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CN101618521B - Polishing equipment and polishing jig thereof - Google Patents

Polishing equipment and polishing jig thereof Download PDF

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Publication number
CN101618521B
CN101618521B CN200910055147XA CN200910055147A CN101618521B CN 101618521 B CN101618521 B CN 101618521B CN 200910055147X A CN200910055147X A CN 200910055147XA CN 200910055147 A CN200910055147 A CN 200910055147A CN 101618521 B CN101618521 B CN 101618521B
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polishing
template
substrate
bearing
slots
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CN101618521A (en
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陈亚芬
黄业桂
崔敏华
张其才
储中文
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AU Optronics Suzhou Corp Ltd
AUO Corp
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AU Optronics Suzhou Corp Ltd
AU Optronics Corp
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention provides a polishing jig for saving the time consumed in the polishing process, comprising a module and a bearing, wherein the middle of the module is provided with a bearing hole, and the module is provided with a plurality of slotted holes for being penetrated by and buckled with a base plate, wherein the slotted holes are obliquely arranged relative to the surface of the module, which bears the base plate; and the bearing penetrates through the bearing hole of the module and is fixed with the module. Besides, the invention also discloses polishing equipment for enabling the quality of a panel or the base plate which is polished to be stable.

Description

抛光设备及其抛光治具Polishing equipment and polishing fixtures

技术领域 technical field

本发明涉及一种抛光治具,且特别是有关于一种小尺寸基板的抛光治具。The invention relates to a polishing fixture, and in particular to a polishing fixture for a small-sized substrate.

背景技术 Background technique

对一般的显示面板而言,当其切割成小尺寸而欲进行后段制程时,通常均需要先透过砂纸或抛光机等抛光工具来进行抛光的动作,使其边缘的切割纹或裂纹(crack)获得一定程度的改善。For a general display panel, when it is cut into a small size and intended to be used in the back-end process, it is usually necessary to polish it with a polishing tool such as sandpaper or a polishing machine, so that the cutting lines or cracks on the edge ( crack) has been improved to a certain extent.

然而,上述的抛光过程通常仅能藉由人工的方式来进行,亦即必须由操作人员手持欲抛光的面板或基板,辅以抛光工具进行抛光才能完成。如此一来,不仅抛光的质量不稳定,生产效率无法提升,而且亦不利于操作人员的抛光过程,着实耗时费力。However, the above-mentioned polishing process can only be performed manually, that is, the operator must hold the panel or substrate to be polished and use a polishing tool to complete the polishing. As a result, not only the quality of polishing is unstable and the production efficiency cannot be improved, but it is also not conducive to the polishing process of the operator, which is really time-consuming and laborious.

发明内容 Contents of the invention

本发明的目的之一是提供一种抛光治具,藉以节省抛光过程所需耗费的时间。One of the objectives of the present invention is to provide a polishing jig so as to save the time spent in the polishing process.

本发明的另一目的是提供一种抛光设备,藉以使面板或基板抛光后的质量趋于稳定。Another object of the present invention is to provide a polishing device, so that the quality of the polished panel or substrate tends to be stable.

为了解决上述技术问题,本发明采用如下技术方案:In order to solve the above technical problems, the present invention adopts the following technical solutions:

本发明的技术方案之一是关于一种抛光治具,其包含一个模板以及一个轴承。模板中间设置有一个轴承孔,且模板上具有若干个槽孔以供基板穿设卡合,其中上述槽孔相对于模板上承载基板的表面而倾斜地设置。轴承穿设于模板中间的轴承孔,并固定模板。One of the technical solutions of the present invention relates to a polishing jig, which includes a template and a bearing. A bearing hole is provided in the middle of the template, and there are several slots on the template for the substrate to pass through and engage, wherein the slots are arranged obliquely relative to the surface of the template carrying the substrate. The bearing passes through the bearing hole in the middle of the formwork and fixes the formwork.

