CN101581612B - Optical fibre sensor - Google Patents
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- CN101581612B CN101581612B CN2009101390070A CN200910139007A CN101581612B CN 101581612 B CN101581612 B CN 101581612B CN 2009101390070 A CN2009101390070 A CN 2009101390070A CN 200910139007 A CN200910139007 A CN 200910139007A CN 101581612 B CN101581612 B CN 101581612B
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Abstract
An optical fibre sensor 18a(b) which functions as a tactile sensor, e.g. for a manipulator, includes a plurality of shearing stress sensor sections 32, 34 and a perpendicular stress sensor section 36,each section including respective optical fibres 38, 44, 50 and a plurality of gratings 40, 46, 52 such as fibre Bragg gratings (FBGs), for reflecting light beams at particular wavelengths. The grati ngs are arranged in the optical fibres such that the sensor is responsive to shearing stress applied to the sensor along X- and Y-axis directions as well as to perpendicular stress applied along a Z-axis direction. Stress direction converting means such as elastic members (156, figure 17) for converting the direction of an applied stress may be mounted on the optical fibres.
Description
Technical field
The present invention relates to be used to utilize optical fiber to detect the Fibre Optical Sensor of stress, be combined with a plurality of gratings that are used to reflect light beam in this optical fiber with specific wavelength.
Background technology
In some executors is used, executor grasping objects and object carried out certain type work.At this moment, if executor applies excessive grasp force to object, then object is often destroyed.On the contrary, if executor does not apply enough grasp forces to object, then object possibly fall from executor.
In order to stop the destruction of object or stably to arrest object, attempted in the prior art executor and sensor are made up, to detect the crawled state of the object that grasps by executor.A kind of this type of sensor comprises touch sensor; It is used for the perpendicular stress detection from object is the grasp force of executor; And will detect from the shear stress of object and be the slip of executor (referring to, for example, Japanese publication application NO.2006-010407).
A kind of touch sensor of the above-mentioned type is the Fibre Optical Sensor that is called " FBG (Fiber Bragg Grating FBG) sensor "; It has a plurality of gratings (diffraction grating) that are arranged in the fiber core; This optical fiber is embedded in the lamellar body (sheet body), and is disclosed like Japanese publication application NO.2002-131023 and Japanese publication application NO.2002-071323.When in response to the stress that applies to grating from object, when in grating, showing strain, cause wavelength shift by the light beam of optical grating reflection.Based on the wavelength that changes, Fibre Optical Sensor detects the strain that in grating, manifests, and detects the stress that applies from object.
Yet; Japanese publication application NO.2002-131023 and in Japanese publication application NO.2002-071323 the problem of disclosed Fibre Optical Sensor be; If the object that is grasped by executor has different shapes or contacts with optical fiber in different positions; Then will on grating, produce different stress distribution, and make Fibre Optical Sensor be difficult to detect exactly the stress that applies.
Figure 29 is a schematic representation, its be illustrated in perpendicular on the direction of optical fiber 2 bearing of trends to before grating 1 stress application and afterwards, be arranged in the grating 1 in the optical fiber 2.When stress F was applied to grating 1 basically equably, the grating space of grating 1 (grating space) be expansion equably basically.At this moment, only cause wavelength shift, as shown in Figure 30 by grating 1 beam reflected.
Yet, if the executor extracting has difform object or in different angle grasping objects, stress often anisotropically is applied to grating 1.At this moment, as shown in Figure 31, the grating space of grating 1 is anisotropically expanded, that is, the grating space changes in different positions.As a result of, as shown in Figure 32, grating 1 reflects light beams of different wavelengths according to its different expansion grating space.
According to the solution of being advised among the Japanese publication application NO.2005-134199, optical fiber is inserted in the fixed bed, and this fixed bed is clipped in the middle by flexure strip, processes the FBG sensor element.The FBG sensor element has end surface and reverse end surface, and wherein end surface keeps closely contacting through bonding coat and object under test, and on reverse end surface, is furnished with pressing plate, and cushion places between them.
Yet, even utilize the disclosed structure of Japanese publication application NO.2005-134199, if having different shapes or, also therefore on grating, produce different stress distribution at pressing plate at different position contact optical fiber by the object that executor grasped.Therefore, confirm the accurate size of institute's stress application not too easily, or in other words, be difficult to obtain enough high level measuring accuracy.
Summary of the invention
Overall purpose of the present invention provides the durable and reliable Fibre Optical Sensor of a kind of height.
Fundamental purpose of the present invention provides a kind of Fibre Optical Sensor, and it detects the perpendicular stress that applies from object and the touch sensor of shear stress simultaneously with acting on.
Another object of the present invention provides a kind of Fibre Optical Sensor, and it has other measuring accuracy of lifting level that is used to measure stress.
According to an aspect of the present invention; A kind of Fibre Optical Sensor; Comprise: a plurality of shearing stress sensor parts; These shearing stress sensor parts comprise optical fiber separately and are used to reflect a plurality of gratings with light beams of predetermined wavelengths that grating is arranged in the optical fiber and the edge is parallel to shear stress is applied to the direction of shearing stress sensor parts from object planar alignment; And the perpendicular stress sensor element, it comprises optical fiber and is used to reflect a plurality of gratings with light beams of predetermined wavelengths that grating is arranged in the optical fiber and the edge is parallel to perpendicular stress is applied to the direction of perpendicular stress sensor element from object planar alignment.
The Fibre Optical Sensor that makes up thus is used as touch sensor, and can detect shear stress and perpendicular stress from object independently and side by side based on the light signal from optical fiber.Owing to use light signal, so Fibre Optical Sensor does not receive the influence of electromagnetic noise from optical fiber.Because Fibre Optical Sensor unlikely leaks electricity,, and can detect shear stress and perpendicular stress in pin-point accuracy ground so Fibre Optical Sensor is highly durable and reliable.
Each of shearing stress sensor parts and perpendicular stress sensor element should preferably include flexible lamellar body.
The optical fiber of shearing stress sensor parts can extend on two vertical direction in the plane respectively, and wherein this plane parallel is applied to the direction of shearing stress sensor parts in shear stress from object.
