CN101664932B - Robot arm - Google Patents
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- CN101664932B CN101664932B CN2009103075653A CN200910307565A CN101664932B CN 101664932 B CN101664932 B CN 101664932B CN 2009103075653 A CN2009103075653 A CN 2009103075653A CN 200910307565 A CN200910307565 A CN 200910307565A CN 101664932 B CN101664932 B CN 101664932B
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Abstract
本发明涉及一种机械臂机构,尤指一种使用在晶粒分拣机或固晶机中的可以同时驱动两套真空吸嘴装置进行晶粒取放动作,而且可以方便调节对晶粒下压力,并且带有下压力传感器的双机械臂装置。本发明所述的机械臂由后臂(401)、支撑板(407)、绝缘环(406)、后臂电极螺钉(402)、电极螺钉螺母(405)、弹性片(409)、前臂(411)、前臂电极(415)、压力调节杆(403)、压力调节螺母(404)、弹簧(410)、真空吸嘴(412)和真空吸嘴接头(413)组成,在后臂(401)一端前端固定一弹性片(409),弹性片(409)前端与一前臂(411)固定在一起,在前臂(411)前端有一真空吸嘴快拆结构等构成。本发明一种机械臂的优点是结构简洁,调节方便,运动顺畅,效率大幅度提高,符合经济效益,具有工业生产价值。
The invention relates to a mechanical arm mechanism, especially a device used in a grain sorting machine or a crystal bonding machine, which can simultaneously drive two sets of vacuum suction nozzle devices to carry out the action of picking and placing grains, and can conveniently adjust the loading and unloading of the grains. pressure, and a dual-arm setup with a downforce sensor. The mechanical arm of the present invention consists of rear arm (401), support plate (407), insulating ring (406), rear arm electrode screw (402), electrode screw nut (405), elastic sheet (409), forearm (411 ), a forearm electrode (415), a pressure regulating rod (403), a pressure regulating nut (404), a spring (410), a vacuum nozzle (412) and a vacuum nozzle connector (413), at one end of the rear arm (401) Front end fixes an elastic sheet (409), elastic sheet (409) front end and a forearm (411) are fixed together, there is a vacuum suction nozzle quick release structure etc. to form at forearm (411) front end. The mechanical arm of the invention has the advantages of simple structure, convenient adjustment, smooth movement, greatly improved efficiency, conforming to economic benefits, and having industrial production value.
Description
技术领域technical field
本发明涉及一种机械臂机构,特别是一种使用在晶粒分拣机或固晶机中的可以同时驱动两套真空吸嘴装置进行晶粒取放动作,而且可以方便调节对晶粒下压力,并且带有下压力传感器的双机械臂装置。The invention relates to a mechanical arm mechanism, especially a device used in a grain sorting machine or a solid crystal machine, which can simultaneously drive two sets of vacuum suction nozzle devices to carry out grain pick-and-place actions, and can conveniently adjust the loading and unloading of the grains. pressure, and a dual-arm setup with a downforce sensor.