本发明的另一技术方案是关于一种抛光治具,其包含一个模板、一个轴承以及一个盖板。模板上具有若干个槽孔以供基板穿设卡合,且模板中间设置有一轴承孔。轴承穿设于模板中间的轴承孔,并固定模板。盖板在模板承载基板时设置于所承载的基板上方,以辅助固定所承载的基板,并施加一定压力予所承载的基板。Another technical solution of the present invention relates to a polishing jig, which includes a template, a bearing and a cover plate. There are several slot holes on the template for the substrate to pass through and engage, and a bearing hole is arranged in the middle of the template. The bearing passes through the bearing hole in the middle of the formwork and fixes the formwork. The cover plate is arranged above the carried substrate when the template carries the substrate to assist in fixing the carried substrate and apply a certain pressure to the carried substrate.

本发明的又一技术方案是关于一种抛光设备,其包含一个抛光机以及一个抛光治具,其中抛光机具有一个研磨垫,而抛光治具则设置于抛光机的研磨垫上。抛光治具包含一个模板、一个轴承以及一个盖板。模板上具有若干个槽孔以供基板穿设卡合而经由抛光机的研磨垫进行抛光,且模板中间设置有一个轴承孔。轴承穿设于模板中间的轴承孔,并固定模板。盖板是在模板承载基板时设置于所承载的基板上方,以辅助固定所承载的基板,并施加一定压力予所承载的基板。Another technical solution of the present invention relates to a polishing device, which includes a polishing machine and a polishing jig, wherein the polishing machine has a polishing pad, and the polishing jig is set on the polishing pad of the polishing machine. The polishing jig consists of a template, a bearing, and a cover. There are several slots on the template for the substrate to pass through and engage for polishing through the polishing pad of the polishing machine, and a bearing hole is arranged in the middle of the template. The bearing passes through the bearing hole in the middle of the formwork and fixes the formwork. The cover plate is arranged above the carried substrate when the template carries the substrate to assist in fixing the carried substrate and apply a certain pressure to the carried substrate.

根据本发明的技术内容,应用前述抛光设备及其抛光治具不仅有利于操作人员对面板或基板进行抛光,而且更可提升生产效率、稳定抛光的质量,有效地加强面板或基板的抗折强度(Bending Strength)。According to the technical content of the present invention, the application of the aforementioned polishing equipment and its polishing fixtures not only facilitates the operator to polish the panel or substrate, but also improves production efficiency, stabilizes the quality of polishing, and effectively enhances the flexural strength of the panel or substrate (Bending Strength).

附图说明 Description of drawings

图1为依照本发明实施例的一种抛光治具的示意图。FIG. 1 is a schematic diagram of a polishing jig according to an embodiment of the present invention.

图2为依照本发明实施例的一种基板倾斜地承载于模板上的示意图。FIG. 2 is a schematic diagram of a substrate obliquely carried on a template according to an embodiment of the present invention.

图3为如图1所示的抛光治具分解后的示意图。FIG. 3 is a disassembled schematic diagram of the polishing jig shown in FIG. 1 .

图4为依照本发明另一实施例的模板的示意图。FIG. 4 is a schematic diagram of a template according to another embodiment of the present invention.

图5A为依照本发明实施例的一种抛光治具辅助件的示意图。FIG. 5A is a schematic diagram of a polishing jig auxiliary part according to an embodiment of the present invention.

图5B为依照本发明实施例的另一种抛光治具辅助件的示意图。FIG. 5B is a schematic diagram of another polishing jig auxiliary part according to an embodiment of the present invention.

图6为依照本发明实施例的一种由模板、盖板和配重块所组成的抛光治具的示意图。Fig. 6 is a schematic diagram of a polishing jig composed of a template, a cover plate and a counterweight according to an embodiment of the present invention.

图7为依照本发明实施例的一种抛光设备的示意图。FIG. 7 is a schematic diagram of a polishing device according to an embodiment of the present invention.

