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CN101656524B - Three-channel surface acoustic wave filter - Google Patents

Three-channel surface acoustic wave filter Download PDF

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CN101656524B
CN101656524B CN2009101449873A CN200910144987A CN101656524B CN 101656524 B CN101656524 B CN 101656524B CN 2009101449873 A CN2009101449873 A CN 2009101449873A CN 200910144987 A CN200910144987 A CN 200910144987A CN 101656524 B CN101656524 B CN 101656524B
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acoustic wave
surface acoustic
channel surface
wave filter
isolation zone
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CN101656524A (en
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王为标
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Shoulder Electronics Ltd
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Abstract

三通道声表面波滤波器,包括集成于压电晶体片上的三个不同频率响应的滤波器,其中一个为由独立的输入和输出叉指换能器以及两者之间的屏蔽条构成的单通道声表面波滤波器,另外两个为由两个输入端叉指换能器与一个共用的输出端叉指换能器以及所述输入端叉指换能器及输出端叉指换能器之间的屏蔽条构成的双通道声表面波滤波器。压电晶体片上还在所述单通道滤波器以及双通道滤波器之间集成有由金属条构成的电学隔离带和由吸声材料构成的声学隔离带,各自独立工作,互不干扰。本发明在一个标准封装外壳内的同一芯片上集成和实现三个声表面波滤波器功能,占用的芯片面积更小,省去一个封装外壳,制造成本更低。

A three-channel surface acoustic wave filter includes three filters with different frequency responses integrated on a piezoelectric crystal sheet, one of which is a single-channel surface acoustic wave filter composed of independent input and output interdigital transducers and a shielding strip therebetween, and the other two are dual-channel surface acoustic wave filters composed of two input-end interdigital transducers and a common output-end interdigital transducer and a shielding strip between the input-end interdigital transducers and the output-end interdigital transducers. An electrical isolation zone composed of a metal strip and an acoustic isolation zone composed of a sound-absorbing material are also integrated on the piezoelectric crystal sheet between the single-channel filter and the dual-channel filter, and each works independently without interfering with each other. The present invention integrates and implements the functions of three surface acoustic wave filters on the same chip in a standard package shell, occupies a smaller chip area, saves a package shell, and has a lower manufacturing cost.

Description

三通道声表面波滤波器Three-channel SAW filter

技术领域 technical field

本发明涉及带通滤波器,具体涉及集成于压电晶体材料上的声表面波带通滤波器。The invention relates to a band-pass filter, in particular to a surface acoustic wave band-pass filter integrated on a piezoelectric crystal material.

背景技术 Background technique

当电压加载在具有压电特性的基片材料(例如铌酸锂单晶材料)的电极上,会在压电晶体材料的晶格中形成机械畸变。当加载在压电晶体材料电极上的电压为输入的电信号,会在压电晶体材料表面的晶格中形成声表面波,该声表面波是一种在压电晶体材料表面传播、振幅随深入基片材料深度的增加而迅速减少的弹性机械波。When a voltage is applied to the electrode of a substrate material with piezoelectric properties (such as lithium niobate single crystal material), mechanical distortion will be formed in the crystal lattice of the piezoelectric crystal material. When the voltage loaded on the electrode of the piezoelectric crystal material is the input electrical signal, a surface acoustic wave will be formed in the lattice on the surface of the piezoelectric crystal material. Elastomechanical waves decrease rapidly with increasing depth into the substrate material.

