CN101760737B - Method for preparing enhanced heat-transfer and scale prevention coating of micron/nanometer titanium dioxide on stainless steel substrate - Google Patents
Method for preparing enhanced heat-transfer and scale prevention coating of micron/nanometer titanium dioxide on stainless steel substrate Download PDFInfo
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Abstract
本发明公开了在不锈钢基底上制备微纳米二氧化钛强化传热和防垢涂层方法,它包括以下步骤:(a)对不锈钢基底进行预处理;(b)将氟钛酸铵、硼酸分别配制成均一的溶液,并将两种溶液混合均匀;(c)将制备的混合液放在水浴中控制其温度在20-80℃,混合液温度恒定以后,将不锈钢基底垂直悬挂于混合溶液中开始沉积制得涂覆有TiO2薄膜的基片;(d)沉积完毕后,将基片取出用蒸馏水冲洗表面;(e)将基片自然晾干,然后放入电阻炉中加热,得到微纳米TiO2表面涂层。采用本方法制得的涂层外观致密均匀,烧结后表面涂层的Ra值与抛光后的Ra值基本相同。涂层耐高温,与基底结合更牢固。
The invention discloses a method for preparing micronano titanium dioxide enhanced heat transfer and anti-scaling coating on a stainless steel substrate, which comprises the following steps: (a) pretreating the stainless steel substrate; (b) preparing ammonium fluorotitanate and boric acid respectively into Uniform solution, and mix the two solutions evenly; (c) put the prepared mixed solution in a water bath to control its temperature at 20-80 °C, after the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution to start deposition Prepare the substrate coated with TiO2 thin film; (d) after the deposition is completed, take out the substrate and rinse the surface with distilled water; 2 surface coating. The appearance of the coating prepared by the method is dense and uniform, and the Ra value of the surface coating after sintering is basically the same as that after polishing. The coating is resistant to high temperatures and is more firmly bonded to the substrate.
Description
技术领域 technical field
本发明涉及一种在不锈钢基底上用液相沉积法制备微纳米TiO2涂层的方法,尤其涉及一种在奥氏体300系列、马氏体400系列等不锈钢基底上微纳米级厚度TiO2强化传热和防垢表面的液相沉积制备方法。The invention relates to a method for preparing micro-nano TiO2 coatings on stainless steel substrates by liquid phase deposition, in particular to a method for preparing micro-nano TiO2 coatings on stainless steel substrates such as austenitic 300 series and martensitic 400 series. Liquid-phase deposition preparation method for enhanced heat transfer and antifouling surfaces.
背景技术 Background technique
目前,90%以上的换热设备在运行中普遍存在污垢问题。换热设备表面污垢的形成,不仅影响热能利用和生产正常安全运转,而且增加了生产成本。2007年的统计数据表明,发达国家的换热设备的污垢损失约占GNP的0.15-0.25%,而发展中国家则更高,达到0.3%。工业上污垢的预防和消除一般采用添加化学阻垢剂等化学方法及机械清洗、施加外场等物理方法,普遍存在着清洗成本高和二次污染等问题。At present, more than 90% of heat exchange equipment generally has fouling problems in operation. The formation of dirt on the surface of heat exchange equipment not only affects the utilization of heat energy and the normal and safe operation of production, but also increases production costs. Statistics in 2007 show that the fouling loss of heat exchange equipment in developed countries accounts for about 0.15-0.25% of GNP, while it is higher in developing countries, reaching 0.3%. The prevention and elimination of industrial dirt generally adopts chemical methods such as adding chemical antiscalants and physical methods such as mechanical cleaning and applying external fields. There are common problems such as high cleaning costs and secondary pollution.
污垢的沉积与污垢-传热表面间的附着力有关,而附着力的大小与传热表面的表面能密切相关,表面能越小,附着力就越小。因此可通过对换热表面进行处理,减少其表面能,从而减少污垢沉积。目前国内外已发展起来的一系列较为有效的防垢或强化池沸腾或流动沸腾传热的技术,主要包括:磁控溅射、离子注入、化学复合镀、热喷涂、化学气相沉积、溶胶-凝胶、分子自组装等。但这些制备方法普遍存在着制备费用昂贵、设备复杂、工业化困难或者涂层不均匀、热阻较大、与基底结合不牢等缺点。The deposition of dirt is related to the adhesion between the dirt and the heat transfer surface, and the size of the adhesion is closely related to the surface energy of the heat transfer surface. The smaller the surface energy, the smaller the adhesion. Therefore, the heat exchange surface can be treated to reduce its surface energy, thereby reducing fouling deposition. At present, a series of relatively effective anti-scaling or enhanced pool boiling or flow boiling heat transfer technologies have been developed at home and abroad, mainly including: magnetron sputtering, ion implantation, chemical composite plating, thermal spraying, chemical vapor deposition, sol- Gels, molecular self-assembly, etc. However, these preparation methods generally have disadvantages such as expensive preparation costs, complicated equipment, difficult industrialization, uneven coating, large thermal resistance, and weak bonding with the substrate.
液相沉积法是一种比较适合于大面积制备薄膜表面的方法。该法1988年首次报道。其成膜方法具有操作方便、设备简单、成膜条件较温和及可在形状复杂的基片上成膜等优点,现已广泛应用于功能薄膜的制备,尤其是微电子行业中超大规模集成电路、金属-氧化物半导体及液晶显示器件形成氧化物薄膜过程中得到了应用。The liquid phase deposition method is a relatively suitable method for preparing thin film surfaces in large areas. The law was first reported in 1988. The film-forming method has the advantages of convenient operation, simple equipment, mild film-forming conditions, and the ability to form films on complex-shaped substrates. It has been widely used in the preparation of functional thin films, especially in the microelectronics industry for VLSI, It has been applied in the process of forming oxide films in metal-oxide semiconductors and liquid crystal display devices.
