CN101598794A - Double laser frequency scanning interferometry high-precision absolute distance measuring instrument - Google Patents
Double laser frequency scanning interferometry high-precision absolute distance measuring instrument Download PDFInfo
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Abstract
本发明涉及一种双激光器频率扫描干涉法高精度绝对距离测量仪，属于精密测量技术领域。该距离测量系统主要有无跳模频率扫描外腔半导体激光器、频率扫描范围测量模块、折射率测量模块、参考和测量干涉计，以及数据采集和控制系统组成。该方法的优点是在频率扫描的同时进行干涉条纹计数，消除了距离测量的不确定性。采用双激光器进行频率扫描可以有效地抵消系统的测量误差，同时可以抑制振动和条纹计数的不确定性带来的误差，利用双干涉测量回路的模式进行光程差的测量可以消除参考干涉计的影响，提高测量的精度和准确度。该系统适合长距离、高精度测量领域的应用，如空间综合孔径排列、小行星编队、高能物理实验中跟踪探测器的准实时排列等。
The invention relates to a high-precision absolute distance measuring instrument by frequency scanning interference method of double lasers, which belongs to the technical field of precision measurement. The distance measurement system mainly consists of a frequency-scanning external-cavity semiconductor laser without mode-hopping, a frequency-scanning range measurement module, a refractive index measurement module, a reference and measurement interferometer, and a data acquisition and control system. The advantage of this method is that the interference fringe count is performed while the frequency sweep is performed, which eliminates the uncertainty of the distance measurement. Using dual lasers for frequency scanning can effectively offset the measurement error of the system, and at the same time suppress the errors caused by the uncertainty of vibration and fringe counting. Using the dual interferometric loop mode to measure the optical path difference can eliminate the reference interferometer. Influence, improve the precision and accuracy of measurement. The system is suitable for applications in the field of long-distance and high-precision measurement, such as space comprehensive aperture arrangement, asteroid formation, quasi-real-time arrangement of tracking detectors in high-energy physics experiments, etc.
Description
1. technical field
The present invention proposes a kind of twin-laser frequency scanning interference method high precision absolute distance measurement instrument, and it utilizes twin-laser frequency scanning interference method and two interferometry loop to realize long distance, high-acruracy survey, belongs to the Technology of Precision Measurement field.It has mainly used frequency sweeping interference technique, laser frequency stabilization technology, precise interference fringe count technology etc.This system is applicable to fields such as space exploration, high-energy physics experiment, as the precision measurement and the location of the longer distances such as quasi real time arrangement of tracking detector in the arrangement of spatial synthesis aperture, asteroid formation, the high-energy physics experiment.
2. background technology
Distance-finding method has multiple, as flight time method, HF modulation method, interferometric method etc., but have only HF modulation method and interferometric method can obtain higher measuring accuracy, can reach submillimeter several meters or farther range measurement accuracy.But these methods in most of the cases are not absolute distance measurement truly, often need to obtain the rough distance of target by additive method, use interferometric method to measure short distance then, eliminate the uncertainty in the range observation, therefore need the cascade of a plurality of systems, improve the measuring accuracy of system, increased the complicacy of system and the source of error in the measuring process.Frequency scanning interference method can be counted interference fringe in frequency sweeping, obtains complete measurement interference phase difference, eliminates the uncertainty in the phase extraction, realizes absolute distance measurement truly.
Survey of deep space at present becomes the focus that various countries are competitively studied, as gravitational wave detection, the DARWIN plan, X-X-ray telescope X etc., this just needs the bigger telescope of emission in the space-ward, be difficult to technically realize, therefore can utilize the technology of synthetic aperture imaging, launch a plurality of opera glasses, make their autonomous formation in space then, arrange, equivalence becomes the telescope of a larger caliber, utilize the method for interfering to space exploration, in order to obtain the higher resolution of planet, interferometry requires to have between each sub-aperture accurate position relation and stable distance, this just need accurately arrange and locate each sub-telescope, and traditional measuring method is difficult to realize in bigger distance the absolute distance measurement of micron dimension precision.In high-energy physics experiment, need quasi real time arrange the tracking detector unit, the spatial resolution of arranging is several microns magnitude, reason owing to safety, need operate detector in larger distance, this large scale and high accuracy absolute distance measurement requires traditional distance-finding method to be difficult to realize, yet frequency scanning interference method can be realized this purpose effectively, but traditional frequency scanning interference method is relatively more responsive to the stability of the motion of target and system.In view of traditional distance-finding method in the deficiency aspect the distant-range high-precision absolute distance measurement, the present invention proposes the scheme that the twin-laser frequency scanning interference method carries out absolute distance measurement.