背景技术Background technique
在发光二极管晶粒生产过程中,首先生产出整片的晶片,晶片经过切割后分割为互相完全分离的独立的晶粒,并独立粘附于具有粘性的蓝膜上。在后续晶片分类工艺中,晶粒分拣机需要使用一真空吸嘴装置将晶粒从蓝膜上吸取起来,并放置到规定的位置;或者在后续固晶工艺中,固晶机需要使用一真空吸嘴装置将晶粒从蓝膜上吸取起来,并放置到规定的位置;此动作均需要使用晶粒搬运机械臂机构来完成。中国专利文献在2005年9月28日公开了一种名称为“晶粒挑选机之晶粒取放臂结构”的实用新型专利,该专利的公开号是CN2728728Y,其公开的技术要点是,在晶粒挑选机10上设一作动取放臂机构20,该作动取放机构20包含有一可驱动之作动之作动臂30及一连接座40,其中该作动臂30之前端处设置一吸嘴真空接头快拆装置,其系含有一吸嘴真空接头32及一可吸附晶粒之吸嘴33,并于上方面处螺固一弹簧片34,而其作动臂30于后端延伸出一连接块35,并借此连接块35与一连接于挑选机10上之连接座40以轴承36互相连接,此连接块35底面并借一固定座37相结合,另者,在连接座40之前端面上则分别轴向设一压力调整组41及一水平调整组42,并有杆体43容伸入一弹簧44内且整体固设于压力调整组41上有一调节钮可以调节接触压力,另该水平调整组42则有一螺丝45螺入可以调节手臂水平。以上晶粒取放臂结构具有一定实用价值及调节能力,但使用中仍有不足之处:1.每个取放机械臂机构只能安装一套真空吸嘴装置,利用机械臂来回摆动对晶粒进行操作,这样在机械臂放下晶粒回到拾取位置时就浪费了工作时间,总体效率低下;2.无法简便调节机械臂对晶粒的下压力大小;3.无法简便感知对其所操作晶片的下压力是否达到操作要求;4.结构复杂,故障率高,不符合经济效益。故传统的晶粒取放机械臂上仅能安装一套真空吸嘴装置来回摆动进行晶粒取放动作,而且对其所搬运晶粒的下压力无法简便调节,也无法简便感知机械臂对其所搬运晶粒的下压力是否达到操作要求。In the production process of light-emitting diode crystal grains, the whole wafer is produced first, and the wafer is divided into independent crystal grains that are completely separated from each other after dicing, and are independently adhered to the sticky blue film. In the subsequent wafer sorting process, the die sorter needs to use a vacuum nozzle device to pick up the die from the blue film and place it in the specified position; or in the subsequent die bonding process, the die bonding machine needs to use a The vacuum nozzle device picks up the die from the blue film and places it in the specified position; this action needs to be completed by using the die handling mechanical arm mechanism. Chinese patent literature disclosed a utility model patent titled "Grain pick-and-place arm structure of a grain sorter" on September 28, 2005. The publication number of this patent is CN2728728Y. The technical points disclosed are: An actuating pick-and-place arm mechanism 20 is provided on the grain sorting machine 10, and the actuated pick-and-place mechanism 20 includes a drivable actuating actuating arm 30 and a connecting seat 40, wherein the actuating arm 30 is provided at the front end A suction nozzle vacuum joint quick release device, which contains a suction nozzle vacuum joint 32 and a suction nozzle 33 capable of absorbing crystal grains, and a spring leaf 34 is screwed on the upper side, and its actuating arm 30 is at the rear end A connection block 35 is extended, and the connection block 35 is connected with a connection seat 40 connected to the selection machine 10 with a bearing 36. The bottom surface of the connection block 35 is combined with a fixed seat 37. A pressure adjustment group 41 and a level adjustment group 42 are arranged axially on the front end surface of the seat 40, and a rod body 43 extends into a spring 44 and is integrally fixed on the pressure adjustment group 41. There is an adjustment button to adjust the contact pressure In addition, the horizontal adjustment group 42 has a screw 45 screwed in to adjust the level of the arm. The above die pick-and-place arm structure has certain practical value and adjustment ability, but there are still some shortcomings in use: 1. Each pick-and-place mechanical arm mechanism can only install a set of vacuum suction nozzle device, and use the mechanical arm to swing back and forth to align the crystal. In this way, the working time is wasted when the mechanical arm puts down the die and returns to the pick-up position, and the overall efficiency is low; 2. It is impossible to easily adjust the downward force of the mechanical arm on the die; 3. It is impossible to easily perceive the operation on it Whether the downforce of the chip meets the operation requirements; 4. The structure is complicated, the failure rate is high, and it is not economical. Therefore, only a set of vacuum suction nozzle device can be installed on the traditional die pick-and-place mechanical arm to swing back and forth for die pick-and-place action, and the downforce of the die being transported cannot be easily adjusted, nor can it be easily sensed by the robotic arm. Whether the down force of the transported die meets the operation requirements.
