CN101551347B - Method and apparatus for locating and adjusting luminous spot of X fluorescent spectrometer - Google Patents
Method and apparatus for locating and adjusting luminous spot of X fluorescent spectrometer Download PDFInfo
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- CN101551347B CN101551347B CN2009101295485A CN200910129548A CN101551347B CN 101551347 B CN101551347 B CN 101551347B CN 2009101295485 A CN2009101295485 A CN 2009101295485A CN 200910129548 A CN200910129548 A CN 200910129548A CN 101551347 B CN101551347 B CN 101551347B
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Abstract
Provided is a method and an apparatus for locating and adjusting a luminous spot of a X fluorescent spectrometer, wherein the method includes providing a slit plate locating in a specimen stage of theX fluorescent spectrometer and covering a irradiated volume; the slit plate is provided with two L-shaped slits locating in the irradiated volume and being vertical with each other, a rectangular coo rdinate system is established using the central lines of the two slits as the coordinate axis separately, the crossing point of the two axis is the origin point; setting the coordinate of the luminousspot initialization position; moving the specimen stage along a direction parallel to any coordinate axis, measuring the coordinate of the luminous spot starting location on the axis and returning to the starting location; moving the specimen stage along a direction parallel to the other coordinate axis, measuring the coordinate the luminous spot starting location on the axis and returning to the starting location; according to the coordinates of the starting location and the initialization position, moving the specimen stage to locate the luminous spot at the initialization position. The app aratus of the invention has a simple structure, is easy to be reconstructed to be mounted on a spectrometer, and has advantages of wide application range, and rapid and accurate localization and regulation.
Description
Technical field
The present invention relates to the stepping control technology of X XRF, relate in particular to a kind of method and the device that can accurately locate the spectrometer hot spot and carry out the initialization adjustment.
Background technology
The X XRF is under a kind of not damage influence product material situation; Be used to detect the detection analysis device of its material composition; The energy dispersion effect that has been excited when having utilized X fluorescence irradiation multi-component material surface; Its high efficiency, be merely two to three minutes the analysis time of general multielement sample, detects so be widely used in the product of various chemical industry, metallurgy industry.
As shown in Figure 1, be existing common X XRF system schematic, mainly comprise: X ray emission coefficient 101 and the movably sample stage 102 that is used to carry sample, and in check and analysis system 103 that a side of X-ray emission coefficient 101 is provided with.Generally also be provided with mobile control system 104 control motors 105 and drive sample stage.
The X XRF in use; The surface of the x-ray bombardment sample 106 that needs to be produced with X ray emission coefficient 101; The X fluorescence information that the excited sample surface atom is produced is obtained analysis by detecting analytic system 103; Light path among the figure is only represented meaning, and the incident angle of x-ray bombardment is identical with the emergence angle that produces X fluorescence basically; After sample is put into sample stage, need the mobile example platform test point of sample to be aimed at the hot spot of X ray.Because X ray is that naked eyes can't be differentiated; And after each the use; The hot spot initial position of x-ray bombardment is at random with respect to sample stage within the specific limits; This is that sample stage all can be moved and make sample detected by x-ray bombardment on the surface everywhere because during each the use, and the personnel that next time use maybe and not know the particular location of hot spot irradiation.So before irradiation is analyzed, need facula position also be that X ray is accurately located with respect to the irradiation position of sample stage, and carry out the initialization adjustment next time.
At present, the spot location of X XRF mainly adopts two kinds of methods:
One, fluorescent paper is placed the irradiated region scope,, with the naked eye estimate again when x-ray bombardment produces visible light spot on fluorescent paper.This method location is comparatively rough, in the not high environment for use of positioning requirements such as only suitable large scale sample test, and can't satisfy the demand of precision measurement.
Two, some visible lasers and X ray emission coefficient coaxial illumination are used in the laser alignment location, locate the hot spot of x-ray bombardment according to the irradiation position of visual laser.Though this method location is comparatively accurate, still need during initialization to adjust correction, and the laser of high energy might destroy the surface structure of sample with artificial operation mobile example platform.
So be directed against the testing requirement day by day accurately of current X XRF, need to improve existing spot location method, realize can also fast and effeciently adjusting when accurately locating.
Summary of the invention
The problem that the present invention solved provides a kind of spot location method of adjustment and device of the X of being used for XRF, realizes the accurate location and the rapid adjustment of hot spot.
