CN101639488A - Test method of micro-accelerometer reliability intensifying test - Google Patents
Test method of micro-accelerometer reliability intensifying test Download PDFInfo
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Abstract
本发明涉及MEMS类传感器－微加速度计的测试方法，具体是一种微加速度计可靠性强化试验测试方法。能够了解微加速度计在温度、振动和湿度综合应力环境下的失效模式，方便产品研发，改善产品整体性能，步骤如下：1.微加速度计于温度应力下的强化测试步骤；2.微加速度计于温度、振动综合应力下的强化测试步骤；3.微加速度计于温度、振动、湿度综合应力下的强化测试步骤。本发明兼顾温度、振动和湿度三应力对微加速度计内部结构的影响。通过对微加速度计逐步施加温度、振动和湿度三应力，了解与微加速度计功能失效前和失效时对应的三应力情况，以便解决微加速度计的缺陷，提高微加速度计的整体性能、可靠性，利于高可靠性微加速度计新产品开发。The invention relates to a testing method of a micro accelerometer, a MEMS sensor, in particular to a testing method of a micro accelerometer reliability strengthening test. To be able to understand the failure mode of the micro-accelerometer under the comprehensive stress environment of temperature, vibration and humidity, to facilitate product development and improve the overall performance of the product, the steps are as follows: 1. Intensified test steps for the micro-accelerometer under temperature stress; 2. Micro-accelerometer Intensified test procedures under the comprehensive stress of temperature and vibration; 3. Intensified test procedures of the micro accelerometer under the comprehensive stress of temperature, vibration and humidity. The invention takes into account the influence of three stresses of temperature, vibration and humidity on the internal structure of the micro accelerometer. By gradually applying the three stresses of temperature, vibration and humidity to the micro-accelerometer, understand the three stress conditions corresponding to the micro-accelerometer function before and when it fails, so as to solve the defects of the micro-accelerometer and improve the overall performance and reliability of the micro-accelerometer , which is conducive to the development of new products of high-reliability micro-accelerometers.
Description
Technical field
The present invention relates to the method for testing of MEMS class sensor-micro-acceleration gauge, specifically is a kind of test method of micro-accelerometer reliability intensifying test of taking into account temperature, vibration, humidity three stress.
Background technology
Along with the progress of society and the development of country, international competition is deepened day by day and is fierce.Market is more and more higher to the requirement of product, has both required high performance, and requiring again has high reliability, that is to say in the whole use of product, guarantee that product stable performance in phase designed life is constant.At present, because complexity, singularity and the researchist of MEMS reliability to the research deficiency of micro element reliability, make the reliability index of MEMS device lack; Simultaneously, because the singularity of little inertia device, conventional fail-test can't satisfy the demand of its reliability demonstration.Mainly adopting the test method of strengthening reliability aspect the research of reliability abroad at present, the theoretical foundation of reliability Enhancement Test is a fault physics, it is used as main research object to fault and inefficacy, by being to apply gradually the environmental stress that increases and working stress initiatively to excite product bug and the exposing product weak link in designing to the people of system, thereby reach the purpose that design deficiency of product is found as early as possible and revised.That is to say that the reliability intensifying test adds design nargin unlike traditional fail-test again by passive environmental simulation and guarantees that product is tested and appraised test and demonstration test, but excites defective on one's own initiative, and requires to excite thorough more well more.Because the environmental stress that the reliability intensifying test is applied is the design specifications limit head and shoulders above, therefore, the reliability intensifying test excites the efficient of defective very high, it can inspire all kinds of defectives that may cause product failure under normal environment for use in a short period of time, effectively shorten the lead time of high quality of products, reduce development cost greatly.
Summary of the invention
The present invention is in order in time to understand the failure mode of micro-acceleration gauge product under temperature, vibration and humidity combined stress environment, make things convenient for the technician to develop the micro-acceleration gauge product, improve the overall performance of micro-acceleration gauge, a kind of test method of micro-accelerometer reliability intensifying test of taking into account temperature, vibration, humidity three stress is provided.
The present invention adopts following technical scheme to realize: test method of micro-accelerometer reliability intensifying test, and testing procedure is as follows:
1, the reinforcement testing procedure of micro-acceleration gauge under temperature stress:
A, according to the serviceability temperature scope of micro-acceleration gauge to be measured (this serviceability temperature scope is the temperature parameter scope that manufacturer demarcates micro-acceleration gauge), setting has heated the thermometric degree, thermometric degree and temperature variation Δ T have lowered the temperature, 1 ℃≤Δ T≤5 ℃, heated the higher limit of thermometric degree, the lower limit of thermometric degree of having lowered the temperature greater than the serviceability temperature scope less than the serviceability temperature scope;
B, heat the reinforcement testing procedure: micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and in the setting case zero humidity, friction state, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, progressively upwards heat with temperature variation Δ Tmax (being 5 ℃ of maximum temperature variations), whenever heat once, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then continues to heat, and behind temperature stabilization, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make probe temperature in the high-low temperature test chamber revert to the micro-acceleration gauge function and last probe temperature when unusual occurs, and behind temperature stabilization, once more micro-acceleration gauge is carried out the reliability function test;
Functional rehabilitation as micro-acceleration gauge, then reduce temperature variation Δ T, again the last probe temperature that occurs when unusual with the micro-acceleration gauge function plays survey, upwards heat with new temperature variation Δ T, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test, when 1 ℃ on the low side of unusual corresponding probe temperature appears in the micro-acceleration gauge function, the micro-acceleration gauge function is no abnormal, the probe temperature of correspondence was last working limit temperature when then the micro-acceleration gauge function was no abnormal, proceed the above-mentioned reinforcement test process that heats, until obtaining to go up the breaking limit temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding probe temperature is last breaking limit temperature when unusual, change with batch same specification micro-acceleration gauge to be measured, proceed the above-mentioned reinforcement test process that heats, until obtaining to go up the working limit temperature;
Testing procedure is strengthened in c, cooling: with step b in like manner, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, progressively lower the temperature downwards with temperature variation Δ Tmax, every cooling once, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then continues cooling, and behind temperature stabilization, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make probe temperature in the high-low temperature test chamber revert to the micro-acceleration gauge function and last probe temperature when unusual occurs, and behind temperature stabilization, once more micro-acceleration gauge is carried out the reliability function test;