液相沉积法相关的专利有:中国专利200710168732.1用液相沉积法制备二氧化钛涂层毛细管柱的方法,其特征是以氟钛酸铵为原料,通过液相沉积法在石英毛细管内壁沉积二氧化钛薄膜层,存在烧结温度较低,为300℃,对薄膜性质也无详细表征等。中国专利200710060653.9一种在紫铜表面制备纳米厚度的薄膜表面的方法,其特征是采用液相沉积方法在紫铜基底上制备纳米厚度TiO2等薄膜,并用于强化水池沸腾传热、防垢和防腐。该方法存在空气氛下烧结时基底易氧化,烧结温度较低,不耐高温、强度低等问题。The patents related to the liquid phase deposition method include: Chinese patent 200710168732.1 Method for preparing titanium dioxide coated capillary column by liquid phase deposition method, which is characterized by using ammonium fluorotitanate as raw material and depositing a titanium dioxide film layer on the inner wall of the quartz capillary by liquid phase deposition method , there is a low sintering temperature of 300 ° C, and there is no detailed characterization of the properties of the film. Chinese patent 200710060653.9 is a method for preparing a nanometer-thick film surface on the surface of copper, which is characterized in that a liquid-phase deposition method is used to prepare nanometer-thick TiO2 and other films on the copper substrate, and is used to enhance boiling heat transfer in pools, anti-scaling and anti-corrosion. This method has the problems of easy oxidation of the substrate during sintering in an air atmosphere, low sintering temperature, high temperature resistance, low strength and the like.
发明内容 Contents of the invention
本发明的目的在于克服现有技术的不足,提供一种在不锈钢基底上制备微纳米二氧化钛强化传热和防垢涂层方法,采用本方法制得的涂层致密均匀、表面能较低、耐高温并且强度高。The purpose of the present invention is to overcome the deficiencies of the prior art and provide a method for preparing micronano titanium dioxide enhanced heat transfer and antifouling coatings on stainless steel substrates. The coatings prepared by this method are dense and uniform, have low surface energy and are resistant High temperature and high strength.
在不锈钢基底上制备微纳米二氧化钛强化传热和防垢涂层方法,它包括以下步骤:The method for preparing micronano titanium dioxide enhanced heat transfer and antifouling coating on a stainless steel substrate comprises the following steps:
(a)对不锈钢基底进行预处理,使其表面的粗糙度Ra<50nm;(a) Pretreating the stainless steel substrate to make the surface roughness Ra<50nm;
(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,将两种溶液混合均匀,得到的混合液中氟钛酸铵和硼酸的浓度分别为0.05-0.5mol/L和0.07-0.6mol/L;(b) Chemically pure ammonium fluorotitanate and analytically pure boric acid are formulated into uniform solutions respectively, and impurities are filtered to obtain a clear solution, and the two solutions are mixed uniformly, and the obtained mixed solution contains ammonium fluorotitanate and boric acid Concentrations are 0.05-0.5mol/L and 0.07-0.6mol/L respectively;
(c)将制备的混合液放在水浴中控制其温度在20-80℃,混合液温度恒定以后,将不锈钢基底垂直悬挂于混合溶液中开始沉积2-50小时制得涂覆有TiO2薄膜的基片;(c) Put the prepared mixed solution in a water bath to control its temperature at 20-80°C. After the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution and start deposition for 2-50 hours to prepare a TiO2 film substrate;
(d)沉积完毕后,将涂覆有TiO2薄膜的基片取出,用蒸馏水冲洗表面以去除表面残留物;(d) After the deposition is complete, the substrate coated with the TiO2 film is taken out, and the surface is rinsed with distilled water to remove surface residues;
(e)将基片自然晾干,然后放入N2保护的电阻炉中加热,加热速率为2-8℃/min,当温度升高到450-800℃时,保持恒温30-150分钟,关闭电阻炉,自然冷却至室温得到微纳米TiO2表面涂层;所述的表面涂层厚度介于32.6-180.5nm之间,所述的表面涂层为锐钛矿型和金红石型晶型;(e) Dry the substrate naturally, then put it into an N2 - protected resistance furnace for heating, the heating rate is 2-8°C/min, when the temperature rises to 450-800°C, keep the constant temperature for 30-150 minutes, Close the resistance furnace, naturally cool to room temperature to obtain a micro-nano TiO2 surface coating; the thickness of the surface coating is between 32.6-180.5nm, and the surface coating is anatase and rutile crystal forms;
所述的步骤(a)中的预处理步骤依次包括打磨步骤和超声清洗步骤;其中经所述的打磨步骤打磨后的不锈钢基底的表面的粗糙度Ra<50nm,所述的超声清洗步骤包括:将金属样片首先在质量百分比为3-10%,温度为30-60℃的NaOH溶液中超声浸泡清洗5-10min,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为30-60℃的盐酸中超声浸泡清洗5-10min,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。The pretreatment step in the step (a) includes a grinding step and an ultrasonic cleaning step in turn; wherein the surface roughness Ra of the stainless steel substrate polished by the grinding step is less than 50nm, and the ultrasonic cleaning step includes: Soak and clean the metal sample in a NaOH solution with a mass percentage of 3-10% and a temperature of 30-60°C for 5-10 minutes to remove stubborn grease; Ultrasonic immersion cleaning in hydrochloric acid at ℃ for 5-10 minutes to remove the oxide layer on the surface of the sample; finally rinse with distilled water, air dry and store in an airtight container.
本发明的有益效果是:本发明的液相沉积制备方法在实际操作过程中可得到不同颜色涂层,每一个涂层外观致密均匀。经测量涂层厚度介于32.6-180.5nm,表面蒸馏水接触角介于81.6-94.4°,表面能较低,其数值介于29.8-47.5mJ/m2(标准液体选用水和二碘甲烷,下同),低于抛光不锈钢的表面能(88mJ/m2)。经X射线衍射仪(XRD)检测,涂层晶型可为非晶型、锐钛矿型和金红石型。经粗糙度仪测量和原子力显微镜(AFM)检测,烧结后表面涂层的Ra值与抛光后的Ra值基本相同。与200710060653.9专利相比,涂层厚度、接触角和表面能接近,但是,所用基底的市场价格较便宜,基底抛光后的粗糙度更小,涂层耐高温,与基底结合更牢固,最高800℃涂层仍不脱落,更有利于用于表面防垢。The beneficial effect of the present invention is that: the liquid phase deposition preparation method of the present invention can obtain coatings of different colors during actual operation, and each coating has a dense and uniform appearance. The measured coating thickness is between 32.6-180.5nm, the surface distilled water contact angle is between 81.6-94.4°, and the surface energy is low, with a value between 29.8-47.5mJ/m 2 (the standard liquid is water and diiodomethane, the following Same), lower than the surface energy of polished stainless steel (88mJ/m 2 ). Detected by X-ray diffractometer (XRD), the crystal forms of the coating can be amorphous, anatase and rutile. According to roughness meter measurement and atomic force microscope (AFM) detection, the Ra value of the surface coating after sintering is basically the same as that after polishing. Compared with the 200710060653.9 patent, the coating thickness, contact angle and surface energy are close, but the market price of the substrate used is cheaper, the roughness of the substrate after polishing is smaller, the coating is resistant to high temperature, and the bond with the substrate is stronger, up to 800 °C The coating still does not fall off, which is more conducive to anti-fouling on the surface.
