CN101730932B - Two-sided substrate lead connection for minimizing kerf width on a semiconductor substrate panel - Google Patents
Two-sided substrate lead connection for minimizing kerf width on a semiconductor substrate panel Download PDFInfo
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- CN101730932B CN101730932B CN2008800193505A CN200880019350A CN101730932B CN 101730932 B CN101730932 B CN 101730932B CN 2008800193505 A CN2008800193505 A CN 2008800193505A CN 200880019350 A CN200880019350 A CN 200880019350A CN 101730932 B CN101730932 B CN 101730932B
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Abstract
公开了一种半导体裸芯衬底面板,包括在面板上相邻半导体封装外廓之间的最小切口宽度,同时确保镀覆的电端子的电隔离。通过减少相邻封装外廓之间边界的宽度,对于半导体封装在衬底面板上获得了附加的空间。
A semiconductor die substrate panel is disclosed that includes a minimum kerf width between adjacent semiconductor package outlines on the panel while ensuring electrical isolation of plated electrical terminals. By reducing the width of the border between adjacent package outlines, additional space is obtained on the substrate panel for the semiconductor package.
Description
技术领域 technical field
本发明的实施例涉及半导体裸芯(die)衬底面板,其包括在面板上相邻半导体封装外廓之间的最小切口宽度,同时确保镀覆触点的电隔离。Embodiments of the present invention relate to semiconductor die substrate panels that include a minimum kerf width between adjacent semiconductor package outlines on the panel while ensuring electrical isolation of plated contacts.
背景技术 Background technique
对便携式消费电子产品的需求的强劲增长驱动了对高容量存储装置的需求。非易失性半导体存储器装置,如闪存存储卡,正越来越广泛地用于满足对数字信息存储和交换的日益增长的需求。它们的便携性、多功能性和稳定性设计,以及它们的高可靠性和大容量,已经使得这样的存储器装置能够理想地用于许多种类的电子装置,包括例如数码相机、数字音乐播放器、视频游戏控制台、PDA和蜂窝电话。The strong growth in demand for portable consumer electronics drives the demand for high-capacity storage devices. Non-volatile semiconductor memory devices, such as flash memory memory cards, are becoming more widely used to meet the growing demand for digital information storage and exchange. Their portability, versatility, and stable design, as well as their high reliability and large capacity, have made such memory devices ideal for use in many kinds of electronic devices, including, for example, digital cameras, digital music players, Video game consoles, PDAs and cellular phones.
尽管已知许多种类的封装配置,但闪存存储卡通常可制造为系统级封装(SiP)或多芯片模块(MCM),其中多个裸芯被安装在衬底上。衬底通常可包括刚性介电基底,具有在各个边上蚀刻的(通常是铜或铜合金的)导电图案。在裸芯和导电图案之间形成电连接,并且导电图案提供用于裸芯和外部电子系统之间的连接的电引脚(lead)结构。一旦形成裸芯和衬底之间的电连接,则典型地该组件包封在模塑中,以形成受保护的半导体封装。Although many kinds of packaging configurations are known, flash memory cards are typically manufactured as a system-in-package (SiP) or a multi-chip module (MCM), where multiple die are mounted on a substrate. The substrate may typically comprise a rigid dielectric base with a conductive pattern (often copper or copper alloy) etched on each side. An electrical connection is formed between the die and the conductive pattern, and the conductive pattern provides an electrical lead structure for connection between the die and an external electronic system. Once the electrical connections between the die and substrate are made, the assembly is typically encapsulated in a mold to form a protected semiconductor package.
虽然可以高精度地蚀刻铜导电图案,但铜较差的侵蚀性使得对于某些应用是不期望的。在存在潮湿、空气和氯的环境下,裸露的铜容易生锈,使得不能用于后续焊接和裸芯连接操作。类似地,某些封装,如焊盘格栅阵列(LGA)和球栅阵列(LGA)封装,包括接触插指(finger),接触插指在封装的较低表面上形成并且暴露在封装之外以在封装和外部电子装置之间建立电连接。如果接触插指由裸铜形成,则生锈和侵蚀会随着时间损坏插指。While copper conductive patterns can be etched with high precision, the poor aggressiveness of copper makes it undesirable for certain applications. In the presence of moisture, air, and chlorine, exposed copper is prone to rust, making it unusable for subsequent soldering and die attach operations. Similarly, certain packages, such as Land Grid Array (LGA) and Ball Grid Array (LGA) packages, include contact fingers formed on the lower surface of the package and exposed outside the package. To establish an electrical connection between the package and the external electronic device. If the contact fingers are formed of bare copper, rust and corrosion can damage the fingers over time.