Functional rehabilitation as micro-acceleration gauge, then reduce temperature variation Δ T, again the last probe temperature that occurs when unusual with the micro-acceleration gauge function plays survey, lower the temperature downwards with new temperature variation Δ T, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test, when higher 1 ℃ of unusual corresponding probe temperature appears in the micro-acceleration gauge function, the micro-acceleration gauge function is no abnormal, the probe temperature of correspondence was following working limit temperature when then the micro-acceleration gauge function was no abnormal, proceed above-mentioned cooling and strengthen test process, until obtaining breaking limit temperature down;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding probe temperature is time breaking limit temperature when unusual, change with batch same specification micro-acceleration gauge to be measured, proceed above-mentioned cooling and strengthen test process, until obtaining working limit temperature down;
D, micro-acceleration gauge are in the reinforcement testing procedure of working limit following retention time of temperature:
D1, setting initial retention time t=2min, time increment Δ t=1min;
D2, make probe temperature in the high-low temperature test chamber remain on the last working limit temperature of micro-acceleration gauge, micro-acceleration gauge behind last working limit temperature t of following retention time, is carried out reliability function to micro-acceleration gauge and tests;
Function as micro-acceleration gauge is no abnormal, then makes micro-acceleration gauge after continuing retention time increment Delta t under the last working limit temperature, once more micro-acceleration gauge is carried out the reliability function test;
Occur unusually as the function of micro-acceleration gauge, then reducing a time increment Δ t and a reliability function with total cumulative time, to test time-consuming time span be the limes superiors retention time;
D3, make probe temperature in the high-low temperature test chamber remain on the following working limit temperature of micro-acceleration gauge, micro-acceleration gauge behind working limit temperature t of following retention time down, is carried out the reliability function test to micro-acceleration gauge;
Function as micro-acceleration gauge is no abnormal, then makes micro-acceleration gauge after continuing retention time increment Delta t under the following working limit temperature, once more micro-acceleration gauge is carried out the reliability function test;
Occur unusually as the function of micro-acceleration gauge, then reducing a time increment Δ t and a reliability function with total cumulative time, to test time-consuming time span be the smallest limit retention time;
Described total cumulative time is that initial retention time t, each time increment Δ t, each reliability function are tested time-consuming summation;
The reinforcement testing procedure of e, micro-acceleration gauge rate of temperature change in the working limit temperature range:
E1, setting initial temperature rate of change V
T=10 ℃/min, rate of temperature change increment Delta V
T=10 ℃;
E2, make probe temperature in the high-low temperature test chamber in 1 minute by on the working limit temperature with initial temperature rate of change V
TDownward working limit temperature variation (temperature is risen sharply), or by last working limit temperature with initial temperature rate of change V
TWorking limit temperature variation (making temperature decrease) is carried out the reliability function test to micro-acceleration gauge downwards;
Function as micro-acceleration gauge is no abnormal, then presses rate of temperature change increment Delta V
TImprove rate of temperature change, begin to carry out cooling in 1 minute or intensification by last working limit temperature or following working limit temperature again, micro-acceleration gauge is carried out the reliability function test;
Function as micro-acceleration gauge occurs unusual, then make the rate of temperature change in the high-low temperature test chamber be set at the unusual preceding probe temperature rate of change of micro-acceleration gauge function appearance, again begin to carry out cooling in 1 minute or intensification by last working limit temperature or following working limit temperature, micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then the Current Temperatures rate of change is decided to be the working limit rate of temperature change;
Function as micro-acceleration gauge can't be recovered, and then fixed and micro-acceleration gauge function occurs that the corresponding temperature change rate is the breaking limit rate of temperature change when unusual, and the Current Temperatures rate of change is the working limit rate of temperature change;
2, the reinforcement testing procedure of micro-acceleration gauge under temperature, vibration integrated stress:
G, the acceleration range (this scope is the acceleration parameter scope that manufacturer demarcates micro-acceleration gauge) that is suitable for according to micro-acceleration gauge to be measured, set initial vibration acceleration a and be acceleration range lower limit, vibration acceleration rate of change Δ a=5g, and random vibration frequency range f, 20Hz≤f≤10kHz, setting has heated the thermometric degree, the thermometric degree of having lowered the temperature, temperature variation Δ T, and heated the thermometric degree, the thermometric degree of having lowered the temperature is identical with the setting in the step 1, T=5 ℃ of Δ;
H, micro-acceleration gauge in heat, reinforcement testing procedure under the fluctuating acceleration state:
H1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and g sets the temperature inside the box, vibrational state parameter set by step, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, and micro-acceleration gauge imposed initial vibration acceleration a, after probe temperature is stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then presses vibration acceleration rate of change Δ a and improves vibration acceleration, and after vibration acceleration is stable, carry out the reliability function test once more;
Function as micro-acceleration gauge occurs unusual, then make the vibration acceleration that micro-acceleration gauge is applied in the high-low temperature test chamber revert to the micro-acceleration gauge function and last vibration acceleration when unusual occurs, and after vibration acceleration is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled preceding vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding vibration acceleration is the breaking limit vibration acceleration when unusual, current vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
H2, press temperature variation Δ T and improve high-low temperature test chamber build-in test temperature, and behind temperature stabilization, again micro-acceleration gauge is imposed initial vibration acceleration a, micro-acceleration gauge in the case is carried out the reliability function test; The test process of repeating step h1, obtain micro-acceleration gauge heats each probe temperature correspondence under the state in high-low temperature test chamber working limit vibration acceleration and breaking limit vibration acceleration, until micro-acceleration gauge during at initial vibration acceleration a function also occur unusually;
I, the micro-acceleration gauge reinforcement testing procedure under cooling, fluctuating acceleration state: with step h in like manner,
