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CN101567326B - Printed circuit board and method of forming the same - Google Patents

Printed circuit board and method of forming the same Download PDF

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Publication number
CN101567326B
CN101567326B CN 200810095810 CN200810095810A CN101567326B CN 101567326 B CN101567326 B CN 101567326B CN 200810095810 CN200810095810 CN 200810095810 CN 200810095810 A CN200810095810 A CN 200810095810A CN 101567326 B CN101567326 B CN 101567326B
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carrier
electronic component
forming
thin film
circuit
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CN101567326A (en
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张荣骞
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Mutual Tek Industries Co Ltd
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Mutual Tek Industries Co Ltd
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Abstract

The embodiment of the invention discloses a printed circuit board and a forming method thereof. The method comprises providing a carrier; forming a first circuit on the carrier; depositing a film on the carrier plate; building an electronic part on the substrate by using the film and electrically connecting the electronic part with the first circuit; forming a dielectric layer to cover the electronic component in a blanket manner; and removing the carrier plate. Embodiments of the present invention help to reduce the size of the final electronic product.

Description

印刷电路板及其形成方法Printed circuit board and method of forming the same

技术领域 technical field

本发明涉及一种印刷电路板及其形成方法,尤其关于一种埋有电子零件的印刷电路板及其形成方法。The invention relates to a printed circuit board and its forming method, in particular to a printed circuit board embedded with electronic parts and its forming method.

背景技术 Background technique

印刷电路板(printed circuit board)是构成各电子零件间互连的电路图案的一种机构。图1所示为传统印刷电路板10与电子零件如集成电路20及被动元件30互连的示意图。如图所述,已知印刷电路板10与集成电路20的互连系采用表面粘装的方式,其中集成电路20是已封装而具有引脚21的电子零件,透过焊接使引脚21与印刷电路板10的线路11相接而完成互连。A printed circuit board (printed circuit board) is a mechanism that constitutes a circuit pattern interconnected between electronic components. FIG. 1 is a schematic diagram of interconnection between a traditional printed circuit board 10 and electronic components such as integrated circuits 20 and passive components 30 . As shown in the figure, it is known that the interconnection between the printed circuit board 10 and the integrated circuit 20 adopts a surface mount method, wherein the integrated circuit 20 is an electronic component that has been packaged and has pins 21, and the pins 21 and 21 are connected by soldering. The lines 11 of the printed circuit board 10 are connected to each other to complete the interconnection.

现今电子产品轻薄短小的趋势已经使得传统印刷电路板10逐渐不能符合需求。举例而言,由于电子零件装在印刷电路板10的表面上,所以印刷电路板10必需提供足够的表面积供其使用,因而使其尺寸的缩小受到限制。再者,已知装设在印刷电路板10上的集成电路20通常都是已完成封装的产品,所以其体积将比原未封装的裸芯的体积大很多,此点也同样使最终电子产品的尺寸缩小受到限制。因此,需要一种改良的结构及方法来解决已知的问题。The current trend of thin, light and small electronic products has made the traditional printed circuit board 10 gradually unable to meet the requirements. For example, since the electronic components are mounted on the surface of the printed circuit board 10, the printed circuit board 10 must provide a sufficient surface area for them to use, thereby limiting the reduction in size thereof. Furthermore, it is known that the integrated circuit 20 installed on the printed circuit board 10 is usually a packaged product, so its volume will be much larger than that of the original unpackaged bare core, which also makes the final electronic product The size reduction is limited. Therefore, there is a need for an improved structure and method to solve the known problems.

发明内容 Contents of the invention

本发明提供一种埋有电子零件的印刷电路板,其作法是在一暂时载板上利用印刷电路板工艺先形成线路,然后直接在暂时载板上建造电子零件,如二极管、晶体管及其它光电半导体等,并使此线路与此电子零件电连接。接着,利用合适的绝缘材料将此线路与此电子零件同时封装。封装完成后再将暂时载板移除。The present invention provides a printed circuit board embedded with electronic parts. The method is to form a circuit on a temporary carrier board using a printed circuit board process, and then directly build electronic parts on the temporary carrier board, such as diodes, transistors and other optoelectronic components. Semiconductors, etc., and electrically connect this circuit to this electronic part. Then, the circuit and the electronic parts are packaged together with a suitable insulating material. After the packaging is completed, the temporary carrier board is removed.

