CN101587135B - General probe module - Google Patents
General probe module Download PDFInfo
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- CN101587135B CN101587135B CN2009100539459A CN200910053945A CN101587135B CN 101587135 B CN101587135 B CN 101587135B CN 2009100539459 A CN2009100539459 A CN 2009100539459A CN 200910053945 A CN200910053945 A CN 200910053945A CN 101587135 B CN101587135 B CN 101587135B
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- 230000006872 improvement Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
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Abstract
A general probe module comprises a payload header and a plurality of probes, wherein the payload header is provided with a slideway module with a plurality of slideways which is vertically arranged and extend toward one side and intersect at a point. Each probe is directly arranged in a slideway and extends therefrom, or arranged at one end of a cantilever which passes through one of the slideways, wherein the end extrudes out of the payload header, and the other end of the cantilever is firmly arranged at the inner side of the payload header by a bearing. The spaces amount of probes can be changed by vertically moving the slideway module.
Description
[technical field]
The present invention relates to the display panels proving installation, relate in particular to a kind of general probe module.
[background technology]
In the manufacture process of display panels, can reach optimum level for making technology yield and assembly quality, therefore all can carry out product test in the different phase of technology.For instance; Before driving circuit and liquid crystal panel assembling; Can to liquid crystal panel and on thin film transistor array circuit (tft array circuit) carry out short bar method of testing (shorting bar) test, wherein the short bar test is meant to reducing testing cost general character circuit short circuit is become a bit to reduce method of testing of test point.Utilize accurate analytical instrument in whole technology, to do the check of the relevant quality management of various differences; To detect the flaw that display panels is taken place in manufacture process; And find out the reason that causes flaw, thus guarantee the product quality conformance with standard, further improve and produce yield.Therefore, in the manufacture process of display panels, product test is a yield of guaranteeing the circuit component on the display panels, and sets up active data so that the important step of engineering analysis to be provided.
When display panels is tested; Utilize tester table to send the required electric signal of display panels to be measured earlier; And through with measuring head that tester table electricity is connected on probe above-said current signal is transferred on the display panels to be measured, particularly be positioned at the thin film transistor array circuit on the display panels.Behind the electric signal that the acceptance test board is transmitted, display panels can produce corresponding response, for example display frame.Whether the testing staff can have unusual luminous point, dim spot or broken string etc. according to the picture inspection of display panels.
Please refer to the synoptic diagram that accompanying drawing 1 is depicted as measuring head in the prior art.Measuring head 10 is provided with a plurality of probes 12.Probe 12 can be used to the connection pad on the contact liquid LCD panel, connects display panels to be measured with electricity.
In general, the level interval of each probe 12 on measuring head 10 is fixing, is applicable on the connection pad that has with the display panels to be measured of its uniform distances.So when the spacing of connection pad on the display panels changed over another kind of spacing, the spacing of the connection pad on probe 12 spacings of measuring head 10 originally and the display panels was different, so can't use this measuring head 10.At this moment, must change measuring head 10 so that the display panels with different connecting pad spacing is tested.The replacing of measuring head 10 is not only time-consuming, and need prepare number cover measuring head 10 to the connection pad of different spacing, and therefore measuring head 10 expensive prices need a large amount of testing expense of cost.
In view of this, need a kind of new general probe module, go for various connection pads with different spacing.
[summary of the invention]
Technical matters to be solved by this invention is, a kind of general probe module is provided, and can be applicable to various connection pads with different spacing.
In order to address the above problem, the invention provides a kind of general probe module, it comprises carrier head.Be provided with the slideway module in the carrier head, it has several slideways.Each slideway becomes trend up and down, and extends also intersection in a bit towards a side.In other words, promptly each slideway is the center with the point that it extends intersection, becomes radial arrangement.Said general probe module also comprises a plurality of cantilevers and many probes.Wherein an end of each cantilever is fixedly arranged on the side inwall of said carrier head with a bearing, and passes a slideway and the in addition end of each cantilever is protruded from outside the said carrier head.Each root probe all is arranged at an end that protrudes from said carrier head of the cantilever of each, and said many probes are arranged in parallel.Above structure can change between the said many probes distance each other through moving up and down of said slideway module.
