CN101614755B - One-piece micro-extension pogo pins - Google Patents
One-piece micro-extension pogo pins Download PDFInfo
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- CN101614755B CN101614755B CN 200810128402 CN200810128402A CN101614755B CN 101614755 B CN101614755 B CN 101614755B CN 200810128402 CN200810128402 CN 200810128402 CN 200810128402 A CN200810128402 A CN 200810128402A CN 101614755 B CN101614755 B CN 101614755B
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- integrally formed
- spring
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Abstract
An integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe, wherein the body is a conductor and is electrically connected with the probe, and the body corresponds to one end of the probe in shape and is movably sleeved relatively; the spring structure is arranged between the probe and the body, two ends of the spring structure are respectively connected with the body and the probe, and the spring structure can do stretching action. The probe is a conductor and is electrically connected with the body.
Description
Technical field
The present invention relates to a kind of stretching type spring needle, specifically, is a kind of integrally formed micro-stretching type spring needle.
Background technology
At first see also Figure 15, Figure 15 is known Mini compressed formula pogo-pin structure stereographic map.As shown in the figure, the Mini compressed formula spring needle that known photolithographic processes is made, it comprises a body (82) and is placed in spring (84) within described body (82), and the free-ended probe (85) that links described spring (84).In use, also slightly oppress the measurement contact of a chip with described probe (85) contact, because described probe (85) is linked to spring (84), described spring (84) is compressed when the measurement contact of probe (85) contact chip, thus make described probe (85) can with the measurement contact of described chip more driving fit contact.Yet, this elongated compression elastic body is excessive because of the height to width ratio of spring, when easily causing the compression of compression elastomeric resilient, structural stability is not good, when described spring (84) when being subject to a micro-side force, to make the collapse of described spring (84) side direction crooked, and make described spring (84) and impaired even stuck can't the action of body (82) interior sidewall surface friction, and further affect the stability that electrically conducts.
Be to solve the structural stability problem of slender type compression spring needle, after have a drawing spring can avoid aforesaid drawbacks.Now see also Figure 16, Figure 16 is known micro-stretching type spring structure stereographic map.As shown in the figure, known micro-stretching type spring needle comprises a probe (86) ring set and is linked to the peripheral and end of described probe (86) and the fixedly connected power spring (87) of described probe (86).In use, the free end of described power spring (87) is fixed on a pedestal (not being shown in figure), when the measurement contact of probe (86) contact chip, described power spring (87) extends along its length direction, even and described probe (86) is during with the measurement contact of the described chip of angle of inclination contact, because described power spring (87) is not compression and can avoiding fully causes side direction collapse deformation because structural stability is not good problem, need to be applicable to the application scenario of high-density arrangement spring probe.
Yet, because this known micro-stretching type spring is for whole batch of ground making of array type and is installed in addition on a pedestal, can't become single needle body part and use for assembling.
Therefore known micro-stretching type spring exists above-mentioned all inconvenience and problem.
Summary of the invention
Purpose of the present invention is to propose a kind of with the integrally formed micro-stretching type spring needle of single needle body part for assembling.
For achieving the above object, technical solution of the present invention is:
A kind of integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe, wherein,
Described body is conductor, and is electrically connected described probe, and described body is corresponding with an end profile of described probe, and relative pivot bush unit;
Described spring structure is located between described probe and described body, and the two ends of described spring structure respectively with described body be connected probe and be connected, and described spring structure can be done drawing action.
Described probe is conductor, and is electrically connected described body.
Integrally formed micro-stretching type spring needle of the present invention can also be further achieved by the following technical measures.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure comprises an insulation course at least, electric signal can't be transmitted by described spring structure because of described insulation course blocking-up, and a deflection wire separately is set to be electrically connected described probe and described body between described probe and described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said insulation course are positioned at two ends or the inner ad-hoc location of described spring structure.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are non-conducting material, and a deflection wire separately are set to be electrically connected described probe and described body between described probe and described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are the elastic construction that possesses at least one bending.