因而,已知在铜引脚的焊点或通孔点、以及在接触插指对铜引脚进行镀覆。已知各种镀覆工艺,用于施加电阻材料(resistive material)的薄膜,如锡、锡铅、镍、金和镍金。在一个这样的工艺中,诸如金的抗蚀剂材料可以在电镀工艺中选择性地镀到导电图案上。参照现有技术图1,电镀工艺可在衬底22上产生多个镀金引线(tail)20。镀覆引线20可在提供用于外部电连接的焊垫24、通孔26和接触插指28处终止。图1中并未标记全部的镀覆引线20、焊垫24和插指28。图1中用虚线示出的镀覆引线20和焊垫24位于衬底22的下侧。衬底22还包括镀条(plating bar)30,用于在电镀工艺期间使得各个引线20、垫24、通孔26和插指28短接。Thus, it is known to plate copper pins at their solder or via points, as well as at contact fingers. Various plating processes are known for applying thin films of resistive materials such as tin, tin-lead, nickel, gold and nickel-gold. In one such process, a resist material such as gold may be selectively plated onto the conductive pattern in an electroplating process. Referring to prior art FIG. 1 , the electroplating process can produce a plurality of gold-plated tails 20 on a substrate 22 . The plated leads 20 may terminate at solder pads 24 , vias 26 and contact fingers 28 that provide for external electrical connections. Not all plated leads 20 , pads 24 and fingers 28 are labeled in FIG. 1 . On the underside of the substrate 22 are plated leads 20 and pads 24 shown in dashed lines in FIG. 1 . The substrate 22 also includes plating bars 30 for shorting the various leads 20 , pads 24 , vias 26 and fingers 28 during the electroplating process.
在进行电镀工艺时,衬底22被浸入包括水溶液中的金属离子的镀槽。向镀条30提供电流,该电流流过引线20、垫24、通孔26和插指28。当输送电流时,引线20、垫24、通孔26和插指28通电,并且在它们的表面上产生电荷。金属离子被吸引到通电并带电荷的金属区域。以此方式,可沉积出期望厚度的金或其他镀覆金属的层。In performing the electroplating process, the substrate 22 is dipped into a plating bath including metal ions in an aqueous solution. Plated bar 30 is supplied with current, which flows through lead 20 , pad 24 , via 26 and finger 28 . When current is delivered, leads 20, pads 24, vias 26 and fingers 28 are energized and a charge is generated on their surfaces. Metal ions are attracted to areas of the metal that are energized and charged. In this way, a layer of gold or other plated metal can be deposited to a desired thickness.
在电镀之后,移除镀条30。重要的是,移除整个镀条30。然而,由于工程公差,切割衬底并移除镀条的刀具、刳刨机或其他装置可能向上、下、左和/或右偏离期望的切割线。例如,50微米(μm)的工程公差是正常的。当移除镀条时,如果例如由于切割装置的偏移而残留一条或一部分镀条,如图2所示,则这可能导致某些引线被短接,例如引线20a、20b和20c,以及由此造成形成的集成电路的故障。After electroplating, the plated strip 30 is removed. Importantly, the entire strip 30 is removed. However, due to engineering tolerances, a knife, router, or other device that cuts the substrate and removes the plated bars may deviate up, down, left, and/or right from the desired cut line. For example, an engineering tolerance of 50 micrometers (μm) is normal. When removing the strip, if a strip or part of the strip remains, for example due to deflection of the cutting device, as shown in FIG. This causes failure of the formed integrated circuit.
为防止这一点,用于移除镀条的切割刀具、刳刨机或其他装置32配有大宽度w,如现有技术图3所示。理想地,移除装置32的宽度不会比镀条宽度更大,镀条宽度例如为大约3至5密耳(mil)。然而,工程公差要求将刀具造得更宽,以确保如果移除装置32在移除镀条时向上/下或左/右偏移,则仍然移除整个镀条。例如,如果移除装置(如图3中虚线所示)从期望移除路径改变了距离Δ,则移除装置仍必须具有足够大的宽度以完全移除镀条。To prevent this, a cutting knife, router or other device 32 for removing the plated strip is provided with a large width w, as shown in prior art FIG. 3 . Ideally, the width of the removal device 32 is no greater than the width of the plated bar, eg, about 3 to 5 mils. However, engineering tolerances require that the knife be made wider to ensure that if the removal device 32 drifts up/down or left/right while removing the strip, the entire strip is still removed. For example, if the removal device (shown in dashed lines in Figure 3) is changed by a distance Δ from the desired removal path, the removal device must still be of sufficient width to completely remove the plated strip.
