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CN101651431A - Cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor vibrator - Google Patents

Cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor vibrator Download PDF

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Publication number
CN101651431A
CN101651431A CN200910072818A CN200910072818A CN101651431A CN 101651431 A CN101651431 A CN 101651431A CN 200910072818 A CN200910072818 A CN 200910072818A CN 200910072818 A CN200910072818 A CN 200910072818A CN 101651431 A CN101651431 A CN 101651431A
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cantilever
piezoelectric ceramic
vibration piezoelectric
longitudinal
bending
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CN101651431B (en
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陈维山
刘英想
刘军考
石胜君
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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Abstract

悬臂纵弯复合换能器式圆筒形行波超声电机振子,属于压电超声电机技术领域。它是为了解决目前的超声电机振子采用金属弹性体粘贴压电陶瓷薄片的方式进行激励使电机机械输出能力受制约,以及采用多个换能器同时驱动使超声电机的机械输出能力和可控性都降低的问题。它由圆筒和悬臂纵弯复合夹心换能器组成,圆筒和悬臂纵弯复合夹心换能器通过两个悬臂连为一体,紧固螺钉穿过前端盖和两个悬臂的中心通孔与后端盖旋合固定,四片纵振压电陶瓷片安装在两个悬臂之间,前端盖和第一悬臂之间以及后端盖和第二悬臂之间均安装有一对弯振压电陶瓷片,相邻的弯振压电陶瓷片和相邻的纵振压电陶瓷片的极化方向相反。本发明用于超声电机的制作领域。

The utility model relates to a cantilever longitudinal bending composite transducer type cylindrical traveling wave ultrasonic motor vibrator, which belongs to the technical field of piezoelectric ultrasonic motors. It is to solve the problem that the vibrator of the ultrasonic motor is excited by the metal elastic body pasted with the piezoelectric ceramic sheet, which restricts the mechanical output capability of the motor, and uses multiple transducers to simultaneously drive the mechanical output capability and controllability of the ultrasonic motor. Both reduce the problem. It consists of a cylinder and a cantilever longitudinal bending composite sandwich transducer. The cylinder and the cantilever longitudinal bending composite sandwich transducer are connected as a whole through two cantilevers. The fastening screw passes through the front end cover and the central through hole of the two cantilever The rear end cover is screwed and fixed, four longitudinal vibration piezoelectric ceramics are installed between the two cantilevers, and a pair of bending vibration piezoelectric ceramics is installed between the front end cover and the first cantilever and between the rear end cover and the second cantilever slices, the polarization directions of the adjacent bending piezoelectric ceramic slices and the adjacent longitudinal vibration piezoelectric ceramic slices are opposite. The invention is used in the manufacturing field of ultrasonic motors.