发明内容Contents of the invention
本发明目的是根据上述现有技术之不足,提出一种可以方便调节对晶粒的预定下压力、且可以方便测量何时满足对晶粒下压力要求的双机械臂机构,其在一个动作周期内可以同时完成拾取和放下两个动作,效率得以大幅度提高。The object of the present invention is to propose a dual mechanical arm mechanism that can conveniently adjust the predetermined downward pressure on the crystal grains and can conveniently measure when the downward pressure requirements on the grains are met according to the above-mentioned deficiencies in the prior art. The two actions of picking up and putting down can be completed at the same time, and the efficiency can be greatly improved.
本发明目的实现由以下技术方案完成:The object of the present invention is realized by the following technical solutions:
本发明所述的机械臂由后臂401、支撑板407、绝缘环406、后臂电极螺钉402、电极螺钉螺母405、弹性片409、前臂411、前臂电极415、压力调节杆403、压力调节螺母404、弹簧410、真空吸嘴412和真空吸嘴接头413组成,在后臂401一端前端固定一弹性片409,弹性片409前端与一前臂411固定在一起,在前臂411前端有一真空吸嘴快拆结构,包含一个真空吸嘴412和一个真空吸嘴接头413,在后臂401此端前端有一中空结构417,前臂后部延伸416从后臂401的此前端中空结构417中穿过且不与后臂401接触,在此前臂后部延伸416连接固定有一压力调节杆403,另在此前臂后部延伸416连接紧固有一前臂电极415,在后臂401此端上方固定一支撑板407,支撑板407上有一孔,前臂压力调节杆403从此孔中穿出并可以在孔中自由滑动,该压力调节杆403上螺纹连接有一压力调节螺母404,同时在压力调节螺母404下方有一弹簧410穿在压力调节杆403上,该弹簧410可以与压力调节螺母404及支撑板407接触,支撑板407上另有一孔,孔中紧固一绝缘环406,该绝缘环406上有一个螺纹孔,螺纹连接有一后臂电极螺钉402,该后臂电极螺钉402上螺纹连接有一电极螺钉螺母405,安装完成后,此后臂电极螺钉402与此前臂电极415接触,此前臂411与此后臂电极螺钉402电流可以导通;在后臂401另一端有一对应相同机构;后臂401中部带有一安装孔414与驱动机构相连接。The mechanical arm of the present invention consists of
本发明一种机械臂的优点是结构简洁,调节方便,运动顺畅,效率大幅度提高,符合经济效益,具有工业生产价值。The mechanical arm of the invention has the advantages of simple structure, convenient adjustment, smooth movement, greatly improved efficiency, conforming to economic benefits, and having industrial production value.
附图说明Description of drawings
图1本实用新型的立体组合外观示意图;Figure 1 is a schematic diagram of the three-dimensional combined appearance of the utility model;
图2本实用新型的立体分解示意图;Fig. 2 is the three-dimensional exploded schematic view of the utility model;
图3本实用新型的实施示意图;The implementation schematic diagram of Fig. 3 the utility model;
图4本实用新型的实施示意图;The implementation schematic diagram of Fig. 4 the utility model;
图5本实用新型的实施示意图。Fig. 5 is a schematic diagram of implementation of the utility model.
具体实施方式Detailed ways
以下结合附图对本实用新型特征极其相关特征作进一步说明:Below in conjunction with accompanying drawing, the utility model feature and extremely relevant feature are further described:
参阅附图1~5所示,图中标号如下:401--后臂、402--后臂电极螺钉、403--压力调节杆、404--压力调节螺母、405--电极螺钉螺母、406--绝缘环、407--支撑板、408--弹性片固定螺钉、409--弹性片、410--弹簧、411--前臂、412--真空吸嘴、413--真空吸嘴接头、414--后臂安装孔、415--前臂电极、416--前臂后部延伸、417--后臂前端中空、418--支撑板螺钉、419--螺钉、420--机架。Refer to attached drawings 1 to 5, the numbers in the figure are as follows: 401--rear arm, 402--rear arm electrode screw, 403--pressure adjustment rod, 404--pressure adjustment nut, 405--electrode screw nut, 406 --Insulation ring, 407--support plate, 408--elastic sheet fixing screw, 409--elastic sheet, 410--spring, 411--forearm, 412--vacuum nozzle, 413--vacuum nozzle connector, 414--rear arm installation hole, 415--forearm electrode, 416--forearm rear extension, 417--rear arm front end hollow, 418-support plate screw, 419-screw, 420-rack.