作为移除工艺中工程公差所要求的移除装置的大宽度以及在镀条的任一侧上要求的空间的结果,必须在每个镀条周围提供相对大的切口宽度k(图1和图3)。传统的切口宽度可以是大约250μm或更大。这么大的切口宽度占据了衬底22上本来能够用于衬底电路部分的空间。As a result of the large width of the removal device required by engineering tolerances in the removal process and the space required on either side of the strip, a relatively large kerf width k must be provided around each strip (Fig. 1 and Fig. 3). Conventional kerf widths may be about 250 μm or greater. Such a large kerf width takes up space on the substrate 22 that could otherwise be used for circuit portions of the substrate.
已知还在不采用镀条的非电镀工艺中镀覆衬底。在非电镀时,通过溶液中的化学还原剂而非电荷,将水溶液中的金属离子沉积到导电图案上。然而,这样的非电镀工艺有缺点,包括高费用和不能实现衬底上精确的构图。It is also known to plate substrates in electroless plating processes that do not employ plating bars. In electroless plating, metal ions in an aqueous solution are deposited onto a conductive pattern by a chemical reducing agent in the solution rather than an electric charge. However, such electroless plating processes have disadvantages, including high expense and inability to achieve precise patterning on the substrate.
发明内容Contents of the invention
本发明实施例涉及半导体裸芯衬底面板,其包括在面板上相邻半导体封装外廓之间的最小切口宽度,同时确保镀覆的电端子的电隔离。衬底面板可形成有在面板上相邻封装外廓之间的镀条。衬底面板还可包括镀覆的电端子,如焊盘和接触插指,以及将电端子电耦连到镀条的镀覆引线。Embodiments of the present invention relate to semiconductor die substrate panels that include a minimum kerf width between adjacent semiconductor package outlines on the panel while ensuring electrical isolation of plated electrical terminals. The substrate panel may be formed with plated bars between adjacent package outlines on the panel. The substrate panel may also include plated electrical terminals, such as pads and contact fingers, and plated leads electrically coupling the electrical terminals to the plated strips.
每个封装外廓可具有电端子,其在封装外廓的仅仅两侧上连接镀条。此外,取代将镀条置于相邻封装外廓之间的切口中心,镀条位于切口中的离心处。具体地,镀条更接近于镀条没有电耦连的封装外廓。镀条从其耦连到的封装外廓隔开足够的距离,以确保在切割工艺期间将镀条从其连接的镀覆引线切开。该距离可根据工程公差和其他因素而变化。Each package outline may have electrical terminals connecting the plating strips on only two sides of the package outline. Furthermore, instead of placing the plated bars at the center of the cutouts between adjacent package outlines, the plated bars are located eccentrically in the cutouts. Specifically, the plating strip is closer to the package outline where the plating strip is not electrically coupled. The plating strip is spaced a sufficient distance from the package outline to which it is coupled to ensure that the plating strip is severed from its attached plated lead during the dicing process. This distance can vary according to engineering tolerances and other factors.
使得镀覆线仅仅在一侧上连接并且从其连接的封装外廓隔开,这提供了如下优点:相邻封装外廓之间的切口宽度可具有比现有技术中已知更细的宽度。首先,因为不必移除镀条,所以切割装置的宽度无需比镀条的宽度更大。其次,因为部分镀条跨过相邻封装外廓之间的边界,所以即使切割装置的路径由于工程公差离开直线,切割将仍然切开相邻封装外廓之间的镀条以隔离电端子。Having the plated wires connected on one side only and spaced from the package outlines to which they are connected offers the advantage that the kerf width between adjacent package outlines can have a narrower width than known in the prior art . Firstly, the width of the cutting device need not be greater than the width of the plated bar, since the plated bar does not have to be removed. Second, because part of the plated strips straddles the boundary between adjacent package outlines, even if the path of the cutting device deviates from a straight line due to engineering tolerances, the cut will still cut through the plated bars between adjacent package outlines to isolate the electrical terminals.
通过根据本发明减少相邻封装外廓之间边界的宽度,对于半导体封装在衬底面板上获得了附加的空间。例如,封装外廓的一部分可变为整个封装外廓。对于给定尺寸的面板即使增加单行和/或列的半导体封装也会带来半导体封装产量的巨大增长。By reducing the width of the border between adjacent package outlines according to the invention, additional space is obtained for the semiconductor package on the substrate panel. For example, a portion of the package outline can become the entire package outline. Adding even a single row and/or column of semiconductor packages for a given size panel results in a huge increase in semiconductor package yield.