Alternatively; The grating of shearing stress sensor parts can be arranged in a plurality of diverse locations in the plane; Wherein this plane parallel is applied to the direction of shearing stress sensor parts in shear stress from object, and grating can reflect each light beam with different wave length.
Further alternatively, each shearing stress sensor parts can comprise two adjacent gratings, and based on respectively by the direction of displacement and the shift amount of the wavelength-shift of two adjacent gratings institute beam reflected, detect the direction and the size of shear stress.
The grating of perpendicular stress sensor element can arrange in a plurality of diverse locations in the plane, and this plane is applied to the direction of perpendicular stress sensor element perpendicular to perpendicular stress from object, and grating can reflect each light beam with different wave length.
According to a further aspect in the invention, a kind of Fibre Optical Sensor, it comprises: strain gauge parts, these strain gauge parts comprise optical fiber and are used to reflect a plurality of gratings with light beams of predetermined wavelengths that grating is disposed in the optical fiber; And, the stress direction conversion equipment, it is used for converting the direction of the institute's stress application that is different from the optical fiber longitudinal axis to be parallel to the optical fiber longitudinal axis direction, and transmits stress with the direction after the conversion to grating.
When optical fiber was elongated by the stress direction conversion equipment, the grating that is arranged in the optical fiber was expanded, thereby the grating space is uniform basically.This is because optical fiber is to be elongated by the joint of the stress direction conversion equipment that is attached to optical fiber, and the stress that applies is distributed to optical fiber basically equably.
Therefore behind the expansion grating, the grating space is uniform basically.Owing to observe displacement behind the grating, therefore can come the highly precisely stress of detection effect on optical fiber based on the displacement of the wavelength of beam reflected by the wavelength of the light beam of optical grating reflection in expansion.
The direction that is used for being different from institute's stress application of the optical fiber longitudinal axis converts the stress direction conversion equipment of the direction that is parallel to the optical fiber longitudinal axis to and strides each grating of optical fiber and be installed to optical fiber.The stress distribution that applies and be applied to optical fiber and the stress direction conversion equipment between joint.
Because behind the expansion grating, the grating space is uniformly basically, so observed displacement after expanding by the wavelength of the light beam of optical grating reflection at grating.Therefore, can come the highly precisely stress of detection effect on optical fiber based on the displacement of the wavelength of beam reflected.
The stress direction conversion equipment comprises straight portion, and it is parallel to the optical fiber longitudinal axis and extends, and the Stress Transfer part, and it extends to optical fiber from straight portion.
Preferably, straight portion has the higher elastic modulus of specific stress transmission part.When stress application, straight portion initially is elongated.Then, along with straight portion is elongated, the Stress Transfer part is expanded under situation about not being bent.Therefore, the Stress Transfer part can elongate optical fiber easily.
When combining the accompanying drawing of preferred implementation of the present invention to be shown,, of the present inventionly above-mentionedly will become more obvious with other purposes, characteristic and advantage through following description through illustrative example.
Description of drawings
Fig. 1 is the synoptic diagram that is combined with according to the frame segment diagram form of the robot system of the Fibre Optical Sensor of first embodiment of the invention;
Fig. 2 is the skeleton view that the principle of operation of FBG sensor is shown;
Fig. 3 illustrates the diagrammatic sketch that concerns between the light wavelength that is applied to the FBG sensor and the wavelength by the grating institute beam reflected of FBG sensor;
Fig. 4 is the synoptic diagram of the principle of FBG sensor shear stress;
Fig. 5 be before stress applies as shown in Figure 4 with apply after, the diagrammatic sketch that concerns between the wavelength by the grating institute beam reflected of FBG sensor;
Fig. 6 is the synoptic diagram of the principle of FBG sensor shear stress;
Fig. 7 be before stress applies as shown in Figure 6 with apply after, the diagrammatic sketch that concerns between the wavelength by the grating institute beam reflected of FBG sensor;
Fig. 8 is the decomposition diagram according to the Fibre Optical Sensor of first embodiment of the invention;
Fig. 9 is the vertical view according to the directions X shearing stress sensor parts of the Fibre Optical Sensor of first embodiment of the invention and Y direction shearing stress sensor parts;
Figure 10 is the sectional view according to the Z direction strain gauge parts of the Fibre Optical Sensor of first embodiment of the invention;
Figure 11 is the skeleton view according to the Z direction strain gauge parts of another embodiment, and these Z direction strain gauge parts use in the Fibre Optical Sensor according to first embodiment of the invention;
Figure 12 is the skeleton view according to the stack assemblies of the Fibre Optical Sensor of first embodiment of the invention;
Figure 13 is the skeleton view according to the stack assemblies of the Fibre Optical Sensor of second embodiment of the invention;
Figure 14 is the block diagram that is combined with according to the robot system of the touch sensor of the Fibre Optical Sensor form of first embodiment of the invention;
Figure 15 is the synoptic diagram that is combined with according to the frame segment diagram form of the robot system of the Fibre Optical Sensor of third embodiment of the invention;
Figure 16 is the skeleton view that the principle of operation of FBG sensor is shown;
Figure 17 is the decomposition diagram according to the Fibre Optical Sensor of third embodiment of the invention;
Figure 18 is the skeleton view of two flexible members;
Figure 19 is the block diagram that is combined with according to the robot system of the Fibre Optical Sensor of third embodiment of the invention;
Figure 20 illustrates when stress is applied to the basic longitudinal center zone of straight portion of flexible member, and how each flexible member changes the vertical view of its shape;
Figure 21 illustrates when stress is applied near the straight portion of the sloping portion of flexible member terminal, and how each flexible member changes the vertical view of its shape;
Figure 22 illustrates the vertical view that concerns between the stress of the straight portion, sloping portion and the coupling part that are applied to flexible member;
Figure 23 is the skeleton view with difform other flexible members;
Figure 24 is the skeleton view with difform another other flexible members;
Figure 25 is the skeleton view with difform another other flexible members;
Figure 26 is the skeleton view with difform another other flexible members;
Figure 27 is the skeleton view with difform other flexible member;
Figure 28 is the skeleton view with difform another other flexible member;
Figure 29 be illustrated in perpendicular on the direction of optic fibre extension direction before the grating stress application with the synoptic diagram of afterwards grating;
Figure 30 is the diagrammatic sketch that the wavelength shift of the grating institute beam reflected that how to cause shown in Figure 29 is shown;
Figure 31 be illustrated in perpendicular on the direction of optic fibre extension direction before the grating stress application with the synoptic diagram of afterwards grating; And
Figure 32 is the diagrammatic sketch that the wavelength shift of the grating institute beam reflected that how to cause shown in Figure 31 is shown.