A kind of spot location method of adjustment provided by the invention, key step comprises:
Slit plate is provided, is arranged on the X XRF sample stage, and cover irradiated region;
Said slit plate is provided with and is positioned at irradiated region, and orthogonal being " L " font two slits, and with the center line of two slits be respectively the x axle, the y axle is set up rectangular coordinate system, the intersection point of diaxon is an initial point;
Set the coordinate of hot spot initialized location;
Direction along being parallel to any coordinate axis moves said sample stage, measures the coordinate of hot spot reference position at this, and returns back to reference position;
Direction along being parallel to another coordinate axis moves said sample stage, measures the coordinate of hot spot reference position at this, and returns back to reference position;
According to the coordinate of above-mentioned reference position and initialized location, the mobile example platform with spot location in initialized location.
A kind of spot location adjusting gear according to said method provided mainly comprises:
Slit plate is arranged on the X XRF sample stage, and covers irradiated region;
Said slit plate is provided with and is positioned at irradiated region, and orthogonal being " L " font two slits;
Two stepper motors make that respectively sample stage moves along slit direction, and the displacement of record sample stage;
The sample stage mobile control system is used for control step motor mobile example platform;
The hot spot induction installation is arranged at slit plate, is used to judge hot spot and slit central lines.
As preferred version, the check and analysis system that utilizes the X XRF is as the hot spot induction installation, and the X fluorescence that produces behind the reception x-ray bombardment slit plate or the X ray of transmission are also analyzed.
As preferred version, the X intensity of fluorescence that hot spot induction installation induction x-ray bombardment slit plate produces, when the hot spot of irradiation moves to slit on slit plate, the X fluorescence intensity of generation hour is confirmed hot spot and slit central lines.
As another preferred version, the X ray intensity of hot spot induction installation induction x-ray bombardment slit plate institute transmission when the hot spot that shines moves to slit on slit plate, when the X ray intensity of transmission is maximum, is confirmed hot spot and slit central lines.
As preferred version, said slit is positioned at the irradiated region inside edge, and width is not more than the spot footpath of hot spot.
The present invention moves sample stage through adopting the stepper motor that can write down displacement along two coordinate axis, and combines the hot spot induction installation to confirm the reference position coordinate of hot spot, can position hot spot accurately, also can adjust hot spot fast to initialized location simultaneously.It is simple to have apparatus structure, is easy to reequip to spectrometer, and the scope of application is extensive, the rapidly accurate advantage of location adjustment.
Description of drawings
Fig. 1 is common X XRF structural representation
Fig. 2 is an one embodiment of the invention X XRF structural representation;
Fig. 3 is an one embodiment of the invention spot location adjusting gear structural representation;
Fig. 4 is the curve synoptic diagram of the counting rate of hot spot induction installation about shift length;
Fig. 5 is the step synoptic diagram of spot location method of adjustment according to the invention;
The slit plate coordinate system synoptic diagram of Fig. 6 spot location adjusting gear according to the invention.
Embodiment
In embodiment of the present invention, describe in detail can be on the sample stage of X XRF the accurately necessary structure of the spot location adjusting gear of location spot and initialization adjustment and the localization method of this locating device.Should be understood that, below be described as the preferred embodiments of the present invention, do not constitute restriction the claim scope.Combine Figure of description at present, specific embodiment of the present invention is done further to introduce.
At first as shown in Figure 2, the necessary structure of the described X XRF of one embodiment of the invention comprises X ray emission coefficient 201, sample stage 202 and check and analysis system; Wherein, The check and analysis system of X XRF self just possesses the ability that receives X fluorescence or X ray and carry out qualitative analysis; Therefore check and analysis capable of using system is as hot spot induction installation 330 of the present invention, after state content and all refer to hot spot induction installation 330; In addition, spot location adjusting gear of the present invention also comprises stepper motor 310, slit plate 320 and sample stage mobile control system 340.
Wherein, X ray emission coefficient 201 and hot spot induction installation 330 (being the check and analysis systems) be configured to existing known technology; Repeat no more, the one side that sample stage 202 is used to carry sample is a smooth platform here, except that diagram, also some other accessory structure should be set; For example be used for fixing the stationary installation of sample etc., therefore can be provided with according to actual needs.
Sample stage mobile control system 340 receives the induced signal that comes from hot spot induction installation 330, and control step motor 310 drives sample stage 202 and moves.In the prior art, the mobile three-dimensional that is mainly of sample stage moves, and except up-down to the best irradiation distance of control sample stage, can also in same irradiated plane, do the bidimensional translation.Generally easy in order to control, the bidimensional translation is carried out through two stepper motors respectively, is similarly existing known technology here.And the adjusting gear of spot location described in the present invention is convenient for wherein bidimensional translation, specifically sees after and states.