本发明至少有以下助于缩小最终电子产品的尺寸的特点:电子零件埋设在封装绝缘层中;电子零件是直接在载板上制作,其制作完成后将与线路同时封装;线路及电子零件转印到封装绝缘层后,移除暂时载板以降低厚度。The present invention has at least the following characteristics that help reduce the size of the final electronic product: the electronic parts are buried in the packaging insulating layer; After printing onto the package insulation, the temporary carrier is removed to reduce thickness.

依据一实施例,本发明提供一种印刷电路板的形成方法,包含提供一载板;形成一第一线路于载板上;沉积一薄膜于载板上;利用薄膜建造一电子零件于载板上,电子零件电连接第一线路;毯覆式地形成一介电层以包覆电子零件;去除介电层的一部分以使电子零件的一上表面露出;形成一第二线路于介电层上,第二线路电连接电子零件;形成一绝缘层以覆盖第二线路及介电层;及移除载板。According to an embodiment, the present invention provides a method for forming a printed circuit board, including providing a carrier board; forming a first circuit on the carrier board; depositing a film on the carrier board; using the film to construct an electronic component on the carrier board On the top, the electronic parts are electrically connected to the first circuit; a dielectric layer is blanket-formed to cover the electronic parts; a part of the dielectric layer is removed to expose an upper surface of the electronic parts; a second circuit is formed on the dielectric layer On, the second circuit is electrically connected with electronic components; an insulating layer is formed to cover the second circuit and the dielectric layer; and the carrier board is removed.

依据另一实施例,本发明提供一种印刷电路板的形成方法,包含提供一载板;形成一第一线路于载板上;建造一电子零件于载板上,电子零件电连接第一线路;毯覆式地形成一介电层以包覆电子零件;去除介电层的一部分以使电子零件的一上表面露出;形成一第二线路于介电层上,第二线路电连接电子零件;形成一绝缘层以覆盖该第二线路及该介电层;及移除该载板。According to another embodiment, the present invention provides a method for forming a printed circuit board, including providing a carrier board; forming a first circuit on the carrier board; building an electronic component on the carrier board, and the electronic component is electrically connected to the first circuit ; Blanket-type formation of a dielectric layer to cover the electronic components; removing a part of the dielectric layer to expose an upper surface of the electronic components; forming a second circuit on the dielectric layer, the second circuit electrically connected to the electronic components ; forming an insulating layer to cover the second circuit and the dielectric layer; and removing the carrier.

附图说明 Description of drawings

图1显示已知的印刷电路板与电子零件互连的示意图。FIG. 1 shows a schematic diagram of a known interconnection of a printed circuit board and electronic components.

图2A至2I为本发明第一实施例的埋有电子零件的印刷电路板的制作过程示意图。2A to 2I are schematic diagrams of the manufacturing process of the printed circuit board embedded with electronic components according to the first embodiment of the present invention.

图3A至3D为本发明第二实施例的埋有电子零件的印刷电路板的制作过程示意图。3A to 3D are schematic diagrams of the manufacturing process of the printed circuit board embedded with electronic components according to the second embodiment of the present invention.

图4A至4C为本发明第三实施例的埋有电子零件的印刷电路板的制作过程示意图。4A to 4C are schematic diagrams of the manufacturing process of the printed circuit board embedded with electronic components according to the third embodiment of the present invention.

