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CN101533866A - Solar cell with amorphous silicon multi-structure layer film - Google Patents

Solar cell with amorphous silicon multi-structure layer film Download PDF

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CN101533866A
CN101533866A CN200810084631A CN200810084631A CN101533866A CN 101533866 A CN101533866 A CN 101533866A CN 200810084631 A CN200810084631 A CN 200810084631A CN 200810084631 A CN200810084631 A CN 200810084631A CN 101533866 A CN101533866 A CN 101533866A
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杨燕智
简永杰
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Contrel Technology Co Ltd
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    • Y02E10/548Amorphous silicon PV cells

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Abstract

A solar cell with amorphous silicon multi-structure layer thin film comprises a substrate, a first penetrating electric film, a first photoelectric conversion layer with a-SiN, a second photoelectric conversion layer with a-Si, a third photoelectric conversion layer with a-SiSn, a second penetrating electric film and an upper electrode; the tunable energy bandwidth of the first photoelectric conversion layer is between 1.7ev and 2.3 ev; the tunable energy bandwidth of the second photoelectric conversion layer is about 1.7ev, and the tunable energy bandwidth of the third photoelectric conversion layer is between 0.08ev and 1.1 ev; therefore, the invention has the advantages and effects of large absorption range, high conversion efficiency, lower manufacturing cost and the like.

Description

具有非晶硅多结构层薄膜的太阳能电池 Solar cells with amorphous silicon multi-layer thin films

技术领域 technical field

本发明涉及一种太阳能电池,尤其涉及一种具有非晶硅结构层的太阳能电池,其兼具吸收范围大、转换效率高与制造成本较低的具有非晶硅多结构层薄膜的太阳能电池。The invention relates to a solar cell, in particular to a solar cell with an amorphous silicon structure layer, which has the advantages of large absorption range, high conversion efficiency and low manufacturing cost.

背景技术 Background technique

现有单阶面P-I-N太阳能电池,其是以a-Si(amorphous silicon,即非晶硅)所构成,但a-Si的能隙(bandgap、energy gap,或译作能带隙)约为1.7ev,对于能量较小的红光与红外光,照射后能量提升不足1.7eV,因此皆无法产生光伏特效应而发电。此外,如图1所示,其中的第二曲线L2为a-Si的吸收光谱曲线,其吸收系数在波长为0.45μm至0.6μm间时最佳(吸收系数大约介于0.7~1.0之间),很明显的可以看出,若为波长介于0.68μm至0.76μm的红色可见光或是波长介于0.8μm以上的红外光,其相对应的吸收系数极低,换言之,大多数的红光与红外光均未被a-Si吸收。该第四曲线L4为太阳光的光谱分布曲线,可看出其波长大于0.76μm的部分占有相当的比例,若无法转换成电能是极大的损失。因此,现有单阶面P-I-N太阳能电池在转换效率上有一定的限制。The existing single-level P-I-N solar cell is composed of a-Si (amorphous silicon, that is, amorphous silicon), but the energy gap (bandgap, energy gap, or translated as energy gap) of a-Si is about 1.7ev , for red light and infrared light with less energy, the energy increase after irradiation is less than 1.7eV, so neither can produce photovoltaic special effect to generate electricity. In addition, as shown in Figure 1, the second curve L2 is the absorption spectrum curve of a-Si, and its absorption coefficient is optimal when the wavelength is between 0.45 μm and 0.6 μm (the absorption coefficient is approximately between 0.7 and 1.0) , it can be clearly seen that if it is red visible light with a wavelength between 0.68 μm and 0.76 μm or infrared light with a wavelength above 0.8 μm, the corresponding absorption coefficient is extremely low. In other words, most red light and None of the infrared light is absorbed by a-Si. The fourth curve L4 is the spectral distribution curve of sunlight, and it can be seen that the portion with a wavelength greater than 0.76 μm occupies a considerable proportion, and if it cannot be converted into electrical energy, it will be a great loss. Therefore, the conversion efficiency of existing single-level P-I-N solar cells is limited.

