属光子晶体和空白试料溶液的透射光的消光光谱;4) After the light emitted by the bromine tungsten lamp light source passes through the polarization controller, it irradiates the substrate at an angle of θ=48° with the normal of the plane where the substrate 21 is located, and the photodetector detects that the incident light passes through the substrate, the waveguide layer, and the two-dimensional metal photonic crystal and the extinction spectrum of the transmitted light of the blank sample solution;

5)步骤2)与步骤4)中消光光谱比较,获得如图11所示的波导模式与粒子等离子共振模式间耦合作用的微小变化,对消光光谱作二次消光光谱处理,获得如图12所示的信号,通过表征不同抗原浓度的光谱学变化规律,实现对抗原浓度的定量检测。5) Step 2) is compared with the extinction spectrum in step 4), and the slight change in the coupling effect between the waveguide mode and the particle plasmon resonance mode as shown in Figure 11 is obtained, and the extinction spectrum is processed twice to obtain the extinction spectrum as shown in Figure 12 Quantitative detection of antigen concentration can be realized by characterizing the spectroscopic change rule of different antigen concentration.

实施例3:Example 3:

本实施例为正面反射式波导耦合一维金属光子晶体生物传感器及其检测方法:This embodiment is a front reflective waveguide coupling one-dimensional metal photonic crystal biosensor and its detection method:

本实施例中所使用的基底采用厚度D=1mm的玻璃,波导层采用ITO,厚度为d=210nm的玻璃片。The substrate used in this embodiment is glass with a thickness of D = 1 mm, and the waveguide layer is an ITO glass sheet with a thickness of d = 210 nm.

本实施例采用干涉光刻结合溶液法的制备方法在玻璃基底的ITO波导上制备周期为Λ=400nm一维金光子晶体,获得波导耦合一维金光子晶体生物传感器;In this embodiment, a one-dimensional gold photonic crystal with a period of Λ=400nm is prepared on an ITO waveguide of a glass substrate by a preparation method of interference lithography combined with a solution method, and a waveguide-coupled one-dimensional gold photonic crystal biosensor is obtained;

1)将对抗原具有特异性识别功能的抗体固定在波导耦合一维金属光子晶体生物传感器中金属光子晶体的表面,构成传感器的初始膜片,将空白试料溶液与金属光子晶体23的表面接触;1) Immobilize the antibody with specific recognition function on the antigen on the surface of the metal photonic crystal in the waveguide-coupled one-dimensional metal photonic crystal biosensor to form the initial diaphragm of the sensor, and contact the blank sample solution with the surface of the metal photonic crystal 23 ;

2)光谱测试方式采用如图9所示的正面反射式,光源选用溴钨灯,入射光经过偏振控制器后以与基底21所在平面的法线成θ=2°角向本实施例中的波导耦合一维金属光子晶体生物传感器的一维金属光子晶体面照射,照射光依次经过空白试料溶液、一维金属光子晶体、波导层后被基底21反射,光检测器8接收该反射光的消光光谱;2) The spectrum test method adopts the front reflection type as shown in Figure 9, and the light source is a bromine tungsten lamp. After the incident light passes through the polarization controller, it forms an angle of θ=2° with the normal of the plane where the substrate 21 is located. The one-dimensional metal photonic crystal surface of the waveguide-coupled one-dimensional metal photonic crystal biosensor is irradiated, and the irradiation light is reflected by the substrate 21 after sequentially passing through the blank sample solution, the one-dimensional metal photonic crystal, and the waveguide layer, and the photodetector 8 receives the reflected light. Extinction spectrum;

3)将含有抗原的试料溶液流经步骤2)获得的生物传感器的表面,抗原与抗体发生特异性识别反应,利用步骤2)的空白试料溶液清洗掉没有发生反应的抗原,最后将空白试料溶液与金属光子晶体23的表面接触。3) Flow the antigen-containing sample solution over the surface of the biosensor obtained in step 2), and the antigen and the antibody have a specific recognition reaction, use the blank sample solution in step 2) to wash away the unreacted antigen, and finally the blank The sample solution is in contact with the surface of the metal photonic crystal 23 .

