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CN101540312A - Stack type chip packaging structure - Google Patents

Stack type chip packaging structure Download PDF

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Publication number
CN101540312A
CN101540312A CN200810082782A CN200810082782A CN101540312A CN 101540312 A CN101540312 A CN 101540312A CN 200810082782 A CN200810082782 A CN 200810082782A CN 200810082782 A CN200810082782 A CN 200810082782A CN 101540312 A CN101540312 A CN 101540312A
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Prior art keywords
chip
substrate
stacked
packaging structure
wiring
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CN200810082782A
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Chinese (zh)
Inventor
董悦明
杨家铭
林淑惠
林大发
宋明芳
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Orient Semiconductor Electronics Ltd
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Orient Semiconductor Electronics Ltd
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Priority to CN200810082782A priority Critical patent/CN101540312A/en
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    • H10W90/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45147Copper (Cu) as principal constituent
    • H10W72/01
    • H10W72/5445
    • H10W72/552
    • H10W72/5522
    • H10W72/5524
    • H10W90/28
    • H10W90/722
    • H10W90/754

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Abstract

The invention discloses a stacked chip packaging structure. The stacked chip package structure at least comprises a first substrate, a first chip, a second chip, at least one second substrate and a sealant. The first chip is arranged on the first substrate, the second chip is arranged on the first chip, the second substrate is arranged on the first chip and is electrically connected with the first chip and the first substrate, and the sealant is formed on the first substrate and coats the first chip, the second chip and the second substrate. The stacked chip packaging structure can avoid the situation that the existing wiring is intensively welded on a single substrate, and can solve the problems of overlarge substrate area or excessively dense connecting pads, thereby miniaturizing the volume of the packaging structure and ensuring the qualification rate in the manufacturing process.

Description

堆栈式芯片封装结构 Stacked Chip Package Structure

技术领域 technical field

本发明是有关于一种堆栈式芯片封装结构,且特别是有关于可避免接线集中于单一基板的堆栈式芯片封装结构。The present invention relates to a stacked chip packaging structure, and in particular to a stacked chip packaging structure which can avoid wiring from being concentrated on a single substrate.

背景技术 Background technique

在半导体生产过程中,集成电路封装(IC package)是制造过程中的重要步骤之一,用以保护IC芯片与提供外部电性连接,以防止在输送及取置过程中外力或环境因素的破坏。此外,集成电路组件也需与电阻、电容等被动组件组合成为一个系统,才能发挥既定的功能,而电子封装(Electronic Packaging)用以建立集成电路组件的保护与组织架构。一般而言,在集成电路芯片制造过程之后始进行电子封装,包括IC芯片的黏结固定、电路联机、结构密封与电路板的接合、系统组合、直至产品完成之间的所有制造过程。电子封装的目的为完成IC芯片与其它必要的电路零件的组合,以传递电能与电路信号、提供散热途径、承载与结构保护等功能。In the semiconductor production process, integrated circuit packaging (IC package) is one of the important steps in the manufacturing process. It is used to protect the IC chip and provide external electrical connections to prevent damage from external forces or environmental factors during transportation and placement. . In addition, integrated circuit components also need to be combined with passive components such as resistors and capacitors to form a system in order to perform the intended functions, and electronic packaging (Electronic Packaging) is used to establish the protection and organizational structure of integrated circuit components. Generally speaking, electronic packaging begins after the integrated circuit chip manufacturing process, including the bonding and fixing of IC chips, circuit connection, structural sealing and bonding of circuit boards, system assembly, and all manufacturing processes until product completion. The purpose of electronic packaging is to complete the combination of IC chips and other necessary circuit components to transmit electrical energy and circuit signals, provide heat dissipation channels, load bearing and structural protection and other functions.

