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CN101817541B - Method and device for separating magnesium chloride hexammoniate during silane production by the magnesium silicide method - Google Patents

Method and device for separating magnesium chloride hexammoniate during silane production by the magnesium silicide method Download PDF

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CN101817541B
CN101817541B CN2010101514983A CN201010151498A CN101817541B CN 101817541 B CN101817541 B CN 101817541B CN 2010101514983 A CN2010101514983 A CN 2010101514983A CN 201010151498 A CN201010151498 A CN 201010151498A CN 101817541 B CN101817541 B CN 101817541B
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liquid ammonia
salt mud
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CN101817541A (en
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李群
张晓薇
顾克军
祁宏祥
吴海浪
张晓谕
蒋智慧
殷恒志
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Jiangsu Ruixiang Chemical Co Ltd
Jiangsu Yangnong Chemical Group Co Ltd
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Abstract

本发明公开了一种硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收方法,其工艺步骤为:将硅化镁法生产硅烷过程中产生的六氨氯化镁液氨盐泥输入过滤器;从过滤器顶部出来的液氨输入液氨储槽循环使用;从过滤器下部出来的盐泥固体用盐泥加料器送入干燥机;从干燥机上部出来的氨气送入冷凝器,使氨气在温度低于-33.5℃的冷凝器中液化;将液氨输入液氨储槽循环使用。本发明还公开了实施该发明方法的装置。本发明装置和方法实现了大规模工业化生产,通过连续化的液固过滤器分离回收六氨氯化镁和液氨,分离的速度快,效率高,固体持液量少;过滤后的湿料六氨氯化镁进行连续高温烘干,烘干效率高,同时有效回收络合的氨。

Figure 201010151498

The invention discloses a method for separating and recovering hexaammoniated magnesium chloride and liquid ammonia in the process of producing silane by the magnesium silicide method. The process steps are as follows: input the hexaammoniated magnesium chloride liquid ammonia salt mud produced in the process of producing silane by the magnesium silicide method into a filter; The liquid ammonia from the top of the filter is input into the liquid ammonia storage tank for recycling; the salt mud solid from the lower part of the filter is sent to the dryer with a salt mud feeder; the ammonia gas from the upper part of the dryer is sent to the condenser to make ammonia The gas is liquefied in the condenser whose temperature is lower than -33.5°C; the liquid ammonia is input into the liquid ammonia storage tank for recycling. The invention also discloses a device for implementing the method of the invention. The device and method of the present invention have realized large-scale industrial production, and separated and recovered hexaammoniated magnesium chloride and liquid ammonia through a continuous liquid-solid filter, the separation speed is fast, the efficiency is high, and the solid liquid holding capacity is small; Magnesium chloride is continuously dried at high temperature, with high drying efficiency and effective recovery of complexed ammonia.

Figure 201010151498

Description

硅化镁法生产硅烷过程中六氨氯化镁的分离方法及装置Separation method and device of magnesium chloride hexaammoniate in the process of producing silane by magnesium silicide method

技术领域 technical field

本发明属于多晶硅技术领域,涉及一种硅烷生产副产物的回收,尤其涉及一种硅化镁法生产硅烷过程中产生的六氨氯化镁和液氨的分离回收方法及其装置。The invention belongs to the technical field of polysilicon, and relates to the recovery of by-products of silane production, in particular to a method and a device for separating and recovering magnesium chloride hexaammoniate and liquid ammonia produced in the process of producing silane by a magnesium silicide method.

背景技术 Background technique

硅烷广泛用于外延沉积单晶硅膜和生产多晶硅膜,制造非晶硅太阳能电池和复印机的光敏部件,以硅鼓代替传统的硒鼓,以及在玻璃工业中用于生产茶色玻璃。此外,硅烷和乙烯在激光激活下可生成碳化硅超细粉末,硅烷和氨在激光激活下可生成氮化硅超细粉末。随着光伏产业的迅猛发展,国内硅烷需求量急速增加。Silane is widely used in the epitaxial deposition of monocrystalline silicon films and the production of polycrystalline silicon films, the manufacture of amorphous silicon solar cells and photosensitive parts of copiers, the replacement of traditional toner cartridges with silicon drums, and the production of brown glass in the glass industry. In addition, silane and ethylene can produce silicon carbide ultrafine powder under laser activation, and silane and ammonia can produce silicon nitride ultrafine powder under laser activation. With the rapid development of the photovoltaic industry, the domestic demand for silane has increased rapidly.