4)溴钨灯光源发出的光经过偏振控制器后,以与基底21所在平面的法线成θ=2°角度照射一维金属光子晶体,光检测器检测经过空白试料溶液、一维金属光子晶体、波导层后,被基底反射的反应后的反射光的消光光谱;4) After the light emitted by the bromine tungsten lamp light source passes through the polarization controller, it irradiates the one-dimensional metal photonic crystal at an angle of θ=2° with the normal of the plane where the substrate 21 is located, and the photodetector detects the one-dimensional metal photonic crystal after passing through the blank sample solution and the one-dimensional metal photonic crystal. After the photonic crystal and the waveguide layer, the extinction spectrum of the reflected light after the reaction reflected by the substrate;

5)步骤2)与步骤4)中消光光谱比较,获得如图13所示的反应前后波导模式与粒子等离子共振模式间耦合作用的微小变化,对消光光谱作二次消光光谱处理,获得如图14所示的信号,通过表征不同抗原浓度的光谱学变化规律,实现对抗原浓度的定量检测。5) Step 2) is compared with the extinction spectrum in step 4), and the slight change in the coupling between the waveguide mode and the particle plasmon resonance mode before and after the reaction is obtained as shown in Figure 13, and the extinction spectrum is processed twice to obtain the extinction spectrum as shown in Figure 13. The signal shown in 14 realizes the quantitative detection of the antigen concentration by characterizing the spectroscopic change rule of different antigen concentrations.

实施例4:Example 4:

本实施例为背面反射式一维波导耦合金属光子晶体生物传感器及其检测方法:本实施例中的装置与实施例3相同,其检测方法与实施例3基本相同,不同之处仅在于:入射光经过偏振控制器后,入射到基底21上,检测器8检测的是入射光经基底、波导层、金属光子晶体后,由金属光子晶体反射光的消光光谱。This embodiment is a back reflective one-dimensional waveguide coupling metal photonic crystal biosensor and its detection method: the device in this embodiment is the same as that of Embodiment 3, and its detection method is basically the same as that of Embodiment 3, the only difference being: incident The light is incident on the substrate 21 after passing through the polarization controller, and the detector 8 detects the extinction spectrum of the light reflected by the metal photonic crystal after the incident light passes through the substrate, the waveguide layer and the metal photonic crystal.

本发明中的传感器也可以实现对物质浓度的检测,下面结合具体的检测方法进行说明:The sensor in the present invention can also realize the detection of the concentration of substances, which will be described below in conjunction with specific detection methods:

实施例5:Example 5:

本实施例为正面透射式二维波导耦合金属光子晶体生物传感器及器检测方法:This embodiment is a front transmission two-dimensional waveguide coupling metal photonic crystal biosensor and its detection method:

本实施例中所使用的基底采用厚度D=1mm的玻璃,波导层采用ITO,厚度为d=200nm的玻璃片。The substrate used in this embodiment is glass with a thickness of D=1mm, and the waveguide layer is made of ITO glass sheet with a thickness of d=200nm.

本实施例采用干涉光刻结合溶液法的制备方法在玻璃基底的ITO波导层上制备两个方向周期均为Λ=350nm二维金光子晶体,获得波导耦合二维金光子晶体生物传感器。使用本实施例中的装置对物质浓度的检测,其检测的步骤如下:In this example, two-dimensional gold photonic crystals with periods of Λ=350nm in both directions were prepared on the ITO waveguide layer of the glass substrate by the preparation method of interference lithography combined with the solution method, and a waveguide-coupled two-dimensional gold photonic crystal biosensor was obtained. Using the device in this embodiment to detect the substance concentration, the steps of its detection are as follows:

1)将空白试料(纯水)与二维金属光子晶体23的表面接触;1) contacting a blank sample (pure water) with the surface of the two-dimensional metal photonic crystal 23;

2)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成36°角照射金属光子晶体,光检测器8检测依次经过纯水、金属光子晶体23波导层22、和基底21的透射光的消光光谱;2) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the metal photonic crystal at an angle of 36° to the normal of the plane where the substrate 21 is located. The photodetector 8 detects that it passes through the pure water, the metal photonic crystal 23 waveguide layer 22, and the substrate in sequence. The extinction spectrum of the transmitted light of 21;

3)将含有蔗糖的试料溶液流(蔗糖的水溶液)经金属光子晶体23的表面,并与金属光子晶体23的表面接触;3) Flow the sample solution containing sucrose (aqueous solution of sucrose) through the surface of the metal photonic crystal 23, and contact with the surface of the metal photonic crystal 23;

4)光源7发出的光经过偏振控制器31后与基底21所在平面的法线成36°角照射金属光子晶体,光检测器8检测依次经过蔗糖溶液、金属光子晶体23、波导层22、和基底21的透射光的消光光谱;4) The light emitted by the light source 7 passes through the polarization controller 31 and irradiates the metal photonic crystal at an angle of 36° to the normal of the plane where the substrate 21 is located. The extinction spectrum of the transmitted light of the substrate 21;

5)将步骤2)与步骤4)中的消光光谱作二次消光光谱计算,获得如图14所示的因蔗糖浓度变化产生的信号,通过表征不同浓度蔗糖的光谱学变化规律,实现对蔗糖浓度的定量检测。5) Calculate the extinction spectrum in step 2) and step 4) as the second extinction spectrum, and obtain the signal generated by the change of sucrose concentration as shown in Figure 14, and realize the detection of sucrose by characterizing the spectral change law of different concentrations of sucrose. Quantitative detection of concentration.

实施例6:Embodiment 6:

本实施例为背面透射式一维波导耦合金属光子晶体生物传感器及其检测方法:本实施例中的装置与实施例5相同,其检测方法与实施例5基本相同,不同之处仅在于:入射光经过偏振控制器后,入射到基底21上,光检测器8检测的是入射光经基底、波导层、金属光子晶体后透射光的消光光谱。This embodiment is a backside transmission type one-dimensional waveguide coupling metal photonic crystal biosensor and its detection method: the device in this embodiment is the same as that of Embodiment 5, and its detection method is basically the same as that of Embodiment 5, the only difference being: incident The light is incident on the substrate 21 after passing through the polarization controller, and the light detector 8 detects the extinction spectrum of the transmitted light after the incident light passes through the substrate, the waveguide layer and the metal photonic crystal.

实施例7:Embodiment 7:

本实施例为正面反射式一维波导耦合金属光子晶体生物传感器及其检测方法:本实施例中的装置与实施例5相同,其检测方法与实施例5基本相同,不同之处仅在于:入射光经过偏振控制器后,入射到金属光子晶体23上,检测器8检测的是入射光经金属光子晶体、波导层、基底后,由基底21反射的反射光的消光光谱。This embodiment is a front reflective one-dimensional waveguide coupling metal photonic crystal biosensor and its detection method: the device in this embodiment is the same as that of Embodiment 5, and its detection method is basically the same as that of Embodiment 5, except that the incident After the light passes through the polarization controller, it is incident on the metal photonic crystal 23 . The detector 8 detects the extinction spectrum of the reflected light reflected by the substrate 21 after the incident light passes through the metal photonic crystal, waveguide layer and substrate.