附图说明 Description of drawings
图1为本发明的在不锈钢基底上制备微纳米二氧化钛强化传热和防垢涂层方法的流程示意图;Fig. 1 is the schematic flow sheet of preparing micronano titanium dioxide enhanced heat transfer and antifouling coating method on stainless steel substrate of the present invention;
图2a-图2b分别是采用本发明实施例1方法制得的微纳米二氧化钛涂层2000倍的电镜图及能谱图;Fig. 2a-Fig. 2b are respectively the electron micrograph and the energy spectrum diagram of 2000 times of the micronano titanium dioxide coating prepared by the method of
图3是采用本发明实施例1方法制得的微纳米二氧化钛涂层的X-射线衍射图;Fig. 3 is the X-ray diffraction figure of the micronano titanium dioxide coating that adopts the embodiment of the
图4a-图4b分别是采用本发明实施例2方法制得的微纳米二氧化钛涂层2000倍的电镜图及能谱图;Fig. 4a-Fig. 4b are respectively the electron micrograph and the energy spectrum diagram of 2000 times of micro-nano titanium dioxide coating prepared by the method of
图5是采用本发明实施例2方法制得的微纳米二氧化钛涂层的X-射线衍射图;Fig. 5 is the X-ray diffraction figure of the micronano titanium dioxide coating that adopts the method for
图6a-图6b分别是采用本发明实施例3方法制得的微纳米二氧化钛涂层2000倍的电镜图及能谱图;Fig. 6a-Fig. 6b are respectively the electron micrograph and the energy spectrum diagram of 2000 times of micro-nano titanium dioxide coating prepared by the method of
图7是采用本发明实施例3方法制得的微纳米二氧化钛涂层的X-射线衍射图;Fig. 7 is the X-ray diffraction diagram of the micronano titanium dioxide coating that adopts the method for
图8a-图8b分别是采用本发明实施例4方法制得的微纳米二氧化钛涂层2000倍的电镜图及能谱图;Fig. 8a-Fig. 8b are respectively the electron micrograph and the energy spectrum diagram of 2000 times of micro-nano titanium dioxide coating prepared by the method of
图9是采用本发明实施例4方法制得的微纳米二氧化钛涂层的X-射线衍射图;Fig. 9 is the X-ray diffraction diagram of the micronano titanium dioxide coating that adopts the method for
图10a-图10b是采用本发明实施例5方法制得的微纳米二氧化钛涂层2000倍的电镜图及能谱图;Fig. 10a-Fig. 10b are 2000-fold electron microscope images and energy spectrum images of the micronano titanium dioxide coating prepared by the method of Example 5 of the present invention;
图11是采用本发明实施例5方法制得的微纳米二氧化钛涂层的X-射线衍射图。Fig. 11 is an X-ray diffraction diagram of the micronano titanium dioxide coating prepared by the method of Example 5 of the present invention.
具体实施方式 Detailed ways
下面结合附图和具体实施例对本发明加以详细描述。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
本发明的操作装置包括:一套恒温水浴、沉积用挂具等。所需的试剂:涂层沉积所需化学纯的氟钛酸铵、分析纯的硼酸,基底清洗所需的无水乙醇和分析纯的丙酮等。The operating device of the present invention includes: a set of constant temperature water bath, a hanger for deposition and the like. Reagents required: chemically pure ammonium fluotitanate for coating deposition, analytically pure boric acid, absolute ethanol and analytically pure acetone for substrate cleaning, etc.
制备薄膜的化学原理:通过金属氟化物的离子在水中发生水解生成金属氢氧化物,并在溶液中加入氟离子消耗剂硼酸来维持反应。反应方程式为The chemical principle of preparing the film: the ions of the metal fluoride are hydrolyzed in water to form a metal hydroxide, and the fluoride ion consuming agent boric acid is added to the solution to maintain the reaction. The reaction equation is
再由[Ti6-n(OH)n]2-脱水反应,形成有序的金属-氧网状结构的二氧化钛涂层。Then [Ti 6-n (OH) n ] 2- dehydration reaction forms a titanium dioxide coating with an ordered metal-oxygen network structure.
本发明是在中国专利200710060653.9基础上的改进。The present invention is an improvement on the basis of Chinese patent 200710060653.9.
本发明方法包括以下步骤:(a)对不锈钢基底进行预处理,使其表面的粗糙度Ra<50nm;所述的不锈钢基底可以为奥氏体300系列、马氏体400系列等;(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,将两种溶液混合均匀,得到的混合液中氟钛酸铵和硼酸的浓度分别为0.05-0.5mol/L和0.07-0.6mol/L;低于该浓度区间不能沉积出涂层,高于该浓度区间,沉积液中因产生大量的白色颗粒而使溶液浑浊,消耗原料液。(c)将制备的混合液放在水浴中控制其温度在20-80℃,混合液温度恒定以后,将不锈钢基底垂直悬挂于混合溶液中开始沉积2-50小时制得涂覆有TiO2薄膜的基片;(d)沉积完毕后,将涂覆有TiO2薄膜的基片取出,用蒸馏水多次冲洗表面以去除表面残留物;(e)将基片自然晾干,然后放入N2保护的电阻炉中加热,加热速率为2-8℃/min,当温度升高到300-800℃时,保持恒温30-150分钟,关闭加热装置,自然冷却至室温得到微纳米TiO2表面涂层;在本步骤中采用N2保护的电阻炉可以防止基底氧化,本步骤中烧结温度为300-800℃,当温度低于300℃,则因为涂层与基底界面间原子热扩散作用小,涂层与基底结合不牢固,当烧结温度高于800℃,涂层烧结时易从基底上脱落。当步骤(e)中的温度升高到450-800℃可以获得锐钛矿型和金红石型晶型的涂层。The method of the present invention comprises the following steps: (a) pretreating the stainless steel substrate so that the surface roughness Ra<50nm; the stainless steel substrate can be austenite 300 series,
所述的步骤(a)中的预处理步骤依次包括打磨步骤和超声清洗步骤;其中经所述的打磨步骤打磨后的不锈钢基底的表面的粗糙度Ra<50nm,所述的超声清洗步骤包括:将金属样片首先在质量百分比为3-10%,温度为30-60℃的NaOH溶液中超声浸泡清洗5-10min,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为30-60℃的盐酸中超声浸泡清洗5-10min,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。The pretreatment step in the step (a) includes a grinding step and an ultrasonic cleaning step in turn; wherein the surface roughness Ra of the stainless steel substrate polished by the grinding step is less than 50nm, and the ultrasonic cleaning step includes: Soak and clean the metal sample in a NaOH solution with a mass percentage of 3-10% and a temperature of 30-60°C for 5-10 minutes to remove stubborn grease; Ultrasonic immersion cleaning in hydrochloric acid at ℃ for 5-10 minutes to remove the oxide layer on the surface of the sample; finally rinse with distilled water, air dry and store in an airtight container.
