CN101571565B - Apparatus and method for determining workpiece property - Google Patents
Apparatus and method for determining workpiece property Download PDFInfo
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- CN101571565B CN101571565B CN2009101393331A CN200910139333A CN101571565B CN 101571565 B CN101571565 B CN 101571565B CN 2009101393331 A CN2009101393331 A CN 2009101393331A CN 200910139333 A CN200910139333 A CN 200910139333A CN 101571565 B CN101571565 B CN 101571565B
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- 239000000523 sample Substances 0.000 claims abstract description 200
- 230000007246 mechanism Effects 0.000 claims abstract description 66
- 238000012546 transfer Methods 0.000 claims description 101
- 238000000691 measurement method Methods 0.000 claims description 13
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- 230000007306 turnover Effects 0.000 claims description 2
- 230000000452 restraining effect Effects 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 11
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- 239000010953 base metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
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- 230000007774 longterm Effects 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Geometry (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
It is capable of ensuring a sufficient electrical contact between a probe and a workpiece, and restraining a damage to an electrode of the workpiece less. A workpiece property determining apparatus (1) is provided with a conveyer table (3) having a workpiece acceptance hole (4); a pair of probes (7, 6) conjointing with electrodes (Wa, Wb) of a workpiece (W) accepted in the workpiece acceptance hole (4); a conveyer drive device (3a) of the conveyer table (3); and a probe drive mechanism (12) for driving the probe (7). The conveyer drive device (3a) and the probe drive mechanism (12) are controlled by a control device (20). When the workpiece acceptance hole (4) reaches a first setting position (S1) before the pair of the probes (7, 6), at least one probe (7) moves toward the workpiece acceptance hole (4) due to the probe drive mechanism (12), when the workpiece acceptance hole (4) reaches a second setting position (S2) corresponding with the pair of the probes (7, 6), the probe (7) falls back from the workpiece acceptance hole (4).
Description
Technical field
The present invention relates to measure the workpiece characteristic detecting apparatus and the workpiece characteristic measurement method of the electrical specification of workpiece such as electronic unit; Relate in particular to and to be controlled at the streak size that produces on the electrode of workpiece through the electrode of workpiece and the slip of probe, and can improve workpiece characteristic detecting apparatus and the workpiece characteristic measurement method of measuring precision.
Background technology
All the time, on one side the workpiece characteristic detecting apparatus of measuring as one side conveying work pieces, the device of well-known mensuration workpiece characteristic comprises: the transfer station with the workpiece accepting hole of accommodating workpiece; And a pair of probe that contacts with the electrode of workpiece.In this workpiece characteristic detecting apparatus, measure in that probe front is touched on the electrode of workpiece, but stop the rotation transfer station and the field platform measured, following problem takes place.
That is, first problem is that the contact resistance when existing the protective oxide layer probe front to touch electrode on the electrode surface becomes big, if do not add enough pressure to destroy protective oxide layer when the contact, just can not carry out correct mensuration.Second problem is in order to solve above-mentioned first problem, if make probe fully to measuring after the electrode pressurization ground contact, then peels off and is attached to probe front at the metal protective film of measuring the rear electrode surface.Thereby the resistance of probe front increases, and can not measure exactly later on.
As the method that is used to prevent above situation, make probe front touch on the electrode and slip under the state that transfer station is rotated.Like this, can reduce contact resistance, grind probe front simultaneously and also clean, prevent the increase of resistance through the protective oxide layer of the electrode surface of pruning.But, if adopt this assay method, will the defective of hindering that streak causes electrode take place because of the slip with probe on electrode, perhaps reduce processing speed because of the cleaning time.
For the streak that takes place on the electrode that is suppressed at workpiece, if exerting pressure when reducing probe and on electrode surface, sliding, but will reduce like this workpiece of pruning electrode surface protective oxide layer function or grind the function of probe front.
So, this two aspect of workpiece quality after realizing improving the mensuration characteristic of workpiece and improving mensuration needs to set reciprocal condition, sets difficulty and be somebody's turn to do.And, because of the hardness of the kind difference electrode of workpiece is also different, so contact load or sliding time when hoping on electrode surface, to slide through the control probe come the big or small workpiece characteristic detecting apparatus of streak that takes place on the control electrode.
Summary of the invention
The present invention has considered that these problem designs form, and its purpose is to provide the streak that produces on the electrode that can control workpiece size, and can improve workpiece characteristic detecting apparatus and the workpiece characteristic measurement method of measuring precision.
Workpiece characteristic detecting apparatus of the present invention; It is characterized in that comprising: transfer body with workpiece accepting hole of a plurality of perforations; Transfer body with workpiece accepting hole of a plurality of perforations is accommodated the workpiece that has towards the pair of electrodes of the perforation direction foreign side of workpiece accepting hole in each workpiece accepting hole; Drive the transfer body drive unit of this transfer body; Be arranged on the transfer body both sides, can abut to a pair of probe that is housed in the piece pole in the workpiece accepting hole separately; At least make the probe driving mechanism of a relative workpiece accepting hole turnover of probe; And control transfer body drive unit and probe driving mechanism, make a pair of probe also control device of butt that on the electrode of the workpiece of correspondence, slides.