Aforesaid integrally formed micro-stretching type spring needle, the profile of wherein said body and described probe is the two forked of correspondence mutually, and relative socket of two forks of described body and described probe, and in described pair of fork top difference one connection one slideable base, the cross section of described sliding bottom is corresponding with two fork external forms of described body and described probe respectively; Described spring structure is between described probe and the two forks of described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said body and described probe are shaft-like bending structure and spacing parallel arranging; The two ends of described spring structure link respectively described body and described probe.
Aforesaid integrally formed micro-stretching type spring needle, wherein said body respectively is connected a movable loop with described probe, and described movable loop comprises a movable span, and described body and described probe can be placed in described movable span mutually.
Aforesaid integrally formed micro-stretching type spring needle wherein also comprises the correspondence position that a protective sleeve is located on described spring structure, and described protective sleeve and described spring structure form the interval, and links fixing with described body or described probe.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use manufacture of semiconductor to make.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use electroforming or electroless plating processing procedure to make.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure is comprised of a plurality of spring assemblies.
A kind of integrally formed micro-stretching type spring needle comprises a body, a spring structure and a probe, wherein,
Described body is conductor, and is electrically connected described probe, and described body is provided with a holding part;
Described probe portion in one end of described spring structure and the holding part of described body is connected, and the other end is connected with the holding part wall of described body, and described spring structure can be done stretching and moves;
Described probe is conductor, and is electrically connected described body, and described probe portion is placed in described holding part.
Integrally formed micro-stretching type spring needle of the present invention can also be further achieved by the following technical measures.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure comprises an insulation course at least, electric signal can't be transmitted by described spring structure because of described insulation course blocking-up, and a deflection wire separately is set to be electrically connected described probe and described body between described probe and described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said insulation course are positioned at described spring structure and outside end points or the interior location that is connected.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are non-conducting material, and a deflection wire separately are set to be electrically connected described probe and described body between described probe and described body.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure are the elastic construction that possesses at least one bending.
Aforesaid integrally formed micro-stretching type spring needle, wherein said spring structure is comprised of a plurality of spring assemblies.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use manufacture of semiconductor to make.
Aforesaid integrally formed micro-stretching type spring needle, wherein said integrally formed micro-stretching type spring needle are to use electroforming or electroless plating processing procedure to make.
After adopting technique scheme, integrally formed micro-stretching type spring needle of the present invention has the following advantages:
1. can directly pick and place assembling uses and need not accurate assemble.
2. can avoid producing stray capacitance or inductive effect affects the telecommunication quality.
Description of drawings
Fig. 1 is the first embodiment of the invention stereographic map.
Fig. 2 is the first embodiment of the invention sectional view.
Fig. 3 is the second embodiment of the invention stereographic map.
Fig. 4 is the third embodiment of the invention sectional view.
Fig. 5 is the fourth embodiment of the invention stereographic map.
Fig. 6 is the fifth embodiment of the invention stereographic map.
Fig. 7 is the sixth embodiment of the invention stereographic map.
Fig. 8 is the seventh embodiment of the invention sectional view.
Fig. 9 is the eighth embodiment of the invention sectional view.
Figure 10 is the spring structure schematic diagram of the different profiles of the present invention.
Figure 11 is the use schematic diagram of first embodiment of the invention.
Figure 12 is a fabrication steps schematic diagram of the present invention.
Figure 13 is the structural representation that seventh embodiment of the invention changes the insulation course position.
Figure 14 is the structural representation that eighth embodiment of the invention changes the insulation course position.
Figure 15 is known Mini compressed formula pogo-pin structure stereographic map.
Figure 16 is known micro-stretching type spring structure stereographic map.
Embodiment
Below in conjunction with embodiment and accompanying drawing thereof, the present invention is illustrated further.