为了在转换效率上有所提升,可从多能带或多能阶结构着手,而现有的多能带结构太阳能电池多由GaInP、GaAs及Ge堆叠而成,该能隙范围虽提高到0.7~1.8ev,但吸收范围仍然有所局限。In order to improve the conversion efficiency, it is possible to start with a multi-band or multi-level structure, and the existing multi-band structure solar cells are mostly stacked by GaInP, GaAs and Ge, although the energy gap range has been increased to 0.7 ~1.8ev, but the absorption range is still limited.

发明内容 Contents of the invention

本发明所要解决的主要技术问题在于,克服现有技术存在的上述缺陷,而提供一种具有非晶硅多结构层薄膜的太阳能电池,其具有吸收范围大的优点,达到转换效率高的目的,并具有制造成本较低的市场竞争力。The main technical problem to be solved by the present invention is to overcome the above-mentioned defects in the prior art, and provide a solar cell with an amorphous silicon multi-layer thin film, which has the advantage of a large absorption range and achieves the purpose of high conversion efficiency. And has the market competitiveness with lower manufacturing cost.

本发明解决其技术问题所采用的技术方案是:The technical solution adopted by the present invention to solve its technical problems is:

一种具有非晶硅多结构层薄膜的太阳能电池,其特征在于,包括:一基板,可透光;一第一穿透电膜,是设于该基板上且可透光;一第一光电转换层,是由一第一P层、一第一I层及一第一N层堆叠而成,其中,该第一I层是由a-SiN构成,而该第一光电转换层是设于该第一穿透电膜上,且可调变的能带宽是介于1.7ev至2.3ev之间;一第二光电转换层,是由一第二P层、一第二I层及一第二N层堆叠而成,其中,该第二I层是由a-Si所构成,而该第二光电转换层是设于该第一光电转换层上,且可调变的能带宽为1.7ev左右;一第三光电转换层,是由一第三P层、一第三I层及一第三N层堆叠而成,其中,该第三I层是由a-SiSn构成,而该第三光电转换层是设于该第二光电转换层上,且可调变的能带宽介于0.08ev至1.1ev之间,又,该第一光电转换层的能隙是大于该第二光电转换层的能隙,且该第二光电转换层的能隙是大于该第三光电转换层的能隙;一第二穿透电膜,是设于该第三光电转换层的上方且可透光;一上电极,是设于该第二穿透电膜上。A solar cell with an amorphous silicon multi-layer thin film is characterized in that it includes: a substrate, which can transmit light; a first transparent electrical film, which is arranged on the substrate and can transmit light; a first photoelectric film The conversion layer is formed by stacking a first P layer, a first I layer and a first N layer, wherein the first I layer is made of a-SiN, and the first photoelectric conversion layer is located on On the first transparent electric film, the adjustable energy bandwidth is between 1.7ev and 2.3ev; a second photoelectric conversion layer is composed of a second P layer, a second I layer and a first Two N layers are stacked, wherein the second I layer is made of a-Si, and the second photoelectric conversion layer is set on the first photoelectric conversion layer, and the adjustable energy bandwidth is 1.7ev Left and right; a third photoelectric conversion layer is formed by stacking a third P layer, a third I layer and a third N layer, wherein the third I layer is made of a-SiSn, and the third The photoelectric conversion layer is arranged on the second photoelectric conversion layer, and the adjustable energy bandwidth is between 0.08ev and 1.1ev, and the energy gap of the first photoelectric conversion layer is larger than that of the second photoelectric conversion layer energy gap, and the energy gap of the second photoelectric conversion layer is larger than the energy gap of the third photoelectric conversion layer; a second transparent film is arranged above the third photoelectric conversion layer and can transmit light; An upper electrode is arranged on the second TT film.

前述的具有非晶硅多结构层薄膜的太阳能电池,其中第一、第二及第三光电转换层又可分别设有一第一缓冲层、一第二缓冲层及一第三缓冲层,又,所述第一光电转换层的能隙大于所述第二光电转换层的能隙,该第二光电转换层的能隙大于所述第三光电转换层的能隙。The aforementioned solar cell with amorphous silicon multi-layer thin films, wherein the first, second and third photoelectric conversion layers can be respectively provided with a first buffer layer, a second buffer layer and a third buffer layer, and, The energy gap of the first photoelectric conversion layer is larger than the energy gap of the second photoelectric conversion layer, and the energy gap of the second photoelectric conversion layer is larger than the energy gap of the third photoelectric conversion layer.

