CN101706261A - Device for measuring diameter of large shaft working piece by non-contact-type online measurement - Google Patents
Device for measuring diameter of large shaft working piece by non-contact-type online measurement Download PDFInfo
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Abstract
本发明是一种非接触式在线测量大型轴工件直径的装置,它解决了机械加工大外径工件的精密测量,检具笨重,操作不便,测量精度低,测量效率不高的问题。本发明测量底座的云台上装有三根导轨由丝杆和螺纹联接,底座上装有立柱,立柱上套装有四个导轨滑块并装有锁紧螺丝,上下导轨滑固装的滑板长度一致且装有传感器由锁紧螺杆联接,立柱上中间套装的二个导轨滑块由锁紧螺杆联接装有滑板和传感器,中间导轨滑块滑板的长度小于上下滑板,传感器与计算机之间由电缆联接,标定底座上固装有对称的支撑座,支撑座由旋转轴联接并装有轴承,旋转轴中央装有两个直径大小不同的大圆盘和小圆盘,调速电机由支架联接固定在标定底座上,调速电机机轴与一端旋转轴联接,另一端旋转轴与固定在标定底座支架上的转速编码器联接,测量底座与标定底座之间由大平台联接。本发明设计科学,结构简单,操作方便,采用传感器进行数据取样,计算机和圆编码器自动集中处理,测量大型轴工件精密度可靠,极大提高我国测量机械加工轴工件的高精度测量仪器。
The invention is a device for non-contact on-line measurement of the diameter of a large-scale shaft workpiece, which solves the problems of heavy inspection tools, inconvenient operation, low measurement accuracy and low measurement efficiency for precision measurement of large-diameter workpieces in machining. The cloud platform of the measuring base of the present invention is equipped with three guide rails connected by screw rods and threads, the base is equipped with a column, and the column is equipped with four guide rail sliders and locking screws. The sensor is connected by the locking screw, and the two guide rail sliders in the middle of the column are connected by the locking screw to install the sliding plate and the sensor. The length of the sliding plate of the middle guide rail slider is smaller than that of the upper and lower sliding plates. The sensor and the computer are connected by cables. Calibration A symmetrical support seat is fixed on the base, and the support seat is connected by a rotating shaft and equipped with bearings. There are two large discs and small discs with different diameters in the center of the rotating shaft. The speed regulating motor is connected and fixed on the calibration base by a bracket. Above, the shaft of the speed-regulating motor is connected to the rotating shaft at one end, and the rotating shaft at the other end is connected to the speed encoder fixed on the bracket of the calibration base. The measuring base and the calibration base are connected by a large platform. The invention has the advantages of scientific design, simple structure, convenient operation, data sampling by sensors, automatic centralized processing by computer and circular encoder, reliable precision of measuring large-scale shaft workpieces, and greatly improves the high-precision measuring instruments for measuring machining shaft workpieces in my country.
Description
技术领域technical field
本发明涉及一种测量机械加工大型轴工件直径的装置,特别是一种非接触式在线测量大型轴工件直径的装置。The invention relates to a device for measuring the diameter of a machining large shaft workpiece, in particular to a non-contact online measuring device for the diameter of a large shaft workpiece.
背景技术Background technique
随着大型机械设备向着复杂化、精密化方向发展,对于这些设备所需要的大尺寸工件加工质量的检测要求也不断提高。长期以来,国内外对大直径测量进行了大量的研究,但是一直没有理想的方法和仪器出现,尤其在机械加工行业中,大直径尺寸的精密测量尚未得到很好解决。With the development of large-scale mechanical equipment in the direction of complexity and precision, the inspection requirements for the processing quality of large-sized workpieces required by these equipment are also continuously increasing. For a long time, a lot of research has been done on the measurement of large diameters at home and abroad, but there has been no ideal method and instrument, especially in the machining industry, the precision measurement of large diameters has not been well resolved.