Now see also Fig. 1 and Fig. 2, Fig. 1 is the first embodiment of the invention stereographic map, and Fig. 2 is the first embodiment of the invention sectional view.as shown in the figure, in the integrally manufactured shaping of photolithographic processes, described body (10) can be shaft-like and have electric conductivity, it can be any conductive material and is shaped, metal for example, alloy, compound substance etc., it is wide slideable base (11) than described body (10) that the one end links a part, take the present embodiment as example, it is two forked that described body (10) is, and its pair fork links described slideable base (11), and between the two forks of described body (10), distance is a holding part (12), wherein, the cross section of described slideable base (11) becomes the I font, and two wide connects respectively the two forks of described body (10), and the narrow section of described slideable base (11) is slightly larger than described body (10) double fork lever body width.
Described spring structure (20) can be any tortuous profile, take the present embodiment as example, described spring structure (20) is made of the conductive material that has a plurality of bendings at length direction, such as metal, alloy, compound substance etc., its external diameter is corresponding with described holding part (12) and can be placed in described holding part (12), and it is fixedly connected that the end face of the first end of described spring (20) and described slideable base (11) forms conduction.
described probe (30) can be shaft-like and have electric conductivity, it can be any conductive material and is shaped, metal for example, alloy, compound substance etc., take the present embodiment as example, two forked corresponding with the profile of described body (10) of described probe (30), it also comprises a slideable base (31) and a holding part (32), and described probe (30) is relative with the two fork end of described body (10) and along its major axis rotation 90 degree and with described body (10) fit, and described spring structure (20) also is placed in described holding part (32), and, the second end of described spring structure (20) is connected with described slideable base (31).
The cross section of described slideable base (31) forms the I font, two wide is connected with the two fork end of described probe (30) respectively, and narrow internal diameter profile of described slideable base (31) is slightly larger than described body (10) double fork lever body external diameter profile, after making described probe (30) and described body (10) fit, but relative sliding.
Please refer to Fig. 3, Fig. 3 is the second embodiment of the invention stereographic map again.Integrally formed micro-stretching type spring needle of the present invention is light lithography and the integrally manufactured shaping of electroforming processing procedure, be more convenient for discharging with the etching material in order to make the spring structure (20) that is placed in described body (10) and described probe (30), can the correspondence position in the double fork lever body of described body (10) and described probe (30) in described spring structure (20) run through and be provided with etching bath (13,33).
Please refer to Fig. 4, Fig. 4 is the third embodiment of the invention sectional view.As shown in the figure, described housing (42) and be placed in described housing (42) inner spring structure (44) and a probe (46), described housing (42), spring structure (44) and described probe (46) all can conduct electricity and be electrically connected, such as metal, alloy, compound substance etc.Wherein, described housing (42) is that an end is open hollow tube; One end of described spring structure (44) is connected with the pipe flange that described housing (42) is opened, and other end extension penetrates in described housing (42) pipe; It is one shaft-like that described probe (46) is, its first end penetrates in described housing (42) and is connected with described spring structure (44), and the length of described probe (46) is greater than the length of described spring structure (44), and makes the second end of described probe (46) expose to described housing (42).When described probe (46) and two free ends of described housing (42) are subjected to respectively 2 electrical contact points to contact compressing, described spring structure (44) in described housing (42) presents the elastic stretching state, make it provide an elastic restoring force to described probe (46) and described housing (42), make described probe (46) push against respectively corresponding electrical contact point with two free ends of described housing (42), reach good electrical contact.