附图说明 Description of drawings
图1是现有技术包括多个封装外廓和传统镀条栅格的半导体裸芯衬底的俯视图。FIG. 1 is a top view of a prior art semiconductor die substrate including multiple package outlines and a conventional grid of plated bars.
图2是现有技术包括部分移除的镀条段的半导体裸芯衬底的一部分的俯视图。2 is a top view of a portion of a prior art semiconductor die substrate including a plated bar section partially removed.
图3是现有技术示出传统镀条移除装置所需的切口宽度的半导体裸芯衬底的一部分的俯视图。3 is a top view of a portion of a prior art semiconductor die substrate showing the kerf width required by a conventional plated bar removal apparatus.
图4是根据本发明实施例包括多个封装外廓和镀条栅格的半导体裸芯衬底的俯视图。4 is a top view of a semiconductor die substrate including a plurality of package outlines and a grid of plating bars in accordance with an embodiment of the present invention.
图5是根据本发明实施例的图4的衬底面板上的封装外廓的俯视图。5 is a top view of a package outline on the substrate panel of FIG. 4 according to an embodiment of the present invention.
图6是利用通常依照封装外廓的切割线从面板切割的封装外廓的俯视图。6 is a top view of a package outline cut from a panel using cut lines that generally follow the package outline.
图7是利用通常不依照封装外廓的切割线从面板切割的封装外廓的俯视图。7 is a top view of a package outline cut from a panel using cut lines that generally do not follow the package outline.
图8是根据本发明替换实施例的封装外廓的俯视图。8 is a top view of a package outline according to an alternative embodiment of the present invention.
图9是根据本发明实施例的用来自具有镀条的面板的衬底形成的半导体封装的横截面侧视图。9 is a cross-sectional side view of a semiconductor package formed with a substrate from a panel with plated bars in accordance with an embodiment of the present invention.
图10是利用图9的半导体封装形成的闪存的后视图。FIG. 10 is a rear view of a flash memory formed using the semiconductor package of FIG. 9 .
图11是在衬底面板上形成导电图案和镀覆的流程图。FIG. 11 is a flowchart of forming conductive patterns and plating on a substrate panel.
具体实施方式 Detailed ways
现在将参照图4至图11描述本发明的实施例,其涉及半导体裸芯衬底面板,包括在面板上相邻半导体封装外廓之间的最小切口宽度,同时确保镀覆触点的电隔离。应理解,本发明可按照许多不同形式实施,而不应解释为限于这里描述的实施例。而是,提供这些实施例使得本公开透彻和完整,并全面地将本发明传递给本领域技术人员。事实上,本发明意图覆盖如所附权利要求限定的本发明的范围和精神中所包括的这些实施例的替换、修改和等价物。另外,在本发明的以下具体描述中,阐述了一些具体细节以便提供本发明的透彻理解。然而,本领域技术人员清楚,可实践本发明而无需这样的具体细节。Embodiments of the present invention will now be described with reference to FIGS. 4-11 , which relate to a semiconductor die substrate panel including a minimum kerf width between adjacent semiconductor package outlines on the panel while ensuring electrical isolation of plated contacts. . It should be understood that the invention may be embodied in many different forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the invention to those skilled in the art. Indeed, the invention is intended to cover alternatives, modifications and equivalents of these embodiments which are included within the scope and spirit of the invention as defined by the appended claims. Additionally, in the following detailed description of the invention, certain specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without such specific details.
首先参照图4的俯视图,示出了包括多个封装外廓102的衬底面板100。封装外廓限定了在衬底面板上形成各个半导体封装的位置。可以或可以不在衬底面板100上视觉辨识出封装外廓102。Referring first to the top view of FIG. 4 , a
衬底面板100可以由具有顶部和底部导电层的芯形成。芯可由各种介电材料形成,例如聚酰亚胺薄片、包括FR4和FR5的环氧树脂、双马来酰亚胺(bismaleimide triazine)等。尽管不是本发明必不可少的,但芯可具有40μm至200μm之间的厚度,但在替代实施例中,该芯的厚度可超出此范围。在替代实施例中,该芯可以为陶瓷或有机的。The
导电层可由铜或铜合金、镀覆铜或镀覆铜合金、合金42(42Fe/58Ni)、镀铜的钢或已知用于衬底上的其他金属和材料形成。层可具有大约10μm至24μm的厚度,但在替代实施例中层的厚度可超出此范围。可在已知光刻工艺中蚀刻导电层之一或两者,导电图案用于信号和功率通讯。The conductive layer may be formed of copper or copper alloys, plated copper or plated copper alloys, alloy 42 (42Fe/58Ni), copper plated steel, or other metals and materials known for use on substrates. The layer may have a thickness of approximately 10 μm to 24 μm, although in alternative embodiments the thickness of the layer may be outside this range. One or both of the conductive layers can be etched in known photolithographic processes, and the conductive patterns are used for signal and power communication.