I1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and g sets the temperature inside the box, vibrational state parameter set by step, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, and micro-acceleration gauge imposed initial vibration acceleration a, after probe temperature is stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then presses vibration acceleration rate of change Δ a and improves vibration acceleration, and after vibration acceleration is stable, carry out the reliability function test once more;
Function as micro-acceleration gauge occurs unusual, then make the vibration acceleration that micro-acceleration gauge is applied in the high-low temperature test chamber revert to the micro-acceleration gauge function and last vibration acceleration when unusual occurs, and after vibration acceleration is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled preceding vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding vibration acceleration is the breaking limit vibration acceleration when unusual, current vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
I2, press temperature variation Δ T and reduce high-low temperature test chamber build-in test temperature, and behind temperature stabilization, again micro-acceleration gauge is imposed initial vibration acceleration a, micro-acceleration gauge in the case is carried out the reliability function test; The test process of repeating step i1, obtain micro-acceleration gauge the working limit vibration acceleration of each probe temperature correspondence and breaking limit vibration acceleration under the cooling state in high-low temperature test chamber, until micro-acceleration gauge during at initial vibration acceleration a function also occur unusually;
3, the reinforcement testing procedure of micro-acceleration gauge under temperature, vibration, humidity combined stress:
J, set heated the thermometric degree, the thermometric degree of having lowered the temperature, temperature variation Δ T and heated the thermometric degree, the thermometric degree of having lowered the temperature is identical with the setting in the step 1, T=5 ℃ of Δ; Set initial vibration acceleration a, vibration acceleration rate of change Δ a, reach random vibration frequency range f, initial vibration acceleration a, random vibration frequency range f are identical with the setting in the step 2, Δ a=5g; Set hygrometric degree RH=70%, humidity increment Delta RH=10%;
K, micro-acceleration gauge are in the reinforcement testing procedure that heats, becomes under vibration acceleration, the humidity increase state:
K1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and j sets the temperature inside the box, vibration, moisture condition parameter set by step, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, micro-acceleration gauge is imposed initial vibration acceleration a, and testing humidity is begun by playing the hygrometric degree, after probe temperature and testing humidity are stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then improves testing humidity by humidity increment Delta RH, and after testing humidity is stable, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make high-low temperature test chamber build-in test humidity revert to the micro-acceleration gauge function and last testing humidity when unusual occurs, and after testing humidity is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled Pretesting humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding testing humidity is the breaking limit testing humidity when unusual, current testing humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
K2, press vibration acceleration rate of change Δ a and improve vibration acceleration, make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH again, and after vibration acceleration, testing humidity are stable, micro-acceleration gauge in the case are carried out reliability function test; The test process of repeating step k1 obtains the working limit testing humidity and the breaking limit testing humidity of each vibration acceleration correspondence under the current probe temperature, is playing until micro-acceleration gauge that function also occurs unusually under the hygrometric degree RH state;
K3, press temperature variation Δ T and improve high-low temperature test chamber build-in test temperature, again micro-acceleration gauge is imposed initial vibration acceleration a, and make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH, after probe temperature, vibration acceleration, testing humidity are stablized, micro-acceleration gauge in the case is carried out the reliability function test; Repeating step k1 is to the test process of k2, obtain micro-acceleration gauge and in high-low temperature test chamber, heat working limit testing humidity and the breaking limit testing humidity that each probe temperature is corresponding with each vibration acceleration combination in any state in the process, also occur unusually until micro-acceleration gauge function under a hygrometric degree RH state;
L, micro-acceleration gauge in cooling, become the reinforcement testing procedure under vibration acceleration, the humidity increase state: with step k in like manner,
L1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and j sets the temperature inside the box, vibration, moisture condition parameter set by step, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, micro-acceleration gauge is imposed initial vibration acceleration a, and testing humidity is begun by playing the hygrometric degree, after probe temperature and testing humidity are stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then improves testing humidity by humidity increment Delta RH, and after testing humidity is stable, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make high-low temperature test chamber build-in test humidity revert to the micro-acceleration gauge function and last testing humidity when unusual occurs, and after testing humidity is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled Pretesting humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding testing humidity is the breaking limit testing humidity when unusual, current testing humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
L2, press vibration acceleration rate of change Δ a and improve vibration acceleration, make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH again, and after vibration acceleration, testing humidity are stable, micro-acceleration gauge in the case are carried out reliability function test; The test process of repeating step l1 obtains the working limit testing humidity and the breaking limit testing humidity of each vibration acceleration correspondence under the current probe temperature, is playing until micro-acceleration gauge that function also occurs unusually under the hygrometric degree RH state;
L3, press temperature variation Δ T and reduce high-low temperature test chamber build-in test temperature, again micro-acceleration gauge is imposed initial vibration acceleration a, and make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH, after probe temperature, vibration acceleration, testing humidity are stablized, micro-acceleration gauge in the case is carried out the reliability function test; Repeating step l1 is to the test process of l2, obtain micro-acceleration gauge working limit testing humidity that each probe temperature is corresponding with each vibration acceleration combination in any state in the temperature-fall period in high-low temperature test chamber and breaking limit testing humidity, also occur unusually until micro-acceleration gauge function under a hygrometric degree RH state.
Described reliability function test is existing measuring technology, and the passive environmental simulation of promptly mentioning in the background technology of passing through adds the test that product function was identified, verified to design nargin again.