图中主要符号说明:Explanation of main symbols in the figure:

100、200:抛光治具100, 200: polishing fixture

102:基板102: Substrate

110、110a:模板110, 110a: template

112:轴承孔112: Bearing hole

114、114a:槽孔114, 114a: Slot hole

120:轴承120: Bearing

122:第一连接件122: first connector

124:第二连接件124: Second connector

130、130a:盖板130, 130a: cover plate

132、132a、142:通孔132, 132a, 142: through holes

134、134a:盖持部134, 134a: cover holding part

140:配重块140: Counterweight

300:抛光设备300: polishing equipment

310:抛光机310: polishing machine

320:研磨垫320: Grinding pad

具体实施方式 Detailed ways

下面结合附图进一步说明本发明的具体实施。The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

图1是依照本发明实施例的一种抛光治具的示意图。抛光治具100包含模板110以及轴承120,其中模板110的中间设置有轴承孔112(如图3所示),模板110上具有若干个槽孔114,以供多个基板(如:切割后的小尺寸面板)102穿设卡合,进而承载于模板110上,其中所承载的基板102可依实际上抛光的需求,于穿设槽孔114之后略微凸出模板110承载表面的相对一面,使得基板102凸出模板110的边缘部分有利于作抛光的动作。另外,上述轴承120以及轴承孔112的形状不限于图1和图3所示,本领域具通常知识者可依据实际应用,将其设计为矩形、三角形、椭圆形或多边形等非圆结构,藉以在进行研磨动作时,方便带动由轴承120所串接的部件而同时进行转动。此外,上述槽孔114相对于模板110的表面呈倾斜地设置,使得基板102倾斜地承载于模板110上。图2是依照本发明实施例的一种基板倾斜地承载于模板上的示意图。如图1与图2所示,槽孔114以及垂直模板110的承载表面的垂直面之间,两者所形成的角度可大约为0~50度,使得基板102倾斜约0~50度而承载于模板110上。FIG. 1 is a schematic diagram of a polishing fixture according to an embodiment of the present invention. The polishing jig 100 comprises a template 110 and a bearing 120, wherein a bearing hole 112 (as shown in FIG. 3 ) is arranged in the middle of the template 110, and several slots 114 are provided on the template 110 for a plurality of substrates (such as: after cutting) The small-sized panel) 102 is pierced and engaged, and then carried on the template 110, wherein the substrate 102 carried can slightly protrude from the opposite side of the template 110 carrying surface after the slot 114 is pierced according to the actual polishing requirements, so that The edge portion of the substrate 102 protruding from the template 110 is beneficial for polishing. In addition, the shapes of the bearing 120 and the bearing hole 112 are not limited to those shown in FIG. 1 and FIG. During the grinding action, it is convenient to drive the components connected in series by the bearing 120 to rotate at the same time. In addition, the slots 114 are disposed obliquely relative to the surface of the template 110 , so that the substrate 102 is obliquely carried on the template 110 . Fig. 2 is a schematic diagram of a substrate obliquely carried on a template according to an embodiment of the present invention. As shown in FIG. 1 and FIG. 2 , the angle formed between the slot 114 and the vertical surface of the loading surface of the vertical template 110 may be about 0-50 degrees, so that the substrate 102 is tilted about 0-50 degrees to carry the load. on the template 110.

另一方面,轴承120则穿设于模板110中间的轴承孔112,并固定模板110。在一实施例中,模板110由铁氟龙(Teflon)材料所制成,且其上的槽孔114数目约3~60个,惟不限于此,可依实际需求调整。另外,每个槽孔的宽度应略小于基板的厚度,以使基板插入槽孔时,受到一个较大的夹持力,防止在研磨过程中基板从槽孔中滑落出去。On the other hand, the bearing 120 passes through the bearing hole 112 in the middle of the template 110 and fixes the template 110 . In one embodiment, the template 110 is made of Teflon material, and the number of slots 114 thereon is about 3-60, but it is not limited thereto, and can be adjusted according to actual needs. In addition, the width of each slot hole should be slightly smaller than the thickness of the substrate, so that when the substrate is inserted into the slot hole, it receives a larger clamping force, preventing the substrate from slipping out of the slot hole during the grinding process.