Description

The cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor oscillator
Technical field
The present invention relates to a kind of cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor oscillator, belong to the piezoelectric ultrasonic motor technical field.
Background technology
Ultrasound electric machine is a kind of ultrasonic vibrational energy of utilizing, and produces the motor of actuating force by the friction coupling.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, in elastomer, motivate the vibration in the supersonic range, form particle movement at surface of elastomer specified point or specific region then, by the coupling of the friction between stator, the rotor microscopic motion of particle is converted to the macroscopic motion of rotor again with particular track.Ultrasound electric machine because have low speed high torque, need not gear, no electromagnetic interference, advantage such as response speed is fast and cut off self-lock, as a kind of piezoelectric actuator application is very widely arranged.
For the simplicity of exiting principle and the simplicity of theoretical analysis method, the piezoelectric ultrasonic motor oscillator adopts the mode of metallic elastic body stickup piezoelectric ceramic thin sheet to encourage mostly at present, and this energisation mode adopts the d of piezoelectric ceramic 31Vibration mode, d 31Vibration mode is the pattern of potsherd stretching vibration along its length, because this vibration mode Tensile strength is low and realize that the mechanical-electric coupling efficient of power conversion is low, pasted the intensity of glue-line and the restriction of fatigue life simultaneously, make the mechanical fan-out capability of ultrasound electric machine be subjected to serious restriction; For the piezoelectric ultrasonic motor that adopts a plurality of transducer drive, because it is in full accord that each transducer is difficult to guarantee in processes such as processing, stickup and assembling, vibration characteristics be there are differences, and then cause the distortion of oscillator surface particle vibration track, reduce the mechanical fan-out capability and the controllability of ultrasound electric machine equally.
Summary of the invention
The objective of the invention is the electromechanics fan-out capability to be restricted for the mode that solves present ultrasonic motor oscillator employing metallic elastic body stickup piezoelectric ceramic thin sheet encourages, and adopt a plurality of transducers to drive simultaneously to make the mechanical fan-out capability of ultrasound electric machine and the problem that controllability all reduces, a kind of cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor oscillator is provided.
The present invention includes cylinder, it also comprises cantilever longitudinal-bending composite sandwich transducer, cantilever longitudinal-bending composite sandwich transducer is made up of first cantilever, second cantilever, trip bolt, four longitudinal vibration piezoelectric ceramic pieces, four curved piezoelectric ceramic pieces that shake, three insulating cases, seven electrode slices, front end housing and rear end caps
Trip bolt passes front end housing, the central through hole of first cantilever and second cantilever and rear end cap screw fixing, be with two curved piezoelectric ceramic pieces that shake between first cantilever and the front end housing and on the trip bolt between second cantilever and the rear end cap respectively, be with four longitudinal vibration piezoelectric ceramic pieces on the trip bolt between first cantilever and second cantilever, every two adjacent curved shaking between the piezoelectric ceramic piece, first cantilever and adjacent curved shaking between the piezoelectric ceramic piece, second cantilever and adjacent curved shaking are respectively equipped with an electrode slice between the piezoelectric ceramic piece and between every two adjacent longitudinal vibration piezoelectric ceramic pieces, curved shaking between piezoelectric ceramic piece and electrode slice and the trip bolt, be respectively arranged with insulating case between longitudinal vibration piezoelectric ceramic piece and electrode slice and the trip bolt;
The outer surface of first cantilever, second cantilever and cylinder is made one, and cylinder inner wall is along a plurality of pectination driving gears of circumferential even distribution, and a plurality of pectination driving gears are axially parallel with central axis along cylinder;