As optional technical scheme, said general probe module comprises that further one links the regulating device of said slideway module, and to regulate the position of said slideway module, said regulating device appears this carrier head.
As optional technical scheme, said general probe module further comprises a fixture, is arranged at institute and tells on a plurality of cantilever upper limbs and this carrier head between the inboard, to fix said a plurality of cantilevers.As optional technical scheme, said fixture is a block.
As optional technical scheme, every probe in the said many probes includes: a body has a chamber; One elastic component is arranged in the said chamber; One probe is arranged in the said chamber, and a probe tip is positioned at an end of this probe, and the tail end of this probe props up said elastic component and said probe tip appears from an opening of said chamber; And a signal wire, electricity connects this probe.
The present invention also provides a kind of general probe module, comprises at least: a load bearing arm; One slideway module, said slideway module has a plurality of slideways, and those slideways extend intersection in a bit to a side; And many probes, being arranged at respectively in said a plurality of slideway, each the root probe in said a plurality of probes all connects this load bearing arm, and a probe tip of each the root probe in said a plurality of probes appears outside the slideway.Change between the said many probes distance each other through moving up and down of said slideway module.
As optional technical scheme, said general probe module further comprises a carrier head, and said load bearing arm and slideway module all are arranged within the said carrier head.
As optional technical scheme, said general probe module comprises that further one links the regulating device of said slideway module, and to regulate the position of said slideway module, said regulating device appears this carrier head.
As optional technical scheme, said general probe module further comprises a guidepost, and said guidepost one end connects said load bearing arm, and end penetrates the upper wall of said carrier head in addition.
As optional technical scheme, each the root probe in the said many probes includes: a body has a chamber; One elastic component is arranged in the said chamber; One probe is arranged in the said chamber, and a probe tip is positioned at an end of this probe, and the tail end of this probe props up said elastic component and said probe tip appears from an opening of said chamber; And a signal wire, electricity connects this probe.
As optional technical scheme, between the probe tip of each the root probe in the said many probes and the probe angle is arranged, the angle of this angle equals the supplementary angle angle of angle between slideway and the surface level at said probe place.
As optional technical scheme, the stiff end of each the root probe in the said many probes is slidingly connected to said load bearing arm.
The invention has the advantages that said general probe module changes between the many probes distance each other through moving up and down of slideway module, to be used for various connection pads with different spacing.
[description of drawings]
Accompanying drawing 1 is depicted as the synoptic diagram of traditional test head;
Accompanying drawing 2A is depicted as the side view of general probe module according to an embodiment of the invention;
Accompanying drawing 2B is depicted as the front view of the general probe module shown in the accompanying drawing 2A;
Accompanying drawing 2C is depicted as the partial top view of the general probe module shown in the accompanying drawing 2A;
Accompanying drawing 2D is depicted as the front view of the slideway module of the general probe module shown in the accompanying drawing 2A;
Accompanying drawing 3 is depicted as the sectional view of probe;
Accompanying drawing 4A and accompanying drawing 4B are depicted as the front view of general probe module, represent two kinds of different user modes of general probe module respectively;
Be respectively side view and the vertical view of an embodiment of general probe module shown in accompanying drawing 5A and the accompanying drawing 5B;
Be respectively side view and the vertical view of an embodiment of general probe module shown in accompanying drawing 6A and the accompanying drawing 6B;
Be respectively side view and the vertical view of an embodiment of general probe module shown in accompanying drawing 7A and the accompanying drawing 7B;
Accompanying drawing 8A is depicted as the side view of the general probe module of drawing according to another embodiment of the present invention;
Accompanying drawing 8B is the front view of general probe module shown in the accompanying drawing 8A;
Accompanying drawing 8C is the partial schematic diagram of general probe module shown in the accompanying drawing 8A;
Accompanying drawing 8D is depicted as the front view of the slideway module of the general probe module shown in the accompanying drawing 8A;
Accompanying drawing 9 is the partial schematic diagram of the probe shown in the accompanying drawing 8B;
[embodiment]
Elaborate below in conjunction with the embodiment of accompanying drawing to general probe module provided by the invention.