图5示出了来自图4的单个封装外廓102,以及所示封装外廓102内的电引脚连接的镀条116。在衬底面板100一侧上的导电图案可包括接触插指106,用于在完成的半导体封装和外部电子装置(以LGA或BGA形式)之间建立电连接。衬底面板100一侧或两侧上的导电图案可包括焊垫110,在焊垫110处,用于诸如半导体裸芯的表面安装组件的电触点被焊接到衬底面板。还可在衬底面板100上界定通孔112,用于衬底面板的相对表面上的导电图案之间的电通讯。衬底面板100的一侧或两侧上的导电图案还可包括在如下解释的镀覆工艺中使用的镀覆引线118。FIG. 5 shows a
将参照图11的流程图解释一种用于在衬底面板100上形成包括接触插指106、焊垫110、通孔112、镀条116和镀覆引线118的导电图案的工艺。在步骤150,清洁导电层的表面。然后在步骤152,在导电层的表面上方施加光致抗蚀剂膜。然后在步骤154,在光致抗蚀剂膜上放置包含导电图案的外廓的图案掩模。光致抗蚀剂膜被曝光(步骤156)和显影(步骤158)以从导电层上要蚀刻的区域移除光致抗蚀剂。接着在步骤160,使用诸如氯化铁的蚀刻剂蚀刻掉被暴露的区域,以在芯上形成导电图案。接着,在步骤162,移除光致抗蚀剂。可预想在衬底面板100上形成导电图案的其他已知方法。A process for forming a conductive pattern including
在步骤164中,在衬底面板100的一个或两个表面上形成了导电图案之后,可在衬底面板上的导电图案之一或两者的电端子上镀覆电阻金属层。具体地,可以短接要镀覆的导电图案的电端子,并且将那些电端子从不要镀覆的其他部分电隔离。导电图案的电端子可包括接触插指106、焊垫110和通孔112。在替代实施例中,其可仅仅包括这些中的一个或多个。经由衬底上形成的镀条116和镀覆引线118短接电端子。注意,在图5中未标注封装外廓102中所有的焊盘、通孔和接触插指。图4和图5中虚线所示的镀覆引线118和焊垫110位于衬底面板的下侧。此外,面板100可包括比所示更多的焊盘、通孔和/或接触插指。尽管未示出,一些电端子可被形成为彼此电耦连,并且以后在已知的回蚀刻工艺中断开端子之间的电耦连以隔离每个端子。In
可以按已知方式,用金属膜,例如金,镀覆导电图案的电端子。在替代实施例中,可将其他金属,包括锡、锡-铅、镍和镍-金,镀覆到导电图案上。镀条116的宽度可以由已知规则确定,但可以在3密耳至5密耳之间。在替代实施例中,镀条可以更细或更粗。The electrical terminals of the conductive pattern can be plated with a metal film, for example gold, in a known manner. In alternative embodiments, other metals, including tin, tin-lead, nickel and nickel-gold, may be plated onto the conductive pattern. The width of the plated
在用于镀覆衬底面板100的工艺的一个实施例中,可将面板浸入包括水溶液中的金属离子的镀槽。然后向镀条116施加电流,该电流流过镀条116、通过引线118到焊垫110、通过通孔112和/或接触插指106。当输送电流时,镀条116、引线118、焊垫110、通孔112和插指106通电,并且在它们的表面上产生电荷。金属离子被吸引到通电并带电荷的金属区域。由此将薄金属膜镀到导电图案的短接区域上。镀膜的厚度可以变化,在实施例中可以是10μm和50μm之间,但在替代实施例中它可以更薄或更厚。在替代实施例中,可使用用于在导电图案上电镀金属膜的其他已知方法。In one embodiment of a process for plating a
在图4和图5所示的实施例中,所有要镀覆的区域被短接。应理解,要镀覆的区域中的两个或更多个可以彼此电隔离。在这样的实施例中,可向每个这样短接的区域施加电流。在这样的实施例中,通过在一些区域中相对于其他区域施加更多电流,或者在更长的时段中施加相同的电流,还可以获得不同的镀膜厚度。由此,例如,可以在接触插指处获得比在焊垫和通孔处更厚的镀覆。还知道,接触插指可以镀有两层:一个软的金层和一个硬的金层,以增强接触插指的性能。在实施例中可以在接触插指上使用一层。In the embodiment shown in Figures 4 and 5, all areas to be plated are shorted. It should be understood that two or more of the regions to be plated may be electrically isolated from each other. In such an embodiment, a current may be applied to each such shorted region. In such an embodiment, different coating thicknesses can also be obtained by applying more current in some regions relative to other regions, or by applying the same current for a longer period of time. Thus, for example, a thicker plating can be achieved at the contact fingers than at the solder pads and vias. It is also known that the contact fingers can be plated with two layers: a soft gold layer and a hard gold layer, to enhance the performance of the contact fingers. In embodiments a layer may be used on the contact fingers.