前述的具有非晶硅多结构层薄膜的太阳能电池,其中第一光电转换层是以制程气体SiH4/NH3比例调变能带宽;所述第二光电转换层是以制程气体SiH4/H2比例调变能带宽;所述第三光电转换层是以溅镀或蒸镀方式调变能带宽。The aforementioned solar cell with an amorphous silicon multi-layer thin film, wherein the first photoelectric conversion layer is modulated by the ratio of process gas SiH4/NH3; the second photoelectric conversion layer is modulated by the ratio of process gas SiH4/H2 energy bandwidth; the third photoelectric conversion layer modulates the energy bandwidth by sputtering or vapor deposition.

本发明的有益效果是,其具有吸收范围大的优点,达到转换效率高的目的,并具有制造成本较低的市场竞争力。The beneficial effect of the invention is that it has the advantage of large absorption range, achieves the purpose of high conversion efficiency, and has market competitiveness with low manufacturing cost.

附图说明 Description of drawings

下面结合附图和实施例对本发明进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

图1是现有单阶面太阳能电池的吸收光谱曲线图Fig. 1 is the absorption spectrum graph of existing single-order planar solar cell

图2是本发明的局部放大剖视图Fig. 2 is a partially enlarged sectional view of the present invention

图3是本发明的增加缓冲层的局部放大剖视图Fig. 3 is the partially enlarged sectional view of increasing buffer layer of the present invention

图4是本发明的光电转换层的光源吸收过程的示意图Fig. 4 is the schematic diagram of the light source absorption process of the photoelectric conversion layer of the present invention

图5是本发明的能隙范围的示意图Fig. 5 is the schematic diagram of energy gap scope of the present invention

图6是本发明的SiN、a-Si及SiSn的吸收系数曲线图Fig. 6 is the absorption coefficient graph of SiN, a-Si and SiSn of the present invention

图中标号说明:Explanation of symbols in the figure:

10基板                    20第一穿透电膜10 Substrate 20 The first penetration film

30第一光电转换层          30P第一P层30 The first photoelectric conversion layer 30P The first P layer

30I第一I层                30N第一N层30I first I layer 30N first N layer

30B第一缓冲层             40第二光电转换层30B first buffer layer 40 second photoelectric conversion layer

40P第二P层                40I第二I层40P second P layer 40I second I layer

40N第二N层                40B第二缓冲层40N second N layer 40B second buffer layer

50第三光电转换层          50P第三P层50 The third photoelectric conversion layer 50P The third P layer

50I第三I层                50N第三N层50I third layer I 50N third layer N

50B第三缓冲层             60第二穿透电膜50B third buffer layer 60 second through film

70上电极                  X1第一光源70 upper electrode X1 first light source

X2第二光源                X3第三光源X2 second light source X3 third light source

X4第四光源                X5第五光源X4 fourth light source X5 fifth light source

L1第一曲线                L2第二曲线L1 first curve L2 second curve

L3第三曲线                L4第四曲线L3 third curve L4 fourth curve

具体实施方式 Detailed ways

如图2所示,本发明为一种具有非晶硅多结构层薄膜的太阳能电池,其包括:一基板10,可透光;As shown in Fig. 2, the present invention is a solar cell with multi-layer amorphous silicon thin film, which includes: a substrate 10, which can transmit light;

一第一穿透电膜20,是设于该基板10上且可透光;A first transmissive film 20 is arranged on the substrate 10 and can transmit light;

