CN101813499B - Method and device for calibrating three-dimensional micro tactile sensor - Google Patents

Abstract

The invention is a calibration method and device for a three-dimensional micro-tactile sensor, which is characterized in that: a three-dimensional micro-tactile sensor fixing device, a micro-displacement input device, a CCD camera and a laser interferometer are installed in a vibration isolation cavity; the three-dimensional micro-tactile sensor passes through different The clamping mechanism is placed on the rotating platform. The micro-displacement input device realizes the Z-axis coarse motion positioning of the three-dimensional micro-tactile sensor and the zero contact between the sensor and the piezoelectric ceramic through the control device. The piezoelectric ceramic outputs an amplitude signal to the three-dimensional micro-tactile sensor through the control system. The tactile sensor applies a displacement constraint signal, and then through the signal acquisition system and the computer software, an input-output relationship diagram is established, and the laser interferometer calibration system is used to track and measure the displacement constraint of the piezoelectric ceramic to realize the performance of the three-dimensional micro-tactile sensor Parameter testing and calibration. The invention solves the calibration work of multiple performances such as linearity, range, precision and the like of the three-dimensional micro-tactile sensor in various sensing modes.

Description

Calibration method and device for a three-dimensional micro-tactile sensor

technical field

The invention relates to a method for correcting an instrument, and in particular discloses a calibration method and device for a three-dimensional micro-tactile sensor for measuring microns and nanometers.

Background technique

In recent years, the integration with semiconductor technology has become an important driving force for the development of sensors. This integration makes the performance of sensors more powerful, while the volume is getting smaller and smaller, giving birth to miniature sensors. The emergence of miniature sensors enables the application of sensor devices in many fields where sensors cannot be used originally, thus providing conditions for the intelligence of system products. As a result, a large number of new micro-nano sensors have been spawned, which poses new challenges to the related detection technology of micron-nano size. Due to the singleness of the signal, low precision and limited ability to collect weak signals, conventional sensors can only calibrate the realization of conventional sensors for various calibration devices and methods. Due to the high sensitivity, high precision and weak signal collection required by the micro/nano-sized sensor for receiving signals, higher requirements are put forward for the signal processing capability of the calibration device. The three-dimensional micro-tactile sensor can realize the micron/nano-scale measurement of geometric quantities such as multi-dimensional size, position and shape features. It is of great significance to the micromachining precision and craft level. Therefore, it is of great significance to accurately and timely calibrate the designed three-dimensional micro-tactile sensor and understand the actual characteristics of the three-dimensional micro-tactile sensor for its own development and design. It will greatly promote the long-term development of the micro-nano industry. Designing a device and method for clamping and calibrating various three-dimensional micro-tactile sensors will effectively solve the comparison and detection of performance parameters of three-dimensional micro-tactile sensors.

Contents of the invention

The object of the present invention proposes a calibration method and device for a three-dimensional micro-tactile sensor, which can effectively solve the one-dimensional, two-dimensional, three-dimensional and array-type three-dimensional Calibration of the linearity, range, hysteresis, and accuracy of the micro-tactile sensor to evaluate whether its performance meets the design requirements.

The present invention is achieved in this way: a calibration method for a three-dimensional micro-tactile sensor, characterized in that: a three-dimensional micro-tactile sensor fixing device, a micro-displacement input device, a CCD camera and a laser interferometer are installed in a vibration isolation cavity; the three-dimensional micro-tactile sensor Placed on the rotating platform through different clamping mechanisms, the micro-displacement input device realizes the Z-axis coarse motion positioning of the three-dimensional micro-tactile sensor and the zero contact between the sensor and the piezoelectric ceramic through the control device, and the piezoelectric ceramic outputs the amplitude signal to the sensor through the control system. The three-dimensional micro-tactile sensor applies a displacement constraint signal, through the signal acquisition system of the three-dimensional micro-tactile sensor and the computer software, an input-output relationship diagram is established, and the displacement constraint amount of the piezoelectric ceramic is checked by the calibration system of the laser interferometer. Tracking measurement to realize the test and calibration of the performance parameters of the three-dimensional micro-tactile sensor.