Every longitudinal vibration piezoelectric ceramic piece and the every curved piezoelectric ceramic piece that shakes polarize along thickness direction respectively, the polarised direction of two whenever adjacent longitudinal vibration piezoelectric ceramic pieces is opposite, every two adjacent polarised directions of bending the piezoelectric ceramic pieces that shake are opposite, the symmetrical cutting of the every curved piezoelectric ceramic piece that shakes and the polarised direction of a left side half sheet that reconfigures and right half sheet are opposite, and the polarised direction of two adjacent with second cantilever with first cantilever respectively curved piezoelectric ceramic pieces that shake is identical.
Advantage of the present invention is:
Piezo ceramic element among the present invention adopts sandwich structure, adopts the d of the high mechanical-electric coupling efficient of piezoelectric ceramic 33Vibration mode work, d 33Vibration mode is the pattern of potsherd along the thickness direction stretching vibration, has solved the problem of pasting low, the mechanical fan-out capability difference of piezoelectric ceramic chip piezoelectric ultrasonic motor mechanical-electric coupling efficient; The present invention adopts the excitation that can realize the flexural vibrations of transducer along the curved piezoelectric ceramic piece that shakes of thickness direction polarization, adopts the excitation that realizes the extensional vibration of transducer along the longitudinal vibration piezoelectric ceramic piece of thickness direction polarization; Realize transducer longitudinal vibration natural frequency, curved natural frequency and the curved degeneracy that shakes between the natural frequency of cylinder of shaking of transducer by adjusting structural parameters; Adopt single transducer encourage the trip ripple in cylinder stator, the inconsistent and distortion of the surperficial particle vibration track of oscillator that causes of the vibration that has existed when having avoided adopting a plurality of transducer has improved the mechanical fan-out capability and the controllability of ultrasound electric machine.
But that the present invention has is simple in structure, flexible design, mechanical-electric coupling efficient height, can realize big moment output, stable performance, be easy to control the advantage of producing in serial form.
Description of drawings
Fig. 1 is a perspective view of the present invention; Fig. 2 is the vertical view cutaway drawing of Fig. 1; Fig. 3 is the polarised direction schematic diagram of curved shake piezoelectric ceramic piece and longitudinal vibration piezoelectric ceramic piece in the cantilever bending vibration sandwich converter shown in Figure 2; Fig. 4 is the schematic diagram that the present invention is connected with driving power; Fig. 5~Fig. 8 is that the vibration shape of oscillator of the present invention in a complete vibration period changes circumferentially deploying figure, the vibration shape that is cylinder five rank bending vibration modes changes schematic diagram, wherein Fig. 5 is the oscillator of the present invention vibration shape variation circumferentially deploying figure of one or four/one-period in a complete vibration period, the mode of oscillation of this vibration shape correspondence adopts the extensional vibration excitation cylinder flexural vibration mode of transducer, and this moment, the transducer vibrations state was for shrinking; Fig. 6 is the oscillator of the present invention vibration shape variation circumferentially deploying figure of two or four/one-period in a complete vibration period, and the mode of oscillation of this vibration shape correspondence adopts the flexural vibrations excitation cylinder flexural vibration mode of transducer; Fig. 7 is the oscillator of the present invention vibration shape variation circumferentially deploying figure of three or four/one-period in a complete vibration period, the mode of oscillation of this vibration shape correspondence adopts the extensional vibration excitation cylinder flexural vibration mode of transducer, at this moment, the transducer vibrations state is elongation; Fig. 8 is the oscillator of the present invention vibration shape variation circumferentially deploying figure of four or four/one-period in a complete vibration period, the mode of oscillation of this vibration shape correspondence and Fig. 6 are the flexural vibrations excitation cylinder flexural vibration mode that adopts transducer equally, and flexural vibrations state and Fig. 6 of transducer are opposite.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1~Fig. 8, present embodiment comprises cylinder 1, it also comprises cantilever longitudinal-bending composite sandwich transducer 2, cantilever longitudinal-bending composite sandwich transducer 2 is made up of the first cantilever 2-11, the second cantilever 2-12, trip bolt 2-2, four longitudinal vibration piezoelectric ceramic piece 2-3, four curved piezoelectric ceramic piece 2-4 that shake, three insulating case 2-5, seven electrode slice 2-6, front end housing 2-7 and rear end cap 2-8