Method of testing of the present invention is taken into account the influence to the micro-acceleration gauge inner structure of temperature, vibration and humidity three stress simultaneously: 1, temperature stress causes the micro-acceleration gauge inner structure because the difference of material thermal expansion coefficient takes place flexible, the binding site of the inner different materials of micro-acceleration gauge can become flexible, and produces the slit; 2, moisture is invaded between the slit of the inner different materials binding site of micro-acceleration gauge, and humidity stress can cause the friction factor of the binding site junction of the inner different materials of micro-acceleration gauge to reduce; 3, vibration stress causes micro-acceleration gauge generation resonance effect in characteristic frequency.By micro-acceleration gauge is progressively applied temperature, vibration and humidity three stress, detection is in different temperatures, under vibration and humidity three stress states, the function status of micro-acceleration gauge, understand with the micro-acceleration gauge disabler before and corresponding temperature during inefficacy, vibration and humidity three stress the situations working limit and the breaking limit of the parameters of this method acquisition (promptly by), obtain institute's micrometer acceleration fast in mechanical property, electrical characteristics, temperature characterisitic, vibration characteristics, defective on humidity characteristic and the function, so that the designer solves the associated disadvantages of micro-acceleration gauge, improve the overall performance of micro-acceleration gauge, reliability, be beneficial to the new product development of high reliability micro-acceleration gauge, shorten the development time, reduce R﹠D costs and after service cost.
Embodiment
Test method of micro-accelerometer reliability intensifying test, testing procedure is as follows:
1, the reinforcement testing procedure of micro-acceleration gauge under temperature stress:
A, according to the serviceability temperature scope of micro-acceleration gauge to be measured (this serviceability temperature scope is the temperature parameter scope that manufacturer demarcates micro-acceleration gauge), setting has heated the thermometric degree, thermometric degree and temperature variation Δ T have lowered the temperature, 1 ℃≤Δ T≤5 ℃, heated the higher limit of thermometric degree, the lower limit of thermometric degree of having lowered the temperature greater than the serviceability temperature scope less than the serviceability temperature scope;
B, heat the reinforcement testing procedure: micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and in the setting case zero humidity, friction state, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, progressively upwards heat with temperature variation Δ Tmax (promptly 5 ℃), whenever heat once, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then continues to heat, and behind temperature stabilization, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make probe temperature in the high-low temperature test chamber revert to the micro-acceleration gauge function and last probe temperature when unusual occurs, and behind temperature stabilization, once more micro-acceleration gauge is carried out the reliability function test;
Functional rehabilitation as micro-acceleration gauge, then reduce temperature variation Δ T, again the last probe temperature that occurs when unusual with the micro-acceleration gauge function plays survey, upwards heat with new temperature variation Δ T, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test, when 1 ℃ on the low side of unusual corresponding probe temperature appears in the micro-acceleration gauge function, the micro-acceleration gauge function is no abnormal, the probe temperature of correspondence was last working limit temperature when then the micro-acceleration gauge function was no abnormal, proceed the above-mentioned reinforcement test process that heats, until obtaining to go up the breaking limit temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding probe temperature is last breaking limit temperature when unusual, change with batch same specification micro-acceleration gauge to be measured, proceed the above-mentioned reinforcement test process that heats, until obtaining to go up the working limit temperature;
Testing procedure is strengthened in c, cooling: with step b in like manner, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, progressively lower the temperature downwards with temperature variation Δ Tmax, every cooling once, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then continues cooling, and behind temperature stabilization, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make probe temperature in the high-low temperature test chamber revert to the micro-acceleration gauge function and last probe temperature when unusual occurs, and behind temperature stabilization, once more micro-acceleration gauge is carried out the reliability function test;
Functional rehabilitation as micro-acceleration gauge, then reduce temperature variation Δ T, again the last probe temperature that occurs when unusual with the micro-acceleration gauge function plays survey, lower the temperature downwards with new temperature variation Δ T, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test, when higher 1 ℃ of unusual corresponding probe temperature appears in the micro-acceleration gauge function, the micro-acceleration gauge function is no abnormal, the probe temperature of correspondence was following working limit temperature when then the micro-acceleration gauge function was no abnormal, proceed above-mentioned cooling and strengthen test process, until obtaining breaking limit temperature down;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding probe temperature is time breaking limit temperature when unusual, change with batch same specification micro-acceleration gauge to be measured, proceed above-mentioned cooling and strengthen test process, until obtaining working limit temperature down;
D, micro-acceleration gauge are in the reinforcement testing procedure of working limit following retention time of temperature:
D1, setting initial retention time t=2min, time increment Δ t=1min;
D2, make probe temperature in the high-low temperature test chamber remain on the last working limit temperature of micro-acceleration gauge, micro-acceleration gauge behind last working limit temperature t of following retention time, is carried out reliability function to micro-acceleration gauge and tests;
Function as micro-acceleration gauge is no abnormal, then makes micro-acceleration gauge after continuing retention time increment Delta t under the last working limit temperature, once more micro-acceleration gauge is carried out the reliability function test;
Occur unusually as the function of micro-acceleration gauge, then reducing a time increment Δ t and a reliability function with total cumulative time, to test time-consuming time span be the limes superiors retention time;
D3, make probe temperature in the high-low temperature test chamber remain on the following working limit temperature of micro-acceleration gauge, micro-acceleration gauge behind working limit temperature t of following retention time down, is carried out the reliability function test to micro-acceleration gauge;
Function as micro-acceleration gauge is no abnormal, then makes micro-acceleration gauge after continuing retention time increment Delta t under the following working limit temperature, once more micro-acceleration gauge is carried out the reliability function test;
Occur unusually as the function of micro-acceleration gauge, then reducing a time increment Δ t and a reliability function with total cumulative time, to test time-consuming time span be the smallest limit retention time;
Described total cumulative time is that initial retention time t, each time increment Δ t, each reliability function are tested time-consuming summation;