所述的打磨步骤可以依次包括粗磨、精磨、抛光和超声清洗步骤;其中,The grinding step may successively include rough grinding, fine grinding, polishing and ultrasonic cleaning steps; wherein,
粗磨步骤:首先用300#-400#砂纸沿同一方向打磨去除表面污物及基底初始沟槽,直至基底表面全部覆盖300#-400#砂纸纹理;用500#-900#砂纸沿与300#-400#砂纸纹理成90°角度方向打磨,直至基底表面覆盖500#-900#砂纸纹理;然后用1000#-1800#砂纸沿与500#-900#砂纸纹理成90°角度的方向打磨,直至基底表面覆盖1000#-1800#砂纸纹理;Coarse grinding steps: First, use 300#-400# sandpaper to grind along the same direction to remove surface dirt and the initial groove of the base until the base surface is completely covered with 300#-400# sandpaper texture; -400# sandpaper texture is polished at an angle of 90° until the substrate surface is covered with 500#-900# sandpaper texture; then use 1000#-1800# sandpaper to polish along the direction of 90° angle with the 500#-900# sandpaper texture until The base surface is covered with 1000#-1800# sandpaper texture;
精磨步骤:用2000#或3000#砂纸打磨去除条纹;Fine grinding step: use 2000# or 3000# sandpaper to remove the stripes;
抛光步骤:用金属抛光机的羊毛抛光轮涂覆市售绿色抛光皂,对不锈钢基底表面进行抛光,抛光后的表面粗糙度Ra<50nm;金属抛光机可以选用日本MINIMO公司生产的金属抛光机(型号为C121)。Polishing step: coat commercially available green polishing soap with a wool polishing wheel of a metal polishing machine, and polish the surface of the stainless steel base, and the surface roughness after polishing Ra<50nm; the metal polishing machine can be selected from the metal polishing machine ( model number C121).
采用本发明方法与对比方法(中国专利200710060653.9)的对比结果见下表:Adopt the comparison result of the inventive method and comparative method (Chinese patent 200710060653.9) to see the table below:
从上表可以看出:通过本发明方法制得的涂层晶型可为非晶型、锐钛矿型和金红石型。对比方法(200710060653.9)为非晶型,与非晶型相比,锐钛矿型和金红石型具有更高的热稳定性,而金红石型晶体网状结构更为紧密,并且由于烧结温度较高,涂层与基底间界面原子热扩散渗透程度更好,与基底结合强度更高。因而采用本发明方法制得的涂层更耐高温,强度更高。同时采用本方法制得的涂层表面粗糙度更小,涂层平整致密,外观颜色更丰富。It can be seen from the above table that the crystal forms of the coating prepared by the method of the present invention can be amorphous, anatase and rutile. The comparison method (200710060653.9) is amorphous. Compared with amorphous, anatase and rutile have higher thermal stability, while rutile crystal network structure is tighter, and due to higher sintering temperature, The thermal diffusion and penetration of atoms at the interface between the coating and the substrate is better, and the bonding strength with the substrate is higher. Therefore, the coating prepared by the method of the invention is more resistant to high temperature and has higher strength. At the same time, the surface roughness of the coating prepared by the method is smaller, the coating is smooth and dense, and the appearance color is richer.
实施例1Example 1
(a)粗磨:用300#砂纸打磨去除表面污物及基底初始沟槽,直至基底表面全部覆盖300#砂纸纹理;用500#砂纸打磨,直至基底表面覆盖500#砂纸纹理;然后用1000#砂纸打磨,直至基底表面覆盖1000#砂纸纹理。精磨:用2000#砂纸打磨去除条纹,此时基底纹理非常细密、光亮。抛光:用C121型金属抛光机的羊毛抛光轮涂覆市售绿色抛光皂,对不锈钢基片表面进行抛光5分钟,抛光后的表面粗糙度Ra=23.0nm;超声清洗步骤:将金属样片首先在质量百分比为3%,温度为40℃的NaOH溶液中超声浸泡清洗5分钟,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为30℃的盐酸中超声浸泡清洗10分钟,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,经混合制得的混合液中氟钛酸铵和硼酸的浓度分别为0.05mol/L和0.15mol/L;(c)将制备的混合液放在水浴中加热至55℃,混合液温度恒定以后,将不锈钢基片垂直悬挂于混合溶液中沉积33h;(d)沉积完毕后,将基片取出,用蒸馏水多次冲洗表面以去除表面残留物;(e)将基片自然晾干,然后放入加热装置中加热,设置加热速率为8℃/min,N2保护,当温度升高到300℃时,保持恒温120分钟,关闭加热装置,自然冷却后得到光亮淡蓝色微纳米TiO2表面涂层。涂层为非晶型,涂层厚度为103.2nm,涂层表面蒸馏水接触角为84.2°,表面能为35.9mJ/m2。(a) Coarse grinding: use 300# sandpaper to remove surface dirt and the initial groove of the base until the surface of the base is completely covered with 300# sandpaper texture; use 500# sandpaper to polish until the base surface is covered with 500# sandpaper texture; then use 1000# Sand paper until the substrate surface is covered with 1000# sandpaper texture. Fine Grinding: Grinding with 2000# sandpaper to remove streaks, the base texture is very fine and bright at this time. Polishing: Coat commercially available green polishing soap with the wool polishing wheel of C121 type metal polishing machine, polish the stainless steel substrate surface for 5 minutes, the surface roughness after polishing Ra=23.0nm; Ultrasonic immersion cleaning in NaOH solution with a mass percentage of 3% and a temperature of 40°C for 5 minutes to remove stubborn grease; then immerse the sample in hydrochloric acid with a mass percentage of 3% and a temperature of 30°C for 10 minutes to remove the sample Surface oxide layer; finally rinse with distilled water, air dry and store in an airtight container. (b) Chemically pure ammonium fluorotitanate and analytically pure boric acid are prepared into uniform solutions respectively, and impurities are filtered to obtain a clear solution. The concentrations of ammonium fluorotitanate and boric acid in the mixed solution obtained by mixing are respectively 0.05 mol/L and 0.15mol/L; (c) heat the prepared mixed solution in a water bath to 55°C, and after the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution for deposition for 33 hours; (d) the deposition is completed Finally, the substrate was taken out, and the surface was rinsed with distilled water several times to remove surface residues; (e) the substrate was dried naturally, and then heated in a heating device with a heating rate of 8°C/min, protected by N2 , When the temperature rises to 300°C, keep the constant temperature for 120 minutes, turn off the heating device, and obtain a bright light blue micro-nano TiO2 surface coating after natural cooling. The coating is amorphous, the thickness of the coating is 103.2nm, the contact angle of distilled water on the coating surface is 84.2°, and the surface energy is 35.9mJ/m 2 .