Embodiment
To be discussed in more detail below Fibre Optical Sensor according to the preferred embodiment of the present invention with reference to accompanying drawing.
Fig. 1 is the robot system 10 that schematically shows the Fibre Optical Sensor that is combined with according to first embodiment of the invention (below be also referred to as " touch sensor ") with the frame segment diagram form.As shown in fig. 1, robot system 10 comprises: be used to grasp the executor 14 with handled object 12; Be arranged in last a pair of touch sensor 18a, the 18b of arm 16a, 16b of executor 14, be used to detect the seized condition of the object 12 that grasps by arm 16a, 16b and keep simultaneously and the contacting of object 12; Touch sensor controller 20, it is used to control touch sensor 18a, 18b to obtain shear stress and the perpendicular stress as the information of the seized condition of representing object 12; And, executor controller 22, it is used for controlling executor 14 based on the shear stress and the perpendicular stress that are obtained by touch sensor controller 20.
When arm 16a, 16b grasping objects 12, can be based on coming the slip of inspected object 12 with respect to arm 16a, 16b by touch sensor 18a, the detected shear stress of 18b.When arm 16a, 16b grasping objects 12, can be based on detecting the grasp force that is applied to object 12 by arm 16a, 16b by touch sensor 18a, the detected perpendicular stress of 18b.Therefore; Through controlling arm 16a, 16b according to detected shear stress and perpendicular stress; Robot system 10 can handled object 12, for example comes grasping objects 12 with suitable grasp force and object 12 is displaced to the position of expectation and can let object 12 fall.
Each of touch sensor 18a, 18b comprises FBG sensor 24 (referring to Fig. 2).The principle of operation of FBG sensor 24 is described below with reference to Fig. 2.
Has grating periods lambda separately if suppose two grating 30A, 30B
A, Λ
BAnd fibre core 28 has effective refractive index n
Eff, then grating 30A, 30B reflection have the respective wavelength λ that satisfies following equality (1), (2)
A, λ
BThe light beam of (bragg wavelength), and the light beam with other wavelength is passed.
λ
A＝2n
effΛ
A ...(1)
λ
B＝2n
effΛ
B ...(2)
When having the light of specific range of wavelengths λ as shown in Figure 3 when being applied to the inlet end of fibre core 28 of optical fiber 26, optical fiber 26 has corresponding wavelength X from the inlet end emission of fibre core 28
A, λ
BFolded light beam, and the light beam that has other wavelength from the reverse endpiece emission of fibre core 28.
As shown in Figure 4, when will be when being applied to the optical fiber 26 between grating 30A, 30B along the shear stress on the indicated direction by arrow X1 of the longitudinal axis of optical fiber 26, the grating periods lambda of grating 30A
AReduce, and the grating periods lambda of grating 30B
BIncrease.Therefore, as shown in Figure 5, by the wavelength X of grating 30A institute beam reflected
ABe displaced to and be shorter than wavelength X
AWavelength X
A -, and by the wavelength X of grating 30B institute beam reflected
BBe displaced to and be longer than wavelength X
BWavelength X
B +
As shown in Figure 6, when will be when being applied to the optical fiber 26 between grating 30A, 30B along the shear stress on the indicated direction by arrow X2 of the longitudinal axis of optical fiber 26, the grating periods lambda of grating 30A
AIncrease, and the grating periods lambda of grating 30B
BReduce.Therefore, as shown in Figure 7, by the wavelength X of grating 30A institute beam reflected
ABe displaced to and be longer than wavelength X
AWavelength X
A +, and by the wavelength X of grating 30B institute beam reflected
BBe displaced to and be shorter than wavelength X
BWavelength X
B -
Therefore, can be through detecting wavelength X by adjacent gratings 30A, 30B institute beam reflected
A, λ
BThe direction and the size of the shear stress that direction of displacement and the shift amount that displacement takes place confirmed to apply.
Can be through detecting wavelength X by grating 30A or 30B institute beam reflected
AOr λ
BThe shift amount that displacement takes place confirms vertically to be applied to the size of the stress (that is perpendicular stress) of optical fiber 26.
Fig. 8 illustrates touch sensor 18a, 18b with exploded perspective, and each takes the form of FBG sensor 24 shown in figure 2.
As shown in Figure 8, each among touch sensor 18a, the 18b comprises: directions X shearing stress sensor parts 32, and it is used to detect the shear stress that applies along the X-direction of quadrature three-axis reference; Y direction shearing stress sensor parts 34, it is used to detect the shear stress that applies along the Y direction of quadrature three-axis reference; And Z direction strain gauge parts 36, it is used to detect the perpendicular stress that applies along the Z-direction of quadrature three-axis reference.
Directions X shearing stress sensor parts 32 adopt the form of lamellar body; It comprises the single optical fiber 38 that has along a plurality of gratings 40 that vertically are arranged at regular intervals wherein and arrange along X-direction of optical fiber 38; And the flexible pressure-sensitive element 42 of plastics, resin etc., optical fiber 38 is wrapped in the molded flexible pressure-sensitive element 42.Grating 40 has cycle of grating separately of differing from one another (referring to the grating periods lambda shown in Fig. 2
A, Λ
B).
Y direction shearing stress sensor parts 34 adopt the form of lamellar body; It comprises the single optical fiber 44 that has along a plurality of gratings 46 that vertically are arranged at regular intervals wherein and arrange along Y direction of optical fiber 44; And the flexible pressure-sensitive element 48 of plastics, resin etc., optical fiber 44 is wrapped in the molded flexible pressure-sensitive element 48.Grating 46 has cycle of grating separately of differing from one another (referring to the grating periods lambda shown in Fig. 2
A, Λ
B).