在现今电子装置中,单一电子装置中常需设置多个芯片来同时执行多种功能,以满足现代人对于电子装置的需求。然而,若多个芯片分别形成于不同的封装结构,则会增加封装结构的所占空间。因此,堆栈半导体芯片以增加封装密度的半导体机构,已经被普遍使用。传统的堆栈式芯片封装结构具有由多个芯片所堆栈而成的堆栈结构。此时,这些芯片堆栈于一基板上,而所有芯片的输入/输出(I/O)通过金线来连接至基板的多个焊垫(Bond Pad)上,并通过此基板来进行芯片之间的电性连接。In today's electronic devices, a single electronic device often needs to be provided with multiple chips to perform multiple functions at the same time, so as to meet the needs of modern people for electronic devices. However, if a plurality of chips are respectively formed in different packaging structures, the occupied space of the packaging structures will be increased. Therefore, semiconductor structures that stack semiconductor chips to increase packaging density have been widely used. The traditional stacked chip packaging structure has a stack structure formed by stacking multiple chips. At this time, these chips are stacked on a substrate, and the input/output (I/O) of all chips are connected to multiple bonding pads (Bond Pad) of the substrate through gold wires, and the connection between chips is carried out through this substrate. electrical connection.

然而,由于现有的堆栈式芯片封装结构的所有输入/输出(I/O)连接于单一基板上,因而增加基板上的焊垫的数量,进而需增加基板的面积,而增加封装结构的所占空间;或者,焊垫之间的间距需缩小,因而增加金线连接于焊垫的困难,而增加制造过程难度。However, since all the input/output (I/O) of the existing stacked chip package structure is connected on a single substrate, the number of pads on the substrate is increased, thereby increasing the area of the substrate, and increasing the total cost of the package structure. space; or, the spacing between the pads needs to be reduced, thus increasing the difficulty of connecting gold wires to the pads, and increasing the difficulty of the manufacturing process.

发明内容 Contents of the invention

本发明提供了一种堆栈式芯片封装结构,使第一芯片和第二芯片接线至第二基板,以减小第一基板的设置面积,进而可微小化封装结构的体积。The invention provides a stacked chip package structure, which enables the first chip and the second chip to be connected to the second substrate, so as to reduce the installation area of the first substrate, and further miniaturize the volume of the package structure.

本发明提供一种堆栈式芯片封装结构,以避免接线集中焊接于单一基板,而不易焊线的情形,因而可确保制造过程合格率。The invention provides a stacked chip packaging structure to avoid the situation that the wires are concentratedly soldered on a single substrate, which makes it difficult to solder the wires, thereby ensuring the qualified rate of the manufacturing process.

根据本发明的实施例,本发明的堆栈式芯片封装结构至少包含有第一基板、第一芯片、第二芯片、至少一第二基板、至少一第一接线、至少一第二接线及封胶体。第一芯片设置于第一基板上,第二芯片设置于第一芯片上,第二基板设置于第一芯片上,且电性连接于第一芯片与第一基板,第一接线连接于第二芯片与第二基板之间,第二接线连接于第一基板与第二基板之间,封胶体形成于第一基板上,并包覆第一芯片、第二芯片、第二基板、第一接线及第二接线。According to an embodiment of the present invention, the stacked chip packaging structure of the present invention at least includes a first substrate, a first chip, a second chip, at least one second substrate, at least one first wiring, at least one second wiring, and an encapsulant . The first chip is arranged on the first substrate, the second chip is arranged on the first chip, the second substrate is arranged on the first chip, and is electrically connected to the first chip and the first substrate, and the first wiring is connected to the second Between the chip and the second substrate, the second wiring is connected between the first substrate and the second substrate, the sealing body is formed on the first substrate, and covers the first chip, the second chip, the second substrate, and the first wiring and the second connection.

又,根据本发明的实施例,本发明的堆栈式芯片封装结构的制造方法至少包含:提供第一基板;设置第一芯片于第一基板上;设置第二芯片和第二基板于第一芯片上,其中第二基板电性连接于第一芯片与第一基板;连接至少一第一接线于第二芯片与第二基板之间;连接至少一第二接线于第一基板与第二基板之间;以及形成一封胶体于第一基板上,以包覆第一芯片、第二芯片、第二基板、第一接线及第二接线。Moreover, according to an embodiment of the present invention, the method for manufacturing the stacked chip packaging structure of the present invention at least includes: providing a first substrate; disposing a first chip on the first substrate; disposing a second chip and a second substrate on the first chip , wherein the second substrate is electrically connected to the first chip and the first substrate; at least one first wiring is connected between the second chip and the second substrate; at least one second wiring is connected between the first substrate and the second substrate and forming an encapsulation on the first substrate to cover the first chip, the second chip, the second substrate, the first wiring and the second wiring.