图3是如图1所示的抛光治具分解后的示意图。如图3所示,槽孔114可以呈圆形放射状均匀分布于模板110上,而轴承120则可包含第一连接件122以及第二连接件124,且第一连接件122和第二连接件124的第一端透过轴承孔112相互连接并固定,藉以将模板110固定于第一连接件122和第二连接件124之间。值得注意的是,第一连接件122和第二连接件124的位置可互相替换,如此一来,当基板102需要换边作抛光的动作时,则无需将所承载的基板102卸下,而仅需将第一连接件122和第二连接件124的位置互相替换即可。在一实施例中,当第一连接件122和第二连接件124与模板110组合之后,第一连接件122会凸出模板110表面约0.5~5毫米(mm),而第二连接件124则凸出模板110表面约10~70毫米(mm)。FIG. 3 is a disassembled schematic diagram of the polishing jig shown in FIG. 1 . As shown in Figure 3, the slots 114 can be evenly distributed on the template 110 in a circular radial shape, and the bearing 120 can include a first connecting piece 122 and a second connecting piece 124, and the first connecting piece 122 and the second connecting piece The first ends of 124 are connected and fixed through the bearing hole 112 , so as to fix the template 110 between the first connecting part 122 and the second connecting part 124 . It is worth noting that the positions of the first connecting member 122 and the second connecting member 124 can be replaced with each other. In this way, when the substrate 102 needs to change sides for polishing, it is not necessary to remove the supported substrate 102, but It is only necessary to replace the positions of the first connecting member 122 and the second connecting member 124 with each other. In one embodiment, after the first connector 122 and the second connector 124 are combined with the template 110, the first connector 122 will protrude from the surface of the template 110 by about 0.5-5 millimeters (mm), and the second connector 124 Then protrude from the surface of the template 110 by about 10-70 millimeters (mm).

图4是依照本发明另一实施例的模板的示意图。相较于图3,槽孔114a分布于模板110a上的三个区域,其中每一个区域的槽孔114a均相互平行,且与其它区域中的槽孔间形成相同角度。以本实施例而言,相邻两区域之槽孔间所形成的角度均约为120度。Fig. 4 is a schematic diagram of a template according to another embodiment of the present invention. Compared with FIG. 3 , the slots 114 a are distributed in three regions on the template 110 a , wherein the slots 114 a in each region are parallel to each other and form the same angle with the slots in other regions. In this embodiment, the angles formed between the slots in two adjacent areas are about 120 degrees.

此外,抛光治具100更可包括盖板,其用以在模板110承载基板102时设置于所承载的基板102上方。图5As依照本发明实施例的一种抛光治具辅助件的示意图。请同时参照图1、图2和图5A,盖板130可依实际需求设计为平板盖体或是空心罩体,并在其中间设有通孔132,藉以供轴承120穿透,且盖板130上更可设置有盖持部134,以方便操作者拿取盖板130。当基板102承载于模板110上时,盖板130可设置于所承载的基板102上方,以辅助固定所承载的基板102,并施加一定压力予所承载的基板102,而此时轴承120中的第二连接件124的第二端会因此穿过盖板130的通孔132。In addition, the polishing jig 100 may further include a cover plate, which is configured to be disposed above the substrate 102 carried by the template 110 when carrying the substrate 102 . FIG. 5A is a schematic diagram of a polishing jig auxiliary part according to an embodiment of the present invention. Please refer to Figure 1, Figure 2 and Figure 5A at the same time, the cover plate 130 can be designed as a flat cover or a hollow cover according to actual needs, and a through hole 132 is provided in the middle for the bearing 120 to penetrate, and the cover plate A cover 134 may be further provided on the cover 130 to facilitate the operator to take the cover 130 . When the substrate 102 is loaded on the template 110, the cover plate 130 can be arranged above the loaded substrate 102 to assist in fixing the loaded substrate 102 and apply a certain pressure to the loaded substrate 102, while the bearing 120 The second end of the second connecting piece 124 thus passes through the through hole 132 of the cover plate 130 .

