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CN101676704A - distortion tester - Google Patents

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Publication number
CN101676704A
CN101676704A CN200810151034A CN200810151034A CN101676704A CN 101676704 A CN101676704 A CN 101676704A CN 200810151034 A CN200810151034 A CN 200810151034A CN 200810151034 A CN200810151034 A CN 200810151034A CN 101676704 A CN101676704 A CN 101676704A
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Prior art keywords
distortion
turntable
light source
imaging system
tester
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CN101676704B (en
Inventor
赵建科
张周锋
周艳
王�锋
王虎
昌明
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Shaanxi Optoelectronic Integrated Circuit Pilot Technology Research Institute Co ltd
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

本发明涉及一种畸变测试仪,包括转台,该测试仪还包括光源以及显微成像系统;光源以及显微成像系统处于同一光轴上并置于转台两侧。本发明提供了一种测量精度高、效率高、结构稳定且功能可以扩展的畸变测试仪。

Figure 200810151034

The invention relates to a distortion tester, which includes a turntable. The tester also includes a light source and a microscopic imaging system. The light source and the microscopic imaging system are on the same optical axis and placed on both sides of the turntable. The invention provides a distortion tester with high measurement precision, high efficiency, stable structure and expandable functions.

Figure 200810151034

Description

A kind of distortion tester
Technical field
The present invention relates to field of optical systems, relate in particular to a kind of distortion tester.
Background technology
Any optical system all is difficult to accomplish to improve the requirement of imaging, and just aberration varies in size.Optical system exists distortion will directly influence the geometric position precision of imageable target.Therefore, for the precision measurement camera, as airborne survey camera, trajectory measurement camera, CCD digital camera etc., the size of distortion has a crucial factor to the camera measuring accuracy.In order to obtain geometric position image accurately, camera not only will be proofreaied and correct distortion when carrying out optical design as far as possible, and will need carry out accurate amount of distortion to actual optical system and measure, so that modified value in use is provided.
The method of present domestic detection distortion all adopts the method (the target pattern plate is measured distortion) of regulation in " GJB501B-2004 ", promptly at tested optical system image planes place installation code waffle slab, and optical system is fixed on the precise rotating platform centre of gyration, through the camera lens imaging, and write down the angle of each image height correspondence with turntable at tested optical system object space telescopic observation waffle slab.The angle value of image height of measuring according to telescope and turntable record calculates tested optical system distortion.Proving installation as shown in Figure 1.There is following shortcoming in this method:
1, measuring accuracy is low.Adopt the standard waffle slab in the method, its waffle slab debug error and groove error own greatly reduces measuring accuracy; Because human eye is directly observed, the difference between the individuality causes pointing error simultaneously; The existence of factor such as precise rotating platform angular error makes the measuring accuracy of distortion can only arrive ± 3 μ m in addition.
2, Installation and Debugging work complexity, structural instability, testing efficiency is low.Before the test, at first will be with the center of waffle slab and the optical axis coincidence of tested object lens, the work of debuging is wasted time and energy, and need tester at least 3 just can finish the whole work of debuging to 5 cooperatings, and it is poor to have debug rear stability, and the duplicate measurements precision is low.
3, the system under test (SUT) service band is had relatively high expectations.Because this method mainly aims at measurement by human eye, only is applicable to the visible light wave range optical system is tested.
4, the test data record is wasted time and energy.The all hand-kepts artificially of all data of the method are imported computing machine with data more at last and are handled, and some unnecessary gross errors appear in the method for this record and deal with data unavoidably.
Summary of the invention
In order to solve the above-mentioned technical matters that exists in the background technology, the invention provides the distortion tester that a kind of measuring accuracy height, efficient height, Stability Analysis of Structures and function can be expanded.
