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CN101706361B - Acousto-optic tunable filter diffraction efficiency test system and test method - Google Patents

Acousto-optic tunable filter diffraction efficiency test system and test method Download PDF

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CN101706361B
CN101706361B CN2009102264978A CN200910226497A CN101706361B CN 101706361 B CN101706361 B CN 101706361B CN 2009102264978 A CN2009102264978 A CN 2009102264978A CN 200910226497 A CN200910226497 A CN 200910226497A CN 101706361 B CN101706361 B CN 101706361B
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energy
aotf
laser
energy meter
meter probe
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CN101706361A (en
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沈渊婷
杨世骥
何志平
王建宇
舒嵘
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Shanghai Institute of Technical Physics of CAS
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Abstract

本发明公开了一种声光可调谐滤光器衍射效率测试系统。该系统由波长可调谐激光器、中性密度滤光片、光阑孔、分束镜、二维电动转台、能量计组成。波长可调谐激光器可生成波长连续可调的激光光束,经过中性密度滤光片及光阑孔后,由分束镜分成固定分束比的两束激光,反射光束能量作为参考能量;透射光束进入AOTF,在对其施加射频驱动时接收衍射光能量,未施加驱动时接收直接透过的能量,从而计算AOTF的衍射效率。同时,通过二维电动转台改变入射光角度可实现孔径角的测量。本发明装置的特点在于原理简单、可操作性强,可满足AOTF测试连续波长的需求,同时利用分束镜产生参考光束可大幅提高测试精度。

The invention discloses a system for testing the diffraction efficiency of an acousto-optic tunable filter. The system consists of a wavelength tunable laser, a neutral density filter, an aperture, a beam splitter, a two-dimensional electric turntable, and an energy meter. The wavelength tunable laser can generate a laser beam with continuously adjustable wavelength. After passing through the neutral density filter and the aperture, it is divided into two laser beams with a fixed beam splitting ratio by the beam splitter. The reflected beam energy is used as the reference energy; the transmitted beam Enter the AOTF, receive the diffracted light energy when the RF drive is applied to it, and receive the directly transmitted energy when the drive is not applied, so as to calculate the diffraction efficiency of the AOTF. At the same time, the measurement of the aperture angle can be realized by changing the incident light angle through a two-dimensional electric turntable. The device of the invention is characterized by simple principle and strong operability, and can meet the requirement of AOTF testing continuous wavelengths, and at the same time, using a beam splitter to generate a reference beam can greatly improve test accuracy.

Description

声光可调谐滤光器衍射效率测试系统及测试方法 Acousto-optic tunable filter diffraction efficiency test system and test method

技术领域:Technical field:

本发明涉及光学测量技术,具体指一种声光可调谐滤光器衍射效率测试系统及方法。The invention relates to optical measurement technology, in particular to an acousto-optic tunable filter diffraction efficiency test system and method.

背景技术:Background technique:

声光可调谐滤光器(Acousto-optic tunable filter,AOTF)是一种窄带可调滤光器,它是根据声光作用原理制成的分光器件。通过改变施加在晶体上射频驱动的频率选择分光波长,从而实现波长扫描。目前该技术已广泛应用于非成像及成像光谱仪器。Acousto-optic tunable filter (AOTF) is a narrow-band tunable filter, which is a spectroscopic device made according to the principle of acousto-optic interaction. Wavelength scanning is realized by changing the frequency-selective splitting wavelength of the RF driver applied to the crystal. At present, this technology has been widely used in non-imaging and imaging spectroscopy instruments.