Workpiece characteristic detecting apparatus of the present invention; It is characterized in that: when the workpiece accepting hole is come first desired location of a pair of probe front; Control device control probe driving mechanism makes a probe advance towards the workpiece accepting hole, when the workpiece accepting hole is come second desired location corresponding with a pair of probe; The control probe driving mechanism makes a probe retreat from the workpiece accepting hole.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: transfer body is made up of plectane.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: transfer body is made up of shoestring.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the transfer body drive unit comprises the servomotor with rotation angle measuring ability.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the transfer body drive unit has pulse motor.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the pulse motor of transfer body drive unit has the rotation angle measuring ability.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: probe driving mechanism is made up of loaded pins and the loaded pins driving mechanism that drives loaded pins.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: a probe is between loaded pins and transfer body.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: between loaded pins and loaded pins driving mechanism, be provided with elastic body.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the variable rigidity of said elastic body.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: elastic body has spring.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the loaded pins driving mechanism is made up of the servomotor with rotation angle measuring ability.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the loaded pins driving mechanism has pulse motor.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: the loaded pins driving mechanism is made up of the pulse motor with rotation angle measuring ability.
Workpiece characteristic detecting apparatus of the present invention is characterised in that: when the workpiece accepting hole was positioned at second desired location, control device control transfer body drive unit stopped said transfer body.
Workpiece characteristic measurement method of the present invention adopts the workpiece characteristic detecting apparatus of above-mentioned record, it is characterized in that comprising: in the workpiece accepting hole of transfer body, accommodate workpiece, driven the operation of transfer body by control device control transfer body drive unit; And a probe is advanced towards the workpiece accepting hole by control device control probe driving mechanism, make a pair of probe also butt that on the electrode corresponding, slides, the operation of the characteristic of mensuration workpiece with workpiece.
Workpiece characteristic measurement method of the present invention is characterised in that: when the workpiece accepting hole is come first desired location of a pair of probe front; Control device control probe driving mechanism makes a probe advance towards the workpiece accepting hole; When the workpiece accepting hole is come second desired location corresponding to a pair of probe; The control probe driving mechanism makes a probe retreat from the workpiece accepting hole.
Workpiece characteristic measurement method of the present invention is characterised in that: probe driving mechanism pressurizes to a probe via elastic body.
Workpiece characteristic measurement method of the present invention is characterised in that: probe driving mechanism comes a probe pressurization through changing some at least in elastomeric deflection and the elastomeric rigidity.
Workpiece characteristic measurement method of the present invention is characterised in that: first desired location and second desired location are variable, thus the sliding length between the pair of electrodes of decision workpiece and the corresponding probe.
(invention effect)
According to the present invention, can control arbitrarily the contact load or the sliding time of the electrode of probe and workpiece.Therefore, suitably remove the protective oxide layer of the electrode surface of workpiece, can guarantee that probe contacts with the enough electric of electrode of workpiece.Can reduce the wound that the slip because of probe and workpiece produces in addition on the electrode of workpiece, further can make because of the protective oxide layer slag of the electrode of the workpiece that produces with contacting of probe few.
Description of drawings
Fig. 1 is the synoptic diagram of first embodiment of workpiece characteristic detecting apparatus of the present invention.
Fig. 2 (a)-(d) is the action synoptic diagram of workpiece characteristic detecting apparatus of the present invention.
Fig. 3 (e)-(g) is the action synoptic diagram of workpiece characteristic detecting apparatus of the present invention.
Fig. 4 is the action control block scheme of workpiece characteristic detecting apparatus of the present invention.
Fig. 5 is the action timing diagram of workpiece characteristic detecting apparatus of the present invention.
Fig. 6 is the synoptic diagram of second embodiment of workpiece characteristic detecting apparatus of the present invention.
Fig. 7 is the cut-open view of the electrode of the workpiece after the expression mensuration of the present invention.
Fig. 8 is the synoptic diagram by the loaded pins driving mechanism of link rod (link) mechanism formation.
(description of drawings)
1 workpiece characteristic detecting apparatus; 2 pedestals; 3 transfer stations; 3a transfer body drive unit; 4 workpiece accepting holes; 5 attraction holes 6; Basic probe; The 6a insulation course; 7 first detector probe; 8 loaded pins; 9 probe supporters; 10 sleeves; 11 springs; The 11b spring; The 11c spring; 12 loaded pins driving mechanisms; The 12A probe driving mechanism; 12b loaded pins driving mechanism; 13 second detector probe; 14 druum cams; 15 central shafts; 16 support seat; 21MPU; 22 pulse oscillator controllers; 23 first drivers; 24 first servomotors; 25 second drivers; 26 second servomotors; 30 electrode base metals; 31 protective oxide layers; 32 protective oxide layers are removed portion; 33 heap portions; The W workpiece; Wa, Wb electrode.
Embodiment
First embodiment
Below, with reference to accompanying drawing, describe with regard to first embodiment of the present invention.
Fig. 1 to Fig. 5 and Fig. 7 are the synoptic diagram of first embodiment of workpiece characteristic detecting apparatus of the present invention.
To shown in Figure 5, workpiece characteristic detecting apparatus 1 possesses: the pedestal 2 of arranged perpendicular like Fig. 1; The transfer station (transfer body) 3 of arranged perpendicular in the workpiece accepting hole 4 that be provided with, that have a plurality of perforations on pedestal 2 with rotating freely; And rotation comprises the transfer body drive unit 3a of first servomotor 24 when driving this transfer station 3.
