CN101618521B - Polishing equipment and polishing jig thereof - Google Patents
Polishing equipment and polishing jig thereof Download PDFInfo
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- CN101618521B CN101618521B CN200910055147XA CN200910055147A CN101618521B CN 101618521 B CN101618521 B CN 101618521B CN 200910055147X A CN200910055147X A CN 200910055147XA CN 200910055147 A CN200910055147 A CN 200910055147A CN 101618521 B CN101618521 B CN 101618521B
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- 238000005498 polishing Methods 0.000 title claims abstract description 82
- 239000000758 substrate Substances 0.000 claims description 59
- 230000035515 penetration Effects 0.000 claims 1
- 238000007517 polishing process Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 16
- 238000009415 formwork Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明涉及一种抛光治具,且特别是有关于一种小尺寸基板的抛光治具。The invention relates to a polishing fixture, and in particular to a polishing fixture for a small-sized substrate.
背景技术 Background technique
对一般的显示面板而言,当其切割成小尺寸而欲进行后段制程时,通常均需要先透过砂纸或抛光机等抛光工具来进行抛光的动作,使其边缘的切割纹或裂纹(crack)获得一定程度的改善。For a general display panel, when it is cut into a small size and intended to be used in the back-end process, it is usually necessary to polish it with a polishing tool such as sandpaper or a polishing machine, so that the cutting lines or cracks on the edge ( crack) has been improved to a certain extent.
然而,上述的抛光过程通常仅能藉由人工的方式来进行,亦即必须由操作人员手持欲抛光的面板或基板,辅以抛光工具进行抛光才能完成。如此一来,不仅抛光的质量不稳定,生产效率无法提升,而且亦不利于操作人员的抛光过程,着实耗时费力。However, the above-mentioned polishing process can only be performed manually, that is, the operator must hold the panel or substrate to be polished and use a polishing tool to complete the polishing. As a result, not only the quality of polishing is unstable and the production efficiency cannot be improved, but it is also not conducive to the polishing process of the operator, which is really time-consuming and laborious.
发明内容 Contents of the invention
本发明的目的之一是提供一种抛光治具,藉以节省抛光过程所需耗费的时间。One of the objectives of the present invention is to provide a polishing jig so as to save the time spent in the polishing process.
本发明的另一目的是提供一种抛光设备,藉以使面板或基板抛光后的质量趋于稳定。Another object of the present invention is to provide a polishing device, so that the quality of the polished panel or substrate tends to be stable.
为了解决上述技术问题,本发明采用如下技术方案:In order to solve the above technical problems, the present invention adopts the following technical solutions:
本发明的技术方案之一是关于一种抛光治具,其包含一个模板以及一个轴承。模板中间设置有一个轴承孔,且模板上具有若干个槽孔以供基板穿设卡合,其中上述槽孔相对于模板上承载基板的表面而倾斜地设置。轴承穿设于模板中间的轴承孔,并固定模板。One of the technical solutions of the present invention relates to a polishing jig, which includes a template and a bearing. A bearing hole is provided in the middle of the template, and there are several slots on the template for the substrate to pass through and engage, wherein the slots are arranged obliquely relative to the surface of the template carrying the substrate. The bearing passes through the bearing hole in the middle of the formwork and fixes the formwork.
本发明的另一技术方案是关于一种抛光治具,其包含一个模板、一个轴承以及一个盖板。模板上具有若干个槽孔以供基板穿设卡合,且模板中间设置有一轴承孔。轴承穿设于模板中间的轴承孔,并固定模板。盖板在模板承载基板时设置于所承载的基板上方,以辅助固定所承载的基板,并施加一定压力予所承载的基板。Another technical solution of the present invention relates to a polishing jig, which includes a template, a bearing and a cover plate. There are several slot holes on the template for the substrate to pass through and engage, and a bearing hole is arranged in the middle of the template. The bearing passes through the bearing hole in the middle of the formwork and fixes the formwork. The cover plate is arranged above the carried substrate when the template carries the substrate to assist in fixing the carried substrate and apply a certain pressure to the carried substrate.