AOTF的分光原理:如附图1、附图2所示,当一束复色光通过一个高频振动的具有光学弹性的晶体时,某一波长的单色光将会在晶体内部产生衍射,以一定角度从晶体中透射出来,未发生衍射的复色光则沿原光线传播方向直接透射过晶体,由此达到分光的目的。当晶体振动频率改变时,可透射单色光的波长也相应改变。各向同性和各向异性布拉格衍射都能用于滤光器件,但是采用各向同性晶体作滤光片实用性极差,它对于入射光的平行性要求苛刻(张角在千分之一弧度以内),微小的偏差也会导致光谱通带显著加宽,而且不同波长对应的衍射角也不同,因此,AOTF都采用双折射晶体各向异性布拉格衍射。在各向异性AOTF中,入射到AOTF的光线入射角有一个小的改变δθi时,由于双折射量随角度的变化恰好补偿了因角度变化而引起的动量失配,所以仍能够保持动量匹配条件近似成立,声光衍射对入射光在一定角度内变化不很敏感,从而可以做成大角孔径的AOTF。AOTF's spectroscopic principle: As shown in Figure 1 and Figure 2, when a beam of polychromatic light passes through a high-frequency vibrating optically elastic crystal, monochromatic light of a certain wavelength will be diffracted inside the crystal to It is transmitted from the crystal at a certain angle, and the polychromatic light that has not been diffracted is directly transmitted through the crystal along the direction of the original light propagation, thereby achieving the purpose of light splitting. When the crystal vibration frequency changes, the wavelength of the monochromatic light that can be transmitted also changes accordingly. Both isotropic and anisotropic Bragg diffraction can be used for optical filter devices, but the use of isotropic crystals as optical filters is extremely poor in practicability, and it has strict requirements on the parallelism of incident light (the opening angle is within one thousandth of an arc Within), small deviations will also lead to a significant broadening of the spectral passband, and the diffraction angles corresponding to different wavelengths are also different. Therefore, AOTF uses birefringent crystal anisotropic Bragg diffraction. In the anisotropic AOTF, when the incident angle of the light incident on the AOTF has a small change δθi , since the change of the birefringence with the angle just compensates the momentum mismatch caused by the angle change, the momentum matching can still be maintained The conditions are approximately true, and the acousto-optic diffraction is not very sensitive to the change of the incident light within a certain angle, so that an AOTF with a large angular aperture can be made.

AOTF衍射效率的测试技术:根据AOTF的分光原理,对入射光束的准直性及光束直径有较高要求,为满足一定的测量精度,要求光束的直径及发射角要尽量小。而且对AOTF衍射效率的测试需要实现全波段覆盖。AOTF Diffraction Efficiency Testing Technology: According to AOTF’s spectroscopic principle, there are high requirements for the collimation and beam diameter of the incident beam. In order to meet a certain measurement accuracy, the diameter and emission angle of the beam should be as small as possible. Moreover, the test of the diffraction efficiency of the AOTF needs to achieve full-band coverage.

目前,国内对AOTF衍射效率进行测试的方法主要集中于采用连续宽谱段光源(例如卤钨灯),通过光谱接收系统进行出射光的光谱特性测试,其测试装置示意图见附图3。首先光源准直,利用偏振片产生垂直偏振光入射,利用光谱仪接收到0级光光谱。设不加射频信号时0级光的光谱强度为I0,加射频驱动后0级光最小值为I,衍射效率T=(I0-I)/I0。在驱动功率固定的情况下,改变AOTF射频驱动频率,可进行光谱扫描。该方法的缺陷在于,由于光源准直后平行度没有激光好,而不同角度入射的激光对AOTF衍射效率的测试结果会产生较大变化,故而用该方法测试的结果与实际AOTF的衍射效率会有差别。At present, domestic methods for testing the diffraction efficiency of AOTF mainly focus on using a continuous broad-spectrum light source (such as a tungsten halogen lamp) to test the spectral characteristics of the outgoing light through a spectral receiving system. The schematic diagram of the testing device is shown in Figure 3. First, the light source is collimated, the polarizer is used to generate vertically polarized light incident, and the spectrometer is used to receive the 0-order light spectrum. Assuming that the spectral intensity of the 0th order light is I 0 when no radio frequency signal is added, the minimum value of the 0th order light after being driven by radio frequency is I, and the diffraction efficiency T=(I 0 -I)/I 0 . When the driving power is fixed, the spectrum scanning can be performed by changing the AOTF RF driving frequency. The defect of this method is that the parallelism of the light source after collimation is not as good as that of the laser, and the test results of the diffraction efficiency of the AOTF will be greatly changed by the incident laser light at different angles, so the results tested by this method are different from the actual diffraction efficiency of the AOTF. have difference.