对于大外径的测量,目前企业普遍采用的还是游标卡尺、外径千分尺、卡规和π尺等直接测量的方法,检具笨重,操作不便,测量精度低,测量效率不高。相对于直接测量法,间接测量方法在测量范围、仪器的便携式、测量效率等方面具有明显的优势,其中具有代表性的测量方法包括滚轮法、三点法和圆周要素法等。For the measurement of large outer diameters, companies currently generally use direct measurement methods such as vernier calipers, outer micrometers, calipers, and π rulers. The inspection tools are heavy, inconvenient to operate, low in measurement accuracy, and low in efficiency. Compared with the direct measurement method, the indirect measurement method has obvious advantages in terms of measurement range, instrument portability, and measurement efficiency. Representative measurement methods include the roller method, three-point method, and circular element method.
滚轮法测量大直径具有体积小、操作方便、工作效率高以及可在线动态测量等优点,但是测量过程存在滚轮和工件之间相对打滑等诸多误差因素,目前天津大学和合肥工业大学等机构都在从事滚轮法大直径测量的研究,但是为了减小误差影响和进行误差补偿,仪器结构和信号处理过程越来越复杂化。The roller method for measuring large diameters has the advantages of small size, convenient operation, high work efficiency, and online dynamic measurement. However, there are many error factors such as relative slipping between the roller and the workpiece during the measurement process. At present, institutions such as Tianjin University and Hefei University of Technology are doing Engaged in the research of large-diameter measurement by the roller method, but in order to reduce the influence of errors and perform error compensation, the instrument structure and signal processing process are becoming more and more complicated.
三点法的测量原理是根据平面几何中过不在同一直线上的三个点可以唯一确定一个圆的定理,通过间接测量的方法,获得大尺寸孔或轴的直径。目前便携式的产品如瑞士TESA公司生产的ETALON ZEDURAM通用电子测量仪等。西南交通大学目前也在开展这方面的研究,设计开发了一套检具用于火车车轮直径的测量。The measurement principle of the three-point method is based on the theorem that a circle can be uniquely determined through three points that are not on the same straight line in plane geometry, and the diameter of a large-sized hole or shaft is obtained through indirect measurement. At present, portable products such as ETALON ZEDURAM general-purpose electronic measuring instrument produced by Swiss TESA Company, etc. Southwest Jiaotong University is also currently conducting research in this area, and has designed and developed a set of inspection tools for measuring the diameter of train wheels.
圆周要素法直径测量,根据所测量的圆周要素不同可分为:测量圆周的弓高和弦长来获得被测直径;测两切线的夹角和从角顶到工件表面距离来获得被测直径,测固定角度和弦长来获得被测直径等。杨宏宇等基于标记法研制的“智能大直径测量仪”其实质就是采用角度弦长方法;专利“大直径轴盘类工件直径的测量方法及装置”也是采用相同的测量原理。Circumferential element method diameter measurement, according to the measured circumferential elements, can be divided into: measuring the bow height and chord length of the circumference to obtain the measured diameter; measuring the angle between two tangents and the distance from the corner top to the workpiece surface to obtain the measured diameter, Measure the fixed angle and chord length to obtain the measured diameter, etc. The "intelligent large-diameter measuring instrument" developed by Yang Hongyu and others based on the marking method essentially uses the method of angle and chord length; the patent "method and device for measuring the diameter of large-diameter shaft and disk workpieces" also uses the same measurement principle.
在根据圆周要素测量直径的方法中,目前广泛使用的是弓高弦长类测量仪器。目前武汉理工大学、西南交通大学和申请人所在的湖南科技大学等机构积极开展这方面的研究,研究的关键问题在于如何提高弓高弦长法直径测量精度。In the method of measuring the diameter according to the elements of the circumference, the measuring instruments of bow height and chord length are widely used at present. At present, institutions such as Wuhan University of Technology, Southwest Jiaotong University, and Hunan University of Science and Technology where the applicant is located are actively carrying out research in this area. The key issue of the research is how to improve the diameter measurement accuracy of the bow-high-chord method.