Technical solution of the present invention is: the invention provides a kind of distortion tester, comprise turntable, its special character is: this tester also comprises light source and micro imaging system; Described light source and micro imaging system are on the same optical axis and place the turntable both sides.
Above-mentioned tester also comprises parallel light tube; Described parallel light tube places between light source and the turntable and with light source and micro imaging system and places on the same optical axis.
Above-mentioned tester also comprises measuring motion; Described micro imaging system is fixed on the measuring motion.
Above-mentioned measuring motion comprises laser interferometer, catoptron and bidimensional guide rail; Described catoptron is fixed in the cross slide way side of bidimensional guide rail; Described catoptron normal is perpendicular to optical axis; Described laser interferometer outgoing beam vertical reflector; Described laser interferometer and bidimensional guide rail are fixed on the measuring motion.
Above-mentioned turntable is a high precision digital display turntable.
Above-mentioned high precision digital display turntable is to adopt 27 shaft-position encoders and resolution can reach 0.01 " high precision digital display turntable.
Above-mentioned micro imaging system is a CCD micrometering system.
Above-mentioned CCD micrometering system is the high resolving power micrometering system that resolution can reach 0.1 μ m.
Above-mentioned light source is LASER Light Source or pointolite.
Advantage of the present invention is:
1, measuring accuracy height.The precise rotating platform that the present invention adopts, this precise rotating platform precision height, stable performance can realize accurate location, the turntable resultnat accuracy is better than 0.7 "; The laser interferometer that is adopted in measuring motion simultaneously utilizes laser instrument as test beams, realizes the precision measurement of size, and precision can reach 10nm; Add that the image that CCD is gathered carries out histogram equalization, digital filtering, the edge strengthens, and optimal threshold selects scheduling algorithm to make image remove noise, makes target more clear.Adopt inferior pixel subdivide technology simultaneously, the corresponding amplification of video in window shows, can obtain the resolution of 1/10 pixel, adopts centroid algorithm that target is carried out interpretation.In conjunction with the magnification of CCD micrometering system, the image interpretation precision can reach 0.02 μ m, and absolute distortion measurement precision of the present invention can reach 0.2 μ m, measuring accuracy height.
2, Installation and Debugging working automation severe height, the efficiency of measurement height.The rotation of used precise rotating platform can be controlled by computing machine among the present invention, the control accuracy height, and motion is steadily; And the present invention has replaced human eye with CCD micrometering system, has improved measuring accuracy and efficiency of measurement greatly, makes Measuring Time bring up to 0.5 hour from original 2 hours, and the tester reduces to two people from original three to five and can finish.
3, Stability Analysis of Structures, duplicate measurements precision height.The present invention adopts parallel light tube that point target is provided, and the turntable motion steadily, and CCD micrometering system installs stable, makes the duplicate measurements precision obviously improve.
4, tested optical system service band is no longer limited.CCD micrometering system among the present invention, optical system adopts the design of flat field apochromatism, the resolution height, picture element is excellent and possess the higher effective magnification, and spectral response can cover from the visible light to the near infrared, has avoided the restriction to tested optical system service band.
5, convenient data processing is quick.The present invention can be stored in the computing machine the valid data that produce in the test process by relevant debugging and image interpretation and test analysis software.Image interpretation software not only can provide the coordinate position of target in real time, and has added the image memory function in software, has been carried out the analysis of test data afterwards.Distortion data processing and analysis software can directly read the data of preserving in the computing machine and carry out analytical calculation, needn't import computing machine again and carry out analytical calculation by manually carrying out the record of data as traditional method.