一第一光电转换层30,是由一第一P层30P、一第一I层30I及一第一N层30N堆叠而成,其中,该第一I层30I是由a-SiN所构成,而该第一光电转换层30是设于该第一穿透电膜20上,且依制程气体SiH4/NH3比例,可调变的能带宽介于1.7ev至2.3ev之间;A first photoelectric conversion layer 30 is formed by stacking a first P layer 30P, a first I layer 30I and a first N layer 30N, wherein the first I layer 30I is made of a-SiN, The first photoelectric conversion layer 30 is disposed on the first transparent film 20, and the adjustable energy bandwidth is between 1.7ev and 2.3ev according to the ratio of process gas SiH4/NH3;

一第二光电转换层40,是由一第二P层40P、一第二I层40I及一第二N层40N堆叠而成,其中,该第二I层40I是由a-Si(amorphoussilicon,即非晶硅)所构成,而该第二光电转换层40是设于该第一光电转换层30上,且依制程气体SiH4/H2比例,可调变的能带宽大体上为1.7ev左右;A second photoelectric conversion layer 40 is formed by stacking a second P layer 40P, a second I layer 40I and a second N layer 40N, wherein the second I layer 40I is made of a-Si (amorphous silicon, That is, amorphous silicon), and the second photoelectric conversion layer 40 is arranged on the first photoelectric conversion layer 30, and according to the ratio of process gas SiH4/H2, the adjustable energy bandwidth is generally about 1.7 eV;

一第三光电转换层50,是由一第三P层50P、一第三I层50I及一第三N层50N堆叠而成,其中,该第三I层50I是由a-SiSn构成,而该第三光电转换层50是设于该第二光电转换层40上,且以溅镀或蒸镀方式,可调变的能带宽是介于0.08ev至1.1ev之间,又,该第一光电转换层30的能隙是大于该第二光电转换层40的能隙,且该第二光电转换层40的能隙是大于该第三光电转换层50的能隙;A third photoelectric conversion layer 50 is formed by stacking a third P layer 50P, a third I layer 50I and a third N layer 50N, wherein the third I layer 50I is made of a-SiSn, and The third photoelectric conversion layer 50 is disposed on the second photoelectric conversion layer 40, and by sputtering or vapor deposition, the adjustable energy bandwidth is between 0.08ev and 1.1ev, and the first The energy gap of the photoelectric conversion layer 30 is greater than the energy gap of the second photoelectric conversion layer 40, and the energy gap of the second photoelectric conversion layer 40 is greater than the energy gap of the third photoelectric conversion layer 50;

一第二穿透电膜60,是设于该第三光电转换层50的上方且可透光;A second transmissive film 60 is arranged above the third photoelectric conversion layer 50 and can transmit light;

一上电极70,是设于该第二穿透电膜60上。An upper electrode 70 is disposed on the second TX film 60 .

更详细的说,本发明是利用硅化合物(例如SiN、SiSn及a-Si)堆叠成多能带的结构设计,可使能隙(bandgap、energy gap,或译作能带隙)范围达1.0至2.3ev之间,提升光谱范围及吸收光波段。More specifically, the present invention utilizes a silicon compound (such as SiN, SiSn and a-Si) stacked into a multi-band structure design, which can make the energy gap (bandgap, energy gap, or translated as energy gap) range from 1.0 to Between 2.3ev, increase the spectral range and absorb light band.

如图3所示,该第一、第二及第三光电转换层30、40及50又可分别设有一第一缓冲层30B、一第二缓冲层40B及一第三缓冲层50B,来达到各P层与I层阶面的改善,进而提升开路电压(Voc)及短路电流(Isc),达到更高的转换效率。As shown in Figure 3, the first, second and third photoelectric conversion layers 30, 40 and 50 can be respectively provided with a first buffer layer 30B, a second buffer layer 40B and a third buffer layer 50B to achieve The improvement of each P-layer and I-layer level further increases the open circuit voltage (Voc) and short circuit current (Isc) to achieve higher conversion efficiency.

当然,本发明于使用时,光源的照射方向是由该基板10进入(如图2及图3所示的箭头)。Certainly, when the present invention is in use, the irradiation direction of the light source enters from the substrate 10 (as shown by the arrows in FIG. 2 and FIG. 3 ).