再者,抛光治具100更可包括配重块140,其用以设置于盖板130上,辅助施加额外的压力予所承载的基板102。在一实施例中,配重块140的重量约为0.5~2Kg。此外,配重块140中间更设有另一通孔142,以供盖板130的盖持部134穿透,而盖持部134的高度可大于或等于配重块140的厚度。在一实施例中,配重块140呈一同心圆状,其外直径约100~150毫米(mm),其内直径约20~60毫米(mm)。当盖持部134的高度大于配重块140的厚度达相当程度时,操作者可依据实际的需求,将多个不同重量或相同重量的配重块140加于盖板130之上,藉以增加所需的压力。Furthermore, the polishing jig 100 may further include a counterweight 140 for being disposed on the cover plate 130 to assist in applying extra pressure to the supported substrate 102 . In one embodiment, the weight of the counterweight 140 is about 0.5-2Kg. In addition, another through hole 142 is further provided in the center of the counterweight 140 for the covering portion 134 of the cover plate 130 to pass through, and the height of the covering portion 134 can be greater than or equal to the thickness of the counterweight 140 . In one embodiment, the counterweight 140 is in the shape of a concentric circle, with an outer diameter of about 100-150 millimeters (mm), and an inner diameter of about 20-60 millimeters (mm). When the height of the cover portion 134 is greater than the thickness of the counterweight 140 to a considerable extent, the operator can add a plurality of counterweights 140 of different weights or the same weight to the cover 130 according to actual needs, so as to increase required pressure.

图5B是依照本发明另一实施例的盖板的示意图。相较于图5A而言,盖板130a上设置有另一握把形式的盖持部134a,藉以供操作者更方便拿取盖板130a。同样地,当基板102承载于模板110上时,盖板130a可设置于所承载的基板102上方,以辅助固定所承载的基板102,并施加一定压力予所承载的基板102,而此时轴承120中的第二连接件124的第二端会因此穿过盖板130a的通孔132a。FIG. 5B is a schematic diagram of a cover plate according to another embodiment of the present invention. Compared with FIG. 5A , the cover 130a is provided with another cover portion 134a in the form of a handle, so that the operator can take the cover 130a more conveniently. Similarly, when the substrate 102 is loaded on the template 110, the cover plate 130a can be disposed above the loaded substrate 102 to assist in fixing the loaded substrate 102 and apply a certain pressure to the loaded substrate 102. At this time, the bearing The second end of the second connecting piece 124 in 120 will therefore pass through the through hole 132a of the cover plate 130a.

图6是依照本发明实施例的一种由模板、盖板和配重块所组成的抛光治具的示意图。如图所示,抛光治具200系可由模板110、盖板130和配重块140所组成,其中可呈空心罩体的盖板130置放于模板110上,并盖住模板110所承载的基板之后,配重块140再加于盖板130之上,增加额外的压力予所承载的基板。另外,上述轴承120以及轴承孔112的形状不限于图1和图3所示,本领域具通常知识者可依据实际应用,将其设计为矩形、三角形、椭圆形或多边形等非圆结构,且上述模板110、盖板130及配重块140等部件,亦可相对应轴承120和轴承孔112作结构上的改变,藉以在组装时方便藉由轴承120和轴承孔112作串接,并在进行研磨动作时,方便藉由轴承120带动所串接的模板110、盖板130及配重块140等部件而同时进行转动。Fig. 6 is a schematic diagram of a polishing jig composed of a template, a cover plate and a counterweight according to an embodiment of the present invention. As shown in the figure, the polishing jig 200 can be composed of a template 110, a cover plate 130 and a counterweight 140, wherein the cover plate 130, which can be a hollow cover, is placed on the template 110 and covers the mold plate 110. After the substrate, the counterweight 140 is placed on the cover plate 130 to add additional pressure to the substrate being carried. In addition, the shapes of the bearing 120 and the bearing hole 112 are not limited to those shown in FIG. 1 and FIG. 3 , those skilled in the art can design them as non-circular structures such as rectangles, triangles, ellipses, or polygons according to practical applications, and The above-mentioned template 110, cover plate 130, counterweight 140 and other parts can also be changed in structure corresponding to the bearing 120 and the bearing hole 112, so as to facilitate the serial connection through the bearing 120 and the bearing hole 112 during assembly, and During the grinding action, it is convenient to use the bearing 120 to drive the serially connected components such as the template 110 , the cover plate 130 , and the counterweight 140 to rotate simultaneously.