Please be depicted as the schematic side view and the main synoptic diagram of looking of a kind of general probe module 100 of one embodiment of the invention simultaneously with reference to accompanying drawing 2A and accompanying drawing 2B.General probe module 100 has a plurality of probes 150.Spacing between the probe 150 can be transferred, to be fit to various connection pads with different spacing.Though note that follow-up explanation is example with display panels 20, yet the general probe module 100 that the present invention disclosed can be applicable on the various semiconductor products such as panel, chip, circuit board.
In the present invention's embodiment, general probe module 100 has a carrier head 110, can connect or be fixed on the tester table (not shown).Carrier head 110 has a upper wall 112, a sidewall 114 and a base plate 116, and the three surrounds and forms an accommodation space 118.Be provided with a slideway module 120 in the carrier head 110.Wherein, base plate 116 is provided with hole 119, can supply slideway module 120 to pass.
Slideway 122 runs through carrier 12 4.Each slideway 122 all is trend up and down, that is along the Z-direction shown in accompanying drawing 2A and accompanying drawing 2B, and slideway 122 extends intersection in a bit towards a side.Please be simultaneously with reference to accompanying drawing 2B and accompanying drawing 2D.Specifically, slideway 122 is arranged in radial, and the extension line intersection of each slideway 122 is in same point, on plotted point 126.In the present invention's embodiment, plotted point is near the lower edge of carrier 12 4, makes the spacing t of slideway 122 near an end of carrier 12 4 lower edges
1Less than the spacing t of slideway 122 near an end of the upper limb of carrier 12 4
2In another embodiment of the present invention, plotted point 126 also can be the upper limb near carrier 12 4.
Please be simultaneously with reference to accompanying drawing 2A and accompanying drawing 2B.Regulating device 160 links slideway module 120, in order to regulate the position of slideway module 120.Specifically, regulating device 160 connects the carrier 12 4 and carrier head 110 of slideway module 120, in order to change the relative position between slideway module 120 and the carrier head 110, especially makes the relative vertical position of slideway module 120 and carrier head 110.For instance, shown in accompanying drawing 2A, regulating device 160 usefulness are so that slideway module 120 oppositely moving along direction 300 or direction 300.
Regulating device 160 parts appear carrier head 110, use so that user or board grasp.In the present invention's embodiment, regulating device 160 is adjusting screw, and the one of which end is fixed on the carrier 12 4 of slideway module 120, and the other end passes the screw 162 on the carrier head 110 and protrudes from outside the carrier head 110.Through rotating adjusting screw, make carrier 12 4 move in the other direction along direction 300 or its.In the present invention's embodiment, adjusting screw is the upper limb of connection carrier 124, and screw 162 is positioned at the upper wall 112 of carrier head 110.
A plurality of spiral arms 130 pass slideway 122 one by one.First end 132 of each spiral arm 130 sees through the inwall that bearing 140 is installed in carrier head 110, and second end 134 passes slideway 122 and protrude from outside the carrier head 110, shown in accompanying drawing 2A.As previously mentioned, slideway 122 is arranged in radial, so each slideway 122 tilts with respect to the Y axle.The rough angle of inclination that equals its pairing slideway 122, the angle of inclination of spiral arm 130 is so can pass slideway 122.In other words, spiral arm 130 also is arranged in radial.
Please be simultaneously with reference to accompanying drawing 2A and accompanying drawing 2C, accompanying drawing 2C is depicted as the vertical view of general probe module 100 part assemblies.In an embodiment of the present invention, first end 132 of spiral arm 130 sees through the inwall that bearing 140 is installed in the sidewall 114 of carrier head 110.See through the setting of bearing 140, spiral arm 130 can rotate for central horizontal by bearing 140, for example comes back rotation along direction 320.Second end 134 of spiral arm 130 can move along X-direction and along a circular arc line, that is second end 134 of spiral arm 130 presents fan-shaped folding.Thus, just variable of the spacing between second end 134 of each spiral arm 130.Detailed start method is asked for an interview follow-up explanation.
