CN101566430A - Ultrasonic spray tunnel furnace and method used for preparing large-area tin dioxide transparent conductive film - Google Patents

Abstract

The invention discloses an ultrasonic spray tunnel furnace and a method for preparing a large-area tin dioxide transparent conductive film. The ultrasonic spray tunnel furnace includes three areas: the heating area, the working area, and the annealing and holding area. The nozzle is set above the substrate material in the working area, and the ultrasonic fogger is connected to the nozzle. There are 5 to 30 mist inlets at the upper end of the nozzle. The gas pipeline and the nozzle are provided with a waste gas discharge channel on the side close to the exit of the tunnel furnace, and a 5-30 waste gas discharge pipeline is arranged above the waste gas discharge channel, and the waste gas discharge pipeline is connected with the air pump. The invention can make the mist spray out evenly in the nozzle and form a film evenly; it can reduce the temperature in the nozzle and reduce the generation of large-particle mist film; it can help exhaust gas and prepare a uniform and smooth film and can reduce HCl Corrosion to the mesh belt; its lifting device helps to adjust the distance between the nozzle and the substrate surface to obtain the best deposition parameters. Adopt mesh belt transmission, simple structure, suitable for industrial assembly line production.

Description

Ultrasonic spray tunnel furnace and method for preparing large-area tin dioxide transparent conductive film

technical field

The invention relates to an ultrasonic spray tunnel furnace and a method for preparing a large-area tin dioxide transparent conductive film. The tin dioxide transparent conductive film is used for transparent electrodes of solar cells. The invention belongs to the field of material plating.

Background technique

Chinese patent application number 02150786.4 discloses a scanning device for spraying and depositing a large area of uniform transparent conductive film. The substrate is placed on the substrate tray, heated by the substrate tray, and the nozzle is used for scanning and spraying during deposition. Chinese patent 200520025374.5 discloses equipment for preparing nano-oxide transparent conductive films by ultrasonic rapid deposition. The method is to place the substrate on a red copper plate heating furnace, and realize the deposition of the entire substrate through the overall movement of the heating furnace and the substrate. . The principles of these two methods are similar, but if used in industrial assembly line production, its structure is more complicated. Higher cost; Chinese Patent Application No. 200510013358.9 discloses a special nozzle for preparing transparent conductive film by ultrasonic rapid deposition method, wherein the nozzle is wedge-shaped, the upper part of the nozzle is designed with a slope and the mist enters the nozzle in three ways. Chinese patent application number 200620028079.X discloses a special nozzle for preparing transparent conductive film by ultrasonic spray method, in which the mist enters the air intake pipe from the air inlet, and the slit width of this nozzle is 1.5mm, and the deposition speed of the film is relatively slow . There is also no cooling water layer and insulation layer, which causes the temperature in the nozzle to be high, resulting in the generation of large particle fog films. Chinese patent application No. 02150785.6 discloses a nozzle with a large area of uniform transparent conductive film, and its internal pressure is difficult to control, which is easy to cause uneven film formation.

Contents of the invention

The object of the present invention is to provide an ultrasonic spray tunnel furnace and a method for preparing a large-area tin dioxide conductive film. In order to achieve uniform film formation and obtain the best deposition parameters; it can reduce the nozzle temperature, make the particles formed on the surface of the substrate material smaller, and reduce the generation of large particle fog films; it is helpful for exhaust gas discharge, simple structure, low cost, and energy saving. Suitable for industrial assembly line production and other purposes.

The technical scheme of the present invention includes three areas: heating area, working area, and annealing heat preservation area, a nozzle arranged above the substrate material in the working area, and an ultrasonic fogger connected to the nozzle, which is characterized in that the upper end of the nozzle is provided with There are 5-30 mist gas inlet pipes, and a waste gas discharge channel is provided on the side of the nozzle close to the exit of the tunnel furnace, and 5-30 waste gas discharge pipes are arranged above the waste gas discharge channel, and the waste gas discharge pipe is connected to the air pump.

Rollers are installed in the tunnel furnace, and a conveying mesh belt for conveying substrate materials is arranged on the rollers.

The nozzle is wedge-shaped, and the outlet at the lower end is provided with a smaller opening than the upper end.