若采用激光作为光源,则仅需要利用能量接收系统就可以方便的进行各级光能量的测量及计算,从而得出AOTF衍射效率。但是采用该种测试方法,单一波长的激光器无法满足AOTF连续谱段测试的需求,且该种测试方法对激光器能量的稳定性要求比较高。所以,目前仅在个别固定波段利用激光作为光源进行AOTF衍射效率测试,无法满足AOTF全波段测试的需求。If a laser is used as the light source, it is only necessary to use the energy receiving system to conveniently measure and calculate the light energy at all levels, so as to obtain the AOTF diffraction efficiency. However, with this test method, a single-wavelength laser cannot meet the requirements of AOTF continuous spectrum testing, and this test method has relatively high requirements for the stability of laser energy. Therefore, at present, lasers are used as light sources for AOTF diffraction efficiency tests only in individual fixed bands, which cannot meet the needs of AOTF full-band tests.

发明内容:Invention content:

本发明的目的是提供一种测量AOTF衍射效率的装置,解决激光器能量不稳定、能量计探头响应不一致造成测量误差的技术问题。The purpose of the present invention is to provide a device for measuring AOTF diffraction efficiency, which solves the technical problems of measurement errors caused by unstable laser energy and inconsistent responses of energy meter probes.

如附图4所示,本发明是以EKSPLA NT342/1/UV波长可调谐激光器1作为测试光源,光束通过中性密度滤光片2和光阑孔3后入射到分束镜4,由分束镜4将入射光分成固定分束比的透射光和反射参考光。调整光路,使透射光垂直进入待测AOTF71,由AOTF驱动器72对AOTF71施加驱动频率。能量计探头61接收透过AOTF71的光束能量,能量计探头62同步接收参考光束的能量。As shown in accompanying drawing 4, the present invention uses EKSPLA NT342/1/UV wavelength tunable laser 1 as the test light source, and the light beam is incident on the beam splitter 4 after passing through the neutral density filter 2 and the aperture hole 3, and the beam splitter The mirror 4 splits the incident light into transmitted light and reflected reference light with a fixed beam splitting ratio. The optical path is adjusted so that the transmitted light enters the AOTF71 to be tested vertically, and the AOTF driver 72 applies a driving frequency to the AOTF71. The energy meter probe 61 receives the beam energy passing through the AOTF 71 , and the energy meter probe 62 receives the energy of the reference beam synchronously.

具体方法:调整激光器波长,对AOTF71加一定射频驱动,能量计探头61接收到的衍射光能量为E1,能量计探头62同步接收到的参考光束能量为E2,当E1/E2最大时为对应该RF驱动频率的衍射中心波长。Specific method: adjust the wavelength of the laser, add a certain radio frequency drive to the AOTF71, the energy of the diffracted light received by the energy meter probe 61 is E 1 , and the energy of the reference beam received by the energy meter probe 62 synchronously is E 2 , when E 1 /E 2 is the largest is the diffraction center wavelength corresponding to the RF driving frequency.

不加射频驱动下,能量计探头61接收到的AOTF直接出射光能量E1′,能量计探头62同步接收到的反射光束能量为E2′,衍射效率的计算公式如下:Without RF drive, the AOTF directly emitted light energy E 1 ' received by the energy meter probe 61, and the reflected beam energy synchronously received by the energy meter probe 62 is E 2 ', and the calculation formula of the diffraction efficiency is as follows:

E 1 η E 2 = E 1 ′ E 2 ′ , η = E 1 E 2 ′ E 2 E 1 ′ - - - ( 1 - 1 ) E. 1 η E. 2 = E. 1 ′ E. 2 ′ , but η = E. 1 E. 2 ′ E. 2 E. 1 ′ - - - ( 1 - 1 )

通过二维电动转台5转动可改变AOTF71的入射光角度,当E1/E2下降至最大值一半时对应的角度变化即为晶体孔径角。The incident light angle of AOTF71 can be changed by the rotation of the two-dimensional electric turntable 5, and when E 1 /E 2 drops to half of the maximum value, the corresponding angle change is the crystal aperture angle.