随着硅烷制备工艺技术的不断成熟,产量不断增加,硅烷制备过程中液氨及副产物六氨氯化镁悬浮液的回收利用,逐渐为硅烷研究制备单位所重视。现有的硅化镁法硅烷制备技术中,液氨及六氨氯化镁悬浮液的回收利用报道较少。中国专利申请公开说明书CN101659414A(西安航天华威化工生物工程有限公司.硅甲烷低温生产及副产物综合回收工艺.公开日2010-03-03.)报道了连续化回收反应物料中液氨,同时对六氨氯化镁进行简单的烘干回收剩余的氨,使得液氨的回收利用实现了连续化并得到了回收利用,降低了液氨的消耗,减少了环境污染。但是该方法中液氨的回收存在以下不足:With the continuous maturity of silane preparation technology and continuous increase in output, the recycling of liquid ammonia and the by-product magnesium chloride hexaammoniate suspension in the silane preparation process has gradually attracted the attention of silane research and preparation units. In the existing silane preparation technology of magnesium silicide method, there are few reports on the recovery and utilization of liquid ammonia and magnesium chloride hexaammoniate suspension. Chinese Patent Application Publication CN101659414A (Xi'an Aerospace Huawei Chemical Bioengineering Co., Ltd. Low-temperature production of silane and comprehensive recovery process of by-products. Publication date 2010-03-03.) reports the continuous recovery of liquid ammonia in the reaction material, and at the same time six Magnesium ammonia chloride is simply dried to recover the remaining ammonia, which makes the recovery and utilization of liquid ammonia continuous and recyclable, reduces the consumption of liquid ammonia and reduces environmental pollution. But the recovery of liquefied ammonia in this method has the following deficiencies:

(1)液氨及六氨氯化镁悬浮液中液氨的回收是通过沉降的方法实现的,沉降时间长,生产规模受到限制;(1) the recovery of liquefied ammonia in liquid ammonia and magnesium chloride hexaammonia suspension is realized by the method for settling, and settling time is long, and production scale is limited;

(2)沉降后六氨氯化镁液氨浑浊液的固体含量低(不超过40%),在后续的烘干过程中需要汽化分离大量的液氨,能耗巨大;(2) The solid content of the hexaammoniated magnesium chloride liquid ammonia turbid liquid is low (no more than 40%) after settling, and a large amount of liquid ammonia needs to be vaporized and separated in the subsequent drying process, and the energy consumption is huge;

(3)沉降后的六氨氯化镁只进行了简单的烘干,六氨氯化镁中络合的氨未能进行有效的回收利用,氨消耗量大,且其中的氨会继续发挥,给周围环境和人体健康带来不利影响。(3) the magnesium chloride hexaammoniate after the sedimentation has only been simply dried, and the complexed ammonia in the magnesium chloride hexaammoniate has not been effectively recycled, and the ammonia consumption is large, and the ammonia therein will continue to play, causing damage to the surrounding environment and Adverse effects on human health.

(4)无法实现大规模工业化生产。(4) Large-scale industrialized production cannot be realized.

发明内容 Contents of the invention

本发明的目的在于,针对目前硅化镁法生产硅烷过程中产生的液氨及六氨氯化镁悬浮液的回收利用存在生产规模小、能耗大、氨回收不充分、污染环境的不足,提供一种硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收方法。The purpose of the present invention is to provide a method for the recovery and utilization of liquid ammonia and magnesium chloride hexaammoniated suspension produced in the process of producing silane by the current magnesium silicide method, which has the disadvantages of small production scale, large energy consumption, insufficient ammonia recovery, and environmental pollution. The invention discloses a method for separating and recovering magnesium chloride hexaammoniate and liquid ammonia in the process of producing silane by the magnesium silicide method.

本发明的又一目的在于,提供一种硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收装置,以满足本发明方法的工艺需要。Another object of the present invention is to provide a separation and recovery device for magnesium chloride hexaammoniate and liquid ammonia in the process of producing silane by the magnesium silicide method, so as to meet the technological requirements of the method of the present invention.