A nozzle insulation layer is arranged outside the nozzle, and a nozzle water cooling layer is arranged around the nozzle.

Each mist gas inlet pipe and waste gas discharge pipe are connected with a flow meter.

The nozzle is equipped with a lifting device to control the distance from the surface of the substrate material.

The method that the ultrasonic spray tunnel furnace is used to prepare a large-area tin dioxide transparent conductive film is characterized in that: comprising the following steps:

(1) according to prior art preparation F/Sn molar percentage is the solution of 1%～10%; Pack into the ultrasonic fogger that is connected with nozzle and fog;

(2) The substrate material is carried by the conveyor belt into the tunnel furnace and heated in the heating zone;

(3) The substrate material is transported into the working area by the conveyor network, and the temperature is kept constant at 300°C to 500°C. The nozzle sprays the fogged mist evenly on the substrate material to form a tin dioxide transparent conductive film, and the exhaust gas after the reaction It is drawn out from the exhaust gas discharge pipe by the air pump;

(4) The substrate material is sent to the annealing and heat preservation zone by the conveyor belt for annealing and cooling.

Advantages of the present invention: (1) Several mist gas inlet pipes and waste gas discharge pipes are arranged on the nozzle, which cooperate with the flow meter and the nozzle with a closed design, so that the mist can be evenly mixed in the nozzle, and the mist can be mixed evenly along the nozzle. Spray evenly in the seam direction to make the film formation uniform. (2) The nozzle is equipped with a cooling water layer and an insulation layer, which can reduce the temperature inside the nozzle. Due to a certain temperature in the nozzle, the mist has already started to decompose and react in the nozzle, forming particles in the air, and then reaching the surface of the substrate material to continue film formation. The temperature in the nozzle is lowered, so that the particles that reach the surface of the substrate material and form a film are smaller, reducing the generation of large particles of fog. (3) The nozzle is equipped with an exhaust gas exhaust pipe and an air pump, which can form a one-way airflow in the nozzle, which is helpful for the exhaust gas to be discharged and to prepare a uniform and smooth film and reduce the corrosion of HCl to the mesh belt; (4) With a lifting device, it is helpful to adjust the distance between the nozzle and the substrate surface to obtain the best deposition parameters. (5) The ultrasonic spray tunnel furnace is conveyed by a mesh belt with a simple structure and is suitable for industrial assembly line production.

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of an ultrasonic spray tunnel furnace;

Figure 2 is a side view of the nozzle;

Figure 3 is a top view of the nozzle.

In the figure, 1 is the insulation layer of the tunnel furnace, 2 is the conveyor belt, 3 is the heating zone, 4 is the working zone, 5 is the annealing and heat preservation zone, 6 is the substrate material, 7 is the heating tube, 8 is the roller, and 9 is the nozzle insulation layer, 10 is the nozzle water cooling layer, 11 is the mist gas inlet pipe, 12 is the waste gas discharge pipe, 13 is the waste gas discharge channel, 14 is the flow meter, 15 is the ultrasonic fogger, 16 is the reaction solution, 17 is the air pump, 18 It is the cooling water inlet pipe, and 19 is the cooling water outlet pipe.

Detailed ways

Embodiment 1: Ultrasonic spray tunnel furnace

With reference to the accompanying drawings: an insulation layer 1 is provided outside the tunnel furnace, and the tunnel furnace includes a heating zone 3, a working zone 4 and an annealing and heat preservation zone 5. The nozzles provided in the working area 4 are connected to an ultrasonic fogger 15 . A heating pipe 7 is arranged in the spray tunnel furnace, and a roller 8 is installed in the furnace, and a conveying mesh belt 2 is installed on the roller 8, and the substrate material 6 is placed on the conveying mesh belt 2 for transmission. The substrate material 6 is heated in the heating zone 3 , deposited in the working zone 4 , and annealed and cooled in the annealing and holding zone 5 . The temperature rise, working area temperature and annealing holding area temperature are all monitored by computer.