附图标记说明Explanation of reference signs

10        印刷电路板10 printed circuit board

11        线路11 Lines

20        集成电路20 integrated circuits

21        引脚21 pins

30        被动元件30 passive components

200       载板200 carrier board

201       第一线路201 First Line

202       薄膜202 film

202a      一端202a One end

203        发光结构层203 Luminous structure layer

203a       上表面203a upper surface

204        第一电性半导体层204 The first electrical semiconductor layer

205        发光层205 luminous layer

206        第二电性半导体层206 Second electrical semiconductor layer

210        介电层210 Dielectric layer

220        第二线路220 Second Line

230        绝缘层230 insulation layer

300        载板300 carrier board

301        第一线路301 First Line

302        薄膜302 film

302a       一端302a One end

303        晶体管结构303 Transistor structure

303a       上表面303a upper surface

304        源极304 source

305        漏极305 drain

306        栅极绝缘层306 Gate insulating layer

307        栅极307 grid

310        介电层310 Dielectric layer

320        第二线路320 Second Line

330        色缘层330 color edge layer

400        载板400 carrier board

401        第一线路401 first line

403        电致发光体结构403 Electroluminescent structure

403a       上表面403a upper surface

404        电子注入层404 electron injection layer

405        电子传导层405 Electronic conducting layer

406        电致发光层406 electroluminescent layer

407        空穴传输层407 hole transport layer

408        空穴注入层408 hole injection layer

410        介电层410 Dielectric layer

420        第二线路420 Second Line

430        绝缘层430 insulation layer

具体实施方式 Detailed ways

以下将参考所附图示示范本发明的优选实施例。所附图示中相似元件采用相同的元件符号。应注意为清楚呈现本发明,所附图示中的各元件并非按照实物的比例绘制,而且为避免模糊本发明的内容,以下说明亦省略已知的零组件、相关材料、及其相关处理技术。A preferred embodiment of the invention will be exemplified below with reference to the accompanying drawings. Similar elements in the attached figures are provided with the same reference numerals. It should be noted that in order to clearly present the present invention, the components in the accompanying illustrations are not drawn according to the scale of the actual object, and in order to avoid obscuring the content of the present invention, the following description also omits known components, related materials, and related processing techniques .

图2A至2I为本发明的第一实施例,例示具有埋入式发光二极管的印刷电路板的制作流程。参考图2A,提供一载板200并形成一第一线路201于载板200上。载板200可为任何合适的基板,尤以导电金属基板为佳,例如铜箔基板或不锈钢的薄合金板。第一线路201的形成可利用已知印刷电路板工艺。举例而言,可在载板200上涂布干膜;然后将干膜图案化以露出底下的载板200的表面;接着以干膜为掩模电镀导体材料如铜镍等于露出的载板200的表面上;然后再将干膜剥除即可形成第一线路201。2A to 2I are the first embodiment of the present invention, illustrating the fabrication process of a printed circuit board with embedded LEDs. Referring to FIG. 2A , a carrier board 200 is provided and a first circuit 201 is formed on the carrier board 200 . The carrier 200 can be any suitable substrate, especially a conductive metal substrate, such as a copper foil substrate or a thin stainless steel alloy plate. The formation of the first circuit 201 can utilize a known printed circuit board process. For example, a dry film can be coated on the carrier 200; then the dry film can be patterned to expose the surface of the underlying carrier 200; then the dry film can be used as a mask to plate a conductive material such as copper nickel equal to the exposed carrier 200 on the surface; then peel off the dry film to form the first circuit 201 .

参考图2B,沉积一薄膜202于载板200上。优选而言,薄膜202直接形成在载板200的表面上,薄膜202具有一端202a连接第一线路201。薄膜202为后续所要形成的发光二极管的生长基底。以生长发光二极管外延层为例,薄膜202的材料可为砷化镓(GaAs)、磷化铟(InP)、磷化镓(GaP)、蓝宝石(sapphire)、碳化硅(SiC)等。薄膜202可具有图案化外形。薄膜202的形成可采用合适的薄膜沉积与掩模技术,例如已知的溅镀、气相沉积或网板印刷等工艺。Referring to FIG. 2B , a thin film 202 is deposited on the carrier 200 . Preferably, the film 202 is directly formed on the surface of the carrier 200 , and the film 202 has an end 202 a connected to the first circuit 201 . The thin film 202 is the growth substrate of the LED to be formed later. Taking growing the epitaxial layer of a light-emitting diode as an example, the material of the thin film 202 can be gallium arsenide (GaAs), indium phosphide (InP), gallium phosphide (GaP), sapphire, silicon carbide (SiC), etc. Film 202 may have a patterned topography. The thin film 202 can be formed by suitable thin film deposition and masking techniques, such as known sputtering, vapor deposition or screen printing techniques.