本发明的又一技术方案是关于一种抛光设备,其包含一个抛光机以及一个抛光治具,其中抛光机具有一个研磨垫,而抛光治具则设置于抛光机的研磨垫上。抛光治具包含一个模板、一个轴承以及一个盖板。模板上具有若干个槽孔以供基板穿设卡合而经由抛光机的研磨垫进行抛光,且模板中间设置有一个轴承孔。轴承穿设于模板中间的轴承孔,并固定模板。盖板是在模板承载基板时设置于所承载的基板上方,以辅助固定所承载的基板,并施加一定压力予所承载的基板。Another technical solution of the present invention relates to a polishing device, which includes a polishing machine and a polishing jig, wherein the polishing machine has a polishing pad, and the polishing jig is set on the polishing pad of the polishing machine. The polishing jig consists of a template, a bearing, and a cover. There are several slots on the template for the substrate to pass through and engage for polishing through the polishing pad of the polishing machine, and a bearing hole is arranged in the middle of the template. The bearing passes through the bearing hole in the middle of the formwork and fixes the formwork. The cover plate is arranged above the carried substrate when the template carries the substrate to assist in fixing the carried substrate and apply a certain pressure to the carried substrate.
根据本发明的技术内容,应用前述抛光设备及其抛光治具不仅有利于操作人员对面板或基板进行抛光,而且更可提升生产效率、稳定抛光的质量,有效地加强面板或基板的抗折强度(Bending Strength)。According to the technical content of the present invention, the application of the aforementioned polishing equipment and its polishing fixtures not only facilitates the operator to polish the panel or substrate, but also improves production efficiency, stabilizes the quality of polishing, and effectively enhances the flexural strength of the panel or substrate (Bending Strength).
附图说明 Description of drawings
图1为依照本发明实施例的一种抛光治具的示意图。FIG. 1 is a schematic diagram of a polishing jig according to an embodiment of the present invention.
图2为依照本发明实施例的一种基板倾斜地承载于模板上的示意图。FIG. 2 is a schematic diagram of a substrate obliquely carried on a template according to an embodiment of the present invention.
图3为如图1所示的抛光治具分解后的示意图。FIG. 3 is a disassembled schematic diagram of the polishing jig shown in FIG. 1 .
图4为依照本发明另一实施例的模板的示意图。FIG. 4 is a schematic diagram of a template according to another embodiment of the present invention.
图5A为依照本发明实施例的一种抛光治具辅助件的示意图。FIG. 5A is a schematic diagram of a polishing jig auxiliary part according to an embodiment of the present invention.
图5B为依照本发明实施例的另一种抛光治具辅助件的示意图。FIG. 5B is a schematic diagram of another polishing jig auxiliary part according to an embodiment of the present invention.
图6为依照本发明实施例的一种由模板、盖板和配重块所组成的抛光治具的示意图。Fig. 6 is a schematic diagram of a polishing jig composed of a template, a cover plate and a counterweight according to an embodiment of the present invention.
图7为依照本发明实施例的一种抛光设备的示意图。FIG. 7 is a schematic diagram of a polishing device according to an embodiment of the present invention.
图中主要符号说明:Explanation of main symbols in the figure:
100、200:抛光治具100, 200: polishing fixture
102:基板102: Substrate
110、110a:模板110, 110a: template
112:轴承孔112: Bearing hole
114、114a:槽孔114, 114a: Slot hole
120:轴承120: Bearing
122:第一连接件122: first connector
124:第二连接件124: Second connector
130、130a:盖板130, 130a: cover plate
132、132a、142:通孔132, 132a, 142: through holes
134、134a:盖持部134, 134a: cover holding part
140:配重块140: Counterweight
300:抛光设备300: polishing equipment
310:抛光机310: polishing machine
320:研磨垫320: Grinding pad
具体实施方式 Detailed ways
下面结合附图进一步说明本发明的具体实施。The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.