声表面波滤波器具有带通滤波器的特性。声表面波滤波器带通滤波功能的实现便是基于上述晶格中形成的声表面波。声表面波滤波器的基本结构是在具有压电特性的基片材料(例如铌酸锂单晶材料)的抛光面上制作一定厚度的铝膜,在该铝膜层上通过光刻工艺形成交叉成对的梳状铝电极结构,在该梳状电极结构上施加电信号,便在两梳状电极的叉指间形成声表面波,因此该梳状电极结构起着电声换能器的作用,称其为叉指换能器。两梳状电极的叉指间形成换能器的激励区域,两梳状电极的连接各叉指指条的梳柄部分称为汇流条,信号电压施加于交叉梳状电极的两汇流条上,各汇流条通过电接点与外电路连接。叉指换能器又分为输入换能器及输出换能器:输入换能器将电信号转换成声表面波信号,沿晶体表面传播,输出换能器再将接收到的声表面波信号转换成电信号输出。所述输入换能器与输出换能器构成声表面波的传输通道,所述传输通道根据叉指换能器的不同加权结构,具有不同的声表面波传输特性或带通特性。SAW filters have the characteristics of bandpass filters. The realization of the band-pass filtering function of the surface acoustic wave filter is based on the surface acoustic wave formed in the above-mentioned lattice. The basic structure of the surface acoustic wave filter is to make an aluminum film with a certain thickness on the polished surface of the substrate material (such as lithium niobate single crystal material) with piezoelectric properties, and form a cross on the aluminum film layer by photolithography. Paired comb-shaped aluminum electrode structure, when an electrical signal is applied to the comb-shaped electrode structure, a surface acoustic wave is formed between the fingers of the two comb-shaped electrodes, so the comb-shaped electrode structure acts as an electroacoustic transducer , which is called an interdigital transducer. The excitation area of the transducer is formed between the interdigital fingers of the two comb-shaped electrodes. The comb handle part of the two comb-shaped electrodes connected to each interdigital finger is called a bus bar. The signal voltage is applied to the two bus bars of the interdigitated comb-shaped electrodes. Each bus bar is connected with an external circuit through an electric contact. The interdigital transducer is divided into an input transducer and an output transducer: the input transducer converts the electrical signal into a surface acoustic wave signal, propagates along the crystal surface, and the output transducer converts the received surface acoustic wave signal converted into an electrical signal output. The input transducer and the output transducer constitute a surface acoustic wave transmission channel, and the transmission channel has different surface acoustic wave transmission characteristics or bandpass characteristics according to different weighting structures of the IDTs.

现有技术中,声表面波滤波器有单通道和双通道两种形式。如本申请人的专利申请,申请号为2008101242125的专利申请公开了一种单通道声表面波滤波器;申请号为2008101242178的专利公开了一种双通道声表面波滤波器。在如今的电视系统中,同时存在模拟信号和数字信号,需要使用不同的滤波器,同时,在模拟信号的滤波中,又要对图像信号和伴音信号使用不同的滤波器,所以,往往需要同时使用2~3个声表面波滤波器,其缺点是耗费的晶体芯片材料和外封管座、管帽材料多,占用PCB(印制电路板)面积大。In the prior art, the surface acoustic wave filter has two forms of single channel and double channel. For example, the applicant's patent application, the patent application No. 2008101242125 discloses a single-channel surface acoustic wave filter; the patent application No. 2008101242178 discloses a dual-channel surface acoustic wave filter. In today's TV system, there are both analog signals and digital signals, and different filters need to be used. At the same time, in the filtering of analog signals, different filters must be used for image signals and audio signals. Therefore, it is often necessary to simultaneously Using 2 to 3 surface acoustic wave filters has the disadvantages of consuming a lot of crystal chip materials, outer sealing tube bases, and tube cap materials, and occupying a large area of PCB (printed circuit board).

发明的内容content of the invention

本申请人提供一种三通道声表面波滤波器,在一个标准封装外壳内以及在同一芯片上集成和实现三个完全不同的频率响应的声表面波滤波器的功能,使占用的芯片面积更小,耗费基片材料较少,制造成本更低,占用PCB面积更小。The applicant provides a three-channel surface acoustic wave filter, which integrates and realizes the functions of three surface acoustic wave filters with completely different frequency responses in a standard package shell and on the same chip, so that the occupied chip area is smaller. Small, consumes less substrate material, lower manufacturing cost, and occupies less PCB area.

本发明的技术方案如下:Technical scheme of the present invention is as follows:

一种三通道声表面波滤波器,包括集成于压电晶体片上的两个输入端叉指换能器,所述两个输入端叉指换能器共用输出端叉指换能器,所述两个输入端叉指换能器与所述共用输出端叉指换能器之间设置屏蔽条,构成双通道声表面波滤波器;压电晶体片上还集成有由输入端叉指换能器、输出端叉指换能器以及两者之间的屏蔽条构成的单通道声表面波滤波器;所述双通道声表面波滤波器和单通道声表面波滤波器之间于压电晶体片上设置还集成有由金属条构成的电学隔离带和由吸声材料构成的声学隔离带。A three-channel surface acoustic wave filter, comprising two input IDTs integrated on a piezoelectric crystal sheet, the two input IDTs share an output IDT, the A shielding strip is set between the two input IDTs and the common output IDT to form a dual-channel surface acoustic wave filter; the piezoelectric crystal sheet is also integrated with an input IDT A single-channel surface acoustic wave filter composed of an interdigital transducer at the output end and a shielding strip between the two; the dual-channel surface acoustic wave filter and the single-channel surface acoustic wave filter are placed on a piezoelectric crystal sheet The setup also incorporates an electrical isolation strip made of metal strips and an acoustic isolation strip of sound-absorbing material.