The calibration device of the three-dimensional micro-tactile sensor is placed in the vibration isolation cavity. The vibration isolation cavity can effectively absorb external noise in a certain frequency range, which can realize noise isolation during the calibration process, provide a stable calibration environment, and achieve high-precision calibration. The vibration isolation chamber can be freely positioned through the automatic locking mechanism. After the three-dimensional micro-tactile sensor is fixed, the vibration isolation chamber is closed to complete the calibration work in the isolation environment.

During the working process of the calibration device of the three-dimensional micro-tactile sensor, the contact between the three-dimensional micro-tactile sensor and the piezoelectric ceramic is monitored in real time through a CCD monitor to prevent damage to the three-dimensional micro-tactile sensor and the micro-displacement device caused by excessive displacement; The overall calibration device is placed on the air-floating vibration-isolation platform to reduce the influence of surrounding noise on the measurement.

The device and method designed for the performance calibration of the three-dimensional micro-tactile sensor have the following characteristics:

(1) In order to eliminate the influence of the calibration process environment, the calibration process is completed in a sealed vibration isolation chamber with a built-in CCD camera. After the vibration isolation chamber is closed, real-time monitoring is carried out through CCD monitoring to observe the contact between the three-dimensional micro-tactile sensor and the micro-displacement platform situation, to prevent damage to the three-dimensional micro-tactile sensor and piezoelectric ceramics caused by excessive displacement of piezoelectric ceramics.

(2) In order to solve the lateral and axial fixation of the three-dimensional micro-tactile sensor components, it is fixed on the high-precision 360° rotating platform through the clamping mechanism, and the three-dimensional micro-tactile sensing is realized through the control device of the rotating platform (including manual and automatic rotation controllers) Transverse, axial and XOY arbitrary plane angle performance calibration of the sensor.

(3) In order to fix the different directions of the three-dimensional micro-tactile sensor and the rotating platform, the axial and lateral clamping mechanisms are designed to realize the effective clamping of the three-dimensional micro-tactile sensor components and ensure that the three-dimensional micro-tactile sensor components have enough margin to realize effective deflection. The clamping mechanism of the piezoelectric ceramic realizes the linkage between the piezoelectric ceramic and the transmission mechanism, and effectively realizes the clamping of the piezoelectric ceramic.

(4) The transmission mechanism and controller of the displacement input device realize the coarse motion positioning of the piezoelectric ceramic in the Z-axis direction and the zero contact between the three-dimensional micro-tactile sensor and the piezoelectric ceramic. After zero contact between the piezoelectric ceramic and the three-dimensional micro-tactile sensor, Then through the piezoelectric ceramic control system, a certain degree of displacement constraint signal is realized. The piezoelectric ceramic displacement constraint signal causes the output of the sensor to change, and the data is collected and displayed through the signal modulation and acquisition circuit, and the input-output relationship diagram is established.

(5) Track and measure the high-precision displacement constraint signal output by the piezoelectric ceramics through the laser interferometer, and effectively compare the displacement change measured by the laser interferometer with the input-output relationship diagram collected to realize High-precision calibration of the performance of 3D microtactile sensors.

The beneficial effects of the present invention are: realize calibration and parameter calibration of the actual performance of various three-dimensional micro-tactile sensors, solve the investigation of the actual performance of the three-dimensional micro-tactile sensor before installation, and realize the linearity, range and hysteresis of the three-dimensional micro-tactile sensor , The calibration of precision performance provides a basis for the improvement of micromachining technology. It solves the urgent need for performance calibration of geometric measurement devices in the fields of micromachining and microstructure testing, and the research results have important application prospects and practical value. It provides an effective basis for the development and improvement of new three-dimensional micro-tactile sensors, and also provides a good solution reference for the development of new micro/nano testing methods and measuring instruments, and is important for promoting the improvement of microstructure measuring instruments. significance. At the same time, it also has important scientific significance and academic value for the development of higher-precision measurement systems and the further development of micro-nano precision test and measurement technology.

The present invention will be further described below in conjunction with drawings and embodiments.

