CN101650246B - Curve disk-type hydraulic pressure sensor for built-in modulation circuit - Google Patents
Curve disk-type hydraulic pressure sensor for built-in modulation circuit Download PDFInfo
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- CN101650246B CN101650246B CN 200810147040 CN200810147040A CN101650246B CN 101650246 B CN101650246 B CN 101650246B CN 200810147040 CN200810147040 CN 200810147040 CN 200810147040 A CN200810147040 A CN 200810147040A CN 101650246 B CN101650246 B CN 101650246B
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- 239000000758 substrate Substances 0.000 claims abstract description 25
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Abstract
The invention discloses a curve disk-type hydraulic pressure sensor for a built-in modulation circuit, which comprises a supporting substrate, a pressing ring, supporting slices, piezoelectric ceramic wafers, an impedance convertor circuit board, an o-ring and screws, wherein the four piezoelectric ceramic wafers are bonded and connected in parallel with the two supporting slices respectively to form a sensitive receiving structure of dual three-laminations ; the supporting substrate and the pressing ring form a blade supporting structure; and an impedance convertor circuit is closely arranged in a hollow cavity of the supporting substrate between the dual three-laminations. The structural design can effectively restrain unfavorable influence brought by the external environmental change to the self performance of an impedance converting circuit after a sensor tool is sealed, and improves the stability and reliability of circuit operation.
Description
Technical field
The present invention relates to a kind of hydraulic pressure sensor, relate in particular to a kind of curve disk-type hydraulic pressure sensor of built-in modulation circuit.
Background technology
During ship navigation, underbody will produce disturbance to fluid particle on every side, thereby the fluid velocity of naval vessel surrounding space point is changed, by the fluid mechanics General Principle as can be known, the velocity variations of hydrospace water particle, the pressure of surrounding space changes with bringing under water.Hydraulic pressure sensor be exactly be used for perception, measure the front end device that the caused pressure of ship navigation changes.
Adopt the hydraulic pressure sensor of piezoelectric ceramics as sensitive element, resistance to hydrostatic pressure power, anti-underwater shock performance are good.But the tubular or annular sensitive element of the many employings of the piezoelectric type hydraulic pressure sensor of conventional structure at present, utilize the pressure of the axial deformation perception outside of this type of sensitive element to change, its LF-response sensitivity is difficult to improve and be not easy to reduce output impedance, and is higher to the impedance matching and the frequency response corresponding requirements of signal conditioning circuit.
Summary of the invention
The sensitivity that the present invention seeks to be adopted at piezoelectric type hydraulic pressure sensor in the past receives the performance limitations of structure, adopt LF-response sensitivity, the reduction output impedance of the sensitive element structure raising sensor of crooked disk, and adopt modulate circuit to place the structural design of sensor internal sealing, reach and improve sensor performance, effect easy to use.
The curve disk-type hydraulic pressure sensor of this built-in modulation circuit comprises pressure ring, O type circle, two support chips, modulate circuit, four piezoelectric ceramics disks, screw, support substrate, wherein, pressure ring has O type ring recess with contacting of support substrate on the end face, O type circle is installed, pressure ring is anchored on support substrate by screw, form the blade supporting construction, modulate circuit is circular printed board, be installed on the ring-type platform shape projection of support substrate inwall, four piezoelectric ceramics disks are thin rounded flakes, use the tow sides of conductive adhesive respectively at two support chips, the identical side pole plate of piezoelectric ceramics disk polarity is communicated with by the support chip of conducting metal material, the pole plate of an other side connects by lead, form two three laminated type sensitive elements, support substrate is a tubular metal hollow cavity, and ring-type blade raised structures is arranged on its inwall, and two the three laminated type sensitive elements that piezoelectric ceramics disk and support chip are formed place on the ring-type blade projection of support substrate.The diameter that the present invention adopts high-k and the piezoelectric ceramics disk of high piezoelectric constant and the ratio of thickness are greater than 20 times.
Beneficial effect of the present invention: the diameter that the present invention adopts high-k and the piezoelectric ceramics disk of high piezoelectric constant and the ratio of thickness are greater than 20 times, and 4 parallel connections, increase direct capacitance, the output impedance when reducing working sensor; Take the pattern of edge blade support, flexural vibrations to improve the low-frequency sensitive degree; Utilize the cavity of sensor internal structure that modulate circuit partly is installed, cancelled the signal-transmitting cable of front end, evaded that cable places between sensor and the signal conditioning circuit and the adverse effect of introducing, and adopt this kind structural design, after can making the sealing of sensor frock, effectively suppress external environment condition and change the adverse effect that the modulate circuit self performance is brought, and improve the stability and the reliability of circuit working simultaneously.
Description of drawings
The curve disk-type hydraulic pressure sensor structural representation of Fig. 1 one built-in modulation circuit;
Embodiment
Below in conjunction with drawings and Examples the present invention is further described.
Primary structure as shown in Figure 1, the present invention mainly is made up of pressure ring 1, O type circle 2, support chip 3, modulate circuit 4, piezoelectric ceramics disk 5, screw 6, support substrate 7 etc.