其进一步的技术方案是:Its further technical scheme is:

所述电学隔离带可以由与形成叉指换能器相同或不同的金属材料构成;所述声学隔离带的材料可以与涂布于压电晶片两端用于吸收反射波的吸声材料相同或不同。The electrical isolation zone can be made of the same or different metal material as that used to form the interdigital transducer; the material of the acoustic isolation zone can be the same as or the same as the sound-absorbing material coated on both ends of the piezoelectric wafer for absorbing reflected waves. different.

所述电学隔离带可以与叉指换能器采用相同或不同的金属材料;所述声学隔离带可以采用与涂布于压电晶片两端用于吸收反射波的吸声材料相同或不同。所述声学隔离带可以重叠设置在电学隔离带的上面,也可以布置在电学隔离带的一侧或两侧。The electrical isolation zone can be made of the same or different metal material as the interdigital transducer; the acoustic isolation zone can be made of the same or different sound-absorbing material coated on both ends of the piezoelectric wafer for absorbing reflected waves. The acoustic isolation zone can be overlapped on the electrical isolation zone, or can be arranged on one or both sides of the electrical isolation zone.

本发明的有益技术效果是:The beneficial technical effect of the present invention is:

本发明在一个封装外壳内的同一芯片上集成了三个完全不同的频率响应的声表面波滤波器。并在不同频率响应的滤波器之间的压电晶片上设置电学隔离带以避免电信号的相互干扰,同时设置声学隔离带,避免声波在不同频率响应之间的相互干扰,从而提高滤波器的选择性。由于在同一芯片上实现了三个滤波器的功能,使得占用的芯片面积更小,耗费基片材料较少,有效降低制造成本。The present invention integrates three surface acoustic wave filters with completely different frequency responses on the same chip in one packaging shell. An electrical isolation band is set on the piezoelectric wafer between filters with different frequency responses to avoid mutual interference of electrical signals, and an acoustic isolation band is set at the same time to avoid mutual interference of sound waves between different frequency responses, thereby improving the filter performance. selective. Since the functions of three filters are implemented on the same chip, the occupied chip area is smaller, less substrate material is consumed, and the manufacturing cost is effectively reduced.

附图说明Description of drawings

图1为本发明结构实施例的示意图。Fig. 1 is a schematic diagram of a structural embodiment of the present invention.

图2为图1输入端叉指换能器上切指加权包络线结构的示意图。FIG. 2 is a schematic diagram of the structure of the weighted envelope of the IDT at the input end of FIG. 1 .

具体实施方式 Detailed ways

下面结合附图对本发明的具体实施方式做进一步说明。The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

见图1,本发明包括集成于压电晶体片7上的分别由输入端叉指换能器2、输入端叉指换能器5、输出端叉指换能器12以及两输入端叉指换能器及输出端叉指换能器之间的屏蔽条17构成的双通道声表面波滤波器29,两个输入端叉指换能器2、输入端叉指换能器5为两个并列交错的切指加权的叉指换能器,所形成的两个传输通道构成两个声表面波横向滤波器。共用一个输出端叉指换能器12可以使两个滤波器的输出阻抗完全相同,便于进行电路匹配。另外,由输入端叉指换能器20与输出端叉指换能器26以及两者之间的屏蔽条23构成单通道声表面波滤波器30。所述双通道声表面波滤波器29与单通道声表面波滤波器30之间于压电晶体片7上,还集成有由金属条构成的电学隔离带18和由吸声材料构成的声学隔离带31,用于保证双通道声表面波滤波器29与单通道声表面波滤波器30各自独立工作,互不干扰。See Fig. 1, the present invention comprises the IDT 2 of input end, the IDT 5 of input end, the IDT 12 of output end and the IDT of two input ends that are integrated on the piezoelectric crystal plate 7 respectively. The two-channel surface acoustic wave filter 29 formed by the shielding strip 17 between the transducer and the IDT at the output end, two IDTs at the input end and two IDTs at the input end The interdigitated transducers with weighted interdigitated fingers are juxtaposed and staggered, and the two transmission channels formed form two surface acoustic wave transversal filters. Sharing one output IDT 12 can make the output impedances of the two filters exactly the same, which is convenient for circuit matching. In addition, the single-channel surface acoustic wave filter 30 is formed by the IDT 20 at the input end, the IDT 26 at the output end, and the shielding bar 23 between them. Between the two-channel surface acoustic wave filter 29 and the single-channel surface acoustic wave filter 30, on the piezoelectric crystal plate 7, an electrical isolation zone 18 made of metal strips and an acoustic isolation zone made of sound-absorbing material are also integrated. The belt 31 is used to ensure that the dual-channel SAW filter 29 and the single-channel SAW filter 30 work independently without interfering with each other.