Description of drawings

Fig. 1 is a schematic diagram of a three-dimensional micro-tactile sensor calibration device of the present invention;

Fig. 2 is the assembly diagram of the fixing device of the three-dimensional micro-tactile sensor of the present invention;

3 is an assembly diagram of the micro-displacement input device of the present invention;

Fig. 4a is a schematic diagram of the horizontal clamping mechanism of the three-dimensional micro-tactile sensor of the present invention;

Fig. 4b is a schematic diagram of the axial clamping mechanism of the three-dimensional micro-tactile sensor of the present invention;

Fig. 4c is a schematic diagram of the piezoelectric ceramic clamping mechanism of the present invention;

Fig. 5a is a schematic diagram of the lateral performance calibration mode of the three-dimensional micro-tactile sensor of the present invention;

Fig. 5b is a schematic diagram of the axial performance calibration mode of the three-dimensional micro-tactile sensor of the present invention.

In the figure: 1. fixed bracket; 2. manual knob of rotating disk; 3. manual knob of transmission mechanism; 4. dial; 5. rotating platform; 6. sensor clamping mechanism; 7. three-dimensional micro-tactile sensor; 8. pressure Electric ceramics; 9. Piezoelectric ceramic clamping mechanism; 10. CCD camera system; 11. Laser interferometer; 12. Transmission mechanism guide rail; 13. Transmission mechanism loading platform; 14. Platform connecting plate; 15. Sensor clamping plate ; 16, platform connecting plate; 17, sensor clamping plate; 18, laser through hole; 19, platform connecting plate; 20, piezoelectric ceramic clamping plate.

Detailed ways

According to accompanying drawing 1, the three-dimensional micro-tactile sensor calibration device of the present invention comprises fixed bracket 1, rotating disc manual knob 2, transmission mechanism manual knob 3, dial plate 4, rotating platform 5, three-dimensional micro-tactile sensor clamping mechanism 6, three-dimensional micro-tactile sensor Sensor 7 , piezoelectric ceramic 8 , piezoelectric ceramic clamping mechanism 9 , CCD camera system 10 and laser interferometer 11 .

According to the accompanying drawing 2, the fixing device of the three-dimensional micro-tactile sensor includes: a fixed bracket 1, a rotating disk manual knob 2, a dial 4, a rotating platform 5, a sensor clamping mechanism 6 and a three-dimensional micro-tactile sensor 7. On the fixed support 1, a rotating platform 5 with 1" resolution is installed, and the three-dimensional micro-tactile sensor 7 is fixed at the same angle by the sensor clamping mechanism 6. The rotary controller realizes the high-precision angular positioning of the XOY plane. The calibration mode schematic diagrams of two kinds of three-dimensional micro-tactile sensors shown in accompanying drawings 5a and 5b: a. horizontal performance calibration mode b. axial performance calibration mode. Select by two orientations The clamping mechanism realizes horizontal and axial fixation, drives the three-dimensional micro-tactile sensor to achieve arbitrary angle positioning in the XOY plane through the rotating platform, and can realize multi-dimensional calibration of single probe sensor and effective calibration of arrayed three-dimensional micro-tactile sensor.

The input of the displacement constraint signal of the 3D micro-tactile sensor. The assembly diagram of the micro-displacement input device of the present invention shown in Figure 3 includes a fixed bracket 1, a transmission mechanism manual knob 3, a transmission mechanism guide rail 12, a transmission mechanism loading platform 13, a sensor clamping mechanism 6, and a piezoelectric ceramic 8. In order to adjust the coarse motion of the Z axis and input high-precision signals of the micro displacement of piezoelectric ceramics, the guide rail 12 of the transmission mechanism in the direction of the Z axis and the loading platform 13 of the transmission mechanism are installed on the fixed bracket 1, and the pressure is realized through the sensor clamping mechanism 6. The parallel movement and effective fixation of the electric ceramic 8 and the loading platform of the transmission mechanism, through the automatic transmission control device and the manual knob 3 of the transmission mechanism installed on the fixed bracket 1, the transmission mechanism drives the piezoelectric ceramic 8 to achieve different speeds, modes and precisions. Displacement output to realize the preliminary positioning of piezoelectric ceramics and three-dimensional micro-tactile sensor probe components. In order to effectively calibrate the displacement response performance of the three-dimensional micro-tactile sensor, through the high-resolution piezoelectric ceramic components, select the signal mode, speed, and prefabricated control of the displacement of the piezoelectric ceramic to achieve high precision and a certain vibration amplitude. Displacement constraints, to achieve high-precision signal input to the three-dimensional micro-tactile sensor.