Please be simultaneously with reference to accompanying drawing 2A and accompanying drawing 2B, in the present invention's embodiment, general probe module 100 also comprises a fixture 170, is used for fixing spiral arm 130.Fixture 170 can be arranged between the upper limb of last inboard and spiral arm 130 of carrier head 110.Specifically, fixture 170 is fixed on the carrier head 110, and the upper limb of butt spiral arm 130, with fixing spiral arm 130 and carrier head 110 relative vertical position.In other words, when probe 150 contacted with the connection pad (not shown), connection pad can provide probe 150 and 130 1 thrusts that make progress of spiral arm.Spiral arm 130 receives fixture 170 to keep out and be unlikely to move along direction 300 along slideway 122.Wherein, fixture 170 can be block.
In the present invention's embodiment, the lower edge of spiral arm 130 abuts to the base plate 116 of carrier head 110, that is sees through the last lower edge of base plate 116 and fixture 170 clamping spiral arms 130, can't oppositely move along direction 300 or its with restriction spiral arm 130.In another embodiment of the present invention, general probe module 100 more can optionally comprise another fixture (not illustrating) and be provided with between the lower edge of the following inboard of carrier head 110 and spiral arm 130.
In the present invention's embodiment, fixture 170 and base plate 116 can be used to grasp or unclamp the last lower edge of spiral arm 130.Specifically, fixture 170 can be installed in the upper limb of spiral arm 130 or be removed.When fixture 170 unloaded and unclamps spiral arm 130, spiral arm 130 can be transferred its horizontal level.When desire fixedly during spiral arm 130, can fixture 170 be loaded onto, make fixture 170 and base plate 116 last lower edge of butt spiral arms 130 respectively and then the relative vertical position of fixing spiral arm 130 and slideway 122.
The probe 150 of general probe module 100 is separately fixed on second end 134 of spiral arm 130.The mode that probe 150 can articulate is fixed on second end 134, makes probe 150 to rotate with respect to spiral arm 130, for example sees through and is fixed in the Pivot component (not shown) linking probe 150 on spiral arm 130 second ends 134.As optional technical scheme, probe 150 also can see through alternate manner and be fixed in second end 134.When the spacing between second end 134 of each spiral arm 130 changed, the spacing between the probe 150 also changed thereupon.In the present invention's embodiment, setting parallel to each other between the probe 150, and equidistantly arrange.In the present invention's embodiment, probe 150 is a mutually insulated with second end 134 of spiral arm 130.
Please refer to accompanying drawing 2A and accompanying drawing 3, accompanying drawing 3 is depicted as the diagrammatic cross-section of probe 150.Each probe 150 includes a body 151 and a probe 156.Probe tip 158 is at an end of probe 156, in order to contact liquid LCD panel 20.Probe 156 electricity connect a signal wire 180, are connected to the test machine (not shown) with electricity.The other end of probe 156 is a tail end.
The body 151 of each probe 150 is provided with chamber 152.Probe 156 is located in the chamber 152, and appears from the opening of chamber 152.Specifically, the tail end of probe 156 is positioned at chamber 152, and 158 openings from chamber 152 of probe tip appear.
Be provided with elastic component 154 in the chamber 152.The tail end of probe 156 props up elastic component 154.Hence one can see that, and during connection pad on using probe 150 contact liquid LCD panels 20, probe tip 158 can move towards chamber 152 slightly, can avoid colliding display panels 20 and the damage that causes display panels 20 or probe 150.On the other hand, when probe tip 158 because of pushing when chamber 152 moves, elastic component 154 can provide probe 156 reverse elastic force, makes that contacting of connection pad on probe tip 158 and the display panels 20 is firm.
The kind of elastic component 154 and form have a variety of, for example shell fragment, spring air pressure or hydraulic module etc.In the present invention's embodiment, elastic component 154 is a spring.
Accompanying drawing 4A be respectively 100 two kinds of different user modes of general probe module shown in the accompanying drawing 4B.Explanation for ease, the fixture 170 of the general probe module 100 shown in accompanying drawing 4A and the accompanying drawing 4B is represented with frame of broken lines.
Move slideway module 120 through regulating device 160, it is moved along direction 300 or direction 310.As previously mentioned, in the present invention's embodiment, can drive carrier 12 4 and move through the rotation of adjusting screw along direction 300 or direction 310.When slideway module 120 moved, spiral arm 130 can corresponding moving horizontally.In detail, slideway 122 is to be arranged in radially, and so when slideway 122 moved up and down, spiral arm 130 moved with respect to slideway 122, its horizontal level is change thereupon also.In addition and since base plate 116 clampings of fixture 170 and carrier head 110 spiral arm 130, so limited the upright position of spiral arm 130.