Wherein the workpiece accepting hole 4 of transfer station 3 is accommodated the workpiece W that has towards the pair of electrodes Wa of the perforation direction foreign side of workpiece accepting hole 4, the electronic unit of Wb etc.
In transfer station 3 both sides; Be provided with respectively can with the pair of electrodes Wa that is contained in the workpiece W in the workpiece accepting hole 4, a pair of probe 7,6 of Wb butt; As hereinafter described, a probe 7 in a pair of probe 7,6 becomes first detector probe 7, and another probe 6 becomes basic probe 6.
This platform, control device 20 control first servomotor 24 and second servomotors 26 make a pair of probe 7,6 at last slip of electrode Wa, the Wb of the workpiece W of correspondence and butt.
, as stated, in transfer station 3, connect transfer station 3 ground a plurality of workpiece accepting holes 4 are set with concentric circles.The workpiece W that is contained in the workpiece accepting hole 4 is Nogata body shape, individually accommodates with level.The electrode Wa of workpiece W, Wb are formed on opposed 2 of two ends of workpiece W long side direction, and electrode Wa, Wb expose to foreign side from thickness direction (perforation direction) two sides of transfer station 3.As stated, transfer station 3 is through first servomotor 24, make workpiece W at the pedestal 2 of transfer station 3 relatively when opposition side is watched, along intermittently rotation and transmitting of up time meter (direction of the arrow A among Fig. 1).
The loaded pins 8 of probe driving mechanism 12A is arranged on the opposition side of transfer station 3 via first detector probe 7 in addition.As stated, loaded pins 8 is placed in the sleeve 10, in sleeve 10, has fixed an end of spring 11 on the end of middle loaded pins 8.The other end of spring 11 is fixed on and sleeve 10 incorporate loaded pins driving mechanisms 12.At this moment, 11 pairs of loaded pins 8 of spring apply the power that causes the direction that loaded pins 8 leaves from first detector probe 7.Loaded pins driving mechanism 12 has second servomotor 26, and has that to make the rotational transform of this second servomotor 26 through ball screw, screw mechanism or link mechanism be straight-line structure.The rectilinear motion of loaded pins driving mechanism 12 is delivered to loaded pins 8 via spring 11 then, thereby loaded pins 8 is being freed in and out near the direction (direction of the arrow C of Fig. 1) of first detector probe 7 and the direction of leaving from first detector probe 7 (direction of the arrow D of Fig. 1).
As an example of link mechanism, the mechanism that adopts druum cam is shown at Fig. 8.For adopting identical symbol, and omit its detailed description among Fig. 8 with part that Fig. 1 has an identical functions.The end of spring 11c is connected sleeve 10, on fixing support seat 16, connects the other end.Be applied in the power with the direction of druum cam 14 butts with sleeve 10 incorporate loaded pins driving mechanism 12b through spring 11c.The sphere that the part of loaded pins driving mechanism 12b and druum cam 14 butts is processed to have high rigidity.Druum cam 14 comes rotation around central shaft 15 through the rotation of second servomotor 26, and its rotatablely move (arrow E among Fig. 8) transmitted for the loaded pins driving mechanism 12b that abuts to druum cam 14 and be rectilinear motion (the arrow F among Fig. 8).Then, this rectilinear motion is delivered to loaded pins 8 (arrow G among Fig. 8) via spring 11b.
When measuring the characteristic of workpiece W, among Fig. 1, basic probe 6 contacts with the electrode Wb of workpiece W, and loaded pins 8 moves along the direction near first detector probe 7.Then, loaded pins 8 is in case contact with first detector probe 7, and first detector probe 7 that pressurized pin 8 presses down will elastic deformation and to workpiece W side shifting, abuts on the electrode Wa of workpiece W.Thereby, come clamping workpiece W by the basic probe 6 and first detector probe 7, carry out the mensuration relevant of workpiece W with electrical specification according to not shown determinator.
If finish the mensuration relevant with electrical specification of workpiece W, then the loaded pins 8 edges direction of leaving first detector probe 7 moves, and first detector probe 7 is recovered because of elasticity, leaves from the electrode Wa of workpiece W.This platform, the length of the long side direction of workpiece W is a bit larger tham the degree of depth T of workpiece accepting hole 4, and therefore when the position of workpiece W at Fig. 1, the end face of electrode Wa is more side-prominent to first detector probe 7 slightly than the face of first detector probe, 7 sides of transfer station 3.
At this moment; First detector probe 7 is separated with the end face of the electrode Wa of workpiece W a little among Fig. 1; But this is not a necessary condition, even first detector probe 7 contacts with the end face of the electrode Wa of workpiece W, adds press contacts so long as not the electrode Wa that makes first detector probe 7 with workpiece W through loaded pins 8 and gets final product.Promptly; If be in first detector probe 7 not with the electrode Wa of workpiece W pressurization state of contact; Downforce just can not be applied to the electrode Wa of workpiece W; Even transfer station 3 rotations, first detector probe 7 can not slided on the electrode Wa of workpiece W yet, and the streak that slides and bring just can not take place on electrode Wa.Based on same reason; Loaded pins 8 is separated with first detector probe 7 a little among Fig. 1; But this neither necessary condition, even loaded pins 8 contacts with first detector probe 7, as long as make first detector probe 7 not add press contacts with the electrode Wa of workpiece W through loaded pins 8.
Below, by Fig. 2 (a)-(d) and Fig. 3 (e)-(g), the effect of this embodiment with this structure is described.