发明内容Contents of the invention
本发明的目的在于提供一种设计科学,结构简单,根据被测大轴的尺寸优化确定标定系统大圆盘和小圆盘以及测试系统的弦长值,测试系统的弦长和初始弓高参数进行现场标定。采用激光位移传感器进行弓高测量,计算机自动剔除异常数据的非接触式在线测量大型轴工件直径的装置。The purpose of the present invention is to provide a scientific design, simple structure, according to the size optimization of the measured large shaft to determine the calibration system large disk and small disk and the chord length value of the test system, the chord length and initial bow height parameters of the test system Perform on-site calibration. The laser displacement sensor is used to measure the bow height, and the computer automatically eliminates abnormal data. It is a device for non-contact online measurement of the diameter of large shaft workpieces.
本发明解决其技术问题所采用的技术方案是:测量底座(4)的云台(5)上装有三根导轨(6)由丝杆(7)和螺纹联接,底座(4)上装有立柱(8),立柱(8)上套装有四个导轨滑块(9)并装有锁紧螺丝(10),上下导轨滑块(9)固装的滑板(11)长度一致且装有传感器(12)由锁紧螺杆(13)联接,立柱(8)上中间套装的二个导轨滑块(9)由锁紧螺杆(14)联接装有滑板(11)和传感器(12),中间导轨滑块(9)滑板(11)的长度小于上下滑板(11),传感器(12)与计算机(1)之间由电缆联接,标定底座(15)上固装有对称的支撑座(16),支撑座(16)由旋转轴(17)联接并装有轴承(18),旋转轴(18)中央装有两个直径大小不同的圆盘(19)和小圆盘(20),调速电机(2)由支架(21)联接固定在标定底座(15)上,调速电机(2)机轴与一端旋转轴(17)联接,另一端旋转轴(17)与固定在标定底座(15)支架(21)上的转速编码器(22)联接,测量底座(4)与标定底座(15)之间由大平台(23)联接.测量底座(4)与标定底座(15)能单独使用,由于被测量物的异形或超大,测量底座(4)能安装三角架、曲线架和其它异形架.The technical scheme adopted by the present invention to solve its technical problems is: three guide rails (6) are mounted on the cloud platform (5) of the measurement base (4) and are connected by screw rods (7) and threads, and columns (8) are mounted on the base (4) ), four guide rail sliders (9) are set on the column (8) and locking screws (10) are housed, and the slide plates (11) fixed on the upper and lower guide rail sliders (9) have the same length and are equipped with sensors (12) Connected by the locking screw (13), the two guide rail sliders (9) in the middle of the column (8) are connected by the locking screw (14) to be equipped with a slide plate (11) and a sensor (12), and the middle guide rail slider ( 9) the length of the slide plate (11) is less than the upper and lower slide plates (11), the sensor (12) and the computer (1) are connected by cables, the calibration base (15) is fixed with a symmetrical support seat (16), the support seat ( 16) Connected by the rotating shaft (17) and equipped with bearings (18), the center of the rotating shaft (18) is equipped with two discs (19) and small discs (20) with different diameters, and the speed regulating motor (2) Connected and fixed on the calibration base (15) by the bracket (21), the shaft of the speed-regulating motor (2) is connected with one end of the rotating shaft (17), and the other end of the rotating shaft (17) is fixed on the calibration base (15) bracket (21 ) on the rotational speed encoder (22), the measuring base (4) and the calibration base (15) are connected by a large platform (23). The measurement base (4) and the calibration base (15) can be used alone, because the measured object The special-shaped or super-large, the measuring base (4) can be installed with tripods, curved frames and other special-shaped frames.
本发明的优点是:1,设计科学,结构简单。根据被测大轴的尺寸优化确定标定系统大圆盘和小圆盘以及测试系统的弦长值,测试系统的弦长和初始弓高参数进行现场标定。采用3只高精度激光位移传感器的对称布置进行弓高的相对测量,降低了测量时测试系统和被测大轴之间的位置精度要求。2,数据取样多样化,集中处理数据误差小。通过测量过程中传感器的读数调整上下传感器的对称性,通过测量数据的处理,自动剔除异常数据。标定和测量过程自动进行整圆周内均匀采样并取平均的方法减小随机测量误差和圆度误差对测量结果的影响。3,制作费用低,运营成本小。The advantages of the present invention are: 1. Scientific design and simple structure. According to the size optimization of the measured large shaft, the large disc and small disc of the calibration system and the chord length value of the test system are determined, and the chord length and initial bow height parameters of the test system are calibrated on site. The symmetrical arrangement of three high-precision laser displacement sensors is used for the relative measurement of the bow height, which reduces the position accuracy requirements between the test system and the measured large axis during measurement. 2. The data sampling is diversified, and the error of centralized processing data is small. Adjust the symmetry of the upper and lower sensors through the readings of the sensors during the measurement process, and automatically eliminate abnormal data through the processing of the measurement data. The calibration and measurement process automatically samples uniformly within the entire circumference and takes the average method to reduce the influence of random measurement errors and roundness errors on the measurement results. 3. The production cost is low and the operation cost is small.