Figure 4a is a schematic diagram of the lateral clamping mechanism of the three-dimensional micro-tactile sensor of the present invention. Accompanying drawing 4 b is a schematic diagram of the axial clamping mechanism of the three-dimensional micro-tactile sensor of the present invention. A square groove is opened in the center of the platform connecting plate 16 to realize the storage of the sensing circuit part of the three-dimensional micro-tactile sensor and the clamping of the three-dimensional micro-tactile sensor. A through hole is opened in the center to realize the penetration of the three-dimensional tactile sensor components and the effective clamping of the fixed part of the sensor. The platform connection plate 14 of the transverse clamping mechanism and the sensor clamping plate 15 have laser through holes 18 to realize the effective tracking measurement of the piezoelectric ceramic displacement restraint by the laser interferometer 11 . The threaded sleeves and bolts are processed by ultra-precision machining technology, and the three-dimensional micro-tactile sensor components are fixed on the center of the rotating platform through the sensor clamping plates 15 and 17, ensuring the verticality and positioning accuracy of the three-dimensional micro-tactile sensor.

Figure 4c is a clamping mechanism for piezoelectric ceramics of the present invention, through which the piezoelectric ceramics 8 can be effectively fixed through laterally embedded grooves and screw holes.

Example:

Calibration implementation for 3D micro-tactile sensors. The fixing and positioning of the three-dimensional micro-tactile sensor is realized by a rotating platform 5 with a resolution of 1 "and the clamping mechanism 6 of the three-dimensional micro-tactile sensor installed in different orientations, and the piezoelectric ceramic 8 is fixed close to it by the piezoelectric ceramic clamping mechanism 9. Directly below the three-dimensional micro-tactile sensor 7, then realize the zero contact between the piezoelectric ceramic parts and the three-dimensional micro-tactile sensor by manually/automatically controlling the transmission mechanism. The whole measurement and calibration process passes through the CCD camera system 10 installed in the vibration isolation cavity, controlled by the CCD The monitor monitors in real time, thereby clearly distinguishing the degree of contact between the three-dimensional micro-tactile sensor parts and the piezoelectric ceramic. After the three-dimensional micro-tactile sensor has zero contact, the piezoelectric ceramic 8 is used instead to provide 4 different driving voltages for the three-dimensional micro-tactile sensor 7, output The low-frequency displacement signals of different amplitudes are collected and displayed through the signal conditioning system and the acquisition circuit, and the input-output relationship diagram is established. The laser interferometer 11 is installed directly above the piezoelectric ceramics, and the reflector is placed on the piezoelectric ceramics , the laser interferometer is set to zero before the piezoelectric ceramic starts to move, and the constraint displacement input of the piezoelectric ceramic is tracked and measured through laser interference, and the measured value is compared with the collected input-output relationship diagram to evaluate the three-dimensional Practical performance of microtactile sensors.

In order to describe accurately and conveniently, the present invention is described in detail with a three-dimensional micro-tactile sensor, and the calibration of one-dimensional, two-dimensional, three-dimensional, and array multi-probe three-dimensional micro-tactile sensors in the present invention is within the scope of the invention. All devices, components and methods disclosed and disclosed in the present invention can be produced by referring to the disclosure herein. Although the devices, components and methods of the present invention have been described in detail, those skilled in the art can clearly understand the present invention without departing from the present invention. Splicing or modifying the methods and devices described in this application, or adding or subtracting certain components within the content, spirit and scope of the invention, more specifically, all similar replacements and modifications will be obvious to those skilled in the art, and they All are considered to be included in the spirit, scope and content of the present invention.