图1是依照本发明实施例的一种抛光治具的示意图。抛光治具100包含模板110以及轴承120,其中模板110的中间设置有轴承孔112(如图3所示),模板110上具有若干个槽孔114,以供多个基板(如:切割后的小尺寸面板)102穿设卡合,进而承载于模板110上,其中所承载的基板102可依实际上抛光的需求,于穿设槽孔114之后略微凸出模板110承载表面的相对一面,使得基板102凸出模板110的边缘部分有利于作抛光的动作。另外,上述轴承120以及轴承孔112的形状不限于图1和图3所示,本领域具通常知识者可依据实际应用,将其设计为矩形、三角形、椭圆形或多边形等非圆结构,藉以在进行研磨动作时,方便带动由轴承120所串接的部件而同时进行转动。此外,上述槽孔114相对于模板110的表面呈倾斜地设置,使得基板102倾斜地承载于模板110上。图2是依照本发明实施例的一种基板倾斜地承载于模板上的示意图。如图1与图2所示,槽孔114以及垂直模板110的承载表面的垂直面之间,两者所形成的角度可大约为0~50度,使得基板102倾斜约0~50度而承载于模板110上。FIG. 1 is a schematic diagram of a polishing fixture according to an embodiment of the present invention. The
另一方面,轴承120则穿设于模板110中间的轴承孔112,并固定模板110。在一实施例中,模板110由铁氟龙(Teflon)材料所制成,且其上的槽孔114数目约3~60个,惟不限于此,可依实际需求调整。另外,每个槽孔的宽度应略小于基板的厚度,以使基板插入槽孔时,受到一个较大的夹持力,防止在研磨过程中基板从槽孔中滑落出去。On the other hand, the
图3是如图1所示的抛光治具分解后的示意图。如图3所示,槽孔114可以呈圆形放射状均匀分布于模板110上,而轴承120则可包含第一连接件122以及第二连接件124,且第一连接件122和第二连接件124的第一端透过轴承孔112相互连接并固定,藉以将模板110固定于第一连接件122和第二连接件124之间。值得注意的是,第一连接件122和第二连接件124的位置可互相替换,如此一来,当基板102需要换边作抛光的动作时,则无需将所承载的基板102卸下,而仅需将第一连接件122和第二连接件124的位置互相替换即可。在一实施例中,当第一连接件122和第二连接件124与模板110组合之后,第一连接件122会凸出模板110表面约0.5~5毫米(mm),而第二连接件124则凸出模板110表面约10~70毫米(mm)。FIG. 3 is a disassembled schematic diagram of the polishing jig shown in FIG. 1 . As shown in Figure 3, the
图4是依照本发明另一实施例的模板的示意图。相较于图3,槽孔114a分布于模板110a上的三个区域,其中每一个区域的槽孔114a均相互平行,且与其它区域中的槽孔间形成相同角度。以本实施例而言,相邻两区域之槽孔间所形成的角度均约为120度。Fig. 4 is a schematic diagram of a template according to another embodiment of the present invention. Compared with FIG. 3 , the
此外,抛光治具100更可包括盖板,其用以在模板110承载基板102时设置于所承载的基板102上方。图5As依照本发明实施例的一种抛光治具辅助件的示意图。请同时参照图1、图2和图5A,盖板130可依实际需求设计为平板盖体或是空心罩体,并在其中间设有通孔132,藉以供轴承120穿透,且盖板130上更可设置有盖持部134,以方便操作者拿取盖板130。当基板102承载于模板110上时,盖板130可设置于所承载的基板102上方,以辅助固定所承载的基板102,并施加一定压力予所承载的基板102,而此时轴承120中的第二连接件124的第二端会因此穿过盖板130的通孔132。In addition, the polishing
再者,抛光治具100更可包括配重块140,其用以设置于盖板130上,辅助施加额外的压力予所承载的基板102。在一实施例中,配重块140的重量约为0.5~2Kg。此外,配重块140中间更设有另一通孔142,以供盖板130的盖持部134穿透,而盖持部134的高度可大于或等于配重块140的厚度。在一实施例中,配重块140呈一同心圆状,其外直径约100~150毫米(mm),其内直径约20~60毫米(mm)。当盖持部134的高度大于配重块140的厚度达相当程度时,操作者可依据实际的需求,将多个不同重量或相同重量的配重块140加于盖板130之上,藉以增加所需的压力。Furthermore, the polishing
图5B是依照本发明另一实施例的盖板的示意图。相较于图5A而言,盖板130a上设置有另一握把形式的盖持部134a,藉以供操作者更方便拿取盖板130a。同样地,当基板102承载于模板110上时,盖板130a可设置于所承载的基板102上方,以辅助固定所承载的基板102,并施加一定压力予所承载的基板102,而此时轴承120中的第二连接件124的第二端会因此穿过盖板130a的通孔132a。FIG. 5B is a schematic diagram of a cover plate according to another embodiment of the present invention. Compared with FIG. 5A , the cover 130a is provided with another