附图说明Description of drawings
附图1本发明测量底座和标定底座结构图Accompanying drawing 1 present invention measuring base and calibration base structural diagram
附图2本发明测量底座结构示意图Accompanying
附图3本发明标定底座结构示意图Accompanying drawing 3 is the structural schematic diagram of the calibration base of the present invention
下面根据附图对本发明作进一步详细说明:The present invention will be described in further detail below according to accompanying drawing:
具体实施方式Detailed ways
本发明可从图1、图2和图3可知,本发明测量底座(4)的云台(5)上装有三根导轨(6)由丝杆(7)和螺纹联接,底座(4)上装有立柱(8),立柱(8)上套装有四个导轨滑块(9)并装有锁紧螺丝(10),上下导轨滑块(9)固装的滑板(11)长度一致且装有传感器(12)由锁紧螺杆(13)联接,立柱(8)上中间套装的二个导轨滑块(9)由锁紧螺杆(14)联接装有滑板(11)和传感器(12),中间导轨滑块(9)滑板(11)的长度小于上下滑板(11),传感器(12)与计算机(1)之间由电缆联接,标定底座(15)上固装有对称的支撑座(16),支撑座(16)由旋转轴(17)联接并装有轴承(18),旋转轴(18)中央装有两个直径大小不同的圆盘(19)和小圆盘(20),调速电机(2)由支架(21)联接固定在标定底座(15)上,调速电机(2)机轴与一端旋转轴(17)联接,另一端旋转轴(17)与固定在标定底座(15)支架(21)上的转速编码器(22)联接,测量底座(4)与标定底座(15)之间由大平台(23)联接.立柱(8)中间滑板(11)传感器(12)采用二个导轨滑块(9),作用是当中间下滑板(11)上的传感器(12)对被测物件已确立方位和距离,与之联接在一起的导轨滑块(9)便可通过锁紧螺杆(14)对下导轨滑块(9)滑板(11)传感器(12)进行修正和微调,保证数据可靠和精确.测量底座(4)与标定底座(15)能单独使用,由于被测量物的异形或超大,测量底座(4)能安装三角架、曲线架和其它异形架.首先根据被测大轴的直径,综合考虑测试系统的空间尺寸和弓高测量误差对直径测量结果的传递关系,合理选择弦长参数,一般说来,对于直径为D的大轴,弦长(L)选择L=2D/3左右比较合适.如果大型轴工件超大或异形,测量底座(4)可加装加长三角架和其它支撑架,单独使用.The present invention can know from Fig. 1, Fig. 2 and Fig. 3, three guide rails (6) are housed on the cloud platform (5) of measuring base (4) of the present invention and are connected by screw mandrel (7) and screw thread, and base (4) is equipped with Upright column (8), four guide rail sliders (9) are set on the upright column (8) and locking screws (10) are housed, and the slide plates (11) fixed on the upper and lower guide rail sliders (9) are of the same length and equipped with sensors (12) Connected by the locking screw (13), the two guide rail sliders (9) in the middle of the column (8) are connected by the locking screw (14) and equipped with a slide plate (11) and sensor (12), and the middle guide rail The length of slide block (9) slide plate (11) is less than upper and lower slide plate (11), is connected by cable between sensor (12) and computer (1), is equipped with symmetrical support base (16) on the calibration base (15), Support seat (16) is connected by rotating shaft (17) and bearing (18) is housed, and rotating shaft (18) center is housed with two discs (19) and small discs (20) with different diameters, and the speed-regulating motor (2) Connected and fixed on the calibration base (15) by the bracket (21), the shaft of the speed-regulating motor (2) is connected with one end of the rotating shaft (17), and the other end of the rotating shaft (17) is fixed on the calibration base (15) The speed encoder (22) on the bracket (21) is connected, and the measuring base (4) and the calibration base (15) are connected by a large platform (23). The function of the guide rail slider (9) is that when the sensor (12) on the middle lower plate (11) has established the orientation and distance to the object to be measured, the guide rail slider (9) connected with it can pass through the locking screw (14) Correct and fine-tune the lower rail slider (9), slide plate (11) and sensor (12) to ensure reliable and accurate data. The measurement base (4) and the calibration base (15) can be used alone. Irregular or super large, the measuring base (4) can be installed with tripods, curved frames and other special-shaped frames. First, according to the diameter of the measured large shaft, comprehensively consider the space size of the test system and the transmission relationship between the bow height measurement error and the diameter measurement result, Reasonably choose the chord length parameter. Generally speaking, for a large shaft with a diameter of D, it is more appropriate to choose the chord length (L) of about L=2D/3. If the large shaft workpiece is oversized or shaped, the measuring base (4) can be installed and lengthened Tripods and other supports, used separately.