图1给出了本发明方法流程及装置示意框图。本发明方法的基本原理是:将六氨氯化镁液氨悬浮液(俗称盐泥)送入过滤器密闭过滤,清液回到反应系统循环套用。六氨氯化镁在滤芯表面沉积达到一定厚度后排尽过滤器中的液体浆料;在过滤器中通入气体对滤饼进行挤压进一步回收其中的液氨,降低滤饼的含湿量,气体可以是氮气、空气或氨气;再通入预热后的气体将滤饼中的液氨汽化回收,气体可以是氮气、空气或氨气;最后将滤饼卸除。Fig. 1 has provided the schematic block diagram of method flow and device of the present invention. The basic principle of the method of the present invention is: the hexaammoniated magnesium chloride liquid ammonia suspension (commonly known as salt mud) is sent to a filter for airtight filtration, and the clear liquid is returned to the reaction system for recycling. Hexaammoniated magnesium chloride is deposited on the surface of the filter element to a certain thickness, and the liquid slurry in the filter is exhausted; the filter cake is squeezed with gas through the filter to further recover the liquid ammonia in it, reducing the moisture content of the filter cake, and the gas It can be nitrogen, air or ammonia; then the preheated gas is fed to vaporize and recover the liquid ammonia in the filter cake, and the gas can be nitrogen, air or ammonia; finally, the filter cake is unloaded.

本发明的硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收方法,包括如下步骤:The separation and recovery method of magnesium chloride hexaammoniate and liquefied ammonia in the magnesium silicide method production silane process of the present invention comprises the following steps:

A、将硅化镁法生产硅烷过程中产生的六氨氯化镁液氨盐泥输入过滤器;A, the hexaammoniated magnesium chloride liquid ammonia salt mud input filter that produces in the process of producing silane by the magnesium silicide method;

B、从过滤器顶部出来的液氨输入液氨储槽循环使用;B. The liquid ammonia from the top of the filter is input into the liquid ammonia storage tank for recycling;

C、从过滤器下部出来的盐泥固体用盐泥加料器送入干燥机;C. The salt mud solid from the lower part of the filter is sent to the dryer with a salt mud feeder;

D、从干燥机上部出来的氨气送入冷凝器,使氨气在温度低于-33.5℃的冷凝器中液化;D. The ammonia gas from the upper part of the dryer is sent to the condenser, so that the ammonia gas is liquefied in the condenser at a temperature lower than -33.5°C;

E、将液化得到的液氨输入液氨储槽循环使用。E. The liquid ammonia obtained by liquefaction is input into the liquid ammonia storage tank for recycling.

所述步骤A中,可以用泵或者阀门控制六氨氯化镁液氨盐泥去过滤器的流量,优选采用泵。In the step A, a pump or a valve can be used to control the flow of the magnesium chloride hexaammoniated liquid ammonia salt mud to the filter, and a pump is preferably used.

作为一种优选的实施方案,所述步骤A中盐泥过滤器之前设置一盐泥中间槽,盐泥首先被送入所述中间槽中储存,再用泵送入盐泥过滤器。采用这种方法,可以更好地控制盐泥的流量,确保工业化实施过程中的稳定运行。As a preferred embodiment, in the step A, an intermediate tank for salt mud is set before the salt mud filter, and the salt mud is first sent into the middle tank for storage, and then pumped into the salt mud filter. With this method, the flow of salt mud can be better controlled to ensure stable operation during industrial implementation.

上述过滤过程中,当滤饼达到一定厚度后排尽过滤器中的液体浆料,向过滤器中通入氨气对滤饼进行挤压,进一步回收其中的液氨,降低滤饼的含湿量;然后再通入预热的氨气,将滤饼中的液氨汽化回收,滤饼中的持液量进一步下降。In the above filtration process, when the filter cake reaches a certain thickness, the liquid slurry in the filter is exhausted, and ammonia gas is passed into the filter to squeeze the filter cake, and the liquid ammonia in it is further recovered to reduce the moisture content of the filter cake. amount; and then feed the preheated ammonia gas to vaporize and recover the liquid ammonia in the filter cake, and the liquid holding capacity in the filter cake will further decrease.

所述步骤E中将液氨装入液氨储槽循环使用,可以用泵直接将液氨送入液氨储槽。In the step E, the liquid ammonia is put into the liquid ammonia storage tank for recycling, and the liquid ammonia can be directly sent into the liquid ammonia storage tank by a pump.