所述声学隔离带31可以采用与涂布于压电晶片两端用于吸收反射波的吸声材料带32及33相同,也可以不同,例如可以采用表面开槽等其他声学隔离结构。所述电学隔离带18可以与叉指换能器采用相同的金属材料(铝材)以及相同的制作工艺同时制成,或者在叉指换能器制作完成后,单独采用比如蒸发(不仅限于蒸发)等工艺用其他金属材料制成。所述声学隔离带31可以重叠设置在电学隔离带18的上面,也可以布置在电学隔离带18的一侧或两侧。图1实施例中电学隔离带18与屏蔽条17以及屏蔽条23相连接后接地。The acoustic isolation strip 31 may be the same as or different from the sound-absorbing material strips 32 and 33 coated on both ends of the piezoelectric wafer for absorbing reflected waves, for example, other acoustic isolation structures such as surface grooves may be used. The electrical isolation band 18 can be made simultaneously with the same metal material (aluminum material) and the same manufacturing process as the IDT, or after the IDT is made, it can be separately used such as evaporation (not limited to evaporation) ) and other crafts are made of other metal materials. The acoustic isolation zone 31 can be overlapped on the electrical isolation zone 18 , and can also be arranged on one or both sides of the electrical isolation zone 18 . In the embodiment of FIG. 1 , the electrical isolation strip 18 is connected to the shielding strip 17 and the shielding strip 23 and then grounded.

本发明的工作原理说明:Description of the working principle of the present invention:

双通道滤波器的输入端叉指换能器2、输入端叉指换能器5用于将电能转变为声表面波机械能;输出端叉指换能器12则相反,将声表面波机械能转变为电能,如此完成信号的滤波和传输;所述单通道滤波器的输入端叉指换能器20用于将电能转变为声表面波机械能;输出端叉指换能器则26相反,将声表面波机械能转变为电能,如此完成信号的滤波和传输;电学隔离带18和声学隔离带31吸声材料带18,保证双通道声表面波滤波器及单通道声表面波滤波器各自工作,互不干扰。The input IDT 2 and the input IDT 5 of the dual-channel filter are used to convert electrical energy into surface acoustic wave mechanical energy; the output IDT 12 is the opposite, converting surface acoustic wave mechanical energy It is electrical energy, so complete the filtering and transmission of the signal; the input IDT 20 of the single-channel filter is used to convert electrical energy into surface acoustic wave mechanical energy; the output IDT 26 is the opposite, and the acoustic The surface wave mechanical energy is converted into electric energy, so that the filtering and transmission of the signal are completed; the electrical isolation zone 18 and the acoustic isolation zone 31 sound-absorbing material belt 18 ensure that the dual-channel SAW filter and the single-channel SAW filter work independently and mutually Do not interfere.