图2a中采用XL30ESEM电镜(二次电子高真空分辨率3.0nm,低真空分辨率3.5nm,加速电压0.2-30kV,低真空度20torr)得到的SEM图。由SEM图看出,涂层较平整致密,无裂纹且完全覆盖基底。图中的颜色较深区域为基底磨抛时留下的孔穴。由图2b能谱图表(其元素分析见下表)看出,涂层表面的钛元素含量为1.96%,可以得出基底表面由TiO2涂层覆盖。In Fig. 2a, the SEM image obtained by XL30ESEM electron microscope (secondary electron high vacuum resolution 3.0nm, low vacuum resolution 3.5nm, accelerating voltage 0.2-30kV, low vacuum degree 20torr). It can be seen from the SEM image that the coating is smooth and dense, without cracks and completely covers the substrate. The darker areas in the picture are the holes left by the substrate grinding and polishing. It can be seen from the energy spectrum chart in Fig. 2b (the elemental analysis is shown in the table below) that the content of titanium element on the surface of the coating is 1.96%, and it can be concluded that the surface of the substrate is covered by the TiO2 coating.
图3中采用日本理学RIGAKU D/MAX2500X射线衍射仪(Cukα1射线,18KW高功率转靶X射线发生器,最小步进0.0001°,定位速度1500°/min,扫描速度0001-100°/min,2θ测角范围-60-163°)得到的XRD图。由XRD图看出,所有衍射峰均为基底不锈钢的特征峰,无TiO2晶体的特征峰,可得出在此温度下烧结得到的涂层为非晶型。In Figure 3, the Japan Rigaku RIGAKU D/MAX2500 X-ray diffractometer (Cukα 1 ray, 18KW high-power rotating target X-ray generator, minimum step 0.0001°, positioning speed 1500°/min, scanning speed 0001-100°/min, 2θ angle measurement range -60-163°) obtained XRD pattern. It can be seen from the XRD pattern that all diffraction peaks are the characteristic peaks of the base stainless steel, and there are no characteristic peaks of TiO 2 crystals. It can be concluded that the coating obtained by sintering at this temperature is amorphous.
实施例2Example 2
(a)粗磨:用400#砂纸沿同一方向打磨去除表面污物及基底初始沟槽,直至基底表面全部覆盖400#砂纸纹理;用700#砂纸沿与400#砂纸纹理90°方向打磨,直至基底表面覆盖700#砂纸纹理;然后用1500#砂纸沿与700#砂纸纹理90°方向打磨,直至基底表面覆盖1500#砂纸纹理。精磨:用2500#砂纸打磨去除条纹,此时基底纹理非常细密、光亮。抛光:用C121型金属抛光机的羊毛抛光轮涂覆市售绿色抛光皂,对不锈钢基片表面进行抛光10分钟,抛光后的表面粗糙度Ra=36.2nm;超声清洗步骤:将金属样片首先在质量百分比为8%,温度为60℃的NaOH溶液中超声浸泡清洗10分钟,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为50℃的盐酸中超声浸泡清洗10分钟,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,经混合制得的混合液中氟钛酸铵和硼酸的浓度分别为0.1mol/L和0.6mol/L;(c)将制备的混合液放在水浴中20℃保温,混合液温度恒定以后,将不锈钢基片垂直悬挂于混合溶液中沉积22小时;(d)沉积完毕后,将基片取出,用蒸馏水多次冲洗表面以去除表面残留物;(e)将基片自然晾干,然后放入加热装置中加热,设置加热速率为6℃/min,N2保护,当温度升高到500℃时,保持恒温120分钟,关闭加热装置,自然冷却后得到光亮天蓝色微纳米TiO2表面涂层。涂层的晶型为锐钛矿型,涂层厚度为77.3nm。涂层表面蒸馏水接触角为88.7°,表面能为31.3mJ/m2。(a) Coarse grinding: use 400# sandpaper to grind along the same direction to remove surface dirt and the initial groove of the base until the base surface is completely covered with 400# sandpaper texture; use 700# sandpaper to grind along the 90° direction of the 400# sandpaper texture until The base surface is covered with 700# sandpaper texture; then use 1500# sandpaper to polish along the 90° direction of the 700# sandpaper texture until the base surface is covered with 1500# sandpaper texture. Fine Grinding: Grinding with 2500# sandpaper to remove streaks, the base texture is very fine and bright at this time. Polishing: Coat commercially available green polishing soap with the wool polishing wheel of C121 type metal polishing machine, polish the stainless steel substrate surface for 10 minutes, the surface roughness after polishing Ra=36.2nm; Ultrasonic immersion and cleaning in NaOH solution with a mass percentage of 8% and a temperature of 60°C for 10 minutes to remove stubborn grease; then immerse the sample in 3% by mass hydrochloric acid and a temperature of 50°C for 10 minutes to remove the sample Surface oxide layer; finally rinse with distilled water, air dry and store in an airtight container. (b) Chemically pure ammonium fluorotitanate and analytically pure boric acid are formulated into homogeneous solutions respectively, and impurities are filtered to obtain a clear solution. The concentrations of ammonium fluorotitanate and boric acid in the mixed solution obtained by mixing are respectively 0.1 mol/L and 0.6mol/L; (c) put the prepared mixed solution in a water bath at 20°C, and after the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution for deposition for 22 hours; (d) the deposition is completed Finally, the substrate was taken out, and the surface was rinsed with distilled water several times to remove surface residues; (e) the substrate was dried naturally, and then heated in a heating device with a heating rate of 6°C/min, protected by N2 , When the temperature rises to 500°C, keep the constant temperature for 120 minutes, turn off the heating device, and obtain a bright sky blue micro-nano TiO2 surface coating after natural cooling. The crystal form of the coating is anatase, and the coating thickness is 77.3nm. The contact angle of distilled water on the coating surface is 88.7°, and the surface energy is 31.3mJ/m 2 .