作为一种优选的实施方案,所述步骤E中冷凝器之后设置一液氨回收槽,液氨首先被送入所述回收槽中储存,再用泵送入液氨储罐。采用这种方法,可以使得工业化连续稳定运行的可靠性明显提高。As a preferred embodiment, a liquid ammonia recovery tank is set after the condenser in the step E, and the liquid ammonia is first sent into the recovery tank for storage, and then pumped into the liquid ammonia storage tank. By adopting this method, the reliability of industrialized continuous and stable operation can be significantly improved.

一种优选的硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收装置,该装置包括盐泥采出泵、盐泥中间槽、过滤器、盐泥加料器、干燥机、冷凝器、液氨储槽、液氨回收槽;其中,盐泥采出泵的出口与盐泥中间槽顶部入口连接,盐泥中间槽的下部出口与盐泥过滤泵相连,盐泥过滤泵的出口与过滤器相连,过滤器的顶部液氨出料管与液氨储槽相连,过滤器下部的盐泥固体出料口与盐泥加料器相连,盐泥加料器的出口与干燥机相连,干燥机的上部至少有一个氨气出气口与冷凝器相连,冷凝器与液氨回收槽相连,液氨回收槽经液氨回收泵与液氨储槽相连。A preferred separation and recovery device for magnesium chloride hexaammoniate and liquefied ammonia in the process of producing silane by the magnesium silicide method, the device includes a salt mud production pump, a salt mud intermediate tank, a filter, a salt mud feeder, a dryer, a condenser, Liquid ammonia storage tank and liquid ammonia recovery tank; among them, the outlet of the salt mud extraction pump is connected to the top inlet of the salt mud middle tank, the lower outlet of the salt mud middle tank is connected to the salt mud filter pump, and the outlet of the salt mud filter pump is connected to the filter pump. The liquid ammonia discharge pipe at the top of the filter is connected with the liquid ammonia storage tank, the salt mud solid outlet at the lower part of the filter is connected with the salt mud feeder, the outlet of the salt mud feeder is connected with the dryer, and the outlet of the dryer is At least one ammonia gas outlet in the upper part is connected to the condenser, the condenser is connected to the liquid ammonia recovery tank, and the liquid ammonia recovery tank is connected to the liquid ammonia storage tank through the liquid ammonia recovery pump.

过滤器是本发明装置的主体设备。The filter is the main equipment of the device of the present invention.

所述盐泥过滤器优选内置滤芯式密闭过滤器,确保过滤过程中氨气密闭在过滤系统内,不污染环境,保护工人的健康。The salt mud filter is preferably a hermetic filter with a built-in filter element to ensure that the ammonia gas is sealed in the filter system during the filtration process, so as not to pollute the environment and protect the health of workers.

所述过滤器可以采用常压、负压或正压操作;优选正压操作,以提高过滤速度降低固体含湿量,操作压力为0.2~2.0MPa,优选1.0MPa。The filter can be operated under normal pressure, negative pressure or positive pressure; positive pressure is preferred to increase the filtration rate and reduce the moisture content of solids. The operating pressure is 0.2-2.0 MPa, preferably 1.0 MPa.

所述过滤器滤芯可以是滤布、金属烧结管或陶瓷烧结管等;优选骨架支撑外覆盖滤布,选用滤布主要是工业化过程实施方便,同时成本明显低于金属烧结管或陶瓷烧结管。The filter element can be a filter cloth, a metal sintered tube or a ceramic sintered tube, etc.; it is preferable to cover the filter cloth with a skeleton support, and the filter cloth is selected mainly because the industrial process is convenient to implement, and at the same time, the cost is significantly lower than the metal sintered tube or ceramic sintered tube.

作为一种优选的方案,过滤器可以采用多级并联,以实现连续化操作,级数至少为2级,最好是3或4级。As a preferred solution, the filter can be connected in parallel in multiple stages to realize continuous operation, and the number of stages is at least 2, preferably 3 or 4.

本发明使用的干燥机可以是螺旋干燥机或气流干燥机等,优选螺旋干燥机,可以更彻底地烘干,因为螺旋干燥机能够提供稳定热源,干燥的温度选择400~600℃,优选450~550℃。The dryer used in the present invention can be a spiral dryer or an airflow dryer, etc., preferably a spiral dryer, which can be dried more thoroughly, because the spiral dryer can provide a stable heat source, and the drying temperature is selected from 400 to 600 ° C, preferably 450 to 600 ° C. 550°C.