兹举一简化实施例来解释本发明的工作原理,如图4所示,假设将太阳光简化成为五个不同波长的光线所合成,则可分别设为:Now give a simplified embodiment to explain the working principle of the present invention, as shown in Figure 4, assuming that sunlight is simplified to be synthesized by light of five different wavelengths, it can be respectively set as:

第一光源X1,波长为0.8μm;The first light source X1 has a wavelength of 0.8 μm;

第二光源X2,波长为0.7μm;The second light source X2 has a wavelength of 0.7 μm;

第三光源X3,波长为0.6μm;The third light source X3 has a wavelength of 0.6 μm;

第四光源X4,波长为0.5μm;The fourth light source X4, with a wavelength of 0.5 μm;

第五光源X5,波长为0.4μm。The fifth light source X5 has a wavelength of 0.4 μm.

当第一光源X1、第二光源X2、第三光源X3、第四光源X4及第五光源X5均进入本发明后,先穿透该可透光的基板10及该第一穿透电膜20,然后进入该一第一光电转换层30中,假设该第一光电转换层30的能隙为2.3eV,因此,只有该第四光线X4及该第五光线X5所产生的能量足够大于2.3eV而发电,其余的第一光源X1、第二光源X2、第三光源X3则继续前进。当进入该第二光电转换层40时,假设该第二光电转换层40的能隙为1.7eV,则只有第三光线X3所产生能量足够大于1.7eV而使该第二光电转换层40发电。之后,只剩第一光源X1与第二光源X2进入该第三光电转换层50,假设该第三光电转换层50的能隙为1.0eV,则只有第二光线X2所产生的能量大于1.0eV而使该第三光电转换层50发电。最后,仅剩第一光源X1未被吸收而反射掉。换言之,利用本发明的第一光电转换层30、第二光电转换层40及第三光电转换层50的多能隙设计,可针对不同波长,进行一特定波长范围的光源吸收转换。特别是本发明的相关材料(SiN、a-Si及SiSn),比传统的GaInP、GaAs及Ge更易取得、成本低且能隙范围更广。When the first light source X1, the second light source X2, the third light source X3, the fourth light source X4 and the fifth light source X5 all enter the present invention, they first penetrate the light-transmissible substrate 10 and the first transmissive film 20 , and then enter the first photoelectric conversion layer 30, assuming that the energy gap of the first photoelectric conversion layer 30 is 2.3eV, therefore, only the energy generated by the fourth ray X4 and the fifth ray X5 is sufficiently greater than 2.3eV While generating electricity, the rest of the first light source X1, the second light source X2, and the third light source X3 continue to move forward. When entering the second photoelectric conversion layer 40 , assuming that the energy gap of the second photoelectric conversion layer 40 is 1.7 eV, only the energy generated by the third light X3 is greater than 1.7 eV to make the second photoelectric conversion layer 40 generate electricity. After that, only the first light source X1 and the second light source X2 enter the third photoelectric conversion layer 50. Assuming that the energy gap of the third photoelectric conversion layer 50 is 1.0 eV, only the energy generated by the second light X2 is greater than 1.0 eV Then, the third photoelectric conversion layer 50 generates electricity. Finally, only the first light source X1 is not absorbed but reflected. In other words, using the multi-gap design of the first photoelectric conversion layer 30 , the second photoelectric conversion layer 40 and the third photoelectric conversion layer 50 of the present invention, light source absorption conversion in a specific wavelength range can be performed for different wavelengths. In particular, the related materials (SiN, a-Si and SiSn) of the present invention are easier to obtain, lower in cost and wider in energy gap range than traditional GaInP, GaAs and Ge.