图4a为涂层的SEM照片。由SEM图看出,涂层较平整无裂纹,且完全覆盖基底。图中的颜色较深区域为基底磨抛时留下的孔穴。由图4b能谱图表(其元素分析见下表)看出,涂层表面的钛元素含量为1.11%,可以得出基底表面由TiO2涂层覆盖。Figure 4a is the SEM photo of the coating. It can be seen from the SEM image that the coating is relatively smooth without cracks and completely covers the substrate. The darker areas in the picture are the holes left by the substrate grinding and polishing. It can be seen from the energy spectrum chart in Fig. 4b (the elemental analysis is shown in the table below) that the content of titanium element on the surface of the coating is 1.11%, and it can be concluded that the surface of the substrate is covered by the TiO 2 coating.
图5为涂层的XRD图。分析XRD图并与标准PDF卡片对比发现,衍射角2θ=25.229°处存在锐钛矿的最强衍射特征峰(2θ=25.281°,晶格间距),可得出在此温度下烧结得到的涂层为锐钛矿型。Figure 5 is the XRD pattern of the coating. Analysis of the XRD pattern and comparison with the standard PDF card found that there is the strongest diffraction characteristic peak of anatase at the diffraction angle 2θ=25.229° (2θ=25.281°, lattice spacing ), it can be concluded that the coating obtained by sintering at this temperature is anatase.
实施例3Example 3
(a)粗磨:用300#砂纸沿同一方向打磨去除表面污物及基底初始沟槽,直至基底表面全部覆盖300#砂纸纹理;用900#砂纸沿与300#砂纸纹理90°方向打磨,直至基底表面覆盖900#砂纸纹理;然后用1800#砂纸沿与900#砂纸纹理90°方向打磨,直至基底表面覆盖1800#砂纸纹理。精磨:用2000#砂纸打磨去除条纹,此时基底纹理非常细密、光亮。抛光:用C121型金属抛光机的羊毛抛光轮涂覆市售绿色抛光皂,对不锈钢基片表面进行抛光5分钟,抛光后的表面粗糙度Ra=45.9nm;超声清洗步骤:将金属样片首先在质量百分比为3%,温度为40℃的NaOH溶液中超声浸泡清洗5分钟,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为50℃的盐酸中超声浸泡清洗10分钟,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,经混合制得的混合液中氟钛酸铵和硼酸的浓度分别为0.5mol/L和0.07mol/L;(c)将制备的混合液放在水浴中加热至30℃,混合液温度恒定以后,将不锈钢基片垂直悬挂于混合溶液中沉积11小时;(d)沉积完毕后,将基片取出,用蒸馏水多次冲洗表面以去除表面残留物;(e)将基片自然晾干,然后放入加热装置中加热,设置加热速率为2℃/min,N2保护,当温度升高到700℃时,保持恒温120分钟,关闭加热装置,自然冷却后得到光亮黄绿色微纳米TiO2表面涂层。涂层的晶型为金红石型,涂层厚度为130.3nm。涂层表面蒸馏水接触角为89.2°,表面能为30.5mJ/m2。(a) Coarse grinding: use 300# sandpaper to grind along the same direction to remove surface dirt and the initial groove of the base until the base surface is completely covered with 300# sandpaper texture; use 900# sandpaper to grind along the 90° direction of the 300# sandpaper texture until The base surface is covered with 900# sandpaper texture; then use 1800# sandpaper to polish along the 90° direction of the 900# sandpaper texture until the base surface is covered with 1800# sandpaper texture. Fine Grinding: Grinding with 2000# sandpaper to remove streaks, the base texture is very fine and bright at this time. Polishing: Coat commercially available green polishing soap with the wool polishing wheel of C121 type metal polishing machine, polish the stainless steel substrate surface for 5 minutes, the surface roughness after polishing Ra=45.9nm; Ultrasonic immersion cleaning in NaOH solution with a mass percentage of 3% and a temperature of 40°C for 5 minutes to remove stubborn grease; then immerse the sample in hydrochloric acid with a mass percentage of 3% and a temperature of 50°C for 10 minutes to remove the sample Surface oxide layer; finally rinse with distilled water, air dry and store in an airtight container. (b) Chemically pure ammonium fluorotitanate and analytically pure boric acid are prepared into uniform solutions respectively, and impurities are filtered to obtain a clear solution. The concentrations of ammonium fluorotitanate and boric acid in the mixed solution obtained by mixing are respectively 0.5 mol/L and 0.07mol/L; (c) heat the prepared mixed solution in a water bath to 30°C, and after the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution for deposition for 11 hours; (d) deposit After the completion, the substrate was taken out, and the surface was rinsed with distilled water several times to remove surface residues; (e) the substrate was dried naturally, and then heated in a heating device with a heating rate of 2°C/min, protected by N2 , when the temperature rises to 700°C, keep the constant temperature for 120 minutes, turn off the heating device, and obtain a bright yellow-green micro-nano TiO 2 surface coating after natural cooling. The crystal form of the coating is rutile, and the coating thickness is 130.3nm. The contact angle of distilled water on the coating surface is 89.2°, and the surface energy is 30.5mJ/m 2 .