实施例8:Embodiment 8:

本实施例为背面反射式一维波导耦合金属光子晶体生物传感器及其检测方法:本实施例中的装置与实施例5相同,其检测方法与实施例5基本相同,不同之处仅在于:入射光经过偏振控制器后,入射到基底21上,光检测器8检测的是入射光依次经过基底、波导层、金属光子晶体后,被金属光子晶体21反射的反射光的消光光谱。This embodiment is a back reflective one-dimensional waveguide coupling metal photonic crystal biosensor and its detection method: the device in this embodiment is the same as that of Embodiment 5, and its detection method is basically the same as that of Embodiment 5, the only difference being: incident The light is incident on the substrate 21 after passing through the polarization controller, and the light detector 8 detects the extinction spectrum of the reflected light reflected by the metal photonic crystal 21 after the incident light passes through the substrate, the waveguide layer, and the metal photonic crystal in sequence.

Claims (10)

1. Waveguide coupling metal photonic crystal biosensor is characterized in that: comprise substrate from top to bottom successively, cover suprabasil transparent ducting layer and cover metal photonic crystal on the ducting layer.
2. Waveguide coupling metal photonic crystal biosensor according to claim 1 is characterized in that: the thickness of described ducting layer is 60nm~300nm.
3. Waveguide coupling metal photonic crystal biosensor according to claim 1 is characterized in that: described metal photonic crystal is one-dimensional metal photon crystals or two-dimensional metallic photonic crystal.
4. according to claim 1 or the described Waveguide coupling metal photonic crystal biosensor of claim 3, it is characterized in that: the cycle of described one-dimensional metal photon crystals is 150nm~550nm; The cycle of described two-dimensional metallic photonic crystal both direction can be the same or different, and is 150nm~550nm.
5. the method for using the described Waveguide coupling metal photonic crystal biosensor of claim 1 to detect is characterized in that this method may further comprise the steps:
1) after fixing the acceptor that part is had the specific recognition function on the metal photonic crystal, blank sample solution is contacted with the surface of metal photonic crystal;
2) become 0~80 ° of angle to be radiated on the metal photonic crystal with the normal with plane, substrate place behind the light process Polarization Controller that light source sends, photodetector detects the extinction spectra through the transmitted light of blank sample solution, metal photonic crystal, ducting layer and substrate;
3) sample solution that will the contain part surface of metal photonic crystal of flowing through, part and acceptor generation specific reaction; After utilizing blank sample solution in the step 1) to wash the part that does not react, more blank sample solution is contacted with the surface of metal photonic crystal;
4) light that sends of light source through behind the Polarization Controller to become and step 2 with the normal on plane, substrate place) identical angular illumination metal photonic crystal, photodetector detects the extinction spectra through the transmitted light of blank sample solution, metal photonic crystal, ducting layer and substrate;
5) with step 2) do the calculating of secondary extinction spectrum with the extinction spectra in the step 4), by characterizing the spectroscopy Changing Pattern of different ligands concentration, realize detection by quantitative to part.
6. the method for using the described Waveguide coupling metal photonic crystal biosensor of claim 1 to detect is characterized in that this method may further comprise the steps:
1) after fixing the acceptor that part is had the specific recognition function on the metal photonic crystal, blank sample solution is contacted with the surface of metal photonic crystal;
2) become 0~80 ° of angle irradiation substrate with the normal on plane, substrate place behind the light process Polarization Controller that light source sends, photodetector detects the extinction spectra through the transmitted light of substrate, ducting layer, metal photonic crystal and blank sample solution;
3) sample solution that will the contain part surface of metal photonic crystal of flowing through, part and acceptor generation specific reaction, utilize the blank sample solution of step 1) to wash the part that does not react, at last blank sample solution is contacted with the surface of metal photonic crystal again;
4) become and step 2 with the normal on plane, substrate place behind the light process Polarization Controller that light source sends) identical angular illumination substrate, photodetector detects the extinction spectra through the reacted transmitted light of substrate, ducting layer, metal photonic crystal and blank sample solution;
5) with step 2) do the calculating of secondary extinction spectrum with the extinction spectra in the step 4), by characterizing the spectroscopy Changing Pattern of different ligands concentration, realize detection by quantitative to ligand concentration.
7. the method for using the described Waveguide coupling metal photonic crystal biosensor of claim 1 to detect is characterized in that this method may further comprise the steps:
1) after fixing the acceptor that part is had the specific recognition function on the metal photonic crystal, blank sample solution is contacted with the surface of metal photonic crystal;
2) become 0~80 ° of angle irradiation metal photonic crystal with the normal on plane, substrate place behind the light process Polarization Controller that light source sends, photodetector detects the catoptrical extinction spectra through being fired back by substrate behind blank sample solution, metal photonic crystal and the ducting layer successively;
3) sample solution that will the contain part surface of metal photonic crystal of flowing through, part and acceptor generation specific reaction, utilize the blank sample solution of step 1) to wash the part that does not react, at last blank sample solution is contacted with the surface of metal photonic crystal again;