因此,本发明的堆栈式芯片封装结构可避免现有接线集中焊接于单一基板的情形,因而可微小化封装结构的体积,并确保制造过程合格率。Therefore, the stacked chip packaging structure of the present invention can avoid the situation that the existing wires are concentratedly welded on a single substrate, thereby miniaturizing the volume of the packaging structure and ensuring the yield of the manufacturing process.

附图说明 Description of drawings

图1A为依照本发明的第一实施例的堆栈式芯片封装结构的剖面示意图;1A is a schematic cross-sectional view of a stacked chip package structure according to a first embodiment of the present invention;

图1B为依照本发明的第一实施例的堆栈式芯片封装结构的俯视示意图;1B is a schematic top view of a stacked chip package structure according to the first embodiment of the present invention;

图2A为依照本发明的第二实施例的堆栈式芯片封装结构的剖面示意图;2A is a schematic cross-sectional view of a stacked chip package structure according to a second embodiment of the present invention;

图2B为依照本发明的第二实施例的堆栈式芯片封装结构的俯视示意图;2B is a schematic top view of a stacked chip package structure according to a second embodiment of the present invention;

图3A为依照本发明的第三实施例的堆栈式芯片封装结构的剖面示意图;3A is a schematic cross-sectional view of a stacked chip package structure according to a third embodiment of the present invention;

图3B为依照本发明的第三实施例的堆栈式芯片封装结构的俯视示意图。3B is a schematic top view of a stacked chip package structure according to a third embodiment of the present invention.

其中,附图说明:Among them, the accompanying drawings illustrate:

100、100b、100c:堆栈式芯片封装结构100, 100b, 100c: stacked chip package structure

110:第一基板        111:接垫110: First substrate 111: Pad

120、120b、120c:第二基板120, 120b, 120c: second substrate

121:接垫            122:开槽121: pad 122: slotting

130:第一芯片        131:导电凸块130: The first chip 131: Conductive bumps

140:第二芯片        150:第一接线140: Second chip 150: First wiring

160:第二接线        170:封胶体160: Second wiring 170: Sealant

具体实施方式 Detailed ways

请参照图1A和图1B,图1A为依照本发明的第一实施例的堆栈式芯片封装结构的剖面示意图,图1B为依照本发明的第一实施例的堆栈式芯片封装结构的俯视示意图。本实施例的堆栈式芯片封装结构100包含有第一基板110、第二基板120、第一芯片130、第二芯片140、第一接线150、第二接线160及封胶体170。第一芯片130设置于第一基板110上,第二芯片140设置于第一芯片130上,第二基板120设置于第一芯片130上,且电性连接于第一芯片130及第一基板120,其中第二基板120位于第二芯片140的至少一侧,第一接线150连接于第二芯片140与第二基板120之间,第二接线160连接于第一基板110与第二基板120之间,封胶体170用以包覆第一芯片130、第二芯片140、第二基板120、第一接线150及第二接线160。其中,堆栈式芯片封装结构100于第一基板110的背面或正面设有输出/输入(0utput/Input),用以与其它电子组件电性连接(未绘示),举例来说,堆栈式芯片封装结构100的第一基板110为一基板(Substrate)或导线架(Leadframe),其背面设有多个锡球(Solder Ball)或钉脚(Leader)为输出/输入,以电性连接至一于载板上,例如:印刷电路板(Printed circuit board;PCB)、软性印刷电路板(FlexiblePrinted Circuits;FPC)或主机板。另外,此堆栈式芯片封装结构100亦可于第一基板110的正面或背面设金手指(Gold Finger)为输出/输入,以插接的方式电性连接至电子设备的插槽中。Please refer to FIG. 1A and FIG. 1B , FIG. 1A is a schematic cross-sectional view of a stacked chip packaging structure according to the first embodiment of the present invention, and FIG. 1B is a schematic top view of the stacked chip packaging structure according to the first embodiment of the present invention. The stacked chip packaging structure 100 of the present embodiment includes a first substrate 110 , a second substrate 120 , a first chip 130 , a second chip 140 , a first wire 150 , a second wire 160 and an encapsulant 170 . The first chip 130 is disposed on the first substrate 110 , the second chip 140 is disposed on the first chip 130 , the second substrate 120 is disposed on the first chip 130 and is electrically connected to the first chip 130 and the first substrate 120 , wherein the second substrate 120 is located on at least one side of the second chip 140, the first wiring 150 is connected between the second chip 140 and the second substrate 120, and the second wiring 160 is connected between the first substrate 110 and the second substrate 120 In between, the encapsulant 170 is used to cover the first chip 130 , the second chip 140 , the second substrate 120 , the first wiring 150 and the second wiring 160 . Wherein, the stacked chip packaging structure 100 is provided with an output/input (Output/Input) on the back or front of the first substrate 110 for electrical connection with other electronic components (not shown), for example, the stacked chip The first substrate 110 of the package structure 100 is a substrate (Substrate) or a leadframe (Leadframe), and a plurality of solder balls (Solder Ball) or nail feet (Leader) are provided on the back side as output/input, to be electrically connected to a On the carrier board, such as: printed circuit board (Printed circuit board; PCB), flexible printed circuit board (FlexiblePrinted Circuits; FPC) or motherboard. In addition, the stacked chip package structure 100 can also be provided with a gold finger on the front or back of the first substrate 110 as an output/input, and is electrically connected to a slot of an electronic device in a plug-in manner.

如图1A和图1B所示,本实施例的第一基板110例如由介电质材料所制成,例如:BT(Bismaleimide Triazine)热固性树脂材料、环氧树脂、陶瓷或有机玻璃纤维,并设有至少一接垫111(Bonding Pad)和电路(未绘示),其中接垫111用以供第二接线160来进行连接。在一些实施例中,第一基板110可还设有被动组件(未绘示),例如为电容、电感或电阻,此被动组件可设置于第一基板110上;或者,埋设于第一基板110中,而形成整合型被动组件基板。As shown in Fig. 1A and Fig. 1B, the first substrate 110 of the present embodiment is for example made of dielectric material, for example: BT (Bismaleimide Triazine) thermosetting resin material, epoxy resin, pottery or organic glass fiber, and set There is at least one bonding pad 111 (Bonding Pad) and a circuit (not shown), wherein the bonding pad 111 is used for the second wiring 160 to be connected. In some embodiments, the first substrate 110 may also be provided with passive components (not shown), such as capacitors, inductors or resistors, and the passive components may be disposed on the first substrate 110; or, embedded in the first substrate 110 In the process, an integrated passive component substrate is formed.

如图1A和图1B所示,本实施例的第一芯片130接合于第一基板110上,在本实施例中,第一芯片130可利用表面黏着(SMT)方式来设置于第一基板110上。在设置第一芯片130于第一基板110上之前,第一芯片130可预先形成至少一导电凸块131(例如为锡球)于第一芯片130的正面(亦即第一芯片130的主动表面)上,藉以使第二基板120可通过导电凸块131来电性连接于第一芯片130的正面上,其中导电凸块131的材料可为锡、铝、镍、银、铜、铟或其上述合金。As shown in FIG. 1A and FIG. 1B , the first chip 130 of this embodiment is bonded on the first substrate 110. In this embodiment, the first chip 130 can be disposed on the first substrate 110 by surface mount (SMT) method. superior. Before disposing the first chip 130 on the first substrate 110, the first chip 130 may pre-form at least one conductive bump 131 (such as a solder ball) on the front side of the first chip 130 (that is, the active surface of the first chip 130 ), so that the second substrate 120 can be electrically connected to the front surface of the first chip 130 through the conductive bump 131, wherein the material of the conductive bump 131 can be tin, aluminum, nickel, silver, copper, indium or the above-mentioned alloy.