State in the transmission of the workpiece W that will measure below Fig. 2 (a) is illustrated in the characteristic detecting apparatus 1 of workpiece here.At first shown in Fig. 2 (a), transfer station 3 is come conveying work pieces W through the transfer body drive unit 3a of control device 20 controls, and this moment, workpiece W turned clockwise when pedestal 2 opposition sides are watched.At this moment, attract workpiece W from attracting hole 5, workpiece W is attracted on attraction hole 5 side wall surfaces of pedestal 2 sides and workpiece accepting hole 4.
In Fig. 2 (a), X is the position of readiness of loaded pins 8, and the loaded pins 8 when not measuring stops on the X position.Y be loaded pins 8 in Fig. 2 (a) along moving near the direction of first detector probe 7, make first detector probe 7 be contacted with the electrode Wa of workpiece W and give abundant pressure and the position that stops, with the roughly same plane of end face of the electrode Wa of workpiece W.
In addition among Fig. 2 (a); S1 represent with loaded pins 8 from position of readiness X along the first corresponding desired location of timing that begins to move near the direction of first detector probe 7, this first desired location S1 provides indication and setting for second servomotor 26 that moves to control loaded pins 8 and stop.Here, because of the midpoint of the minor face of the rotation workpiece W of transfer station 3 during through the first desired location S1, the loaded pins driving mechanism 12 through control device 20 controls makes loaded pins 8 begin to move along the direction near first detector probe 7 from position of readiness X.
Then shown in Fig. 2 (b), the midpoint of the minor face of workpiece W is through the first desired location S1.Loaded pins 8 begins to move along the direction near first detector probe 7 from position of readiness X, arrives the position of first detector probe 7 constantly at this.Thereafter, through loaded pins 8 first detector probe 7 is pressed down to transfer station 3 sides, first detector probe, 7 elastic deformations also abut to the electrode Wa of workpiece W.
Then, shown in Fig. 2 (c), the electrode Wa of first detector probe 7 and workpiece W pressure fully contacts.Transfer station 3 rotations under this state, therefore the electrode Wa of first detector probe, 7 relative workpiece W slides.But, because the rotation of transfer station 3 just stops after just having begun to slide, so sliding time is extremely short.
Then, if the midpoint of the minor face of workpiece W is come the second desired location S2 corresponding to a pair of probe 7,6, transfer station 3 stop the rotation (Fig. 2 (d)) then.Under this state, come clamping workpiece W through the basic probe 6 and first detector probe 7, carry out the mensuration relevant through not shown determinator with the electrical specification of workpiece W.
Like this, finish the mensuration (Fig. 3 (e)) relevant with the electrical specification of workpiece W.Thereafter loaded pins 8 beginnings are moved along the direction of leaving first detector probe 7.With it simultaneously, pressurized pin 8 by recovery of elasticity, leaves the electrode Wa of workpiece W by first detector probe 7 of the electrode Wa side that is pressed in workpiece W.If loaded pins 8 is left the state that first detector probe, 7, the first detector probe 7 are in the electrode Wa that leaves workpiece W really.Z representes the corresponding position of timing that begins to rotate with transfer station 3, and this position 2 is in order to move transfer station 3 to 24 indications of first servomotor and to be provided with.Here, if its front end is across position 2 in the process that loaded pins 8 moves along the direction of leaving first detector probe 7, transfer station 3 just begins rotation (Fig. 3 (f)).
The workpiece W that end is measured is sent to subsequent processing by the rotation of transfer station 3, and along with the rotation of transfer station 3, the workpiece W that the next one will be measured is sent to the position of a pair of probe 7,6.
The front end of Fig. 3 (f) expression loaded pins 8 is across the state after the position 2.Transfer station 3 begins rotation and workpiece W is sent to subsequent processing.At this moment, first detector probe 7 is left the electrode Wa of workpiece W, therefore first detector probe 7 not relatively the electrode Wa of workpiece W do slip.
When making detector probe touch on the electrode of object workpiece and measuring the characteristic of workpiece; As as described in background technology; When wanting to remove the protective oxide layer of electrode surface of workpiece through suitable contact load or slip (nuzzling up); Have and electrode is received be difficult to damage,, make resistance become big or unsettled situation perhaps because of the electrode slag that slip takes place is attached to detector probe side etc. as commodity.
Relative with it; According to the present invention,, as shown in Figure 7 through suitably selecting contact load and slip (nuzzling up) length; If detector probe 7 is abutted to have the electrode Wa of electrode base metal 30; Then cause a kind of plastic yield situation, thereby even being formed on the protective oxide layers 31 on electrode base metal 30 surface is removed also and can become slag, the glide direction (direction in the opposite direction with workpiece movement) that concentrates on probe becomes heap portion 33.In the present invention promptly, detector probe 7 is touched measure after protective oxide layer shown in Figure 7 is removed portion 32, so contact resistance is less and stable, and seldom be attached to electrode Wa again attached to the electrode slag of detector probe 7 sides.
; In this embodiment; Can change said contact load and slip (nuzzling up) length by its situation according to the thickness of the kind of the electrode Wa of workpiece W or protective oxide layer 31, along with the hardness of the current value of the size of workpiece W or kind and detector probe 7 or surfaceness etc.