4) light that sends of light source is through becoming and step 2 with the normal on plane, substrate place behind the Polarization Controller) identical angular illumination metal photonic crystal, the catoptrical extinction spectra through being reflected by substrate behind blank sample solution, metal photonic crystal and the ducting layer successively after the photodetector detection reaction;
5) with step 2) do the calculating of secondary extinction spectrum with the extinction spectra in the step 4), by characterizing the spectroscopy Changing Pattern of different ligands concentration, realize detection by quantitative to ligand concentration.
8. the method for using the described Waveguide coupling metal photonic crystal biosensor of claim 1 to detect is characterized in that this method may further comprise the steps:
1) after fixing the acceptor that part is had the specific recognition function on the metal photonic crystal, blank sample solution is contacted with the surface of metal photonic crystal;
2) become 0~80 ° of angle irradiation substrate with the normal on plane, substrate place behind the light process Polarization Controller that light source sends, photodetector detects the catoptrical extinction spectra through being reflected by metal photonic crystal behind substrate and the ducting layer successively;
3) sample solution that will the contain part surface of metal photonic crystal of flowing through, part and acceptor generation specific reaction, utilize the blank sample solution of step 1) to wash the part that does not react, at last blank sample solution is contacted with the surface of metal photonic crystal;
4) become and step 2 with the normal on plane, substrate place behind the light process Polarization Controller that light source sends) identical angular illumination substrate, after passing through substrate and ducting layer successively after the photodetector detection reaction, the catoptrical extinction spectra that is reflected by metal photonic crystal;
5) with step 2) do the calculating of secondary extinction spectrum with the extinction spectra in the step 4), by characterizing the spectroscopy Changing Pattern of different ligands concentration, realize detection by quantitative to ligand concentration.
9. the method for using the described Waveguide coupling metal photonic crystal biosensor of claim 1 to detect is characterized in that this method may further comprise the steps:
1) blank sample solution is contacted with the surface of metal photonic crystal;
2) become 0~80 ° of angle to shine metal photonic crystal with the normal on plane, substrate place behind the light process Polarization Controller that light source sends, photodetector detects the extinction spectra of the transmitted light that passes through blank sample solution, metal photonic crystal, ducting layer and substrate successively, perhaps shine metal photonic crystal, photodetector detects the extinction spectra of the transmitted light that passes through blank sample solution, metal photonic crystal, ducting layer and substrate successively;
3) sample solution that will contain certain material surface of metal photonic crystal of flowing through, and contact with the surface of metal photonic crystal;
4) become and step 2 with the normal on plane, substrate place behind the light process Polarization Controller that light source sends) identical angular illumination metal photonic crystal, photodetector detects the extinction spectra of the transmitted light that passes through sample solution, metal photonic crystal, ducting layer and substrate successively, perhaps shine substrate, photodetector detects the extinction spectra of the transmitted light that passes through substrate, ducting layer, metal photonic crystal and blank sample solution successively;
5) with step 2) do the calculating of secondary extinction spectrum with the extinction spectra in the step 4), by characterizing the spectroscopy Changing Pattern of this material variable concentrations, realize detection by quantitative to this material concentration.
10. the method for using the described Waveguide coupling metal photonic crystal biosensor of claim 1 to detect is characterized in that this method may further comprise the steps:
1) blank sample solution is contacted with the surface of metal photonic crystal;
2) become 0~80 ° of angle to shine metal photonic crystal with the normal on plane, substrate place behind the light process Polarization Controller that light source sends, photodetector detects through behind blank sample solution, metal photonic crystal and the ducting layer, the catoptrical extinction spectra that is reflected by substrate, perhaps shine substrate, after photodetector detects and to pass through substrate, ducting layer successively, the catoptrical extinction spectra that is reflected by metal photonic crystal;
3) sample solution that will contain certain material surface of metal photonic crystal of flowing through, and contact with the surface of metal photonic crystal;
4) become and step 2 with the normal on plane, substrate place behind the light process Polarization Controller that light source sends) identical angular illumination metal photonic crystal, photodetector detects through behind blank sample solution, metal photonic crystal and the ducting layer, the catoptrical extinction spectra that is reflected by substrate, perhaps shine substrate, after photodetector detects and to pass through substrate, ducting layer successively, the catoptrical extinction spectra that is reflected by metal photonic crystal;
5) with step 2) do the calculating of secondary extinction spectrum with the extinction spectra in the step 4), by characterizing the spectroscopy Changing Pattern of this material variable concentrations, realize detection by quantitative to this material concentration.
CN200910079243.8A 2009-03-06 2009-03-06 Waveguide coupling metal photonic crystal biosensor and detecting method thereof Expired - Fee Related CN101825629B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200910079243.8A CN101825629B (en) 2009-03-06 2009-03-06 Waveguide coupling metal photonic crystal biosensor and detecting method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200910079243.8A CN101825629B (en) 2009-03-06 2009-03-06 Waveguide coupling metal photonic crystal biosensor and detecting method thereof