As shown in Figure 3 again, be spot location adjusting gear structural representation according to the invention, can overlook its sample stage from the described X XRF of Fig. 2 and obtain.
The shape of slit plate 320 real space of platform per sample is provided with.Material is then selected as required, produces X fluorescence such as being easy to respond to excitation of X-rays, the illuminated so easy afterwards X fluorescence that forms higher-strength, and be easy to received by hot spot induction installation 330; Perhaps can stop X ray, the zone of illuminated like this back beyond slit is difficult to significantly X ray of transmission, and is easy to distinguished by hot spot induction installation 330.
Above-mentioned hot spot induction installation 330, among Fig. 3 for illustrating, be used to judge hot spot whether with the central lines of slit.
As an embodiment, the hot spot induction installation is arranged at the front of slit plate, can respond to the X fluorescence of x-ray bombardment generation that excites on slit plate.Existing a kind of mode that characterizes light intensity is counting rate CPS, and its implication is a photon numbers received in the unit interval.Receive the curve synoptic diagram of the counting rate of X fluorescence about shift length like Fig. 4 for hot spot induction installation induction, described shift length moves on slit plate for the irradiation hot spot, from certain a bit to slit near the time, the stroke that is experienced.When x-ray bombardment during in other positions of slit plate, excite the atom on slit plate surface, the X fluorescence intensity of generation is evenly fixing, counting rate should remain on a higher fixed value and be straight line.And at the slit place, because X ray will pass slit plate, the X fluorescence intensity that produce this moment should weaken greatly; Because hot spot has size, so the inswept slit plate of hot spot during through the slit edge, counting rate CPS also successively decreases; When hot spot is positioned at the slit center line; Counting rate CPS should be in minimum value, also be counting rate hour, can confirm the central lines of hot spot and slit; And in this moment curve hot spot from certain point begin to slit near the displacement D of process, also i.e. this and the distance of slit.
As another embodiment, the hot spot induction installation also can be arranged at the back side of slit plate, the X ray intensity of induction x-ray bombardment slit plate time institute transmission.The measured counting rate of hot spot induction installation this moment is in contrast with the previous embodiment about the curve synoptic diagram of shift length, and when x-ray bombardment during in other positions of slit plate, the X ray intensity of transmission also is evenly fixing; But counting rate should remain on a lower value is straight line; And in the slit centerline, because X ray directly passes slit plate, the X ray intensity of transmission this moment is maximum; When being counting rate CPS maximum; Confirm the central lines of hot spot and slit, in the curve hot spot from certain point begin to slit near the displacement D of process, also i.e. this and the distance of slit.
In above-mentioned two kinds of embodiment, the width of slit preferably is not more than the spot footpath of hot spot, and slit width is excessive if this is, can make whole X ray pass completely through slit plate, and the extreme value of CPS will be straight line but not a bit, be not easy to gather the shift value data.
Fig. 5 is the step synoptic diagram of spot location method of adjustment according to the invention, and the coupling apparatus synoptic diagram describes, and after aforementioned means was provided, key step comprised:
S1, be x axle and y axle, set up rectangular coordinate system with the center line of two mutually perpendicular slits on the slit plate.
The coordinate of the initialized location of S2, setting hot spot.
The direction that S3, edge are parallel to any coordinate axis moves said sample stage, measures the coordinate of hot spot reference position at this, and returns back to reference position; Direction along being parallel to another coordinate axis moves said sample stage, measures the coordinate of hot spot reference position at this, and returns back to reference position.
S4, according to the coordinate of reference position B and initialized location A, the mobile example platform with spot location in initialized location A.
Below will be elaborated to said method.
Carry out step S1 earlier, in conjunction with Fig. 3 and shown in Figure 6, as the y axle, the center line of the slit 322 of level is as the x axle with the center line of vertical slit 321, and the intersection point o of diaxon is an initial point.Because slit 321 and slit 322 are arranged at left side and the lower edge in the irradiated region in the slit plate, so the reference position of hot spot will drop on the first quartile of rectangular coordinate system basically.