Fig. 9 illustrates directions X shearing stress sensor parts 32 and Y direction shearing stress sensor parts 34 with vertical view.
Z direction strain gauge parts 36 adopt the form of lamellar body; It comprises the single optical fiber 50 that has along a plurality of gratings 52 that vertically are arranged at regular intervals wherein and arrange along Z-direction of optical fiber 50; And the flexible pressure-sensitive element 54 of plastics, resin etc., optical fiber 50 is wrapped in the molded flexible pressure-sensitive element 54.Grating 52 has cycle of grating separately of differing from one another (referring to the grating periods lambda shown in Fig. 2
A, Λ
B).
Figure 10 is at the strain gauge of Z direction shown in the xsect of making along Y-Z plane parts 36.
As shown in Figure 11, Z direction strain gauge parts 36 can comprise two optical fiber 56a, 56b, and it is combined into the interleaving mode that is perpendicular to one another, thereby the grating 52 among the optical fiber 56a, 56b is encapsulated in the Z direction strain gauge parts 36 with the density that increases.
As shown in Figure 12, each among touch sensor 18a, the 18b can comprise the stack assemblies of directions X shearing stress sensor parts 32, Y direction shearing stress sensor parts 34 and Z direction strain gauge parts 36.Alternatively; According to second embodiment of the present invention as shown in Figure 13; Among touch sensor 18a, the 18b each can comprise the stack assemblies of shearing stress sensor parts 35 and Z direction strain gauge parts 36, and wherein shearing stress sensor parts 35 are entire combination of directions X shearing stress sensor parts 32 and Y direction shearing stress sensor parts 34.
Because touch sensor 18a, 18b adopt the form of the flexible lamellar body of directions X shearing stress sensor parts 32, Y direction shearing stress sensor parts 34 and Z direction strain gauge parts 36, thus touch sensor 18a, 18b can be installed in can be on the surface of arm 16a, 16b of any desired shape.
Directions X shearing stress sensor parts 32, Y direction shearing stress sensor parts 34 and Z direction strain gauge parts 36 comprise single optical fiber 38,44 and 50 separately.Yet, optical fiber 38,44 and 50 each can comprise a plurality of optical fiber, and these a plurality of optical fiber comprise grating.
Figure 14 illustrates the touch sensor 18a that is combined with said structure, the robot system 10 of 18b with block diagram.
As shown in Figure 14, offer touch sensor 18a, the 18b each directions X shearing stress sensor parts 32, Y direction shearing stress sensor parts 34 or Z direction strain gauge parts 36 from one of half-silvered mirror 62a through selecting with shared (time-sharing) mode of time of the light of light source 58 emission, 62b, 62c by light beam switch 60.
Light enters into their optical fiber 38,44 or 50 (referring to Fig. 8) from an end of directions X shearing stress sensor parts 32, Y direction shearing stress sensor parts 34 or Z direction strain gauge parts 36.Part light is by grating 40,46 or 52 reflections, and remaining light then arrives through grating 40,46 or 52 and sends optical terminus load (terminator) 64a, 64b or 64c.
Be directed to the reflected light detector 66 of touch sensor controller 20 by grating 40,46 or 52 beam reflected by half-silvered mirror 62a, 62b and 62c, its detection and transform the light beam into electric signal.Reflected light detector 66 comprises spectroscope, and it is used for beam split and the light beam that detects applied respective wavelength.The electric signal that from directions X shearing stress sensor parts 32 and Y direction shearing stress sensor parts 34 beam reflected, converts is provided for shear stress counter 68, and the electric signal that converts from Z direction strain gauge parts 36 beam reflected is provided for perpendicular stress counter 70.
The electric signal that converts based on 40 beam reflected of grating and according to shift amount and direction of displacement from the wavelength of 40 beam reflected of adjacent gratings from directions X shearing stress sensor parts 32; Shear stress counter 68 calculates the size and Orientation that is applied to the shear stress of directions X shearing stress sensor parts 32 in the position corresponding to adjacent gratings 40, shown in Fig. 5 and Fig. 7.Similarly; The electric signal that converts based on 46 beam reflected of grating from Y direction shearing stress sensor parts 34 and according to shift amount and direction of displacement from the wavelength of 46 beam reflected of adjacent gratings, shear stress counter 68 calculates the size and Orientation that is applied to the shear stress of Y direction shearing stress sensor parts 34 in each position corresponding to adjacent gratings 46.From the size and Orientation that calculates, can detect object 12 slip with respect to arm 16a, 16b in X-Y plane.
Because grating 40,46 is arranged in the two-dimensional matrix of X-Y plane, so shear stress counter 68 can be based on confirming that through the positional information of grating 40,46 detected slips and grating 40,46 slip in the X-Y plane distributes.
The electric signal that converts based on 52 beam reflected of grating from Z direction strain gauge parts 36 and according to the shift amount from the wavelength of 52 beam reflected of each grating of Z direction strain gauge parts 36, perpendicular stress counter 70 calculates the size that is applied to the perpendicular stress of Z direction strain gauge parts 36 in each position corresponding to grating 52.Can detect on Z-direction the grasp force that is applied to object 12 by arm 16a, 16b from the size of the perpendicular stress that calculates.Because grating 52 is arranged in the two-dimensional matrix of X-Y plane, so perpendicular stress counter 70 can be based on confirming that through the positional information of grating 52 detected grasp forces and grating 52 grasp force in the X-Y plane distributes.
In the robot system shown in Figure 14 10; Offer touch sensor 18a, 18b one of from the light of light source 58 emission from the half-silvered mirror 62a, 62b and the 62c that select with the time sharing mode by light beam switch 60, and detect by reflected light detector 66 from touch sensor 18a, 18b beam reflected.Yet; The corresponding light beam that the directions X shearing stress sensor parts 32 of touch sensor 18a, 18b, Y direction shearing stress sensor parts 34 and Z direction strain gauge parts 36 can provide from three arbitrary sources, and from the folded light beam of directions X shearing stress sensor parts 32, Y direction shearing stress sensor parts 34 and Z direction strain gauge parts 36 can by three independently reflected light detector detect.According to such modification, can detect shear stress and the perpendicular stress that is applied from object 12 simultaneously.