In this embodiment, (1) makes detector probe 7 variable with the contact load of the electrode Wa of workpiece W, and (2) make slip (nuzzling up) variable-length of the electrode Wa of detector probe 7 and workpiece W, and makes it after before mensuration, pushing to slide.
Below; By the control method of Fig. 4 to control device 20; Promptly control first servomotor 24 of transfer body drive unit 3a and second servomotor 26 of loaded pins driving mechanism 12, cooperate the rotation of transfer station 3 and be elaborated through the control method that loaded pins 8 is pushed first detector probe 7.
Here Fig. 4 illustrates the block scheme of the servomotor in the workpiece characteristic detecting apparatus.Among Fig. 4, MPU21 is made up of microprocessor and peripheral circuit, through software operation.Pulse oscillator controller 22 through with the MPU21 transceive data, carry out the positioning control of servomotor via driver.Wherein control device 20 is made up of MPU21 and pulse oscillator controller 22.
Servomotor and driver are the settings of 2 formulas.First servomotor 24 be arranged on the rotation transfer station 3 transfer body drive unit 3a in, through first driver 23 and pulse oscillator controller 22 between transceive data.Second servomotor 26 is arranged in the loaded pins driving mechanism 12 that moves loaded pins 8, through second driver 25 and pulse oscillator controller 22 between transceive data.
Here, below be benchmark just with the current location of transfer station 3, loaded pins 8 is described along the control method that the direction near first detector probe 7 moves.The action that transfer station 3 is carried out rotation when conveying work pieces W repeatedly, when measuring the characteristic of workpiece W, stopped.On the other hand, loaded pins 8 action carrying out when conveying work pieces W, leaving first detector probe 7 repeatedly, when measuring the characteristic of workpiece W, first detector probe 7 contacted with the electrode Wa pressure of workpiece W.
At Fig. 5 this situation is shown.Fig. 5 is to be the sequential chart of the state of time showing each several part with the transverse axis.Each corresponding with Fig. 2 (a)～Fig. 3 (g) constantly is shown above Fig. 5.
As shown in Figure 5, transfer station 3 is rotated to t constantly
1, loaded pins 8 stops at position of readiness (X among Fig. 2).The stop position of transfer station 3 is confirmed in advance, can measure so that the workpiece W of workpiece accepting hole 4 is clamped between the basic probe 6 and first detector probe 7.In Fig. 5, this is used t constantly
3Represent.
That is, MPU21 is at this moment t
3In, in advance command signal 1 is sent to pulse oscillator controller 22, so that the rotational speed of first servomotor 24 is 0.Pulse oscillator controller 22 is a benchmark with command signal 1; The coded signal 1 (rotation angle of representing the first current servomotor 24 is the position of workpiece accepting hole 4) that supervision receives from first scrambler that is contained in first servomotor 24, and will be sent to first driver 23 with the command pulse signal 1 of the rotation of controlling first servomotor 24.In addition, second servomotor, the 26 second built-in scramblers will represent that the coded signal 2 of the position of current loaded pins 8 is sent to pulse oscillator controller 22 via second driver 25.
Here, to moment t
1Till second servomotor 26 stop, loaded pins 8 stops at position of readiness (X among Fig. 2), so the value representation position of readiness of coded signal 2.This platform, the rotational speed of coded signal 1 expression first servomotor 24 becomes 0 moment t
3Middle stop position.Among Fig. 5, loaded pins 8 is begun along the moment t that the direction near first detector probe 7 moves
1The value E1 of the coded signal 1 of the position that middle expression workpiece accepting hole 4 should exist in pulse oscillator controller 22, obtains through calculating in advance.
Thereby; In pulse oscillator controller 22, compare coded signal 1 and coded signal 2; When the value of coded signal 1 is the value representation position of readiness of E1 and coded signal 2; Loaded pins 8 beginning is moved along the direction near first detector probe 7, via second driver 25 to second servomotor 26 send make first detector probe 7 with the electrode Wa pressure position contacting (Y among Fig. 2) of workpiece W on the command pulse signal 2 that stops.Here, as stated, when the midpoint of the minor face of workpiece W among Fig. 2 (a) is passed through S1, send command pulse signal 2.
Moment t among Fig. 5
2Corresponding to this state.By first detector probe, 7 elastic deformations that are pressed in loaded pins 8 and abut on the electrode Wa of workpiece W, the therefore moment t in Fig. 5
1To t
2During first detector probe 7 put on the pressure of the electrode Wa of workpiece W, after detector probe 7 touches electrode Wa, also spring 11 is applied the pressure of compression direction, therefore increase gradually.Therefore, can less suppress to give the impact of electrode Wa.
As an example, when sliding time Δ t was made as 1.5ms, the length of the streak that on the electrode Wa of workpiece W, produces was 0.2mm.Promptly when the rigidity of spring 11 is constant, through the electrode Wa of adjustment workpiece W and the sliding time of first detector probe 7, the length of may command streak (can be clear) by above-mentioned method.
Also have; Here the control based on the streak length of sliding time is illustrated; But, can adjust at least one aspect in the rigidity of deflection and spring 11 of the spring 11 when loaded pins 8 is moved according to the hardness of the kind of the electrode Wa of workpiece W or the oxidation protection film thickness or first detector probe 7 or surfaceness etc.Thereby the amount of pressurization that can control the electrode Wa that gives workpiece W is a contact load.
