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CN101699329A - Electrowetting technology-based light fluid filter - Google Patents

Electrowetting technology-based light fluid filter Download PDF

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Publication number
CN101699329A
CN101699329A CN200910174856A CN200910174856A CN101699329A CN 101699329 A CN101699329 A CN 101699329A CN 200910174856 A CN200910174856 A CN 200910174856A CN 200910174856 A CN200910174856 A CN 200910174856A CN 101699329 A CN101699329 A CN 101699329A
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glass plate
droplet
insulating layer
layer
filter
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王怀宝
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Wuxi Institute of Technology
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Wuxi Institute of Technology
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Abstract

本发明公开了基于电润湿技术的光流体滤波器由液滴驱动单元和法布里-珀罗滤波单元组成;其中液滴驱动单元由控制电极、接地电极、底部玻璃板、顶部玻璃板、液体层、绝缘层组成,其中绝缘层和顶部玻璃板之间间隔形成疏水层,控制电极根据液滴的运动状态加上50V左右的驱动电压,表面张力将驱动液滴运动至预定位置,液滴和疏水层间的接触角和不同侧的表面张力通过不同控制电极的电压来控制,随着施加电压V的改变使液体在绝缘层表面接触角发生改变,从而得到不同的滤波波形,通过与第一级液滴滤波单元效果相配合,达到粗略-精细滤波相结合的两级滤波效果,本发明大大提高了调谐范围和带宽,具有灵活性和可控性好、设计合理、操作简便等特点。

Figure 200910174856

The invention discloses that an optofluidic filter based on electrowetting technology is composed of a droplet drive unit and a Fabry-Perot filter unit; wherein the droplet drive unit is composed of a control electrode, a ground electrode, a bottom glass plate, a top glass plate, Composed of a liquid layer and an insulating layer, a hydrophobic layer is formed between the insulating layer and the top glass plate, and the control electrode applies a driving voltage of about 50V according to the movement state of the droplet, and the surface tension will drive the droplet to move to a predetermined position. The contact angle between the hydrophobic layer and the surface tension on different sides is controlled by the voltage of different control electrodes. With the change of the applied voltage V, the contact angle of the liquid on the surface of the insulating layer changes, thereby obtaining different filter waveforms. The effect of the first-stage droplet filtering unit is coordinated to achieve the two-stage filtering effect of the combination of coarse and fine filtering. The invention greatly improves the tuning range and bandwidth, and has the characteristics of good flexibility and controllability, reasonable design, and easy operation.

Figure 200910174856

Description

Light fluid wave filter based on electrowetting technology
Technical field
The present invention relates to a kind of light fluid wave filter, relate in particular to light fluid wave filter based on electrowetting technology.
Background technology
In the prior art field, tunable optical filter is in modern optical communication systems, sensor network and biomedical imaging field all play an important role, (λ>3um) has tunable filtering performance preferably to traditional fabry-perot filter in mid and far infrared light district, but at visible region, adjustable resonant cavity size will reduce (w=200nm~300nm) along with reducing of wavelength, because the Van der Waals in the micro devices will make resonant cavity gross distortion and even absorption mutually under this size, traditional fabry-perot filter will be difficult to make and operate as normal, can't realize the change and the controlled motion orientation and velocity of drop state.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, provide a kind of Electrowetting that utilizes to realize electric tunable in conjunction with fabry-perot filter, improve tuning range and bandwidth greatly, guaranteed to comprise the entire device light fluid wave filter that dwindles dimensionally of wave filter.
For realizing above technical scheme, the technical scheme that patent of the present invention adopts is:
Light fluid wave filter based on electrowetting technology is made up of drop driver element and Fabry-Perot filter unit; Wherein the drop driver element places between Fabry-Perot filter unit and the lens unit.
Described drop driver element is made up of control electrode, ground-electrode, bottom glass plate, top glass plate, liquid level, insulation course, is bottom glass plate, control electrode, insulation course, liquid level, ground-electrode, top glass plate from bottom to up successively; Wherein liquid level places between top glass plate and the insulation course, wherein form hydrophobic layer between insulation course and the top glass plate at interval, control electrode adds driving voltage about 50V according to the motion state of drop, surface tension will drive liquid drop movement to the precalculated position, contact angle between drop and hydrophobic layer is controlled by the voltage of different control electrodes with the surface tension of homonymy not, change at the surface of insulating layer contact angle along with the change that applies voltage V makes liquid, thereby obtain different filtering waveforms.
Described liquid level is made up of the different colours drop.
The present invention is by electric moistening technology, utilize coloured drop as the filtering material, to use the various combination of different colours drop to place light path to constitute the filter effect of first order filtering system, utilize the contact stress of liquid and hydrophobic solid layer and surface tension as driving, contact angle between drop and hydrophobic layer is controlled by the voltage of different control electrodes with the surface tension of homonymy not, the Fabry-Perot filter unit places the lower end of drop driver element, the high order wavelength that utilizes all to leach, formation leaches the peak sequence, match with first order drop filter unit effect again, reach the two-stage filter effect that rough one meticulous filtering combines, combination by drop filter unit and Fabry-Perot filter unit, realize electric tunable, improved tuning range and bandwidth greatly, it is good to have dirigibility and controllability, reasonable in design, characteristics such as easy and simple to handle.
Description of drawings
Fig. 1 is the exemplary applications synoptic diagram of the present invention in medical imaging;
Fig. 2 is a drop control system schematic diagram of the present invention (side view);
Fig. 3 is drop control system movement effects figure;
Fig. 4 is the synoptic diagram that changes along with the change contact angle θ that applies voltage V;
Fig. 5 is the absorption spectrum and the stack absorption spectrum of different dyes;
Embodiment:
As shown in Figure 1, form by drop driver element 1 and Fabry-Perot filter unit 2 based on the light fluid wave filter of electrowetting technology; Wherein drop driver element 1 places between Fabry-Perot filter unit 2 and the lens unit.
As shown in Figure 2, wherein drop driver element 1 is made up of control electrode 3, ground-electrode 4, bottom glass plate 5, top glass plate 6, liquid level 7, insulation course 8, wherein form hydrophobic layer 9 between insulation course 8 and the top glass plate 6 at interval, drop and the contact angle of 9 of hydrophobic layers are controlled by the voltage of different control electrodes 3 with the surface tension of homonymy not, by adding driving voltage about 50V according to the motion state of drop between control electrode, as shown in Figure 3, surface tension will drive liquid drop movement to position that we want.
As shown in Figure 4, utilize the contact stress of liquid and hydrophobic solid layer and surface tension as driving, contact angle between drop and hydrophobic layer is controlled by the voltage of different control electrodes with the surface tension of homonymy not, along with the change that applies voltage V drop and hydrophobic layer contact angle θ is changed.
As shown in Figure 5, drop driver element as first order filtering system will be with coloured drop as the filtering material, the optical absorption spectra broad of liquid dyes, thereby needing what drop driver element stack to reach suitable bandwidth and to see through/absorptance, Fig. 5 has shown the absorption spectrum and the stack spectrum of several different materials.M, L, Br, K, O represent different dyestuffs, and 1 is the absorption spectrum after the stack.When medical science fluorescence imaging endoscope requires fluorescence signal to detect by filtering, the entire device that guarantees to comprise wave filter dwindling dimensionally.
The present invention realizes electric tunable by the combination of drop filter unit and F-P filtering unit, has greatly improved tuning range and bandwidth, has the characteristics such as flexibility and controllability are good, reasonable in design, easy and simple to handle.