Below will describe Fibre Optical Sensor in detail according to third embodiment of the invention.
Figure 15 schematically shows the robot system 110 that is combined with according to the Fibre Optical Sensor of third embodiment of the invention with the frame segment diagram form.As shown in Figure 15, robot system 110 comprises: be used to grasp the executor 14 with handled object 12; Be arranged in last a pair of Fibre Optical Sensor 118a, the 118b of arm 16a, 16b of executor 14, be used to detect the seized condition of the object 12 that grasps by arm 16a, 16b and keep simultaneously and the contacting of object 12; Fibre Optical Sensor controller 20, it is used to control Fibre Optical Sensor 118a, 118b to obtain shear stress and the perpendicular stress as the information of the seized condition of representing object 12; And, executor controller 22, it is used for controlling executor 14 based on the shear stress and the perpendicular stress that are obtained by Fibre Optical Sensor controller 20.
When arm 16a, 16b grasping objects 12, can be based on coming the slip of inspected object 12 with respect to arm 16a, 16b by Fibre Optical Sensor 118a, the detected shear stress of 118b.When arm 16a, 16b grasping objects 12, can be based on detecting the grasp force that is applied to object 12 by arm 16a, 16b by Fibre Optical Sensor 118a, the detected perpendicular stress of 118b.Therefore; Through controlling arm 16a, 16b according to detected shear stress and perpendicular stress; Robot system 110 can handled object 12, for example comes grasping objects 12 with suitable grasp force and object 12 is displaced to the position of expectation and can let object 12 fall.
Each of Fibre Optical Sensor 118a, 118b comprises the FBG sensor 124 shown in Figure 16.The FBG sensor is structurally basic identical with the FBG sensor 24 shown in Fig. 2, and the principle of operation of FBG sensor 124 also the principle of operation with FBG sensor 24 is identical basically.Therefore, omit the description of principle of operation.In Figure 16, FBG sensor 124 comprises optical fiber 126, and this optical fiber 126 has fibre core 128 and is arranged in a pair of grating 130A, the 130B in fibre core 128 parts.
Figure 17 is using the Fibre Optical Sensor 118a of the FBG sensor 124 shown in Figure 16, each of 118b shown in the decomposition diagram.
Among Fibre Optical Sensor 118a, the 118b each comprises: directions X shearing stress sensor parts 132, and it is used to detect the shear stress that applies along the X-direction of quadrature three-axis reference; Y direction shearing stress sensor parts 134, it is used to detect the shear stress that applies along the Y direction of quadrature three-axis reference; And Z direction strain gauge parts 136, it is used to detect the perpendicular stress that applies along the Z-direction of quadrature three-axis reference.
Directions X shearing stress sensor parts 132 adopt the form of lamellar body; It comprises the single optical fiber 138 that has along a plurality of gratings 140 that vertically are arranged at regular intervals wherein and arrange along X-direction of optical fiber 138; And the flexible pressure-sensitive element 142 of plastics, resin etc., optical fiber 138 is wrapped in the molded flexible pressure-sensitive element 142.Grating 140 has cycle of grating separately of differing from one another (referring to the grating periods lambda shown in Figure 16
A, Λ
B).
Y direction shearing stress sensor parts 134 adopt the form of lamellar body; It comprises the single optical fiber 144 that has along a plurality of gratings 146 that vertically are arranged at regular intervals wherein and arrange along Y direction of optical fiber 144; And the flexible pressure-sensitive element 148 of plastics, resin etc., optical fiber 144 is wrapped in the molded flexible pressure-sensitive element 148.Grating 146 has cycle of grating separately of differing from one another (referring to the grating periods lambda shown in Figure 16
A, Λ
B).
Z direction strain gauge parts 136 adopt the form of lamellar body; It comprises the single optical fiber 150 that has along a plurality of gratings 152 that vertically are arranged at regular intervals wherein and arrange along Z-direction of optical fiber 150; And the flexible pressure-sensitive element 154 of plastics, resin etc., optical fiber 150 is wrapped in the molded flexible pressure-sensitive element 154.Grating 152 has cycle of grating separately of differing from one another (referring to the grating periods lambda shown in Figure 16
A, Λ
B).
Because Fibre Optical Sensor 118a, 118b adopt the form of the flexible lamellar body of directions X shearing stress sensor parts 132, Y direction shearing stress sensor parts 134 and Z direction strain gauge parts 136, thus Fibre Optical Sensor 118a, 118b can be installed in can be on the surface of arm 16a, 16b of any desired shape.
Directions X shearing stress sensor parts 132, Y direction shearing stress sensor parts 134 and Z direction strain gauge parts 136 comprise single optical fiber 138,144 and 150 separately.Yet each in the optical fiber 138,144 and 150 can comprise a plurality of optical fiber, and these a plurality of optical fiber comprise grating.
Be installed on the optical fiber 138,144,150 as the flexible member 156 of stress direction conversion equipment, and be on the grating 140,146 and 152 separately and stride grating 140,146 and 152 separately.
Figure 18 illustrates optical fiber 138 with skeleton view, and two flexible members 156 for example are installed on it.As shown in Figure 18, each flexible member 156 comprises the straight portion 158 of extending along the longitudinal axis that is parallel to optical fiber 138, and extends to the Stress Transfer part 160 of the respective ends of grating 140 from the opposite end of straight portion 158.Stress Transfer part 160 comprises pair of angled part 162a, 162b, and it is connected to the corresponding opposite end of straight portion 158 and extends to optical fiber 138 obliquely; And pair of joint 164a, 164b are connected to the far-end of corresponding sloping portion 162a, 162b and round optical fiber 138.Sloping portion 162a becomes angle θ 1 to tend to each other with joint 164a, and sloping portion 162b tends to each other with the angle θ 2 that joint 164b becomes to equal angle θ 1.
Be installed on other optical fiber 144,150 flexible member 156 structurally be installed in optical fiber 138 on flexible member 156 identical.
Figure 19 illustrates the Fibre Optical Sensor 118a that is combined with said structure, the robot system 110 of 118b with the form of block diagram.