如图1A和图1B所示,本实施例的第二基板120例如由介电质材料所制成,例如:BT热固性树脂材料、环氧树脂、陶瓷或有机玻璃纤维,并设有接垫121。接垫121设置于第二基板120的相对上、下表面上,借以分别电性连接于第一芯片130和第二芯片140,并可供第二接线160来进行连接。在本实施例中,第二基板120设有一开槽122,并暴露出第一芯片130的一部分表面,其中开槽122的槽口面积大于第二芯片140的面积。此时,第二芯片140可设置于第二基板120的开槽122中,并接合于第一芯片130的部分表面上,例如利用表面黏着方式,因而设置第二基板120于第二芯片140的周围。As shown in FIG. 1A and FIG. 1B, the second substrate 120 of this embodiment is made of, for example, a dielectric material, such as: BT thermosetting resin material, epoxy resin, ceramic or organic glass fiber, and is provided with a pad 121 . The pads 121 are disposed on opposite upper and lower surfaces of the second substrate 120 so as to be electrically connected to the first chip 130 and the second chip 140 respectively, and can be connected by the second wiring 160 . In this embodiment, the second substrate 120 is provided with a slot 122 exposing a part of the surface of the first chip 130 , wherein the notch area of the slot 122 is larger than the area of the second chip 140 . At this time, the second chip 140 can be disposed in the groove 122 of the second substrate 120, and bonded to a part of the surface of the first chip 130, for example, by using a surface-mounting method, so that the second substrate 120 is disposed on the second chip 140. around.

如图1A和图1B所示,本实施例的第一接线150和第二接线160例如为金线、银线、铜线或铝线,第一接线150分别连接于第二芯片140和第二基板120的接垫121,因而电性连接第二芯片140和第二基板120。第二接线160分别连接于第一基板110与第二基板120的接垫121,以形成电性连接第一基板110与第二基板120。封胶体170的材料例如为:环氧树脂、PMMA、聚碳酸酯(Polycarbonate)或硅胶,其形成于第一基板110上,用以包覆并密封第一芯片130、第二芯片140、第二基板120、第一接线150及第二接线160,因而可形成本实施例的堆栈式芯片封装结构100。As shown in Figure 1A and Figure 1B, the first wire 150 and the second wire 160 of this embodiment are, for example, gold wires, silver wires, copper wires or aluminum wires, and the first wires 150 are respectively connected to the second chip 140 and the second chip 140. The pads 121 of the substrate 120 are thus electrically connected to the second chip 140 and the second substrate 120 . The second wires 160 are respectively connected to the pads 121 of the first substrate 110 and the second substrate 120 to form an electrical connection between the first substrate 110 and the second substrate 120 . The material of the encapsulant 170 is, for example: epoxy resin, PMMA, polycarbonate (Polycarbonate) or silica gel, which is formed on the first substrate 110 to cover and seal the first chip 130, the second chip 140, the second The substrate 120 , the first wiring 150 and the second wiring 160 can thus form the stacked chip packaging structure 100 of this embodiment.

当制造本实施例的堆栈式芯片封装结构100时,首先,提供第一芯片130,接着,设置第一芯片130于第一基板110上,接着,设置第二芯片140和第二基板120于第一芯片110上,接着,进行打线步骤,借以连接第一接线150于第二芯片140与第二基板120之间,以及连接第二接线160于第一基板110与第二基板120之间,然后,形成封胶体170,以密封第一芯片130、第二芯片140、第二基板120、第一接线150及第二接线160,因而形成堆栈式芯片封装结构100。When manufacturing the stacked chip packaging structure 100 of this embodiment, firstly, the first chip 130 is provided, then, the first chip 130 is arranged on the first substrate 110, and then, the second chip 140 and the second substrate 120 are arranged on the second substrate 110. On a chip 110, then, carry out the wiring step, thereby connect the first wiring 150 between the second chip 140 and the second substrate 120, and connect the second wiring 160 between the first substrate 110 and the second substrate 120, Then, an encapsulant 170 is formed to seal the first chip 130 , the second chip 140 , the second substrate 120 , the first wiring 150 and the second wiring 160 , thus forming the stacked chip packaging structure 100 .