Carry out step S2 again, if anticipation lets the position initialization of hot spot be adjusted to the A point in Fig. 6 slit plate, the A point can be set arbitrarily in the irradiated region on slit plate, and false coordinate is (D
1, D
2), D so
1, D
2Represent that respectively the A point is apart from the horizontal range of slit 321 and apart from the vertical range of slit 322.
Carry out step S3 then, Fig. 6 for another example, suppose that the X XRF is opened after, the facula position of x-ray bombardment is at the B point, in fact because the not visual property of X ray, the position coordinates that B is ordered (D '
1, D '
2) also be unknown, need to confirm through following steps:
Because the B point is in the first quartile of coordinate axis, so the B point should be in the right side of slit 321 and the upside of slit 322 among Fig. 6.
Elder generation's sample stage mobile control system 340 starts the stepper motor 312 of level, and the mobile example platform moves right.Comparatively speaking, hot spot will from the B point to slit 321 near.Utilize aforesaid hot spot induction installation, when confirming the central lines of hot spot and slit 321, mobile stopping.This moment, the shift length of platform also was the horizontal ordinate D ' that B is ordered
1Value.This value is fed back to sample stage mobile control system 340, the more known shift value D ' of control step motor 312 anti-phase mobile example platforms
1, make hot spot be returned to the B point.
Restart vertical stepper motor 311, the mobile example platform moves up, comparatively speaking, hot spot will from the B point to slit 322 near.Utilize the hot spot induction installation equally, when confirming the central lines of hot spot and slit 322, mobile stopping.This moment, the shift length of platform also was the ordinate D ' that B is ordered
2Value.This value is fed back to sample stage mobile control system 340, the more known shift value D ' of control step motor 322 anti-phase mobile example platforms
2, make hot spot be returned to the B point.
For stepper motor; Moving of its designated displacement generally controlled through D=Vt; Because the translational speed of stepper motor can accurately be adjusted; The whole uniform motion that is generally repeatedly stepping that moves, thus if the time of moving in 340 each stage of record of application of samples platform mobile control system, to realize the fixedly precise displacement of distance.
Through above method obtain the coordinate that B orders (D '
1, D '
2), confirm in the said process that the sequencing of horizontal ordinate can be put upside down, its process is that those skilled in the art of the present invention push away easily, repeats no more.
Carry out step S4 at last, carry out the initialization adjustment of hot spot, its concrete grammar is:
According to A, 2 differences on horizontal ordinate of B, set corrected parameter.
The corrected parameter of horizontal ordinate is δ
1=D
1-D '
1
The corrected parameter of ordinate is δ
2=D
2-D '
2
Above-mentioned corrected parameter is imported sample stage mobile control system 340 respectively as displacement, and controlling level stepper motor 312 and vertical stepper motor 311 mobile example platforms make sample stage 202 along the x δ that axially moves right
1, axially go up mobile δ along y
2, finally make spot location adjust point in initialized location A.Wherein, δ
1And δ
2During for negative value, above-mentioned translation direction is reverse.
The spot location and the initialization adjustment process of X XRF have finally been accomplished through above-mentioned steps.
Though the present invention with preferred embodiment openly as above; But it is not to be used for limiting the present invention; Any those skilled in the art are not breaking away from the spirit and scope of the present invention; Can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (9)
1. a spot location method of adjustment that is used for the X XRF is characterized in that, comprising:
Slit plate is provided, is arranged on the X XRF sample stage, and cover irradiated region;
Said slit plate is provided with and is positioned at irradiated region, and orthogonal being " L " font two slits, and with the center line of two slits be respectively the x axle, the y axle is set up rectangular coordinate system, the intersection point of diaxon is an initial point;
Set the coordinate of hot spot initialized location;
Direction along being parallel to any coordinate axis moves said sample stage, measures the coordinate of hot spot reference position at this, and returns back to reference position;
Direction along being parallel to another coordinate axis moves said sample stage, measures the coordinate of hot spot reference position at this, and returns back to reference position;
According to the coordinate of above-mentioned reference position and initialized location, the mobile example platform with spot location in initialized location,
The said coordinate of measuring the hot spot reference position at this, concrete grammar is: when setting up the rectangular coordinate system of slit, guarantee the hot spot reference position at first quartile, the check and analysis system that utilizes the X XRF is as the hot spot induction installation; Along a certain slit parallel direction mobile example platform, make hot spot to another slit near, confirm the central lines of hot spot and this slit until the hot spot induction installation; This moment, the stroke of sample stage was the coordinate of hot spot reference position on the axle of moving direction place,
According to the coordinate of said reference position and initialized location, in initialized location, concrete grammar is the mobile example platform with spot location: according to 2 coordinate differences at a certain axle, set the displacement of sample stage along this, the mobile example platform.