6, real-time is good, expanded function is strong.The present invention is simple in structure, and convenient many people observe whole test processs simultaneously, not only can carry out high precision measurement to the distortion of optical system simultaneously, and can be to the focal length of system under test (SUT), and image quality etc. are measured in real time.
Description of drawings
Fig. 1 is traditional distortion measurement device synoptic diagram;
Fig. 2 is the structural representation of preferred embodiment provided by the present invention.
Embodiment
Referring to Fig. 2, the invention provides a kind of distortion tester, comprise turntable 3, this tester also comprises light source 1, parallel light tube 2 and micro imaging system 8; Light source 1, parallel light tube 2 and micro imaging system 8 place on the same optical axis 9 successively.
This high precision distortion tester also comprises measuring motion 10, and micro imaging system 8 is fixed on the measuring motion 10.This measuring motion 10 comprises laser interferometer 7, catoptron 5 and bidimensional precise guide rail 6; Described catoptron 5 is fixed in the cross slide way side of bidimensional guide rail 6; Described catoptron 5 normals are perpendicular to optical axis 9; Described laser interferometer 7 outgoing beam vertical reflectors 5; Described laser interferometer 7 is fixed on the measuring motion 10 with bidimensional guide rail 6.Bidimensional precise guide rail 6 can also be the instrument that can test length that exists in other prior art.Bidimensional precise guide rail 6 is made up of cross slide way and longitudinal rail, and cross slide way refers to the guide rail moving direction guide rail vertical with optical axis direction, and longitudinal rail refers to the guide rail moving direction guide rail parallel with optical axis.
Measuring motion 10 is when work, laser interferometer 7 aiming catoptrons, laser interferometer 7 is carried out zero clearing to determine the start position of linear measure longimetry, because catoptron is positioned at the side of mobile bidimensional precise guide rail 6 cross slide waies, can drive catoptron when the cross slide way of mobile bidimensional precise guide rail 6 moves, laser interferometer 7 just can be measured the distance that catoptron moves accurately, thereby determines length value.
Turntable 2 is high precision digital display turntables, is to adopt 27 shaft-position encoders and resolution can reach 0.01 " high precision digital display turntable; It also can be other turntable of the prior art.
Micro imaging system 8 is high-resolution CCD micrometering systems, also can be that existing other photo electric imaging system replaces.High-resolution CCD micrometering system is the high resolving power micrometering system that resolution can reach 0.1 μ m.
Light source 1 can be LASER Light Source, pointolite or any light source, only requires that the target that can illuminate parallel light tube 2 image planes places gets final product.
The asterism target is installed at parallel light tube 2 focal plane places, and it is illuminated with uniform source of light 1, parallel light tube 2 can provide the target of infinite distance to tested optical system 4, in use, tested optical system 4 is fixed on the precise rotating platform 3, adjust bidimensional precise guide rail 6, make the position of high-resolution CCD micrometering system be positioned at the optimal focal plane place of tested optical system 4, the installation site of adjusting tested optical system 4 again makes its entrance pupil be positioned at the high precision digital display turntable centre of gyration, guaranteeing that tested optical system 4 whole visual-field beams are not blocked, and make light source 1, parallel light tube 2, tested optical system 4 and high precision CCD micrometering system are on the same optical axis 9.Rotate precise rotating platform and obtain standard angle, and mobile bidimensional precise guide rail 6, make high-resolution CCD micrometering system acquisition image, position by image processing software interpretation asterism picture, use the data of computer acquisition laser interferometer 7 and the angle value of precise rotating platform simultaneously, handle formula according to distortion data and calculate the distortion value of tested optical system 4 different visual fields.