所述螺旋干燥机为外置加热夹套或盘管,热源可以是蒸汽、导热油或电加热。内置螺旋可以实现固体物料的移动。The spiral dryer is an external heating jacket or coil, and the heat source can be steam, heat transfer oil or electric heating. The built-in screw can realize the movement of solid material.

所述的盐泥中间槽优选内部带搅拌装置和/或外部带循环装置,以防止盐泥中固体沉降,使盐泥中固体均匀分布,便于连续化操作。The middle tank for salt mud is preferably equipped with a stirring device inside and/or a circulation device outside to prevent the solids in the salt mud from settling, to make the solids in the salt mud evenly distributed, and to facilitate continuous operation.

所述盐泥加料器可以是螺旋加料器、旋转加料器或圆盘加料器等,优选螺旋加料器,因为六氨氯化镁含湿容易粘壁或堵塞,而螺旋加料器能够很好的解决粘壁或堵塞问题。The salt mud feeder can be a screw feeder, a rotary feeder or a disc feeder, etc., preferably a screw feeder, because the magnesium chloride hexammoniate is wet and easy to stick to the wall or block, and the screw feeder can well solve the sticky wall. or clogging problems.

所述冷凝器可以是列管式、片冷式、管壳式或翅片管式,结合实用性及冷凝要求优选列管式或片冷式,冷却温度为-33.5~60℃,优选-35~45℃。The condenser can be tube-and-tube, fin-cooled, shell-and-tube or fin-tube, and tube-and-tube or fin-cooled is preferred in combination with practicality and condensation requirements. The cooling temperature is -33.5 to 60°C, preferably -35°C. ~45°C.

作为一种优选的实施方案,干燥机的出口与氯化镁包装机相连,实现氯化镁的连续化包装。As a preferred embodiment, the outlet of the drier is connected with the magnesium chloride packaging machine to realize the continuous packaging of the magnesium chloride.

本发明通过连续化的液固过滤器分离回收六氨氯化镁液氨悬浮液中液氨和六氨氯化镁,分离的速度快,效率高,固体持液量少;过滤后的湿料六氨氯化镁进行了连续的高温烘干,烘干的效率高,同时对六氨氯化镁中络合的氨进行了有效的回收利用。The present invention separates and recovers the liquid ammonia and magnesium chloride hexaammoniate in the magnesium chloride hexaammoniate liquid ammonia suspension through a continuous liquid-solid filter, the separation speed is fast, the efficiency is high, and the liquid holding capacity of the solid is small; Continuous high-temperature drying is achieved, and the drying efficiency is high. At the same time, the complexed ammonia in magnesium chloride hexaammoniate is effectively recycled.

附图说明 Description of drawings

图1为本发明方法流程及装置示意框图;Fig. 1 is a schematic block diagram of the method flow process and device of the present invention;

图2为本发明方法优选的流程及装置示意图。Fig. 2 is a schematic diagram of a preferred process flow and device of the method of the present invention.

图2中:1-液氨储槽;2-硅烷发生器;3-盐泥采出泵;4-盐泥中间槽;5-盐泥过滤泵;6-盐泥过滤器;7-盐泥加料器;8-螺旋干燥机;9-氯化镁包装机;10-液氨冷凝器;11-液氨回收槽;12-液氨回收泵。In Figure 2: 1-liquid ammonia storage tank; 2-silane generator; 3-salt mud extraction pump; 4-salt mud middle tank; 5-salt mud filter pump; 6-salt mud filter; 7-salt mud Feeder; 8-screw dryer; 9-magnesium chloride packaging machine; 10-liquid ammonia condenser; 11-liquid ammonia recovery tank; 12-liquid ammonia recovery pump.