The reinforcement testing procedure of e, micro-acceleration gauge rate of temperature change in the working limit temperature range:
E1, setting initial temperature rate of change V
T=10 ℃/min, rate of temperature change increment Delta V
T=10 ℃;
E2, make probe temperature in the high-low temperature test chamber in 1 minute by on the working limit temperature with initial temperature rate of change V
TDownward working limit temperature variation (temperature is risen sharply), or by last working limit temperature with initial temperature rate of change V
TWorking limit temperature variation (making temperature decrease) is carried out the reliability function test to micro-acceleration gauge downwards;
Function as micro-acceleration gauge is no abnormal, then presses rate of temperature change increment Delta V
TImprove rate of temperature change, begin to carry out cooling in 1 minute or intensification by last working limit temperature or following working limit temperature again, micro-acceleration gauge is carried out the reliability function test;
Function as micro-acceleration gauge occurs unusual, then make the rate of temperature change in the high-low temperature test chamber be set at the unusual preceding probe temperature rate of change of micro-acceleration gauge function appearance, again begin to carry out cooling in 1 minute or intensification by last working limit temperature or following working limit temperature, micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then the Current Temperatures rate of change is decided to be the working limit rate of temperature change;
Function as micro-acceleration gauge can't be recovered, and then fixed and micro-acceleration gauge function occurs that the corresponding temperature change rate is the breaking limit rate of temperature change when unusual, and the Current Temperatures rate of change is the working limit rate of temperature change;
2, the reinforcement testing procedure of micro-acceleration gauge under temperature, vibration integrated stress:
G, the acceleration range (this scope is the acceleration parameter scope that manufacturer demarcates micro-acceleration gauge) that is suitable for according to micro-acceleration gauge to be measured, set initial vibration acceleration a and be acceleration range lower limit, vibration acceleration rate of change Δ a=5g, and random vibration frequency range f, 20Hz≤f≤10kHz, setting has heated the thermometric degree, the thermometric degree of having lowered the temperature, temperature variation Δ T, and heated the thermometric degree, the thermometric degree of having lowered the temperature is identical with the setting in the step 1, T=5 ℃ of Δ;
H, micro-acceleration gauge in heat, reinforcement testing procedure under the fluctuating acceleration state:
H1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and g sets the temperature inside the box, vibrational state parameter set by step, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, and micro-acceleration gauge imposed initial vibration acceleration a, after probe temperature is stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then presses vibration acceleration rate of change Δ a and improves vibration acceleration, and after vibration acceleration is stable, carry out the reliability function test once more;
Function as micro-acceleration gauge occurs unusual, then make the vibration acceleration that micro-acceleration gauge is applied in the high-low temperature test chamber revert to the micro-acceleration gauge function and last vibration acceleration when unusual occurs, and after vibration acceleration is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled preceding vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding vibration acceleration is the breaking limit vibration acceleration when unusual, current vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
H2, press temperature variation Δ T and improve high-low temperature test chamber build-in test temperature, and behind temperature stabilization, again micro-acceleration gauge is imposed initial vibration acceleration a, micro-acceleration gauge in the case is carried out the reliability function test; The test process of repeating step h1, obtain micro-acceleration gauge heats each probe temperature correspondence under the state in high-low temperature test chamber working limit vibration acceleration and breaking limit vibration acceleration, until micro-acceleration gauge during at initial vibration acceleration a function also occur unusually;
I, the micro-acceleration gauge reinforcement testing procedure under cooling, fluctuating acceleration state: with step h in like manner,
I1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and g sets the temperature inside the box, vibrational state parameter set by step, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, and micro-acceleration gauge imposed initial vibration acceleration a, after probe temperature is stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then presses vibration acceleration rate of change Δ a and improves vibration acceleration, and after vibration acceleration is stable, carry out the reliability function test once more;
Function as micro-acceleration gauge occurs unusual, then make the vibration acceleration that micro-acceleration gauge is applied in the high-low temperature test chamber revert to the micro-acceleration gauge function and last vibration acceleration when unusual occurs, and after vibration acceleration is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled preceding vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding vibration acceleration is the breaking limit vibration acceleration when unusual, current vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
I2, press temperature variation Δ T and reduce high-low temperature test chamber build-in test temperature, and behind temperature stabilization, again micro-acceleration gauge is imposed initial vibration acceleration a, micro-acceleration gauge in the case is carried out the reliability function test; The test process of repeating step i1, obtain micro-acceleration gauge the working limit vibration acceleration of each probe temperature correspondence and breaking limit vibration acceleration under the cooling state in high-low temperature test chamber, until micro-acceleration gauge during at initial vibration acceleration a function also occur unusually;
3, the reinforcement testing procedure of micro-acceleration gauge under temperature, vibration, humidity combined stress:
J, set heated the thermometric degree, the thermometric degree of having lowered the temperature, temperature variation Δ T and heated the thermometric degree, the thermometric degree of having lowered the temperature is identical with the setting in the step 1, T=5 ℃ of Δ; Set initial vibration acceleration a, vibration acceleration rate of change Δ a, reach random vibration frequency range f, initial vibration acceleration a, random vibration frequency range f are identical with the setting in the step 2, Δ a=5g; Set hygrometric degree RH=70%, humidity increment Delta RH=10%;
K, micro-acceleration gauge are in the reinforcement testing procedure that heats, becomes under vibration acceleration, the humidity increase state:
K1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and j sets the temperature inside the box, vibration, moisture condition parameter set by step, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, micro-acceleration gauge is imposed initial vibration acceleration a, and testing humidity is begun by playing the hygrometric degree, after probe temperature and testing humidity are stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then improves testing humidity by humidity increment Delta RH, and after testing humidity is stable, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make high-low temperature test chamber build-in test humidity revert to the micro-acceleration gauge function and last testing humidity when unusual occurs, and after testing humidity is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled Pretesting humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding testing humidity is the breaking limit testing humidity when unusual, current testing humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