Claims (9)

1, a kind of distortion tester comprises turntable, it is characterized in that: this tester also comprises light source and micro imaging system; Described light source and micro imaging system are on the same optical axis and place the turntable both sides.
2, distortion tester according to claim 1 is characterized in that: described tester also comprises parallel light tube; Described parallel light tube places between light source and the turntable and with light source and micro imaging system and places on the same optical axis.
3, distortion tester according to claim 1 is characterized in that: described tester also comprises measuring motion; Described micro imaging system is fixed on the measuring motion.
4, distortion tester according to claim 3 is characterized in that: described measuring motion comprises laser interferometer, catoptron and bidimensional guide rail; Described catoptron is fixed in the cross slide way side of bidimensional guide rail; Vertical and the optical axis of described catoptron normal; Described laser interferometer outgoing beam vertical reflector; Described laser interferometer and bidimensional guide rail are fixed on the measuring motion.
5, according to claim 1 or 2 or 3 or 4 described distortion testers, it is characterized in that: described turntable is a high precision digital display turntable.
6, distortion tester according to claim 5 is characterized in that: described high precision digital display turntable is to adopt 27 shaft-position encoders and resolution can reach 0.01 " high precision digital display turntable.
7, distortion tester according to claim 6 is characterized in that: described micro imaging system is a CCD micrometering system.
8, distortion tester according to claim 7 is characterized in that: described CCD micrometering system is the high resolving power micrometering system that resolution can reach 0.1 μ m.
9, distortion tester according to claim 8 is characterized in that: described light source is LASER Light Source or pointolite.
CN2008101510345A 2008-09-19 2008-09-19 A Distortion Tester Expired - Fee Related CN101676704B (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034514A (en) * 2014-06-12 2014-09-10 中国科学院上海技术物理研究所 Large visual field camera nonlinear distortion correction device and method
CN104406770A (en) * 2014-10-27 2015-03-11 中国科学院上海光学精密机械研究所 Distortion measuring apparatus of wave aberration measuring module, and distortion correction method
CN104502065A (en) * 2014-12-09 2015-04-08 中国科学院西安光学精密机械研究所 Wide-angle lens distortion testing device and sampling determination method
CN105547658A (en) * 2015-12-05 2016-05-04 中国航空工业集团公司洛阳电光设备研究所 Scanning speed uniformity test method and scanning speed uniformity test system
CN105758623A (en) * 2016-04-05 2016-07-13 中国科学院西安光学精密机械研究所 TDI-CCD-based large-caliber long-focal-length remote sensing camera distortion measuring device and method
CN107153000A (en) * 2017-06-20 2017-09-12 中国地质大学(武汉) A kind of portable filter optical performance detecting device and its detection method
CN108765301A (en) * 2018-03-27 2018-11-06 长春理工大学 A kind of optical system and its distortion correction method and system
CN109596319A (en) * 2018-11-26 2019-04-09 歌尔股份有限公司 The detection system and method for optics module parameter
CN113340567A (en) * 2021-04-30 2021-09-03 北京控制工程研究所 System and method for testing angular magnification and consistency of beam-expanding optical system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2558982Y (en) * 2002-08-16 2003-07-02 中国科学院西安光学精密机械研究所 Distortion measuring device for ultra-wide view field optical system
CN201255686Y (en) * 2008-09-19 2009-06-10 中国科学院西安光学精密机械研究所 A Distortion Tester

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034514A (en) * 2014-06-12 2014-09-10 中国科学院上海技术物理研究所 Large visual field camera nonlinear distortion correction device and method
CN104406770A (en) * 2014-10-27 2015-03-11 中国科学院上海光学精密机械研究所 Distortion measuring apparatus of wave aberration measuring module, and distortion correction method
CN104406770B (en) * 2014-10-27 2017-12-01 中国科学院上海光学精密机械研究所 The distortion measurement device and distortion correction method of wave aberration measurement module
CN104502065A (en) * 2014-12-09 2015-04-08 中国科学院西安光学精密机械研究所 Wide-angle lens distortion testing device and sampling determination method
CN104502065B (en) * 2014-12-09 2017-06-27 中国科学院西安光学精密机械研究所 Wide-angle lens distortion test device and sampling determination method
CN105547658B (en) * 2015-12-05 2019-01-29 中国航空工业集团公司洛阳电光设备研究所 A kind of scanning speed homogeneity testing method and system
CN105547658A (en) * 2015-12-05 2016-05-04 中国航空工业集团公司洛阳电光设备研究所 Scanning speed uniformity test method and scanning speed uniformity test system
CN105758623A (en) * 2016-04-05 2016-07-13 中国科学院西安光学精密机械研究所 TDI-CCD-based large-caliber long-focal-length remote sensing camera distortion measuring device and method
CN105758623B (en) * 2016-04-05 2018-04-10 中国科学院西安光学精密机械研究所 TDI-CCD-based large-caliber long-focal-length remote sensing camera distortion measuring device and method
CN107153000A (en) * 2017-06-20 2017-09-12 中国地质大学(武汉) A kind of portable filter optical performance detecting device and its detection method
CN107153000B (en) * 2017-06-20 2023-10-31 中国地质大学(武汉) A portable filter optical performance detection device and its detection method
CN108765301A (en) * 2018-03-27 2018-11-06 长春理工大学 A kind of optical system and its distortion correction method and system
CN108765301B (en) * 2018-03-27 2020-08-07 长春理工大学 An optical system and its distortion correction method and system
CN109596319A (en) * 2018-11-26 2019-04-09 歌尔股份有限公司 The detection system and method for optics module parameter
CN113340567A (en) * 2021-04-30 2021-09-03 北京控制工程研究所 System and method for testing angular magnification and consistency of beam-expanding optical system

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