3. summary of the invention
The frequency sweeping interfeerometry ranging system different from the past of twin-laser frequency scanning interference method absolute distance measurement system that the present invention proposes, it adopts two frequency adjustable not have the mode hopping external-cavity semiconductor laser as light source simultaneously, carry out frequency sweeping, realize range observation, can eliminate the influence of systematic error effectively measuring accuracy.Utilize Pound-Drever-Hall (PDH) technology can realize the locking of laser scans frequency, accurately the number of the free spectral range of counting method Fabry-Perot-type cavity obtains correct laser frequency sweep limit.Adopt volume material little, the super-low expansion coefficient to make with reference to interferometer, stable performance, the space of light about 10cm, propagation distance reaches tens meters.Measure portion adopts two loops of interfering, and one the tunnel is used for the witness mark interferometer, and one the tunnel is used for the measurement target distance, owing to adopt same light path, and the error of can the elimination system bringing.The present invention is the important improvement and the raising of conventional laser range finding.In the present invention, system's various piece adopts following scheme:
(1) laser instrument and transmitter module: laser instrument adopts frequency adjustable external cavity type semiconductor outside cavity gas laser, light that laser instrument sends through wave plate, anamorphic prism to shaping after, change the diameter of light beam by telescope after, enter frequency stabilization and spectral scan scope measure portion.
(2) frequency stabilization and spectral scan scope measure portion: in order to obtain accurately frequency sweeping scope, need stablize the laser scans frequency, each laser instrument start-stop frequency all adopts the PDH Frequency Stabilization Technique to lock, by the number of Fabry-Perot-type cavity free spectral range is counted, can calculate the sweep limit of spectrum.PDH frequency stabilization part is mainly by oscillator, electrooptic modulator, Fabry-Perot interferometer, and composition such as detector.
(3) light beam coupling: in order to reduce systematic error, two-laser adopts the technology on road altogether, through the light beam after the chopper copped wave, through fiber coupler, is coupled to same optical fiber.In order to reduce the volume of system, and realize the relative independentability between each module, intermodule adopts optical fiber to connect, and used optical fiber is single-mode polarization maintaining fiber.
(4) with reference to interferometer: adopt the material of super-low expansion coefficient to make with reference to interferometer, compare with reference to interferometer with optical fiber, this interferometer is subjected to the influence of temperature, vibration etc. less.During light portion's propagation within it,, can in short scope, realize than long apart from beam propagation through repeatedly reflection.
(5) measure interferometer: measure the measured optical path difference of interferometer and be corresponding actual measurement distance and poor with reference to the interferometer light path, reduced the scope of measurement of optical path difference, can obtain with reference to interferometric length by reference interferometer light path simultaneously, gained target light path can be by measuring interferometer and obtaining with reference to interferometer institute photometry path difference.
(6) refractometry module: the refractometry module is responsible for the variation (needn't consider in a vacuum) and the refractometry of real time monitoring air refraction, by light path and the distance between concern range-to-go.This module is mainly by temperature sensor, humidity sensor, atmosphere pressure sensor, and corresponding computing circuit composition, by the Edlen formula, calculates refractive index in real time, and this module realizes in DSP.
(7) data acquistion and control system: this module mainly is responsible for the real-time collection of measurement data, the feedback of PDH control signal, the collection of refractive index, and total system synchronously, mainly realize by the DSP single board system.In laser frequency scanning, carry out fringe count, phase extraction, calculate the absolute distance of target.
Main characteristic of the present invention:
Utilize two external cavity type semiconductor tunable lasers to carry out the frequency sweeping absolute distance measurement, can eliminate systematic error, in frequency sweeping, carry out interference fringe counting, complete recovery phase information realizes absolute distance measurement; Adopt the PDH Frequency Stabilization Technique, can control the frequency sweeping of laser instrument effectively, and accurately measure the scope of laser frequency scanning; Adopt two interferometry loops, reduced the optical path difference of measuring, reduced the uncertainty of measuring; Total system adopts the DSP single board system to carry out data acquisition and control, and adopts optical fiber to connect between each module, has reduced system bulk.
Benefit of the present invention and application prospect:
This invention is main to realize remote, high precision, absolute distance measurement, and can be applied to following field: the space asteroid is arranged, formed into columns the range finding and the location in neutron aperture, spatial synthesis aperture; The quasi real time arrangement of tracking detector in the high-energy physics experiment.Total system adopts modular design proposal, and each intermodule adopts optical fiber to connect, and can freely change, by changing laser instrument or measuring interferometer, can realize multi-form measurement, as difference interference measuring, dual wavelength interferometries etc. are with a wide range of applications.
4. description of drawings
Fig. 1 is a twin-laser frequency scanning interference method high precision absolute distance measurement instrument The general frame;
Fig. 2 interferes the loop for target measurement;
Fig. 3 is with reference to the interferometry loop.
5. embodiment
As shown in Figure 1, solid line is represented light, and dotted line is represented electrical signal line.Frequency adjustable external cavity semiconductor laser (1-1) and the light that (1-2) sends, at first carry out beam shaping, by wave plate and anamorphic prism to ellipse light spot is adjusted to circle, after utilizing telescope to adjust spot size, one the tunnel enter PDH frequency stabilization and frequency sweeping scope measurement module (3-1) and (3-2) through beam splitter prism (2-1) with (2-2), the error signal that PDH frequency stabilization module produces receives by detector, feed back to data acquisition and control module (10), to adjust the scanning of laser frequency, the not-go-end that rises in laser frequency scanning locks simultaneously, and the number of counting Fabry-Perot interferometer free spectral range, calculate the laser frequency sweep limit; Another road is after beam splitting, and by chopper (4-1) and (4-2) copped wave, (2-3) is coupled into optical fiber through beam splitter, enters to measure by optoisolator (5) and interferes loop (as shown in Figure 2) and reference to interfere loop (as shown in Figure 3).