本发明一种机械臂是在晶粒分拣机或固晶机机架420上安装一机械臂机构,该一种机械臂由后臂401、支撑板407、绝缘环406、后臂电极螺钉402、电极螺钉螺母405、弹性片409、前臂411、前臂电极415、压力调节杆403、压力调节螺母404、弹簧410、真空吸嘴412和真空吸嘴接头413组成,在后臂401一端前端固定一弹性片409,弹性片409前端与一前臂411固定在一起,在前臂411前端有一真空吸嘴快拆结构,包含一个真空吸嘴412和一个真空吸嘴接头413,在后臂401此端前端有一中空结构417,前臂后部延伸416从后臂401的此前端中空结构417中穿过且不与后臂401接触,在此前臂后部延伸416连接固定有一压力调节杆403,另在此前臂后部延伸416连接紧固有一前臂电极415,在后臂401此端上方固定一支撑板407,支撑板407上有一孔,前臂压力调节杆403从此孔中穿出并可以在孔中自由滑动,该压力调节杆403上螺纹连接有一压力调节螺母404,同时在压力调节螺母404下方有一弹簧410穿在压力调节杆403上,该弹簧410可以与压力调节螺母404及支撑板407接触,支撑板407上另有一孔,孔中紧固一绝缘环406,该绝缘环406上有一个螺纹孔,螺纹连接有一后臂电极螺钉402,该后臂电极螺钉402上螺纹连接有一电极螺钉螺母405,安装完成后,此后臂电极螺钉402与此前臂电极415接触,此前臂411与此后臂电极螺钉402电流可以导通。在后臂401另一端有一对应相同机构。后臂401中部带有一安装孔414与驱动机构相连接。A kind of mechanical arm of the present invention is to install a mechanical arm mechanism on the
具体实施时,驱动机构可以驱动后臂401进行旋转摆动和上升-下降运动,前臂411前端安装的真空吸嘴412可以对晶粒进行取放操作。以后臂401一端的结构为例,当驱动机构驱动后臂401旋转时,后臂401可以通过弹性片409带动前臂411旋转摆动。当驱动机构驱动后臂401做上升-下降运动时,后臂401通过弹性片409和支撑板407、绝缘环406、弹簧410、压力调节杆403带动前臂411做上升-下降运动。通过旋转压力调节杆403上螺纹连接的压力调节螺母404,可以使压力调节螺母404在压力调节杆403上,上下移动,进而可以调节压力调节螺母404与支撑板407之间的弹簧410的压紧程度。当后臂401带动前臂411做下压运动并使前臂411上安装的真空吸嘴412未接触晶粒时,或者使前臂411上安装的真空吸嘴412接触晶粒、但下压力未超过设定值时,后臂电极螺钉402与前臂电极415接触,前臂411与后臂电极螺钉402电流可以导通,如图4所示。当后臂401带动前臂411做下压运动并使前臂411所安装的真空吸嘴412接触晶粒且下压力超过设定值时,后臂电极螺钉402与前臂电极415脱离,前臂411与后臂电极螺钉402电流不可导通,如图5所示。通过测量前臂411和后臂电极螺钉402电流是否导通即可知道前臂411所安装的真空吸嘴412对晶粒的下压力是否满足要求。通过调节弹簧410的压紧程度可以调节前臂411所安装的真空吸嘴412对晶粒的预定下压力。当压力调节螺母404压缩弹簧410时,弹簧力增加,则前臂411所安装的真空吸嘴412对晶粒的预定下压力也增加;当压力调节螺母404放松弹簧410时,弹簧力减小,则前臂411所安装的真空吸嘴412对晶粒的预定下压力也减小。During specific implementation, the driving mechanism can drive the
在具体实施时,驱动机构可以带动机械臂180°来回摆动。当驱动机构带动机械臂使机械臂上的真空吸嘴412运动到指定晶片位置时,驱动装置停止摆动并带动机械臂下降,一个机械臂上的真空吸嘴412进行拾取晶片的动作,同时另一个机械臂上的真空吸嘴412把上次拾取的晶片放到合适的位置上。之后驱动装置驱动机械臂上升,再旋转180°,放下晶片后的真空吸嘴412就运动到晶片拾取位置,而带有拾取起的晶片的真空吸嘴412就运动到放下位置,驱动机构则驱动机械臂下降,两个真空吸嘴412分别进行拾取和放下动作。如此反复,在一个动作周期内,该一种双机械臂机构可以同时完成拾取和放下动作,比传统单机械臂取放机构效率提高一倍。During specific implementation, the driving mechanism can drive the mechanical arm to swing back and forth by 180°. When the driving mechanism drives the mechanical arm to move the