Please refer to Fig. 5, Fig. 5 is the fourth embodiment of the invention stereographic map.as shown in the figure, described body (52) and the spring structure (54) and the probe (56) that are serially connected with described body (52), wherein, described body (52) and described probe (56) form same structure, take the present embodiment as example, described body (52) and described probe (56) are L-shaped, and described body (52) and described probe (56) are antiparallel and be connected with described spring structure (54) respectively, described spring structure (54) is placed between described body (52) and described probe (56).Described body (52) and described probe (56) interconnect outside end with described spring structure, can be respectively and a clipping ring (522,562) connect, wherein, described clipping ring (522,562) be equipped with a movable span, make described clipping ring (522,562) by described movable span and be sheathed on described body (52) and described probe (56).Identical with the third embodiment of the present invention, when described probe (56) and two free ends of described housing (52) are subjected to respectively 2 electrical contact points to contact compressing, described spring structure (54) presents the elastic stretching state, and provide an elastic restoring force to described probe (56) and described housing (52), make described probe (56) and the free end of described housing (52) push against respectively described 2 electrical contact points, and therefore provide good electrical contact.
Please refer to Fig. 6, Fig. 6 is the fifth embodiment of the invention stereographic map.As shown in the figure; the body of described serial connection (52), spring structure (54) and described probe (56) are in the correspondence position of described spring structure (54); but ring set one protective sleeve (57); and its internal diameter is slightly larger than body (52), spring structure (54) and the described probe (56) of serial connection, and described protective sleeve (57) links fixing with described body (52).Described protective sleeve (57) can be avoided described spring structure (54) injury when being used by gripping.
Please refer to Fig. 7, Fig. 7 is the sixth embodiment of the invention stereographic map.As shown in the figure; described protective sleeve (57) can be equipped with a plurality of etch-holes (572) in the correspondence position of described spring structure (54); more easily remove the etching material when wherein, described etch-hole (572) can supply to make described spring structure (54) and complete processing procedure to discharge needle body.In addition, aforementioned described protective sleeve (57) also can only be contained the spring structure (not shown).
Please refer to Fig. 8, Fig. 8 is the seventh embodiment of the invention sectional view.As shown in the figure, the structure of described body (10), spring structure (20) and described probe (30) is identical with annexation and first embodiment of the invention, precisely because be characterised in that the connection contact of described spring structure (20) and described probe (30) coats an insulation course (62) both are insulated fully, and the surface of described probe and described body (10) is electrically connected with a deflection wire (64) separately.Thus, in use, can avoid the import and export of described probe (30) conducting electrical signals no longer to import described body (10) into via described spring structure (30), but get wire (64) and input described body (10) by described scratching, so, when the present embodiment is applied to the high frequency measurement, can effectively reduce stray inductance or inductive effect that described spring structure (20) produces.In like manner, described insulation course (62) also can be located at the contact that is connected of described body (10) and described spring structure (20), can make equally electric signal can't pass through described spring structure (20), and only get wire (64) transmission of electric signals by connecting described body (10) with described the scratching of described probe (30); In addition, as shown in figure 13, Figure 13 is the structural representation that seventh embodiment of the invention changes the insulation course position.As shown in the figure, described insulation course (66) also can be located in described spring structure (20), same electric signal capable of blocking makes it not by described spring structure (20), and only gets wire (64) transmission of electric signals by connecting described body (10) with described the scratching of described probe (30).
Please refer to Fig. 9, Fig. 9 is the eighth embodiment of the invention sectional view.as shown in the figure, described body (42), the connecting structure of spring structure (44) and described probe (46) is identical with third embodiment of the invention, it is characterized in that described probe (46) and the coupling position of described spring structure (44) are provided with an insulation course (63), and the surface in described probe (46) and described body (42) separately connects with a deflection wire (65), and can avoid the import and export of described probe (46) conducting electrical signals no longer to import described body (42) into via described spring structure (44), but input described body (42) by described deflection wire (65), so, when the present embodiment is applied to the high frequency measurement, can effectively reduce stray inductance or inductive effect that described spring structure (44) produces.Equally, described insulation course (63) also can be located at the contact that is connected of described body (42) and described spring structure (44), can make equally electric signal can't pass through described spring structure (44), and only get wire (65) transmission of electric signals by connecting described body (42) with described the scratching of described probe (46); In addition, as shown in figure 14, described insulation course (67) also can be located in described spring structure (44), same electric signal capable of blocking makes it not by described spring structure (44), and only (described the scratching of (46) got wire (65) transmission of electric signals with described probe by connecting described body (42).