图7是依照本发明实施例的一种抛光设备的示意图。抛光设备300包括抛光机310以及如图6所示的抛光治具200,其中抛光机310上具有研磨垫320,而抛光治具200则是当基板欲进行抛光动作时,将其设置于研磨垫320上,藉由研磨垫320对抛光治具200所承载的基板进行抛光。值得注意的是,操作人员可选择将抛光治具200及其中的基板组设好之后,再将其设置于研磨垫320上,或者可选择先将模板设置于研磨垫320上,然后再将基板、盖板和配重块依序设置于模板上,或者可依实际情形作不同顺序的设置,在此并不以图7所示为限。在一实施例中,操作人员将抛光机310中的研磨浆(polish slurry)流速设定为1~10m3/min,而将研磨垫320的转速设定为10~150rpm/min,藉以对基板作有效的抛光动作。Fig. 7 is a schematic diagram of a polishing device according to an embodiment of the present invention. The polishing equipment 300 includes a polishing machine 310 and a polishing fixture 200 as shown in FIG. 320 , the substrate carried by the polishing jig 200 is polished by the polishing pad 320 . It is worth noting that the operator can choose to set the polishing jig 200 and the substrate therein, and then set it on the polishing pad 320, or can choose to set the template on the polishing pad 320 first, and then set the substrate on the polishing pad 320. , the cover plate and the counterweight are arranged on the template in sequence, or they can be arranged in a different order according to the actual situation, which is not limited to what is shown in Figure 7 here. In one embodiment, the operator sets the flow rate of the polishing slurry (polish slurry) in the polishing machine 310 to 1-10m3/min, and sets the rotational speed of the polishing pad 320 to 10-150rpm/min, so as to perform a process on the substrate Effective polishing action.

由上述本发明的实施例可知,应用前述抛光设备及其抛光治具不仅有利于操作人员对面板或基板进行抛光,而且更可提升生产效率、稳定抛光的质量,有效地加强面板或基板的抗折强度(Bending Strength)。From the above-mentioned embodiments of the present invention, it can be seen that the application of the aforementioned polishing equipment and its polishing fixtures not only facilitates the operator to polish the panel or substrate, but also improves production efficiency, stabilizes the quality of polishing, and effectively strengthens the resistance of the panel or substrate. Bending Strength.

虽然本发明已以实施方式揭露如上,然其并非用以限定本发明,任何本领域的普通技术人员,在不脱离本发明的精神和范围内,当可作各种更动与润饰,因此本发明的保护范围当视权利要求书的范围所界定者为准。Although the present invention has been disclosed above in terms of implementation, it is not intended to limit the present invention. Any person skilled in the art may make various modifications and modifications without departing from the spirit and scope of the present invention. Therefore, this The scope of protection of the invention should be defined by the scope of the claims.