根据被测大轴的直径D、弦长L和激光位移传感器(12)的测量范围,确定标定大圆盘的大致尺寸D1=D+Δ和D2=D-Δ。在传感器(12)测量范围允许的前提下,Δ值尽可能取大一些。由于大圆盘的直径值将在三坐标测量机上进行测量标定,所以对其尺寸公差无需特别要求,另外对测量装置初始弓高和弦长参数的标定采用旋转一整周取多次标定结果的平均值,所以对圆盘的圆度误差也无需严格要求。According to the diameter D of the measured large shaft, the chord length L and the measurement range of the laser displacement sensor (12), the approximate dimensions D 1 =D+Δ and D 2 =D-Δ of the calibration large disk are determined. Under the premise that the measurement range of the sensor (12) allows, the value of Δ is as large as possible. Since the diameter value of the large disk will be measured and calibrated on the three-coordinate measuring machine, there is no special requirement for its dimensional tolerance. In addition, the initial bow height and chord length parameters of the measuring device are calibrated by taking the average of multiple calibration results after rotating a full circle. value, so there is no strict requirement on the roundness error of the disc.
在三坐标测量机上分别对大圆盘(19)和小圆盘(20)的两个外圆一周进行密集均匀测量采样得到N个圆周上点的坐标值,将采样得到的坐标值序列按照奇偶序号分成两个等长的序列,采用频域分析方法估计圆周的主要谐波分量和噪声强度σ,根据圆周轮廓的主要谐波分量值重构轮廓,根据σ给出轮廓合理的公差范围,超差的为异常数据予以剔除,最后采用最小二乘法计算圆盘直径D1和D2。当圆盘轮廓主要谐波分量不大于50微米,且坐标测量误差不超过5个微米,在圆周上均匀采样256点时,仿真结果表明,直径标定误差小于1微米。On the three-coordinate measuring machine, the two outer circles of the large disk (19) and the small disk (20) are densely and uniformly measured and sampled to obtain the coordinate values of the points on the N circles, and the sequence of coordinate values obtained by sampling is according to the parity The serial number is divided into two sequences of equal length, and the frequency domain analysis method is used to estimate the main harmonic component and noise intensity σ of the circle, and the contour is reconstructed according to the main harmonic component value of the circle contour, and the reasonable tolerance range of the contour is given according to σ, exceeding The bad ones are abnormal data to be eliminated, and finally the least square method is used to calculate the disc diameters D 1 and D 2 . When the main harmonic component of the disc profile is not greater than 50 microns, and the coordinate measurement error is not more than 5 microns, and 256 points are evenly sampled on the circumference, the simulation results show that the diameter calibration error is less than 1 micron.