And aforementioned each spring structure (20,44,54) can be random appearance, such as continuous S-shaped, zigzag, C shape, S shape etc., and as shown in figure 10, Figure 10 is the spring structure schematic diagram of the different profiles of the present invention.In use, please refer to Figure 11, Figure 11 is the use schematic diagram of first embodiment of the invention.As shown in the figure, described body (10) is connected in one and electrically measures contact (arrow indication position in figure); Wherein, when probe (30) contacts another electrical measurement contact, described body (10) and described probe (30) are electrically measured the contacts pressure that pushes against and exert pressure by two respectively, the spring structure (20) that is linked to this moment between described body (10) and described probe (30) forms extended state, and provide an elastic-restoring force to make described body (10) and described probe (30) electrically measure more driving fit of contact with described two respectively, and promote the electrical contact quality.And due to described slideable base (11,31) when described body (10) and described probe (30) relative motion, limit described probe (30) described body (10) is carried out the side direction activity, therefore even the measurement contact surface of described probe (30) and described chip is not vertical the contact, described spring structure (20) also only extends along its axially-movable, and avoids abnormal side interference on the impact of described spring structure (20).
Preferred embodiment of the present invention is all completed with photolithographic processes, fabrication steps for each embodiment of illustrating further the integrally formed micro-stretching type spring needle of aforementioned the present invention, please refer to Figure 12, Figure 12 is a fabrication steps schematic diagram of the present invention, and it comprises the following step:
(A) completing the first photolithographic processes step, is on a substrate (71), first forms an etch layer (721), and described etch layer (721) is removed a given configuration with photolithographic processes.
(B) in the part of the described given configuration of described etch layer (721), form the part (731) of the micro-stretching type spring needle that an one is shaped with processing procedures such as electroforming or vapour depositions.
(C) repeating step (A) and (B) plural number, wherein, in the photolithography step of a step of every execution (C), can adopt with identical or different light shield and complete, make and complete the part (732) (733) that each step (C) can be completed etch layer (722) (723) (724) (725) and the described integrally formed micro-stretching type spring needle corresponding with described etch layer (722) (723) (724) (725) of another given configuration, and the synthetic integrally formed micro-stretching type spring needle (73) in the part (731) (732) (733) that makes each integrally formed micro-stretching type spring needle.
(D) remove each etch layer (722) (723) (724) (725), described integrally formed micro-stretching type spring needle (73) is separated with described substrate (71).
Other embodiments of the invention can be completed its corresponding contour structures from structure with a plurality of different light shields according to its profile.
And, the spring structure of aforementioned all embodiment indications (20) (44) (54) is not limited to single, in other words, it can comprise a plurality of described spring structures (20) (44) (54), thus, except can according to each topology requirement being connected with a plurality of spring structures between described body (10) (52) or described housing (42) and described probe (30) (46) (56), also reaching the effect of reinforcement described spring structure (20) (44) (54).
In addition, the described body (10) (52) of previous embodiment, described spring structure (20) (44) (54) and described probe (30) (46) (56) can identical material or unlike material make, to reach different results of use, for example, can select the better metal of ductility to form described spring structure, and select electric conductivity, form described body (10) (52) and described probe (30) (46) (56) than the material of tool rigidity.For example, described body (10) (52) and described probe (30) (46) (56) are copper, and described spring structure (20) (44) (54) is nickel alloy.
Also having the electrical connection when described probe (30) (46) (56) and described body (10) (52) or described housing (42) is by described deflection wire (64) (65), described spring structure (20) (44) (54) is completed with non-conductive material, insulation course (62) (63) (66) (67) need not be set again, so, can reach the purpose of simplifying structure or processing procedure.