2. spot location method of adjustment as claimed in claim 1; It is characterized in that the X intensity of fluorescence that hot spot induction installation induction x-ray bombardment slit plate produces is when the hot spot that shines moves to slit on slit plate; The X fluorescence intensity that produces hour is confirmed hot spot and slit central lines.
3. spot location method of adjustment as claimed in claim 1; It is characterized in that the X ray intensity of hot spot induction installation induction x-ray bombardment slit plate institute transmission is when the hot spot that shines moves to slit on slit plate; When the X ray intensity of transmission is maximum, confirm hot spot and slit central lines.
4. spot location method of adjustment as claimed in claim 1 is characterized in that, the width of said slit is not more than the spot footpath of hot spot.
5. a spot location adjusting gear that is used for the X XRF is characterized in that, comprising:
Slit plate is arranged on the X XRF sample stage, and covers irradiated region;
Said slit plate is provided with and is positioned at irradiated region, and orthogonal being " L " font two slits;
Two stepper motors make that respectively sample stage moves along slit direction, and the displacement of record sample stage;
The sample stage mobile control system is used for control step motor mobile example platform;
The hot spot induction installation is arranged at the positive or back side of slit plate, is used to judge hot spot and slit central lines.
6. spot location adjusting gear as claimed in claim 5 is characterized in that, the check and analysis system that utilizes the X XRF is as the hot spot induction installation, and the X fluorescence that produces behind the reception x-ray bombardment slit plate or the X ray of transmission are also analyzed.
7. spot location adjusting gear as claimed in claim 5; It is characterized in that the X intensity of fluorescence that hot spot induction installation induction x-ray bombardment slit plate produces is when the hot spot that shines moves to slit on slit plate; The X fluorescence intensity that produces hour is confirmed hot spot and slit central lines.
8. spot location adjusting gear as claimed in claim 5; It is characterized in that the X ray intensity of hot spot induction installation induction x-ray bombardment slit plate institute transmission is when the hot spot that shines moves to slit on slit plate; When the X ray intensity of transmission is maximum, confirm hot spot and slit central lines.
9. spot location adjusting gear as claimed in claim 5 is characterized in that said slit is positioned at the inside edge of irradiated region, and width is not more than the spot footpath of hot spot.
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| CN2009101295485A CN101551347B (en) | 2009-03-26 | 2009-03-26 | Method and apparatus for locating and adjusting luminous spot of X fluorescent spectrometer |
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| CN2009101295485A CN101551347B (en) | 2009-03-26 | 2009-03-26 | Method and apparatus for locating and adjusting luminous spot of X fluorescent spectrometer |
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| DE102021116258A1 (en) | 2021-06-23 | 2022-12-29 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Measurement object, method and device for operating an X-ray source |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD292540A5 (en) * | 1990-03-14 | 1991-08-01 | Zi Fuer Isotopen- Und Strahlenforschung,De | ARRANGEMENT FOR PRODUCING AND LOCATING SMALL MEASURING FLASH IN MEASURING METHODS BY MEANS OF ROENTGENFLUORESCENCE |
| CN1499193A (en) * | 2002-11-01 | 2004-05-26 | ��ʽ���絺���������� | X-ray perspective appts. |
| JP3981053B2 (en) * | 2003-07-28 | 2007-09-26 | 日本アイ．テイー．エス株式会社 | Soil analysis method and fluorescent X-ray soil analysis apparatus used therefor |
-
2009
- 2009-03-26 CN CN2009101295485A patent/CN101551347B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD292540A5 (en) * | 1990-03-14 | 1991-08-01 | Zi Fuer Isotopen- Und Strahlenforschung,De | ARRANGEMENT FOR PRODUCING AND LOCATING SMALL MEASURING FLASH IN MEASURING METHODS BY MEANS OF ROENTGENFLUORESCENCE |
| CN1499193A (en) * | 2002-11-01 | 2004-05-26 | ��ʽ���絺���������� | X-ray perspective appts. |
| JP3981053B2 (en) * | 2003-07-28 | 2007-09-26 | 日本アイ．テイー．エス株式会社 | Soil analysis method and fluorescent X-ray soil analysis apparatus used therefor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021116258A1 (en) | 2021-06-23 | 2022-12-29 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Measurement object, method and device for operating an X-ray source |
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