When slideway module 120 directions 310 moved, because the trend of slideway 122, the spacing between the slideway 122 increased, and makes the horizontal level of spiral arm 130 outwards launch, and the spacing of probe 150 is broadened.Otherwise, when slideway module 120 when direction 300 moves, the horizontal level of spiral arm 130 inwardly shrinks, and the spacing of probe 150 is narrowed down.
Accompanying drawing 5A is to shown in the accompanying drawing 7B being 100 3 kinds of different user modes of general probe module respectively.Accompanying drawing 5A and accompanying drawing 5B are respectively side view and the vertical view of general probe module 100 under first kind of state.Accompanying drawing 6A and accompanying drawing 6B are respectively side view and the vertical view of general probe module 100 under second kind of state.Accompanying drawing 7A and accompanying drawing 7B are respectively side view and the vertical view of general probe module 100 under the third state.
As previously mentioned; One end of spiral arm 130 sees through bearing 140 and articulates carrier head 110; Therefore when slideway module 120 when direction 300 or direction 310 move, spiral arm 130 can bearing 140 for the central horizontal rotation, make second end 134 of spiral arm 130 on the XY plane, to move along a circular arc line.
In order to reduce probe 150 in the displacement on the direction of Y axle, can work as spiral arm 130 when passing slideway module 120 centre portions, set probe 150 and be arranged in online always, shown in accompanying drawing 6A and accompanying drawing 6B.Thus; When spiral arm 130 passes slideway module 120 near the part of its lower edge (like accompanying drawing 5A and accompanying drawing 5B); Perhaps when spiral arm 130 passes slideway module 120 near the part of its upper limb (like accompanying drawing 7A and accompanying drawing 7B), probe 150 can be less along the displacement of Y direction.
Please refer to accompanying drawing 8A figure and accompanying drawing 8B, shown in be respectively the side view and the front view of general probe module 100 according to another embodiment of the present invention.General probe module 100 has a carrier head 110 and a plurality of probes 150.Be provided with load bearing arm 210 and slideway module 120 in the carrier head 110.The structure of carrier head 110 and probe 150 has all detailed as above, no longer adds to give unnecessary details at this.
Each slideway 122 all becomes up and down trend, that is along as the Z-direction that illustrated of accompanying drawing 8A and accompanying drawing 8B, and slideway 122 towards side extension intersection in a bit.Please refer to accompanying drawing 8B figure and accompanying drawing 8D.Specifically, slideway 122 is arranged in radial, and the extension line intersection of each slideway 122 is on same point, like plotted point 126.In the present invention's embodiment, plotted point is near the lower edge of carrier 12 4, make slideway 122 near the spacing of an end of carrier 12 4 lower edges less than the spacing of slideway 122 near an end of the upper limb of carrier 12 4.In another embodiment of the present invention, plotted point 126 is the upper limbs near carrier 12 4.
In the present invention's embodiment, each probe 150 is provided with and is positioned at a slideway 122, and can move along slideway 122.As previously mentioned, slideway 122 extends intersection in a bit towards a side, and presents radial arrangement.
When probe 150 all when this plotted point moves, the spacing between the probe 150 can be dwindled.Otherwise, when all probes 150 all when moving away from this plotted point, the spacing of probe 150 can increase.
Please refer to accompanying drawing 8B and accompanying drawing 8C, accompanying drawing 8C is depicted as the vertical view of the part assembly of general probe module 100.Stiff end 159 is to be slidingly connected with load bearing arm 210.The vertically opposite position of stiff end 159 and load bearing arm 210 is fixing, and stiff end 159 can be with respect to load bearing arm 210 horizontal slips.Wherein, vertical direction is meant the Z-direction that is illustrated along accompanying drawing 8B, and horizontal direction is meant along X-direction.Thus, when load bearing arm 210 when direction 300 moves up and down, load bearing arm 210 can drive probes 150 and move up and down along direction 300.Simultaneously, the stiff end 159 of probe 150 can move horizontally with respect to load bearing arm 210, for example slidably reciprocates along the direction 340 shown in the accompanying drawing 8C, and then changes the spacing between the probe 150.