在完成衬底的镀覆之后,每个电端子必须彼此电隔离。如在本发明背景技术部分解释的,传统上用宽的切割装置确保移除镀条来完成这一点,其结果是封装外廓之间宽的切口宽度。根据本发明的实施例,不必移除镀条116,相反,镀条116从镀覆引线118切开以确保每个电端子彼此电隔离。After the plating of the substrate is complete, each electrical terminal must be electrically isolated from each other. As explained in the Background of the Invention section, this is traditionally done with a wide cutting device ensuring removal of the plated strip, resulting in a wide kerf width between the package outlines. According to an embodiment of the present invention, the
在图4所示的一个实施例和图5的放大视图中,每个封装外廓可具有仅仅在封装外廓102的两侧上连接镀条116的电端子。此外,取代位于相邻封装外廓之间的切口中心的镀条,镀条位于切口内的离心处。具体地,镀条被放置为靠近它们不连接的封装外廓,并且远离具有连接镀条的端子的封装外廓。In one embodiment shown in FIG. 4 and the enlarged view of FIG. 5 , each package outline may have electrical terminals connecting the plating strips 116 only on both sides of the
由此,例如在图5中,位于封装外廓102和102a之间的镀条116耦连到封装外廓102内的端子,但不耦连到封装外廓102a中的端子。封装外廓102和102a之间的镀条被放置得靠近封装外廓102a而远离封装外廓102。类似地,位于封装外廓102和102b之间的镀条116耦连到封装外廓102内的端子,但不耦连到封装外廓102b中的端子。封装外廓102和102b之间的镀条被放置得靠近封装外廓102b而远离封装外廓102。尽管未示出,耦连到封装外廓102c内的端子的镀条可位于封装外廓102和102c之间,靠近封装外廓102,并且耦连到封装外廓102d内的端子的镀条可位于封装外廓102和102d之间,靠近封装外廓102。Thus, for example in FIG. 5 , plated
镀条116从其耦连的封装外廓隔开足够的距离,以确保在切割工艺期间将封装外廓从其连接的镀覆引线118切开。该距离可根据工程公差和其他因素而变化。然而,在实施例中,镀覆引线118可在125μm和50μm之间(并且更具体地大约100μm)偏离其耦连的封装外廓。应注意,在替代实施例中,镀条可偏移得比上述量更多或更少。应理解,与耦连到封装外廓的垂直镀条116相比,耦连到封装外廓102的水平镀条116可从封装外廓102隔开相同的量或不同的量。Plated strips 116 are spaced a sufficient distance from their coupled package outlines to ensure that the package outlines are severed from their attached plated leads 118 during the dicing process. This distance can vary according to engineering tolerances and other factors. However, in an embodiment, the plated leads 118 may deviate between 125 μm and 50 μm (and more specifically about 100 μm) from the package outline to which they are coupled. It should be noted that in alternative embodiments, the plated bars may be offset by more or less than the amount described above. It should be understood that the horizontal plating bars 116 coupled to the
现在参照图6,示出了已经沿着虚线120切割(通过后面解释的方法)的封装外廓102。在此例子中,在切割封装外廓的过程中没有不正确的偏移,并且在封装外廓的周边正确地进行切割。然而,如背景技术部分所示,由于工程公差,切割装置可能在切割期间偏移,从而不会精确地沿着封装外廓的周边进行切割。例如,在图7中,切割向上偏移了量Δ1,并向左(相对于图7所示的视图)偏移了量Δ2。因为耦连到封装外廓内的电端子的镀条偏离封装外廓102的量大于切割系统的公差,所以即使切割向上偏移,封装(未示出)上方的水平镀条也仍然在切割线之外。如果切割偏移到图7所示的封装外廓102的右边,也是同样的。Referring now to FIG. 6 , there is shown
由于切割向左偏移Δ2,所以图7所示的在封装外廓102左边且靠近封装外廓102的镀条116被包括在切割内。然而,因为所示的镀条116没有耦连到所示封装外廓102中的任何电端子,在所示封装外廓102中不出现电端子的电短接。所示的镀条116的部分可无害地保留在要使用封装外廓102形成的半导体封装内。如果从图7所示向下偏移,也是同样的。此外,沿着封装外廓102的左边缘的切割将切开和电隔离所示封装外廓102左边的任何邻近封装外廓中的电端子。Since the cut is offset to the left by Δ 2 , the
使得镀覆线从其耦连的封装外廓隔开,这提供了如下优点:相邻封装外廓之间的切口宽度k可具有比现有技术中已知更细的宽度。首先,因为不必移除镀条,所以切割装置的宽度无需比镀条的宽度更大。其次,因为镀条与耦连的封装外廓远隔开的距离超出公差,所以即使切割装置的路径由于工程公差离开直线,切割将仍然将电端子与镀条分开以隔离电端子。Having the plated lines spaced from the package outlines to which they are coupled provides the advantage that the cutout width k between adjacent package outlines can have a thinner width than is known in the prior art. Firstly, the width of the cutting device need not be greater than the width of the plated bar, since the plated bar does not have to be removed. Second, even if the path of the cutting device deviates from a straight line due to engineering tolerances, the cut will still separate the electrical terminal from the plated bar to isolate the electrical terminal because the distance separating the plated bar from the coupled package outline is far out of tolerance.