波长可调谐激光器1:提供210~2300nm连续可调激光波长,激光发散角小于0.5mrad,210~709nm波段光谱扫描间隔为0.1nm,710~2300nm波段光谱扫描间隔为1nm。Wavelength tunable laser 1: Provide continuously adjustable laser wavelength from 210 to 2300nm, the laser divergence angle is less than 0.5mrad, the spectral scanning interval in the 210 to 709nm band is 0.1nm, and the spectral scanning interval in the 710 to 2300nm band is 1nm.

中性密度滤光片2和光阑孔3可控制入射光能量,并限制激光光斑的大小。分束镜4的作用是产生参考光束,实现测试精度的大幅提高。波长可调谐激光器能量不稳定,单次测量的能量值可比性低。两台能量计探头响应率不一致,而试验中需要测试的波长数较多,所以要对各个波长下的探头响应系数进行标定有一定困难。测试光路中加入的分束镜,可产生反射参考光束,并对其能量进行监测,分束镜在指定波长下的分束比为恒定值,故进入AOTF71的能量与参考光束能量比值恒定。分束镜起到提高测试精度的作用。由于AOTF71在指定波长下通光效率恒定,所以可通过衍射光能量与参考光束能量的比值代替直接测试衍射光能量。The neutral density filter 2 and the aperture 3 can control the incident light energy and limit the size of the laser spot. The function of the beam splitter 4 is to generate a reference beam, so as to greatly improve the test accuracy. The energy of the wavelength tunable laser is unstable, and the energy value of a single measurement is not comparable. The probe responsivity of the two energy meters is inconsistent, and the number of wavelengths to be tested in the experiment is large, so it is difficult to calibrate the probe response coefficient at each wavelength. The beam splitter added in the test light path can generate the reflected reference beam and monitor its energy. The beam splitting ratio of the beam splitter at the specified wavelength is constant, so the ratio of the energy entering AOTF71 to the energy of the reference beam is constant. The beam splitter plays a role in improving the test accuracy. Since the light transmission efficiency of AOTF71 is constant at a specified wavelength, the ratio of the diffracted light energy to the reference beam energy can be used instead of directly testing the diffracted light energy.

二维电动转台5可调整入射光的角度,一用于光路调整,二用于孔径角测量。The two-dimensional motorized turntable 5 can adjust the angle of incident light, one is used for optical path adjustment, and the other is used for aperture angle measurement.

本专利的优点在于:The advantage of this patent is:

1)本发明用波长可调谐激光器作为入射光源,可满足AOTF需要高密度、小间隔波长测试的需求。1) The present invention uses a wavelength tunable laser as the incident light source, which can meet the requirements of AOTF for high-density, small-interval wavelength testing.

2)本发明利用分束镜进行入射光能量分束,通过参考光束能量作为监测,抵消激光器能量不稳定以及能量计探头响应率不一致造成的测试误差,从而大幅提高AOTF衍射效率测试精度。2) In the present invention, the beam splitter is used to split the incident light energy, and the energy of the reference beam is used as monitoring to offset the test error caused by the instability of the laser energy and the inconsistent response rate of the energy meter probe, thereby greatly improving the test accuracy of the AOTF diffraction efficiency.

附图说明:Description of drawings:

图1各向异性AOTF矢量图。Fig. 1 Vector diagram of anisotropic AOTF.

图2AOTF分光示意图。Figure 2 AOTF spectroscopic diagram.

图3是宽光源AOTF衍射效率测试系统示意图。Fig. 3 is a schematic diagram of the wide light source AOTF diffraction efficiency test system.

图4是AOTF衍射效率测试系统示意图。Fig. 4 is a schematic diagram of the AOTF diffraction efficiency test system.

具体实施方式:Detailed ways:

下面是根据图4给出的本发明的一个较好实施例,用以说明本发明的结构特征和实施方法,而不是用来限定本发明的范围。The following is a preferred embodiment of the present invention provided according to FIG. 4, which is used to illustrate the structural features and implementation methods of the present invention, rather than to limit the scope of the present invention.