As shown in Figure 2, light is after beam splitter (2-4) beam splitting, and one the tunnel enters with reference to interferometer (6), and one the tunnel incides target corner cube (7-1) through beam splitter (2-5), and its reflected light arrives beam splitter (2-8) through beam splitter (2-5) and catoptron (9-1) back.Through inciding with reference to corner cube (7-2) through catoptron (9-3) and beam splitter (2-6) with reference to interferometric light, its reflected light enters beam splitter (2-8) and interferes from measuring interferometric light behind beam splitter (2-6), its intensity signal is detected device (8-2) and receives, and its data are handled by data acquisition module (10).
As shown in Figure 3, with reference to the light signal of interfering the loop through beam splitter (2-5) and (2-6), and catoptron (9-2) back interferes at beam splitter (2-7), and its intensity signal enters data acquisition module (10) simultaneously by detector (8-1) reception.Data acquisition module (10) recovers complete phase differential by counting interference light intensity stripe information, and the absolute distance that utilizes the index meter of the air of being surveyed to calculate target.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916961A (en) * | 2010-07-31 | 2010-12-15 | 山西大学 | Wavelength tunable dual-wavelength external cavity resonant laser frequency conversion device |
| CN102419441A (en) * | 2011-09-01 | 2012-04-18 | 哈尔滨工业大学 | Four-channel detection technology based method for inter-satellite displacement measurement through weak-light phase lock and device for realizing same |
| CN103513254A (en) * | 2013-09-16 | 2014-01-15 | 中国科学院力学研究所 | High-precision double star laser interference dynamic distance measuring ground simulation device |
| WO2016154780A1 (en) * | 2015-03-27 | 2016-10-06 | 浙江理工大学 | Laser interference wavelength lever-type absolute distance measurement apparatus and method |
| CN112424562A (en) * | 2018-05-18 | 2021-02-26 | 密歇根大学董事会 | Path fluctuation monitoring for frequency modulation interferometer |
| CN112433221A (en) * | 2020-12-15 | 2021-03-02 | 深圳市中图仪器股份有限公司 | Absolute distance measuring device based on polarization modulation |
| CN114966721A (en) * | 2022-05-23 | 2022-08-30 | 清华大学 | Distance measuring device and distance measuring method |
| TWI780120B (en) * | 2017-03-01 | 2022-10-11 | 美商點雲股份有限公司 | Modular three-dimensional optical sensing system |
-
2009
- 2009-07-06 CN CNA2009100881304A patent/CN101598794A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101916961A (en) * | 2010-07-31 | 2010-12-15 | 山西大学 | Wavelength tunable dual-wavelength external cavity resonant laser frequency conversion device |
| CN102419441A (en) * | 2011-09-01 | 2012-04-18 | 哈尔滨工业大学 | Four-channel detection technology based method for inter-satellite displacement measurement through weak-light phase lock and device for realizing same |
| CN103513254A (en) * | 2013-09-16 | 2014-01-15 | 中国科学院力学研究所 | High-precision double star laser interference dynamic distance measuring ground simulation device |
| CN103513254B (en) * | 2013-09-16 | 2015-06-03 | 中国科学院力学研究所 | High-precision double star laser interference dynamic distance measuring ground simulation device |
| WO2016154780A1 (en) * | 2015-03-27 | 2016-10-06 | 浙江理工大学 | Laser interference wavelength lever-type absolute distance measurement apparatus and method |
| US9835441B2 (en) | 2015-03-27 | 2017-12-05 | Zhejiang Sci-Tech University | Absolute distance measurement apparatus and method using laser interferometric wavelength leverage |
| TWI780120B (en) * | 2017-03-01 | 2022-10-11 | 美商點雲股份有限公司 | Modular three-dimensional optical sensing system |
| US11585899B2 (en) | 2017-03-01 | 2023-02-21 | Pointcloud Inc. | Modular three-dimensional optical sensing system |
| CN112424562A (en) * | 2018-05-18 | 2021-02-26 | 密歇根大学董事会 | Path fluctuation monitoring for frequency modulation interferometer |
| CN112433221A (en) * | 2020-12-15 | 2021-03-02 | 深圳市中图仪器股份有限公司 | Absolute distance measuring device based on polarization modulation |
| CN112433221B (en) * | 2020-12-15 | 2023-06-27 | 深圳市中图仪器股份有限公司 | Absolute distance measuring device based on polarization modulation |
| CN114966721A (en) * | 2022-05-23 | 2022-08-30 | 清华大学 | Distance measuring device and distance measuring method |
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