图6a为涂层的SEM照片。由SEM图看出,涂层较平整无裂纹,且完全覆盖基底。图中的颜色较深区域为基底磨抛时留下的孔穴。由图6b能谱图表(其元素分析见下表)看出,涂层表面的钛元素含量为2.93%,可以得出基底表面由TiO2涂层覆盖。Figure 6a is the SEM photo of the coating. It can be seen from the SEM image that the coating is relatively smooth without cracks and completely covers the substrate. The darker areas in the picture are the holes left by the substrate grinding and polishing. It can be seen from the energy spectrum chart in Fig. 6b (the elemental analysis is shown in the table below) that the content of titanium element on the surface of the coating is 2.93%, and it can be concluded that the surface of the substrate is covered by the TiO 2 coating.
图7为涂层的XRD图。分析XRD图并与标准PDF卡片对比发现,衍射角2θ=27.318°处存在锐钛矿的最强衍射特征峰(2θ=27.446°,晶格间距),可得出在此温度下烧结得到的涂层为金红石型。Figure 7 is the XRD pattern of the coating. Analysis of the XRD pattern and comparison with the standard PDF card found that there is the strongest diffraction characteristic peak of anatase at the diffraction angle 2θ=27.318° (2θ=27.446°, lattice spacing ), it can be concluded that the coating obtained by sintering at this temperature is rutile.
实施例4Example 4
(a)粗磨:用300#砂纸沿同一方向打磨去除表面污物及基底初始沟槽,直至基底表面全部覆盖300#砂纸纹理;用500#砂纸沿与300#砂纸纹理90°方向打磨,直至基底表面覆盖500#砂纸纹理;然后用1000#砂纸沿与500#砂纸纹理90°方向打磨,直至基底表面覆盖1000#砂纸纹理。精磨:用3000#砂纸打磨去除条纹,此时基底纹理非常细密、光亮。抛光:用C121型金属抛光机的羊毛抛光轮涂覆市售绿色抛光皂,对不锈钢基片表面进行抛光10分钟,抛光后的表面粗糙度Ra=34.6nm;超声清洗步骤:将金属样片首先在质量百分比为5%,温度为60℃的NaOH溶液中超声浸泡清洗8分钟,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为50℃的盐酸中超声浸泡清洗5分钟,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,经混合制得的混合液中氟钛酸铵和硼酸的浓度分别为0.1mol/L和0.15mol/L;(c)将制备的混合液放在水浴中加热至80℃,混合液温度恒定以后,将不锈钢基片垂直悬挂于混合溶液中沉积2小时;(d)沉积完毕后,将基片取出,用蒸馏水多次冲洗表面以去除表面残留物;(e)将基片自然晾干,然后放入加热装置中加热,设置加热速率为3℃/min,N2保护,当温度升高到600℃时,保持恒温30分钟,关闭加热装置,自然冷却后得到光亮麦黄色微纳米TiO2表面涂层。涂层的晶型为锐钛矿型,涂层厚度为32.6nm。涂层表面蒸馏水接触角为81.6°,表面能为47.5mJ/m2。(a) Coarse grinding: use 300# sandpaper to grind along the same direction to remove surface dirt and the initial groove of the base until the surface of the base is completely covered with 300# sandpaper texture; use 500# sandpaper to grind along the 90° direction of the 300# sandpaper texture until The base surface is covered with 500# sandpaper texture; then use 1000# sandpaper to polish along the 90° direction of the 500# sandpaper texture until the base surface is covered with 1000# sandpaper texture. Fine Grinding: Grinding with 3000# sandpaper to remove streaks, the base texture is very fine and bright at this time. Polishing: Coating commercially available green polishing soap with the wool polishing wheel of C121 type metal polishing machine, polishing the surface of stainless steel substrate for 10 minutes, the surface roughness after polishing Ra=34.6nm; Ultrasonic immersion cleaning in NaOH solution with a mass percentage of 5% and a temperature of 60°C for 8 minutes to remove stubborn grease; then immerse the sample in hydrochloric acid with a mass percentage of 3% and a temperature of 50°C for 5 minutes to remove the sample Surface oxide layer; finally rinse with distilled water, air dry and store in an airtight container. (b) Chemically pure ammonium fluorotitanate and analytically pure boric acid are formulated into homogeneous solutions respectively, and impurities are filtered to obtain a clear solution. The concentrations of ammonium fluorotitanate and boric acid in the mixed solution obtained by mixing are respectively 0.1 mol/L and 0.15mol/L; (c) heat the prepared mixed solution in a water bath to 80°C, and after the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution for deposition for 2 hours; (d) deposit After the completion, take out the substrate, rinse the surface with distilled water several times to remove surface residues; (e) dry the substrate naturally, and then put it into a heating device to heat, set the heating rate to 3°C/min, N2 protection , when the temperature rises to 600°C, keep the constant temperature for 30 minutes, turn off the heating device, and get a bright wheat yellow micro-nano TiO 2 surface coating after natural cooling. The crystal form of the coating is anatase type, and the coating thickness is 32.6nm. The contact angle of distilled water on the coating surface is 81.6°, and the surface energy is 47.5mJ/m 2 .
图8a为涂层的SEM照片。由SEM图看出,涂层较平整无裂纹,且完全覆盖基底。图中的颜色较深区域为基底磨抛时留下的孔穴。由图8b能谱图表(其元素分析见下表)看出,涂层表面的钛元素含量为0.81%,可以得出基底表面由TiO2涂层覆盖。Figure 8a is the SEM photo of the coating. It can be seen from the SEM image that the coating is relatively smooth without cracks and completely covers the substrate. The darker areas in the picture are the holes left by the substrate grinding and polishing. It can be seen from the energy spectrum chart in Fig. 8b (see the table below for elemental analysis) that the content of titanium element on the surface of the coating is 0.81%, and it can be concluded that the surface of the substrate is covered by the TiO 2 coating.