Then, be that the control method that benchmark makes transfer station 3 begin to move describes just below with the current location of loaded pins 8.Among Fig. 5, as stated, at moment t
3In if the rotation of transfer station 3 stops, then at thereafter moment t
4In, pressurized pin 8 is pushed and first detector probe, 7 arrival of elastic deformation and the electrode Wa pressure position contacting (Y among Fig. 2) of workpiece W, and second servomotor 26 stops the rotation.Thereby loaded pins 8 stops.Under this state, carrying out the electrical specification of workpiece W measures.
As shown in Figure 5, at moment t
5In, second servomotor 26 begins rotation, and behind the open compressed spring 11, move along the direction of leaving first detector probe 7 the Y position that loaded pins 8 begins from Fig. 2.Thereby first detector probe 7 that pressurized pin 8 is pushed is recovered because of elasticity, leaves the electrode Wa (Fig. 3 (e)) of workpiece W.Meanwhile, the pressure of the electrode Wa of 7 couples of workpiece W of first detector probe reduces gradually.At moment t
6In if loaded pins 8 become the state that leaves first detector probe 7, then first detector probe 7 is left the electrode Wa (Fig. 3 (f)) of workpiece W really.This moment, first servomotor 24 began rotation, thereby transfer station 3 begins rotation (Fig. 3 (g)).Thereby first detector probe 7 can not slided on the electrode Wa of workpiece W, and the streak that produces because of slip can not take place on the electrode Wa of workpiece W.
As shown in Figure 5, until moment t
6Till, loaded pins 8 moves along the direction of leaving first detector probe 7, and transfer station 3 stops.The loaded pins 8 that is moving stops on the position of readiness (X among Fig. 2).In Fig. 5, this is used t constantly
7Represent.That is, MPU21 is at this moment t
7In in advance command signal 2 is sent to pulse oscillator controller 22; So that the rotational speed of second servomotor 26 becomes 0; Pulse oscillator controller 22 is a benchmark with command signal 2; The supervision coded signal 2 (rotation angle of representing current second servomotor 26 is the position of loaded pins 8) that built-in second scrambler receives from second servomotor 26, and the command pulse signal 2 that will be used to control the rotation of second servomotor 26 sends to second driver 25.In addition, the first built-in scrambler will represent that via first driver 23 coded signal 1 of the position of current workpiece accepting hole is sent to pulse oscillator controller 22 in first servomotor 24.
This platform is until moment t
6Till transfer station 3 stop the value representation stop position of coded signal 1.The rotational speed of coded signal 2 expressions second servomotor 26 becomes 0 moment t
7Middle stop position, the therefore moment t of the rotation of beginning transfer station 3 in Fig. 5
6The value E2 of the coded signal 2 of the position that middle expression loaded pins 8 should exist obtains through calculating in advance in pulse oscillator controller 22.Thereby; In pulse oscillator controller 22, compare coded signal 1 and coded signal 2; When the value of coded signal 2 is the value representation stop position of E2 and coded signal 1; Make transfer station 3 begin rotation, the command pulse signal 1 that when the workpiece in next workpiece accepting hole arrives the workpiece determinator, will stop via first driver 23 sends to first servomotor 24.In this embodiment, among Fig. 3 (e), when loaded pins 8 moves along the direction of leaving first detector probe 7, when its front end during across Z first servomotor 24 just begin rotation.
Second embodiment
Below by Fig. 6, describe with regard to second embodiment of the present invention.In the mode of second enforcement shown in Figure 6, detector probe and loaded pins is integrated, and in the workpiece accepting hole of transfer station, pass in and out, other structure and Fig. 1 are roughly the same to first embodiment shown in Figure 5.
Among Fig. 6,, and omit its detailed description for the identical identical symbol of part employing of first embodiment extremely shown in Figure 5 with Fig. 1.
As shown in Figure 6, become one with loaded pins 8 in fixing second detector probe of an end of loaded pins 8 13, the second detector probe 13.Loaded pins 8 is placed in the sleeve 10, an end of fixing spring 11 on the end of loaded pins 8 in sleeve 10.The other end of spring 11 is fixed on the loaded pins driving mechanism 12 that becomes one with sleeve 10.Spring 11 receives along the power of the direction of the electrode Wa that leaves workpiece W second detector probe 13.It is straight-line structure with the rotational transform of second servomotor 26 that loaded pins driving mechanism 12 has through ball screw, screw mechanism or link mechanism, and this rectilinear motion is passed to second detector probe 13 via spring 11.Thereby second detector probe 13 is near the direction (direction of the arrow C of Fig. 5) of the electrode Wa of workpiece W and leave on the direction (direction of the arrow D of Fig. 5) of the electrode Wa of workpiece W and free in and out.This platform, probe driving mechanism 12A is made up of loaded pins 8, spring 11 and the loaded pins driving mechanism 12 in the sleeve 10.
When measuring the characteristic of workpiece W, basic probe 6 contacts with the electrode Wb of workpiece W under state shown in Figure 6, and second detector probe 13 moves along the direction near the electrode Wa of workpiece W, abuts to the electrode Wa of workpiece W.Thereby, come clamping workpiece W with the basic probe 6 and second detector probe 13, and measure through not shown determinator.If finish to measure, second detector probe 13 moves along the direction of the electrode Wa that leaves workpiece W.
The rotation of the transfer station 3 in the mobile relevant control method of the rotation of transfer station 3 and second detector probe 13 and the mode that first implements and the mobile relevant control method of loaded pins 8 are roughly the same.