As shown in Figure 19, offer each directions X shearing stress sensor parts 132, Y direction shearing stress sensor parts 134 or the Z direction strain gauge parts 136 of Fibre Optical Sensor 118a, 118b from one of half-silvered mirror 62a through selecting with the time sharing mode of the light of light source 58 emission, 62b, 62c by light beam switch 60.
Light enters into their optical fiber 138,144 or 150 (referring to Figure 17) from an end of directions X shearing stress sensor parts 132, Y direction shearing stress sensor parts 134 or Z direction strain gauge parts 36.Part light is by grating 140,146 or 152 reflections, and remaining light then arrives through grating 140,146 or 152 and sends optical terminus load 64a, 64b or 64c.
Be directed to the reflected light detector 66 of Fibre Optical Sensor controller 20 by grating 140,146 or 152 beam reflected by half-silvered mirror 62a, 62b or 62c, its detection and transform the light beam into electric signal.Reflected light detector 66 comprises spectroscope, and it is used for beam split and the light beam that detects applied respective wavelength.The electric signal that converts from directions X shearing stress sensor parts 132 and Y direction shearing stress sensor parts 134 beam reflected is provided for shear stress counter 178, and the electric signal that converts from Z direction strain gauge parts 136 beam reflected is provided for perpendicular stress counter 180.
The electric signal that converts based on 140 beam reflected of grating and according to shift amount and direction of displacement from the wavelength of 140 beam reflected of adjacent gratings from directions X shearing stress sensor parts 132; Shear stress counter 178 calculates the size and Orientation that is applied to the shear stress of directions X shearing stress sensor parts 132 in the position corresponding to adjacent gratings 140, like the situation among Fig. 5 and Fig. 7.Similarly; The electric signal that converts based on 140 beam reflected of grating from Y direction shearing stress sensor parts 134 and according to shift amount and direction of displacement from the wavelength of 146 beam reflected of adjacent gratings, shear stress counter 178 calculates the size and Orientation that is applied to the shear stress of Y direction shearing stress sensor parts 134 in each position corresponding to adjacent gratings 146.Can detect object 12 slip with respect to arm 16a, 16b X-Y plane from the size and Orientation that calculates.
Because grating 140,146 is arranged in the two-dimensional matrix of X-Y plane, so shear stress counter 178 can be based on confirming that through the positional information of grating 140,146 detected slips and grating 140,146 slip in X-Y plane distributes.
The electric signal that converts based on 152 beam reflected of grating from Z direction strain gauge parts 136 and according to the shift amount from the wavelength of 152 beam reflected of each grating of Z direction strain gauge parts 136, perpendicular stress counter 180 calculates the size that is applied to the perpendicular stress of Z direction strain gauge parts 136 in each position corresponding to grating 52.Can detect on Z-direction the grasp force that is applied to object 12 by arm 16a, 16b from the size of the perpendicular stress that calculates.Because grating 152 is arranged in the two-dimensional matrix of X-Y plane, so perpendicular stress counter 180 can be based on confirming that through the positional information of grating 152 detected grasp forces and grating 152 grasp force in the X-Y plane distributes.
As shown in Figure 20, when shear stress F was applied to the flexible member 156 on optical fiber 138 or 144, the shear stress initial action was elongated straight portion 158 thus on the straight portion 158 of flexible member 156.
As stated, the elastic modulus of sloping portion 162a, 162b and joint 164a, 164b is lower than the elastic modulus of straight portion 158.Therefore, sloping portion 162a, 162b are increased in the angle that forms between straight portion 158 and sloping portion 162a, the 162b around them to the junction of straight portion 158 angularly away from each other thus.In other words, sloping portion 162a, 162b expand away from each other, are shifted joint 164a, 164b thus away from each other.The result is that the angle that between sloping portion 162a, 162b and joint 164a, 164b, forms is reduced.
Because joint 164a, 164b is shifted and away from each other, so optical fiber 138 or 144 is elongated along its longitudinal axis, expands the grating cycle of grating 140 or 146 thus.The grating cycle of expansion also is uniformly along the longitudinal axis of optical fiber 138 or 144 basically thus, because displacement and away from each other two joint 164a, 164b elongates optical fiber 138 or 144 along its longitudinal axis.
Therefore, flexible member 156 is used for the direction of the shear stress that applies is transformed into from the direction of the longitudinal axis that is substantially perpendicular to optical fiber 138 or 144 direction of the longitudinal axis that is parallel to optical fiber 138 or 144.
As shown in Figure 22; If suppose when shear stress F is applied to flexible member 156; Stress F1, F2 act on sloping portion 162a, 162b respectively; And stress F3, F4 act on joint 164a, 164b respectively, and then grating 140,146 is expanded by the power F3 that equals stress F1, F2 respectively, F4.If the angle that between the direction of shear stress F effect and sloping portion 162a, 162b, forms is represented the equality (3) below then shear stress F, stress F1, F2 and angle [alpha] satisfy with α:
F1＝F2＝Fcosα ...(3)
Because the angle that between the longitudinal axis of the direction of stress F2 and optical fiber 138 or 144, forms represented by 90 °-α, thus act on optical fiber 138 or 144 and joint 164a, last power F3, the F4 of 164b express through following equality (4):
F3＝F4＝F2cos(90°-α)
＝F2sinα
＝Fcosαsinα ...(4)
Owing to be equal to each other at angle θ 1 that forms between sloping portion 162a and the joint 164a and the angle θ 2 that between sloping portion 162b and joint 164b, forms, so stress F1 equals stress F2 and stress F3 equals power F4.Have elastic constant E and strain stress if suppose optical fiber 138 or 144, the equality (5) below then satisfying:
ε＝(2/E)Fcosαsinα ...(5)
If suppose that the raster count of grating 140 or 146 is represented by N and the variation in the grating space of grating 140 or 146 is represented with Δ, the equality (6) below then raster count N and grating space Δ satisfy:
Δ＝ε/(N-1) ...(6)
Through with the ε in equality (5) the substitution equality (6), equality (6) can be expressed according to following equality (7):
Δ＝2Fcosαsinα/[E×(N-1)] ...(7)
Therefore, can confirm wavelength-shift λ through following equality (8):
λ＝2×n
eff×Δ
＝4×n
eff×Fcosαsinα/[E×(N-1)] ...(8)
Therefore according to the unique definite peak value waveform of shear stress F.