K2, press vibration acceleration rate of change Δ a and improve vibration acceleration, make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH again, and after vibration acceleration, testing humidity are stable, micro-acceleration gauge in the case are carried out reliability function test; The test process of repeating step k1 obtains the working limit testing humidity and the breaking limit testing humidity of each vibration acceleration correspondence under the current probe temperature, is playing until micro-acceleration gauge that function also occurs unusually under the hygrometric degree RH state;
K3, press temperature variation Δ T and improve high-low temperature test chamber build-in test temperature, again micro-acceleration gauge is imposed initial vibration acceleration a, and make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH, after probe temperature, vibration acceleration, testing humidity are stablized, micro-acceleration gauge in the case is carried out the reliability function test; Repeating step k1 is to the test process of k2, obtain micro-acceleration gauge and in high-low temperature test chamber, heat working limit testing humidity and the breaking limit testing humidity that each probe temperature is corresponding with each vibration acceleration combination in any state in the process, also occur unusually until micro-acceleration gauge function under a hygrometric degree RH state;
L, micro-acceleration gauge in cooling, become the reinforcement testing procedure under vibration acceleration, the humidity increase state: with step k in like manner,
L1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and j sets the temperature inside the box, vibration, moisture condition parameter set by step, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, micro-acceleration gauge is imposed initial vibration acceleration a, and testing humidity is begun by playing the hygrometric degree, after probe temperature and testing humidity are stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then improves testing humidity by humidity increment Delta RH, and after testing humidity is stable, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make high-low temperature test chamber build-in test humidity revert to the micro-acceleration gauge function and last testing humidity when unusual occurs, and after testing humidity is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled Pretesting humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding testing humidity is the breaking limit testing humidity when unusual, current testing humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
L2, press vibration acceleration rate of change Δ a and improve vibration acceleration, make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH again, and after vibration acceleration, testing humidity are stable, micro-acceleration gauge in the case are carried out reliability function test; The test process of repeating step l1 obtains the working limit testing humidity and the breaking limit testing humidity of each vibration acceleration correspondence under the current probe temperature, is playing until micro-acceleration gauge that function also occurs unusually under the hygrometric degree RH state;
L3, press temperature variation Δ T and reduce high-low temperature test chamber build-in test temperature, again micro-acceleration gauge is imposed initial vibration acceleration a, and make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH, after probe temperature, vibration acceleration, testing humidity are stablized, micro-acceleration gauge in the case is carried out the reliability function test; Repeating step l1 is to the test process of l2, obtain micro-acceleration gauge working limit testing humidity that each probe temperature is corresponding with each vibration acceleration combination in any state in the temperature-fall period in high-low temperature test chamber and breaking limit testing humidity, also occur unusually until micro-acceleration gauge function under a hygrometric degree RH state.
During concrete enforcement, the high-low temperature test chamber that the present invention uses will possess the required temperature adjustment of the method for the invention, humidity adjustment, timing, can vibration acceleration is provided and implement function such as reliability function test for micro-acceleration gauge, by high-low temperature chamber, humidifier, vibrator, make up jointly for vibrator provides the signal generator of pumping signal and sensor performance test platform, specifically how to make up, be easy to realize for those skilled in the art.
Claims (1)
1, a kind of test method of micro-accelerometer reliability intensifying test is characterized in that testing procedure is as follows:
1., the reinforcement testing procedure of micro-acceleration gauge under temperature stress:
A, according to the serviceability temperature scope of micro-acceleration gauge to be measured, setting has heated the thermometric degree, thermometric degree and temperature variation Δ T have lowered the temperature, 1 ℃≤Δ T≤5 ℃ has heated the higher limit of thermometric degree less than the serviceability temperature scope, the lower limit of thermometric degree greater than the serviceability temperature scope of having lowered the temperature;
B, heat the reinforcement testing procedure: micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and in the setting case zero humidity, friction state, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, progressively upwards heat with temperature variation Δ Tmax, whenever heat once, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then continues to heat, and behind temperature stabilization, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make probe temperature in the high-low temperature test chamber revert to the micro-acceleration gauge function and last probe temperature when unusual occurs, and behind temperature stabilization, once more micro-acceleration gauge is carried out the reliability function test;
Functional rehabilitation as micro-acceleration gauge, then reduce temperature variation Δ T, again the last probe temperature that occurs when unusual with the micro-acceleration gauge function plays survey, upwards heat with new temperature variation Δ T, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test, when 1 ℃ on the low side of unusual corresponding probe temperature appears in the micro-acceleration gauge function, the micro-acceleration gauge function is no abnormal, the probe temperature of correspondence was last working limit temperature when then the micro-acceleration gauge function was no abnormal, proceed the above-mentioned reinforcement test process that heats, until obtaining to go up the breaking limit temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding probe temperature is last breaking limit temperature when unusual, change with batch same specification micro-acceleration gauge to be measured, proceed the above-mentioned reinforcement test process that heats, until obtaining to go up the working limit temperature;
Testing procedure is strengthened in c, cooling: with step b in like manner, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, progressively lower the temperature downwards with temperature variation Δ Tmax, every cooling once, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then continues cooling, and behind temperature stabilization, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make probe temperature in the high-low temperature test chamber revert to the micro-acceleration gauge function and last probe temperature when unusual occurs, and behind temperature stabilization, once more micro-acceleration gauge is carried out the reliability function test;