由此,因为可使得切割装置的宽度更小并且可省略以前工程公差所需的空间,所以可减少相邻封装外廓之间的切口宽度。在实施例中,这允许大约100μm至225μm,或可替换地,150μm至于200μm,并且更具体地,大约175μm的切口宽度。应理解,在替代实施例中,切口宽度可比此更宽或更小。在切口宽度是175μm的实施例中,镀条可位于第一和第二封装外廓之间,距离第一封装外廓25μm,其中镀条耦连到第二封装外廓中的端子。应理解,在以上例子中,在替代实施例中,镀条可比25μm更近或更远。在实施例中,镀覆线可位于第一封装外廓内,其中镀条耦连到第二封装外廓中的端子。Thereby, the kerf width between adjacent package outlines can be reduced because the width of the cutting device can be made smaller and the space required for previous engineering tolerances can be omitted. In an embodiment, this allows for a kerf width of about 100 μm to 225 μm, or alternatively, 150 μm to 200 μm, and more specifically about 175 μm. It should be understood that in alternative embodiments, the slit width may be wider or smaller than this. In an embodiment where the kerf width is 175 μm, a plated strip may be located between the first and second package outlines, 25 μm from the first package outline, wherein the plated strip is coupled to a terminal in the second package outline. It should be understood that in the above example, in alternative embodiments, the plated bars could be closer or farther apart than 25 μm. In an embodiment, a plated wire may be located within a first package outline, with a plated bar coupled to a terminal in a second package outline.
通常由半导体封装制造商选择衬底面板的尺寸,并且一般不对特定数目的封装外廓选择衬底面板的尺寸。设置尺寸,然后提供该尺寸上将装配的尽量多的封装外廓。如果在给定尺寸的衬底面板上最大化封装外廓的密度,则很少适于在衬底面板上适配整数个封装外廓。而是,最大化密度,产生给定整数个封装外廓,以及在侧面和底部边缘的分数(fraction)个封装外廓。例如,衬底面板可在面板的整个长度上适配10个封装外廓,并留有分数个封装外廓。显然,不能制造出分数个的半导体封装。由此,传统地,在此例子中,将在衬底面板上形成10个这样的封装,并且10个封装分布在面板的整个长度(即,增加封装之间的边界)。The size of the substrate panel is typically selected by the semiconductor package manufacturer, and is generally not selected for a particular number of package outlines. Set the size, then provide as many package outlines as will fit on that size. If the density of package outlines is to be maximized on a substrate panel of a given size, it is rarely appropriate to fit an integer number of package outlines on a substrate panel. Instead, maximizing density yields a given integer number of package outlines, and a fraction of package outlines at the side and bottom edges. For example, a substrate panel may fit 10 package outlines over the entire length of the panel, leaving a fraction of the package outlines. Obviously, fractional semiconductor packages cannot be manufactured. Thus, conventionally, in this example, 10 such packages would be formed on the substrate panel, and the 10 packages distributed over the entire length of the panel (ie, increasing the boundaries between packages).
然而,通过根据本发明减少相邻封装外廓之间边界的宽度,具有10个这样的边界的面板可回收足够空间以完成11个封装外廓,由此允许增加一列半导体封装。在给定尺寸的面板内即使增加单行和/或列的半导体封装也会带来半导体封装产量的巨大增长。However, by reducing the width of the boundaries between adjacent package outlines according to the invention, a panel with 10 such boundaries can reclaim enough space to complete 11 package outlines, thereby allowing an additional column of semiconductor packages. Adding even a single row and/or column of semiconductor packages within a panel of a given size can result in a huge increase in semiconductor package yield.