测量系统弦长和初始弓高参数的标定如附图1所示。首先根据选择的弦长参数移动导轨滑块(9),上、下传感器(12)光线之间的距离大致等于所选择的弦长;中间传感器(12)光线大致经过测量轴的轴心;将测量装置靠近标定圆盘,调节上、中、下滑板(11)以确保对大圆盘(19)和小圆盘(20)的测量在传感器(12)的测量范围之内,锁紧滑板(11),开动电机(2),调节转速并用编码器(22)运行转速测量,保证和待测大轴的转速基本一致。The calibration of the measurement system’s chord length and initial bow height parameters is shown in Figure 1. First move the guide rail slider (9) according to the selected chord length parameter, the distance between the upper and lower sensor (12) light is roughly equal to the selected chord length; the middle sensor (12) light roughly passes through the axis of the measuring shaft; The measuring device is close to the calibration disc, adjust the upper, middle and lower plates (11) to ensure that the measurement of the large disc (19) and the small disc (20) is within the measurement range of the sensor (12), lock the slide plate ( 11), start the motor (2), adjust the speed and measure the speed with the encoder (22), to ensure that it is basically consistent with the speed of the large shaft to be measured.
设圆盘轴心到上传感器(12)光线的距离为l1,到下传感器(12)光线的距离为l3,则定义上下传感器(12)光线不对称误差为|l1-l3|。设测量大圆盘(19)时上、下传感器(12)读数为S11和S13,测量小圆盘(20)时上、下传感器(12)读数为S21和S23,保证传感器(12)高度在测量两圆时变化微小,则当S11-S21=S13-S23时表明标定过程上、下传感器(12)光线已对称,根据这一现象,调整其中的一个传感器(12)高度,直到S11-S21=S13-S23。然后上下调节中间导轨滑块(9),当传感器(12)读数最小时,表明中间传感器(12)光线已对中,锁紧各导轨滑块(9)。上述调节过程中传感器(12)读数都是采用旋转一周多次采样取均值,以减低圆盘圆度误差对对称调整和对中调整的影响。当测试系统调节完毕后,即可实施对测试系统弦长和初始弓高参数的标定。设大圆盘(19)的弓高为初始弓高,记作H,弦长记作L。将测量系统靠近大圆盘(19),获得三传感器(12)一周的平均读数分别为:S11、S12和S13;同样的将测量系统靠近小圆盘(20),获得平均读数:S21、S22和S23。三个传感器(12)在一整周内采样N点,对于这N点数据采取与三坐标测量圆盘直径类似的方法进行数据处理,剔除异常值。Let l 1 be the distance from the disk axis to the light of the upper sensor (12), and l 3 the distance to the light of the lower sensor (12), then define the asymmetric error of the light of the upper and lower sensors (12) as |l 1 -l 3 | . Assuming that the readings of the upper and lower sensors (12) are S 11 and S 13 when measuring the large disk (19), and the readings of the upper and lower sensors (12) are S 21 and S 23 when measuring the small disk (20), it is guaranteed that the sensor ( 12) The height changes slightly when measuring the two circles, then when S 11 -S 21 =S 13 -S 23 , it indicates that the light rays of the upper and lower sensors (12) have been symmetrical during the calibration process. According to this phenomenon, adjust one of the sensors ( 12) Height until S 11 -S 21 =S 13 -S 23 . Then adjust the middle guide rail slider (9) up and down, when the reading of the sensor (12) is minimum, it shows that the light of the middle sensor (12) is centered, and each guide rail slider (9) is locked. In the above adjustment process, the readings of the sensor (12) are averaged by taking multiple samples during one rotation, so as to reduce the impact of disc roundness errors on the symmetry adjustment and centering adjustment. After the test system is adjusted, the calibration of the parameters of the chord length and initial bow height of the test system can be implemented. Let the bow height of the large disc (19) be the initial bow height, denoted as H, and the chord length denoted as L. Put the measuring system close to the big disc (19) to obtain the average readings of the three sensors (12) for one week: S 11 , S 12 and S 13 ; similarly place the measuring system close to the small disc (20) to obtain the average readings: S 21 , S 22 and S 23 . The three sensors (12) sample N points in a whole week, and for the N point data, a method similar to that of measuring the diameter of a disk with three coordinates is used for data processing, and abnormal values are eliminated.
记 则大圆盘(19)和小圆盘(20)的弓高差为:ΔH=S′2-S′1,则小圆盘(20)的弓高为H+ΔH。remember Then the bow height difference between the big disk (19) and the small disk (20) is: ΔH=S′ 2 −S′ 1 , and the bow height of the small disk (20) is H+ΔH.