Claims (3)

1.基于电润湿技术的光流体滤波器,其特征在于:所述的光流体滤波器由液滴驱动单元和法布里-珀罗滤波单元组成。1. An optofluidic filter based on electrowetting technology, characterized in that: the optofluidic filter is composed of a droplet drive unit and a Fabry-Perot filter unit. 2.根据权利要求1所述的基于电润湿技术的光流体滤波器,其特征在于:所述的液滴驱动单元由控制电极、接地电极、底部玻璃板、顶部玻璃板、液体层、绝缘层组成,从下至上依次是底部玻璃板、控制电极、绝缘层、液体层、接地电极、顶部玻璃板;其中液体层置于顶部玻璃板和绝缘层之间,其中绝缘层和顶部玻璃板之间间隔形成疏水层。2. The optofluidic filter based on electrowetting technology according to claim 1, characterized in that: the droplet driving unit is composed of a control electrode, a ground electrode, a bottom glass plate, a top glass plate, a liquid layer, an insulating Layer composition, from bottom to top is the bottom glass plate, control electrode, insulating layer, liquid layer, ground electrode, top glass plate; the liquid layer is placed between the top glass plate and the insulating layer, and the insulating layer and the top glass plate The spacers form a hydrophobic layer. 3.根据权利要求1所述的基于电润湿技术的光流体滤波器,其特征在于:所述的液体层由不同颜色液滴组成。3 . The optofluidic filter based on electrowetting technology according to claim 1 , wherein the liquid layer is composed of liquid droplets of different colors. 4 .
CN200910174856A 2009-10-19 2009-10-19 Electrowetting technology-based light fluid filter Pending CN101699329A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101865928A (en) * 2010-05-06 2010-10-20 大连理工大学 A method for manipulating micro-droplets on superhydrophobic surfaces based on electric field interaction
CN102095770A (en) * 2010-11-22 2011-06-15 复旦大学 Electrochemical sensor chip based on digital microfluidic technology
CN104375266A (en) * 2014-11-25 2015-02-25 四川大学 Light switcher based on droplet load light filter
CN108080041A (en) * 2016-11-21 2018-05-29 胡丛余 Minisize fluid actuator
CN109633889A (en) * 2018-11-30 2019-04-16 重庆秉为科技有限公司 Electric moistening display apparatus based on interference phenomenon

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101865928A (en) * 2010-05-06 2010-10-20 大连理工大学 A method for manipulating micro-droplets on superhydrophobic surfaces based on electric field interaction
CN101865928B (en) * 2010-05-06 2012-07-18 大连理工大学 Super-hydrophobic surface micro-droplet operation and control method based on electric field effect
CN102095770A (en) * 2010-11-22 2011-06-15 复旦大学 Electrochemical sensor chip based on digital microfluidic technology
CN104375266A (en) * 2014-11-25 2015-02-25 四川大学 Light switcher based on droplet load light filter
CN108080041A (en) * 2016-11-21 2018-05-29 胡丛余 Minisize fluid actuator
CN108080041B (en) * 2016-11-21 2023-10-20 胡丛余 Micro fluid actuator
CN109633889A (en) * 2018-11-30 2019-04-16 重庆秉为科技有限公司 Electric moistening display apparatus based on interference phenomenon

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Application publication date: 20100428