虽然以上已经参照附图对按照本发明目的的构思和实施例作了详尽说明,但本领域普通技术人员可以认识到,在没有脱离权利要求限定范围的前提条件下,仍然可以对本发明作出各种改进和变换,而这种改进和变换仍然应当属于本发明的保护范围。Although the conception and embodiments according to the purpose of the present invention have been described in detail above with reference to the accompanying drawings, those skilled in the art can recognize that various modifications to the present invention can still be made without departing from the scope of the claims. Improvements and changes, but such improvements and changes should still belong to the protection scope of the present invention.
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CN102142391B (en) * | 2010-12-24 | 2012-05-30 | 深圳市大族光电设备有限公司 | Crystal taking manipulator of solid crystal processing machine |
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CN103646901B (en) * | 2013-10-25 | 2018-10-19 | 深圳市恒睿智达科技有限公司 | Weld arm configuration |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2728728Y (en) * | 2004-04-09 | 2005-09-28 | 卢彦豪 | Crystalline grain taking arm structure of crystalline grain selecting machine |
US7073431B1 (en) * | 2005-05-18 | 2006-07-11 | Yu-Fu Chen | Structure portable strapping machine |
CN2914325Y (en) * | 2006-04-07 | 2007-06-20 | 卢彦豪 | Die and crystal arm structure |
CN101279307A (en) * | 2008-04-30 | 2008-10-08 | 先进光电器材(深圳)有限公司 | Arm structure for dropping glue of die bonder |
CN101664931A (en) * | 2009-09-23 | 2010-03-10 | 清华大学 | Pressure-adjustable robot arm with force sensor |
-
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2728728Y (en) * | 2004-04-09 | 2005-09-28 | 卢彦豪 | Crystalline grain taking arm structure of crystalline grain selecting machine |
US7073431B1 (en) * | 2005-05-18 | 2006-07-11 | Yu-Fu Chen | Structure portable strapping machine |
CN2914325Y (en) * | 2006-04-07 | 2007-06-20 | 卢彦豪 | Die and crystal arm structure |
CN101279307A (en) * | 2008-04-30 | 2008-10-08 | 先进光电器材(深圳)有限公司 | Arm structure for dropping glue of die bonder |
CN101664931A (en) * | 2009-09-23 | 2010-03-10 | 清华大学 | Pressure-adjustable robot arm with force sensor |
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Address after: 100084 Beijing City, Haidian District Tsinghua Yuan Patentee after: TSINGHUA University Patentee after: BEIJING CHN-TOP MACHINERY GROUP CO.,LTD. Address before: 100084 Beijing City, Haidian District Tsinghua Yuan Patentee before: Tsinghua University Patentee before: BEIJING CHN-TOP MACHINERY Co.,Ltd. |
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