参考图2C,以薄膜202为基底,利用已知的外延技术及半导体沉积技术形成发光结构层203于载板200上。发光结构层203可包含数个外延层如一第一电性半导体层204、发光层205及一第二电性半导体层206。举例而言,第一电性半导体层204可为n型(AlxGa1-x)0.5In0.5P外延层;发光层205包为未经掺杂的(AlxGa1-x)0.5In0.5P外延层,且第二电性半导体层206可为p型(AlxGa1-x)0.5In0.5P外延层。可控制薄膜202、第一电性半导体层204与第一线路201的相对厚度,以使第一电性半导体层204电性连接第一线路201。应注意,发光层205及一第二电性半导体层206不能接触到第一线路201,否则将使发光结构层203失去功能。除了上述的各外延层外,发光结构层203还可包含其它功能性的结构,例如欧姆接触层、阻障层、及反射层等等。Referring to FIG. 2C , the film 202 is used as the base, and the light-emitting structure layer 203 is formed on the carrier 200 by known epitaxial technology and semiconductor deposition technology. The light emitting structure layer 203 may include several epitaxial layers such as a first electrical type semiconductor layer 204 , a light emitting layer 205 and a second electrical type semiconductor layer 206 . For example, the first electrical semiconductor layer 204 can be an n-type (Al x Ga 1-x ) 0.5 In 0.5 P epitaxial layer; the light emitting layer 205 is made of undoped (Al x Ga 1-x ) 0.5 In 0.5 P epitaxial layer, and the second electrical semiconductor layer 206 can be a p-type (Al x Ga 1-x ) 0.5 In 0.5 P epitaxial layer. The relative thicknesses of the thin film 202 , the first electrical semiconductor layer 204 and the first circuit 201 can be controlled, so that the first electrical semiconductor layer 204 is electrically connected to the first circuit 201 . It should be noted that the light emitting layer 205 and a second electrical type semiconductor layer 206 cannot contact the first circuit 201 , otherwise the light emitting structure layer 203 will lose its function. In addition to the aforementioned epitaxial layers, the light emitting structure layer 203 may also include other functional structures, such as an ohmic contact layer, a barrier layer, and a reflective layer.

参考图2D,毯覆式地形成一介电层210包覆发光结构层203及第一线路201。介电层210优选则可选自旋涂玻璃、硅树脂、环氧树脂(Epoxy)、聚亚酰胺(polyimide)、或过氟环丁烷(prefluorocyclobutane,PFCB)等。可利用已知的精密涂布工艺完成此步骤。应注意在执行此步骤之前,发光结构层203未经封装。Referring to FIG. 2D , a dielectric layer 210 is blanket formed to cover the light emitting structure layer 203 and the first circuit 201 . The dielectric layer 210 is preferably selected from spin-on-glass, silicone resin, epoxy resin (Epoxy), polyimide (polyimide), or prefluorocyclobutane (prefluorocyclobutane, PFCB) and the like. This step can be accomplished using known precision coating techniques. It should be noted that the light emitting structure layer 203 is not encapsulated before performing this step.

参考图2E,以合适化学机械抛光技术去除介电层210的一部分,使发光结构层203的一上表面203a露出。接着,参考图2F,形成一第二线路220于介电层210上,并经由适当地控制使第二线路220电连接发光结构层203。举例而言,可先形成图案化的干膜于介电层210及发光结构层203的上表面203a上;然后以此图案化干膜作为掩模,利用溅镀技术注入导电材料晶种;接着,透过此品种执行电镀工艺以形成第二线路220于介电层210的表面上,此第二线路220并同时接触发光结构层203的上表面203a以达成电连接。除此以外,也可使用网板印刷工艺,将导体材料如铜膏银膏等印制于介电层210上以形成第二线路220。Referring to FIG. 2E , a part of the dielectric layer 210 is removed by a suitable chemical mechanical polishing technique, so that an upper surface 203 a of the light emitting structure layer 203 is exposed. Next, referring to FIG. 2F , a second circuit 220 is formed on the dielectric layer 210 , and the second circuit 220 is electrically connected to the light emitting structure layer 203 through proper control. For example, a patterned dry film can be first formed on the dielectric layer 210 and the upper surface 203a of the light-emitting structure layer 203; then the patterned dry film can be used as a mask to inject conductive material seeds by sputtering technology; then , through this type of electroplating process to form the second circuit 220 on the surface of the dielectric layer 210, and the second circuit 220 contacts the upper surface 203a of the light emitting structure layer 203 at the same time to achieve electrical connection. In addition, a screen printing process can also be used to print conductive materials such as copper paste and silver paste on the dielectric layer 210 to form the second circuit 220 .