The stiff end 159 of reaching probe 150 has a variety of with the structure that load bearing arm 210 is slidingly connected.For instance, stiff end 159 can be provided with the through hole of level trend, and load bearing arm 210 passes the through hole on each probe 150 one by one.In addition, load bearing arm 210 can be provided with the chute of level trend, and 159 of stiff ends are provided with buckle to buckle in the chute.
Please refer to accompanying drawing 8A and accompanying drawing 8B, regulating device 160 links load bearing arm 210, to regulate the position of load bearing arm 210.In the present invention's embodiment, regulating device 160 is in order to the upright position of adjustment load bearing arm 210, that is adjusting load bearing arm 210 moves up and down along direction 300.Regulating device 160 parts appear carrier head 110, use so that user or board grasp.
In the present invention's embodiment, regulating device 160 is adjusting screw, and the one of which end is fixed on the load bearing arm 210, and the other end passes the screw 162 of carrier head 110 upper walls 112 and protrudes from outside the carrier head 110.By rotating adjusting screw, make load bearing arm 210 move in the other direction along direction 300 or its.
In the present invention's embodiment, general probe module 100 more is provided with guidepost 220, moves with guiding load bearing arm 210.Guidepost 220 1 ends connect load bearing arm 210, and the other end penetrates the upper wall 112 of carrier head 110.In the present invention's embodiment, the upper wall 112 of carrier head 110 is provided with pilot hole 222, and an end of guidepost 220 passes pilot hole 222.
Please be simultaneously with reference to asking the while with reference to accompanying drawing 8B and accompanying drawing 9, accompanying drawing 9 is depicted as the local enlarged diagram of probe 150.In the present invention's embodiment, the probe tip 158 of all probes 150 all is arranged on the identical height.See through the setting of load bearing arm 210, when probe 150 moved with respect to slideway 122, the probe tip 158 of all probes 150 can move together, and all is positioned on the sustained height.
Because probe 150 is positioned at slideway 122, tilts along with the inclination of slideway 122.For fear of because probe 150 tilts to cause the probe tip 158 and the contact area of connection pad to change, with probe tip 158 bendings, make 156 angle theta of probe tip 158 and probe among the present invention's the embodiment
1Angle equal the supplementary angle θ of angle of bearing of trend and the connection pad of probe tip 158
2Angle.Thus, probe tip 158 is perpendicular to connection pad.
Please be simultaneously with reference to accompanying drawing 8B and accompanying drawing 10, shown in be respectively 100 two kinds of different user modes of general probe module.
Move load bearing arm 210 through regulating device 160, it is moved along direction 300 or direction 310.When load bearing arm 210 moved, it drove probe 150 and moves along slideway 122.Because slideway 122 is for tilting, thus when probe 150 when slideway 122 moves up and down, the level interval between the probe 150 is also change thereupon.
In detail, when load bearing arm 210 had been with probe 150 directions 300 to move, because the trend of slideway 122, the spacing between the slideway 122 increased, and makes the horizontal level of probe 150 outwards launch, and the spacing of probe 150 is broadened.Otherwise, be with probe 150 when direction 310 moves when load bearing arm 210, the horizontal level of probe 150 inwardly shrinks, and the spacing of probe 150 is narrowed down.
Each embodiment can know by the invention described above, sees through the arrangement of slideway module 120 sliding ways 122, makes that when probe 150 moved up and down with respect to slideway 122, probe 150 spacing each other also changed thereupon.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.
Claims (9)
1. general probe module comprises at least:
One carrier head;
One slideway module is arranged in the said carrier head, and said slideway module has a plurality of slideways and becomes trend up and down, and said a plurality of slideways extend intersection in a bit to a side;
A plurality of cantilevers, wherein an end of each cantilever is fixedly arranged on the side inwall of said carrier head with a bearing, and passes a slideway and the in addition end of each cantilever is protruded from outside the said carrier head; And
Many probes, wherein each root probe all is arranged at an end that protrudes from said carrier head of the cantilever of each, and said many probes are arranged in parallel,
It is characterized in that, change between the said many probes distance each other through moving up and down of said slideway module;
Said general probe module comprises that further one links the regulating device of said slideway module, and to regulate the position of said slideway module, said regulating device appears this carrier head.