Claims (2)

1. the calibration steps of a three-dimensional micro tactile sensor is characterized in that: three-dimensional micro tactile sensor stationary installation, micrometric displacement input media, CCD camera and laser interferometer are installed in shock-isolation chamber; Stationary installation comprises: fixed support, rotating disc manual knob, index dial, 360 ° of rotation platforms, three-dimensional micro tactile sensor clamping device, and the micrometric displacement input media comprises: fixed support, gear train manual knob, gear train guide rail, gear train article carrying platform, piezoelectric ceramics clamping device; Three-dimensional micro tactile sensor is placed on the rotation platform by different clamping devices, the micrometric displacement input media realizes that by control device the Z axle coarse motion location of three-dimensional micro tactile sensor contacts with zero of piezoelectric ceramics with sensor, piezoelectric ceramics applies the displacement constraint signal for described three-dimensional micro tactile sensor by control system output amplitude signal, signal acquiring system and last machine software by three-dimensional micro tactile sensor, set up input---output relation figure, calibration system by laser interferometer is carried out tracking measurement to the input quantity of the displacement constraint signal of piezoelectric ceramics, realize the test and the calibration of three-dimensional micro tactile sensor performance parameter, the concrete operations step is as follows:

(1) calibration process is finished in the shock-isolation chamber of sealing, the in-built CCD camera head, after shock-isolation chamber is closed, supervision by the CCD camera is monitored in real time, observe the situation that contacts of three-dimensional micro tactile sensor and piezoelectric ceramics, prevent the damage of excessive three-dimensional micro tactile sensor that causes of piezoelectric ceramics displacement and piezoelectric ceramics;

(2) three-dimensional micro tactile sensor is fixed on 360 ° the rotation platform by the three-dimensional micro tactile sensor clamping device, laterally, axially reaches the calibration of XOY arbitrary plane angle performance by what the manual and automatic Rotation Controllers of 360 ° rotation platforms was realized three-dimensional micro tactile sensor;

(3) the three-dimensional micro tactile sensor clamping device comprise axially, horizontal clamping device, realize effective clamping of three-dimensional micro tactile sensor parts, and guarantee that the three-dimensional micro tactile sensor parts have enough surpluses and realize effective beat, the clamping device of piezoelectric ceramics is realized the interlock of piezoelectric ceramics and gear train, and effectively realizes the clamping of piezoelectric ceramics;

(4) the coarse motion location on the Z-direction of the gear train of micrometric displacement input media and control device realization piezoelectric ceramics contacts with zero of piezoelectric ceramics with three-dimensional micro tactile sensor, after piezoelectric ceramics contacts with three-dimensional micro tactile sensor is zero, realize that by the piezoelectric ceramics control system piezoelectric ceramics displacement constraint signal to a certain degree causes that sensor output changes again, carry out data acquisition and demonstration by signal modulation and Acquisition Circuit, set up input---output relation figure;

(5) by the tracking measurement of laser interferometer to the displacement constraint signal of piezoelectric ceramics output, the displacement variable that obtains by laser interferometer measurement with collect input---output relation figure effectively compares, realize the calibration of the performance of three-dimensional micro tactile sensor.

2. the calibrating installation of the three-dimensional micro tactile sensor made of the described method of claim 1, it is characterized in that: the three-dimensional micro tactile sensor calibrating installation comprises three-dimensional micro tactile sensor stationary installation, micrometric displacement input media, CCD camera and laser interferometer; Stationary installation comprises: fixed support, rotating disc manual knob, index dial, 360 ° of rotation platforms, three-dimensional micro tactile sensor clamping device and three-dimensional micro tactile sensors, and the micrometric displacement input media comprises: fixed support, gear train manual knob, gear train guide rail, gear train article carrying platform, piezoelectric ceramics clamping device and piezoelectric ceramics; Three-dimensional micro tactile sensor is installed on 360 ° of rotation platforms by the three-dimensional micro tactile sensor clamping device, 360 ° of rotation platforms are connected and are installed in the fixed support top of sensor fastening device with index dial, the rotating disc manual knob is at the support bracket fastened top of stationary installation; Piezoelectric ceramics is installed on the fixed support of micrometric displacement input media by the piezoelectric ceramics clamping device; The CCD camera has independently mounting bracket, and the CCD camera is installed in the top of support, and laser interferometer is suspended on the two support bracket fastened sky of sensor fastening device and micrometric displacement input media; Described three-dimensional micro tactile sensor clamping device is divided into transducer transversely clamping device and sensor axis to clamping device, the transducer transversely clamping device comprises platform web joint and sensor clamping plate, and sensor axis comprises platform web joint, sensor clamping plate and laser via to clamping device; Described piezoelectric ceramics clamping device comprises platform web joint and piezoelectric ceramics grip block.

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