Also have; In above-mentioned each embodiment; A field platform that has servomotor 24,26 for transfer body drive unit 3a and loaded pins driving mechanism 12 respectively is illustrated; But transfer body drive unit 3a and loaded pins driving mechanism 12 can move transfer station or loaded pins, detector probe or link mechanism etc. through the rotation of motor, control them by the rotation angle measuring ability of motor.
Above-mentioned in addition each embodiment is purpose with the High Accuracy Control, but will hang down the control of precision under the situation such as the object workpiece is bigger the time, transfer body drive unit 3a and loaded pins driving mechanism 12 can adopt pulse motor or stepper motor.
In above-mentioned each embodiment, the situation that transfer station 3 vertically is set is illustrated, but transfer station 3 can be horizontally disposed with also tiltable setting.
And, with spring 11 elastic body that is arranged between loaded pins and the loaded pins driving mechanism is described, but have long-term between stable properties when (for example can ignore long-term plastic yield) rubber also can.
In addition just with a pair of probe 7,6 that electrode Wa, the Wb of workpiece W contact in, only the situation that moves of 1 probe 7 is illustrated, but a pair of probe 7,6 all moves and contacts with electrode Wa, the Wb of workpiece W, clamping workpiece W measures also can.
In addition transfer body is illustrated by the example that transfer station 3 constitutes, but transfer body is made up of the travelling belt of band shape and also can.
Claims (19)
1. workpiece characteristic detecting apparatus is characterized in that comprising:
Transfer body with workpiece accepting hole of a plurality of perforations is accommodated the workpiece that has towards the pair of electrodes of the perforation direction foreign side of workpiece accepting hole in each workpiece accepting hole;
Drive the transfer body drive unit of this transfer body;
Be arranged on the transfer body both sides, can abut to a pair of probe that is housed in the piece pole in the workpiece accepting hole separately;
At least make the probe driving mechanism of a relative workpiece accepting hole turnover of probe; And
Control transfer body drive unit and probe driving mechanism make a pair of probe also control device of butt that on the electrode of the workpiece of correspondence, slides,
Said control device is controlled as follows:
When the workpiece accepting hole is come first desired location of a pair of probe front; Said control device control probe driving mechanism; A probe is advanced towards the workpiece accepting hole; When the workpiece accepting hole was come second desired location corresponding with a pair of probe, said control device control probe driving mechanism made a probe retreat from the workpiece accepting hole.
2. workpiece characteristic detecting apparatus as claimed in claim 1, it is characterized in that: transfer body is made up of plectane.
3. workpiece characteristic detecting apparatus as claimed in claim 1, it is characterized in that: transfer body is made up of shoestring.
4. workpiece characteristic detecting apparatus as claimed in claim 1 is characterized in that: the transfer body drive unit comprises the servomotor with rotation angle measuring ability.
5. workpiece characteristic detecting apparatus as claimed in claim 1 is characterized in that: the transfer body drive unit has pulse motor.
6. workpiece characteristic detecting apparatus as claimed in claim 5 is characterized in that: the pulse motor of transfer body drive unit has the rotation angle measuring ability.
7. workpiece characteristic detecting apparatus as claimed in claim 1 is characterized in that: probe driving mechanism is made up of loaded pins and the loaded pins driving mechanism that drives loaded pins.
8. workpiece characteristic detecting apparatus as claimed in claim 7 is characterized in that: a probe is between loaded pins and transfer body.
9. workpiece characteristic detecting apparatus as claimed in claim 7 is characterized in that: between loaded pins and loaded pins driving mechanism, be provided with elastic body.
10. workpiece characteristic detecting apparatus as claimed in claim 9 is characterized in that: the variable rigidity of said elastic body.
11. workpiece characteristic detecting apparatus as claimed in claim 9, it is characterized in that: elastic body has spring.
12. workpiece characteristic detecting apparatus as claimed in claim 7 is characterized in that: the loaded pins driving mechanism is made up of the servomotor with rotation angle measuring ability.
13. workpiece characteristic detecting apparatus as claimed in claim 7 is characterized in that: the loaded pins driving mechanism has pulse motor.
14. workpiece characteristic detecting apparatus as claimed in claim 7 is characterized in that: the loaded pins driving mechanism is made up of the pulse motor with rotation angle measuring ability.
15. workpiece characteristic detecting apparatus as claimed in claim 1 is characterized in that: when the workpiece accepting hole was come second desired location, control device control transfer body drive unit stopped said transfer body.
16. a workpiece characteristic measurement method that adopts the described workpiece characteristic detecting apparatus of claim 1 is characterized in that comprising:
In the workpiece accepting hole of transfer body, accommodate workpiece, drive the operation of transfer body by control device control transfer body drive unit; And
By control device control probe driving mechanism a probe is advanced towards the workpiece accepting hole, a pair of probe is slided and butt on the electrode corresponding with workpiece, measure the operation of the characteristic of workpiece,
Said control device is controlled as follows:
When the workpiece accepting hole is come first desired location of a pair of probe front; Said control device control probe driving mechanism; A probe is advanced towards the workpiece accepting hole; When the workpiece accepting hole was come second desired location corresponding with a pair of probe, said control device control probe driving mechanism made a probe retreat from the workpiece accepting hole.
17. workpiece characteristic measurement method as claimed in claim 16 is characterized in that: probe driving mechanism pressurizes to a probe via elastic body.