如图5所示为本发明的能隙分布的示意图,其中的Ef表示费米能阶,而Ev为价带,Ec为导带。而图6则显示不同的吸收系数曲线分布状态(第一曲线L1、第二曲线L2及第三曲线L3分别为SiN、a-Si及SiSn的吸收光谱曲线,而第四曲线L4为太阳光的光谱曲线),SiN、a-Si及SiSn的能隙是介于1.1至2.3eV之间,在吸收的范围上可分别吸收太阳光的各光波段,而本发明是将其分别整合于该第一光电转换层30、该第二光电转换层40及该第三光电转换层50中,使太阳光的各光波段能分别于各层中被吸收转换,达到大范围的高吸收效果(由图6可知,SiN、a-Si及SiSn的吸收光谱曲线在整合后可接近太阳光的光谱曲线)。Figure 5 is a schematic diagram of the energy gap distribution of the present invention, where Ef represents the Fermi level, Ev represents the valence band, and Ec represents the conduction band. And Fig. 6 shows different distribution states of absorption coefficient curves (the first curve L1, the second curve L2 and the third curve L3 are the absorption spectrum curves of SiN, a-Si and SiSn respectively, and the fourth curve L4 is the absorption spectrum curve of sunlight spectral curve), the energy gaps of SiN, a-Si and SiSn are between 1.1 and 2.3eV, and they can respectively absorb each light band of sunlight in the range of absorption, and the present invention integrates them respectively in the first In a photoelectric conversion layer 30, the second photoelectric conversion layer 40 and the third photoelectric conversion layer 50, each light band of sunlight can be absorbed and converted in each layer respectively, so as to achieve a large-scale high absorption effect (shown in Fig. 6, it can be seen that the absorption spectrum curves of SiN, a-Si and SiSn can be close to the spectrum curve of sunlight after integration).

综上所述,本发明的优点及功效可归纳为:In summary, advantages and effects of the present invention can be summarized as:

1、吸收范围大。现有的太阳能电池,不论是单阶面或堆叠方式,在吸收的效果皆有一定限制,而本发明利用SiN、a-Si及SiSn所构成的光电转换层,能隙达到1.0~2.3ev之间,对于大部分的太阳光波段,皆可达到吸收的效果,故,吸收范围大。1. Large absorption range. Existing solar cells, whether they are single-level or stacked, have certain limitations in the absorption effect, and the photoelectric conversion layer made of SiN, a-Si and SiSn in the present invention has an energy gap of 1.0-2.3 eV. For most of the solar light bands, the absorption effect can be achieved, so the absorption range is large.

2、转换效率高。由于本发明的具有非晶硅多结构层薄膜的太阳能电池的能隙达到1.0~2.3ev之间,吸收的光波段范围大,因此可有效的提升其转换效率,若于该转换层中再加入一缓冲层,则可有效的改善p/i阶面,进而提升开路电压及短路电流,达到更高效能的转换效率。2. High conversion efficiency. Since the energy gap of the solar cell with the amorphous silicon multi-layer thin film of the present invention reaches between 1.0 and 2.3 eV, and the range of light bands absorbed is large, its conversion efficiency can be effectively improved. A buffer layer can effectively improve the p/i step surface, thereby increasing the open circuit voltage and short circuit current, and achieving higher conversion efficiency.

3、制造成本较低。由于本案采用SiN、a-Si及SiSn所构成的光电转换层,材料较易取得,故制造成本比传统的GaInP、GaAs及Ge的太阳能电池低。3. The manufacturing cost is low. Since the photoelectric conversion layer composed of SiN, a-Si and SiSn is used in this case, the materials are easier to obtain, so the manufacturing cost is lower than that of traditional GaInP, GaAs and Ge solar cells.

Claims (3)