Publications (2)

Publication Number Publication Date
CN101825629A true CN101825629A (en) 2010-09-08
CN101825629B CN101825629B (en) 2014-03-26

Family

ID=42689666

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200910079243.8A Expired - Fee Related CN101825629B (en) 2009-03-06 2009-03-06 Waveguide coupling metal photonic crystal biosensor and detecting method thereof

Country Status (1)

Country Link
CN (1) CN101825629B (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103454253A (en) * 2013-06-25 2013-12-18 复旦大学 Organic phosphorus detection method based on surface plasmon resonance
CN103969185A (en) * 2014-05-19 2014-08-06 上海理工大学 Method for improving test sensitivity of guided mode resonance biosensor
CN105277489A (en) * 2014-07-23 2016-01-27 英飞凌科技股份有限公司 Sensing systems and methods using a coupling structure
CN108508204A (en) * 2018-01-31 2018-09-07 财团法人交大思源基金会 Photonic crystal and magnetic bead combined fluorescence immunoassay device and method
CN108713144A (en) * 2016-02-09 2018-10-26 积水化学工业株式会社 Detection utensil, detection device and detection method
CN110488510A (en) * 2019-08-22 2019-11-22 中北大学 A kind of polarization regulation super structure surface optical device based on the nearly null effect of ITO dielectric constant
CN115201132A (en) * 2022-07-27 2022-10-18 东南大学 Evanescent wave nucleic acid concentration detection chip based on C-shaped waveguide