18. workpiece characteristic measurement method as claimed in claim 17 is characterized in that: probe driving mechanism comes a probe pressurization through changing some at least in elastomeric deflection and the elastomeric rigidity.
19. workpiece characteristic measurement method as claimed in claim 16 is characterized in that: first desired location and second desired location are variable, thereby the sliding length between the pair of electrodes of decision workpiece and the corresponding probe.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008119713 | 2008-05-01 | ||
| JP2008-119713 | 2008-05-01 | ||
| JP2008119713A JP5294195B2 (en) | 2008-05-01 | 2008-05-01 | Work characteristic measuring apparatus and work characteristic measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101571565A CN101571565A (en) | 2009-11-04 |
| CN101571565B true CN101571565B (en) | 2012-08-29 |
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| CN2009101393331A Active CN101571565B (en) | 2008-05-01 | 2009-04-30 | Apparatus and method for determining workpiece property |
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| Country | Link |
|---|---|
| JP (1) | JP5294195B2 (en) |
| KR (1) | KR101024893B1 (en) |
| CN (1) | CN101571565B (en) |
| TW (1) | TWI453422B (en) |
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| JP6435535B2 (en) * | 2015-01-07 | 2018-12-12 | 株式会社 東京ウエルズ | Work characteristic measuring apparatus and work characteristic measuring method |
| JP6459882B2 (en) * | 2015-10-06 | 2019-01-30 | 株式会社村田製作所 | Energizer |
| JP6727651B2 (en) * | 2016-09-30 | 2020-07-22 | 株式会社ヒューモラボラトリー | Continuous inspection method for electrical characteristics of chip electronic components |
| JP7182951B2 (en) * | 2018-08-27 | 2022-12-05 | 株式会社日本マイクロニクス | Inspection device and inspection method |
| WO2021121670A1 (en) * | 2019-12-18 | 2021-06-24 | Advantest Corporation | Automated test equipment for testing one or more devices-under-test and method for operating an automated test equipment |
| CN114113838B (en) * | 2021-11-16 | 2025-01-17 | 国网辽宁省电力有限公司大连供电公司 | Data quality detection device and system based on electric power internet of things |
| KR102546877B1 (en) | 2022-02-21 | 2023-06-23 | 최병곤 | Rear camera protection apparatus for a vehicle and vehicle with the same |
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| US6741086B2 (en) * | 2001-06-13 | 2004-05-25 | Mitsubishi Denki Kabushiki Kaisha | Member for removing foreign matter adhering to probe tip and method of manufacturing the probe tip, method of cleaning foreign matter adhering to probe tip, probe, and probing apparatus |
| CN101151541A (en) * | 2005-03-31 | 2008-03-26 | 日本发条株式会社 | Contact probe |
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| JPS63118672A (en) * | 1986-11-06 | 1988-05-23 | Murata Mfg Co Ltd | Electric characteristic measuring instrument for chip-shaped electronic parts |
| JP3287744B2 (en) * | 1995-08-12 | 2002-06-04 | ティーディーケイ株式会社 | Method and apparatus for measuring characteristics of electronic components |
| US6054869A (en) * | 1998-03-19 | 2000-04-25 | H+W Test Products, Inc. | Bi-level test fixture for testing printed circuit boards |
| JP2003084024A (en) * | 2001-07-04 | 2003-03-19 | Murata Mfg Co Ltd | Characteristic inspecting device for electronic part |
| JP4082314B2 (en) * | 2002-09-26 | 2008-04-30 | 株式会社村田製作所 | Electronic component test method and test apparatus |
| JP4121870B2 (en) * | 2003-02-25 | 2008-07-23 | 株式会社 東京ウエルズ | Work measuring device |
| TWM255402U (en) * | 2004-04-08 | 2005-01-11 | Chao-Lia Wan | Probe needle for testing characterictics of electronic parts |
| JP4794256B2 (en) | 2005-09-27 | 2011-10-19 | 株式会社東京精密 | Prober, probe contact method and program therefor |
| JP5137336B2 (en) * | 2006-05-29 | 2013-02-06 | 株式会社日本マイクロニクス | Movable probe unit mechanism and electrical inspection device |
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| JP4863466B2 (en) | 2006-08-01 | 2012-01-25 | 日本電産リード株式会社 | Manufacturing method of substrate inspection jig |
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2008
- 2008-05-01 JP JP2008119713A patent/JP5294195B2/en active Active
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2009
- 2009-04-21 TW TW098113175A patent/TWI453422B/en active
- 2009-04-21 KR KR1020090034626A patent/KR101024893B1/en active Active
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6741086B2 (en) * | 2001-06-13 | 2004-05-25 | Mitsubishi Denki Kabushiki Kaisha | Member for removing foreign matter adhering to probe tip and method of manufacturing the probe tip, method of cleaning foreign matter adhering to probe tip, probe, and probing apparatus |
| CN101151541A (en) * | 2005-03-31 | 2008-03-26 | 日本发条株式会社 | Contact probe |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5294195B2 (en) | 2013-09-18 |
| TW201009347A (en) | 2010-03-01 |
| JP2009270858A (en) | 2009-11-19 |
| TWI453422B (en) | 2014-09-21 |
| CN101571565A (en) | 2009-11-04 |
| KR101024893B1 (en) | 2011-03-31 |
| KR20090115665A (en) | 2009-11-05 |
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