构造方程:Construction equation:
已知大圆盘(19)、小圆盘(20)和ΔH,解上面的方程即可求得L和H,存储参数H、L和参数S11、S12,S13,完成测试装置的标定。Given the large disk (19), small disk (20) and ΔH, L and H can be obtained by solving the above equation, and the parameters H, L and parameters S 11 , S 12 , S 13 are stored to complete the test device. calibration.
测试装置一旦标定完毕,3只传感器(12)的相对位置固定,不可再调节。在对待测大轴测量时,只需将测试系统安装在三脚架上,并调节测量底座(4)上的丝杠(7)螺母,保证上下传感器(12)对称要求,即保证S11-S31=S13-S33即可。测量过程与标定环节测量大圆盘(19)过程的数据处理方式完全相同,得到三个数值S31、S32和S33,则被测大轴的弓高为:则被测大轴的直径D为:Once the test device is calibrated, the relative positions of the three sensors (12) are fixed and cannot be adjusted. When measuring the large shaft to be tested, it is only necessary to install the test system on the tripod, and adjust the screw (7) nut on the measurement base (4) to ensure the symmetrical requirements of the upper and lower sensors (12), that is, to ensure S 11 -S 31 =S 13 -S 33 is enough. The measurement process is exactly the same as the data processing method in the process of measuring the large disc (19) in the calibration link, and three values S 31 , S 32 and S 33 are obtained, then the bow height of the measured large shaft is: Then the diameter D of the major shaft to be measured is:
测量结果的精度分析将在后节结合实施实例进行分析。The accuracy analysis of the measurement results will be analyzed in the following section with an implementation example.
实施例Example
要求进行直径为505mm大轴尺寸的测量,选择LK-G30激光位移传感器(12),其工作距离为30mm、测量范围为-5mm-5mm,与ML10激光干涉仪进行比对,其测量精度在1μm左右。选择弦长为400mm,标定大圆盘的直径分别取508mm和500mm。It is required to measure the size of the large axis with a diameter of 505mm, and the LK-G30 laser displacement sensor (12) is selected. The working distance is 30mm, and the measurement range is -5mm-5mm. Compared with the ML10 laser interferometer, the measurement accuracy is 1μm about. The chord length is selected as 400mm, and the diameters of the calibrated large discs are respectively taken as 508mm and 500mm.
一个大圆盘上加工三种尺寸的外圆盘,在三坐标测量机上进行标定,每个尺寸的圆上分别测量上、中、下三个截面,得到三个外圆的直径和圆度如下表所示:Three sizes of outer discs are processed on a large disc, and calibrated on a three-coordinate measuring machine. The upper, middle and lower sections of each size of the circle are measured respectively, and the diameters and roundness of the three outer circles are obtained as follows As shown in the table:
标定时,首先中间传感器(12)大致对中即可,锁紧,固定下传感器(12)的位置,测量标定大圆盘(19),得到读数S11,S12和S13,在同样的高度位置测量标定小圆盘(20),得到读数S21、S22和S23;记ΔS1=S11-S21;ΔS3=S13-S23;若ΔS1=ΔS3,则表明上、下传感器(12)已对称,否则需调整上传感器(12)的位置,直到ΔS1=ΔS3。以弦长400mm、标定大轴直径500mm和508mm为例,当不对称误差为4mm时,ΔS1和ΔS3会相差0.23mm左右;当不对称误差为2mm时,ΔS1和ΔS3会相差0.11mm左右,位移传感器(12)发现这么大的差值是没有任何问题的。实际标定过程控制ΔS1和ΔS3相差在20μm以内,足以保证标定时的不对称误差要求。When calibrating, firstly, the middle sensor (12) can be roughly centered, locked, and the position of the lower sensor (12) is fixed, and the calibration disc (19) is measured to obtain the readings S 11 , S 12 and S 13 . Calibrate the small disc (20) for height position measurement to obtain readings S 21 , S 22 and S 23 ; record ΔS 1 =S 11 -S 21 ; ΔS 3 =S 13 -S 23 ; if ΔS 1 =ΔS 3 , it indicates The upper and lower sensors (12) are symmetrical, otherwise the position of the upper sensor (12) needs to be adjusted until ΔS 1 =ΔS 3 . Taking the chord length of 400mm and the calibrated major shaft diameters of 500mm and 508mm as an example, when the asymmetry error is 4mm, the difference between ΔS 1 and ΔS 3 will be about 0.23mm; when the asymmetry error is 2mm, the difference between ΔS 1 and ΔS 3 will be 0.11 About mm, the displacement sensor (12) finds that there is no problem with such a large difference. In the actual calibration process, the difference between ΔS 1 and ΔS 3 is controlled within 20 μm, which is enough to ensure the asymmetrical error requirement during calibration.