值得注意的是,当设置第二芯片140和第二基板120时,可先接合第二基板120于第一芯片130的导电凸块131上,再接合第二芯片140于第一芯片130所暴露出的部分表面上;或者,也可先接合第二芯片140于第一芯片130上,再接合第二基板120于第一芯片130的导电凸块131上,且位于第二芯片140的周围。It should be noted that when the second chip 140 and the second substrate 120 are arranged, the second substrate 120 can be bonded to the conductive bumps 131 of the first chip 130 first, and then the second chip 140 can be bonded to the exposed surface of the first chip 130. Alternatively, the second chip 140 may be bonded on the first chip 130 first, and then the second substrate 120 may be bonded on the conductive bump 131 of the first chip 130 and located around the second chip 140 .

由于本实施例的第一芯片130和第二芯片140可分别利用导电凸块(Bump)及焊线连接于第二基板120,且第二基板120电性连接于第一基板110,利用第二基板120的内部电路(Inter Connecting)的设计,使第一、二芯片可通过第二基板与第一基板电性连接,因而第一基板110无需设有过多的接垫111,可避免现有的堆栈式芯片封装结构接线集中焊接于第一基板110的情形,而可解决第一基板110的设置面积过大或接垫111设置过于密集的问题。因此,本实施例的堆栈式芯片封装结构100及其制造方法可微小化封装结构的体积,并可确保制造过程的合格率。Since the first chip 130 and the second chip 140 of this embodiment can be connected to the second substrate 120 by using conductive bumps (Bump) and bonding wires respectively, and the second substrate 120 is electrically connected to the first substrate 110, using the second The design of the internal circuit (Inter Connecting) of the substrate 120 enables the first and second chips to be electrically connected to the first substrate through the second substrate, so that the first substrate 110 does not need to be provided with too many pads 111, which can avoid existing In the stacked chip packaging structure, the wires are concentratedly soldered to the first substrate 110 , which can solve the problem that the first substrate 110 is too large or the pads 111 are too densely arranged. Therefore, the stacked chip packaging structure 100 and its manufacturing method of the present embodiment can minimize the volume of the packaging structure and ensure the yield of the manufacturing process.

请参照图2A和图2B,图2A为依照本发明的第二实施例的堆栈式芯片封装结构的剖面示意图,图2B为依照本发明的第二实施例的堆栈式芯片封装结构的俯视示意图。相较于第一实施例,第二实施例的堆栈式芯片封装结构100b的第二基板120b可未设有开槽122,第二基板120b与第二芯片140均连接于第一芯片130上,且第二基板120b位于第二芯片140的一侧,并与第一芯片130上的导电凸块131电性连接,通过第一接线150电性连接于第二芯片140和第二基板120b的接垫121之间,且通过第二接线160来电性连接第一基板110和第二基板120b,因而第一芯片130和第二芯片140可电性连接于第二基板120b,进而电性连接于第一基板110,以微小化封装结构的体积和确保制造过程合格率。Please refer to FIG. 2A and FIG. 2B , FIG. 2A is a schematic cross-sectional view of a stacked chip packaging structure according to a second embodiment of the present invention, and FIG. 2B is a schematic top view of a stacked chip packaging structure according to a second embodiment of the present invention. Compared with the first embodiment, the second substrate 120b of the stacked chip packaging structure 100b of the second embodiment may not be provided with a slot 122, and the second substrate 120b and the second chip 140 are both connected to the first chip 130, And the second substrate 120b is located on one side of the second chip 140, and is electrically connected to the conductive bump 131 on the first chip 130, and is electrically connected to the connection between the second chip 140 and the second substrate 120b through the first wire 150. between the pads 121, and electrically connect the first substrate 110 and the second substrate 120b through the second wiring 160, so that the first chip 130 and the second chip 140 can be electrically connected to the second substrate 120b, and then electrically connected to the second substrate 120b. A substrate 110 is used to minimize the volume of the packaging structure and ensure the yield of the manufacturing process.