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103454253B (en) * 2013-06-25 2016-04-06 复旦大学 Based on the organic phosphorus detection method of surface plasma body resonant vibration
CN103454253A (en) * 2013-06-25 2013-12-18 复旦大学 Organic phosphorus detection method based on surface plasmon resonance
CN103969185A (en) * 2014-05-19 2014-08-06 上海理工大学 Method for improving test sensitivity of guided mode resonance biosensor
CN103969185B (en) * 2014-05-19 2016-09-14 上海理工大学 A kind of method improving guide mode resonance biosensor test sensitivity
US10345227B2 (en) 2014-07-23 2019-07-09 Infineon Technologies Ag Sensing systems and methods using a coupling structure
CN105277489A (en) * 2014-07-23 2016-01-27 英飞凌科技股份有限公司 Sensing systems and methods using a coupling structure
CN105277489B (en) * 2014-07-23 2019-11-05 英飞凌科技股份有限公司 Use the sensing system and method for coupled structure
CN108713144A (en) * 2016-02-09 2018-10-26 积水化学工业株式会社 Detection utensil, detection device and detection method
US11016087B2 (en) 2016-02-09 2021-05-25 Sekisui Chemical Co., Ltd. Implement for inspection, inspecting device and inspecting method
CN108508204A (en) * 2018-01-31 2018-09-07 财团法人交大思源基金会 Photonic crystal and magnetic bead combined fluorescence immunoassay device and method
CN110488510A (en) * 2019-08-22 2019-11-22 中北大学 A kind of polarization regulation super structure surface optical device based on the nearly null effect of ITO dielectric constant
CN115201132A (en) * 2022-07-27 2022-10-18 东南大学 Evanescent wave nucleic acid concentration detection chip based on C-shaped waveguide
CN115201132B (en) * 2022-07-27 2024-06-07 东南大学 An evanescent wave nucleic acid concentration detection chip based on C-shaped waveguide

Also Published As

Publication number Publication date
CN101825629B (en) 2014-03-26

Similar Documents

Publication Publication Date Title
TWI364533B (en) A method for improving surface plasmon resonance by using conducting metal oxide as adhesive layer
Homola et al. Surface plasmon resonance sensors
US9464985B2 (en) Plasmon resonance imaging apparatus having nano-lycurgus-cup arrays and methods of use
JP3816072B2 (en) Optical waveguide sensor and measuring device using the same
TWI384214B (en) Biological sensing device and its system
US20100178713A1 (en) Target substance-detecting element
JPWO2005078415A1 (en) Surface plasmon resonance sensor
US8330959B2 (en) Multi-channel surface plasmon resonance instrument
CN101825629A (en) Waveguide coupling metal photonic crystal biosensor and detecting method thereof
US9897542B2 (en) Infrared absorption spectroscopy
Chen et al. Near-infrared surface plasmon resonance sensor with a graphene-gold surface architecture for ultra-sensitive biodetection
Zhang et al. Smartphone surface plasmon resonance imaging for the simultaneous and sensitive detection of acute kidney injury biomarkers with noninvasive urinalysis
Chandra et al. Magnetoplasmons for ultrasensitive label-free biosensing
US8932880B2 (en) Method for the direct measure of molecular interactions by detection of light reflected from multilayered functionalized dielectrics
JP7177913B2 (en) High-sensitivity biosensor chip, measurement system, and measurement method using high-extinction-coefficient marker and dielectric substrate
CN201434868Y (en) Waveguide-Coupled Metal Photonic Crystal Biosensors
Du et al. A Au nanoparticle and polydopamine co-modified biosensor: A strategy for in situ and label-free surface plasmon resonance immunoassays
TW201305549A (en) Metal buffer layer assisted guided mode resonance biosensor
CN102243174A (en) Phase detection-based surface plasma resonance sensing device
Hageneder et al. Plasmonically amplified bioassay–Total internal reflection fluorescence vs. epifluorescence geometry
JP4921213B2 (en) Detection element, detection element device, and detection method
CN103398952B (en) Guide mode resonance filter plate optimization of reflectivity method during biology sensor detects
CN105044029B (en) Sensor and sensor test system based on guided wave resonance
US20190056389A1 (en) System and method for determining the presence or absence of adsorbed biomolecules or biomolecular structures on a surface
Danz et al. Biosensing platform combining label-free and labelled analysis using Bloch surface waves

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140326

CF01 Termination of patent right due to non-payment of annual fee