Functional rehabilitation as micro-acceleration gauge, then reduce temperature variation Δ T, again the last probe temperature that occurs when unusual with the micro-acceleration gauge function plays survey, lower the temperature downwards with new temperature variation Δ T, after treating high-low temperature test chamber build-in test temperature stabilization, micro-acceleration gauge in the case is carried out the reliability function test, when higher 1 ℃ of unusual corresponding probe temperature appears in the micro-acceleration gauge function, the micro-acceleration gauge function is no abnormal, the probe temperature of correspondence was following working limit temperature when then the micro-acceleration gauge function was no abnormal, proceed above-mentioned cooling and strengthen test process, until obtaining breaking limit temperature down;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding probe temperature is time breaking limit temperature when unusual, change with batch same specification micro-acceleration gauge to be measured, proceed above-mentioned cooling and strengthen test process, until obtaining working limit temperature down;
D, micro-acceleration gauge are in the reinforcement testing procedure of working limit following retention time of temperature:
D1, setting initial retention time t=2min, time increment Δ t=1min;
D2, make probe temperature in the high-low temperature test chamber remain on the last working limit temperature of micro-acceleration gauge, micro-acceleration gauge behind last working limit temperature t of following retention time, is carried out reliability function to micro-acceleration gauge and tests;
Function as micro-acceleration gauge is no abnormal, then makes micro-acceleration gauge after continuing retention time increment Delta t under the last working limit temperature, once more micro-acceleration gauge is carried out the reliability function test;
Occur unusually as the function of micro-acceleration gauge, then reducing a time increment Δ t and a reliability function with total cumulative time, to test time-consuming time span be the limes superiors retention time;
D3, make probe temperature in the high-low temperature test chamber remain on the following working limit temperature of micro-acceleration gauge, micro-acceleration gauge behind working limit temperature t of following retention time down, is carried out the reliability function test to micro-acceleration gauge;
Function as micro-acceleration gauge is no abnormal, then makes micro-acceleration gauge after continuing retention time increment Delta t under the following working limit temperature, once more micro-acceleration gauge is carried out the reliability function test;
Occur unusually as the function of micro-acceleration gauge, then reducing a time increment Δ t and a reliability function with total cumulative time, to test time-consuming time span be the smallest limit retention time;
Described total cumulative time is that initial retention time t, each time increment Δ t, each reliability function are tested time-consuming summation;
The reinforcement testing procedure of e, micro-acceleration gauge rate of temperature change in the working limit temperature range:
E1, setting initial temperature rate of change V
T=10 ℃/min, rate of temperature change increment Delta V
T=10 ℃;
E2, make probe temperature in the high-low temperature test chamber in 1 minute by on the working limit temperature with initial temperature rate of change V
TDownward working limit temperature variation, or by last working limit temperature with initial temperature rate of change V
TThe working limit temperature variation is carried out the reliability function test to micro-acceleration gauge downwards;
Function as micro-acceleration gauge is no abnormal, then presses rate of temperature change increment Delta V
TImprove rate of temperature change, begin to carry out cooling in 1 minute or intensification by last working limit temperature or following working limit temperature again, micro-acceleration gauge is carried out the reliability function test;
Function as micro-acceleration gauge occurs unusual, then make the rate of temperature change in the high-low temperature test chamber be set at the unusual preceding probe temperature rate of change of micro-acceleration gauge function appearance, again begin to carry out cooling in 1 minute or intensification by last working limit temperature or following working limit temperature, micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then the Current Temperatures rate of change is decided to be the working limit rate of temperature change;
Function as micro-acceleration gauge can't be recovered, and then fixed and micro-acceleration gauge function occurs that the corresponding temperature change rate is the breaking limit rate of temperature change when unusual, and the Current Temperatures rate of change is the working limit rate of temperature change;
2., the reinforcement testing procedure of micro-acceleration gauge under temperature, vibration integrated stress:
G, the acceleration range that is suitable for according to micro-acceleration gauge to be measured, set initial vibration acceleration a and be acceleration range lower limit, vibration acceleration rate of change Δ a=5g, and random vibration frequency range f, 20Hz≤f≤10kHz, setting has heated the thermometric degree, the thermometric degree of having lowered the temperature, temperature variation Δ T, and heated the thermometric degree, the setting of thermometric degree and the step of having lowered the temperature in 1. be identical, Δ T=5 ℃;
H, micro-acceleration gauge in heat, reinforcement testing procedure under the fluctuating acceleration state:
H1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and g sets the temperature inside the box, vibrational state parameter set by step, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, and micro-acceleration gauge imposed initial vibration acceleration a, after probe temperature is stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then presses vibration acceleration rate of change Δ a and improves vibration acceleration, and after vibration acceleration is stable, carry out the reliability function test once more;
Function as micro-acceleration gauge occurs unusual, then make the vibration acceleration that micro-acceleration gauge is applied in the high-low temperature test chamber revert to the micro-acceleration gauge function and last vibration acceleration when unusual occurs, and after vibration acceleration is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled preceding vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding vibration acceleration is the breaking limit vibration acceleration when unusual, current vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
H2, press temperature variation Δ T and improve high-low temperature test chamber build-in test temperature, and behind temperature stabilization, again micro-acceleration gauge is imposed initial vibration acceleration a, micro-acceleration gauge in the case is carried out the reliability function test; The test process of repeating step h1, obtain micro-acceleration gauge heats each probe temperature correspondence under the state in high-low temperature test chamber working limit vibration acceleration and breaking limit vibration acceleration, until micro-acceleration gauge during at initial vibration acceleration a function also occur unusually;
I, the micro-acceleration gauge reinforcement testing procedure under cooling, fluctuating acceleration state: with step h in like manner,
I1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and g sets the temperature inside the box, vibrational state parameter set by step, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, and micro-acceleration gauge imposed initial vibration acceleration a, after probe temperature is stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then presses vibration acceleration rate of change Δ a and improves vibration acceleration, and after vibration acceleration is stable, carry out the reliability function test once more;