具体实施方式 Detailed ways

下面结合附图和具体实施方式对本发明进行详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

本发明的硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收装置,包括盐泥采出泵3、盐泥中间槽4、盐泥过滤泵5、过滤器6、盐泥加料器7、螺旋干燥机8、冷凝器10、液氨储槽1、液氨回收槽11、液氨回收泵12和氯化镁包装机9,盐泥采出泵3的出口与盐泥中间槽4顶部连接,盐泥中间槽4附带搅拌装置,盐泥中间槽4的下部出口与盐泥过滤泵5相连,盐泥过滤泵5的出口与盐泥过滤器6相连,过滤器6为内置滤芯式密闭过滤器,过滤滤芯为骨架支撑外覆盖滤布,过滤器6的顶部液氨出料管与立式液氨储槽1相连,过滤器6下部的盐泥固体出料口与螺旋加料器7相连,盐泥加料器7的出口与螺旋干燥机8相连,干燥机8的上部至少有一个氨气出气口与冷凝器10相连,干燥机8为外置夹套导热油加热,干燥机8的出口与氯化镁包装机9相连,冷凝器10与液氨回收槽11相连,冷凝器10采用低于-40℃的乙醇夹套降温,液氨回收槽11经液氨回收泵12与液氨储槽1相连。The separation and recovery device of hexaammoniated magnesium chloride and liquid ammonia in the process of producing silane by the magnesium silicide method of the present invention comprises a salt mud extraction pump 3, a salt mud middle tank 4, a salt mud filtration pump 5, a filter 6, and a salt mud feeder 7 , screw dryer 8, condenser 10, liquid ammonia storage tank 1, liquid ammonia recovery tank 11, liquid ammonia recovery pump 12 and magnesium chloride packaging machine 9, the outlet of salt mud extraction pump 3 is connected with the top of salt mud middle tank 4, The salt mud middle tank 4 is equipped with a stirring device, the lower outlet of the salt mud middle tank 4 is connected with the salt mud filter pump 5, and the outlet of the salt mud filter pump 5 is connected with the salt mud filter 6, and the filter 6 is a closed filter with a built-in filter element , the filter element is supported by a skeleton and covered with filter cloth, the liquid ammonia discharge pipe at the top of the filter 6 is connected with the vertical liquid ammonia storage tank 1, the salt mud solid discharge port at the bottom of the filter 6 is connected with the screw feeder 7, and the salt The outlet of the mud feeder 7 is connected to the screw dryer 8, and at least one ammonia gas outlet on the upper part of the dryer 8 is connected to the condenser 10. The packaging machine 9 is connected, the condenser 10 is connected with the liquid ammonia recovery tank 11, the condenser 10 adopts an ethanol jacket lower than -40°C for cooling, and the liquid ammonia recovery tank 11 is connected with the liquid ammonia storage tank 1 through the liquid ammonia recovery pump 12.

如附图2所示,本发明提供的硅化镁法工艺生产硅烷过程中六氨氯化镁分离方法,其包括如下步骤:As shown in accompanying drawing 2, the magnesium silicide process technology provided by the present invention produces the magnesium chloride hexaammoniated magnesium chloride separation method in the silane process, and it comprises the steps:

将连续化硅烷发生器2中的液氨及六氨氯化镁悬浮液经盐泥采出泵3输入盐泥中间槽4,盐泥含固量为20%;The liquid ammonia and hexammoniated magnesium chloride suspension in the continuous silane generator 2 are input into the middle tank 4 of the salt mud through the salt mud extraction pump 3, and the solid content of the salt mud is 20%;

盐泥中间槽4中的悬浮液搅拌均匀后经盐泥过滤泵5输入并联的3级盐泥过滤器6中进行过滤,过滤压力为1.0MPa,当滤饼厚度达到10cm后排尽过滤器中的液体浆料,向过滤器6中通入氨气对滤饼进行挤压,进一步回收其中的液氨,降低滤饼的含湿量,固体持液量为20%,再通入预热至20℃的氨气,将滤饼中的液氨汽化回收,滤饼中的持液量降为5%;After the suspension in the salt mud middle tank 4 is stirred evenly, it is input into the parallel 3-stage salt mud filter 6 through the salt mud filter pump 5 for filtration, and the filtration pressure is 1.0MPa. When the thickness of the filter cake reaches 10cm, it is drained into the filter The liquid slurry in the filter 6 is passed into ammonia gas to squeeze the filter cake, and the liquid ammonia therein is further recovered to reduce the moisture content of the filter cake. Ammonia gas at 20°C vaporizes and recovers the liquid ammonia in the filter cake, reducing the liquid holdup in the filter cake to 5%;

液氨及六氨氯化镁悬浮液经盐泥过滤器6过滤后,液氨回收至液氨储槽1,过滤后固体进入盐泥加料器7;After the liquid ammonia and hexammoniated magnesium chloride suspension are filtered through the salt mud filter 6, the liquid ammonia is recovered to the liquid ammonia storage tank 1, and the filtered solid enters the salt mud feeder 7;