声光可调谐滤光器衍射效率测试系统包括如下几个部分:Acousto-optic tunable filter diffraction efficiency test system includes the following parts:

1)波长可调谐激光器1:在本实施方案中选择EKSPLA NT342/1/UV波长可调谐激光器1作为光源。该激光器可产生210~2300nm连续可调谐激光光束。1) Wavelength tunable laser 1: In this embodiment, EKSPLANT342/1/UV wavelength tunable laser 1 is selected as the light source. The laser can generate 210-2300nm continuously tunable laser beam.

2)中性密度滤光片2:本实施方案中选择Spiricon中性密度滤光片。2) Neutral density filter 2: Spiricon neutral density filter is selected in this embodiment.

3)光阑孔3:本实施方案选用大恒光电GCM-57可变光阑。3) Diaphragm hole 3: Daheng Optoelectronics GCM-57 variable diaphragm is selected for this implementation.

4)分束镜4:本实施例选用固定分束比为1∶1(600~1200nm)的分束镜。在其他波段分束比会有变化,但针对某个固定波长,器分束比恒定。4) Beam splitter 4: In this embodiment, a beam splitter with a fixed beam splitting ratio of 1:1 (600-1200 nm) is selected. The beam splitting ratio will vary in other bands, but for a fixed wavelength, the beam splitting ratio is constant.

5)二维电动转台5:本实施例选用联谊148×142二维电动旋转台,调节范围360°,电机的传动比1∶360,标尺最小读数0.1°,电机整步运行分辨率0.005°。5) Two-dimensional electric turntable 5: Lianyi 148×142 two-dimensional electric turntable is used in this embodiment, the adjustment range is 360°, the transmission ratio of the motor is 1:360, the minimum reading of the scale is 0.1°, and the full-step resolution of the motor is 0.005°.

6)能量计探头61、62:本实施例选用美国Coherent公司EPM1000能量计表头,探头选用J4-09及J45LP-MB。6) Energy meter probes 61 and 62: In this embodiment, the EPM1000 energy meter head of Coherent Company of the United States is selected, and the probes are J4-09 and J45LP-MB.

本实施例选用美国Brimrose可见/近红外AOTF71及配套射频驱动器72作为AOTF组件。选定激光器波长,调节二维电动转台5,使波长可调谐激光器1发射光束通过中性密度滤光片2、光阑孔3、分束镜4后垂直入射AOTF71,由能量计探头62接收分束镜反射的参考光束。对AOTF 71不加驱动时,由能量计探头61在AOTF71后接收0级光能量;对AOTF71施加驱动时,由能量计探头61在AOTF71后接收衍射光能量。在测试过程中,两个能量计探头61、62同步接收。由上述计算衍射效率的公式(1-1)计算AOTF71的衍射效率。In this embodiment, a visible/near-infrared AOTF 71 and a matching radio frequency driver 72 are selected as the AOTF components from Brimrose in the United States. The wavelength of the laser is selected, and the two-dimensional electric turntable 5 is adjusted so that the beam emitted by the wavelength-tunable laser 1 passes through the neutral density filter 2, the aperture 3, and the beam splitter 4, and then enters the AOTF 71 vertically, and is received by the energy meter probe 62. The reference beam reflected by the beam mirror. When the AOTF 71 is not driven, the energy meter probe 61 receives the 0-level light energy behind the AOTF71; when the AOTF71 is driven, the energy meter probe 61 receives the diffracted light energy behind the AOTF71. During the test, the two energy meter probes 61, 62 receive synchronously. The diffraction efficiency of AOTF71 is calculated from the above formula (1-1) for calculating the diffraction efficiency.

如上所述,本测试系统的测试方法简单、可操作性强,是较为理想的AOTF衍射效率测试装置。As mentioned above, the test method of this test system is simple and operable, and it is an ideal AOTF diffraction efficiency test device.