接着,参考图2G,毯覆式地形成一绝缘层230以连结第二线路220、发光结构层203及介电层210。绝缘层230的材料可为聚酯类、聚亚酰胺(polyimide)类,其中可含合适的有机补强材料。可以涂布的方式形成绝缘层230,或将上述材料压合成片再粘贴至第二线路220及发光结构层203的表面上。可适当地调整绝缘层230的厚度及强度,使其足以作为上述的各元件的支撑层,如此即可将载板200移除,形成如图2H所示的结构。载板200的移除可用已知的蚀刻技术。Next, referring to FIG. 2G , an insulating layer 230 is blanket formed to connect the second circuit 220 , the light emitting structure layer 203 and the dielectric layer 210 . The material of the insulating layer 230 may be polyester or polyimide, which may contain suitable organic reinforcing materials. The insulating layer 230 can be formed by coating, or the above materials can be pressed into a sheet and pasted on the surface of the second circuit 220 and the light emitting structure layer 203 . The thickness and strength of the insulating layer 230 can be appropriately adjusted so that it is sufficient to serve as a supporting layer for the above-mentioned components, so that the carrier 200 can be removed to form the structure shown in FIG. 2H . The carrier 200 can be removed using known etching techniques.

图2I显示继图2H之后的选择性步骤。如图所示,可利用蚀刻将薄膜202移除,因薄膜202可能是吸光材料,故将其移除可增加发光二极管的亮度。此外,如图所示,可视需要适当地研磨绝缘层230而使第二线路220露出。Figure 2I shows an optional step following Figure 2H. As shown in the figure, the thin film 202 can be removed by etching. Since the thin film 202 may be a light absorbing material, removing it can increase the brightness of the LED. In addition, as shown in the figure, the insulating layer 230 may be properly ground to expose the second circuit 220 as required.

经由上述应可了解,本发明并非直接将已制作完成的电子零件(例如是一般已经完成封装的电子零件)整体地粘装于载板上。本发明是提供一种整合印刷电路板工艺与半导体工艺或其它电子零件工艺的方法。简言之,本发明是先利用印刷电路板工艺形成一道外接线路于载板上,然后直接在载板上利用半导体工艺或其它电子零件工艺逐步建立电子零件的主要结构;之后再利用印刷电路板工艺形成另一道外接线路与电子零件电连接。本发明第一实施例的电子零件以发光二极管作示范,然应了解除了发光二极管,第一实施例所揭示的方法也适用于其他二极管,如PN接合二极管、光电二极管(photodiode)、及激光二极管。It should be understood from the above that the present invention does not directly glue the completed electronic components (such as generally packaged electronic components) onto the carrier board as a whole. The present invention provides a method for integrating printed circuit board technology with semiconductor technology or other electronic parts technology. In short, the present invention uses the printed circuit board technology to form an external circuit on the carrier board, and then directly uses the semiconductor technology or other electronic parts technology to gradually build the main structure of the electronic parts on the carrier board; and then uses the printed circuit board The process forms another external connection circuit to be electrically connected with the electronic parts. The electronic components of the first embodiment of the present invention are demonstrated with light-emitting diodes, but it should be understood that in addition to light-emitting diodes, the method disclosed in the first embodiment is also applicable to other diodes, such as PN junction diodes, photodiodes, and laser diodes .