过滤后固体由盐泥加料器7加入螺旋干燥机8中于500℃下连续进料烘干,停留时间为1h,氨气进入冷凝器10中经低于-40℃的乙醇夹套降温液化,烘干后的氯化镁进入氯化镁包装机9中冷却至20℃包装;After filtering, the solids are fed into the screw dryer 8 from the salt mud feeder 7 and dried continuously at 500°C with a residence time of 1 hour. The ammonia gas enters the condenser 10 and is cooled and liquefied by an ethanol jacket lower than -40°C. The dried magnesium chloride enters the magnesium chloride packaging machine 9 and is cooled to 20° C. for packaging;

冷凝器10中液化后的氨进入液氨回收槽11经液氨回收泵12输入液氨储槽1中待用。The ammonia liquefied in the condenser 10 enters the liquid ammonia recovery tank 11 and enters the liquid ammonia storage tank 1 through the liquid ammonia recovery pump 12 for use.

本发明方法中,经过滤和烘干两步操作氨的总回收率大于98%。In the method of the invention, the total recovery rate of ammonia after two steps of filtering and drying is greater than 98%.

Claims (9)

1.一种硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收方法,包括如下步骤:1. a method for separating and recovering magnesium chloride hexaammoniate and liquefied ammonia in the production of silane process by a magnesium silicide method, comprising the steps: A、将硅化镁法生产硅烷过程中产生的六氨氯化镁液氨盐泥输入过滤器;A, the hexaammoniated magnesium chloride liquid ammonia salt mud input filter that produces in the process of producing silane by the magnesium silicide method; B、从过滤器顶部出来的液氨输入液氨储槽循环使用;B. The liquid ammonia from the top of the filter is input into the liquid ammonia storage tank for recycling; C、从过滤器下部出来的盐泥固体用盐泥加料器送入干燥机;C. The salt mud solid from the lower part of the filter is sent to the dryer with a salt mud feeder; D、从干燥机上部出来的氨气送入冷凝器,使氨气在温度低于-33.5℃的冷凝器中液化;D. The ammonia gas from the upper part of the dryer is sent to the condenser, so that the ammonia gas is liquefied in the condenser at a temperature lower than -33.5°C; E、将液化得到的液氨输入液氨储槽循环使用;E, the liquid ammonia obtained by liquefaction is input into the liquid ammonia storage tank for recycling; 其中,所述步骤A中六氨氯化镁液氨盐泥先经盐泥中间槽再输入过滤器,盐泥中间槽中的悬浮液搅拌均匀后经盐泥过滤泵输入并联的3级盐泥过滤器中进行过滤,过滤压力为1.0MPa,当滤饼厚度达到10cm后排尽过滤器中的液体浆料,向过滤器中通入氨气对滤饼进行挤压,进一步回收其中的液氨,降低滤饼的含湿量,固体持液量为20%,再通入预热至20℃的氨气,将滤饼中的液氨汽化回收,滤饼中的持液量降为5%。Wherein, in the step A, the hexaammoniated magnesium chloride liquid ammonia salt mud is first passed through the middle tank of salt mud and then input into the filter, and the suspension in the middle tank of salt mud is stirred evenly and then input into the parallel 3-stage salt mud filter through the salt mud filter pump Filter in the filter, the filter pressure is 1.0MPa, when the filter cake thickness reaches 10cm, the liquid slurry in the filter is exhausted, and ammonia gas is passed into the filter to squeeze the filter cake, and the liquid ammonia in it is further recovered to reduce the The moisture content of the filter cake, the solid liquid hold-up is 20%, and the ammonia gas preheated to 20° C. is introduced to vaporize and recover the liquid ammonia in the filter cake, and the liquid hold-up in the filter cake is reduced to 5%. 2.根据权利要求1所述的分离回收方法,其特征在于,所述步骤E中液氨先装入液氨回收槽再送到液氨储槽循环使用。2. The separation and recovery method according to claim 1, characterized in that, in the step E, the liquid ammonia is first loaded into a liquid ammonia recovery tank and then sent to a liquid ammonia storage tank for recycling. 3.一种硅化镁法生产硅烷过程中六氨氯化镁和液氨的分离回收装置,其特征在于,该装置包括盐泥采出泵(3)、盐泥中间槽(4)、过滤器(6)、盐泥加料器(7)、干燥机(8)、冷凝器(10)、液氨储槽(1)、液氨回收槽(11);其中,盐泥采出泵(3)的出口与盐泥中间槽(4)顶部入口连接,盐泥中间槽(4)的下部出口与盐泥过滤泵(5)相连,盐泥过滤泵的出口与过滤器(6)相连,过滤器(6)的顶部液氨出料管与液氨储槽(1)相连,过滤器(6)下部的盐泥固体出料口与盐泥加料器(7)相连,盐泥加料器(7)的出口与干燥机(8)相连,干燥机(8)的上部至少有一个氨气出气口与冷凝器(10)相连,冷凝器(10)与液氨回收槽(11)相连,液氨回收槽(11)经液氨回收泵(12)与液氨储槽(1)相连。