见图1,其中汇流条1、汇流条4、汇流条6、汇流条11、汇流条13以及汇流条19、汇流条22、汇流条24、汇流条25均为接电端口,分别通过压焊丝与封装外壳的引脚连接。输入端接电端口的汇流条1、汇流条4、汇流条6、汇流条19、汇流条22可选择不同的接电方式,使三个通道的声表面波滤波器对应不同的频率响应,例如可以具有不同的中心频率、带宽、矩形因子、带外抑制等性能。当所述双通道滤波器的输入端叉指换能器的两根汇流条有不同的电位时,该叉指换能器便能激发声表面波;而当输入端叉指换能器的两根汇流条有相同电位时,则不能激发声表面波。例如图1中,当汇流条1和汇流条4接入不同的电位,而汇流条4与汇流条6电位相同时,输入端叉指换能器2工作,输入端叉指换能器5不工作。当接汇流条1、汇流条4电位相同,而汇流条4、汇流条6的电位不同时,输入端叉指换能器2不工作,输入端叉指换能器5工作。当汇流条1、汇流条4以及汇流条4、汇流条6的电位都不同时,输入端叉指换能器2、输入端叉指换能器5同时工作。所述单通道滤波器30的工作和上述双通道滤波器29互不干扰,当汇流条19、汇流条22电位不同时,输入端叉指换能器20正常工作。See Figure 1, where bus bar 1, bus bar 4, bus bar 6, bus bar 11, bus bar 13, bus bar 19, bus bar 22, bus bar 24, and bus bar 25 are all power-connecting ports. Pin connection to the package case. The bus bar 1, bus bar 4, bus bar 6, bus bar 19, and bus bar 22 connected to the electrical port at the input end can choose different power connection methods, so that the surface acoustic wave filters of the three channels correspond to different frequency responses, for example It can have different performances such as center frequency, bandwidth, square factor, out-of-band rejection, etc. When the two bus bars of the IDT at the input of the dual-channel filter have different potentials, the IDT can excite surface acoustic waves; and when the two bus bars of the IDT at the input end When the root bus bars have the same potential, the surface acoustic wave cannot be excited. For example, in Figure 1, when bus bar 1 and bus bar 4 are connected to different potentials, and bus bar 4 and bus bar 6 have the same potential, IDT 2 at the input end works, and IDT 5 at the input end does not. Work. When the potentials of bus bar 1 and bus bar 4 are the same, but the potentials of bus bar 4 and bus bar 6 are different, the IDT 2 at the input end does not work, and the IDT 5 at the input end works. When the bus bar 1, the bus bar 4, the bus bar 4, and the bus bar 6 have different potentials, the input IDT 2 and the input IDT 5 work simultaneously. The operation of the single-channel filter 30 and the above-mentioned dual-channel filter 29 do not interfere with each other. When the potentials of the bus bar 19 and the bus bar 22 are different, the IDT 20 at the input end works normally.

见图2,切指包络线15、切指包络线16是输入端叉指换能器2经过切指加权后形成的包络线,切指包络线8、切指包络线9是输入端叉指换能器5经过切指加权后形成的包络线,切指包络线21、切指包络线27是输入端叉指换能器20经过切指加权后形成的包络线。所述两个并列交错的切指加权的输入端叉指换能器5上的切指包络线8、切指包络线9及输入端叉指换能器2上的切指包络线15、切指包络线16分别构成的主瓣区域10及主瓣区域14错开排列,处于相互交叉叠放的位置。所述输入端叉指换能器20中的切指包络线21、切指包络线27构成主瓣区域28。输入端叉指换能器通过改变叉指长度的加权方法来获得所需的频率特性。输入端叉指换能器2、输入端叉指换能器5、输入端叉指换能器20的叉指指条的交叉部分形成叉指换能器的激励主瓣区域14、主瓣区域10及主瓣区域28,在激励区域内电能转换为声表面波能。输出端叉指换能器12和输出端叉指换能器26为等指叉指换能器,其切指包络线为直线,在其激励区域内接收的声表面波能转换为电能。As shown in Fig. 2, the cut-finger envelope 15 and the cut-finger envelope 16 are the envelopes formed by the input end interdigital transducer 2 after the cut-finger weighting, the cut-finger envelope 8 and the cut-finger envelope 9 is the envelope formed by the IDT 5 at the input end after being weighted by the cut finger, the cut finger envelope 21 and the cut finger envelope 27 are the envelope formed by the cut finger transducer 20 at the input end after the cut finger weight Coil. The abscission envelope 8, the abscission envelope 9 on the input end IDT 5 of the two interleaved abscission weighted input end and the abscission envelope 9 on the input end IDT 2 15. The main lobe area 10 and the main lobe area 14 respectively formed by the cut finger envelope 16 are arranged in a staggered manner, and are in the position of intersecting and overlapping each other. The incisor envelope 21 and the incisor envelope 27 of the IDT 20 at the input end form a main lobe area 28 . The IDT at the input end obtains the required frequency characteristics by changing the weighting method of the interdigital length. The intersecting parts of the IDTs of the input IDT 2, the input IDT 5, and the input IDT 20 form the excitation main lobe area 14 and the main lobe area of the IDT. 10 and the main lobe area 28, the electrical energy is converted into surface acoustic wave energy in the excitation area. The output end IDT 12 and the output end IDT 26 are isodigital IDTs, the abscisal envelope of which is a straight line, and the surface acoustic wave energy received in its excitation area is converted into electrical energy.