图7为涂层的XRD图。分析XRD图并与标准PDF卡片对比发现,衍射角2θ=25.081°处存在微弱锐钛矿的最强衍射特征峰(2θ=25.281°,晶格间距),可得出在此温度下烧结得到的涂层为锐钛矿型,衍射峰较弱的原因是涂层沉积时间较短,厚度较薄,表面二氧化钛含量较低。Figure 7 is the XRD pattern of the coating. Analyzing the XRD pattern and comparing it with the standard PDF card, it is found that there is the strongest diffraction characteristic peak of weak anatase at the diffraction angle 2θ=25.081° (2θ=25.281°, lattice spacing ), it can be concluded that the coating obtained by sintering at this temperature is anatase type, and the reason for the weaker diffraction peak is that the deposition time of the coating is shorter, the thickness is thinner, and the content of titanium dioxide on the surface is lower.
实施例5Example 5
(a)粗磨:用300#砂纸沿同一方向打磨去除表面污物及基底初始沟槽,直至基底表面全部覆盖300#砂纸纹理;用500#砂纸沿与300#砂纸纹理90°方向打磨,直至基底表面覆盖500#砂纸纹理;然后用1000#砂纸沿与500#砂纸纹理90°方向打磨,直至基底表面覆盖1000#砂纸纹理。精磨:用2000#砂纸打磨去除条纹,此时基底纹理非常细密、光亮。抛光:用C121型金属抛光机的羊毛抛光轮涂覆市售绿色抛光皂,对不锈钢基片表面进行抛光5分钟,抛光后的表面粗糙度Ra=49.7nm;超声清洗步骤:将金属样片首先在质量百分比为10%,温度为30℃的NaOH溶液中超声浸泡清洗10分钟,除去顽固性油脂;再将样片浸入质量百分比为3%,温度为60℃的盐酸中超声浸泡清洗6分钟,去除样片表面氧化层;最后用蒸馏水冲洗干净,风干后置于密闭容器中保存。(b)将化学纯的氟钛酸铵、分析纯的硼酸分别配制成均一的溶液,并过滤杂质得到澄清的溶液,经混合制得的混合液中氟钛酸铵和硼酸的浓度分别为0.25mol/L和0.25mol/L;(c)将制备的混合液放在水浴中加热至60℃,混合液温度恒定以后,将不锈钢基片垂直悬挂于混合溶液中沉积50小时;(d)沉积完毕后,将基片取出,用蒸馏水多次冲洗表面以去除表面残留物;(e)将基片自然晾干,然后放入加热装置中加热,设置加热速率为2.5℃/min,N2保护,当温度升高到800℃时,保持恒温150分钟,关闭加热装置,自然冷却后得到光亮青色微纳米TiO2表面涂层。涂层的晶型为金红石型,涂层厚度为180.5nm。涂层表面蒸馏水接触角为94.4°,表面能为29.8mJ/m2。(a) Coarse grinding: use 300# sandpaper to grind along the same direction to remove surface dirt and the initial groove of the base until the surface of the base is completely covered with 300# sandpaper texture; use 500# sandpaper to grind along the 90° direction of the 300# sandpaper texture until The base surface is covered with 500# sandpaper texture; then use 1000# sandpaper to polish along the 90° direction of the 500# sandpaper texture until the base surface is covered with 1000# sandpaper texture. Fine Grinding: Grinding with 2000# sandpaper to remove streaks, the base texture is very fine and bright at this time. Polishing: Coating commercially available green polishing soap with the wool polishing wheel of C121 type metal polishing machine, polishing the surface of stainless steel substrate for 5 minutes, the surface roughness after polishing Ra=49.7nm; Ultrasonic immersion and cleaning in NaOH solution with a mass percentage of 10% and a temperature of 30°C for 10 minutes to remove stubborn grease; then immerse the sample in 3% by mass hydrochloric acid and a temperature of 60°C for 6 minutes to remove the sample Surface oxide layer; finally rinse with distilled water, air dry and store in an airtight container. (b) Chemically pure ammonium fluorotitanate and analytically pure boric acid are prepared into uniform solutions respectively, and impurities are filtered to obtain a clear solution. The concentrations of ammonium fluorotitanate and boric acid in the mixed solution obtained by mixing are respectively 0.25 mol/L and 0.25mol/L; (c) heat the prepared mixed solution in a water bath to 60°C, and after the temperature of the mixed solution is constant, hang the stainless steel substrate vertically in the mixed solution for deposition for 50 hours; (d) deposit After completion, the substrate was taken out, and the surface was rinsed with distilled water several times to remove surface residues; (e) the substrate was dried naturally, and then heated in a heating device with a heating rate of 2.5°C/min, protected by N2 , when the temperature rises to 800°C, keep the constant temperature for 150 minutes, turn off the heating device, and obtain a bright cyan micro-nano TiO 2 surface coating after natural cooling. The crystal form of the coating is rutile, and the coating thickness is 180.5nm. The contact angle of distilled water on the coating surface is 94.4°, and the surface energy is 29.8mJ/m 2 .
图10a为涂层的SEM照片。由SEM图看出,涂层较平整无裂纹,且完全覆盖基底。图中的颜色较深区域为基底磨抛时留下的孔穴。由图10b能谱图表(其元素分析见下表)看出,涂层表面的钛元素含量为4.74%,可以得出基底表面由TiO2涂层覆盖。对比图2、图4、图6、图8和图10中涂层元素含量表知,随涂层厚度的增加,钛含量增大。Figure 10a is the SEM photograph of the coating. It can be seen from the SEM image that the coating is relatively smooth without cracks and completely covers the substrate. The darker areas in the picture are the holes left by the substrate grinding and polishing. It can be seen from the energy spectrum diagram in Figure 10b (see the table below for elemental analysis) that the content of titanium element on the surface of the coating is 4.74%, and it can be concluded that the surface of the substrate is covered by the TiO 2 coating. Comparing the content of coating elements in Figure 2, Figure 4, Figure 6, Figure 8 and Figure 10 shows that the titanium content increases with the increase of coating thickness.
图11为涂层的XRD图。分析XRD图并与标准PDF卡片对比发现,衍射角2θ=27.382°处存在锐钛矿的最强衍射特征峰(2θ=27.446°,晶格间距),可得出在此温度下烧结得到的涂层为金红石型。Figure 11 is the XRD pattern of the coating. Analysis of the XRD pattern and comparison with the standard PDF card found that there is the strongest diffraction characteristic peak of anatase at the diffraction angle 2θ=27.382° (2θ=27.446°, lattice spacing ), it can be concluded that the coating obtained by sintering at this temperature is rutile.
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