Trip bolt 2-2 passes front end housing 2-7, central through hole and the rear end cap 2-8 of the first cantilever 2-11 and the second cantilever 2-12 screw fixing, be with two curved piezoelectric ceramic piece 2-4 that shake between the first cantilever 2-11 and the front end housing 2-7 and on the trip bolt 2-2 between the second cantilever 2-12 and the rear end cap 2-8 respectively, be with four longitudinal vibration piezoelectric ceramic piece 2-3 on the trip bolt 2-2 between the first cantilever 2-11 and the second cantilever 2-12, every two adjacent curved shaking between the piezoelectric ceramic piece 2-4, the first cantilever 2-11 and adjacent curved shaking between the piezoelectric ceramic piece 2-4, the second cantilever 2-12 and adjacent curved shaking are respectively equipped with an electrode slice 2-6 between the piezoelectric ceramic piece 2-4 and between every two adjacent longitudinal vibration piezoelectric ceramic piece 2-3, curved shaking between piezoelectric ceramic piece 2-4 and electrode slice 2-6 and the trip bolt 2-2, be respectively arranged with insulating case 2-5 between longitudinal vibration piezoelectric ceramic piece 2-3 and electrode slice 2-6 and the trip bolt 2-2;
The outer surface of the first cantilever 2-11, the second cantilever 2-12 and cylinder 1 is made one, cylinder 1 inwall is along a plurality of pectination driving gear of circumferential even distribution 1-1, a plurality of pectination driving gear 1-1 and cylinder 1 are integral piece, and a plurality of pectination driving gear 1-1 are axially parallel with central axis along cylinder 1;
Every longitudinal vibration piezoelectric ceramic piece 2-3 and the every curved piezoelectric ceramic piece 2-4 that shakes polarize along thickness direction respectively, the polarised direction of two whenever adjacent longitudinal vibration piezoelectric ceramic piece 2-3 is opposite, every two adjacent polarised directions of bending the piezoelectric ceramic piece 2-4 that shake are opposite, the symmetrical cutting of the every curved piezoelectric ceramic piece 2-4 that shakes and the polarised direction of a left side half sheet that reconfigures and right half sheet are opposite, and the polarised direction of two adjacent with the second cantilever 2-12 with the first cantilever 2-11 respectively curved piezoelectric ceramic piece 2-4 that shake is identical.
The height of cylinder 1 is identical with the thickness of cantilever longitudinal-bending composite sandwich transducer 2 in the present embodiment, can make in the process of reality processing technology simpler.
Operation principle: the curved piezoelectric ceramic piece 2-4 that shakes among the present invention is equal with longitudinal vibration piezoelectric ceramic piece 2-3 employing amplitude, frequency is oscillator self resonance frequency, phase difference is ac voltage signal when excitation of+90 °, utilize the extensional vibration of piezoelectric ceramic piece in sandwich converter, to motivate extensional vibration and flexural vibrations, and then be implemented in by two cantilevers that connect cantilever longitudinal-bending composite sandwich transducers 2 and cylinder 1 and motivate two amplitudes on the cylinder 1 and equate, on time and space, all differ the bending vibration modes response of pi/2, two bending vibration modes responses are superimposed upon and form the row ripple on the cylinder 1, cylinder vibration shape circumferentially deploying figure such as Fig. 5~shown in Figure 8, driving gear surface particle produces elliptical trajectory, realizes the macroscopic motion output of rotor by the coupling of the friction between driving gear and the rotor.If adjusting the phase difference of excitation signals is-90 °, can change capable wave line of propagation, finally realize the rotor counter motion.
The cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor oscillator of present embodiment is when using, referring to shown in Figure 4, at four longitudinal vibration piezoelectric ceramic piece 2-3 centers and the curved electrode slice 2-6 between piezoelectric ceramic piece 2-4 and the cantilever and the common port V of driving power of shaking 0Connect two other electrode slice 2-6 and drive signal V between adjacent longitudinal vibration piezoelectric ceramic piece 2-3 1Connect, at adjacent two curved two electrode slice 2-6 and drive signal V that shake between the piezoelectric ceramic piece 2-4 2Connect.
Embodiment two: the difference of present embodiment and execution mode one is that the cross section of described longitudinal vibration piezoelectric ceramic piece 2-3 and the curved piezoelectric ceramic piece 2-4 that shakes is a rectangle.Other composition and annexation are identical with execution mode one.