2. general probe module according to claim 1 is characterized in that, further comprises a fixture, is arranged at institute and tells on a plurality of cantilever upper limbs and this carrier head between the inboard, to fix said a plurality of cantilevers.
3. general probe module according to claim 2 is characterized in that, said fixture is a block.
4. general probe module according to claim 1 is characterized in that, every probe in the said many probes includes:
One body has a chamber;
One elastic component is arranged in the said chamber;
One probe is arranged in the said chamber, and a probe tip is positioned at an end of this probe, and the tail end of this probe props up said elastic component and said probe tip appears from an opening of said chamber; And
One signal wire, electricity connects this probe.
5. general probe module comprises at least:
One load bearing arm;
One slideway module, said slideway module has a plurality of slideways, and those slideways extend intersection in a bit to a side; And
Many probes are arranged at respectively in said a plurality of slideway, and each the root probe in said a plurality of probes all connects this load bearing arm, and a probe tip of each the root probe in said a plurality of probes appears outside the slideway;
It is characterized in that, change between the said many probes distance each other through moving up and down of said slideway module;
Said general probe module further comprises a carrier head, and said load bearing arm and slideway module all are arranged within the said carrier head;
Said general probe module comprises that further one links the regulating device of said slideway module, and to regulate the position of said slideway module, said regulating device appears this carrier head.
6. general probe module according to claim 5 is characterized in that, further comprises a guidepost, and said guidepost one end connects said load bearing arm, and end penetrates the upper wall of said carrier head in addition.
7. general probe module according to claim 5 is characterized in that, each the root probe in the said many probes includes:
One body has a chamber;
One elastic component is arranged in the said chamber;
One probe is arranged in the said chamber, and a probe tip is positioned at an end of this probe, and the tail end of this probe props up said elastic component and said probe tip appears from an opening of said chamber; And
One signal wire, electricity connects this probe.
8. general probe module according to claim 7; It is characterized in that; Between the probe tip of each the root probe in the said many probes and the probe angle is arranged, the angle of this angle equals the supplementary angle angle of angle between slideway and the surface level at said probe place.
9. general probe module according to claim 5 is characterized in that, the stiff end of each the root probe in the said many probes is slidingly connected to said load bearing arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100539459A CN101587135B (en) | 2009-06-26 | 2009-06-26 | General probe module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100539459A CN101587135B (en) | 2009-06-26 | 2009-06-26 | General probe module |
Publications (2)
| Publication Number | Publication Date |
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| CN101587135A CN101587135A (en) | 2009-11-25 |
| CN101587135B true CN101587135B (en) | 2012-03-14 |
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| CN2009100539459A Expired - Fee Related CN101587135B (en) | 2009-06-26 | 2009-06-26 | General probe module |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142413B (en) * | 2013-05-07 | 2017-04-12 | 旺矽科技股份有限公司 | Probe module |
| TWI481876B (en) * | 2013-12-13 | 2015-04-21 | Mpi Corp | Probe module (3) |
| CN105301301B (en) * | 2014-07-31 | 2019-04-26 | 展讯通信（上海）有限公司 | A kind of mobile terminal fixture test thimble |
| CN105096783A (en) * | 2015-08-03 | 2015-11-25 | 武汉华星光电技术有限公司 | Detection equipment and probe component thereof |
| CN106483690A (en) * | 2016-12-06 | 2017-03-08 | 无锡市创恒机械有限公司 | A kind of ITO presses screen device |
| CN107909951A (en) * | 2017-11-14 | 2018-04-13 | 合肥鑫晟光电科技有限公司 | A kind of panel tester |
| CN114076890A (en) * | 2021-11-18 | 2022-02-22 | 上达电子（深圳）股份有限公司 | Needle plate structure of universal electrical measurement jig wire with variable needle pitch |
-
2009
- 2009-06-26 CN CN2009100539459A patent/CN101587135B/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN101587135A (en) | 2009-11-25 |
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