Above embodiment is only for explanation the present invention, but not limitation of the present invention, person skilled in the relevant technique without departing from the spirit and scope of the present invention, can also make various conversion or variation.Therefore, all technical schemes that are equal to also should belong to category of the present invention, should be limited by each claim.
The element numbers explanation
(10) body
(11) slideable base
(12) holding part
(20) spring structure
(30) probe
(31) slideable base
(42) housing
(44) spring structure
(46) probe
(52) body
(54) spring structure
(56) probe
(57) protective sleeve
(522) clipping ring
(562) clipping ring
(572) etch-hole
(62) insulation course
(63) insulation course
(64) deflection wire
(65) scratch and get wire
(66) insulation course
(67) insulation course
(82) body
(84) spring
(85) probe
(86) probe
(87) described power spring
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810128402 CN101614755B (en) | 2008-06-24 | 2008-06-24 | One-piece micro-extension pogo pins |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810128402 CN101614755B (en) | 2008-06-24 | 2008-06-24 | One-piece micro-extension pogo pins |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101614755A CN101614755A (en) | 2009-12-30 |
| CN101614755B true CN101614755B (en) | 2013-06-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810128402 Expired - Fee Related CN101614755B (en) | 2008-06-24 | 2008-06-24 | One-piece micro-extension pogo pins |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101614755B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI482975B (en) * | 2011-05-27 | 2015-05-01 | Mpi Corp | Spring-type micro-high-frequency probe |
| CN104755943B (en) * | 2012-12-04 | 2018-04-27 | 日本电子材料株式会社 | Electrical contact member |
| KR101457168B1 (en) * | 2013-07-19 | 2014-11-04 | 황동원 | Spring contact |
| TWI548879B (en) * | 2014-01-28 | 2016-09-11 | Spring sleeve probe | |
| CN104865425B (en) * | 2014-02-24 | 2018-07-20 | 旺矽科技股份有限公司 | Probe device with spring sleeve type probe |
| TWI592666B (en) * | 2016-09-12 | 2017-07-21 | 中華精測科技股份有限公司 | Probe with sliding rail |
| JP6642359B2 (en) * | 2016-09-21 | 2020-02-05 | オムロン株式会社 | Probe pin and inspection unit |
| CN108845165A (en) * | 2018-04-28 | 2018-11-20 | 德淮半导体有限公司 | Probe structure and its application method |
| TWI701440B (en) * | 2019-07-26 | 2020-08-11 | 利亙通國際有限公司 | Auxiliary device for function expansion applied to test system |
| CN111585079A (en) * | 2020-05-28 | 2020-08-25 | 苏州华旃航天电器有限公司 | Integrated pogopin radio frequency connector probe |
| CN112083200A (en) * | 2020-09-11 | 2020-12-15 | 苏州韬盛电子科技有限公司 | Novel high-frequency test socket |
| CN113391101A (en) * | 2021-04-25 | 2021-09-14 | 西安交通大学 | Shell-core microprobe and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1821788A (en) * | 2005-02-16 | 2006-08-23 | 旺矽科技股份有限公司 | Embedded microcontact element and manufacturing method thereof |
| CN101169455A (en) * | 2007-10-09 | 2008-04-30 | 番禺得意精密电子工业有限公司 | Probe |
-
2008
- 2008-06-24 CN CN 200810128402 patent/CN101614755B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1821788A (en) * | 2005-02-16 | 2006-08-23 | 旺矽科技股份有限公司 | Embedded microcontact element and manufacturing method thereof |
| CN101169455A (en) * | 2007-10-09 | 2008-04-30 | 番禺得意精密电子工业有限公司 | Probe |
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| Publication number | Publication date |
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| CN101614755A (en) | 2009-12-30 |
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