Function as micro-acceleration gauge occurs unusual, then make the vibration acceleration that micro-acceleration gauge is applied in the high-low temperature test chamber revert to the micro-acceleration gauge function and last vibration acceleration when unusual occurs, and after vibration acceleration is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled preceding vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding vibration acceleration is the breaking limit vibration acceleration when unusual, current vibration acceleration is the working limit vibration acceleration corresponding with current probe temperature, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
I2, press temperature variation Δ T and reduce high-low temperature test chamber build-in test temperature, and behind temperature stabilization, again micro-acceleration gauge is imposed initial vibration acceleration a, micro-acceleration gauge in the case is carried out the reliability function test; The test process of repeating step i1, obtain micro-acceleration gauge the working limit vibration acceleration of each probe temperature correspondence and breaking limit vibration acceleration under the cooling state in high-low temperature test chamber, until micro-acceleration gauge during at initial vibration acceleration a function also occur unusually;
3., the reinforcement testing procedure of micro-acceleration gauge under temperature, vibration, humidity combined stress:
J, set heated the thermometric degree, the thermometric degree of having lowered the temperature, temperature variation Δ T and heated the thermometric degree, the setting of thermometric degree and the step of having lowered the temperature in 1. be identical, Δ T=5 ℃; Set initial vibration acceleration a, vibration acceleration rate of change Δ a, and random vibration frequency range f, the setting in 2. of initial vibration acceleration a, random vibration frequency range f and step is identical, Δ a=5g; Set hygrometric degree RH=70%, humidity increment Delta RH=10%;
K, micro-acceleration gauge are in the reinforcement testing procedure that heats, becomes under vibration acceleration, the humidity increase state:
K1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and j sets the temperature inside the box, vibration, moisture condition parameter set by step, high-low temperature test chamber build-in test temperature is begun by having heated the thermometric degree, micro-acceleration gauge is imposed initial vibration acceleration a, and testing humidity is begun by playing the hygrometric degree, after probe temperature and testing humidity are stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then improves testing humidity by humidity increment Delta RH, and after testing humidity is stable, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make high-low temperature test chamber build-in test humidity revert to the micro-acceleration gauge function and last testing humidity when unusual occurs, and after testing humidity is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled Pretesting humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding testing humidity is the breaking limit testing humidity when unusual, current testing humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
K2, press vibration acceleration rate of change Δ a and improve vibration acceleration, make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH again, and after vibration acceleration, testing humidity are stable, micro-acceleration gauge in the case are carried out reliability function test; The test process of repeating step k1 obtains the working limit testing humidity and the breaking limit testing humidity of each vibration acceleration correspondence under the current probe temperature, is playing until micro-acceleration gauge that function also occurs unusually under the hygrometric degree RH state;
K3, press temperature variation Δ T and improve high-low temperature test chamber build-in test temperature, again micro-acceleration gauge is imposed initial vibration acceleration a, and make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH, after probe temperature, vibration acceleration, testing humidity are stablized, micro-acceleration gauge in the case is carried out the reliability function test; Repeating step k1 is to the test process of k2, obtain micro-acceleration gauge and in high-low temperature test chamber, heat working limit testing humidity and the breaking limit testing humidity that each probe temperature is corresponding with each vibration acceleration combination in any state in the process, also occur unusually until micro-acceleration gauge function under a hygrometric degree RH state;
1, micro-acceleration gauge in cooling, become the reinforcement testing procedure under vibration acceleration, the humidity increase state: with step k in like manner,
L1, micro-acceleration gauge to be measured is placed in the high-low temperature test chamber, and j sets the temperature inside the box, vibration, moisture condition parameter set by step, high-low temperature test chamber build-in test temperature is begun by the thermometric degree of having lowered the temperature, micro-acceleration gauge is imposed initial vibration acceleration a, and testing humidity is begun by playing the hygrometric degree, after probe temperature and testing humidity are stable, micro-acceleration gauge in the case is carried out the reliability function test;
Function as micro-acceleration gauge is no abnormal, then improves testing humidity by humidity increment Delta RH, and after testing humidity is stable, carries out the reliability function test once more;
Occur unusually as the function of micro-acceleration gauge, then make high-low temperature test chamber build-in test humidity revert to the micro-acceleration gauge function and last testing humidity when unusual occurs, and after testing humidity is stable, once more micro-acceleration gauge is carried out the reliability function test;
As the functional rehabilitation of micro-acceleration gauge, then settled Pretesting humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding;
Function as micro-acceleration gauge can't be recovered, then fixed and micro-acceleration gauge function occur that corresponding testing humidity is the breaking limit testing humidity when unusual, current testing humidity is and current probe temperature, working limit testing humidity that vibration acceleration is corresponding, change with batch same specification micro-acceleration gauge to be measured, proceed the subsequent reinforced test;
L2, press vibration acceleration rate of change Δ a and improve vibration acceleration, make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH again, and after vibration acceleration, testing humidity are stable, micro-acceleration gauge in the case are carried out reliability function test; The test process of repeating step l1 obtains the working limit testing humidity and the breaking limit testing humidity of each vibration acceleration correspondence under the current probe temperature, is playing until micro-acceleration gauge that function also occurs unusually under the hygrometric degree RH state;
L3, press temperature variation Δ T and reduce high-low temperature test chamber build-in test temperature, again micro-acceleration gauge is imposed initial vibration acceleration a, and make high-low temperature test chamber build-in test humidity revert to hygrometric degree RH, after probe temperature, vibration acceleration, testing humidity are stablized, micro-acceleration gauge in the case is carried out the reliability function test; Repeating step l1 is to the test process of l2, obtain micro-acceleration gauge working limit testing humidity that each probe temperature is corresponding with each vibration acceleration combination in any state in the temperature-fall period in high-low temperature test chamber and breaking limit testing humidity, also occur unusually until micro-acceleration gauge function under a hygrometric degree RH state.
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