Claims (10)

1.一种抛光治具,其特征在于,包含:1. A polishing fixture, is characterized in that, comprises: 一个模板,该模板中间设置有一个轴承孔,该模板上具有若干个槽孔以供基板穿设卡合,这些槽孔相对于该模板上承载基板的表面倾斜地设置,这些槽孔的宽度略小于基板的厚度,以使基板插入这些槽孔时,受到一个夹持力足以防止在研磨过程中基板从槽孔中滑落出去;以及A template, a bearing hole is arranged in the middle of the template, and there are several slots on the template for the penetration and engagement of the substrate. These slots are arranged obliquely relative to the surface of the template carrying the substrate. less than the thickness of the substrates so that when the substrates are inserted into the slots, they experience a clamping force sufficient to prevent the substrates from slipping out of the slots during grinding; and 一个轴承,穿设于该模板中间的该轴承孔,该轴承更包含一个第一连接件以及一个第二连接件,该第一连接件和该第二连接件透过该轴承孔相互连接并固定,以将该模板固定于该第一连接件和该第二连接件之间。A bearing is passed through the bearing hole in the middle of the template, and the bearing further includes a first connecting piece and a second connecting piece, the first connecting piece and the second connecting piece are connected and fixed to each other through the bearing hole , so as to fix the template between the first connector and the second connector. 2.如权利要求1所述的抛光治具,其特征在于,这些槽孔以圆形放射状均匀分布于该模板上。2. The polishing jig as claimed in claim 1, wherein the slots are evenly distributed on the template in a circular radial shape. 3.如权利要求1所述的抛光治具,其特征在于,这些槽孔分布于该模板上的三个区域,这些区域中的每一个区域中的这些槽孔相互平行,且与其它区域中的这些槽孔间形成相同角度。3. The polishing jig as claimed in claim 1, wherein the slots are distributed in three areas on the template, and the slots in each of these areas are parallel to each other, and are parallel to each other in other areas. These slots form the same angle. 4.如权利要求1所述的抛光治具,其特征在于,这些槽孔与垂直该模板承载表面的一垂直面间所形成的角度为0~50度。4 . The polishing jig as claimed in claim 1 , wherein an angle formed between the slots and a vertical plane perpendicular to the template carrying surface is 0-50 degrees. 5.如权利要求1所述的抛光治具,其特征在于,更包含:5. The polishing tool as claimed in claim 1, further comprising: 一个盖板,在该模板承载基板时设置于所承载的基板上方,以辅助固定所承载的基板,并施加一定压力予所承载的基板。A cover plate is arranged above the carried substrate when the template carries the substrate to assist in fixing the carried substrate and apply a certain pressure to the carried substrate. 6.如权利要求5所述的抛光治具,其特征在于,还包含:6. polishing jig as claimed in claim 5, is characterized in that, also comprises: 一个配重块,设置于该盖板上,并辅助施加额外压力予所承载的基板。A counterweight is arranged on the cover plate and assists in applying extra pressure to the supported substrate. 7.如权利要求5所述的抛光治具,其特征在于,该盖板是平板盖体,中间设有一个通孔,以供该轴承穿透。7. The polishing jig as claimed in claim 5, wherein the cover plate is a flat cover body, and a through hole is provided in the middle for the bearing to pass through. 8.如权利要求5所述的抛光治具,其特征在于,该盖板是空心罩体,中间设有一个通孔,以供该轴承穿透。8 . The polishing jig as claimed in claim 5 , wherein the cover plate is a hollow cover, and a through hole is provided in the middle for the bearing to pass through. 8 . 9.如权利要求7或8所述的抛光治具,其特征在于,该第二连接件的第一端穿过该轴承孔并与该第一连接件固定,该第二连接件的第二端穿过该盖板的该通孔。9. The polishing jig as claimed in claim 7 or 8, wherein the first end of the second connecting member passes through the bearing hole and is fixed with the first connecting member, and the second connecting member of the second connecting member The end passes through the through hole of the cover plate. 10.一种抛光设备,其特征在于,包含:10. A polishing device, characterized in that it comprises: 一个抛光机,具有一个研磨垫;以及a polishing machine having an abrasive pad; and 如权利要求1至9任一项所述的抛光治具,其中该抛光治具设置于该抛光机的该研磨垫上。The polishing jig according to any one of claims 1 to 9, wherein the polishing jig is disposed on the polishing pad of the polishing machine.
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US8771039B2 (en) 2011-05-25 2014-07-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical fiber polishing jig for use with optical connectors of differing sizes and types

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