Claims (2)

1、一种悬臂纵弯复合换能器式圆筒形行波超声电机振子,它包括圆筒(1),其特征在于:它还包括悬臂纵弯复合夹心换能器(2),悬臂纵弯复合夹心换能器(2)由第一悬臂(2-11)、第二悬臂(2-12)、紧固螺钉(2-2)、四片纵振压电陶瓷片(2-3)、四片弯振压电陶瓷片(2-4)、三个绝缘套(2-5)、七个电极片(2-6)、前端盖(2-7)和后端盖(2-8)组成,1. A cantilever longitudinal bending composite transducer type cylindrical traveling wave ultrasonic motor vibrator, which includes a cylinder (1), characterized in that: it also includes a cantilever longitudinal bending composite sandwich transducer (2), a cantilever longitudinal The curved composite sandwich transducer (2) consists of a first cantilever (2-11), a second cantilever (2-12), a fastening screw (2-2), and four longitudinal vibration piezoelectric ceramic sheets (2-3) , four bending piezoelectric ceramic sheets (2-4), three insulating sleeves (2-5), seven electrode sheets (2-6), front end cover (2-7) and rear end cover (2-8 )composition, 紧固螺钉(2-2)穿过前端盖(2-7)、第一悬臂(2-11)和第二悬臂(2-12)的中心通孔与后端盖(2-8)旋合固定,第一悬臂(2-11)与前端盖(2-7)之间和第二悬臂(2-12)与后端盖(2-8)之间的紧固螺钉(2-2)上分别套有两片弯振压电陶瓷片(2-4),第一悬臂(2-11)和第二悬臂(2-12)之间的紧固螺钉(2-2)上套有四片纵振压电陶瓷片(2-3),每相邻的两片弯振压电陶瓷片(2-4)之间、第一悬臂(2-11)与相邻的弯振压电陶瓷片(2-4)之间、第二悬臂(2-12)与相邻的弯振压电陶瓷片(2-4)之间和每相邻的两片纵振压电陶瓷片(2-3)之间分别设有一个电极片(2-6),弯振压电陶瓷片(2-4)和电极片(2-6)与紧固螺钉(2-2)之间、纵振压电陶瓷片(2-3)和电极片(2-6)与紧固螺钉(2-2)之间分别设置有绝缘套(2-5);The fastening screw (2-2) passes through the central through hole of the front end cover (2-7), the first cantilever (2-11) and the second cantilever (2-12) and is screwed into the rear end cover (2-8) Fixed, on the fastening screws (2-2) between the first cantilever (2-11) and the front end cover (2-7) and between the second cantilever (2-12) and the rear end cover (2-8) Two pieces of bending vibration piezoelectric ceramic sheets (2-4) are set respectively, and four pieces are set on the fastening screw (2-2) between the first cantilever (2-11) and the second cantilever (2-12). The longitudinal vibration piezoelectric ceramic sheet (2-3), between each two adjacent bending vibration piezoelectric ceramic sheets (2-4), the first cantilever (2-11) and the adjacent bending vibration piezoelectric ceramic sheet (2-4), between the second cantilever (2-12) and the adjacent bending piezoelectric ceramic sheet (2-4), and every two adjacent longitudinal vibration piezoelectric ceramic sheets (2-3 ) are respectively provided with an electrode sheet (2-6), the bending vibration piezoelectric ceramic sheet (2-4) and between the electrode sheet (2-6) and the fastening screw (2-2), the longitudinal vibration piezoelectric ceramic sheet Insulating sleeves (2-5) are respectively arranged between the ceramic sheet (2-3), the electrode sheet (2-6) and the fastening screw (2-2); 第一悬臂(2-11)、第二悬臂(2-12)与圆筒(1)的外表面制成一体,圆筒(1)内壁沿圆周向均匀分布多个梳状驱动齿(1-1),多个梳状驱动齿(1-1)沿圆筒(1)的轴向与中心轴线平行;The first cantilever (2-11), the second cantilever (2-12) are integrated with the outer surface of the cylinder (1), and the inner wall of the cylinder (1) is evenly distributed with a plurality of comb-shaped driving teeth (1- 1), a plurality of comb-shaped driving teeth (1-1) are parallel to the central axis along the axial direction of the cylinder (1); 每片纵振压电陶瓷片(2-3)和每片弯振压电陶瓷片(2-4)分别沿厚度方向极化,每相邻的两片纵振压电陶瓷片(2-3)的极化方向相反,每相邻的两片弯振压电陶瓷片(2-4)的极化方向相反,每片弯振压电陶瓷片(2-4)的对称切分并重新组合的左半片和右半片的极化方向相反,分别与第一悬臂(2-11)和第二悬臂(2-12)相邻的两片弯振压电陶瓷片(2-4)的极化方向相同。Each longitudinal vibration piezoelectric ceramic sheet (2-3) and each bending vibration piezoelectric ceramic sheet (2-4) are respectively polarized along the thickness direction, and every two adjacent longitudinal vibration piezoelectric ceramic sheets (2-3 ), the polarization directions of each adjacent two bending vibration piezoelectric ceramic sheets (2-4) are opposite, and each bending vibration piezoelectric ceramic sheet (2-4) is symmetrically cut and reassembled The polarization directions of the left and right half sheets are opposite, and the polarization directions of the two bending vibration piezoelectric ceramic sheets (2-4) adjacent to the first cantilever (2-11) and the second cantilever (2-12) respectively same direction. 2、根据权利要求1所述的悬臂纵弯复合换能器式圆筒形行波超声电机振子,其特征在于:所述纵振压电陶瓷片(2-3)和弯振压电陶瓷片(2-4)的截面为矩形。2. The cantilever longitudinal bending composite transducer type cylindrical traveling wave ultrasonic motor vibrator according to claim 1, characterized in that: the longitudinal vibration piezoelectric ceramic sheet (2-3) and the bending vibration piezoelectric ceramic sheet (2-4) has a rectangular cross section.
CN2009100728183A 2009-09-08 2009-09-08 Cantilever longitudinal-bending composite transducer type cylindrical traveling-wave ultrasonic motor vibrator Expired - Fee Related CN101651431B (en)