A nozzle insulation layer 9 is arranged outside the nozzle, and a nozzle water cooling layer 10 is arranged around the nozzle. The nozzle water cooling layer is connected with the cooling water inlet pipe 18 and discharged from the cooling water outlet pipe 19 . The mist gas inlet pipes 11 are lined up at the upper end of the nozzle, and each mist gas inlet pipe 11 is provided with a flow meter 14 . The exhaust gas discharge pipe 13 is on the nozzle side near the exit of the tunnel furnace. The waste gas exhaust pipe 12 is at the upper end of the waste gas exhaust passage 13 , and one waste gas discharge pipe 12 corresponds to one mist gas inlet pipe 11 . Each exhaust gas discharge pipe 12 is connected with a suction pump 17 . When depositing, turn on the ultrasonic fogger 15 for fogging, and then turn on the air compressor to allow the carrier gas to carry the mist into the nozzle. Adjust the flowmeter 14 on each exhaust gas discharge pipe 12, make all the mist flow that enters from each mist gas inlet pipe 11 equal to the waste gas flow that is discharged from each waste gas discharge pipe 12, form in the nozzle 11 to the nozzle, and then spray evenly on the surface of the substrate material 6, and then discharge the unidirectional airflow from the exhaust gas discharge pipe 12.

Example 2:

The method for preparing large-area transparent conductive film by ultrasonic spray method comprises the following steps:

(1) according to prior art preparation F/Sn molar percentage is the solution of 1%～10%; Pack into the ultrasonic fogger that is connected with nozzle and fog;

(2) The substrate material is carried by the conveyor belt into the tunnel furnace and heated in the heating zone;

(3) The substrate material is conveyed into the working area by the conveyor network, and the temperature is kept constant at 300°C to 500°C. The nozzle sprays the fogged mist evenly on the substrate material, and the entire surface of the substrate material 6 will deposit transparent conductive material. Thin film, the waste gas after reaction is pumped out from the waste gas discharge pipe by the suction pump;

(4) The substrate material is sent to the annealing and heat preservation zone by the conveyor belt for annealing and cooling.

The equipment and method are used to prepare a large-area tin dioxide transparent conductive film, which is resistant to acid and alkali corrosion, has small square resistance, good light transmittance and strong adhesion.

Claims (7)

1. an ultrasonic spray tunnel furnace, comprising heating zone, work zone, three zones of annealing heat preservation zone, be arranged on the nozzle above the substrate material in the work zone, the ultrasonic fogger connected with the nozzle, it is characterized in that the nozzle There are 5-30 mist gas inlet pipes on the upper end, and a waste gas discharge channel is provided on the side of the nozzle close to the exit of the tunnel furnace, and 5-30 waste gas discharge pipes are arranged above the waste gas discharge channel, and the waste gas discharge pipe is connected to the air pump. 2. A kind of ultrasonic spray tunnel furnace according to claim 1, characterized in that, rollers are housed in the tunnel furnace, and a conveyor mesh belt for conveying the substrate material is arranged on the rollers. 3. The ultrasonic spray tunnel furnace according to claim 1, wherein the nozzle is wedge-shaped, and the outlet at the lower end is provided with a smaller opening than the upper end. 4. A kind of ultrasonic spray tunnel furnace according to claim 1, characterized in that a nozzle insulation layer is provided outside the nozzle, and a nozzle water cooling layer is provided around the nozzle. 5. A kind of ultrasonic spray tunnel furnace according to claim 1, characterized in that, each mist gas inlet pipe and waste gas discharge pipe are connected with a flow meter. 6. A kind of ultrasonic spray tunnel furnace according to claim 1, characterized in that, the nozzle has a lifting device to control the distance from the surface of the substrate material. 7. A method for preparing a large-area transparent tin dioxide conductive film with an ultrasonic spray tunnel furnace according to claim 1, characterized in that: comprising the following steps: Include the following steps: (1) according to prior art preparation F/Sn molar percentage is the solution of 1%～10%; Pack into the ultrasonic fogger that is connected with nozzle and fog; (2) The substrate material is carried by the conveyor belt into the tunnel furnace and heated in the heating zone; (3) The substrate material is transported into the working area by the conveyor network, and the temperature is kept constant at 300°C to 500°C. The nozzle sprays the fogged mist evenly on the substrate material to form a tin dioxide transparent conductive film, and the exhaust gas after the reaction It is drawn out from the exhaust gas discharge pipe by the air pump; (4) The substrate material is sent to the annealing and heat preservation zone by the conveyor belt for annealing and cooling.

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