图3A至3D例示本发明的第二实施例。第二实施例与第一实施例的差别在于其所埋入的电子零件为一晶体管。详言之,如图3A所示,提供一载板300并形成一第一线路301于载板300上。接着参考图3B,沉积一薄膜302于载板300上。优选而言,薄膜302直接形成在载板300的表面上,薄膜302具有一端302a连接第一线路301。薄膜302为后续所要形成的半导体晶体管的成长基底。以此为例,薄膜302的材料可为硅(Si)、砷化镓(GaAs)、磷化铟(InP)、磷化镓(GaP)、蓝宝石(sapphire)、碳化硅(SiC)等。薄膜302的形成可采用合适的已知技术,例如溅镀、气相沉积或网板印刷等工艺。3A to 3D illustrate a second embodiment of the present invention. The difference between the second embodiment and the first embodiment is that the embedded electronic component is a transistor. Specifically, as shown in FIG. 3A , a carrier board 300 is provided and a first circuit 301 is formed on the carrier board 300 . Referring next to FIG. 3B , a thin film 302 is deposited on the carrier 300 . Preferably, the film 302 is directly formed on the surface of the carrier 300 , and the film 302 has an end 302 a connected to the first circuit 301 . The thin film 302 is the growth substrate of the semiconductor transistor to be formed later. Taking this as an example, the material of the thin film 302 may be silicon (Si), gallium arsenide (GaAs), indium phosphide (InP), gallium phosphide (GaP), sapphire, silicon carbide (SiC) and the like. The thin film 302 can be formed by suitable known techniques, such as sputtering, vapor deposition, or screen printing.

参考图3C,以薄膜302为基底,利用已知的半导体技术及合适的半导体材料形成晶体管结构303。晶体管结构303包含源极304、漏极305、栅极绝缘层306及栅极307,其中源极304及漏极305分别连接第一线路301。图3C之后续步骤则与第一实施例类似。如图3D所示,毯覆式地形成一介电层310以包覆倒装片体管结构303及第一线路301,应注意在执行此步骤之前,晶体管结构303未经封装。然后,以合适化学机械抛光技术去除介电层310的一部分,使晶体管结构303的一上表面303a露出。接着,形成一第二线路320于介电层310上,并经由适当地控制使第二线路320电连接晶体管结构303。接着,毯覆式地形成一绝缘层330以连结第二线路320、晶体管结构303及介电层310。可适当地调整绝缘层330的厚度及强度,使其足以作为上述的各元件的支撑层,最后再将载板300移除。Referring to FIG. 3C , a transistor structure 303 is formed using known semiconductor technology and suitable semiconductor materials using the thin film 302 as a substrate. The transistor structure 303 includes a source 304 , a drain 305 , a gate insulating layer 306 and a gate 307 , wherein the source 304 and the drain 305 are respectively connected to the first circuit 301 . Subsequent steps in FIG. 3C are similar to the first embodiment. As shown in FIG. 3D , a dielectric layer 310 is blanket formed to cover the flip-chip transistor structure 303 and the first circuit 301 . It should be noted that the transistor structure 303 is not encapsulated before performing this step. Then, a part of the dielectric layer 310 is removed by a suitable chemical mechanical polishing technique, so that an upper surface 303 a of the transistor structure 303 is exposed. Next, a second circuit 320 is formed on the dielectric layer 310 , and the second circuit 320 is electrically connected to the transistor structure 303 through proper control. Next, an insulating layer 330 is blanket formed to connect the second circuit 320 , the transistor structure 303 and the dielectric layer 310 . The thickness and strength of the insulating layer 330 can be properly adjusted so that it is sufficient to serve as a supporting layer for the above-mentioned components, and finally the carrier 300 is removed.

本发明第二实施例的电子零件以MOS晶体管作示范,然应了解MOS晶体管以外的其他晶体管如双极性晶体管、CMOS晶体管等也适用于本发明。The electronic components of the second embodiment of the present invention are exemplified by MOS transistors, but it should be understood that other transistors such as bipolar transistors and CMOS transistors are also applicable to the present invention.