请参照图3A和图3B,图3A为依照本发明的第三实施例的堆栈式芯片封装结构的剖面示意图,图3B为依照本发明的第三实施例的堆栈式芯片封装结构的俯视示意图。相较于第二实施例,第三实施例的堆栈式芯片封装结构100c设有二第二基板120c,二第二基板120c与第二芯片140均连接于第一芯片130上,且二第二基板120c其分别位于第二芯片140的两侧,并与第一芯片130上的导电凸块131电性连接,通过第一接线150电性连接于第二芯片140和第二基板120c的接垫121之间,且通过第二接线160来电性连接第一基板110和第二基板120c,因而第一芯片130和第二芯片140可电性连接于第二基板120c,进而电性连接于第一基板110,以微小化封装结构的体积和确保制造过程合格率。Please refer to FIG. 3A and FIG. 3B , FIG. 3A is a schematic cross-sectional view of a stacked chip packaging structure according to a third embodiment of the present invention, and FIG. 3B is a schematic top view of a stacked chip packaging structure according to a third embodiment of the present invention. Compared with the second embodiment, the stacked chip packaging structure 100c of the third embodiment is provided with two second substrates 120c, the two second substrates 120c and the second chip 140 are connected to the first chip 130, and the two second The substrate 120c is located on both sides of the second chip 140, and is electrically connected to the conductive bumps 131 on the first chip 130, and is electrically connected to the pads of the second chip 140 and the second substrate 120c through the first wiring 150 121, and electrically connect the first substrate 110 and the second substrate 120c through the second wiring 160, so the first chip 130 and the second chip 140 can be electrically connected to the second substrate 120c, and then electrically connected to the first The substrate 110 is used to minimize the volume of the packaging structure and ensure the yield of the manufacturing process.

由上述本发明的实施例可知,本发明的堆栈式芯片封装结构可避免现有接线集中焊接于单一基板的情形,而可解决基板面积过大或接垫设置过于密集的问题,因而可微小化封装结构的体积,并确保制造过程合格率。It can be seen from the above-mentioned embodiments of the present invention that the stacked chip packaging structure of the present invention can avoid the situation that the existing wiring is concentratedly soldered to a single substrate, and can solve the problem of too large substrate area or too densely arranged pads, so it can be miniaturized Encapsulate the volume of the structure and ensure the yield of the manufacturing process.

虽然本发明以最佳实施例公开如上,但其并非用以限定本发明,任何本领域的普通技术人员,在不脱离本发明的精神和范围内,当可作各种的更动与修改,因此本发明的保护范围以权利要求书所界定者为准。Although the present invention is disclosed above with the best embodiment, it is not intended to limit the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be defined by the claims.

Claims (10)