尽管图4-7所示的镀条116相对于面板100上的封装外廓102之间的切口中线向上和向右偏移,但应理解,镀条可相对于切口位于其他位置。例如,图8示出了相对于切口中线向下和向左偏移的镀条。此外,根据本发明的镀条不需要仅仅包括面板100上的直线。也可以考虑如上所述放置的单个镀覆线116以及水平和垂直部件。Although the
如这里所使用并且下面更具体解释的,术语“切割”可以表示将封装外廓102从面板分离开,或者术语“切割”可另外表示切开镀条而不切穿衬底。在实施例中,在镀覆工艺之后,对于半导体封装的剩余部分,镀条116可保留不动。在如下所述包装面板时,面板可被分拆(singulated)为单独的半导体封装。在这样的实施例中,可在分拆封装时切割镀条。可通过用来分拆半导体封装的多种切开方法,分拆封装和切割镀条。As used herein and explained in more detail below, the term "cut" may refer to separating the
锯割通常比其他切割方法更便宜,花费时间较少,且需要较少的设备,并且可用于分拆半导体封装。然而,应理解,在替代实施例中,可通过多种切割方法分拆面板100,例如水流切割、激光切割、水引导激光切割、干媒切割和钻石涂层丝。水也可与激光切割一起使用,以帮助补充或集中其效果。尽管半导体封装被示出为方形或矩形,但在替代实施例中,它们可附加地或替换为具有不规则或曲线形状。在公开的美国申请No.2004/0259291题为“Method For Efficiently Producing Removable Peripheral Cards”中公开了从面板切割半导体封装以及由此实现的形状的进一步描述,该申请被转让给本发明的所有者并且该申请在此通过引用合并其全文。Sawing is generally less expensive, takes less time, requires less equipment than other cutting methods, and can be used to separate semiconductor packages. However, it should be understood that in alternative embodiments,
在实施例中,在镀覆工艺后,可切割镀条116而不切穿衬底面板100。如本领域已知的,可使用刳刨机切开镀条116而不切穿衬底面板。In an embodiment, after the plating process, the
如上所述包括镀条、引线和电端子的衬底面板100可被形成为多个半导体封装130,图9中示出了其中之一。在衬底面板100上镀覆导电图案之后,一个或多个无源装置132和半导体裸芯134可安装到衬底面板上。尽管对本发明不是关键的,半导体裸芯134可以是闪存芯片(NOR/NAND)、SRAM或DDT、以及/或诸如ASIC的控制器芯片。可可以考虑其他硅芯片。The
在已知引线键合工艺中,可通过在镀覆的焊垫110处焊接的引线键合136,将一个或多个裸芯134电连接到衬底面板100。此后,可在已知包装工艺中将衬底和裸芯包装到模塑料中,以形成完整的半导体裸芯封装130。可根据各种工艺施加模塑料,包括通过转移模塑或注入模塑技术,以包装该封装。在被包装后,各个封装外廓102可从面板分拆为各个半导体封装130。如果镀覆线还没有被切开,则在从面板分拆封装的过程中切开它们。One or more die 134 may be electrically connected to
图10是闪存装置140的后视图,其中可使用半导体封装130。闪存装置可以是SD卡、Compact Flash、Smart Media、Mini SD卡、MMC、xD卡、Transflash或记忆棒。可想到其他装置。FIG. 10 is a rear view of a
已经为了例示和描述的目的给出了本发明的前述详细说明。其不旨在是穷尽的或将本发明限于所公开的精确形式。根据以上教导,许多修改和变化是可能的。选择所描述的实施例以便最好地解释本发明的原理及其实际应用,从而使得本领域技术人员在各种实施例中和适合于所考虑的特定用途的各种修改来最好地利用本发明。本发明的范围旨在由所附权利要求限定。The foregoing detailed description of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching. The embodiment described was chosen in order to best explain the principles of the invention and its practical application, to enable others skilled in the art to best utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. invention. It is intended that the scope of the invention be defined by the appended claims.
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US11/760,385 US7611927B2 (en) | 2007-06-08 | 2007-06-08 | Method of minimizing kerf width on a semiconductor substrate panel |
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US7098524B2 (en) * | 2004-08-05 | 2006-08-29 | Global Advanced Packaging Technology H.K. Limited | Electroplated wire layout for package sawing |
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US7235864B2 (en) * | 2004-01-14 | 2007-06-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit devices, edge seals therefor |
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