图6是依照本发明实施例的一种由模板、盖板和配重块所组成的抛光治具的示意图。如图所示,抛光治具200系可由模板110、盖板130和配重块140所组成,其中可呈空心罩体的盖板130置放于模板110上,并盖住模板110所承载的基板之后,配重块140再加于盖板130之上,增加额外的压力予所承载的基板。另外,上述轴承120以及轴承孔112的形状不限于图1和图3所示,本领域具通常知识者可依据实际应用,将其设计为矩形、三角形、椭圆形或多边形等非圆结构,且上述模板110、盖板130及配重块140等部件,亦可相对应轴承120和轴承孔112作结构上的改变,藉以在组装时方便藉由轴承120和轴承孔112作串接,并在进行研磨动作时,方便藉由轴承120带动所串接的模板110、盖板130及配重块140等部件而同时进行转动。Fig. 6 is a schematic diagram of a polishing jig composed of a template, a cover plate and a counterweight according to an embodiment of the present invention. As shown in the figure, the polishing
图7是依照本发明实施例的一种抛光设备的示意图。抛光设备300包括抛光机310以及如图6所示的抛光治具200,其中抛光机310上具有研磨垫320,而抛光治具200则是当基板欲进行抛光动作时,将其设置于研磨垫320上,藉由研磨垫320对抛光治具200所承载的基板进行抛光。值得注意的是,操作人员可选择将抛光治具200及其中的基板组设好之后,再将其设置于研磨垫320上,或者可选择先将模板设置于研磨垫320上,然后再将基板、盖板和配重块依序设置于模板上,或者可依实际情形作不同顺序的设置,在此并不以图7所示为限。在一实施例中,操作人员将抛光机310中的研磨浆(polish slurry)流速设定为1~10m3/min,而将研磨垫320的转速设定为10~150rpm/min,藉以对基板作有效的抛光动作。Fig. 7 is a schematic diagram of a polishing device according to an embodiment of the present invention. The
由上述本发明的实施例可知,应用前述抛光设备及其抛光治具不仅有利于操作人员对面板或基板进行抛光,而且更可提升生产效率、稳定抛光的质量,有效地加强面板或基板的抗折强度(Bending Strength)。From the above-mentioned embodiments of the present invention, it can be seen that the application of the aforementioned polishing equipment and its polishing fixtures not only facilitates the operator to polish the panel or substrate, but also improves production efficiency, stabilizes the quality of polishing, and effectively strengthens the resistance of the panel or substrate. Bending Strength.
虽然本发明已以实施方式揭露如上,然其并非用以限定本发明,任何本领域的普通技术人员,在不脱离本发明的精神和范围内,当可作各种更动与润饰,因此本发明的保护范围当视权利要求书的范围所界定者为准。Although the present invention has been disclosed above in terms of implementation, it is not intended to limit the present invention. Any person skilled in the art may make various modifications and modifications without departing from the spirit and scope of the present invention. Therefore, this The scope of protection of the invention should be defined by the scope of the claims.
Claims (10)
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US3868794A (en) * | 1973-07-16 | 1975-03-04 | Owens Illinois Inc | Method of finishing laser rods and fixtures therefor |
US4819386A (en) * | 1987-07-20 | 1989-04-11 | Northwestern Bell Corporation | Optic fiber sanding fixture and method of using |
US5720653A (en) * | 1994-11-10 | 1998-02-24 | The Whitaker | Universal polishing fixture for polishing optical fiber connectors |
CN1826208A (en) * | 2003-07-24 | 2006-08-30 | 康宁股份有限公司 | Methods and apparatus for edge finishing glass sheets |
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