图4A至4C例示本发明的第三实施例。第三实施例与前述两个实施例的差别在于其电子零件的制作方法不含形成薄膜202及302等作为生长基底的步骤。换言之,制作本发明的埋入式电子零件也可用非高温的工艺,例如真空蒸镀法、旋转涂布法或印刷工艺(Printing Process),网印(Screen Printing)、喷墨印(Inkjet Printing)及接触印刷(Contact Printing)等等。第三实施例的电子零件即以电致发光体(Electroluminescence)为例。详言之,如图4A所示,提供一载板400并形成一第一线路401于载板400上。接着参考图4B,利用上述的蒸镀、涂布或印刷技术合并适当的掩模技术形成电致发光体结构403。电致发光体结构403包含电子注入层404、电子传导层405、电致发光层406、空穴传输层407、及空穴注入层408。电子注入层404的材料可为掺杂碱性金属的有机材料;电子传导层405可为恶二唑(Oxadiazole)、三唑(Triazoles)、或邻二氮杂菲(Phenanthroline);电致发光层406可为含各种荧光色素的高分子;空穴传输层407可为烯丙基胺类化合物;空穴注入层408可为掺杂路易士酸的有机材料。图4B之后续步骤则与第一实施例及第二实施例类似。如图4C所示,毯覆式地形成一介电层410以包覆电电致发光体结构403及第一线路401,应注意在执行此步骤之前,电致发光体结构403未经封装。然后,以合适化学机械抛光技术去除介电层410的一部分,使电致发光体结构403的一上表面403a露出。接着,形成一第二线路420于介电层410上,并经由适当地控制使第二线路420电连接电致发光体结构403。接着,毯覆式地形成一绝缘层430连结第二线路420、电致发光体结构403及介电层410。可适当地调整绝缘层430的厚度,使其足以作为上述的各元件的支撑层,最后再将载板400移除。4A to 4C illustrate a third embodiment of the present invention. The difference between the third embodiment and the previous two embodiments is that the manufacturing method of the electronic components does not include the step of forming thin films 202 and 302 as growth substrates. In other words, non-high-temperature processes can also be used to make the embedded electronic parts of the present invention, such as vacuum evaporation, spin coating or printing process (Printing Process), screen printing (Screen Printing), inkjet printing (Inkjet Printing) And contact printing (Contact Printing) and so on. The electronic component of the third embodiment takes electroluminescence as an example. Specifically, as shown in FIG. 4A , a carrier board 400 is provided and a first circuit 401 is formed on the carrier board 400 . Referring next to FIG. 4B , the electroluminescent body structure 403 is formed using the above-mentioned evaporation, coating or printing techniques combined with appropriate masking techniques. The electroluminescent structure 403 includes an electron injection layer 404 , an electron conducting layer 405 , an electroluminescent layer 406 , a hole transport layer 407 , and a hole injection layer 408 . The material of the electron injection layer 404 can be an organic material doped with an alkaline metal; the electron conduction layer 405 can be an oxadiazole (Oxadiazole), a triazole (Triazoles), or a phenanthroline (Phenanthroline); an electroluminescent layer 406 can be a polymer containing various fluorescent pigments; the hole transport layer 407 can be an allylamine compound; the hole injection layer 408 can be an organic material doped with Lewis acid. Subsequent steps in FIG. 4B are similar to those in the first and second embodiments. As shown in FIG. 4C , a dielectric layer 410 is blanket formed to cover the electroluminescent structure 403 and the first circuit 401 . It should be noted that the electroluminescent structure 403 is not encapsulated before performing this step. Then, a part of the dielectric layer 410 is removed by a suitable chemical mechanical polishing technique, so that an upper surface 403 a of the electroluminescent structure 403 is exposed. Next, a second circuit 420 is formed on the dielectric layer 410 , and the second circuit 420 is electrically connected to the electroluminescent structure 403 through proper control. Next, an insulating layer 430 is blanket formed to connect the second circuit 420 , the electroluminescent structure 403 and the dielectric layer 410 . The thickness of the insulating layer 430 can be properly adjusted so that it is sufficient to serve as a supporting layer for the above components, and finally the carrier 400 is removed.

本发明的前述各实施例的电子零件以发光二极管、晶体管、电致发光体作示范,然应了解除了这些电子零件外,其它适合上述工艺的电子零件,例如光纤传导零件也在本发明的范围中。The electronic parts of the foregoing embodiments of the present invention are demonstrated with light-emitting diodes, transistors, and electroluminescent bodies. However, it should be understood that in addition to these electronic parts, other electronic parts suitable for the above-mentioned process, such as optical fiber conductive parts, are also within the scope of the present invention. middle.

以上所述仅为本发明的优选实施例而已,并非用以限定本发明的权利要求;凡其它未脱离本发明所揭示的精神下所完成的等效改变或修饰,均应包含在下述的申请厚度专利范围内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the claims of the present invention; all other equivalent changes or modifications that do not deviate from the spirit disclosed in the present invention should be included in the following applications Thickness patent range.