以上所述的仅是本发明的优选实施方式,本发明不限于以上实施例。可以理解,本领域技术人员在不脱离本发明的精神和构思的前提下直接导出或联想到的其他改进和变化,均应认为包含在本发明的保护范围之内。What is described above is only a preferred embodiment of the present invention, and the present invention is not limited to the above examples. It can be understood that other improvements and changes directly derived or conceived by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included in the protection scope of the present invention.

Claims (4)

1.一种三通道声表面波滤波器,包括集成于压电晶体片(7)上的第一输入端叉指换能器(2)以及第二输入端叉指换能器(5),所述两个输入端叉指换能器共用第一输出端叉指换能器(12),所述两个输入端叉指换能器与所述共用输出端叉指换能器之间设置第一屏蔽条(17),构成双通道声表面波滤波器(29);压电晶体片(7)上还集成有由第三输入端叉指换能器(20)、第二输出端叉指换能器(26)以及两者之间的第二屏蔽条(23)构成的单通道声表面波滤波器(30);其特征在于所述双通道声表面波滤波器(29)和单通道声表面波滤波器(30)之间于压电晶体片(7)上还集成有由金属条构成的电学隔离带(18)和由吸声材料构成的声学隔离带(31)。1. A three-channel surface acoustic wave filter, comprising a first input IDT (2) and a second input IDT (5) integrated on a piezoelectric crystal sheet (7), The two input-end IDTs share the first output-end IDT (12), and the two input-end IDTs and the shared output IDT are arranged The first shielding bar (17) constitutes a dual-channel surface acoustic wave filter (29); the piezoelectric crystal sheet (7) is also integrated with the third input terminal interdigital transducer (20), the second output terminal fork Refer to the single-channel surface acoustic wave filter (30) formed by the transducer (26) and the second shielding bar (23) between the two; it is characterized in that the two-channel surface acoustic wave filter (29) and the single-channel surface acoustic wave filter An electrical isolation zone (18) made of metal strips and an acoustic isolation zone (31) made of sound-absorbing material are also integrated on the piezoelectric crystal sheet (7) between the channel surface acoustic wave filters (30). 2.如权利要求1所述的三通道声表面波滤波器,其特征在于:所述电学隔离带(18)可以由与形成叉指换能器相同或不同的金属材料构成;所述声学隔离带(31)的材料可以与涂布于压电晶片两端用于吸收反射波的吸声材料相同,也可以采用不同的吸声材料。2. The three-channel surface acoustic wave filter as claimed in claim 1, characterized in that: said electrical isolation zone (18) can be made of the same or different metal material as forming the interdigital transducer; said acoustic isolation The material of the band (31) can be the same as the sound-absorbing material coated on both ends of the piezoelectric chip for absorbing the reflected wave, or different sound-absorbing materials can be used. 3.如权利要求1或2所述的三通道声表面波滤波器,其特征在于:所述声学隔离带(31)与电学隔离带(18)重叠设置,声学隔离带(31)位于电学隔离带(18)的上面。3. The three-channel surface acoustic wave filter as claimed in claim 1 or 2, characterized in that: the acoustic isolation zone (31) overlaps with the electrical isolation zone (18), and the acoustic isolation zone (31) is positioned at the electrical isolation zone. Top with (18). 4.如权利要求1或2所述的三通道声表面波滤波器,其特征在于:所述声学隔离带(31)位于电学隔离带(18)的一侧或两侧。4. The three-channel surface acoustic wave filter according to claim 1 or 2, characterized in that: the acoustic isolation zone (31) is located on one side or both sides of the electrical isolation zone (18).
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CN101316099A (en) * 2008-07-04 2008-12-03 无锡市好达电子有限公司 Double-channel SAW filter
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JPH0993079A (en) 1995-09-26 1997-04-04 Matsushita Electric Ind Co Ltd Surface acoustic wave multimode filter
WO2000039925A2 (en) * 1998-12-29 2000-07-06 Cts Corporation Surface acoustic wave (saw) filter with multiple tracks
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