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CN102594199A (en) * 2012-02-24 2012-07-18 南京航空航天大学 Torsional-vibration traveling wave rotary ultrasonic motor based on d15 effect
CN106113097A (en) * 2016-08-19 2016-11-16 杭州驰飞超声波设备有限公司 Hand-held composite ultraphonic ripple food carving knife
CN103560694B (en) * 2013-10-11 2018-02-06 浙江工商大学 One kind indulges curved compound ultrasonic motor
CN109245604A (en) * 2018-08-08 2019-01-18 南京航空航天大学 Sandwich piezoelectric manipulator and driving method thereof
CN111146971A (en) * 2020-02-24 2020-05-12 南京航空航天大学 Sandwich type multi-mode composite rotary piezoelectric actuator and working method thereof
CN115498917A (en) * 2022-10-21 2022-12-20 山东大学 A two-degree-of-freedom linear ultrasonic motor and its working method

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CN101262188B (en) * 2008-04-29 2011-04-27 哈尔滨工业大学 Ultrasonic motor with longitudinal vibration sandwich transducer type cylindrical stator

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Publication number Priority date Publication date Assignee Title
CN102594199A (en) * 2012-02-24 2012-07-18 南京航空航天大学 Torsional-vibration traveling wave rotary ultrasonic motor based on d15 effect
CN103560694B (en) * 2013-10-11 2018-02-06 浙江工商大学 One kind indulges curved compound ultrasonic motor
CN106113097A (en) * 2016-08-19 2016-11-16 杭州驰飞超声波设备有限公司 Hand-held composite ultraphonic ripple food carving knife
CN109245604A (en) * 2018-08-08 2019-01-18 南京航空航天大学 Sandwich piezoelectric manipulator and driving method thereof
CN109245604B (en) * 2018-08-08 2024-03-29 南京航空航天大学 Sandwich type piezoelectric mechanical arm and driving method thereof
CN111146971A (en) * 2020-02-24 2020-05-12 南京航空航天大学 Sandwich type multi-mode composite rotary piezoelectric actuator and working method thereof
CN111146971B (en) * 2020-02-24 2024-05-28 南京航空航天大学 A sandwich type multi-modal composite rotary piezoelectric actuator and working method thereof
CN115498917A (en) * 2022-10-21 2022-12-20 山东大学 A two-degree-of-freedom linear ultrasonic motor and its working method

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