Claims (3)

1.一种声光可调谐滤光器AOTF衍射效率测试系统,它包括光源、中性密度滤光片(2)、光阑孔(3)、分束镜(4)、二维电动转台(5)、第一能量计探头(61)、第二能量计探头(62),其特征在于:所述测试系统中的所述光源采用波长可调谐激光器(1);所述的波长可调谐激光器(1)发出的激光光束依次通过中性密度滤光片(2)、光阑孔(3)后由分束镜(4)将入射光分成固定分束比的透射光和反射参考光,透射光垂直入射待测AOTF(71),由AOTF驱动器(72)对AOTF(71)施加射频驱动,由第一能量计探头(61)接收透过AOTF(71)的光束能量,第二能量计探头(62)同步接收反射参考光束的能量,第二能量计探头(62)测出反射参考光束的激光能量用于补偿激光能量不稳定以及第一能量计探头(61)与第二能量计探头(62)响应不一致引起的测量误差。1. An acousto-optic tunable filter AOTF diffraction efficiency test system, it comprises light source, neutral density filter (2), aperture hole (3), beam splitter mirror (4), two-dimensional electric turntable ( 5), the first energy meter probe (61), the second energy meter probe (62), it is characterized in that: the described light source in the described testing system adopts wavelength tunable laser (1); Described wavelength tunable laser (1) The emitted laser beam passes through the neutral density filter (2) and aperture (3) in sequence, and then the incident light is divided into transmitted light and reflected reference light with a fixed beam splitting ratio by the beam splitter (4). The light is vertically incident on the AOTF (71) to be measured, the AOTF driver (72) applies radio frequency drive to the AOTF (71), the first energy meter probe (61) receives the beam energy passing through the AOTF (71), and the second energy meter probe (62) Synchronously receive the energy of the reflected reference beam, and the second energy meter probe (62) measures the laser energy of the reflected reference beam for compensating laser energy instability and the first energy meter probe (61) and the second energy meter probe ( 62) Measurement errors caused by inconsistent responses. 2.根据权利要求1所述的一种声光可调谐滤光器AOTF衍射效率测试系统,其特征在于:所述的波长可调谐激光器(1)连续可调激光波长范围为210~2300nm,激光发散角小于0.5mrad,210~709nm波段光谱扫描间隔为0.1nm,710~2300nm波段光谱扫描间隔为1nm。2. An acousto-optic tunable filter AOTF diffraction efficiency test system according to claim 1, characterized in that: the continuously adjustable laser wavelength range of the wavelength tunable laser (1) is 210-2300nm, and the laser The divergence angle is less than 0.5mrad, the spectral scanning interval of the 210-709nm band is 0.1nm, and the spectral scanning interval of the 710-2300nm band is 1nm. 3.一种基于权利要求1所述系统的声光可调谐滤光器AOTF衍射效率测试方法,其特征在于包括以下步骤:3. an acousto-optic tunable filter AOTF diffraction efficiency testing method based on the system described in claim 1, is characterized in that comprising the following steps: A.调整激光器波长,对AOTF(71)加一定射频驱动,通过第一能量计探头(61)测出测量光路上的衍射光能量E1,同时通过第二能量计探头(62)测出参考光路上的反射光束能量E2A. Adjust the wavelength of the laser, add a certain radio frequency drive to the AOTF (71), measure the diffracted light energy E 1 on the measurement optical path through the first energy meter probe (61), and measure the reference energy through the second energy meter probe (62) Reflected beam energy E 2 on the optical path; B.不加射频驱动下,通过第一能量计探头(61)测出测量光路上直接出射光能量E1′,同时通过第二能量计探头(62)测出参考光路上的反射光束能量E2′;B. Without RF drive, measure the direct outgoing light energy E 1 ′ on the measurement optical path through the first energy meter probe (61), and measure the reflected beam energy E on the reference optical path through the second energy meter probe (62) 2 '; C.计算AOTF衍射效率,计算公式如下:C. Calculate the AOTF diffraction efficiency, the calculation formula is as follows: ηη == EE. 11 EE. 22 ′′ EE. 22 EE. 11 ′′ -- -- -- (( 11 )) ..
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