1.一种堆栈式芯片封装结构,其特征在于,至少包含:1. A stacked chip packaging structure, characterized in that it comprises at least: 一第一基板;a first substrate; 一第一芯片,设置于该第一基板上;a first chip disposed on the first substrate; 一第二芯片,设置于该第一芯片上;a second chip disposed on the first chip; 至少一第二基板,设置于该第一芯片上,且电性连接于该第一芯片及该第一基板;at least one second substrate, disposed on the first chip, and electrically connected to the first chip and the first substrate; 至少一第一接线,连接于该第二芯片与该第二基板之间;at least one first wire connected between the second chip and the second substrate; 至少一第二接线,连接于该第一基板与该第二基板之间;以及at least one second wire connected between the first substrate and the second substrate; and 一封胶体,形成于该第一基板上,并包覆该第一芯片、该第二芯片、该第二基板、该第一接线及该第二接线。An encapsulant is formed on the first substrate and covers the first chip, the second chip, the second substrate, the first wiring and the second wiring. 2.如权利要求1所述的堆栈式芯片封装结构,其特征在于,该第二基板设有一开槽,该第二芯片设置于该开槽中,并接合于该第一芯片上。2 . The stacked chip package structure according to claim 1 , wherein the second substrate is provided with a slot, and the second chip is disposed in the slot and bonded to the first chip. 3.如权利要求1所述的堆栈式芯片封装结构,其特征在于,该第二基板位于该第二芯片的一侧。3. The stacked chip package structure as claimed in claim 1, wherein the second substrate is located at one side of the second chip. 4.如权利要求1所述的堆栈式芯片封装结构,其特征在于,该堆栈式芯片封装结构设有二第二基板,其分别位于该第二芯片的两侧。4 . The stacked chip package structure as claimed in claim 1 , wherein the stacked chip package structure is provided with two second substrates, which are respectively located on two sides of the second chip. 5.如权利要求1所述的堆栈式芯片封装结构,其特征在于,该第一基板设有至少一被动组件。5. The stacked chip package structure as claimed in claim 1, wherein the first substrate is provided with at least one passive component. 6.如权利要求1所述的堆栈式芯片封装结构,其特征在于,该第一芯片设有至少一导电凸块,用以电性连接于该第二基板。6 . The stacked chip package structure as claimed in claim 1 , wherein the first chip is provided with at least one conductive bump for electrically connecting to the second substrate. 7.一种堆栈式芯片封装结构的制造方法,其特征在于,至少包含:7. A method for manufacturing a stacked chip packaging structure, characterized in that it at least includes: 提供一第一基板;providing a first substrate; 设置一第一芯片于该第一基板上;disposing a first chip on the first substrate; 设置一第二芯片和至少一第二基板于该第一芯片上,其中该第二基板电性连接于该第一芯片及该第一基板;disposing a second chip and at least one second substrate on the first chip, wherein the second substrate is electrically connected to the first chip and the first substrate; 连接至少一第一接线于该第二芯片与该第二基板之间;connecting at least one first wire between the second chip and the second substrate; 连接至少一第二接线于该第一基板与该第二基板之间;以及connecting at least one second wire between the first substrate and the second substrate; and 形成一封胶体于该第一基板上,以包覆该第一芯片、该第二芯片、该第二基板、该第一接线及该第二接线。An encapsulant is formed on the first substrate to cover the first chip, the second chip, the second substrate, the first wiring and the second wiring. 8.如权利要求7所述的堆栈式芯片封装结构的制造方法,其特征在于,该设置至少一第二基板的步骤至少包含:8. The method of manufacturing a stacked chip package structure according to claim 7, wherein the step of arranging at least one second substrate at least comprises: 设置一第二基板于该第二芯片的一侧。A second substrate is arranged on one side of the second chip. 9.如权利要求7所述的堆栈式芯片封装结构的制造方法,其特征在于,该设置至少一第二基板的步骤至少包含:9. The method of manufacturing a stacked chip package structure according to claim 7, wherein the step of arranging at least one second substrate at least comprises: 设置二第二基板于该第二芯片的两侧。Two second substrates are arranged on two sides of the second chip. 10.如权利要求7所述的堆栈式芯片封装结构的制造方法,其特征在于,至少还包含:10. The manufacturing method of the stacked chip packaging structure according to claim 7, further comprising at least: 形成至少一导电凸块于该第一芯片上,用以电性连接于该第二基板。At least one conductive bump is formed on the first chip to be electrically connected to the second substrate.
CN200810082782A 2008-03-19 2008-03-19 Stack type chip packaging structure Pending CN101540312A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102064163A (en) * 2010-04-02 2011-05-18 日月光半导体制造股份有限公司 Stack packaging assembly
CN113097173A (en) * 2020-05-21 2021-07-09 Jmj 韩国株式会社 Semiconductor package and method of manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102064163A (en) * 2010-04-02 2011-05-18 日月光半导体制造股份有限公司 Stack packaging assembly
CN102064163B (en) * 2010-04-02 2014-08-27 日月光半导体制造股份有限公司 Stack Package Components
CN113097173A (en) * 2020-05-21 2021-07-09 Jmj 韩国株式会社 Semiconductor package and method of manufacturing the same
CN113097173B (en) * 2020-05-21 2024-12-24 Jmj韩国株式会社 Semiconductor package and method of manufacturing the same

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