When shear stress is applied to the straight portion 158 that is positioned at the position that is shifted the longitudinal center position of leaving straight portion 158; For example when shear stress is applied to the end near the straight portion 158 of sloping portion 162b; Above-described phenomenon also occurs, as shown in Figure 21.Particularly, when shear stress was applied to straight portion 158 near the end of sloping portion 162b, straight portion 158 was elongated towards sloping portion 162a.Sloping portion 162a, 162b make joint 164a, 164b away from each other angledly away from each other thus.The result is that optical fiber 138 or 144 is elongated, and has expanded the grating space of grating 140 or 146.As shown in Figure 21, grating 140 or 146 grating space expansion equally basically.
Although do not illustrate, above-mentioned phenomenon also occurs in when shear stress is applied to straight portion 158 near the end of sloping portion 162a.
Because grating 140 or 146 is expanded; Thereby the grating space is expansion equally basically; Grating 140 or 146 does not reflect a plurality of light beams (referring to Figure 32) with different wave length; But reflection has the light beam of such wavelength: this wavelength is different from the wavelength of beam reflected before grating 140 or 146 is expanded, as shown in Figure 30.
If differ from one another at angle θ 1 that forms between sloping portion 162a and the joint 164a and the angle θ 2 that between sloping portion 162b and joint 164b, forms, then can carry out following calculating:
Represent with α, β respectively if suppose the angle that between the direction of shear stress F effect and sloping portion 162a, 162b, forms, and sloping portion 162a, 162b have separately stress ε 1, ε 2, equality (9), (10) below then satisfying:
ε1＝F3/E
＝Fcosαsinα/E ...(9)
ε2＝F4/E
＝Fcosβsinβ/E ...(10)
Because total stress ε equals ε 1+ ε 2, so the equality (11) below satisfying:
ε＝ε1+ε2
＝(Fcosαsinα+Fcosβsinβ)/E ...(11)
Through with the ε in equality (11) the substitution equality (6), express equality (6) according to following equality (12):
Δ＝(Fcosαsinα+Fcosβsinβ)/[E×(N-1)] ...(12)
Therefore, wavelength-shift λ can confirm through following equality (13):
λ＝2×n
eff×Δ
＝2×n
eff×(Fcosαsinα+Fcosβsinβ)/[E×(N-1)] ...(13)
When perpendicular stress is applied to optical fiber 150, will operate with above-mentioned same way as according to the Fibre Optical Sensor of the 3rd embodiment.Confirm to depend on the peak value waveform of perpendicular stress to the equality of (13) according to being similar to above-mentioned equality (4).
According to the 3rd embodiment, as stated, when expansion grating 140,146 and 152, corresponding grating space will be expanded basically equably, and come to confirm uniquely the wavelength of displacement according to the stress that applies.The stress that therefore, can apply with the accuracy measurement that increases.
Although illustrated and described in detail some preferred implementation of the present invention, should be appreciated that under the scope that does not break away from appended claims and can make various changes and modification.
For example, Figure 23 is at other flexible members 156 shown in the skeleton view, and it has different shapes as the stress direction conversion equipment.As shown in Figure 23, each flexible member 156 has joint 164a, 164b, and it is connected to joint 164b, the 164a of adjacent flexible member 156.
Figure 24 has difform other flexible members 156 shown in the skeleton view.As shown in Figure 24, each flexible member 156 is round the upper surface and the lower surface of optical fiber 138,144 or 150.
Figure 25 has difform other flexible members 156 shown in the skeleton view.As shown in Figure 25, the flexible member 156 that is similar to flexible member shown in Figure 24 156 has joint 164a, 164b, and it is connected to joint 164b, the 164a of adjacent flexible member 156.
Figure 26 has difform other flexible members 156 shown in the skeleton view.As shown in Figure 26, each flexible member 156 be arranged on optical fiber 138,144 or 150 or under, and have joint 164b, the joint 164a of 164a, the 164b that is connected to adjacent flexible member 156.
Figure 27 and Figure 28 have difform other flexible members 156 shown in the skeleton view.Shown in Figure 27 and Figure 28, adjacent flexible member 156 has corresponding straight portion 158 connected to one another.
In the robot system shown in Figure 19 110; From the light of light source 58 emission from the half-silvered mirror 62a that selects with the time sharing mode by light beam switch 60, one of 62b, 62c offer Fibre Optical Sensor 118a, 118b, and the folded light beam that is detected from Fibre Optical Sensor 118a, 118b by reflected light detector 66.Yet; The corresponding light beam that the directions X shearing stress sensor parts 132 of each of Fibre Optical Sensor 118a, 118b, Y direction shearing stress sensor parts 134 and Z direction strain gauge parts 136 provide from three arbitrary sources, and from the folded light beam of directions X shearing stress sensor parts 132, Y direction shearing stress sensor parts 134 and Z direction strain gauge parts 136 can by three independently reflected light detector detect.According to such modification, can detect shear stress and the perpendicular stress that is applied from object 12 simultaneously.
Claims (9)
- A Fibre Optical Sensor (18a 18b), comprising:A plurality of shearing stress sensor parts (32,34) comprise first optical fiber (38 separately; 44) and be used to reflect a plurality of first gratings (40 with light beams of predetermined wavelengths; 46), said first grating (40,46) is arranged in optical fiber (38; 44) in and along being parallel to shear stress is applied to the direction of shearing stress sensor parts (32,34) from object (12) planar alignment; AndPerpendicular stress sensor element (36); It comprises second optical fiber (50) and is used to reflect a plurality of second gratings (52) with light beams of predetermined wavelengths that said second grating (52) is arranged in said second optical fiber (50) and the edge is parallel to perpendicular stress is applied to the direction of perpendicular stress sensor element (36) from object (12) planar alignment;Wherein, said a plurality of shearing stress sensor parts (32,34) and said perpendicular stress sensor element (36) form stack assemblies.
- 2. (18a, 18b), wherein each in shearing stress sensor parts (32,34) and the perpendicular stress sensor element (36) comprises flexible lamellar body to Fibre Optical Sensor according to claim 1.