3. A separation and recovery device for magnesium chloride hexaammoniate and liquefied ammonia in the production of silane by the magnesium silicide method, is characterized in that the device comprises a salt mud extraction pump (3), a salt mud intermediate tank (4), a filter (6 ), salt mud feeder (7), dryer (8), condenser (10), liquid ammonia storage tank (1), liquid ammonia recovery tank (11); wherein, the outlet of salt mud production pump (3) It is connected with the top inlet of the salt mud middle tank (4), the lower outlet of the salt mud middle tank (4) is connected with the salt mud filter pump (5), the outlet of the salt mud filter pump is connected with the filter (6), and the filter (6 ) is connected to the liquid ammonia storage tank (1), the salt mud solid discharge port at the bottom of the filter (6) is connected to the salt mud feeder (7), and the outlet of the salt mud feeder (7) Link to each other with dryer (8), the top of dryer (8) has at least one ammonia gas outlet to link to each other with condenser (10), condenser (10) links to each other with liquid ammonia recovery tank (11), and liquid ammonia recovery tank ( 11) Connect to the liquid ammonia storage tank (1) through the liquid ammonia recovery pump (12). 4.根据权利要求3所述的分离回收装置,其特征在于,所述的过滤器(6)为2~4个过滤器并联配置。4. The separation and recovery device according to claim 3, characterized in that, the filter (6) is arranged in parallel with 2 to 4 filters. 5.根据权利要求3或4所述的分离回收装置,其特征在于,所述的过滤器(6)为内置滤芯式密闭过滤器,所述滤芯是骨架支撑外覆盖滤布、金属烧结管或陶瓷烧结管。5. The separation and recovery device according to claim 3 or 4, characterized in that, said filter (6) is a built-in filter core type airtight filter, and said filter core is a skeleton support outer cover filter cloth, metal sintered tube or Ceramic sintered tube. 6.根据权利要求5所述的分离回收装置,其特征在于,所述的干燥机(8)为螺旋干燥机。6. The separation and recovery device according to claim 5, characterized in that, the dryer (8) is a spiral dryer. 7.根据权利要求3所述的分离回收装置,其特征在于,所述的盐泥中间槽(4)内部带搅拌装置和/或外部带循环装置。7. The separation and recovery device according to claim 3, characterized in that, the middle tank for salt mud (4) has a stirring device inside and/or a circulation device outside. 8.根据权利要求3所述的分离回收装置,其特征在于,所述的盐泥加料器(7)为螺旋加料器。8. The separation and recovery device according to claim 3, characterized in that, the salt mud feeder (7) is a screw feeder. 9.根据权利要求3所述的分离回收装置,其特征在于,所述的冷凝器(10)为列管式或片冷式。9. The separation and recovery device according to claim 3, characterized in that, the condenser (10) is a tube-and-tube type or a sheet-cooled type.
CN2010101514983A 2010-04-21 2010-04-21 Method and device for separating magnesium chloride hexammoniate during silane production by the magnesium silicide method Expired - Fee Related CN101817541B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101249313A (en) * 2008-04-01 2008-08-27 南京特种气体厂有限公司 Recovery cyclic utilization method and apparatus for recovering discharged alkaline air in process of production of silicone hydride with magnesium silicide method
CN101659414A (en) * 2009-09-17 2010-03-03 西安航天华威化工生物工程有限公司 Silicomethane low-temperature production and byproduct comprehensive recycling process

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101249313A (en) * 2008-04-01 2008-08-27 南京特种气体厂有限公司 Recovery cyclic utilization method and apparatus for recovering discharged alkaline air in process of production of silicone hydride with magnesium silicide method
CN101659414A (en) * 2009-09-17 2010-03-03 西安航天华威化工生物工程有限公司 Silicomethane low-temperature production and byproduct comprehensive recycling process

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