当用标定好的测试系统对待测大轴进行测量时,调整测量底座(4)丝杠(7)螺母直到控制ΔS1和ΔS2相差在20μm以内,足以保证测量时传感器(12)位置整体偏移小于0.02mm。When using the calibrated test system to measure the large shaft to be tested, adjust the measuring base (4) lead screw (7) nut until the difference between ΔS 1 and ΔS 2 is controlled within 20 μm, which is enough to ensure that the overall position of the sensor (12) is biased during measurement. The shift is less than 0.02mm.
假设设备调整完毕后,测量标定圆1时,上、下传感器(12)不对称误差服从3σ=4mm的正态分布,中间传感器(12)不对中误差服从3σ=5mm的正态分布;测量标定圆2时,存在传感器(12)整体位置相对测量圆1时3σ=0.02mm的上、下随机偏移;对待测大轴测量时,传感系统整体位置也存在3σ=0.02mm的上下整体偏移。Assuming that after the equipment is adjusted, when measuring the calibration circle 1, the asymmetric error of the upper and lower sensors (12) obeys the normal distribution of 3σ=4mm, and the misalignment error of the middle sensor (12) obeys the normal distribution of 3σ=5mm; In
仿真计算结果表明,当控制标定和测量时上、下传感器(12)不对称误差、中间传感器(12)不对中误差、标定和测量时传感器(12)位置上下整体相对偏移控制在上述范围时,对待测大轴的直径测量误差小于1.5μm。The simulation calculation results show that when the asymmetric error of the upper and lower sensors (12) is controlled during calibration and measurement, the misalignment error of the middle sensor (12), and the overall relative offset of the upper and lower positions of the sensor (12) during calibration and measurement is controlled within the above range , the diameter measurement error of the large shaft to be tested is less than 1.5 μm.
通过上面的分析可知,上面的测量条件通过简单调节很容易得到满足。对测量装置的低要求得益于测量过程采用相对弓高测量、上下传感器的对称布置等技术手段的实施。It can be seen from the above analysis that the above measurement conditions can be easily satisfied through simple adjustment. The low requirements on the measuring device benefit from the implementation of technical means such as relative bow height measurement and symmetrical arrangement of upper and lower sensors in the measurement process.
标定圆尺寸的标定误差、传感器(12)光线不共面、不平行等对测量结果也有一定的影响,在此不一一说明了。由于采用一周多次采样求均值的办法,极大的降低了传感器(12)随机测量误差、轮廓圆度、旋转过程中的轴跳动等对测量结果的影响。Calibration errors of the calibration circle size, non-coplanar and non-parallel light rays of the sensor (12) also have a certain influence on the measurement results, which will not be explained one by one here. Due to the method of obtaining the average value by sampling multiple times a week, the influence of random measurement errors of the sensor (12), roundness of the contour, and shaft runout during the rotation process on the measurement results is greatly reduced.
采用圆1和圆3对测试系统进行标定,然后对圆1、圆2和圆3分别在中间截面位置进行测量,按上表分别取直径为499.789mm、503.601mm和507.751mm。标定完成后,分别对三个直径进行20次的测量,对圆1和圆3的直径测量结果偏差小于±3μm,对圆2的直径测量结果偏差大一些,在±4μm左右,可以看出测量系统可以达到5μm的测量精度。Use circle 1 and circle 3 to calibrate the test system, and then measure circle 1,
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