Claims (8)

1.一种印刷电路板的形成方法,包含: 1. A method for forming a printed circuit board, comprising: 提供一载板; providing a carrier board; 形成一第一线路于该载板上; forming a first circuit on the carrier; 沉积一薄膜于该载板上; depositing a thin film on the carrier; 利用该薄膜建造一电子零件于该载板上,该电子零件电连接该第一线路,其中该利用该薄膜建造该电子零件于该载板上的步骤包含以该薄膜为基底生长一外延结构于该薄膜上; Using the thin film to build an electronic component on the carrier, the electronic component is electrically connected to the first circuit, wherein the step of using the thin film to build the electronic component on the carrier includes growing an epitaxial structure on the base of the thin film on the film; 毯覆式地形成一介电层以包覆该电子零件; blanket forming a dielectric layer to enclose the electronic component; 去除该介电层的一部分以使该电子零件的一上表面露出; removing a portion of the dielectric layer to expose an upper surface of the electronic component; 形成一第二线路于该介电层上,该第二线路电连接该电子零件; forming a second circuit on the dielectric layer, the second circuit is electrically connected to the electronic component; 形成一绝缘层覆盖该第二线路及该介电层;及 forming an insulating layer covering the second line and the dielectric layer; and 移除该载板, remove the carrier board, 其中该方法不包含直接将该电子零件整体地粘装于该载板上, Wherein the method does not include directly adhering the electronic component integrally to the carrier, 其中在毯覆式地形成该介电层以包覆该电子零件的该步骤之前,该电子零件未经封装。 Wherein before the step of blanket forming the dielectric layer to cover the electronic component, the electronic component is not encapsulated. 2.如权利要求1所述的方法,其中该载板为一金属基板,且形成该第一线路的步骤利用电镀。 2. The method of claim 1, wherein the carrier is a metal substrate, and the step of forming the first circuit utilizes electroplating. 3.如权利要求1述的方法,其中该薄膜的材料选自以下项目所组成的组:硅、砷化镓、磷化铟、磷化镓、蓝宝石、及碳化硅。 3. The method of claim 1, wherein the material of the thin film is selected from the group consisting of silicon, gallium arsenide, indium phosphide, gallium phosphide, sapphire, and silicon carbide. 4.如权利要求1所述的方法,其中该沉积该薄膜于该载板的步骤利用溅镀、化学气相沉积或网板印刷。 4. The method of claim 1, wherein the step of depositing the thin film on the carrier utilizes sputtering, chemical vapor deposition or screen printing. 5.如权利要求1所述的方法,其中该电子零件为一二极管。 5. The method of claim 1, wherein the electronic component is a diode. 6.如权利要求5所述的方法,其中该二极管包含PN结二极管、光电二极管、发光二极管、及激光二极管。 6. The method of claim 5, wherein the diode comprises a PN junction diode, a photodiode, a light emitting diode, and a laser diode. 7.如权利要求1所述的方法,其中该利用该薄膜建造该电子零件于该载板上的步骤包含以该薄膜为基底利用一半导体工艺形成一晶体管结构于该载板上。 7. The method as claimed in claim 1, wherein the step of using the thin film to construct the electronic component on the carrier comprises forming a transistor structure on the carrier using the thin film as a base by using a semiconductor process. 8.一种印刷电路板,该印刷电路板以如权利要求1所述的方法制成。  8. A printed circuit board manufactured by the method of claim 1. the
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US5497033A (en) * 1993-02-08 1996-03-05 Martin Marietta Corporation Embedded substrate for integrated circuit modules
CN1477688A (en) * 2002-07-31 2004-02-25 印芬龙科技股份有限公司 Semiconductor module and method of manufacturing semiconductor module
CN101102649A (en) * 2006-07-06 2008-01-09 三星电机株式会社 Buried pattern substrate and manufacturing method thereof

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US4635356A (en) * 1984-12-28 1987-01-13 Kabushiki Kaisha Toshiba Method of manufacturing a circuit module
US5497033A (en) * 1993-02-08 1996-03-05 Martin Marietta Corporation Embedded substrate for integrated circuit modules
CN1477688A (en) * 2002-07-31 2004-02-25 印芬龙科技股份有限公司 Semiconductor module and method of manufacturing semiconductor module
CN101102649A (en) * 2006-07-06 2008-01-09 三星电机株式会社 Buried pattern substrate and manufacturing method thereof

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