1.一种具有非晶硅多结构层薄膜的太阳能电池,其特征在于,包括:1. A solar cell with an amorphous silicon multi-layer thin film, characterized in that it comprises: 一基板,可透光;A substrate, which can transmit light; 一第一穿透电膜,是设于该基板上且可透光;a first transparent electrical film, which is arranged on the substrate and can transmit light; 一第一光电转换层,是由一第一P层、一第一I层及一第一N层堆叠而成,其中,该第一I层是由a-SiN构成,而该第一光电转换层是设于该第一穿透电膜上,且可调变的能带宽是介于1.7ev至2.3ev之间;A first photoelectric conversion layer is formed by stacking a first P layer, a first I layer and a first N layer, wherein the first I layer is made of a-SiN, and the first photoelectric conversion layer The layer is arranged on the first transparent electric film, and the adjustable energy bandwidth is between 1.7ev and 2.3ev; 一第二光电转换层,是由一第二P层、一第二I层及一第二N层堆叠而成,其中,该第二I层是由a-Si所构成,而该第二光电转换层是设于该第一光电转换层上,且可调变的能带宽为1.7ev左右;A second photoelectric conversion layer is formed by stacking a second P layer, a second I layer and a second N layer, wherein the second I layer is made of a-Si, and the second photoelectric The conversion layer is arranged on the first photoelectric conversion layer, and the adjustable energy bandwidth is about 1.7 eV; 一第三光电转换层,是由一第三P层、一第三I层及一第三N层堆叠而成,其中,该第三I层是由a-SiSn构成,而该第三光电转换层是设于该第二光电转换层上,且可调变的能带宽介于0.08ev至1.1ev之间,又,该第一光电转换层的能隙是大于该第二光电转换层的能隙,且该第二光电转换层的能隙是大于该第三光电转换层的能隙;A third photoelectric conversion layer is formed by stacking a third P layer, a third I layer and a third N layer, wherein the third I layer is made of a-SiSn, and the third photoelectric conversion layer The layer is arranged on the second photoelectric conversion layer, and the adjustable energy bandwidth is between 0.08ev and 1.1ev, and the energy gap of the first photoelectric conversion layer is greater than the energy gap of the second photoelectric conversion layer Gap, and the energy gap of the second photoelectric conversion layer is greater than the energy gap of the third photoelectric conversion layer; 一第二穿透电膜,是设于该第三光电转换层的上方且可透光;A second transmissive film is arranged above the third photoelectric conversion layer and can transmit light; 一上电极,是设于该第二穿透电膜上。An upper electrode is arranged on the second TT film. 2.根据权利要求1所述的具有非晶硅多结构层薄膜的太阳能电池,其特征在于:所述第一、第二及第三光电转换层又可分别设有一第一缓冲层、一第二缓冲层及一第三缓冲层,又,所述第一光电转换层的能隙大于所述第二光电转换层的能隙,该第二光电转换层的能隙大于所述第三光电转换层的能隙。2. The solar cell with amorphous silicon multi-layer thin film according to claim 1, characterized in that: the first, second and third photoelectric conversion layers can be respectively provided with a first buffer layer, a first Two buffer layers and a third buffer layer, and the energy gap of the first photoelectric conversion layer is larger than the energy gap of the second photoelectric conversion layer, and the energy gap of the second photoelectric conversion layer is larger than the third photoelectric conversion layer. Layer gap. 3.根据权利要求1所述的具有非晶硅多结构层薄膜的太阳能电池,其特征在于:3. The solar cell with amorphous silicon multi-layer thin film according to claim 1, characterized in that: 所述第一光电转换层是以制程气体SiH4/NH3比例调变能带宽;The energy bandwidth of the first photoelectric conversion layer is modulated by the ratio of process gas SiH4/NH3; 所述第二光电转换层是以制程气体SiH4/H2比例调变能带宽;The energy bandwidth of the second photoelectric conversion layer is modulated by the ratio of process gas SiH4/H2; 所述第三光电转换层是以溅镀或蒸镀方式调变能带宽。The energy bandwidth of the third photoelectric conversion layer is modulated by sputtering or vapor deposition.
CN200810084631A 2008-03-14 2008-03-14 Solar cell with amorphous silicon multi-structure layer film Pending CN101533866A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280587A (en) * 2010-12-31 2011-12-14 友达光电股份有限公司 Stacked solar cell module
CN102312530A (en) * 2010-07-07 2012-01-11 鸿富锦精密工业(深圳)有限公司 Integrated solar energy tile and manufacturing method thereof
CN103000701A (en) * 2012-12-05 2013-03-27 中山联合光电科技有限公司 A new type of solar cell

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102312530A (en) * 2010-07-07 2012-01-11 鸿富锦精密工业(深圳)有限公司 Integrated solar energy tile and manufacturing method thereof
CN102280587A (en) * 2010-12-31 2011-12-14 友达光电股份有限公司 Stacked solar cell module
CN103000701A (en) * 2012-12-05 2013-03-27 中山联合光电科技有限公司 A new type of solar cell

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