- 3. Fibre Optical Sensor (18a according to claim 1; 18b); Wherein said shearing stress sensor parts (32; 34) first optical fiber (38,44) extends on two vertical direction that are parallel in shear stress is applied to shearing stress sensor parts (32,34) from object (12) the plane of direction respectively.
- 4. Fibre Optical Sensor (18a according to claim 1; 18b), first grating (40 of wherein said shearing stress sensor parts (32,34); 46) be arranged in and be parallel to shear stress and be applied to shearing stress sensor parts (32 from object (12); In a plurality of diverse locations in the plane of direction 34), and first grating (40,46) reflection has each light beam of different wave length.
- 5. Fibre Optical Sensor (18a according to claim 1; 18b); Wherein each in the shearing stress sensor parts (32,34) comprises two adjacent first gratings (40,46); And based on respectively by two adjacent first gratings (40,46) respectively the wavelength of beam reflected the direction of displacement of displacement and direction and the size that shift amount detects shear stress (F) take place.
- 6. Fibre Optical Sensor (18a according to claim 1; 18b); Arrange in a plurality of diverse locations of second grating (52) of wherein said perpendicular stress sensor element (36) the plane of the direction that is applied to perpendicular stress sensor element (36) perpendicular to perpendicular stress from object (12), and said second grating (52) reflection has each light beam of different wave length.
- A Fibre Optical Sensor (118a 118b), comprising:The strain gauge parts comprise optical fiber (138,144,150) and are used to reflect a plurality of gratings (140,146,152) with light beams of predetermined wavelengths that grating (140,146,152) is disposed in the optical fiber (138,144,150); AndStress direction conversion equipment (156), it is used for being different from optical fiber (138,144; The direction of institute's stress application (F) of the longitudinal axis 150) converts the direction of the longitudinal axis that is parallel to optical fiber (138,144,150) to; And come to transmit stress (F) to grating (140,146,152) with the direction of conversion;Wherein said stress direction conversion equipment (156) comprising: straight portion (158), and it is parallel to the longitudinal axis of optical fiber (138,144,150) and extends; And, Stress Transfer part (160), it extends to optical fiber (138,144,150) from straight portion (158).
- 8. (118a, 118b), wherein said straight portion (158) has specific stress and transmits the higher elastic modulus of part (160) Fibre Optical Sensor according to claim 7.
- 9. Fibre Optical Sensor according to claim 7 (118a, 118b), process through one of rubber, resin, liquid crystal polymer and carbon fiber reinforced plastics by wherein said stress direction conversion equipment (156).
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008125938 | 2008-05-13 | ||
| JP2008125938A JP5430877B2 (en) | 2008-05-13 | 2008-05-13 | Tactile sensor |
| JP2008-125938 | 2008-05-13 | ||
| JP2008-220003 | 2008-08-28 | ||
| JP2008220003A JP2010054359A (en) | 2008-08-28 | 2008-08-28 | Optical fiber sensor |
| JP2008220003 | 2008-08-28 |
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| CN101581612A CN101581612A (en) | 2009-11-18 |
| CN101581612B true CN101581612B (en) | 2012-02-08 |
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| CN103968980B (en) * | 2014-05-20 | 2016-02-03 | 山东大学 | Novel optical fiber tactile array sensor and method for making |
| CN107170701B (en) * | 2016-03-07 | 2021-04-09 | 北京北方华创微电子装备有限公司 | Manipulator, semiconductor processing equipment and method for detecting working state of manipulator |
| CN105716757B (en) * | 2016-04-15 | 2018-07-20 | 林宏韬 | The method that softness haptic perception sensing device and sensing three-dimensional object surface pressure are touched |
| KR102033845B1 (en) * | 2018-01-11 | 2019-10-17 | 한양대학교 에리카산학협력단 | Force Sensor and Manufacturing Method thereof |
| CN108871388B (en) * | 2018-05-10 | 2021-04-09 | 刘正勇 | Optical fiber touch sensor and sensing array |
| CN109540356B (en) * | 2019-01-14 | 2023-11-21 | 华东交通大学 | An optical fiber grating shear force sensor and its working method |
| CN109932111B (en) * | 2019-02-20 | 2021-04-27 | 天津大学 | Optical fiber distributed space three-dimensional force touch sensing method |
| MY197177A (en) * | 2020-04-08 | 2023-05-30 | Petroliam Nasional Berhad Petronas | Optical fiber pressure sensor and method of sensing thereof |
| JP7264136B2 (en) * | 2020-08-28 | 2023-04-25 | 横河電機株式会社 | FORCE DETECTION DEVICE, FORCE DETECTION SYSTEM AND METHOD FOR MANUFACTURING FORCE DETECTION DEVICE |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH05149809A (en) * | 1991-11-28 | 1993-06-15 | Yaskawa Electric Corp | Optical type tactile sensor |
| JP2001099755A (en) * | 1999-09-28 | 2001-04-13 | Fujikura Ltd | Optical fiber sensor |
| JP2002071323A (en) * | 2000-08-29 | 2002-03-08 | Mitsubishi Cable Ind Ltd | Planar sensor |
| JP3871874B2 (en) * | 2000-10-19 | 2007-01-24 | 財団法人鉄道総合技術研究所 | Optical fiber strain sensor sheet |
| JP4043909B2 (en) * | 2002-10-02 | 2008-02-06 | エヌ・ティ・ティ・インフラネット株式会社 | Centerhole load cell for civil engineering using optical fiber Bragg grating |
| US7295724B2 (en) * | 2004-03-01 | 2007-11-13 | University Of Washington | Polymer based distributive waveguide sensor for pressure and shear measurement |
| JP2006010407A (en) * | 2004-06-23 | 2006-01-12 | Sharp Corp | Slip sense detection sensor |
| JP2007155588A (en) * | 2005-12-07 | 2007-06-21 | Hitachi Cable Ltd | Shock detection optical fiber sensor |
| JP2008107295A (en) * | 2006-10-27 | 2008-05-08 | Suncall Corp | Optical pressure sensor and its manufacturing method |
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| JP5430877B2 (en) | 2014-03-05 |
| CN101581612A (en) | 2009-11-18 |
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