Four piezoelectric ceramics disks 5 are the bigger thin rounded flakes of diameter thickness, use the tow sides of conductive adhesive respectively at two support chips 3, the identical side pole plate of piezoelectric disc polarity is communicated with by the support chip 3 of conducting metal material, the pole plate of an other side is connected by lead, form the parallel-connection structure in the electric connection, form two three laminated type sensitive elements; Support substrate 7 is a tubular metal hollow cavity, be processed with ring-type blade raised structures on the inwall, two the three laminated type sensitive elements that piezoelectric ceramics disk 5 and support chip 3 are formed place on the projection of support substrate 7, fastening by screw 6 respectively with pressure ring 1, form the blade supporting construction, pressure ring 1 has O type ring recess with contacting of support substrate 7 on the end face, O type circle 2 is installed, when preventing the sensor embedding, epoxy resin adhesive liquid flows in the cavity between two the three laminated type sensitive elements; Modulate circuit 4 is circular printed board, be installed on the ring-type platform shape projection of support substrate inwall, its circuit concrete form can be the follower that is made of discrete elements such as field effect transistor, or circuit structures such as the charge amplifier of integrated operational amplifier formation, voltage amplifier.
At first, four piezoelectric ceramics disks 5 are used the tow sides of conductive adhesive at two support chips 3 respectively, form two three laminated type sensitive elements; Then, modulate circuit 4 is installed on the ring-type platform shape projection of support substrate 7 inwalls; Secondly, O type circle 2 is put into the O type ring recess of processing on the support substrate 7, two the three laminated type sensitive elements that piezoelectric ceramics disk 5 and support chip 3 are formed place on the circular blade projection of support substrate 7, and are behind the connection inner lead, fastening by screw 6 respectively with pressure ring 1.At last, above three assemblies finished of step are adopted epoxy resin embedding or rubber vulcanization process sealing after, the installation process of the curve disk-type hydraulic pressure sensor of built-in modulation circuit finishes.
After hydraulic pressure sensor is distributed into and sets the depth of water, when the target naval vessel passes through, underbody will produce disturbance to fluid particle on every side, thereby the fluid velocity of naval vessel surrounding space point is changed.By the fluid mechanics General Principle as can be known, the velocity variations of hydrospace water particle, the pressure of surrounding space changes with bringing under water, because it is flexible member in essence for three laminated type sensitive elements of this hydraulic pressure sensor, its edge is in the blade supporting construction of support substrate and pressure ring formation, form the edge freely-supported form of sensitive element flexural vibrations, and there is cavity in the support substrate inside of hydraulic pressure sensor, gas in the cavity is can be compressed, ambient pressure changes the flexural vibrations that will cause sensitive element, thereby cause the deformation of piezoelectric ceramic piece, by the characteristic of piezoceramic material itself as can be known: the deformation of piezoelectric ceramic piece causes that the internal crystal framework structure is along the non-uniform change on all directions of space, produce polarization intensity and electric displacement, and the polarization intensity that it produces is directly proportional with deformation quantity with the electric displacement variable quantity, again because there is residual polarization in piezoelectric ceramics inside, then the variation of polarization intensity and electric displacement causes the motion of the inner bound charge of piezoceramic material, the motion of this electric charge forms the output of electric signal, promptly this pressure of being given birth to by target ship shipping movable property is changed and be converted into electric signal output by piezoelectric effect, the impedance variation circuit outputs to subordinate's circuit after this electric signal is nursed one's health, and realizes the perception to ship hydraulic pressure signal.
Claims (1)
1. the curve disk-type hydraulic pressure sensor of built-in modulation circuit, comprise pressure ring (1), O type circle (2), two support chips (3), modulate circuit (4), four piezoelectric ceramics disks (5), screw (6), support substrate (7), it is characterized in that: wherein pressure ring (1) has O type ring recess with contacting of support substrate (7) on the end face, O type circle (2) is installed, pressure ring (1) is anchored on support substrate (7) by screw (6), form the blade supporting construction, modulate circuit (4) is circular printed board, be installed on the ring-type platform shape projection of support substrate (7) inwall, four piezoelectric ceramics disks (5) are diameter and the thin rounded flakes of thickness ratio greater than 20 times, use the tow sides of conductive adhesive respectively at two support chips (3), the identical side pole plate of piezoelectric ceramics disk (5) polarity is communicated with by the support chip (3) of conducting metal material, the pole plate of an other side connects by lead, form two three laminated type sensitive elements, support substrate (7) is a tubular metal hollow cavity, ring-type blade raised structures is arranged on its inwall, and piezoelectric ceramics disk (5) places on the ring-type blade projection of support substrate (7) with two the three laminated type sensitive elements that support chip (3) is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810147040 CN101650246B (en) | 2008-08-13 | 2008-08-13 | Curve disk-type hydraulic pressure sensor for built-in modulation circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810147040 CN101650246B (en) | 2008-08-13 | 2008-08-13 | Curve disk-type hydraulic pressure sensor for built-in modulation circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101650246A CN101650246A (en) | 2010-02-17 |
| CN101650246B true CN101650246B (en) | 2010-12-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200810147040 Expired - Fee Related CN101650246B (en) | 2008-08-13 | 2008-08-13 | Curve disk-type hydraulic pressure sensor for built-in modulation circuit |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506681B (en) * | 2011-11-25 | 2013-02-27 | 西安交通大学 | Piezoelectric Differential Pressure Sensor to Detect Moving Wax Removal Balls in Pipelines |
| DK3124947T3 (en) * | 2015-07-31 | 2019-04-01 | Kistler Holding Ag | PRESSURE SENSOR |
| CN112964354B (en) * | 2021-02-22 | 2023-06-09 | 中国船舶科学研究中心 | Sound pressure gradient hydrophone |
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- 2008-08-13 CN CN 200810147040 patent/CN101650246B/en not_active Expired - Fee Related
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| CN101650246A (en) | 2010-02-17 |
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